WO2014183457A1 - Friction power generator - Google Patents

Abstract

A friction power generator comprises a first electrode layer (11), a first polymer insulating layer (12), and a second electrode layer (13) that are successively stacked up, a support portion (14) being provided between the first polymer insulating layer and the second electrode layer, the support portion comprising a zinc oxide nanowire array (141) and a protective layer (142) wrapping the zinc oxide nanowire array, and the first electrode layer and the second electrode layer being two output ends for outputting the voltage or the current of the friction power generator. The friction power generator uses the zinc oxide nanowire array wrapped by the protective layer as a support portion, and a separation space is formed between the friction surfaces accordingly, thereby basically separating the friction layers.

Description

 Friction generator

Technical field

 The present invention relates to a friction generator, and more particularly to a friction generator provided with a separation support. Background technique

 With the continuous improvement of the modern living standards and the accelerating pace of life, there have been self-generating devices that are easy to apply and have low dependence on the environment. Existing self-generating devices typically utilize the piezoelectric properties of the material. For example, in 2006, Professor Wang Zhonglin of the Georgia Institute of Technology in the United States successfully converted mechanical energy into electrical energy in the nanometer scale, and developed the world's smallest generator-nano generator. The basic principle of nanogenerators is: When nanowires (NWs) are dynamically stretched under external forces, a piezoelectric potential is generated in the nanowires, and the corresponding transient current flows at both ends to balance the Fermi level.

 Rubbing between objects and objects causes one party to be negatively charged and the other to be positively charged. This type of electricity, which is caused by friction between objects, is called triboelectricity. Frictional electricity is one of the most common phenomena in nature, but it is ignored because it is difficult to collect and utilize. If the application of triboelectric power to self-generating equipment is bound to bring more convenience to people's lives.

 The Applicant has developed a friction generator that relies on internal friction to induce electrical potential changes and the induced effects of metal plates on both sides to generate electrical energy. It is a new type of generator based on novel principles and methods. The generator can be realized under the conditions of lower cost, less raw materials and processing steps, and has the advantages of low cost, high performance, and no pollution to the environment. The generator is used in a wide range of applications, from human activities, transportation, wave fluctuations, wind power, mechanical vibration and many other activities. In addition, it can provide electrical energy for personal electronic products, environmental monitoring, medical science, etc., and therefore has great commercial and social benefits.

However, according to the working principle of the friction generator, during the operation of the generator, a friction surface is formed between the polymer and the metal electrode, or between the polymer, and the friction surface requires constant contact friction and separation. The generator does not have very much when it is in contact or in a separated state. Good output performance. Therefore, in order to be able to produce a generator with excellent performance, it is necessary to improve the structure of the generator so that the two friction surfaces can be well contacted and separated. Summary of the invention

 The technical problem solved by the invention is: overcome the defect that the existing friction generator is always in the contact state or the separation state, and the output performance is affected, and provides a friction generator which is vertically grown on the surface of the friction layer by the protective layer coating. The oxidized nanowire array serves as a separation support to overcome the above drawbacks.

 In order to solve the above technical problem, the first technical solution provided by the present invention is a friction generator including a first electrode layer, a first polymer insulating layer, and a second electrode layer which are sequentially stacked, wherein the A support portion is disposed between the high molecular polymer insulating layer and the second electrode layer, and the support portion includes a oxidized nanowire array and a protective layer covering the oxidized nanowire array, the first electrode layer and the second electrode layer It is the two outputs of the voltage or current of the friction generator.

 In the foregoing friction generator, the material of the second electrode layer is a metal or an alloy, and the oxidized nanowire array is vertically grown on either surface of the first polymer insulating layer and the opposite surface of the second electrode layer.

 In the foregoing friction generator, at least one surface of the surface of the first polymer polymer insulating layer and the opposite surface of the second electrode layer is provided with a micro/nano concave-convex structure, and the micro-nano set on the surface of the first polymer insulating layer The concave-convex structure is a nano concave-convex structure having a convex height of 50 nm to 300 nm; and the micro/nano concave-convex structure provided on the surface of the second electrode layer is a micro/nano concave-convex structure having a convex height of 300 ηηι-1 μη.

 In the above friction generator, the friction generator is provided with a second polymer insulating layer between the first polymer insulating layer and the second electrode layer, and the supporting portion is disposed on the first polymer Between the insulating layer and the second polymer insulating layer.

 In the foregoing friction generator, the oxidized nanowire array is vertically grown on either surface of the opposite surfaces of the first polymer polymer insulating layer and the second polymer polymer insulating layer.

In the friction generator of the foregoing, at least one surface of the opposite surface of the first polymer polymer insulating layer and the second polymer polymer insulating layer is provided with a micro/nano concave-convex structure, and the micro-nano concave-convex structure is convex A nano concave-convex structure having a height of 50 nm to 300 nm.

 In the above friction generator, the friction generator further includes an intermediate film layer disposed between the first polymer insulating layer and the second polymer insulating layer, the first polymer polymerization A support portion is disposed between the insulating layer and the intermediate film layer, and/or between the intermediate film layer and the second polymer insulating layer, and the oxidized nanowire array is vertically grown on the first polymer insulating layer and the intermediate layer On either surface of the opposite surface of the film layer, and/or on either surface of the second polymeric insulating layer and the opposing surface of the intermediate film layer.

 The friction generator of the foregoing, at least one surface of the first polymer insulating layer and the opposite surface of the intermediate film layer, and/or at least one surface of the opposite surface of the second polymer insulating layer and the intermediate film layer are disposed There is a micro-nano concave-convex structure, and the micro-nano concave-convex structure is a nano concave-convex structure having a convex height of 50 nm to 300 nm.

 In the above friction generator, the material used for the intermediate film layer is different from that of the first polymer polymer insulating layer and the second polymer polymer insulating layer, and is selected from the group consisting of polyimide film, aniline furfural resin film, and poly Furfural film, ethyl cellulose film, polyamide film, melamine furfural film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, polyethylene adipate film, Poly(diphenylene terephthalate) film, cellulose sponge film, regenerated sponge film, polyurethane elastomer film, styrene propylene copolymer film, styrene butadiene copolymer film, rayon film, polyacrylate polymerization Film, polyvinyl alcohol film, polyisobutylene film, polyethylene terephthalate film, polyvinyl butyral film, furfural phenol condensation film, neoprene film, butadiene propylene copolymer Any one of a film, a natural rubber film, a polyacrylonitrile film, an acrylonitrile vinyl chloride copolymer film, and a polyvinyl propylene glycol carbonate.

In the foregoing friction generator, the materials used for the first polymer insulating layer and/or the second polymer insulating layer are independently selected from the group consisting of polyimide film, aniline furfural resin film, and polyacetal film. , ethyl cellulose film, polyamide film, melamine furfural film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, polyethylene adipate film, poly-o-benzene a diallyl dicaptanate film, a cellulose sponge film, a regenerated sponge film, a polyurethane elastomer film, a styrene propylene copolymer film, a styrene butadiene copolymer film, a rayon film, a polyacrylate polymer film, Polyvinyl alcohol film, polyisobutylene film, polyethylene terephthalate Ester film, polyvinyl butyral film, furfural phenol condensation film, neoprene film, butadiene propylene copolymer film, natural rubber film, polyacrylonitrile film, acrylonitrile vinyl chloride copolymer film and polyethylene Any one of propylene glycol carbonates.

