CN102683573A - Nano generator, nano generator set and self-powered system comprising nano generator or nano generator set - Google Patents
Nano generator, nano generator set and self-powered system comprising nano generator or nano generator set Download PDFInfo
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/304—Beam type
- H10N30/306—Cantilevers
Abstract
The invention provides a nano generator, a nano generator set and a self-powered system comprising the nano generator or the nano generator set. The nano generator comprises a supporting substrate, and upper and lower electrodes which are arranged at two sides of upper and lower surfaces of the supporting substrate by glue, wherein each electrode respectively comprises a zinc oxide nanowire array layer, a macromolecular insulating layer and a conductive thin film; the zinc oxide nanowire array layers vertically grow on the supporting substrate; the macromolecular insulating layers are coated on the zinc oxide nanowire array layers; the conductive thin films are arranged on the macromolecular insulating layers; and the conductive thin films form output electrodes of voltage and current of the nano generator. The self-powered system can obtain energy from very small force in an environment through utilizing the nano generator and can store most of the energy when a sensor is at a standby mode; the collected energy is used for triggering the sensor under an active mode to rapidly process and transmit data; and therefore, the self-powered system has huge potentials of application on the aspects of radio biological sensing, environment/infrastructure monitoring, sensor networks, individual electronic products, even national security.
Description
Technical field
The present invention relates to a kind of nano generator, nanometer generating unit and self-contained electric system thereof, be specifically related to a kind of self-contained electric system that is used for remote transfer of data and drives by the nano generator of wireless independent operation.
Background technology
The mode of electric power system use at present has hydroelectric power generation, and thermal power generation etc. are for electric power supply control system is all installed in the use of controlling them.But the large-area nano electric power system of being made up of nano generator does not at present propose long-rangely, and electric power supply control system causes nanometer electric power system efficient low automatically, can't control by automatic remote.The emerging development of cash nanometer technology has been transferred to from the invention individual component can be through carrying out the integrated system of one or more design functions with the integrated one group of nano-component of modern microelectric technique.General integrated system is various elements, like the combination of transducer, converter, data processor, controller and communication system.When the size reduction of these devices during to nanometer or micron level, the energy power consumption is also reduced to a low-down level.With commercial bluetooth earphone is example, the only about several microwatts of its energy power consumption (the highest 500kbits/s of data transmission rate, energy power consumption 10nW/bit).The energy power consumption of nano-device even can be littler.In such low energy consumption level, it possibly pass through from environmental resource fully, and like air-flow, vibration, sound wave, daylight, chemical energy and/or the heat energy of gentleness, middle searching energy comes driving arrangement.
Low in order to solve nanometer electric power system efficient; Can't automatic remote the shortcoming of control; The disclosure of the Invention of application number CN200710095913.6 a kind of electric power supply control system, comprising: control module (1), output module (2), display module (3), communication module (4), sensor assembly (5) and nanometer electric power system (6); Control module (1) connects output module (2) and/or display module (3) and/or communication module (4) and/or sensor assembly (5) embedded (integration)/external (connecting line) nanometer electric power system (6); And control module (1) comprises processor, control circuit, data/program storage, transducer comparison program and remote activation program; And output module (2) handle button, voice, controlling signal export into and long-range/regularly/automatically/setting of inquiry/switch nanometer electric power system (6); Display module (3) handles that the output of image, voice is gone into, the demonstration of demonstration and long-range/regularly/automatically/inquiry/switch nanometer electric power system (6) state; Communication module (4) is handled and the wire/wireless communication function of external equipment comprises MODEM, Ethernet port and IEEE802.11b, WLAN port, bluetooth, infrared ray, ultra broadband, WiMAX, GSM, GPRS, CDMA, PHS and wire/wireless radio frequency network; Sensor assembly (5) comprises temperature, humidity, chemical composition, physics metering, gene element, biotic component and other sensor assemblies) output of processes sensor signal goes into to control module (1); Reach generating/electric power system that nanometer electric power system (6) is made up of nano generator.This invention combines control module with the nanometer electric power system, communication module and sensor assembly, and have the advantage that improves nanometer electric power system safety, Long-distance Control, the scope of application and the saving energy.But the voltage and current that this electric power supply control system produces still is smaller, and structure is too complicated, and cost is high.
