TWI387556B - Nano-material film structure - Google Patents

Description

Nanomaterial film structure

The invention relates to a nano material film structure, in particular to a nano material film structure composed of nanowires.

Nanomaterials are of great value in basic research and practical applications such as catalysis and sensing. Therefore, the preparation of nanomaterials with macrostructures has become a hot topic of research.

At present, preparation methods of nanomaterials include spontaneous growth, template-based synthesis, lithography, and the like. However, the nanomaterial prepared by the above method is usually in the form of a powder and cannot form a self-supporting structure, that is, the nanomaterial requires a support structure to maintain a specific shape such as a line or a film. Therefore, the application range of nano materials is limited.

The prior art provides a titanium dioxide nanostructure and a process for its preparation, see "Fabrication of Titania Nanofibers by Electrospinning", Dan Li et al, Nano Letters, vol. 3, No. 4, p555-560 (2003). The method comprises mixing a mineral oil with an ethanol solution of polyvinylpyrrolidone (PVP) and a titanium dioxide precursor to prepare a slurry, and then preparing a titanium dioxide nanostructure by an electrospinning method. Further, the mineral oil and polyvinylpyrrolidone are evaporated by heating to obtain a pure titanium oxide nanostructure. The titanium dioxide nanostructure prepared by the method is a thin film structure composed of a plurality of titanium dioxide nanowires, and a plurality of titanium dioxide nanowires are intertwined to form a self-supporting structure. However, the disordered distribution of a plurality of titanium dioxide nanowires in the titanium dioxide nanostructure limits the range of application.

In view of this, it is indeed necessary to provide a thin film structure of a nanomaterial composed of ordered nanowires.

A nanomaterial film structure comprising at least one nano film, wherein the nano film comprises a plurality of nanowires arranged substantially in the same direction, and the nanowire is composed of a plurality of continuous nanoparticles.

A nano material film structure comprising at least one composite nano film, wherein the composite nano film comprises a plurality of composite nanowires arranged substantially in the same direction, and each composite nanowire comprises at least one nanometer a carbon tube and a plurality of continuous nano particles coated on the surface of the carbon nanotube.

A nano material film structure comprising at least one composite nano film, wherein the composite nano film comprises a plurality of nano carbon lines arranged substantially in the same direction and a plurality of continuous nano particles coated on each of the nano At least part of the surface of the rice carbon line.

Compared with the prior art, since the nano material film structure provided by the present invention comprises at least one nano film, and the nano film comprises a plurality of nanowires arranged substantially in the same direction, the directional conductive or conductive property is obtained. The application range of the thin film structure of nano material is expanded.

The structure of the nano material film and the preparation method thereof provided by the present invention will be further described in detail below with reference to the accompanying drawings.

Referring to FIG. 1, a first embodiment of the present invention provides a nanomaterial film structure 10 comprising a composite nano film 102. The composite nanofilm 102 includes a plurality of composite nanowires 104 aligned substantially in the same direction. Preferably, the plurality of composite nanowires 104 are parallel to the surface of the composite nanofilm 102 and are arranged parallel to each other.

The adjacent two composite nanowires 104 in the composite nanofilm 102 are in contact with each other, and are closely connected by van der Waals force to form the composite nano film 102 into a self-supporting structure. It can be understood that two adjacent composite nanowires 104 in the composite nanofilm 102 can also be spaced apart, and the distance between two adjacent composite nanowires 104 can be greater than or equal to 0.5 nanometers and less than or equal to 100 micrometers. . The composite nanofilm 102 has a thickness of from 0.5 nm to 100 μm. The length of the composite nanowire 104 is not limited, and may be several meters or more. The composite nanowire 104 has a diameter of less than 500 nanometers. The length of the composite nanowire 104 can be equal to the length of the composite nanofilm 102, so that at least one composite nanowire 104 extends from one end of the composite nanofilm 102 to the other end, thereby spanning the entire composite nanometer. Film 102. The length of the composite nanofilm 102 is limited by the length of the composite nanowire 104. In this embodiment, the length of the composite nanowire 104 is greater than 1 cm.