 In the foregoing friction generator, the material of the second electrode layer is selected from the group consisting of indium tin oxide, graphene, silver nanowire film, metal or alloy.

 In the foregoing friction generator, the material used for the first electrode layer is selected from the group consisting of indium tin oxide, graphene, silver nanowire film, metal or alloy.

 In the foregoing friction generator, the metal is gold, silver, platinum, palladium, aluminum, nickel, copper, titanium, chromium, tin, iron, manganese, phase, tungsten or vanadium; the alloy is an aluminum alloy, a titanium alloy, a magnesium alloy , niobium alloys, copper alloys, alloys, manganese alloys, nickel alloys, lead alloys, tin alloys, cadmium alloys, niobium alloys, indium alloys, gallium alloys, tungsten alloys, molybdenum alloys, niobium alloys or niobium alloys.

 In the aforementioned friction generator, the material used for the protective layer is polydecyl methacrylate.

 In the aforementioned friction generator, the height of the support portion is 20-500 μm. Preferably, the width is 0.5-2 mm; the length is 0.5 mm-3 cm.

 In the foregoing friction generator, the support portion is arranged in an array of a shape of a tic-tac-toe, a cross-word, a zebra, a cross or a word.

 In order to solve the above technical problem, the second technical solution provided by the present invention is a friction generator including a first electrode layer, a first polymer insulating layer, and a friction electrode layer, which are sequentially stacked. a second polymer polymer insulating layer and a second electrode layer; wherein the first polymer polymer insulating layer and the friction electrode layer, and/or the second polymer polymer insulating layer and the friction electrode layer are disposed The support portion includes a oxidized nanowire array and a protective layer covering the oxidized nanowire array, and the oxidized nanowire array is vertically grown on the opposite surfaces of the polymer polymer insulating layer and the friction electrode layer. a surface, wherein the oxidized nanowire array is vertically grown on any surface of the first polymer insulating layer and the opposite surface of the friction electrode layer and/or the second polymer insulating layer and the opposite surface of the friction electrode layer; The first electrode layer and the second electrode layer are one output end of a friction generator voltage or current; the friction electrode layer is a friction generator Another output terminal of the voltage or current.

The aforementioned friction generator, the first polymer insulating layer and the opposite surface of the friction electrode layer At least one surface, and/or at least one surface of the opposite surface of the second polymer insulating layer and the friction electrode layer is provided with a micro/nano concave-convex structure, and the micro-nano concave-convex structure disposed on the surface of the polymer insulating layer The nano concave-convex structure having a convex height of 50 nm to 300 nm; the micro/nano concave-convex structure provided on the surface of the friction electrode layer is a micro/nano concave-convex structure having a convex height of 300 ηηι-1 μη.

 In the foregoing friction generator, the materials used for the first polymer insulating layer and the second polymer insulating layer are independently selected from the group consisting of polyimide film, aniline resin film, polyacetal film, and ethyl group. Cellulose film, polyamide film, melamine furfural film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, polyethylene adipate film, polyphthalic acid Diallyl ester film, cellulose sponge film, regenerated sponge film, polyurethane elastomer film, styrene propylene copolymer film, styrene butadiene copolymer film, rayon film, polyacrylate polymer film, polyvinyl alcohol Film, polyisobutylene film, polyethylene terephthalate film, polyvinyl butyral film, furfural phenol condensation film, neoprene film, butadiene propylene copolymer film, natural rubber film, Any one of a polyacrylonitrile film, an acrylonitrile vinyl chloride copolymer film, and a polyvinyl propylene glycol carbonate.

 In the foregoing friction generator, the material used for the first electrode layer and the second electrode layer is selected from the group consisting of indium tin oxide, graphene, silver nanowire film, metal or alloy, and the material of the friction electrode layer is metal or alloy; Wherein, the metal is gold, silver, platinum, palladium, aluminum, nickel, copper, titanium, chromium, tin, iron, manganese, phase, tungsten or vanadium; the alloy is an aluminum alloy, a titanium alloy, a magnesium alloy, a bismuth alloy, a copper alloy , alloys, manganese alloys, nickel alloys, lead alloys, tin alloys, cadmium alloys, niobium alloys, indium alloys, gallium alloys, tungsten alloys, molybdenum alloys, niobium alloys or niobium alloys.

 In the aforementioned friction generator, the material used for the protective layer is polydecyl methacrylate.

 In the aforementioned friction generator, the height of the support portion is 20-500 μm. Preferably, the width is 0.5-2 mm; the length is 0.5 mm-3 cm.

 In the foregoing friction generator, the support portion is arranged in an array of a shape of a tic-tac-toe, a cross-word, a zebra, a cross or a word.

The friction generator of the present invention forms a friction layer interface between the polymer polymer insulating layer and the metal electrode layer, or the polymer polymer insulating layer, and is formed by using a protective layer (PMMA)-coated oxidized nanowire array. a support portion, thereby forming a separation space between the two friction layers, The effect of the basic separation of the friction layer can be achieved. In addition, since the support portion of the oxidized nanowire array coated by the protective layer (PMMA) has good elastic properties, the two friction layers can be separated quickly after contact, rapidly increasing the potential difference, thereby driving external current flow, and improving current output. . Furthermore, since the protective layer (PMMA) is coated on the outside of the oxidized nanowire array, the occurrence of dissolution or frictional damage of the oxidized nanowire array is avoided. Finally, the oxidized nanowires have piezoelectric properties, and in the case of extrusion friction, a certain piezoelectric energy can be generated, and the piezoelectric electrical energy generated by the oxidized nanowires is superimposed with the frictional electrical energy generated by the friction generator, so that the present invention The friction generator outputs more power and better performance. DRAWINGS

 1 is a schematic perspective view of a specific embodiment of a friction generator of the present invention.

 2 is a schematic cross-sectional view of the friction generator of FIG. 1 of the present invention.

 3 is a schematic perspective view showing another embodiment of the friction generator of the present invention.

 4 is a schematic cross-sectional view of the friction generator of FIG. 3 of the present invention.

 FIG. 5 is a schematic perspective structural view of another embodiment of the friction generator of the present invention.

 Figure 6 is a cross-sectional view showing the friction generator of Figure 5 of the present invention.

 7 is a schematic perspective view showing another embodiment of the friction generator of the present invention.

 Figure 8 is a cross-sectional view showing the friction generator of Figure 7 of the present invention.

 FIG. 9 is a schematic perspective view showing another arrangement manner of the support portion of the present invention.

 Figure 10 is a cross-sectional view showing the manner in which the support portion of Figure 9 is disposed.

 Figure 11 is a schematic view showing another arrangement of the support portion of the present invention.

 Figure 12 is a schematic view showing another arrangement of the support portion of the present invention.

 Figure 13 is a schematic view showing another arrangement of the support portion of the present invention. detailed description

 In order to fully understand the objects, features and advantages of the present invention, the invention will be described in detail.

