CN111289158A - Flexible pressure sensor and flexible pressure sensing array - Google Patents
Flexible pressure sensor and flexible pressure sensing array Download PDFInfo
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- CN111289158A CN111289158A CN201811511580.5A CN201811511580A CN111289158A CN 111289158 A CN111289158 A CN 111289158A CN 201811511580 A CN201811511580 A CN 201811511580A CN 111289158 A CN111289158 A CN 111289158A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
Abstract
The invention provides a flexible pressure sensor and a flexible pressure sensing array. Wherein, flexible pressure sensor is including range upon range of setting in proper order: the substrate layer is made of flexible high polymer; the electrode layer is arranged on the surface of the substrate layer, the substrate of the electrode layer is made of the flexible high polymer, and micron-sized silver sheets or other micro-nano conductive materials are filled in the flexible high polymer; the sensing layer is electrically connected with the electrode layer, the substrate of the sensing layer adopts the flexible high polymer, and the flexible high polymer is filled with carbon black nanoparticles or other micro-nano conductive materials. According to the invention, by stretching the geometric shape of the electrode layer and the microstructure of the sensing layer, the flexibility and the ductility of the pressure sensor are effectively improved, and the integration performance of the pressure sensor and the non-structural surface is effectively improved, so that the pressure sensor is simple in structure, convenient to process, easy to lead and low in cost.
Description
Technical Field
The invention relates to the technical field of pressure sensors, in particular to a flexible pressure sensor, a flexible pressure sensing array and application of the flexible pressure sensor and the flexible pressure sensing array in flexible wearable equipment and robot tactile equipment.
Background
Flexible sensors are indispensable elements, whether robots, which are widely used in industrial manufacturing and service industries, or increasingly popular wearable electronic devices, or clinical medicine. In recent years, with the intensive and extensive worldwide research on flexible sensors, a large number of flexible sensor structure designs have been proposed. However, many devices are difficult to meet the requirements of the above applications due to their lack of excellent flexibility and stretchability in their structure. Therefore, how to improve the flexibility and elasticity of the sensor becomes a key technical problem to be solved urgently in the industry on the premise of ensuring the performance of the sensor.
Disclosure of Invention
It is an object of the present invention to provide a flexible pressure sensor and a flexible pressure sensing array that can be used in wearable devices or robotic haptic devices.
To achieve the above and other related objects, the present invention provides a flexible pressure sensor, including: the substrate layer is made of flexible high polymer; the electrode layer is arranged on the surface of the substrate layer, the substrate of the electrode layer is made of the flexible high polymer, and micron-sized silver sheets or other micro-nano conductive materials are filled in the flexible high polymer; the sensing layer is electrically connected with the electrode layer, the substrate of the sensing layer adopts the flexible high polymer, and the flexible high polymer is filled with nano carbon black particles or other micro-nano conductive materials.
In an embodiment of the present invention, the flexible high molecular polymer includes: one or more of thermoplastic polyurethane elastomer, polydimethylsiloxane elastomer and polyolefin elastomer.
In an embodiment of the invention, the elastic modulus among the substrate layer, the electrode layer, and the sensing layer is a preset value, wherein the preset value of the elastic modulus of the electrode layer is the largest of the three layers, and the ratio of the elastic modulus of the other two layers to the elastic modulus of the electrode layer is adjustable.
In an embodiment of the present invention, a preparation method of the electrode layer includes: and filling micron-sized silver sheets or other micro-nano conductive materials with the mass ratio exceeding a certain percentage into the flexible high polymer, and printing or printing the mixture on the surface of the substrate layer after the mixture is uniformly mixed.
In an embodiment of the present invention, the electrode layer is designed as a finger electrode with a double-spiral structure or other structures.
In an embodiment of the present invention, a preparation method of the sensing layer includes: and preparing porous conductive slurry by using nano carbon black particles or other micro-nano conductive materials and a sacrificial template method, and printing or printing the porous conductive slurry on the surface of the electrode layer.
