CN117213672A - High-sensitivity flexible touch sensor based on liquid metal and preparation method thereof - Google Patents
High-sensitivity flexible touch sensor based on liquid metal and preparation method thereof Download PDFInfo
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- 229910001338 liquidmetal Inorganic materials 0.000 title claims abstract description 100
- 238000002360 preparation method Methods 0.000 title abstract description 10
- 238000004806 packaging method and process Methods 0.000 claims abstract description 26
- 239000007788 liquid Substances 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 13
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 12
- 230000008859 change Effects 0.000 claims description 12
- 229910052733 gallium Inorganic materials 0.000 claims description 12
- 239000002861 polymer material Substances 0.000 claims description 11
- 230000035945 sensitivity Effects 0.000 claims description 10
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 9
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 9
- 238000003825 pressing Methods 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000000741 silica gel Substances 0.000 claims description 7
- 229910002027 silica gel Inorganic materials 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000010146 3D printing Methods 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 238000005538 encapsulation Methods 0.000 claims description 5
- 150000002739 metals Chemical class 0.000 claims description 4
- 238000012360 testing method Methods 0.000 claims description 4
- 229910000846 In alloy Inorganic materials 0.000 claims description 3
- 229910001128 Sn alloy Inorganic materials 0.000 claims description 3
- 239000003795 chemical substances by application Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 229910052723 transition metal Inorganic materials 0.000 claims description 3
- 150000003624 transition metals Chemical class 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims 2
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical group C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims 2
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000002441 reversible effect Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 238000005266 casting Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910002065 alloy metal Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- -1 polydimethylsiloxane Polymers 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Abstract
The invention discloses a liquid metal-based high-sensitivity flexible touch sensor which is characterized by comprising a flexible sensor, a wire and a packaging layer, wherein a micro-channel structure is arranged in the flexible sensor, the micro-channel structure comprises n rows and n columns of latticed liquid metal droplet array channels and inter-droplet channels, and any two adjacent liquid metal droplet array channels in each row/column are communicated with each other through the inter-droplet channels; four side edges of the micro-channel structure are respectively connected with the lead so as to enable the flexible sensor to be connected with the lead; and packaging the flexible sensor connected with the lead to obtain a packaging layer for packaging the flexible sensor. Correspondingly, the invention also discloses a preparation method for preparing the high-sensitivity flexible touch sensor, and the high-sensitivity flexible touch sensor can be effectively prepared by adopting the preparation method.
Description
Technical Field
The invention relates to the technical field of electronics and sensors, in particular to a high-sensitivity flexible touch sensor based on liquid metal.
Background
As is well known, liquid metal generally refers to metal in a liquid state at normal temperature, and the liquid metal has the characteristics of high plastic property after melting, high hardness, high corrosion resistance, high wear resistance and the like. Because of the characteristics, the liquid metal has huge application prospect in the fields of electronic devices, flexible robots, 3D printing and the like.
It is found that most of the sensors for detecting stress distribution in the current market have rigid structures, and the electrode parts of the sensors are still made of traditional metals, so that the rigid structures of the sensors can bear very large impact force in the use process, but cannot be stretched and have elasticity, so that the sensors are low in use comfort and cannot accurately detect stress on complex curved surfaces.
Compared with the traditional hard material, the flexible material based on the liquid metal is a novel programmable material, has high plasticity and adaptability, and can be applied to various fields including robots, flexible electronics, bionic devices and the like. The material has good mechanical elasticity and good conductivity, can bear large-amplitude stretching, translation and twisting, has the sensing characteristic of strain induction, and has wider application prospect. For example, more comfortable, snug, flexible prostheses and exoskeleton devices, more flexible, highly integrated electrical components and sensors can be manufactured.
In view of this, the inventors have desired to combine the above-mentioned characteristics of liquid metal to design a liquid metal-based high-sensitivity flexible tactile sensor and a method of manufacturing the same.
Disclosure of Invention
In order to solve the problems in the background art, the invention provides a high-sensitivity flexible touch sensor based on liquid metal, which is characterized in that a micro-channel structure for accommodating the liquid metal is designed in the sensor by utilizing the characteristic that the self resistance of the liquid metal can change under the action of external force, so that the size and the position of the external force acting on the sensor are effectively detected, and the sensor has the advantages of high sensitivity, strong stability, simple structure, high plasticity and strong adaptability.