The invention relates to a friction generator, a protective layer (PMMA) coated oxidized nanowire array As the support portion, a separation space is formed between the two friction layers, and the effect of the separation of the friction layers can be achieved.

 As shown in FIG. 1 and FIG. 2, a friction generator 1 includes a first electrode layer 11, a first polymer insulating layer 12, and a second electrode layer 13 which are sequentially stacked, wherein the first polymer is polymerized. A support portion 14 is disposed between the material insulating layer 12 and the second electrode layer 13, and the support portion 14 includes a oxidized nanowire array 141 and a protective layer 142 covering the oxidized nanowire array. The oxidized nanowire array 141 is vertically grown on any surface of the opposite surfaces of the first polymer insulating layer 12 and the second electrode layer 13; the first electrode layer 11 and the second electrode layer 13 are friction generators The output of voltage or current.

 As shown in FIG. 2, in a specific embodiment of the present invention, the material used for the second electrode layer 13 is a metal or an alloy, wherein the metal is gold, silver, platinum, palladium, aluminum, nickel, copper, titanium, chromium, tin. , iron, manganese, phase, tungsten or vanadium; alloys are aluminum alloys, titanium alloys, magnesium alloys, niobium alloys, copper alloys, alloys, manganese alloys, nickel alloys, lead alloys, tin alloys, cadmium alloys, niobium alloys, indium Alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or niobium alloy. Specifically, the friction generator 1 includes: a first electrode layer 11, a first polymer insulating layer 12, a second electrode layer 13, and a support portion 14; the first electrode layer 11 is disposed on the first polymer insulating layer The first side surface of the first polymer layer 12 is provided with a support portion 14 on the second side surface of the first polymer polymer insulating layer 12, and the support portion 14 includes oxidation which is vertically grown on the surface of the first polymer polymer insulating layer 12. The nanowire array 141 and the protective layer 142 (using polydecyl methacrylate) coated with the oxidized nanowire array are used. The surface of the first polymer insulating layer 12 provided with the support portion 14 is disposed opposite to the surface of the second electrode layer 13 (for example, a double-sided adhesive, a universal adhesive, a polyphenylene ether, a thermoplastic engineering plastic such as polyolefin, etc.) The edges are bonded) to form a friction generator 1. The first electrode layer 11 and the second electrode layer 13 serve as outputs of the voltage or current of the friction generator 1.

The surface of the first polymer insulating layer 12 provided with the support portion 14 and at least one surface of the surface of the second electrode layer 13 are provided with a micro/nano concave-convex structure (not shown), and the surface of the polymer polymer insulating layer is disposed The micro-nano-convex structure is a nano-concave structure having a protrusion height of 50 nm to 300 nm; and the micro-nano-convex structure provided on the surface of the second electrode layer 13 is a micro-nano-convex structure having a protrusion height of 300 ηηι-1 μη. Preferably, the surface of the second electrode layer 13 is provided with a micro/nano-convex structure (not shown). Further, the oxidized nanowires may be grown on the second electrode layer 13 to form the support portion 14, and thus it is preferable that the micro/nano concave-convex structure is provided on the first polymer insulating layer 12. The micro-nano concave-convex structure and the support portion 14 are respectively disposed on different layers to facilitate manufacturing.

 The first electrode layer 11 is not particularly limited in terms of materials used, and materials capable of forming a conductive layer are all within the scope of the present invention, such as indium tin oxide, graphite electrode, silver nanowire film, and metal or alloy. The metal is gold, silver, platinum, palladium, aluminum, nickel, copper, titanium, chromium, tin, iron, manganese, phase, tungsten or vanadium; the alloy is aluminum alloy, titanium alloy, magnesium alloy, niobium alloy, copper alloy, word Alloys, manganese alloys, nickel alloys, lead alloys, tin alloys, cadmium alloys, niobium alloys, indium alloys, gallium alloys, tungsten alloys, molybdenum alloys, niobium alloys or niobium alloys.

 The material of the first polymer insulating layer 12 is selected from the group consisting of polyimide film, aniline resin film, polyacetal film, ethyl cellulose film, polyamide film, melamine furfural film, polyethylene glycol butyl Acid ester film, cellulose film, cellulose acetate film, polyethylene adipate film, diallyl phthalate film, cellulose sponge film, regenerated sponge film, polyurethane elastomer film , styrene propylene copolymer film, styrene butadiene copolymer film, rayon film, polyacrylate polymer film, polyvinyl alcohol film, polyisobutylene film, polyethylene terephthalate film, poly Vinyl butyral film, furfural phenol polycondensate film, neoprene film, butadiene propylene copolymer film, natural rubber film, polyacrylonitrile film, acrylonitrile vinyl chloride copolymer film and polyethylene propylene glycol carbon Any of the acid salts.

As shown in FIG. 3 and FIG. 4, in a specific embodiment of the present invention, the friction generator 1 is provided with a second polymer insulation between the first polymer insulating layer 12 and the second electrode layer 13. Layer 15. Specifically, the friction generator 1 includes: a first electrode layer 11, a first polymer insulating layer 12, a second polymer insulating layer 15, a second electrode layer 13, and a support portion 14; the first electrode layer 11 The second electrode layer 13 is disposed on the first side surface of the first polymer insulating layer 12, and the second electrode layer 13 is disposed on the first side surface of the second polymer insulating layer 15 in the second polymer insulating layer 15. The second side surface is provided with a support portion 14 including an oxidized nanowire array 141 vertically grown on the surface of the second polymer insulating layer 15 and a protective layer covering the oxidized nanowire array (Polymer) Ethyl acrylate) 142. The surface of the second polymer insulating layer 15 provided with the support portion 14 is laminated to the second side surface of the first polymer polymer insulating layer 12 Placed, composed of friction generator 1. The first electrode layer 11 and the second electrode layer 13 serve as outputs of the voltage or current of the friction generator 1.

 a surface of the second polymer insulating layer 15 provided with the support portion 14 and at least one surface of the second side surface of the first polymer polymer insulating layer 12 are provided with a micro/nano concave-convex structure (not shown), and the polymer The micro/nano concave-convex structure provided on the surface of the polymer insulating layer is a nano concave-convex structure having a convex height of 50 nm to 300 nm. Preferably, a micro-nano-convex structure is provided on the second side surface of the first polymer-polymer insulating layer 12.

 Further, the oxidized nanowires may be grown on the first polymer insulating layer 12 to form the support portion 14, and thus it is preferable that the micro/nano uneven structure is provided on the second polymer insulating layer 15. The micro-nano uneven structure and the support portion 14 are preferably disposed on different levels, respectively, to facilitate fabrication.

 The first electrode layer 11 and the second electrode layer 13 are not particularly limited in terms of materials used, and materials capable of forming a conductive layer are all within the scope of the present invention, such as indium tin oxide, graphene electrodes, and silver nanowire films. And a metal or an alloy wherein the metal is gold, silver, platinum, palladium, aluminum, nickel, copper, titanium, chromium, tin, iron, manganese, phase, tungsten or vanadium; the alloy is an aluminum alloy, a titanium alloy, a magnesium alloy, a tantalum Alloys, copper alloys, alloys, manganese alloys, nickel alloys, lead alloys, tin alloys, cadmium alloys, niobium alloys, indium alloys, gallium alloys, tungsten alloys, molybdenum alloys, niobium alloys or niobium alloys.

