CN111947814A - Flexible three-dimensional touch sensor and manufacturing and detecting methods thereof - Google Patents

Flexible three-dimensional touch sensor and manufacturing and detecting methods thereof Download PDF

Info

Publication number
CN111947814A
CN111947814A CN202010803456.7A CN202010803456A CN111947814A CN 111947814 A CN111947814 A CN 111947814A CN 202010803456 A CN202010803456 A CN 202010803456A CN 111947814 A CN111947814 A CN 111947814A
Authority
CN
China
Prior art keywords
resistor
layer
force
flexible
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202010803456.7A
Other languages
Chinese (zh)
Other versions
CN111947814B (en
Inventor
陈琦
朱大奇
彭久松
陈铭治
孙兵
庞文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Maritime University
Original Assignee
Shanghai Maritime University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Maritime University filed Critical Shanghai Maritime University
Priority to CN202010803456.7A priority Critical patent/CN111947814B/en
Publication of CN111947814A publication Critical patent/CN111947814A/en
Application granted granted Critical
Publication of CN111947814B publication Critical patent/CN111947814B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The invention provides a flexible three-dimensional touch sensor and a manufacturing and detecting method thereof, the flexible three-dimensional touch sensor comprises an assembly substrate layer, a force sensitive resistance layer and a protective surface layer, wherein the bottom surface of the assembly substrate layer is fixed on a grabbing device through a matching structure and can move along with the grabbing device, the force sensitive resistance layer is arranged on the top surface of the assembly substrate layer and can move along with the assembly substrate layer, the protective surface layer is arranged on the top surface of the force sensitive resistance layer and can move along with the force sensitive resistance layer, and the top surface of the protective surface layer is in contact with the surface of a grabber, so that the grabbing device and the grabber can extrude the assembly substrate layer, the force. The texture of the transverse resistance section and the texture of the longitudinal resistance section of the single resistor in the sensor are different, the resistance change rate of a unit area is different, the sliding force and the pressure in the vertical direction can be obtained after the two single resistors are symmetrically placed, and three-dimensional contact force information can be obtained only by two groups of analog quantity signals.