Mechanical energy in people's living environment is the abundant of variable frequency (low frequency usually) and intensity to be arranged but irregular energy; For example air-flow, noise, mankind's activity, to a great extent limit serve as the application of the basis energy resource collecting device of under CF, working with traditional resonator.Need a rational design to tolerate changeable environment.Utilize the nano generator of zinc oxide nanowire piezoelectric effect then to be applicable to this target.
Since two thousand five, the inventor is developing this " self-powered nanometer technology " always, is intended to build independent, lasting, a wireless self-contained electric system from running without battery.Self-contained electric system will be played the part of a very important role in independent, lasting, the non-maintaining running of implantating biological sensors, long-range removable environmental sensor, nanometer robot, MEMS even portable/wearable personal electric product.
Summary of the invention
The self-contained electric system that the present invention provides a kind of nano generator, nanometer generating unit and is used for remote transfer of data and driven by the nano generator of wireless independent operation.
A technical scheme of the present invention is a kind of nano generator; The top electrode and the bottom electrode that comprise support base and be arranged on support base upper and lower surfaces both sides; Said top electrode comprises the first zinc oxide nano-wire array layer, first polymeric dielectric layer and first conductive film respectively; The first zinc oxide nano-wire array vertical-growth is on support base, and first polymeric dielectric layer is coated on the said zinc oxide nano-wire array layer, and first conductive film is arranged on the polymeric dielectric layer; Said bottom electrode comprises the second zinc oxide nano-wire array layer, second polymeric dielectric layer and second conductive film respectively; The second zinc oxide nano-wire array vertical-growth is on support base; Second polymeric dielectric layer is coated on the said zinc oxide nano-wire array layer, and second conductive film is arranged on the polymeric dielectric layer; Said first conductive film and second conductive film become the output electrode of nano generator voltage and current.
Nano generator of the present invention is preferably; Said zinc oxide nano-wire array in said top electrode and the bottom electrode is grown in respectively in a plurality of zones; There is the gap between zone and the zone; Said polymeric dielectric layer is coated on the zinc oxide nano-wire array, and cut apart zinc oxide nano-wire array, coat in the gap, fill area.
Nano generator of the present invention is preferably, and the material of said first polymeric dielectric layer and second polymeric dielectric layer is respectively and is selected from a kind of in polymethyl methacrylate, dimethyl silicone polymer and the p type macromolecular material.
Nano generator of the present invention is preferably, and the said first polymeric dielectric layer material is identical with the second polymeric dielectric layer material.
Nano generator of the present invention is preferably; The material of said first conductive film and second conductive film is respectively and is selected from a kind of in indium tin metal oxide, Graphene and the nano silver wire membrane coat, perhaps is selected from gold, silver, platinum, aluminium, nickel, copper, titanium, irons, a kind of in selenium or its alloy.
Nano generator of the present invention is preferably, and the said first conductive film material is identical with the second conductive film material.
Nano generator of the present invention is preferably, and said support base is to be selected from silicon base, the gallium nitrate based end, conductive metal sheet substrate, conductivity ceramics substrate or to be coated with a kind of in the macromolecule polymer material substrate of metal electrode.
Nano generator of the present invention is preferably, and said nano generator also comprises package casing, and said shell adopts macromolecule insulation material.
Another technical scheme of the present invention is a kind of nanometer generating unit, by the parallel connection of said monomer nano generator or be composed in series.
A technical scheme more of the present invention is a kind of self-contained electric system; Comprise said nano generator or said nanometer generating unit; Comprise that also rectification circuit, storage element and electric energy use the unit; Said generator connects rectification circuit, and rectification circuit connects storage element, and said electric energy uses the unit to connect the electric energy that storage element uses its storage; Said rectification circuit is a direct current with the current transitions of generator output; Said storage element comprises and is used to store galvanic capacitor or/and battery.