 The materials of the first polymer insulating layer 12 and the second polymer insulating layer 15 are preferably different, and are independently selected from the group consisting of polyimide film, aniline furfural resin film, polyacetal film, and ethyl cellulose. Film, polyamide film, melamine furfural film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, polyethylene adipate film, polyphthalic acid diene a propyl ester film, a cellulose sponge film, a regenerated sponge film, a polyurethane elastomer film, a styrene propylene copolymer film, a styrene butadiene copolymer film, a rayon film, a polyacrylate polymer film, a polyvinyl alcohol film, Polyisobutylene film, polyethylene terephthalate film, polyvinyl butyral film, furfural phenol condensation film, neoprene film, butadiene propylene copolymer film, natural rubber film, polypropylene Any one of a nitrile film, an acrylonitrile vinyl chloride copolymer film, and a polyvinyl propylene glycol carbonate.

As shown in FIG. 5 and FIG. 6 , in one embodiment, the friction generator 1 may further include an intermediate film layer 16 disposed on the first polymer insulating layer 12 . Between the second polymer insulating layer 15 and the first polymer insulating layer 12 and the intermediate film layer 16, and/or the intermediate film layer 16 and the second polymer insulating layer 15 A support portion 14 is provided between them. Specifically, the friction generator 1 includes a first electrode layer 11, a first polymer insulating layer 12, an intermediate film layer 16, a second polymer insulating layer 15, a second electrode layer 13, and a support portion 14; An electrode layer 11 is disposed on the first side surface of the first polymer insulating layer 12, the second electrode layer 13 is disposed on the first side surface of the second polymer insulating layer 15, and the intermediate film layer 16 is disposed on the first side Between the high molecular polymer insulating layer 12 and the second polymer insulating layer 15, and at least one of the opposing surfaces of the first polymer insulating layer 12 and the intermediate film layer 16, and/or the intermediate film layer 16 and at least one surface of the opposite surface of the second polymer insulating layer 15 is provided with a support portion 14; the support portion 14 includes a oxidized nanowire array 141 and a protective layer covering the oxidized nanowire array (polyacrylic acid) Ester ester) 142. The intermediate film layer 16 and the second side surface of the first polymer insulating layer ₁₂ and the second polymer insulating layer

The second side surfaces of the 15 are stacked to form a friction generator 1. First electrode layer 11 and second electrode layer

13 is the output of the voltage or current of the friction generator 1. The oxidized nanowire array 141 is vertically grown on either surface of the first polymer insulating layer 12 and the opposite surface of the intermediate film layer 16, and/or the opposite surfaces of the second polymer insulating layer 15 and the intermediate film layer 16. On either surface.

 On at least one surface of the first polymer interlayer insulating layer 12 and the opposite surface of the intermediate film layer 16, and/or at least one surface of the opposing surface of the second polymer insulating layer 15 and the intermediate film layer 16, The nano concave-convex structure (not shown) is a nano concave-convex structure having a convex height of 50 nm to 300 nm. Preferably, the micro-nano-convex structure and the support portion 14 are respectively disposed on different layers to facilitate manufacturing.

 The first electrode layer 11 and the second electrode layer 13 are not particularly limited in terms of materials used, and materials capable of forming a conductive layer are all within the scope of the present invention, such as indium tin oxide, graphene electrodes, and silver nanowire films. And a metal or an alloy wherein the metal is gold, silver, platinum, palladium, aluminum, nickel, copper, titanium, chromium, tin, iron, manganese, phase, tungsten or vanadium; the alloy is an aluminum alloy, a titanium alloy, a magnesium alloy, a tantalum Alloys, copper alloys, alloys, manganese alloys, nickel alloys, lead alloys, tin alloys, cadmium alloys, niobium alloys, indium alloys, gallium alloys, tungsten alloys, molybdenum alloys, niobium alloys or niobium alloys.

Material used for the first polymer insulating layer 12 and the second polymer insulating layer 15 Independently selected from the group consisting of polyimide film, aniline furfural resin film, polyacetal film, ethyl cellulose film, polyamide film, melamine furfural film, polyethylene glycol succinate film, cellulose film , cellulose acetate film, polyethylene adipate film, poly(phenylene terephthalate film), cellulose sponge film, regenerated sponge film, polyurethane elastomer film, styrene propylene copolymer film , styrene butadiene copolymer film, rayon film, polyacrylate polymer film, polyvinyl alcohol film, polyisobutylene film, polyethylene terephthalate film, polyvinyl butyral film, Any one of a furfural phenol polycondensate film, a neoprene film, a butadiene propylene copolymer film, a natural rubber film, a polyacrylonitrile film, an acrylonitrile vinyl chloride copolymer film, and a polyvinyl propylene glycol carbonate .

 The material used for the intermediate film layer 16 is different from that of the first polymer polymer insulating layer 12 and the second polymer polymer insulating layer 15, and may be a polyimide film, an aniline resin film, a polyacetal film, or a B. Cellulose film, polyamide film, melamine furfural film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, polyethylene adipate film, polyphthalate Acid diallyl ester film, cellulose sponge film, regenerated sponge film, polyurethane elastomer film, styrene propylene copolymer film, styrene butadiene copolymer film, rayon film, polyacrylate polymer film, polyethylene Alcohol film, polyisobutylene film, polyethylene terephthalate film, polyvinyl butyral film, furfural phenol condensation film, neoprene film, butadiene propylene copolymer film, natural rubber film Any one of a polyacrylonitrile film, an acrylonitrile vinyl chloride copolymer film, and a polyvinyl propylene glycol carbonate.

As shown in FIG. 7 and FIG. 8, another friction generator 2 includes a first electrode layer 21, a first polymer insulating layer 22, a friction electrode layer 23, and a second polymer insulation. a layer 24 and a second electrode layer 25; wherein the first polymer polymer insulating layer 22 and the friction electrode layer 23, and/or between the second polymer insulating layer 24 and the friction electrode layer 23 are provided The support portion 26 includes a oxidized nanowire array 261 and a protective layer 262 coated with an oxidized nanowire array. The oxidized nanowire array is vertically grown on the high molecular polymer insulating layer and the friction electrode layer. On either surface of the surface; the first electrode layer 21 and the second electrode layer 25 are connected together as one output of the voltage or current of the friction generator 2; the friction electrode 23 is another voltage or current of the friction generator 2 An output. First polymer insulation layer 22 and triboelectric At least one surface of the opposite surface of the pole layer 23, and at least one surface of the opposite surface of the second polymer insulating layer 24 and the friction electrode layer 23 are provided with a micro/nano concave-convex structure (not shown), the polymer polymerization The micro/nano concave-convex structure disposed on the surface of the insulating layer is a nano concave-convex structure having a convex height of 50 nm to 300 nm; and the micro-nano concave-convex structure provided on the surface of the friction electrode layer 23 is a micro-nano concave-convex structure having a convex height of 300 nm-l μη .