Description

Flexible three-dimensional touch sensor and manufacturing and detecting methods thereof
Technical Field
The invention relates to a flexible three-dimensional touch measurement technology, in particular to a flexible three-dimensional touch sensor.
Background
With the development of flexible grasping technology, flexible materials and flexible touch sensors become the key field for flexible technology research. The flexible grabbing equipment can grab fragile objects such as eggs and water cups, the flexible touch sensor is a key part, and the flexible touch sensor can be bent freely, so that the flexible touch sensor can be tightly attached to an irregular target object. The conventional flexible touch sensor can only measure the pressure perpendicular to the contact surface, an estimated grabbing force needs to be set before grabbing, and the movement of the grabbing mechanism is controlled by detecting the contact force, so that the preset grabbing force is achieved. But if carry out the flexibility and snatch to unknown object, be difficult to know accurate presetting before snatching and grab power, just at this moment need acquire the sliding force of flexible grabbing device and target object, if at the grabbing in-process, the sliding force increases, then need increase and grab power to avoid the object landing, if the sliding force is stable unchangeable, then the surface is grabbed power comparatively moderately, can enough guarantee that the target object is grabbed, can not cause the target object damaged again. The sliding force detection needs a three-dimensional touch measurement technology, the conventional flexible three-dimensional touch sensor has a complex structure and a large volume, and is difficult to mount on small gripping devices such as flexible fingers, and meanwhile, the conventional flexible touch sensor adopts a corrosion or carving method, so that pollution waste is generated, and the corrosion process is complex and time-consuming.
Therefore, there is a need for a flexible three-dimensional tactile sensor that is structurally optimized to overcome the above-mentioned drawbacks.
Disclosure of Invention
The invention aims to provide a flexible three-dimensional touch sensor which is used for measuring three-dimensional contact force of a flexible grabbing device in the grabbing process of an unknown object and solving the problem of flexible grabbing of the unknown fragile object.
The technical scheme adopted by the invention for solving the technical problem is as follows:
a flexible three-dimensional tactile sensor comprising:
the bottom surface of the assembly substrate layer is fixed on the grabbing equipment through a matching structure and can move along with the grabbing equipment;
the force sensitive resistor layer is arranged on the top surface of the assembly substrate layer and can move along with the assembly substrate layer;
the top surface of the protection surface layer is in surface contact with the grabbed object, so that the grabbing equipment and the grabbed object extrude the assembly basal layer, the force sensitive resistance layer and the protection surface layer.
Furthermore, the force-sensitive resistor layer comprises a group of transverse resistor sections and a group of longitudinal resistor sections, wherein the transverse resistor sections are provided with first textures, the longitudinal resistor sections are provided with second textures, the transverse resistor sections respectively extend along the transverse direction, the longitudinal resistor sections respectively extend along the longitudinal direction, the transverse resistor sections and the longitudinal resistor sections are sequentially connected to form a resistor single body, two ends of the resistor single body are communicated with the analog-to-digital conversion chip through a circuit, and analog signals obtained by extruding the resistor single body are converted into digital signals through the analog-to-digital conversion chip. The textures of the transverse resistor segment and the longitudinal resistor segment are different, so that the resistance value of the L-shaped resistor single body formed by the transverse resistor segment and the longitudinal resistor segment is different when the transverse resistor segment and the longitudinal resistor segment are respectively acted on under the condition of the same stress area and pressure.
Furthermore, the resistor units are provided with a pair, the transverse resistor sections of the resistor units are parallel to each other, and the longitudinal resistor sections of the resistor units are parallel to each other. The two L-shaped resistor monomers are symmetrically arranged along the diagonal line, the measuring pins are respectively led out and are communicated with the analog-to-digital conversion chip through a line, so that the resistance value of the resistor monomers is measured, and the normal pressure and the horizontal sliding force can be obtained by measuring the resistance change value of the two resistor monomers.