Each of the composite nanowires 104 includes at least one carbon nanotube 1042 and a plurality of continuous nanoparticles (not labeled) coated on the surface of the carbon nanotubes 1042, and adjacent nanoparticles pass through The van der Waals force or chemical bonds are tightly joined together to form a nanowire 1044. The composite nanowire 104 can include a carbon nanotube 1042 or a plurality of end-to-end carbon nanotubes 1042 arranged substantially in the same direction. The nanoparticles are arranged along the extending direction of the end-to-end carbon nanotubes 1042 and are coated on the surface of the carbon nanotubes 1042. It can be understood that a plurality of end-to-end carbon nanotubes 1042 are arranged substantially in the same direction to form a nano carbon line (not shown), and a plurality of continuous nano particles are coated on at least part of the surface of each nano carbon line. . The plurality of continuous nanoparticles in the composite nanowire 104 are coated on at least a portion of the surface of the carbon nanotubes 1042 or completely encapsulate the entire carbon nanotubes 1042. Since the nano particles are coated on the surface of the carbon nanotubes 1042, and the nano particles and the carbon nanotubes 1042 are tightly bonded by van der Waals force or chemical bonds, the nano particles and the carbon nanotubes 1042 are firmly bonded. Together.

The nanoparticle has a particle diameter of 1 nm or more and 500 nm or less. The nanoparticle includes one or more of metal nanoparticle, non-metallic nanoparticle, alloy nanoparticle, metal compound nanoparticle, and polymer nanoparticle. Preferably, the nanoparticle comprises metal oxide nanoparticle, metal nitride nanoparticle, metal carbide nanoparticle, niobium oxide nanoparticle, niobium nitride nanoparticle, and niobium carbide nanoparticle One or more of them. In this embodiment, the nanoparticle is titanium dioxide nanoparticle. The shape of the nanoparticle is not limited and may be one or more of a spherical shape, an ellipsoidal shape, a rod shape, or a linear shape. The size of the nanoparticles is uniform, that is, the particle size distribution of the nanoparticles is small. In this embodiment, the nanoparticle has a particle size of 50 nm or more and 150 nm or less.

Referring to FIG. 2 and FIG. 3, the method for preparing the nano material film structure 10 provided by the first embodiment of the present invention may include the following steps:

In step one, at least one carbon nanotube film 100 is provided, and the carbon nanotube film 100 includes a plurality of continuous and aligned carbon nanotubes 1042.

Referring to FIG. 4 and FIG. 5, in the embodiment, the carbon nanotube film comprises a plurality of continuous and aligned carbon nanotube segments 143. The plurality of carbon nanotube segments 143 are connected end to end by Van der Waals force. Each of the carbon nanotube segments 143 includes a plurality of mutually parallel carbon nanotubes 145 that are tightly coupled by van der Waals forces. The carbon nanotube segment 143 has any width, thickness, uniformity, and shape. The carbon nanotubes 145 in the carbon nanotube film are arranged substantially in the same direction. The carbon nanotube film has a thickness of from 0.050 micrometers to 100 micrometers. The carbon nanotube film can be obtained directly by pulling a carbon nanotube array. For the specific description of the carbon nanotube film and the preparation method thereof, please refer to the patent application "Nano Carbon Tube Film" of the Chinese Patent Publication No. 200833862, which was filed on Feb. 12, 2008, which was filed on Jan. 16, 2008. Structure and preparation method thereof".

It can be understood that the carbon nanotube film 100 can further include a plurality of parallel arranged carbon nanotubes 1402, and each of the carbon nanotubes 1402 extends from one end of the carbon nanotube film 100 to the other end. For the structure of the carbon nanotube film 100 and the preparation method thereof, please refer to the patent application "Nano Carbon Tube Film Structure and Preparation Method" of No. 97107078, which was applied by Fan Shoushan et al. on February 29, 2008; and Fan Shoushan et al. The method of preparing a ribbon-shaped carbon nanotube film of the Republic of China patent application No. 97122118 filed on June 13, 2008.

The carbon nanotube film 100 can be further disposed on a support. The support can be a substrate or a frame. In this embodiment, two carbon nanotube films 100 are superposed on one metal substrate, and the arrangement directions of the carbon nanotubes 1042 in the two carbon nanotube films 100 are the same.

In the second step, at least two kinds of reaction raw materials 106 are introduced into the carbon nanotube film 100, and a reaction raw material layer (not shown) having a thickness of 50 nm to 100 nm is formed on the surface of the carbon nanotube film 100.

The material of the reaction feedstock 106 is associated with the material of the nanowire 1044 that is desired to be formed. The reaction feedstock 106 can be in a solid, liquid or gaseous state. The method of introducing at least two kinds of reaction raw materials 106 into the carbon nanotube film 100 specifically includes two cases.

First: First, a first reaction material layer having a thickness of 50 nm and 100 nm is formed on the surface of the carbon nanotube film 100.