 In a specific embodiment, the friction generator 2 includes: a first electrode layer 21, a first polymer insulating layer 22, a friction electrode layer 23, a second polymer insulating layer 24, a second electrode layer 25, and The first electrode layer 21 is disposed on the first side surface of the first polymer layer 22, the second electrode layer 25 is disposed on the first side surface of the second polymer insulating layer 24, and the friction electrode layer 23 is disposed. Between the first polymer insulating layer 22 and the second polymer insulating layer 24, on the second side surface of the first polymer insulating layer 22 and the second polymer insulating layer 24 At least one surface on the two side surfaces is provided with a support portion 26 including a oxidized nanowire array 261 and a protective layer (polydecyl acrylate) 262 coated with an oxidized nanowire array. The second side surface of the first polymer insulating layer 22 is laminated with the first side surface of the friction electrode layer 23, and the second side surface of the second polymer insulating layer 24 and the second side of the friction electrode layer 23 The side surfaces are stacked to form a friction generator 2. The first electrode layer 21 and the second electrode layer 25 are connected together as an output terminal of a voltage or current of the friction generator 2, and the friction electrode layer 23 serves as an output terminal of another voltage or current of the friction generator 2.

 At least one of the two surfaces of the first side surface of the first polymer polymer insulating layer 22 and the first side surface of the friction electrode layer 23 is provided with a micro/nano concave-convex structure (not shown), and the second polymer At least one of the two surfaces of the second side surface of the polymer insulating layer 24 opposite to the second side surface of the friction electrode layer 23 is provided with a micro/nano concave-convex structure (not shown). The micro/nano-convex structure provided on the surface of the polymer polymer insulating layer is a nano-concave structure having a protrusion height of 50 nm to 300 nm; and the micro-nano-convex structure provided on the surface of the friction electrode layer 23 is a protrusion height of 300 ηηι-1 μηι Nano concave and convex structure. Preferably, the micro/nano concave-convex structure and the support portion 26 are respectively disposed on different levels to facilitate manufacturing.

The material used for the friction electrode layer 23 is a metal or an alloy, wherein the metal is gold, silver, platinum, palladium, aluminum, nickel, copper, titanium, chromium, tin, iron, manganese, phase, tungsten or vanadium; the alloy is aluminum alloy, titanium Alloy, magnesium alloy Gold, bismuth alloy, copper alloy, alloy, manganese alloy, nickel alloy, lead alloy, tin alloy, cadmium alloy, niobium alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or niobium alloy.

 The materials used for the first polymer insulating layer 22 and the second polymer insulating layer 24 are independently selected from the group consisting of polyimide film, aniline furfural resin film, polyacetal film, ethyl cellulose film, and poly Amide film, melamine furfural film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, polyethylene adipate film, poly(phenylene terephthalate) film , cellulose sponge film, regenerated sponge film, polyurethane elastomer film, styrene propylene copolymer film, styrene butadiene copolymer film, rayon film, polyacrylate polymer film, polyvinyl alcohol film, polyisobutylene film , polyethylene terephthalate film, polyvinyl butyral film, furfural phenol condensation film, neoprene film, butadiene propylene copolymer film, natural rubber film, polyacrylonitrile film, Any one of an acrylonitrile vinyl chloride copolymer film and a polyvinyl propylene glycol carbonate.

 The materials used for the first electrode layer 21 and the second electrode layer 25 are selected from the group consisting of indium tin oxide, graphene, silver nanowire film, metal or alloy; wherein the metal is gold, silver, platinum, palladium, aluminum, nickel, copper, Titanium, chromium, tin, iron, manganese, phase, tungsten or vanadium; alloys are aluminum alloys, titanium alloys, magnesium alloys, niobium alloys, copper alloys, alloys, manganese alloys, nickel alloys, lead alloys, tin alloys, cadmium alloys , niobium alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, niobium alloy or niobium alloy.

 The friction generator of the present invention uses a protective layer (PMMA)-coated oxidized nanowire array as a support portion, thereby forming a separation space between the two friction layers, thereby achieving the effect of substantially separating the friction layers.

 Since the support layer of the protective layer (PMMA) coated oxidized nanowire array has good elastic properties, the two friction layers can be separated quickly after contact, and the potential difference is rapidly increased, thereby driving external current flow and increasing current output.

Since the protective layer (PMMA) is coated on the outside of the oxidized nanowire array, the occurrence of dissolution or friction damage of the oxidized nanowire array is avoided. In addition, the oxidized nanowire has piezoelectric properties, and a certain piezoelectric energy can be generated in the case of extrusion friction, and the piezoelectric electrical energy generated by the oxidized nanowire is superimposed with the frictional electrical energy generated by the friction generator, so that the present invention The friction generator outputs more power and better performance. Hereinafter, the arrangement position of the support portion of the present invention will be described in detail by taking the friction generator of the structure shown in Figs. 3 and 4 as an example. Those skilled in the art can easily apply the following setting relationships to the friction generators of other structures mentioned in the present invention.

 The support portion is preferably, but not limited to, a cylindrical body and a quadrangular prism. The support portion is disposed at both side edges of the first polymer polymer insulating layer or the second polymer polymer insulating layer to serve as a support, and at the same time reduce the friction area. The height of the support is 20-500 μ ηι. Preferably, the width is 0.5-2 mm; the length is 0.5 mm-3 cm. The arrangement of the support portions is preferably arranged in an array, and the shape is not limited, for example, an array arrangement of a tic-tac-toe, a cross-word, a zebra, a cross or a mouth-shaped shape.

 As shown in Fig. 9 and Fig. 10, when the area of the friction generator is large, a plurality of strip-shaped support portions can be arranged in parallel, which serves as a regular support and is also well produced.

 The support portion may also be disposed at four end angles of the polymer polymer insulating layer (as shown in FIG. 11), disposed at the peripheral edge of the polymer polymer insulating layer (as shown in FIG. 12), and the parallel array is disposed on the polymer. On the polymer insulation layer (as shown in Figure 13).

 The preparation method of the support portion of the present invention will be described in detail below.

 a. Photolithographically designed areas of the polymer polymer layer, or metal or alloy layer

 A photoresist layer is disposed on the polymer polymer insulating layer, and then the surface of the polymer polymer insulating layer is photolithographically formed to form a designed oxide nanowire growth region on the surface of the polymer polymer insulating layer. The present invention has no special requirements for the photoresist material used, and a photoresist material conventionally used for substrate photolithography can be applied to the present invention, for example, including 5-60 mass% photosensitive resin (for example, epoxy resin modified), 5- 50% by mass of a reactive diluent (e.g., polyethylene glycol dimercapto acrylate), 0.1-15 mass% of a photoinitiator. According to this step, those skilled in the art can easily complete the area where the oxidized growth is etched on the metal or alloy layer.

 An oxidized seed layer having a thickness of 30 to 50 nm is formed on one surface of the high molecular polymer insulating layer or the metal or alloy layer by conventional spray sputtering prior to the provision of the photoresist layer.