In one embodiment of the invention, the assembly substrate layer is injection molded from a flexible rubber material; the force-sensitive resistor layer is formed by 3D printing of a carbon nano tube and graphene mixed material; the protection surface layer is formed by 3D printing of organic silicon materials. The carbon nano tube has good electric and thermal properties and flexibility, and can realize sensitive resistance strain performance in a wider temperature range, so the carbon nano tube is also used for manufacturing the force-sensitive resistor, but the carbon nano tube is easy to be unevenly distributed in the processing process, and the resistance strain consistency is poor. The two-dimensional honeycomb lattice monoatomic layer structure of the graphene has good ductility and pressure resistance, and can be used as an ideal conductive structure filling material to prepare a composite material, so that the ideal composite force-sensitive resistance material can be obtained by mixing the graphene and the carbon nano tube.
The protective surface layer is in a trapezoidal shape, and the area of the top surface of the protective surface layer is smaller than that of the bottom surface of the protective surface layer. When the protection surface layer and the snatch the thing and produce the slip of horizontal plane, the top surface of protection surface layer can shift for the bottom surface, consequently also can shift with the effort point of the thing contact force of snatching to lead to the change that two resistance monomers take place differently.
The invention also provides a manufacturing method of the flexible three-dimensional touch sensor, which comprises the following steps:
1) manufacturing an assembly substrate layer by adopting a flexible rubber material injection molding method;
2) mixing graphene and carbon nanotubes, heating and stirring uniformly to form a printing substrate, and injecting the printing substrate into a 3D printer;
3) inputting the three-dimensional drawing of the force sensitive resistor layer into a 3D printer;
4) the 3D printer sprays the printing base material, and the force sensitive resistance layer is formed by printing on the top surface of the assembly base layer according to the three-dimensional drawing;
5) and 3D printing the top surface of the force sensitive resistor layer by adopting an organic silicon material to form a protective surface layer.
In the step 4), while the 3D printer prints, an ultraviolet light source is adopted to irradiate the force sensitive resistor layer to thermally cure the force sensitive resistor layer, the flexible force sensitive resistor layer has excellent mechanical properties after thermal crosslinking, and the breaking strength and the breaking elongation of the flexible force sensitive resistor layer are respectively 3MPa and 70 percent.
The invention also provides a detection method of the flexible three-dimensional touch sensor, which comprises the following steps:
when the protective surface layer is contacted with a grabbed object, the force sensitive resistor layers are extruded, the resistance value of each resistor monomer is changed, and the normal pressure perpendicular to the top surface of the protective surface layer can be calculated through a relational expression of the resistance change rate and the pressure;
when the object is grabbed and the protective surface layer slides, the top surface of the protective surface layer deviates along with the sliding force, so that the contact force action point of the force sensitive resistor layer deviates, the resistance value of the resistor monomers increases one by one, the resistance value of the resistor monomers decreases the other by one, and the magnitude and the direction of the sliding force can be calculated by comparing the resistance value change conditions of the two resistor monomers.
Further, the relationship between the rate of change of resistance and pressure is: f-13 VR2-3VR +1, the sum of the pressures of the two resistive cells being the normal pressure value: fN=F1+F2
Let the resistance value change rates of the resistance units be respectively Delta R1And Δ R2The magnitude of the sliding force is: fs=2.8|(VR1(t1)-VR1(t2))-(VR2(t1)-VR2(t2))|2
Further, the method for judging the direction of the sliding force comprises the following steps:
if Δ R1Increase, Δ R2Decrease and Δ R1Is increased by more than Δ R2A decreasing value, indicating that the direction of the sliding force is horizontal downward;
if Δ R1Increase, Δ R2Decrease and Δ R1Is increased by less than Δ R2A decreasing value, indicating that the direction of the sliding force is horizontal to the left;
if Δ R1Decrease,. DELTA.R2Increase, and Δ R1Is greater than Δ R2Increasing the value, which indicates that the direction of the sliding force is horizontal upward;
if Δ R1Decrease,. DELTA.R2Increase, and Δ R1Is less than Δ R2Increasing the value, indicating that the direction of the sliding force is horizontal to the right.
The invention has the advantages that:
the texture of the transverse resistance section and the texture of the longitudinal resistance section of the single resistance body in the sensor are different, the resistance change rate of a unit area is different, the sliding force and the pressure in the vertical direction can be obtained after the two single resistance bodies are symmetrically placed, and three-dimensional contact force information can be obtained only by two groups of analog quantity signals; meanwhile, the force sensitive resistor layer of the sensor adopts a mixed solvent of graphene and carbon nano tubes as a manufacturing raw material, has excellent electric and thermal properties and good ductility, adopts a 3D printing manufacturing mode, has high production efficiency, is environment-friendly and energy-saving, and can ensure that the flexible force sensitive resistor array has excellent mechanical properties after thermal crosslinking by a method of printing and ultraviolet lamp irradiation; the flexible three-dimensional touch sensor has the advantages of simple manufacturing process, small size and low cost, can meet the measurement requirements of various flexible gripping devices on three-dimensional contact force, and can be widely used for underwater archaeological salvage, and the occasions where the gripping force is strictly controlled and cannot be predicted, such as dangerous object gripping and the like.