In one embodiment of the present invention, the porous conductive paste includes: the flexible high-molecular-weight carbon black/nano-composite material comprises a certain mass fraction of nano-carbon black particles or other micro-nano conductive materials, a certain percentage of sacrificial salt templates and a certain percentage of the flexible high-molecular polymer.
In an embodiment of the present invention, the sensing layer adopts one or more layers of screen structures, such as: six layers.
To achieve the above and other related objects, the present invention provides a flexible pressure sensing array comprising: the substrate layer is made of flexible high polymer; the electrode array layer is arranged on the surface of the substrate layer, the substrate of the electrode array layer is made of the flexible high polymer, micron-sized silver sheets or other micro-nano conductive materials are filled in the flexible high polymer, and the electrode array layer is electrically connected with one side of the electrode array in the same row or the same column; the sensing array layers are correspondingly arranged on the surfaces of the electrode array layers and are electrically connected with the electrode array layers, the matrix of the sensing array layers adopts the flexible high polymer, and the flexible high polymer is filled with carbon black nanoparticles or other micro-nano conductive materials.
In an embodiment of the present invention, the flexible high molecular polymer includes: one or more of thermoplastic polyurethane elastomer, polydimethylsiloxane elastomer and polyolefin elastomer.
In an embodiment of the invention, the elastic modulus among the substrate layer, the electrode array layer, and the sensor array layer is a predetermined value, wherein the predetermined value of the elastic modulus of the electrode array layer is the largest of the three layers.
In an embodiment of the present invention, a preparation method of each electrode layer included in the electrode array layer includes: and filling micron-sized silver sheets or other micro-nano conductive materials with the mass ratio exceeding a certain percentage into the flexible high polymer, and printing or printing the mixture on the surface of the substrate layer after the mixture is uniformly mixed.
In an embodiment of the invention, each electrode layer included in the electrode array layer adopts a finger electrode design with a double-spiral structure or other structures.
In an embodiment of the present invention, a preparation method of each sensing layer included in the sensing array layer includes: and preparing porous conductive paste by using nano carbon black particles or other micro-nano conductive materials and a sacrificial template method, and correspondingly printing or printing the porous conductive paste on the surface of the electrode array layer.
In one embodiment of the present invention, the porous conductive paste includes: the flexible high-molecular-weight carbon black/nano-composite material comprises a certain mass fraction of nano-carbon black particles or other micro-nano conductive materials, a certain percentage of sacrificial salt templates and a certain percentage of the flexible high-molecular polymer.
In an embodiment of the present invention, the sensing layer adopts one or more layers of screen structures, such as: six layers.
The flexible pressure sensor and the flexible pressure sensing array provided by the invention can be used for flexible wearable equipment for monitoring human body signs or used for robot touch sensing equipment.
As described above, the flexible pressure sensor and the flexible pressure sensing array of the present invention have the following advantages:
1. by means of modulus mismatch design of each layer of the sensor and multi-layer screen structure design of the sensing layer, on the basis of guaranteeing the performance of the sensor, the flexibility and elasticity of the sensor are effectively improved, and the resistance change of an electrode layer and the sensing layer is within 5% under a 50% stretching state of the sensor;
2. the sensitivity and the measuring range of the piezoresistive pressure sensor are effectively improved by the multi-level hole design of the sensing layer, and the resistance drift amount is reduced;
3. the preparation process is simple, the lead is easy, and the cost is low;
4. can replace piezoelectric or piezoresistive film sensors, and can be widely applied to various pressure detection, human body sign monitoring, robot touch and the like.
Drawings
FIG. 1 illustrates a top view of a flexible pressure sensor in one embodiment of the present invention.
Fig. 2 shows a cross-sectional view of the flexible pressure sensor of fig. 1 along line a-a.
Fig. 3 is a top view of the electrode layer of fig. 1.
Fig. 4 shows a cross-sectional view of the sensing layer of fig. 1 along line a-a.