Before the photoresist layer is disposed on the polymer insulating layer, the electrode layer is disposed on the polymer polymer insulating layer by a conventional method in the art, for example, by using RF sputtering, gold, platinum, titanium or nickel. Any one of a metal or an alloy such as titanium is sputtered onto the high molecular polymer insulating layer. b. Vertical growth of the oxidation word in the area where the oxidized oxidized word grows

In the growth region of the lithography, the oxidized nanowire array is grown by wet chemical method, and the oxidized nanowire array is grown only on the surface of the exposed polymer insulating layer. The present invention uses a conventional wet chemical method to grow an oxidized nanowire array, for example, a mixture of cyclohexamethylenetetramine (HMTA) and nitric acid hexahydrate (ΖηΝ0 ₃ ·6(Η ₂ 0)) as a culture solution. The oxidized nanowire array is grown at a suitable temperature, for example 80-95 V. Specifically, in a specific embodiment, a 0.1 mol/L concentration consisting of equimolar cyclohexamethylenetetramine (HMTA) and nitric acid hexahydrate (ΖηΝ0 ₃ ·6(Η ₂ 0)) is used. The culture medium was placed with the oxidized seed layer facing down, placed on top of the culture solution, and grown at 85 ° C in a mechanical convection oven (Model: Yamato DKN400, Santa Clara, Calif.) with deionized water. Rinse and dry in air to obtain an array of oxidized nanowires.

 c covering the surface of the oxidized nanowire array layer with a protective layer

 The protective layer is overlaid on the oxidized nanowire array by spin coating.

 d. Stripping the photoresist material to form a support portion.

 The micro/nano relief structure of the present invention can be prepared by a variety of methods, such as pressing with a silicon template having a specific regular raised structure, sanding a metal surface with sandpaper, and other methods. A method of preparing the micro-nano-convex structure will be described in detail below.

 S1 creates a silicon template. A regular pattern is formed on the surface by photolithography of the silicon wafer. The patterned silicon wafer is anisotropically etched by wet etching, and a concave quadrangular pyramid array structure can be engraved, or it can be isotropically etched by a dry engraving process to engrave a concave cube array. structure. After the engraving, the template was cleaned with acetone and isopropyl alcohol, and then all the templates were subjected to surface silanization in a trimethyl chlorosilane atmosphere, and the treated silicon template was used.

 S2 A polymer film having a surface of a micro-nano uneven structure is produced. The polymer slurry is first applied to the surface of the silicon template, vacuum degassed, and the excess mixture on the surface of the wafer is removed by spin coating to form a thin polymer liquid film. The entire template was cured and then peeled off to obtain a uniform polymer film having a specific microstructure array.

When the layers of the friction generator of the present invention are bent downward, due to the existence of the micro/nano concave-convex structure, between the polymer polymer insulating layer and the metal electrode layer in the friction generator, or the high molecular polymer The insulating layers rub against each other to generate an electrostatic charge, and the generation of the static charge changes the capacitance between the first electrode layer and the second electrode layer, or between the first electrode layer and the second electrode layer and the friction electrode layer, respectively. Thereby, a potential difference occurs between the first electrode layer and the second electrode layer, or between the first electrode layer and the second electrode layer and the friction electrode layer, respectively. Due to the potential difference between the electrodes, the free electrons will flow from the side with the lower potential to the side with the higher potential through the external circuit, thereby forming a current in the external circuit.

 The friction generator of the present invention uses a protective layer-coated oxidized nanowire array as a support portion, thereby forming a separation space between the two friction layers, thereby achieving the effect of substantially separating the friction layers. After the two friction layers are in contact, they can be separated faster, and the potential difference is rapidly increased, thereby driving the external current to flow and increasing the current output.

 The oxidized nanowire has piezoelectric properties, and can generate a certain piezoelectric electric energy in the case of extrusion friction, and the piezoelectric electric energy generated by the oxidation nanowire is superimposed with the friction electric energy generated by the friction generator to make the friction of the present invention. The generator outputs more power and performance.

It is understood that this should not be construed as limiting the scope of the claims. Example 1

 As shown in Figures 1 and 2, the friction generator of this embodiment has a size of 3 cm x 3 cm and a total thickness of about 500 μηη. The friction generator first electrode layer 11, the first polymer insulating layer 12, the second electrode layer 13, and the support portion 14, the first electrode layer 11 and the second electrode layer 13 serve as voltage or current of the friction generator 1. The output.

A polyimide film (Kapton, thickness lOOum) DuPont 500HN) was used as the first polymer insulating layer 12. One surface of the first polymer insulating layer 12 is plated with a gold film having a thickness of 100 nm, which is the first electrode layer 11. Two strip-shaped support portions 14 (height 500 μ ηι, width 0.5 mm, length 3 cm) are provided on the other surface of the first polymer polymer insulating layer 12, and the support portion 14 includes vertical growth in the first An oxidized nanowire array 141 on the surface of a high molecular polymer insulating layer 12 and a protective layer 142 (using polydecyl methacrylate) coated with an oxidized nanowire array. A copper foil having a thickness of 50 μm was used as the second electrode layer 13, and one surface of the copper foil was sanded by a fine sandpaper to form an irregular micro-nano-convex structure having a projection height in the range of 350 to 500 nm.

 The surface of the second electrode layer 13 having the micro/nano uneven structure faces the surface of the first polymer insulating layer 12 having the support portion 14, and the second electrode layer 13 is stacked on the first polymer insulating layer 12. , get the friction generator sample 1#. The edge of the friction generator is sealed with a common tape.

 The friction generator sample 1# exhibits a typical open circuit characteristic in the measurement of I-V (current-voltage). The stepping motor with periodic oscillation (0.33 Hz and 0.13% deformation) caused the friction generator sample 1# to undergo periodic bending and release. The maximum output voltage and current signal of the friction generator sample 1# reached 12V and 2 μΑ, respectively. . Example 2

 As shown in Figs. 3 and 4, the friction generator of this embodiment has a size of 3 cm x 3 cm and a total thickness of about 600 μm. The friction generator includes a first electrode layer 11, a first polymer insulating layer 12, a second polymer insulating layer 15, a second electrode layer 13, and a support portion 14. The first electrode layer 11 and the second electrode layer 13 serve as outputs of the voltage or current of the friction generator 1.

 A polyimide film (thickness lOOum) was used as the first polymer insulating layer 12. On one surface thereof, a micro/nano concave-convex structure having a convex height of 150 nm is provided, and the other surface is plated with an aluminum thin film having a thickness of 100 nm, which is the first electrode layer 11.

 A polyethylene terephthalate film (thickness lOOum) was used as the second polymer insulating layer 15. A support portion 14 is provided on one surface thereof, and an aluminum film having a thickness of 100 nm is plated on the other surface, and the aluminum film is the second electrode layer 13. The support portion 14 is disposed at four corners of the second polymer insulating layer 15 as shown in Fig. 11, and has a size of a small square of 2 mm x 2 mm having a height of 250 μm. The support portion 14 includes an oxidized nanowire array 141 vertically grown on the surface of the second polymer insulating layer 15 and a protective layer 142 (using polydecyl methacrylate) coated with the oxidized nanowire array.

The surface of the first polymer polymer insulating layer 12 having the micro/nano concave-convex structure faces the surface of the second polymer insulating layer 15 having the support portion 14, and the first polymer polymer insulating layer 12 is stacked on the second surface. On the polymer polymer insulating layer 15, a friction generator sample 2# was obtained. The friction generator The edges are sealed with a plain tape.