Drawings
FIG. 1 is a schematic diagram of a flexible three-dimensional tactile sensor according to the present invention;
FIG. 2 is an exploded view of the flexible three-dimensional tactile sensor;
FIG. 3 is a flow chart of the fabrication of the flexible three-dimensional tactile sensor;
FIG. 4 is a graph of pressure versus rate of change of resistance for a resistor cell;
Detailed Description
In order to make the technical means, the original characteristics, the achieved purposes and the effects of the invention easy to understand, the invention is further described with reference to the figures and the specific embodiments.
As shown in fig. 1 and 2, the flexible three-dimensional tactile sensor provided by the present invention includes an assembly substrate layer 100, a force sensitive resistor layer 200, and a protective surface layer 300, wherein a bottom surface of the assembly substrate layer 100 is fixed on a grabbing device through a matching structure and can move with the grabbing device, the force sensitive resistor layer 200 is disposed on a top surface of the assembly substrate layer 100 and can move with the assembly substrate layer 100, the protective surface layer 300 is disposed on a top surface of the force sensitive resistor layer 200 and can move with the force sensitive resistor layer 200, and a top surface of the protective surface layer 300 contacts with a surface of the grabbing object, so that the grabbing device and the grabbing object can press the assembly substrate layer 100, the force sensitive resistor layer 200, and the.
In this embodiment, the force-sensitive resistor layer 200 includes a set of transverse resistor segments 201 and a set of longitudinal resistor segments 202, the transverse resistor segments 201 have a first texture, the longitudinal resistor segments 202 have a second texture, the transverse resistor segments 201 extend in the transverse direction, the longitudinal resistor segments 202 extend in the longitudinal direction, the transverse resistor segments 201 and the longitudinal resistor segments 202 are sequentially connected to form a resistor unit, two ends of the resistor unit are connected to an analog-to-digital conversion chip through a line, and the analog-to-digital conversion chip converts an analog signal obtained by squeezing the resistor unit into a digital signal. The horizontal resistor segment 201 and the vertical resistor segment 202 have different textures, so that when the horizontal resistor segment 201 and the vertical resistor segment 202 are respectively acted on under the condition of the same stress area and pressure, the resistance value of the single L-shaped resistor formed by the horizontal resistor segment 201 and the vertical resistor segment 202 is different. In this embodiment, a pair of single resistors is provided, the transverse resistor segments of each single resistor are parallel to each other, and the longitudinal resistor segments of each single resistor are parallel to each other. The two L-shaped resistor monomers are symmetrically arranged along the diagonal line, the measuring pins are respectively led out and are communicated with the analog-to-digital conversion chip through a line, so that the resistance value of the resistor monomers is measured, and the normal pressure and the horizontal sliding force can be obtained by measuring the resistance change value of the two resistor monomers.
In the present embodiment, the assembly substrate layer 100 is formed by injection molding using a flexible rubber material; the force-sensitive resistor layer 200 is formed by 3D printing of a carbon nanotube and graphene mixed material; the protective surface layer 300 is formed by 3D printing of an organic silicon material. The carbon nano tube has good electric and thermal properties and flexibility, and can realize sensitive resistance strain performance in a wider temperature range, so the carbon nano tube is also used for manufacturing the force-sensitive resistor, but the carbon nano tube is easy to be unevenly distributed in the processing process, and the resistance strain consistency is poor. The two-dimensional honeycomb lattice monoatomic layer structure of the graphene has good ductility and pressure resistance, and can be used as an ideal conductive structure filling material to prepare a composite material, so that the ideal composite force-sensitive resistance material can be obtained by mixing the graphene and the carbon nano tube. The protective surface layer 300 has a trapezoidal shape, and the area of the top surface thereof is smaller than the area of the bottom surface thereof. When the protective surface layer 300 slides horizontally with the grabber, the top surface of the protective surface layer 300 will shift relative to the bottom surface, and thus the point of contact force with the grabber will also shift, resulting in different changes in the resistance of the two resistor units.