The superior effect of nano generator provided by the invention is: owing on the zinc oxide nano-wire array layer, adopted polymeric dielectric layer; The existence of insulating barrier provides the potential barrier of an infinite height; Stop the piezoelectron on the zinc oxide nanowire to be derived, and form piezoelectric field through zinc oxide/Metal Contact face is inner; Piezoelectric field further forms charge inducing at first electrode and second electrode, and charge inducing forms current circuit under the situation that external circuits is connected.In addition; The space that is filled in nano wire that polymeric dielectric layer disperses also forms cover layer at top layer; When vertically applying external force, stress can be sent to the nano wire under all application of force zones through cover layer, has promoted the efficient of nano generator greatly; Simultaneously cover layer also is coated on nano-wire array top and on every side, bears external force at nano wire and plays cushioning effect to a certain degree as the time spent, and strengthened contacting of nano-wire array and first electrode layer, thereby improved the stability of nano generator.This system has connected the radio signal that the external wireless signals reflector sends later on again and in the distance of 5-10 rice, can have been detected by Commercial Radio.This research proof makes up the feasibility of self-contained electric system with the zinc oxide nanowire generator, and has shown its application potential aspect radio biological sensing, environment/infrastructure monitoring, sensor network, personal electric product even national security.
This nano generator relies on the piezoelectricity electromotive force that when nano wire is dynamically strained distortion with very little power quilt, generates in the nano wire; The transient flow of electronics in the external loading owing to be the Fermi level that is come two contact jaws of balance by Piezoelectric Driving, is the fundamental mechanism of nano generator.The power that nano generator produces possibly be not enough to continuously driving arrangement, but the accumulation of the electric charge that generates in a period of time is enough to driving arrangement work several seconds.This is well suited for using in sensing, infrastructure monitoring, sensor network field.A common characteristics of these application is exactly, and so multisensor is arranged in the system, and each transducer is all expected independent wireless running, but they all will be connected through network/internet.Each transducer is not asked to continue running simultaneously, and on the contrary, it will have " flicker " mode of operation of armed state and active state.Armed state is longer usually, and active mode is shorter.Searching out also in the armed state, energy stored can be used under active mode, driving it.This means that these cycle sensor property take a sample and in several seconds zero point, transmitted data from their operational environment.Therefore, can use nano generator in environment, from very little power, to obtain energy and when transducer is in standby, store most of energy.Then, the collected energy is used to trigger transducer under active mode, fast processing is also transmitted data.
Description of drawings
Fig. 1 is the formation sketch map of the nano generator manufacture process of expression one embodiment of the invention.
Fig. 2 is the cross-sectional schematic of upper electrode arrangement of the nano generator of another embodiment of the present invention.
Fig. 3 is a zinc oxide nanowire of the present invention subregion growth sketch map.
Fig. 4 is the working mechanism sketch map that the said nano generator of expression produces the piezoelectricity electromotive force.
Fig. 5 is the scanning electron micro-structure diagram of the nano wire film cross section of said nano generator.
Fig. 6 is the circuit design sketch map of the self-contained electric system of expression one embodiment of the invention.
The output voltage of the said nano generator of (a) expression of Fig. 7, (b) output current of the said nano generator of expression.
Description of reference numerals
The 1-support base, 2-top electrode, 21-first zinc oxide seed layer, the 22-first zinc oxide nano-wire array layer; 23-first polymeric dielectric layer, 24-first conductive film, 3-bottom electrode; 31-second zinc oxide seed layer, the 32-second zinc oxide nano-wire array layer, 33-second polymeric dielectric layer; 34-second conductive film, 4-polymeric dielectric layer gap filling part, 5-zinc oxide nanowire subregion.
Embodiment
Below, in conjunction with accompanying drawing and specific embodiment the present invention is further described,
Fig. 1 representes the formation sketch map of the nano generator manufacture process of one embodiment of the invention.Fig. 2 is the cross-sectional schematic of upper electrode arrangement of the nano generator of another embodiment of the present invention.Fig. 3 is a zinc oxide nanowire of the present invention subregion growth sketch map.Fig. 4 is the working mechanism sketch map that the expression nano generator produces the piezoelectricity electromotive force; Piezoelectricity Potential Distribution in its expression project organization; Transversal centerline in the support base 1 is represented the tension force neutral surface, and zinc oxide nanowire forms a solid film that shows as the intensive filling of continuous medium; If zinc oxide nanowire forms intensive filling small gaps is arranged or line between film slidably, be helpless to output voltage at the be stretched nano wire of a side of substrate like this, and can create the piezoelectric electro potential drop at the nano wire that is compressed a side.Fig. 5 is the scanning electron micro-structure diagram of nano wire film cross section of the generation attitude of ad hoc structure on the support base.Fig. 6 is the circuit design sketch map of expression self-contained electric system; The left side indicates among Fig. 6 " NG " represents nano generator; The output voltage of " U " expression self-contained electric system on right side for the wireless launcher part, adopts phototransistor as the light of sensor from light-emitting diode.The signal that sensor arrives is through single-transistor radio frequency transmitter wireless transmission.The output voltage of the said nano generator of Fig. 7 (a) expression, (b) output current of the said nano generator of expression, when voltage reaches 10V, electric current surpasses 0.6.