In order to solve the technical problems, the invention adopts the following technical scheme: the high-sensitivity flexible touch sensor based on the liquid metal is characterized by comprising a flexible sensor, a wire and a packaging layer, wherein a micro-channel structure is arranged in the flexible sensor, the micro-channel structure comprises n rows and n columns of grid-shaped liquid metal droplet array channels and droplet-to-droplet channels, and any two adjacent liquid metal droplet array channels in each row/column are communicated with each other through the droplet-to-droplet channels;
four side edges of the micro-channel structure are respectively connected with the lead so as to enable the flexible sensor to be connected with the lead; and packaging the flexible sensor connected with the lead to obtain a packaging layer for packaging the flexible sensor.
Furthermore, in the high-sensitivity flexible touch sensor of the invention, liquid metal is injected into the liquid metal droplet array channel and the inter-droplet channel to form a sensitive element of the flexible touch sensor, and liquid metal droplets are arranged in the liquid metal droplet array channel.
Furthermore, in the high-sensitivity flexible touch sensor, eight wires are arranged, the eight wires are divided into four groups in two, liquid metal liquid drops in liquid metal liquid drop array channels arranged on four side edges of the micro-channel structure are respectively connected with one group of wires through pins, and the wires are also connected with external measuring equipment; at least one liquid metal droplet array channel is arranged between two adjacent pins;
when the flexible sensor is not pressed by external force, the flexible sensor is in an unstressed state, and the resistance value among pins is unchanged; when the flexible sensor is pressed by external force, the flexible sensor is in a stressed state, the resistance value among the pins changes, the electric signal output by the lead changes along with the change of the size and the position of the applied external force, and the position and the size of the external force pressing are tested by testing the resistance value among the pins in the unstressed state and the stressed state.
Furthermore, in the high-sensitivity flexible touch sensor, when the flexible sensor is pressed by external force, the shapes of the liquid metal droplet array channels and the inter-droplet channels are changed, the liquid metal is mapped into the change of the self resistance, and then an electric signal is output through a wire, and the external measuring equipment reconstructs and converts the position and the size of the external force pressing according to the output electric signal, and filters the position to obtain the accurate external force pressing position.
Further, in the high-sensitivity flexible touch sensor of the present invention, the flexible sensor further comprises a substrate, the encapsulation layer is encapsulated on the upper top surface of the flexible sensor, and the substrate is disposed on the lower bottom surface of the flexible sensor.
Further, in the high-sensitivity flexible touch sensor provided by the invention, the packaging layer is a PDMS film, and the substrate is a PDMS substrate.
Further, in the high-sensitivity flexible tactile sensor of the invention, the aspect ratio of the inter-droplet channels between two adjacent liquid metal droplet array channels is 5:3.
Further, in the high-sensitivity flexible tactile sensor according to the present invention, the liquid metal is one of gallium (Ga), gallium (Ga) -indium (In) alloy, gallium (Ga) -indium (In) -tin (Sn) alloy, and transition metal, solid nonmetallic element, or doped with two or more metals of gallium, gallium-indium alloy, or gallium-indium-tin alloy.
The invention further aims to provide a preparation method of the high-sensitivity flexible touch sensor, which is low in production process cost and convenient to produce, and the high-sensitivity flexible touch sensor prepared by the preparation method can effectively detect the external force and the position acting on the sensor based on the resistance change of the liquid metal by utilizing the characteristic that the resistance of the liquid metal can change under the action of external force.
In order to achieve the above object, the present invention provides a method for manufacturing the high-sensitivity flexible tactile sensor, which comprises the steps of:
(1) Preparing a flexible sensor: preparing a sensor base mold, pouring a high polymer material into the sensor base mold, and taking out the high polymer material after curing for 1.5-2.5 hours at 60-100 ℃ to obtain a flexible sensor;
(2) Preparing a packaging layer: the high polymer material and the curing agent are adopted for spin coating, and after curing for 1.5-2.5 hours at 60-100 ℃, the self area is cut so that the self area is equal to the area of the upper top surface of the flexible sensor;
(3) Respectively inserting wires into liquid metal droplet array channels at four side edges of the micro-channel structure, and placing a packaging layer on the upper top surface of the flexible sensor;
(4) And injecting liquid metal into the micro-channel structure of the flexible sensor.