The texture of the transverse resistance section and the texture of the longitudinal resistance section of the single resistance body in the sensor are different, the resistance change rate of a unit area is different, the sliding force and the pressure in the vertical direction can be obtained after the two single resistance bodies are symmetrically placed, and three-dimensional contact force information can be obtained only by two groups of analog quantity signals; meanwhile, the force sensitive resistor layer of the sensor adopts a mixed solvent of graphene and carbon nano tubes as a manufacturing raw material, has excellent electric and thermal properties and good ductility, adopts a 3D printing manufacturing mode, has high production efficiency, is environment-friendly and energy-saving, and can ensure that the flexible force sensitive resistor array has excellent mechanical properties after thermal crosslinking by a method of printing and ultraviolet lamp irradiation; the flexible three-dimensional touch sensor has the advantages of simple manufacturing process, small size and low cost, can meet the measurement requirements of various flexible gripping devices on three-dimensional contact force, and can be widely used for underwater archaeological salvage, and the occasions where the gripping force is strictly controlled and cannot be predicted, such as dangerous object gripping and the like.
As shown in fig. 3, the method for manufacturing the flexible three-dimensional tactile sensor includes the following steps:
1) manufacturing an assembly substrate layer by adopting a flexible rubber material injection molding method;
2) mixing graphene and carbon nanotubes, heating and stirring uniformly to form a printing substrate, and injecting the printing substrate into a 3D printer; in this embodiment, the mixing ratio of the graphene and the carbon nanotube is: 6.5: 3.5;
3) inputting the three-dimensional drawing of the force sensitive resistor layer into a 3D printer;
4) the 3D printer sprays the printing base material, and the force sensitive resistance layer is formed by printing on the top surface of the assembly base layer according to the three-dimensional drawing; when the 3D printer prints, an ultraviolet light source is adopted to irradiate the force sensitive resistor layer to thermally cure the force sensitive resistor layer, the flexible force sensitive resistor layer has excellent mechanical properties after thermal crosslinking, and the breaking strength and the breaking elongation of the flexible force sensitive resistor layer are respectively 3MPa and 70 percent;
5) and 3D printing the top surface of the force sensitive resistor layer by adopting an organic silicon material to form a protective surface layer.
The detection method of the flexible three-dimensional touch sensor comprises the following steps:
when the protective surface layer is contacted with a grabbed object, the force sensitive resistor layers are extruded, the resistance value of each resistor monomer is changed, and the normal pressure perpendicular to the top surface of the protective surface layer can be calculated through a relational expression of the resistance change rate and the pressure; when the object is grabbed and the protective surface layer slides, the top surface of the protective surface layer deviates along with the sliding force, so that the contact force action point of the force sensitive resistor layer deviates, the resistance value of the resistor monomers increases one by one, the resistance value of the resistor monomers decreases the other by one, and the magnitude and the direction of the sliding force can be calculated by comparing the resistance value change conditions of the two resistor monomers.
The resistance change rate versus pressure relationship is: f-13 VR2-3VR +1, the sum of the pressures of the two resistive cells being the normal pressure value: fN=F1+F2
Let the resistance value change rates of the resistance units be respectively Delta R1And Δ R2The magnitude of the sliding force is: fs=2.8|(VR1(t1)-VR1(t2))-(VR2(t1)-VR2(t2))|2
Further, the method for judging the direction of the sliding force comprises the following steps:
if Δ R1Increase, Δ R2Decrease and Δ R1Is increased by more than Δ R2A decreasing value, indicating that the direction of the sliding force is horizontal downward;
if Δ R1Increase, Δ R2Decrease and Δ R1Is increased by less than Δ R2A decreasing value, indicating that the direction of the sliding force is horizontal to the left;
if Δ R1Decrease,. DELTA.R2Increase, and Δ R1Is greater than Δ R2Increasing the value, which indicates that the direction of the sliding force is horizontal upward;
if Δ R1Decrease,. DELTA.R2Increase, and Δ R1Is less than Δ R2Increasing the value, indicating that the direction of the sliding force is horizontal to the right.
In the above formulae, the symbols mean:
F1and F2The normal force borne by each resistor is calculated by the resistance values measured by the two resistor monomers;
FNthe normal force applied to the whole touch sensor;
FSthe sliding force borne by the whole touch sensor;
ΔR1and Δ R2The resistance change rates of the two L-type resistance elements are provided.
The above embodiments are merely illustrative of the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the content of the present invention and implement the present invention, and not to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered by the scope of the present invention.