Particularly, the unit that is used for the energy of integrated self-contained electric system among the present invention comprises that energy obtains memory module (not shown).Energy collecting device is caught certain energy (solar energy, heat energy, mechanical energy and/or chemical energy) from environment, and it is stored in the energy acquisition memory module.Thus, the energy of collecting is used to the miscellaneous part of drive system.Variation in the sensors sense environmental, data processor and controller carry out information analysis.Then, signal is sent, receive feedback simultaneously by data transmitter.In this execution mode, illustration one by be used for harvest machinery can the prototype (not shown) of the self-contained electric system processed of capacitor, infrared photoelectric detector and the Radio Data-transmission device of nano generator, low-loss full-wave bridge formula rectifier, storage power.The successful running of this system is to utilize nano generator to be used as first evidence of self-power wireless sensor network.
As shown in Figure 1, used nano generator constitutes one and has and comprise support base 1 and with the self-supporting cantilever beam of the five-layer structure of first, second zinc oxide nanowire film 22,32 of the intensive filling of ad hoc structure in the self power generation integrated system.Nano generator passes through at flexible polyester (PS) support base (Dura-Lar film TM; Thickness 220 μ m) form upper/ lower electrode 2,3 and processing on 1 the upper and lower surfaces, said substrate 1 is made up of silicon, gallium nitride, conductive metal sheet, conductivity ceramics or any materials such as macromolecule polymer material of being coated with metal electrode.As shown in Figure 1.At first, thick chromium adhesion layer of 5nm that has the first thick zinc oxide seed layer 21 of 50nm and second zinc oxide seed layer 31 is placed on the rectangular area of 1cm * 1cm selected on the upper and lower surfaces of substrate.Said zinc oxide seed layer 21,31 is through wet chemical method be used to grow first, second zinc oxide nanowire of intensive filling.Displaying the nutrient solution that uses in the chemically grown process of layer film 22,32 at the zinc oxide nanowire with the intensive filling of ad hoc structure is equimolar Zn (NO
3)
26H
2The O aqueous solution and methenamine (HMTA), concentration are 0.1M.First, second nano wire film 22,32 that said PS supports the upper and lower surfaces of basic degree 1 faces down through one substrate is placed on the continued growth of nutrient solution top.Because surface tension, substrate floats over the nutrient solution surface.The growth of zinc oxide nanowire is in mechanical convection baking box (holy Plutarch draws for model Yamato DKN400, California), to have carried out 5 hours with 95 ℃.Fig. 5 is scanning electron microscopy (SEM) figure that is the zinc oxide nanowire that generates attitude in the expression substrate.The size of nano wire approximately is diameter 150nm, length 2 μ m.Can see that from cross-sectional view zinc oxide nanowire is with high packing density vertical-growth from the substrate, the bottom of these nano wires is passed first, second zinc oxide seed layer 21,31 and is combined.For the top surface that confirms these nano wires also is closely linked in uniform film, used tweezers to clip the top surface of these nano wires.Therefore, whole zinc oxide structure can be regarded as the upper/lower electrode that ad hoc structure is arranged 2,3 that the zinc oxide nano-wire array by two parallel intermembranous abundant fillings of zinc oxide films constitutes.According to growth mechanism, the direction of axially growing of the C axle at these nano wire places for their, as shown in Figure 1.Then, the thin layer of polymethyl methacrylate (PMMA) (MicroChem 950k A11) is coated in the rotation of the speed of 3000rpm on substrate two-sided, subsequently at the center rectangle area deposition chromium or gold plating as the electrode of nano generator.Upper/ lower electrode 2,3 on the said substrate upper and lower surfaces comprises said zinc oxide nano- wire array layer 22,32, first, second polymeric dielectric layer 23,33 and first, second conductive film 24,34 respectively; Said zinc oxide nano- wire array 23,32 vertical-growths are on support base 1; Said polymeric dielectric layer 23,33 is coated on the said zinc oxide nano- wire array layer 22,32, and first, second conductive film 24,34 is arranged on the said polymeric dielectric layer 23,33. Conductive film 24,34 output electrodes in the upper and lower electrode 2,3 of said substrate upper and lower surfaces side as the nano generator voltage and current.