Further, in the manufacturing method of the present invention, in the step (1), the manufacturing of the sensor base mold includes the steps of: and (3) pouring the 3D printing flexible sensor by adopting EcoFlex00-30 silica gel, controlling the EcoFlex00-30 silica gel to cure at 40 ℃ for 20 minutes, and then, reversing the mold to obtain the sensor base mold.
The invention has the beneficial effects that: the high-sensitivity flexible touch sensor based on the liquid metal is provided with the micro-channel structure, the micro-channel structure is filled with the liquid metal, so that the external force and the position of the sensor are detected by utilizing the characteristic that the self resistance of the liquid metal can change under the action of external force, and the sensor has the advantages of high sensitivity, high stability, simple structure, high plasticity and high adaptability. In practical application, the high-sensitivity flexible touch sensor can be used for manufacturing more comfortable, clung and soft artificial limbs and exoskeleton equipment, and more flexible and highly integrated electric elements and sensors, and has good popularization prospect and application value.
Correspondingly, the invention also discloses a preparation method for preparing the high-sensitivity flexible touch sensor, and the preparation method has the advantages of low production process cost and convenient production, and the high-sensitivity flexible touch sensor prepared by the preparation method also has the advantages.
Drawings
FIG. 1 is a schematic diagram of a high sensitivity flexible tactile sensor according to one embodiment of the present invention;
FIG. 2 schematically illustrates a schematic of the structure of the aspect ratio of the inter-drop channels between two adjacent liquid metal drop array channels of a high sensitivity flexible tactile sensor according to the present invention;
FIG. 3 is a flow chart of steps in one embodiment of a method for manufacturing a high sensitivity flexible tactile sensor according to the present invention;
FIG. 4 schematically illustrates a process flow diagram of a method of manufacturing the high sensitivity flexible tactile sensor illustrated in FIG. 3; (a) is a schematic structural diagram of a 3D printed flexible sensor; (b) A structural schematic diagram of the reverse mould of the 3D printing flexible sensor is shown; (c) A structural schematic diagram of a sensor basic mould obtained after mould reversing; (d) A schematic structural diagram of the flexible sensor prepared for casting; (e) is a schematic structural diagram of the encapsulation layer; (f) The structure schematic diagram is formed by combining the flexible sensor with the packaging layer and the lead; (g) Is a schematic structural diagram of the flexible sensor after injecting liquid metal into the micro-channel structure.
Description of the reference numerals:
1. a flexible sensor;
2. a wire;
3. an encapsulation layer;
4. an array of liquid metal droplet channels;
5. inter-drop channels.
Detailed Description
In order to describe the technical contents, the achieved objects and effects of the present invention in detail, the following description will be made with reference to the embodiments in conjunction with the accompanying drawings.
In the prior art, the existing sensor for detecting stress distribution generally adopts a rigid structure, the electrode part of the sensor is still made of traditional metal, and the rigid structure can bear very large impact force in the use process, but cannot be stretched and has no elasticity, so that the sensor is low in use comfort and cannot accurately detect the stress of a complex curved surface.
Therefore, the invention provides a brand-new high-sensitivity flexible touch sensor based on liquid metal, which is characterized in that a micro-channel structure containing the liquid metal is designed in the sensor by utilizing the characteristic that the resistance of the liquid metal can change under the action of external force, so that the sensor has the functions of measuring the pressure and the touch position by utilizing the micro-channel structure, and the accurate stress detection on the complex curved surface is realized.