Fig. 5 is a schematic structural diagram of a flexible pressure sensing array according to an embodiment of the invention.
Description of the element reference numerals
1 substrate layer
2 electrode layer
21 wiring part
3 sensing layer
Detailed Description
The embodiments of the present invention are described below with specific examples, and other advantages and effects of the present invention will be apparent to those skilled in the art from the disclosure in the specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
In view of the complex structure, the big technological difficulty of current flexible sensor structure, relative not enough circumstances such as bendability, stretchability moreover, neotype flexible pressure sensor structural design and preparation technology are proposed to this embodiment. As shown in fig. 1 and fig. 2, the flexible pressure sensor of the present embodiment is a multilayer structure, which sequentially comprises from bottom to top: the sensor comprises a substrate layer 1, an electrode layer 2 and a sensing layer 3, wherein the substrate layer 1, the substrate of the electrode layer 2 and the substrate of the sensing layer 3 are all made of the same flexible high polymer, for example: thermoplastic polyurethane elastomer, polydimethylsiloxane elastomer, polyolefin elastomer and the like, thereby achieving the technical effects of simple structure, convenient processing, stable interface, better flexibility and elasticity and the like.
Further, the multilayer flexible pressure sensor of the present embodiment utilizes the mismatch of the elastic modulus, such as: the elastic modulus ratio of the three materials (substrate layer, electrode layer, sensing layer) is about 3: 9: the device can effectively improve the in-plane stretching resistance of the sensor, can still ensure the effectiveness and accuracy of out-of-plane pressure testing under the condition of in-plane stress, thereby improving the signal-to-noise ratio and the precision of the flexible pressure sensor and solving the problem that in the prior art, the out-of-plane pressure measurement is influenced by in-plane strain in the stretching process due to the fact that in-plane and out-of-plane resistance changing mechanisms are the same.
The substrate layer 1, the electrode layer 2, and the sensing layer 3 of the present embodiment will be described in detail below.
The substrate layer 1 is realized by adopting a general coating, printing or printing process and the like, and the materials of the substrate layer can comprise: one or a mixture of any more of thermoplastic polyurethane elastomer, polydimethylsiloxane elastomer and polyolefin elastomer, and adjusting the viscosity by using a proper organic solvent (such as dimethylformamide, toluene, ethyl acetate and the like), wherein the mass ratio of the high molecular polymer to the organic solvent can be 1: 2-1: 3, as shown in 1: 2-1: 2.2, 1: 2.2-1: 2.4, 1: 2.4-1: 2.5, 1: 2.5-1: 2.7 or 1: 2.7-1: 3, etc.
Referring to fig. 3, in the present embodiment, the electrode layer 2 adopts a double-spiral interdigital electrode structure, specifically, the double-spiral interdigital electrode structure is formed by laying independent positive electrodes and independent negative electrodes in a spiral coil shape, the size and the distance of which are not limited, in a centrosymmetric manner at intervals, and the tail ends of the independent positive electrodes and the independent negative electrodes, which are far away from the center of the spiral line, are provided with wiring portions 21. The connection portion 21 is provided for sampling an analog resistance signal which, after conversion into a corresponding digital signal, can be further applied to electronic control. The electrode layer 2 is prepared, for example: micron-sized silver sheets with a mass ratio exceeding a certain percentage (such as 80%) are filled in the same flexible high molecular polymer as the substrate layer 1, and the micron-sized silver sheets are mixed uniformly and then printed on the surface of the substrate layer 1.
Referring to fig. 1, 2 and 4, in the present embodiment, the sensing layer 3 adopts a two-layer screen structure, specifically, the screen structure can be composed of two layers of "bow" shaped sensing materials, and the upper layer of "bow" shaped material layer is staggered with the lower layer of "bow" shaped material layer. The sensing layer 3 is electrically connected with the electrode layer 2, the screen mesh structure of the sensing layer 3 is arranged on the electrode layer 2, and the shape design and the relative position of the sensing layer and the electrode can be adjusted. The sensing layer 3 is prepared, for example, by: the porous conductive paste is prepared by using nano carbon black particles and a sacrificial template method, and is printed or stamped on the surface of the electrode layer 2.