As another embodiment of the present invention, shown in Figure 2 like analysing and observe of expression top electrode 2 structures, the zinc oxide seed layer 21 that will be used to make first electrode 2 through the radio frequency sputter in the support base 1 of cleaning in advance.Then; On first electrode 2, cover photoresist, on photoresist, offer the square window array of a rule with little processing offset printing method, shown in Figure of description 3; The square window inner region; Exposing has zinc oxide seed, and as the zone 5 of zinc oxide nano-wire array growth, there is photoresist in the square window gap and zinc oxide nanowire can't be grown.Photoresist is equivalent to a subregion mould in zinc oxide nanowire growth course subsequently, zinc oxide nanowire only is grown in makes on the zinc oxide seed area exposed, thereby grow in the subregion 5 of realizing zinc oxide nano-wire array 22,32.Next peel off all residue photoresists, and to the nano-wire array heating anneal.Then through spin coating as will being covered on the zinc oxide nano-wire array 22 by the polymeric dielectric layer 23 that polymethyl methacrylate constitutes, and form zinc oxide nanowire zone filling part 4, it is divided into predefined zone with zinc oxide nanowire.At last, adopt another polymethyl methacrylate coating to carry out the package casing encapsulation.First electrode 2 and second electrode 3 are as the voltage and current output electrode of nano generator.The electron scanning micrograph of local high-amplification-factor is referring to Figure of description 5.
Zinc oxide nanowire is a semiconductor; Has conductivity to a certain degree; When zinc oxide nanowire contacts with each other, himself with electric charge in the deformation power generation process, can produce and influence each other, thereby can offset the part piezoelectric charge; The output electric weight that causes generating electricity reduces, and has reduced the power generation performance of nano generator.And in the present invention, zinc oxide nano-wire array is only grown in the zone of appointment or regular domain, influences less each other.Owing to adopt the method for zinc oxide nano-wire array subregion growth; And it is cut apart, coats with polymeric dielectric layer; Do the time spent receiving external force; Produce the nano wire of piezoelectric charge and direct pressurized and do not produce to form to shield between the nano wire of piezoelectric charge and cut apart, thereby stoped the reduction of piezoelectricity electromotive force, and then improved energy output.
At last, whole device uses dimethione (PDMS) fully to encapsulate to improve mechanical strength and elasticity.The size of the effective working region of nano generator is 1cm * 1cm.Article two, lead-in wire is connected respectively on the electrode of top and bottom.Must be pointed out, processing temperature quite low (< 100 ℃), whole like this process can adapt to flexible electronic.
In addition; In this execution mode; First zinc oxide seed layer 21 is identical with second zinc oxide seed layer 22 to be made up of identical material; The first zinc oxide nano-wire array layer 22 and the second zinc oxide nano-wire array layer 32 are by constituting with a kind of material, and first polymeric dielectric layer 23 and second polymeric dielectric layer 23 are by constituting with a kind of material, and first conductive film 24 and second conductive film 34 are also by constituting with a kind of material.The material of said first polymeric dielectric layer and second polymeric dielectric layer is respectively and is selected from a kind of in polymethyl methacrylate, dimethyl silicone polymer and the p type macromolecular material.
The material of first conductive film 24 and second conductive film 34 can be in indium tin metal oxide, Graphene and the nano silver wire membrane coat a kind of, or gold, silver, platinum, aluminium, nickel, copper, titanium, iron, a kind of material in selenium or its alloy.Support base 1 can or be coated with a kind of substrate in the macromolecule polymer material substrate of metal electrode for silicon base, the gallium nitrate based end, conductive metal sheet substrate, conductivity ceramics substrate.