 The friction generator sample 2# exhibits a typical open circuit characteristic in the measurement of I-V (current-voltage). The stepping motor with periodic oscillation (0.33 Hz and 0.13% deformation) causes the friction generator sample 2# to undergo periodic bending and release, and the maximum output voltage and current signal of the friction generator sample 2# reached 18V and 3-, respectively. 4 μΑ. Example 3

 As shown in Fig. 5 and Fig. 6, the size of the friction generator of this embodiment is 3 cm x 3 cm, and the total thickness is about 700 μηι. The friction generator includes a first electrode layer 11, a first polymer insulating layer 12, an intermediate film layer 16, a second polymer insulating layer 15, a second electrode layer 13, and a support portion 14. The first electrode layer 11 and the second electrode layer 13 serve as outputs of the voltage or current of the friction generator 1.

 A polyimide film (having a thickness of about 100 μm) is used as the first polymer insulating layer 12 and the second polymer insulating layer 15. The first polymer insulating layer 12 and the second polymer insulating layer 15 are respectively provided with a micro/nano concave-convex structure having a convex height of 150 nm on one surface, and an aluminum thin film having a thickness of 100 nm on the other surface, and the aluminum thin film is It is the first electrode layer 11 and the second electrode layer 13.

 A polyethylene terephthalate film (having a thickness of about 100 μm) is used as the intermediate film layer 16, and a support portion 14 is provided on one surface of the intermediate film layer 16. The support portion 14 is as shown in FIG. The periphery of the second polymer insulating layer 15 is a small square of 2 mm x 2 mm having a height of 20 μm. The support portion 14 includes an oxidized nanowire array 141 and a coated oxidized nanowire vertically grown on the surface of the intermediate film layer 16. The protective layer 142 of the array (using polydecyl methacrylate).

 The intermediate film layer 16 is stacked on the surface of the first polymer polymer insulating layer 12 having the micro/nano concave-convex structure, and then the second polymer polymer insulating layer 15 has the micro-nano-convex structure surface facing the intermediate film layer 16, It was placed on the intermediate film layer 16 to obtain a friction generator sample 3#. The edge of the friction generator is sealed with a common tape.

The friction generator sample 3# exhibits a typical open circuit characteristic in the measurement of IV (current-voltage). Using a stepper motor with periodic oscillations (0.33 Hz and 0.13% deformation) to make a friction generator sample 3# The bending and release of the life cycle, the maximum output voltage and current signal of the friction generator sample 3# reached 20 V and 4 μΑ, respectively. Example 4

 As shown in Figs. 7 and 8, the friction generator of the present embodiment has a size of 3 cm x 3 cm and a total thickness of about 1000 μm. The friction generator includes a first electrode layer 21, a first polymer insulating layer 22, a friction electrode layer 23, a second polymer insulating layer 24, a second electrode layer 25, and a support portion 26. The first electrode layer 21 and the second electrode layer 25 are one output of the voltage or current of the friction generator 2; the friction electrode 23 is the other output of the voltage or current of the friction generator 2.

 A polyimide film (having a thickness of about 100 μm) is used as the first polymer insulating layer 22 and the second polymer insulating layer 24. The first polymer insulating layer 22 and the second polymer insulating layer 24 are respectively provided with a support portion 26 on one surface, and an aluminum film having a thickness of 100 nm is plated on the other surface, and the aluminum film is the first electrode layer 21 And a second electrode layer 25. The support portion 26 is strip-shaped on both sides of the polymer polymer insulating layer, and has a size of a rectangular strip of 3 cm x 2 mm with a height of 250 μ ηι. The support portion 26 includes an oxidized nanowire array 261 vertically grown on the surfaces of the first polymer insulating layer 22 and the second polymer insulating layer 24, and a protective layer 262 coated with an oxidized nanowire array (using polyfluorene) Ethyl acrylate).

 A copper foil having a thickness of 100 μm was used as the friction electrode 23, and the two surfaces of the copper foil were respectively sanded by a fine sandpaper to form an irregular micro-nano-convex structure having a projection height in the range of 350 to 500 nm.

 The friction electrode 23 is stacked on the surface of the first polymer insulating layer 22 having the support portion 26, and then the face of the second polymer insulating layer 24 having the support portion 26 faces the friction electrode 23, and is stacked on the friction On the electrode 23, a friction generator sample 4# was obtained. The edge of the friction generator is sealed with a common tape.

The friction generator sample 4# exhibits a typical open circuit characteristic in the measurement of IV (current-voltage). The stepping motor with periodic oscillation (0.33 Hz and 0.13% deformation) caused the friction generator sample 4# to undergo periodic bending and release, and the maximum output voltage and current signal of the friction generator sample 4# reached 20 V and 4 respectively. Α The friction generator of the present invention can be applied to various self-driven systems such as touch screens, electronic displays, and other personal electronic products with potential application value, which has the advantages of low production cost and high power generation efficiency.

 The above embodiments are given by way of illustrative example only in the preferred embodiment and the preferred mode of the invention known to the inventor at the time of filing. Many variations of the specific embodiments disclosed in this specification will be readily apparent without departing from the spirit and scope of the invention. Therefore, the scope of the invention is to be determined by the appended claims

Claims

Claim

A friction generator, comprising: a first electrode layer, a first polymer insulating layer and a second electrode layer which are sequentially stacked;

 Wherein, a support portion is disposed between the first polymer polymer insulating layer and the second electrode layer, and the support portion includes a oxidized nanowire array and a protective layer covering the oxidized nanowire array;

 The first electrode layer and the second electrode layer are two outputs of the voltage or current of the friction generator.

The friction generator according to claim 1, wherein the material of the second electrode layer is a metal or an alloy, and the oxidized nanowire array is vertically grown on the first polymer insulating layer and The two electrode layers are on either surface of the opposite surface.

 The friction generator according to claim 2, wherein at least one surface of the opposite surface of the first polymer insulating layer and the second electrode layer is provided with a micro/nano concave-convex structure, the first polymer The micro/nano concave-convex structure disposed on the surface of the polymer insulating layer is a nano concave-convex structure having a convex height of 50 nm to 300 nm; and the micro-nano concave-convex structure provided on the surface of the second electrode layer is a micro-nano concave-convex structure having a convex height of 300 ηηι-1 μη .

 The friction generator according to claim 1, wherein the friction generator is provided with a second polymer insulating layer between the first polymer insulating layer and the second electrode layer. The support portion is disposed between the first polymer insulating layer and the second polymer insulating layer.

 The friction generator according to claim 4, wherein the oxidized nanowire array is vertically grown on any surface of the opposite surfaces of the first polymer insulating layer and the second polymer insulating layer. on.

 The friction generator according to claim 4 or 5, wherein at least one surface of the opposite surface of the first polymer insulating layer and the second polymer insulating layer is provided with a micro/nano concave-convex structure, The nano concave-convex structure is a nano concave-convex structure having a convex height of 50 nm to 300 nm.