Claims (10)

1. A flexible three-dimensional tactile sensor, comprising:
the bottom surface of the assembly substrate layer is fixed on the grabbing equipment through a matching structure and can move along with the grabbing equipment;
the force sensitive resistor layer is arranged on the top surface of the assembly substrate layer and can move along with the assembly substrate layer;
the top surface of the protection surface layer is in surface contact with the grabbed object, so that the grabbing equipment and the grabbed object extrude the assembly basal layer, the force sensitive resistance layer and the protection surface layer.
2. A flexible three-dimensional tactile sensor according to claim 1, wherein:
the force-sensitive resistor layer comprises a group of transverse resistor sections and a group of longitudinal resistor sections, wherein the transverse resistor sections are provided with first textures, the longitudinal resistor sections are provided with second textures, the transverse resistor sections extend transversely respectively, the longitudinal resistor sections extend longitudinally respectively, the transverse resistor sections and the longitudinal resistor sections are sequentially connected to form a resistor monomer, two ends of the resistor monomer are communicated with the analog-to-digital conversion chip through a circuit, and an analog signal obtained by extruding the resistor monomer is converted into a digital signal through the analog-to-digital conversion chip.
3. A flexible three-dimensional tactile sensor according to claim 2, wherein:
the resistor units are provided with a pair, the transverse resistor sections of the resistor units are parallel to each other, and the longitudinal resistor sections of the resistor units are parallel to each other.
4. A flexible three-dimensional tactile sensor according to claim 1, wherein:
the assembly basal layer is formed by injection molding of a flexible rubber material;
the force-sensitive resistor layer is formed by 3D printing of a carbon nano tube and graphene mixed material;
the protection surface layer is formed by 3D printing of organic silicon materials.
5. The flexible three-dimensional tactile sensor according to claim 4, wherein:
the protective surface layer is in a trapezoidal shape, and the area of the top surface of the protective surface layer is smaller than that of the bottom surface of the protective surface layer.
6. A method of making a flexible three-dimensional tactile sensor according to any of claims 1 to 5, comprising the steps of:
1) manufacturing an assembly substrate layer by adopting a flexible rubber material injection molding method;
2) mixing graphene and carbon nanotubes, heating and stirring uniformly to form a printing substrate, and injecting the printing substrate into a 3D printer;
3) inputting the three-dimensional drawing of the force sensitive resistor layer into a 3D printer;
4) the 3D printer sprays the printing base material, and the force sensitive resistance layer is formed by printing on the top surface of the assembly base layer according to the three-dimensional drawing;
5) and 3D printing the top surface of the force sensitive resistor layer by adopting an organic silicon material to form a protective surface layer.
7. The method of manufacturing a flexible three-dimensional tactile sensor according to claim 6, wherein:
and 4) in the step of printing by the 3D printer, irradiating the force sensitive resistor layer by using an ultraviolet light source to thermally cure the force sensitive resistor layer.
8. The method of detecting a flexible three-dimensional tactile sensor according to any one of claims 1 to 5, comprising:
when the protective surface layer is contacted with a grabbed object, the force sensitive resistor layers are extruded, the resistance value of each resistor monomer is changed, and the normal pressure perpendicular to the top surface of the protective surface layer can be calculated through a relational expression of the resistance change rate and the pressure;
when the object is grabbed and the protective surface layer slides, the top surface of the protective surface layer deviates along with the sliding force, so that the contact force action point of the force sensitive resistor layer deviates, the resistance value of the resistor monomers increases one by one, the resistance value of the resistor monomers decreases the other by one, and the magnitude and the direction of the sliding force can be calculated by comparing the resistance value change conditions of the two resistor monomers.
9. The method of detecting a flexible three-dimensional tactile sensor according to claim 8, wherein:
the resistance change rate versus pressure relationship is: f-13 VR2-3VR +1, the sum of the pressures of the two resistive cells being the normal pressure value: fN=F1+F2
Let the resistance value change rates of the resistance units be respectively Delta R1And Δ R2The magnitude of the sliding force is: fs=2.8|(VR1(t1)-VR1(t2))-(VR2(t1)-VR2(t2))|2
10. The method for detecting a flexible three-dimensional tactile sensor according to claim 9, wherein the method for determining the direction of the sliding force comprises:
if Δ R1Increase, Δ R2Decrease and Δ R1Is increased by more than Δ R2A decreasing value, indicating that the direction of the sliding force is horizontal downward;
if Δ R1Increase, Δ R2Decrease and Δ R1Is increased by less than Δ R2A decreasing value, indicating that the direction of the sliding force is horizontal to the left;
if Δ R1Decrease,. DELTA.R2Increase, and Δ R1Is greater than Δ R2Increasing the value, which indicates that the direction of the sliding force is horizontal upward;
if Δ R1Decrease,. DELTA.R2Increase, and Δ R1Is less than Δ R2Increasing the value, indicating that the direction of the sliding force is horizontal to the right.
CN202010803456.7A 2020-08-11 2020-08-11 Flexible three-dimensional touch sensor and manufacturing and detecting methods thereof Active CN111947814B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010803456.7A CN111947814B (en) 2020-08-11 2020-08-11 Flexible three-dimensional touch sensor and manufacturing and detecting methods thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010803456.7A CN111947814B (en) 2020-08-11 2020-08-11 Flexible three-dimensional touch sensor and manufacturing and detecting methods thereof