In order to present its working mechanism, at first calculated the distribution of piezoelectricity electromotive force in nano wire film.One of the total imitation of nano generator has the cantilever beam that in common substrate, has the nano wire film of ad hoc structure.The film of top and lower surface has single-shaft configuration respectively.Then, calculated the electrical potential difference of when total is crooked, passing top and bottom electrode.Consider that the combination filling of zinc oxide nano-wire array on top and bottom of growing in the substrate is tight, they simplify calculating through the thin film simulation.Rectangular box through a size 500 μ m * 500 μ m * 224 μ m is simulated the nanometer generating machine.It is a three-decker, comprises two single-crystal zinc oxide films (thick 2 μ m respectively) of polymeric substrates (thickness 220 μ m) (thickness of noting electrode is 100nm, thereby has ignored them in calculating) top and lower surface.The same in the calculating among the material constant of employed zinc oxide and the Ref.25.The Young's modulus of polymeric substrates, Poisson's ratio and relative dielectric constant are respectively E=5GPa, v=0.33, k=3.2.All calculate all through using software for calculation COMSOL to carry out.The piezoelectricity Potential Distribution is to be calculated by the cantilever beam of the periodically horizontal application of force through the edge that the handle assembly structural simulation becomes an end to fix (plane of y=0) and the other end (plane of y=500 μ m).Tension distribution in the cantilever is inhomogeneous.Be 0.2% along the y axle uniform tension parallel in the crossbeam with substrate.In order to simulate the metal electrode in the nano generator, the top of structure and lower surface are set to equal-potential plane through the ground connection of bottom.Under open circuit situation, the total electrical charge one of top and lower surface is decided to be zero.Suppose that zinc-oxide film is the matter that undopes of essence.The piezoelectricity electromotive force has huge variation on the size in zinc-oxide film.From said result of calculation, predicted an induced electricity potential difference of passing the 83.8V of two electrodes.Such potential drop that passes top and bottom electrode is the actuating force of electronics transient flow in the external loading.
If considering zinc-oxide film is the fact that the nano wire by intensive filling constitutes, there are two kinds of situation.When nano generator is crooked, consider that the neutral surface of tension force is in the center line of substrate, as shown in Figure 4, the lip-deep nano wire film that is stretched of substrate suffers elongation strain, suffers compression stress and be compressed lip-deep nano wire film.At first; The direction of growth of considering nano wire is along c axle (the polar region direction of zinc oxide); If the combination between nano wire can form solid film very by force; Tensile stress perpendicular to nano wire causes the axial compression strain along c, thereby forms the piezoelectric electro potential drop to the top from the root of nano wire.Simultaneously, a suitable compression stress is applied on the nano wire in the lower surface of substrate, cause along the elongation strain of c axle, thereby the top of nano wire obtains the piezoelectricity electromotive force higher than root.Therefore, the piezoelectric electro potential drop in the zinc-oxide film of top layer and bottom has identical polarity, and constructively adds up.This piezoelectricity Potential Distributing will be introduced induced charge in top and bottom electrode, thereby will generate output voltage.The described monomer nano generator of the foregoing description parallel connection or be composed in series the nanometer generating unit.Constituted the self power generation system by the nanometer generating unit.
Secondly, under the situation of wired slip/slit possibility a little less than the combination very between nano wire, can not generate the piezoelectricity electromotive force through the film of substrate top layer under the tensile stress and bottom surface.But, consider that nano wire fully fills and can crowd each other, the piezoelectric electro potential drop is still created (see figure 4) through the substrate bottom surface film that is compressed stress, though some minimizings are arranged.Therefore, potential drop also can obtain between top and bottom electrode, but compares reduction less than half the under size and the first kind of situation.Actual combination situation should be between two kinds of situation as above discussing between nano wire.And, can know that generating the attitude zinc oxide nanowire has the n type to mix, it can stop the higher side of piezoelectricity electromotive force significantly, and the low side of piezoelectricity electromotive force does not almost change.Therefore, owing to reason as listed above, the output voltage of observed nano generator will be littler than the value of calculating in theory.
In actual measurement, a horizontal machinery triggers the edge that masterpiece is used in this nano generator structure.When nano wire film at 3.56%S
-1Be stretched under the strain rate 0.12% o'clock, the output voltage that measures reaches 10V, and output current surpasses 0.6 μ A (respective volume current density 1mA/cm
3, power density 10mW/c m
3), like (a) of Fig. 7 with (b).Observed voltage ratio calculated value is significantly little.The storage of the energy that obtains be through use one be connected nano generator and capacitor (model 1210,22 μ F ± 10%, AVX) between integrated low-loss full wave bridge rectifier realize.
In order to prove the possibility of Radio Data-transmission, the inventor sends the detected signal of telecommunication with single-transistor radio frequency (RF) transmitter.Frequency of oscillation is adjusted to about 90MHz, and (CX-39 Coby) receives the signal of transmission with a portable amplitude modulation/FM receiver of commercialization.At first, only tested the translator unit of circuit.When the energy of the nano generator results that are stored when transmitter started, broadcast receiver was received interfering noise (support information is seen video).Because the low-power consumption of transmitter (< 1mW), during answering variable period, three of nano generator generate and the enough transmission signals of energy stored.Because receive the restriction of receiver quality, the maximum transmission distance of said transmitter is more than 5 meters.Then, the phototransistor in the optical switch of will slotting (model OPB 825, and OPTEK Technology produces) can independent wireless running as demonstrating self-contained electric system in the photon detection transducer adding system.Optical switch is made up of an infrarede emitting diode (LED) and a NPN type silicon phototransistor that is installed in two opposites of 4mm sipes in the black cheaply plastic jacket.Light-emitting diode is started and is illuminated phototransistor by a comprehensive function generator (model DS345, research system in Stamford produces), and this generator has the program-controlled voltage as an outside input light source sequential operation.The photo-signal that is generated by phototransistor utilizes in the capacitor energy stored periodically to send.Because the macro-energy power consumption (100mW) of phototransistor, the energy that it requires 1000 strain circulations of nano generator (performance of this nano generator is shown in Fig. 7 (a)) to obtain provides power (driving time 20-25ms) for phototransistor and transmitter together.When it was activated at every turn, through the signal modulated transmission signal that phototransistor is received, information just received by broadcast receiver, demodulated signal just from earphone jack by record.Each circulation that starts the voltage order of light-emitting diode comprises that is opened (16ms)/>close (5ms)/open (5ms)/the close sequence of states of (10ms).Broadcast receiver is adjusted under the frequency of avoiding the commercial wireless signal of telecommunication of an about 90MHz and works.When phototransistor and transmitter are activated, detect pulse above Noise Background.If amplify this pulse, it has comprised the message segment that has as the same waveform as envelope of light-emitting diode starting resistor order.This shows that Radio Data-transmission has realized through this self-contained electric system.
About nano generator structure of the present invention, there are three factors very important: the deformation quantity of the length of nano wire, the thickness of substrate and nano generator to power out-put characteristic.See have two kinds of patterns to trigger nano generator from practical standpoint, which kind of pattern depends on the form of the mechanical energy that nano generator searches in environment.Situation about under constant stress, starting for nano generator, air-flow for example, result of calculation shows that two interelectrode piezoelectricity electromotive forces increase along with the reduction of the growth of nanowire length or substrate thickness.When the constant tension that applies, for example when the vibration of nano generator through the triggering source bridge of rigidity driven, the piezoelectricity electromotive force is with the changing inversely of situation before relatively.Thereby, through adjusting the length that two contradictory elements are the thickness and the nano-wire array of substrate, make its power results maximizing efficiency to specific work environments according to the energy response of from environment, searching, and with this unit optimization.The tension force that increases also can significantly improve output voltage.In addition, zinc oxide is a kind of biocompatible environment-friendly materials.Nano wire film can be in (< 100 ℃) growth under very low temperature in the substrate of any substrate and Any shape.These advantages are conclusive for its application in industry in flexibility/>telescopic electronic product and a lot of fields.