The porous conductive paste comprises a certain mass percentage of nano carbon black particles, a certain mass percentage of sacrificial NaCl (and/or sucrose) template, and a certain mass percentage of flexible high polymer which is the same as that of the substrate layer 1 and the electrode layer 2. For example: the mass percent of the nano carbon black particles is 2-5%, such as 2-3%, 3-4% or 4-5%, based on the total mass of the nano carbon black particles, the sacrificial template is 75-85%, such as 75-77%, 77-81%, 81-82% or 82-85%, based on the total mass of the flexible high molecular polymer, and the mass percent of the flexible high molecular polymer is 10-23%, such as 10-14%, 14-15%, 15-20%, 20-22% or 20-23%. Preferably, the porous conductive paste comprises about 3% of carbon black nanoparticles, about 80% of sacrificial NaCl (and/or sucrose) template and about 17% of flexible high polymer consistent with the substrate layer 1 and the electrode layer 2.
The particle size of the nano carbon black particles can be 20-100 nm; the particle size of the sacrificial template may be 50 μm to 500 μm, such as 50 μm to 100 μm, 100 μm to 150 μm, 150 μm to 300 μm, 300 μm to 400 μm, or 400 μm to 500 μm. In addition, the nano carbon black particles can also be replaced by other nano conductive materials, such as: carbon nanotubes, graphene sheets, and the like, or one or more of carbon black nanoparticles, carbon nanotubes, and graphene sheets are employed.
It is worth to be noted that, when the flexible pressure sensor of this embodiment receives an out-of-plane pressure, the nano carbon black particles in the sensing layer 3 touch each other and press, and the porous structure starts to close, so as to form more conductive channels, so that the overall resistance of the flexible pressure sensor is reduced.
As shown in fig. 5, a structure in which the plurality of flexible pressure sensors share the same substrate layer is shown, that is, a structure in which a plurality of groups of combinations of electrode layers and sensing layers are arranged on a large-area substrate layer. In this embodiment, the structure composed of multiple electrode layers is referred to as an electrode array layer, and the structure composed of multiple sensing layers is referred to as a sensing array layer. In the flexible pressure sensing array shown in fig. 5, the combination of 16 electrode layers and sensing layers is arranged in four rows and four columns, and the left end of each column of electrode layers is electrically connected. Of course, in other embodiments, the number of combinations of the electrode layers and the sensing layers, the arrangement manner, and the connection manner of the electrode layers may be set as required, and are not limited by this embodiment.
The flexible pressure sensing array is prepared, for example: the method comprises the steps of utilizing a coating, printing or printing process to realize a large-area thermoplastic polyurethane elastomer rubber or polydimethylsiloxane material substrate, printing or printing leads of electrode layers contained in an electrode array layer on the substrate after the substrate is solidified, enabling slurry to be flexible high polymer containing more than 80% of micron-sized silver sheets and identical to the substrate layer, and then respectively arranging about 3% of carbon black particles, about 80% of sacrificial salt templates and about 17% of flexible high polymer carriers consistent with the substrate layer and the electrode layers on the electrode layers through the printing or printing process to serve as sensing layers. The rear end is connected with a collecting card to carry out various pressure tests.
Through experimental tests, the sensitivity of the flexible stretchable pressure sensor and the flexible stretchable pressure sensing array can exceed 5kPa within the range of 20kPa-1The measurement range can reach over 800kPa, and the device can bear 50% of extension circular stretching (the lower resistance change in the stretching process is less than 5%), and can be completely suitable for wearable joints of human bodies, electronic skins of joints of robots and the like.