Publications (2)

Publication Number Publication Date
CN111947814A true CN111947814A (en) 2020-11-17
CN111947814B CN111947814B (en) 2021-12-17

Family

ID=73332825

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010803456.7A Active CN111947814B (en) 2020-08-11 2020-08-11 Flexible three-dimensional touch sensor and manufacturing and detecting methods thereof

Country Status (1)

Country Link
CN (1) CN111947814B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114043506A (en) * 2021-10-27 2022-02-15 南昌大学 Multi-mode tactile sensing device and application method thereof

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101059380A (en) * 2007-02-16 2007-10-24 中国科学院上海微系统与信息技术研究所 Flexible capacitance type touch sensor production method
CN102928137A (en) * 2012-11-14 2013-02-13 合肥工业大学 Four-interdigital-electrode type three-dimensional force contact sensor for artificial skin
KR20130096861A (en) * 2012-02-23 2013-09-02 성균관대학교산학협력단 Multi-axis sensor
US20140260675A1 (en) * 2013-03-18 2014-09-18 Industry-Academic Cooperation Foundation, Yonsei University Apparatus and method for measuring tactile information
CN105136369A (en) * 2015-05-28 2015-12-09 合肥工业大学 All-flexible resistive touch and pressure perception sensor and manufacturing method thereof
CN106775140A (en) * 2015-11-24 2017-05-31 南昌欧菲光科技有限公司 Touch display unit, pressure sensitive unit and preparation method thereof
CN107677296A (en) * 2017-09-25 2018-02-09 合肥工业大学 A kind of Grazing condition is close to touch-pressure sensation sensor
US20180073942A1 (en) * 2016-09-13 2018-03-15 The Board Of Trustees Of The Leland Stanford Junior University Capacitive Force/Torque Sensor
CN107941386A (en) * 2018-01-09 2018-04-20 安徽医科大学 Flexible force-touch sensor, sensing element based on transparent organism material and preparation method thereof
CN109238519A (en) * 2018-10-22 2019-01-18 河北工业大学 A kind of hybrid flexible touch sensation sensor
CN109323784A (en) * 2018-09-21 2019-02-12 浙江大学 A kind of pressure resistance type flexible touch sensation sensor with the double-deck snap-type micro-boss
DE102018211680A1 (en) * 2018-07-12 2020-01-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Spatially resolving tactile sensor and manufacturing method for a spatially resolving tactile sensor
CN111289158A (en) * 2018-12-07 2020-06-16 深圳大学 Flexible pressure sensor and flexible pressure sensing array

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101059380A (en) * 2007-02-16 2007-10-24 中国科学院上海微系统与信息技术研究所 Flexible capacitance type touch sensor production method
KR20130096861A (en) * 2012-02-23 2013-09-02 성균관대학교산학협력단 Multi-axis sensor
CN102928137A (en) * 2012-11-14 2013-02-13 合肥工业大学 Four-interdigital-electrode type three-dimensional force contact sensor for artificial skin
US20140260675A1 (en) * 2013-03-18 2014-09-18 Industry-Academic Cooperation Foundation, Yonsei University Apparatus and method for measuring tactile information
CN105136369A (en) * 2015-05-28 2015-12-09 合肥工业大学 All-flexible resistive touch and pressure perception sensor and manufacturing method thereof
CN106775140A (en) * 2015-11-24 2017-05-31 南昌欧菲光科技有限公司 Touch display unit, pressure sensitive unit and preparation method thereof
US20180073942A1 (en) * 2016-09-13 2018-03-15 The Board Of Trustees Of The Leland Stanford Junior University Capacitive Force/Torque Sensor
CN107677296A (en) * 2017-09-25 2018-02-09 合肥工业大学 A kind of Grazing condition is close to touch-pressure sensation sensor
CN107941386A (en) * 2018-01-09 2018-04-20 安徽医科大学 Flexible force-touch sensor, sensing element based on transparent organism material and preparation method thereof
DE102018211680A1 (en) * 2018-07-12 2020-01-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Spatially resolving tactile sensor and manufacturing method for a spatially resolving tactile sensor
CN109323784A (en) * 2018-09-21 2019-02-12 浙江大学 A kind of pressure resistance type flexible touch sensation sensor with the double-deck snap-type micro-boss
CN109238519A (en) * 2018-10-22 2019-01-18 河北工业大学 A kind of hybrid flexible touch sensation sensor
CN111289158A (en) * 2018-12-07 2020-06-16 深圳大学 Flexible pressure sensor and flexible pressure sensing array