In a word, utilization is displayed as a kind of effective ways of gathering in the crops low frequency mechanical energy with the intensive zinc oxide nanowire film that is grown on the polymeric substrates of ad hoc structure through cryochem process.The manufacturing that has the nano generator of free arm beam construction is made up of five-layer structure: flexible polymer substrate, nanometer Seed Layer, have the zinc oxide nanowire of ad hoc structure film, polymeric dielectric layer and conductive membrane layer are arranged.For 1cm
2The nano generator of size, strain rate is 3.56%S
-1Occasion, when it is tightened up when being deformed into 0.12%, the output voltage that measures has reached 10V, output current has surpassed 0.6 μ A (corresponding power density 10mW/cm
3).Through the electric energy that the storage nano generator generates, showed one can independent wireless running self-contained electric system.System is made up of capacitor, transducer and the rf data transmission transmitter of nano generator, rectification circuit, storage power.The radio signal that system sends is detected through Commercial Radio in the distance of 5-10 rice.This research proof has the feasibility of the self-contained electric system of remote data transmission capabilities with zinc oxide nanowire generator structure, has clearly proved its potential application aspect radio biological sensing, environment/infrastructure monitoring, sensor network, personal electric product even national security.
The present invention is not limited to above-mentioned execution mode, and under the situation that does not deviate from flesh and blood of the present invention, any distortion that it may occur to persons skilled in the art that, improvement, replacement all fall into scope of the present invention.
Claims (10)
1. nano generator comprises support base, is arranged on the top electrode and the bottom electrode of support base upper and lower surfaces both sides, it is characterized in that,
Said top electrode comprises zinc oxide nano-wire array layer, first polymeric dielectric layer and first conductive film respectively; Said zinc oxide nano-wire array vertical-growth is on support base; First polymeric dielectric layer is coated on the said zinc oxide nano-wire array layer, and first conductive film is arranged on the polymeric dielectric layer;
Said bottom electrode comprises zinc oxide nano-wire array layer, second polymeric dielectric layer and second conductive film respectively; Said zinc oxide nano-wire array vertical-growth is on support base; Second polymeric dielectric layer is coated on the said zinc oxide nano-wire array layer, and second conductive film is arranged on the polymeric dielectric layer;
The output electrode that said first conductive film in the upper and lower electrode and second conductive film become the nano generator voltage and current.
2. nano generator according to claim 1; Wherein, Said zinc oxide nano-wire array in said top electrode and the bottom electrode is grown in respectively in a plurality of zones; Have the gap between zone and the zone, said polymeric dielectric layer is coated on the zinc oxide nano-wire array, and cut apart zinc oxide nano-wire array, coat in the gap, fill area.
3. nano generator according to claim 1, wherein, the material of said first polymeric dielectric layer and second polymeric dielectric layer is respectively and is selected from a kind of in polymethyl methacrylate, dimethyl silicone polymer and the p type macromolecular material.
4. nano generator according to claim 3, wherein, the said first polymeric dielectric layer material is identical with the second polymeric dielectric layer material.
5. nano generator according to claim 1; Wherein, The material of said first conductive film and second conductive film is respectively and is selected from a kind of in indium tin metal oxide, Graphene and the nano silver wire membrane coat, perhaps is selected from gold, silver, platinum, aluminium, nickel, copper, titanium, irons, a kind of in selenium or its alloy.
6. nano generator according to claim 5, wherein, the said first conductive film material is identical with the second conductive film material.
7. nano generator according to claim 1, wherein, said support base is to be selected from silicon base, the gallium nitrate based end, conductive metal sheet substrate, conductivity ceramics substrate or to be coated with a kind of in the macromolecule polymer material substrate of metal electrode.
8. nano generator according to claim 1, wherein, said nano generator also comprises package casing, said shell adopts macromolecule insulation material.
9. a nanometer generating unit is characterized in that, by the parallel connection of the described monomer nano generator of claim 1-8 or be composed in series.
10. self-contained electric system; It is characterized in that; Comprise the described nanometer generating unit of described nano generator of claim 1-8 or claim 8, comprise that also rectification circuit, storage element and electric energy use the unit, said generator connects rectification circuit; Rectification circuit connects storage element, and said electric energy uses the unit to connect the electric energy that storage element uses its storage;
Said rectification circuit is a direct current with the current transitions of generator output;
Said storage element comprises and is used to store galvanic capacitor or/and battery.
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| PCT/CN2013/071767 WO2013166874A1 (en) | 2012-05-09 | 2013-02-22 | Nano-generator, nano-generator set and self-powered system |
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