In summary, the flexible pressure sensor and the flexible pressure sensing array of the present invention have the advantages of simple structure, easy preparation, good flexibility, firm interface, low cost and good durability, and effectively overcome various defects in the prior art, thereby having high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. The utility model provides a flexible pressure sensor which characterized in that, including range upon range of setting in proper order:
the substrate layer is made of flexible high polymer;
the electrode layer is arranged on the surface of the substrate layer, the substrate of the electrode layer is made of the flexible high polymer, and micro-nano conductive materials are filled in the flexible high polymer;
the sensing layer is electrically connected with the electrode layer, the substrate of the sensing layer is flexible high polymer, and micro-nano conductive materials are filled in the flexible high polymer.
2. A flexible pressure sensing array, comprising:
the substrate layer is made of flexible high polymer;
the electrode array layer is arranged on the surface of the substrate layer, the substrate of the electrode array layer is made of the flexible high polymer, and the flexible high polymer is filled with micro-nano conductive materials which are electrically connected with the same side ends of the electrode arrays in the same row or the same column;
the sensing array layer is correspondingly arranged on the surface of the electrode array layer and is electrically connected with the electrode array layer, the substrate of the sensing array layer is made of flexible high polymer, and micro-nano conductive materials are filled in the flexible high polymer.
3. The flexible pressure sensor and flexible pressure sensing array of claims 1 and 2, wherein the flexible polymer comprises: one or more of thermoplastic polyurethane elastomer, polydimethylsiloxane elastomer and polyolefin elastomer.
4. The flexible pressure sensor and flexible pressure sensing array of claims 1 and 2, wherein the elastic modulus between the substrate layer, the electrode layer, and the sensing layer is a predetermined value, wherein the predetermined value of the elastic modulus of the electrode layer is the largest of the three layers; the elastic modulus among the substrate layer, the electrode array layer and the sensing array layer is a preset value, wherein the preset value of the elastic modulus of the electrode array layer is the largest of the three layers.
5. The flexible pressure sensor and the flexible pressure sensing array according to claims 1 and 2, wherein the electrode layer is prepared by a method comprising: and filling micro-nano conductive materials with the mass ratio exceeding a certain percentage into the flexible high molecular polymer, and printing or printing the micro-nano conductive materials on the surface of the substrate layer after uniformly mixing.
6. The flexible pressure sensor and the flexible pressure sensing array according to claims 1 and 2, wherein the electrode layer adopts a double-helix interdigitated electrode structure; and each electrode layer contained in the electrode array layer adopts a double-spiral finger-inserting electrode structure.
7. The flexible pressure sensor and flexible pressure sensing array of claims 1 and 2, wherein the sensing layer is prepared by: preparing porous conductive slurry by using a micro-nano conductive material and a sacrificial template method, and printing or printing the porous conductive slurry on the surface of the electrode layer; the preparation method of the sensing array layer comprises the following steps: and preparing porous conductive paste by using a micro-nano conductive material and a sacrificial template method, and correspondingly printing or printing the porous conductive paste on the surface of the electrode array layer.
8. The flexible pressure sensor and flexible pressure sensing array of claim 7, wherein said porous conductive paste comprises: the flexible high-molecular-weight carbon black comprises a certain mass percent of nano carbon black particles, a certain mass percent of sacrificial salt templates and a certain mass percent of the flexible high-molecular polymer.
9. The flexible pressure sensor and flexible pressure sensing array of claims 1 and 2, wherein the sensing layer is one or more layers of a mesh structure; each sensing layer contained in the sensing array layer adopts one or more layers of screen structures.
10. A flexible pressure sensor and flexible pressure sensing array according to claims 1 and 2, comprising:
the flexible pressure sensor or the flexible pressure sensing array is used for monitoring flexible wearable equipment of human body signs;
the flexible pressure sensor or the flexible pressure sensing array is used for the robot tactile perception equipment.
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| CN114674468B (en) * | 2021-12-31 | 2024-04-26 | 零感科技(深圳)有限公司 | Flexible negative pressure resistance sensing layer, preparation method thereof and flexible negative pressure resistance sensor |
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