As shown in fig. 1, a liquid metal-based high-sensitivity flexible tactile sensor is designed in the present invention, and the high-sensitivity flexible tactile sensor specifically includes: the liquid metal liquid drop array device comprises a flexible sensor, a wire and a packaging layer, wherein a micro-channel structure is arranged in the flexible sensor, the micro-channel structure comprises n rows and n columns of latticed liquid metal liquid drop array channels and inter-drop channels, and any two adjacent liquid metal liquid drop array channels in each row/column are communicated with each other through the inter-drop channels;
four side edges of the micro-channel structure of the flexible sensor are respectively connected with the lead so as to enable the flexible sensor to be connected with the lead; accordingly, the flexible sensor connected with the lead can be packaged to obtain the packaging layer for packaging the flexible sensor.
It should be noted that, in this embodiment, the designed micro-fluidic channel structure inside the flexible sensor specifically includes 8 rows and 8 columns of latticed liquid metal droplet array channels and inter-droplet channels, that is, 64 latticed liquid metal droplet array channels are disposed in the micro-fluidic channel structure, and any two adjacent liquid metal droplet array channels in each row/column of liquid metal droplet array channels are communicated through one inter-droplet channel. In the invention, liquid metal is also injected into the liquid metal droplet array channel and the inter-droplet channel to form a sensitive element of the flexible touch sensor; the liquid metal liquid drop array channels are provided with liquid metal liquid drops, the liquid metal liquid drops have good deformation characteristics, the resistance value of the liquid metal liquid drops can be changed along with the applied pressure, and the surface tension and the conductivity of the liquid metal liquid drops are high.
Accordingly, as can be seen from further reference to fig. 1, in this embodiment, the designed high-sensitivity flexible tactile sensor is specifically provided with eight wires, and the eight wires are divided into four groups two by two, at this time, since the micro-channel structure is a rectangular grid structure, liquid metal droplets in the liquid metal droplet array channels disposed at four side edges of the micro-channel structure can be connected with one group of wires through pins respectively, and two liquid metal droplet array channels are disposed between two adjacent pins, at this time, two wires are connected to the four side edges of the micro-channel structure respectively, and the eight wires are also connected with an external measurement device.
When the flexible sensor is not pressed by external force, the flexible sensor is in an unstressed state, and the resistance value among pins is unchanged; when the flexible sensor is pressed by external force, the flexible sensor is in a stressed state, the resistance value among the pins changes, the electric signal output by the lead can change along with the change of the size and the position of the applied external force, and the external measuring equipment can test the position and the size of the external force pressed by the resistance value among the pins in the unstressed state and the stressed state.
In the invention, when the high-sensitivity flexible touch sensor is actually applied, when the flexible sensor is pressed by external force, the shapes of the liquid metal drop array channels and the inter-drop channels in the flexible sensor are changed, the liquid metal is mapped into the change of the self resistance, and then an electric signal is output through a wire, in addition, the sensor testing system of the electrical impedance imaging can reconstruct and convert the position and the size of the external force pressing according to the output electric signal, and the accurate external force pressing position is obtained by filtering, so that the detection of the external force pressing size and the touch position is realized.
In addition, in the present embodiment, for the high-sensitivity flexible tactile sensor designed by the present invention, the inventors have also developed theoretical analysis and simulation of the liquid metal liquid bridge and used a high-speed camera to verify the results. In this embodiment, the FLUENT software is specifically used to simulate the separation situation of two liquid metal droplets in different aspect ratios of the liquid bridge (i.e. different aspect ratios of the channels between droplets), and a high-speed camera is used to perform shooting, and the details of the liquid metal droplets with different structural dimensions when the liquid metal droplets break are found during simulation verification: when two liquid metal droplets are contacted with each other, if the external acting force is greater than the surface tension of the liquid, the two liquid metal droplets are fused together; in the drawing process, the liquid bridge between two liquid metal drops is not broken immediately, but a liquid metal liquid column is formed to connect the two liquid metal drops. The FLUENT software is analog simulation software known in the art, and the present invention will not be described in detail.
It can be seen that based on the simulation and shooting results, it is shown that: the liquid metal droplet array channels and the inter-droplet channels of the micro-channel structure arranged in the flexible sensor have important influence on the stability of the liquid metal liquid bridge. For this reason, the inventors simulated and photographed the separation of liquid metal droplets at different distances, and determined that the optimal aspect ratio of the inter-droplet channels was 5:3. That is, in the present embodiment, the ratio between the length d1 (as shown in fig. 1) of the liquid bridge between the liquid metal droplets in the adjacent two liquid metal droplet array channels and the width d2 (as shown in fig. 1) of the liquid bridge between the liquid metal droplets in the adjacent two liquid metal droplet array channels of the designed micro flow channel structure of the high-sensitivity flexible tactile sensor is d1/d2=5:3, and the liquid bridge between the liquid metal droplets in the adjacent two liquid metal droplet array channels shows good reversible on-off characteristics under the aspect ratio of the inter-droplet channels.
In addition, in the high-sensitivity flexible touch sensor designed by the invention, the flexible sensor further comprises a substrate, the packaging layer of the high-sensitivity flexible touch sensor is packaged on the upper top surface of the flexible sensor, and the substrate is arranged on the lower bottom surface of the flexible sensor. Wherein, the material of the packaging layer is consistent with that of the substrate, and a high polymer material such as PDMS (polydimethylsiloxane) can be selected, and at this time, the packaging layer is a PDMS film, and the substrate is a PDMS substrate.
Meanwhile, in order to optimize the effect of practical use In practical application, in the high-sensitivity flexible touch sensor of the invention, the liquid metal can specifically adopt gallium (Ga), gallium (Ga) -indium (In) alloy, gallium (Ga) -indium (In) -tin (Sn) alloy, and one of transition metal and solid nonmetallic element, or adopt the doping of two or more metals of gallium, gallium-indium alloy or gallium-indium-tin alloy.
Accordingly, referring to fig. 3 and 4, in the present invention, a preparation method for preparing the above-mentioned high-sensitivity flexible tactile sensor is also designed, which specifically includes the following steps:
(1) The flexible sensor is rendered and 3D printed using a 3D printer. And pouring the 3D printing flexible sensor by using EcoFlex00-30 silica gel, controlling the EcoFlex00-30 silica gel to be cured at 40 ℃ for 20 minutes, and then, performing reverse molding to obtain the sensor base mold.
(2) Pouring a high polymer material into the sensor base mold until the sensor base mold is completely filled, and taking out the high polymer material after curing for 1.5-2.5 hours at 60-100 ℃ to obtain a flexible sensor; wherein, in order to obtain the optimal effect, the high polymer material can be taken out after being cured for 2 hours at 80 ℃ under specific control.
(3) Preparing a packaging layer: and (3) using a spin coater to uniformly mix the high polymer material and the curing agent, and curing for 1.5-2.5 hours at 60-100 ℃ to cut the area of the flexible sensor so that the area of the flexible sensor is equal to the area of the upper top surface of the flexible sensor.
(3) And respectively inserting the leads into liquid metal droplet array channels at four side edges of the micro-channel structure of the flexible sensor, and placing the packaging layer on the upper top surface of the flexible sensor.
(4) And injecting liquid metal into the micro-channel structure of the flexible sensor.
Specifically, in the present invention, in the step (3), the EcoFlex00-30 material is a commonly used silica gel material, which is well known to those skilled in the art, and will not be described herein in detail.
In addition, in the present invention, in the above step (2), PDMS casting may be performed in a ratio of 10:1 by controlling the prepolymer A and the crosslinking agent B to be cast with 10:1 PDS.
In addition, in the present invention, the surface of the flexible sensor may be specifically treated with plasma to increase adhesion, and in the above step (4), the flexible sensor may be immersed in a water bath to be injected with liquid metal so as to remove fine bubbles.
In summary, the high-sensitivity flexible touch sensor provided by the invention has the advantages of simple structure, high sensitivity, stable output and the like, can be used for manufacturing more comfortable, clung and soft artificial limbs and exoskeleton equipment, is applied to preparing more flexible and highly integrated electric elements and sensors, and has good popularization prospect and application value.
The foregoing description is only illustrative of the present invention and is not intended to limit the scope of the invention, and all equivalent changes made by the specification and drawings of the present invention, or direct or indirect application in the relevant art, are included in the scope of the present invention.