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
K. NODA 等: "A Shear Stress Sensing for Robot Hands -Orthogonal arrayed Piezoresistive Cantilevers standing in Elastic Material-", 《2006 14TH SYMPOSIUM ON HAPTIC INTERFACES FOR VIRTUAL ENVIRONMENT AND TELEOPERATOR SYSTEMS》 *
张康: "纳米颗粒—聚合物薄膜制备及力电特性研究", 《中国优秀硕士学位论文全文数据库 工程科技Ⅰ辑》 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114043506A (en) * 2021-10-27 2022-02-15 南昌大学 Multi-mode tactile sensing device and application method thereof

Also Published As

Publication number Publication date
CN111947814B (en) 2021-12-17

Similar Documents

Publication Publication Date Title
CN110608825B (en) Flexible pressure sensor based on polyimide substrate microstructure and preparation method thereof
Yang et al. Facile and highly efficient fabrication of robust Ag nanowire–elastomer composite electrodes with tailored electrical properties
Maddipatla et al. Development of a novel carbon nanotube based printed and flexible pressure sensor
CN102564657B (en) Graphene-based array type flexible pressure distribution sensor and preparation method thereof
Guo et al. Biomimicking topographic elastomeric petals (E‐Petals) for omnidirectional stretchable and printable electronics
CN111947814B (en) Flexible three-dimensional touch sensor and manufacturing and detecting methods thereof
Wu et al. Rational design of flexible capacitive sensors with highly linear response over a broad pressure sensing range
AU2007293476B2 (en) Soft mems
Canavese et al. Comprehensive characterization of large piezoresistive variation of Ni-PDMS composites
Liu et al. Polydimethylsiloxane nanocomposite filled with 3D carbon nanosheet frameworks for tensile and compressive strain sensors
Otake et al. Integration of flexible strain sensor using liquid metal into soft micro-actuator
CN105509937B (en) A kind of pressure sensor, pressure detection method and manufacturing process
CN108613620A (en) A kind of tangent displacement sensor structure and preparation method thereof based on 3D printing
Feng et al. Ionic liquids-filled patterned cavities improve transmittance of transparent and stretchable electronic polydimethylsiloxane films
Attar et al. Design of a highly sensitive, flexible and stretchable tactile sensor for electronic skin applications
KR102054171B1 (en) Strain sensor for growth sensing and fabrication method for the same
Hegde et al. Simulation of carbon nanotubes polymer based piezoresistive flexible pressure sensor for ultra sensitive electronic skin
Bautista-Quijano et al. Flexible strain sensing filaments based on styrene-butadiene-styrene co-polymer mixed with carbon particle filled thermoplastic polyurethane
CN112885956A (en) PVDF piezoelectric film and preparation method thereof
Kumar Electrical percolation in metal wire network-based strain sensors
Wang et al. Development of wireless compressive/relaxation-stress measurement system integrated with pressure-sensitive carbon black-filled silicone rubber-based sensors
Duan et al. The evaluation of static characteristics of pressure sensor based on conductive rubber
Peng et al. A novel flexible sensor for compression stress relaxation
CN214793549U (en) Flexible multidimensional force sense pressure sensor
Han et al. Flex-Structural Embedded Flexible Strain Sensor via 3D Printing

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant