CN107830893B - A kind of multi-functional microfluid flexible sensor - Google Patents
A kind of multi-functional microfluid flexible sensor Download PDFInfo
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- CN107830893B CN107830893B CN201711061055.3A CN201711061055A CN107830893B CN 107830893 B CN107830893 B CN 107830893B CN 201711061055 A CN201711061055 A CN 201711061055A CN 107830893 B CN107830893 B CN 107830893B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
Abstract
A kind of multi-functional microfluid flexible sensor, is related to sensor.Equipped with flexible substrate, microfluid and electrode, flexible substrate includes upper matrix and lower substrate, and upper lower substrate is gas permeable matrix, and fluid channel of different shapes is had in upper matrix, has electrode in lower substrate；The microfluid is located inside the fluid channel of upper matrix, and the electrode is located at lower substrate.It can be used for measurement structure in-plane deformation, body structure surface normal pressure, Pneumatic pressure, ambient oxygen concentration and temperature, when being used for measurement structure in-plane deformation and body structure surface normal pressure, microfluid is conducting liquid inside fluid channel, microfluid flexible sensor is affixed on body structure surface, when structure stress effect, the shape of microfluid also changes to change so as to cause sensor resistance, by the size relation of calibration resistance variations and body structure surface deformation, and then the deformation that structure is occurred is calculated according to the variation of measurement sensor resistance.Low manufacture cost, measurable variable be more, high sensitivity.
Description
Technical field
The present invention relates to sensors can be integrated in any labyrinth surface, be used for more particularly, to MEMS technology is based on
The in-plane deformation of normal pressure, structure suffered by measurement structure, it can also be used to measure a kind of more function of gas componant, temperature and humidity
It can microfluid flexible sensor.
Background technique
Primary information resource of the sensor as control system, application have penetrated into industrial production, aerospace, ocean
The key areas such as detection, environmental protection, medical diagnosis, bioengineering, space development and smart home.To a certain extent
It says, sensor is the critical component for determining a system performance and performance indicator.Currently, sensor is mainly used in every field
The parameters such as in-plane deformation, surface pressing, the gas componant under Service Environment, temperature, the humidity of detection structure.
Currently, the sensor for measurement structure in-plane deformation and surface pressing is mainly resistance strain gage, principle is
The variation strained in structure is converted into resistance strain gage resistance variations.By the development of many years, the production work of resistance strain gage
Skill maturation, low manufacture cost, measurement accuracy are high, and yet form effective temperature-compensation method, but due to resistance
The sensing original cost of foil gauge is wire/foil, and receiving deformability is poor, the resistance strain gage gold when moderate finite deformation occurs for structure
Belong to silk/foil and fracture failure easily occurs, measurement is caused to fail；Furthermore resistance strain gage can only be in measurement structure in-plane deformation and face
Pressure is unable to measure normal pressure suffered by body structure surface, for the measurement of Flight Vehicle Structure surface Pneumatic pressure, skyscraper wind
The key areas such as pressure measurement its helpless ([1] Pan Xijun country's resistance strain gage and mechanical quantity sensor general situation of development [J]
Sensor technology, 1982, (03): 23-37).
As the development of MEMS technology and new material, new process are constantly applied, it is novel that a batch is emerged in recent years
Flexible sensor mainly has novel graphene flexible sensor ([2] J Yang, Q Ran, D Wei, et al.Three-
dimensional conformal graphene microstructure for flexible and highly
Sensitive electronic skin [J] .Nanotechnology.2017,28 (11): 115501), microfluid sensor
([3]J C Yeo,Kenry,J Yu,et al.Triple-State Liquid-Based Microfluidic Tactile
Sensor with High Flexibility,Durability,and Sensitivity[J].ACS Sensors.2016,1
(5):543-551).Novel graphene sensor is mainly the method by chemical vapor deposition, and one is deposited on flexible substrate
Layer has certain thickness graphene, then encapsulated moulding, and principle is similar to resistance strain gage, by the variation of sensor institute stress
Be converted to sensor resistance variation.Novel graphene sensor, since its encapsulating material and graphene sensing layer are all flexible,
It can be used for pressure and normal pressure in face suffered by measurement structure surface, when stress effect when, sensor easily deform into
And its resistance is caused to change, the size for institute's stress that you can get it by establishing the relationship of resistance variations and institute's stress size.
Microfluid sensor, by injecting in the good flexible microfluidic road of preforming and encapsulated moulding conducting liquid.When sensor by
The effect of power and conducting liquid shape also changes when deforming, in fluid channel, and then cause microfluid sensor electric
Resistance changes, and by demarcating the mathematical relationship of resistance variations and institute's stress size, calculates institute by the resistance variations measured
The size of stress.Although above two flexible sensor can pressure and normal pressure in measurement structure face, be all to rely on
The deformation of sensor itself leads to the size of variation stress to demarcate of resistance, and not only sensor thickness is big, and sensitivity
It is low.
Summary of the invention
It is an object of the invention to be directed to existing sensor above shortcomings, provide that measurement accuracy is high, stability is good,
Any labyrinth surface, the in-plane deformation for normal pressure, structure suffered by measurement structure, it can also be used to measure can be integrated in
A kind of multi-functional microfluid flexible sensor of gas componant, temperature and humidity.
The present invention is equipped with flexible substrate, microfluid and electrode, and the flexible substrate includes upper matrix and lower substrate, it is described on
Matrix and lower substrate are gas permeable matrix, and fluid channel of different shapes is had in upper matrix, has electrode in lower substrate；Institute
It states microfluid to be located inside the fluid channel of upper matrix, the electrode is located at lower substrate.
The present invention can be used for measurement structure in-plane deformation, body structure surface normal pressure, Pneumatic pressure, ambient oxygen concentration and
Temperature, when being used for measurement structure in-plane deformation and body structure surface normal pressure, microfluid is conducting liquid (packet inside fluid channel
Include liquid metal, salting liquid, conductive mixed solution etc.), microfluid flexible sensor is affixed on body structure surface, when structure stress is made
Used time, the shape of microfluid also changes to change so as to cause sensor resistance, passes through calibration resistance variations and structure
The size relation of surface deformation, and then the deformation that structure is occurred is calculated according to the variation of measurement sensor resistance.
When being used to measure Pneumatic pressure, microfluid is ionic liquid inside fluid channel, and microfluid flexible sensor is pasted
In body structure surface, when body structure surface is acted on by Pneumatic pressure, due to the gas permeability of flexible substrate, the oxygen in air is through soft
Property matrix and ionic liquid occur chemical reaction generate superoxipe ion, to change the conductivity of ionic liquid.Determined by Henry
Rule is it is found that the oxygen concentration dissolved in the size and ionic liquid of Pneumatic pressure is a positively related relationship, so establishing gas
The mathematical relationship of dynamic pressure size-oxygen concentration-ionic liquid conductivity three, by the variation for measuring ionic liquid conductivity
And then calculate the size of Pneumatic pressure suffered by body structure surface；
When measuring oxygen concentration, microfluid is ionic liquid inside fluid channel, when oxygen concentration changes in environment
When, it can also be changed by the oxygen concentration that flexible substrate infiltrates into microfluid, be led so establishing oxygen concentration-ionic liquid
The mathematical relationship of both electric rates, the variation by measuring ionic liquid conductivity calculate the size of ambient oxygen concentration；
When measuring temperature, microfluid can make conducting liquid be also possible to ionic liquid inside fluid channel, work as environment
When temperature changes, changes will occur for the conductivity and micro-channel structure of microfluid, calibration sensor resistance or conduction
The variation of rate and the relationship of temperature can calculate the temperature of environment by the size of measurement sensor resistance or conductivity.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the embodiment of the present invention；
Fig. 2 is the measurement structure in-plane deformation of the embodiment of the present invention and the schematic diagram of normal pressure；
Fig. 3 is the schematic diagram of the measurement Pneumatic pressure and oxygen concentration of the embodiment of the present invention；
Fig. 4 is the schematic diagram of the measurement temperature of the embodiment of the present invention；
Fig. 5 is measurement structure surface pressing field, temperature field and the strain field distribution figure of the embodiment of the present invention.
Specific embodiment
Following embodiment will the invention will be further described in conjunction with attached drawing.
Referring to Fig. 1~5, the embodiment of the present invention is equipped with flexible substrate 3, microfluid 2 and electrode 4, and the flexible substrate 3 includes
Upper matrix 31 and lower substrate 32, the upper matrix 31 and lower substrate 32 are gas permeable matrix, with difference in upper matrix 31
The fluid channel 1 of shape has electrode 4 in lower substrate 32；The microfluid 2 is located inside the fluid channel 1 of upper matrix 31, the electricity
Pole 4 is located on lower substrate 32.
The present invention can be used for measurement structure in-plane deformation, body structure surface normal pressure, Pneumatic pressure, ambient oxygen concentration and
Temperature, when being used for measurement structure in-plane deformation and body structure surface normal pressure, microfluid is conducting liquid (packet inside fluid channel
Include liquid metal, salting liquid, conductive mixed solution etc.), microfluid flexible sensor is affixed on body structure surface, when structure stress is made
Used time, the shape of microfluid also changes to change so as to cause sensor resistance, passes through calibration resistance variations and structure
The size relation of surface deformation, and then the deformation that structure is occurred is calculated according to the variation of measurement sensor resistance.
Microfluid flexible sensor provided by the invention: 1) fluid channel formpiston is on a silicon substrate made by photoetching technique；
2) dimethyl silicone polymer (PDMS) and curing agent are then poured into above-mentioned mold and naked silicon wafer by the 1 uniformly mixing of ︰ 10 respectively
In, it is placed in 80 DEG C of vacuum drying ovens and keeps the temperature 2h；3) PDMS being cured is removed from the molds, electrode is affixed in naked silicon wafer
Solidify PDMS film both ends；4) by oxygen plasma activating technology, the two panels PDMS with fluid channel and with electrode is activated
And it is bonded；5) microfluid is injected in fluid channel using syringe, and seals inlet.Microfluid sensor is as shown in Figure 1.