Claims (10)
1. The high-sensitivity flexible touch sensor based on the liquid metal is characterized by comprising a flexible sensor, a wire and a packaging layer, wherein a micro-channel structure is arranged in the flexible sensor, the micro-channel structure comprises n rows and n columns of grid-shaped liquid metal droplet array channels and droplet-to-droplet channels, and any two adjacent liquid metal droplet array channels in each row/column are communicated with each other through the droplet-to-droplet channels;
four side edges of the micro-channel structure are respectively connected with the lead so as to enable the flexible sensor to be connected with the lead; and packaging the flexible sensor connected with the lead to obtain a packaging layer for packaging the flexible sensor.
2. The high-sensitivity flexible touch sensor according to claim 1, wherein the liquid metal is injected into the liquid metal droplet array channel and the inter-droplet channel to form a sensing element of the flexible touch sensor, and the liquid metal droplet array channel is provided with liquid metal droplets therein.
3. The high-sensitivity flexible touch sensor according to claim 2, wherein eight wires are provided, the eight wires are divided into four groups in two, liquid metal liquid drops in liquid metal liquid drop array channels arranged on four side edges of the micro-channel structure are respectively connected with one group of wires through pins, and the wires are also connected with external measuring equipment; at least one liquid metal droplet array channel is arranged between two adjacent pins;
when the flexible sensor is not pressed by external force, the flexible sensor is in an unstressed state, and the resistance value among pins is unchanged; when the flexible sensor is pressed by external force, the flexible sensor is in a stressed state, the resistance value among the pins changes, the electric signal output by the lead changes along with the change of the size and the position of the applied external force, and the position and the size of the external force pressing are tested by testing the resistance value among the pins in the unstressed state and the stressed state.
4. The high-sensitivity flexible touch sensor according to claim 3, wherein when the flexible sensor is pressed by an external force, the shapes of the liquid metal droplet array channels and the inter-droplet channels are changed, the liquid metal is mapped into the change of the self resistance, and then an electric signal is output through a wire, and the external measuring device reconstructs and converts the position and the size of the external force pressing according to the output electric signal, and filters the position to obtain an accurate external force pressing position.
5. The high-sensitivity flexible tactile sensor according to claim 1, further comprising a substrate, wherein the encapsulation layer is encapsulated on an upper top surface of the flexible sensor, and wherein the substrate is disposed on a lower bottom surface of the flexible sensor.
6. The high sensitivity flexible tactile sensor according to claim 5, wherein said encapsulation layer is a PDMS film and said substrate is a PDMS substrate.
7. The high sensitivity flexible tactile sensor according to claim 1, wherein the aspect ratio of the inter-drop channels between two adjacent liquid metal drop array channels is 5:3.
8. The high-sensitivity flexible tactile sensor according to claim 1, wherein the liquid metal is gallium (Ga), gallium (Ga) -indium (In) alloy, gallium (Ga) -indium (In) -tin (Sn) alloy, and one of transition metal, solid nonmetallic element, or doping with two or more metals of gallium, gallium-indium alloy, or gallium-indium-tin alloy.
9. A method of manufacturing a high sensitivity flexible tactile sensor according to any one of claims 1 to 8, comprising the steps of:
(1) Preparing a flexible sensor: preparing a sensor base mold, pouring a high polymer material into the sensor base mold, and taking out the high polymer material after curing for 1.5-2.5 hours at 60-100 ℃ to obtain a flexible sensor;
(2) Preparing a packaging layer: the high polymer material and the curing agent are adopted for spin coating, and after curing for 1.5-2.5 hours at 60-100 ℃, the self area is cut so that the self area is equal to the area of the upper top surface of the flexible sensor;
(3) Respectively inserting wires into liquid metal droplet array channels at four side edges of the micro-channel structure, and placing a packaging layer on the upper top surface of the flexible sensor;
(4) And injecting liquid metal into the micro-channel structure of the flexible sensor.
10. The method of manufacturing according to claim 9, wherein in the step (1), the manufacturing sensor base mold includes the steps of: and (3) pouring the 3D printing flexible sensor by adopting EcoFlex00-30 silica gel, controlling the EcoFlex00-30 silica gel to cure at 40 ℃ for 20 minutes, and then, reversing the mold to obtain the sensor base mold.
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