The friction generator according to claim 4, wherein the friction generator further comprises an intermediate film layer disposed on the first polymer insulating layer and the second polymer insulating layer Between the layers; the support portion is disposed on the first polymer insulating layer and the intermediate layer Between the film layers, and/or between the intermediate film layer and the second polymer insulating layer; the oxidized nanowire array is vertically grown on either of the first polymer insulating layer and the opposite surface of the intermediate film layer On the surface, and/or on either surface of the second polymeric insulating layer and the opposing surface of the intermediate film layer.

 The friction generator according to claim 7, wherein at least one surface of the first polymer insulating layer and the opposite surface of the intermediate film layer, and/or the second polymer insulating layer and the intermediate layer On at least one surface of the opposite surface of the film layer, a micro/nano concave-convex structure is provided, and the micro/nano concave-convex structure is a nano concave-convex structure having a convex height of 50 nm to 300 nm.

 The friction generator according to claim 7, wherein the material of the intermediate film layer is different from the material used for the first polymer polymer insulating layer and the second polymer polymer insulating layer, and is selected from the group consisting of polyacyl groups. Imine film, aniline resin film, polyacetal film, ethyl cellulose film, polyamide film, melamine furfural film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, Polyethylene adipate film, poly(phenylene terephthalate) film, cellulose sponge film, regenerated sponge film, polyurethane elastomer film, styrene propylene copolymer film, styrene butadiene copolymer Film, rayon film, polyacrylate polymer film, polyvinyl alcohol film, polyisobutylene film, polyethylene terephthalate film, polyvinyl butyral film, furfural phenol condensation film, chlorine Butadiene rubber film, butadiene propylene copolymer film, natural rubber film, polyacrylonitrile film, acrylonitrile vinyl chloride copolymer film and polyethylene propylene Phenol carbonate arbitrary one.

The friction generator according to any one of claims 1 to 9, wherein the materials for the first polymer insulating layer and/or the second polymer insulating layer are independently selected from the group consisting of Polyimide film, aniline resin film, polyacetal film, ethyl cellulose film, polyamide film, melamine furfural film, polyethylene glycol succinate film, cellulose film, cellulose acetate Film, polyethylene adipate film, poly(phenylene terephthalate) film, cellulose sponge film, regenerated sponge film, polyurethane elastomer film, styrene propylene copolymer film, styrene butadiene Copolymer film, rayon film, polyacrylate polymer film, polyvinyl alcohol film, polyisobutylene film, polyethylene terephthalate film, polyvinyl butyral film, furfural phenol condensation film , neoprene film, butadiene propylene copolymer film, natural rubber thin Any one of a film, a polyacrylonitrile film, an acrylonitrile vinyl chloride copolymer film, and a polyvinyl propylene glycol carbonate.

 The friction generator according to any one of claims 4 to 10, wherein the material of the second electrode layer is selected from the group consisting of indium tin oxide, graphene, silver nanowire film, metal or alloy.

 The friction generator according to any one of claims 1 to 10, wherein the material for the first electrode layer is selected from the group consisting of indium tin oxide, graphene, silver nanowire film, metal or alloy.

 The friction generator according to any one of claims 2 to 12, wherein the metal is gold, silver, platinum, palladium, aluminum, nickel, copper, titanium, chromium, tin, iron, manganese, Phase, tungsten or vanadium; alloys are aluminum alloys, titanium alloys, magnesium alloys, niobium alloys, copper alloys, alloys, manganese alloys, nickel alloys, lead alloys, tin alloys, cadmium alloys, niobium alloys, indium alloys, gallium alloys, Tungsten alloy, molybdenum alloy, niobium alloy or niobium alloy.

 The friction generator according to any one of claims 1 to 13, characterized in that the material used for the protective layer is polydecyl methacrylate.

 The friction generator according to any one of claims 1 to 14, characterized in that the height of the support portion is 20-500 μm.

 16. The friction generator according to claim 15, wherein the support portion is arranged in an array of a shape of a tic-tac, a cross, a zebra, a cross or a word.

 A friction generator, comprising: a first electrode layer, a first polymer insulating layer, a friction electrode layer, a second polymer insulating layer, and a first electrode layer which are sequentially stacked; Two electrode layer;

 Wherein a support portion is disposed between the first polymer polymer insulating layer and the friction electrode layer, and/or between the second polymer polymer insulating layer and the friction electrode layer, and the support portion includes an oxidized nanowire array And a protective layer covering the oxidized nanowire array, wherein the oxidized nanowire array is vertically grown on any surface of the opposite surface of the polymer polymer insulating layer and the friction electrode layer;

 The first electrode layer and the second electrode layer are one output end of a friction generator voltage or current; the friction electrode layer is another output end of a friction generator voltage or current.

The friction generator according to claim 17, wherein at least one surface of the first polymer insulating layer and the opposite surface of the friction electrode layer, and/or the second polymer a micro-nano-convex structure is disposed on at least one surface of the opposite surface of the insulating layer and the friction electrode layer, and the micro-nano-convex structure disposed on the surface of the polymer-polymer insulating layer is a nano-concave structure having a protrusion height of 50 nm to 300 nm; The micro/nano concave-convex structure provided on the surface of the friction electrode layer is a micro/nano concave-convex structure having a convex height of 300 nm to 1 μm.

 The friction generator according to claim 17 or 18, wherein the materials for the first polymer insulating layer and the second polymer insulating layer are independently selected from the group consisting of polyimide films , aniline furfural resin film, polyacetal film, ethyl cellulose film, polyamide film, melamine furfural film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, poly a diethylene glycol film, a poly(phenylene terephthalate) film, a cellulose sponge film, a regenerated sponge film, a polyurethane elastomer film, a styrene propylene copolymer film, a styrene butadiene copolymer film, Rayon film, polyacrylate polymer film, polyvinyl alcohol film, polyisobutylene film, polyethylene terephthalate film, polyvinyl butyral film, furfural phenol condensation film, neoprene Film, butadiene propylene copolymer film, natural rubber film, polyacrylonitrile film, acrylonitrile vinyl chloride copolymer film and polyethylene propylene glycol carbonate Any of them.

 The friction generator according to any one of claims 17 to 19, wherein the material of the first electrode layer and the second electrode layer is selected from the group consisting of indium tin oxide, graphene, silver nanowire film, a metal or an alloy, wherein the friction electrode layer is made of a metal or an alloy; wherein the metal is gold, silver, platinum, palladium, aluminum, nickel, copper, titanium, chromium, tin, iron, manganese, phase, tungsten or vanadium; The alloy is aluminum alloy, titanium alloy, magnesium alloy, bismuth alloy, copper alloy, alloy, manganese alloy, nickel alloy, lead alloy, tin alloy, cadmium alloy, bismuth alloy, indium alloy, gallium alloy, tungsten alloy, molybdenum alloy, Niobium alloy or niobium alloy.

 The friction generator according to any one of claims 17 to 20, characterized in that the material used for the protective layer is polydecyl methacrylate.

 The friction generator according to any one of claims 17 to 21, characterized in that the height of the support portion is 20-500 μm.

 23. The friction generator according to claim 22, wherein the support portion is arranged in an array of a shape of a tic-tac, a cross, a zebra, a cross or a word.