As shown in Fig. 2, microfluid sensor is integrated in body structure surface, and when structure stress P effect, the shape of conducting liquid
Shape also changes and changes so as to cause sensor resistance, passes through 2400 real-time measurement microfluid sensor resistance of Keithley
Variation, by the size relation of calibration resistance variations and body structure surface deformation, and then according to the variation meter of measurement sensor resistance
Calculate the deformation that structure is occurred.
As shown in figure 3, microfluid sensor is integrated in the surface structure A, when the surface structure A is by Pneumatic pressure P0Effect
When, due to the gas permeability of flexible substrate, air can enter inside fluid channel, wherein oxygen O2It can occur with ionic liquid M reversible
Redox reaction generate superoxipe ion, to change the conductivity (resistance) of ionic liquid M, by establishing Pneumatic pressure
Size-oxygen concentration-ionic liquid conductivity three mathematical relationship, by the variation for measuring ionic liquid M conductivity
Calculate the size of Pneumatic pressure suffered by the surface structure A.Similarly, it when measuring oxygen concentration, establishes oxygen concentration-ionic liquid and leads
The mathematical relationship of electric rate three, the variation by measuring ionic liquid M conductivity calculate the size of ambient oxygen concentration.
In Fig. 3, label B indicates other, and N indicates glue-line.
As shown in figure 4, the conductivity and micro-channel structure of microfluid can all become when environment temperature changes
Change, perhaps the relationship of the variation of conductivity and temperature passes through measurement sensor resistance or conductivity to calibration sensor resistance
Size can calculate the temperature of environment.In Fig. 4, label L indicates that anion, G indicate cation.
As shown in figure 5, an appropriate number of microfluid sensor Q is integrated in body structure surface, it is based on above-mentioned sensing principle, it is real
When acquisition sensor resistance variation, the data of comprehensive all the sensors it is restructural go out body structure surface pressure field, strain field and temperature
?.Δ R/R is the resistance change rate of sensor compression masterpiece used time；P is body structure surface pressure；ε is body structure surface strain；
T is body structure surface temperature.
Claims (2)
1. a kind of multi-functional microfluid flexible sensor, it is characterised in that be equipped with flexible substrate, microfluid and electrode, the flexibility
Matrix includes upper matrix and lower substrate, and fluid channel of different shapes is had in upper matrix, has electrode in lower substrate；The miniflow
Body is located inside the fluid channel of upper matrix, and the electrode is located at lower substrate；
The upper matrix and lower substrate are gas permeable matrix；The multi-functional microfluid flexible sensor is used for measurement structure
In-plane deformation, body structure surface normal pressure, Pneumatic pressure, ambient oxygen concentration and temperature, when for measurement structure in-plane deformation
When with body structure surface normal pressure, microfluid is conducting liquid inside fluid channel, and microfluid flexible sensor is affixed on structure table
Face, when structure stress effect, the shape of microfluid also changes to change so as to cause sensor resistance, passes through calibration
The size relation of resistance variations and body structure surface deformation, calculates the change that structure is occurred according to the variation of measurement sensor resistance
Shape；
When the multi-functional microfluid flexible sensor is used to measure Pneumatic pressure, microfluid is ionic liquid inside fluid channel,
Microfluid flexible sensor is affixed on body structure surface, when body structure surface is acted on by Pneumatic pressure, due to breathing freely for flexible substrate
Property, the oxygen in air occurs chemical reaction through flexible substrate and ionic liquid and generates superoxipe ion, changes ionic liquid
Conductivity；
The oxygen concentration dissolved in the size and ionic liquid of Pneumatic pressure is positive correlation, establishes Pneumatic pressure size-oxygen
Gas concentration-ionic liquid conductivity three mathematical relationship, the variation by measuring ionic liquid conductivity calculate knot
The size of Pneumatic pressure suffered by structure surface；
When measuring oxygen concentration, microfluid is ionic liquid inside fluid channel, when oxygen concentration changes in environment, is led to
Crossing flexible substrate and infiltrating into the oxygen concentration of microfluid can also change, and establish both oxygen concentration-ionic liquid conductivities
Mathematical relationship, the variation by measuring ionic liquid conductivity calculates the size of ambient oxygen concentration；
When measuring temperature, the conducting liquid that microfluid uses inside fluid channel is ionic liquid, when environment temperature changes
When, changes will occur for the conductivity and micro-channel structure of microfluid, the variation and temperature of calibration sensor resistance or conductivity
The relationship of degree is to calculate the temperature of environment by the size of measurement sensor resistance or conductivity.
2. a kind of multi-functional microfluid flexible sensor as described in claim 1, it is characterised in that the conducting liquid includes liquid
State metal, salting liquid, conductive mixed solution.
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