The material of the first reaction raw material layer is related to the material of the nanowire 1044 to be prepared, and may be one or more of a metal, a non-metal, and a semiconductor. For example, when the material of the nanowire 1044 is a metal compound such as a metal oxide or a metal halide, the first reaction material layer is a metal layer such as a titanium layer, an aluminum layer or a nickel layer; and when the material of the nanowire 1044 is A non-metallic compound such as tantalum nitride or tantalum carbide, and the first reaction raw material layer is a tantalum layer.

The method for forming a first reaction raw material layer on the surface of the carbon nanotube film 100 is not limited, and may include one of physical vapor deposition, chemical vapor deposition, dipping, spraying, and screen printing. Or a variety. It can be understood that different materials can be selected to form the material of the first reaction raw material layer on the surface of the carbon nanotubes in the carbon nanotube film 100 according to the material of the first reaction raw material layer. For example, the metal can be sputtered onto the surface of the carbon nanotube by physical vapor deposition; the non-metal can be formed on the surface of the carbon nanotube by chemical vapor deposition; the metal-containing can be sprayed or screen printed The organic slurry is formed on the surface of the carbon nanotube.

Next, a gaseous or liquid second reaction material is introduced into the carbon nanotube film 100.

The gaseous second reaction raw material may be one or more of oxygen, nitrogen, helium source gas and carbon source gas. The method of introducing the gaseous second reaction raw material to the carbon nanotube film 100 may include directly introducing the gaseous second reaction raw material into a reaction chamber (not shown) provided with the carbon nanotube film 100 or by using nanocarbon The tube film 100 is disposed in an atmosphere containing a gaseous second reaction material, so that the gaseous second reaction material is distributed around the carbon nanotube film 100 and the first reaction material layer.

The liquid second reaction raw material may be one or more of methanol, ethanol, acetone, and a liquid resin. The method of introducing the liquid second reaction raw material into the carbon nanotube film 100 may include directly dropping the liquid second reaction raw material onto the surface of the carbon nanotube film 100 or infiltrating the carbon nanotube film 100 into a liquid second reaction. In the raw material, the liquid second reaction raw material is distributed around the carbon nanotube film 100 and the first reaction raw material layer.

Secondly, first, a first reaction raw material layer is formed on the surface of the carbon nanotube film 100; secondly, a second reaction raw material layer is formed on the first reaction raw material layer. The total thickness of the first reaction raw material layer and the second reaction raw material layer is 50 nm to 100 nm. When the first reaction raw material layer is a metal layer and the second reaction raw material layer is a non-metal layer, the first reaction raw material layer may be an aluminum layer or a titanium layer, and the second reaction raw material layer may be a germanium layer or the like. When both the first reaction raw material layer and the second reaction raw material layer are metal layers, the first reaction raw material layer and the second reaction raw material layer may each be an aluminum layer and a titanium layer, an aluminum layer and a nickel layer.

It can be understood that when the thickness of the reaction raw material layer deposited on the surface of the carbon nanotube film 100 is small, such as a thickness of less than 50 nm, a plurality of spaced nanoparticles can be formed after the reaction raw materials are reacted. When the thickness of the reaction raw material layer on the surface of the carbon nanotube film 100 is large, for example, more than 50 nm, the reaction raw material is likely to form continuous nano particles, that is, the nanowire 1044.

It will be appreciated that different reaction materials 106 have different thickness requirements. In this embodiment, a 100 nm thick titanium layer is deposited on the surface of the carbon nanotube film 100 by magnetron sputtering. Referring to Figure 6, the titanium particles are uniformly distributed on the surface of the carbon nanotubes in the carbon nanotube film. Then, the carbon nanotube film 100 on which the titanium layer is deposited is placed in an atmosphere such that the titanium particles on the surface of the carbon nanotube film 100 are in contact with oxygen in the atmosphere. When the thickness of the titanium layer is less than 50 nm, the titanium layer reacts with oxygen to form a plurality of spaced titanium dioxide nanoparticles. When the thickness of the titanium layer is greater than 50 nm, the titanium layer easily forms a continuous titanium dioxide nanowire after reacting with oxygen.

In step three, the reaction raw material 106 is initiated to react, and the nanostructure material film structure 10 is grown.

The method of initiating the reaction of the reaction starting material 106 includes one or more of heating, sparking, and laser scanning. It will be appreciated that depending on the reaction conditions, different methods may be employed to initiate the reaction of the reaction feedstock 106. For example, by heating, cerium can be reacted with a carbon source gas to prepare a strontium carbide nanowire; a metal scan can be used to prepare a metal oxide nanowire by laser scanning.

In this embodiment, the reaction raw material 106 is initiated by a laser scanning reaction. The reaction of initiating the reaction raw material 106 by laser scanning includes two cases: the first is to scan the surface of the entire carbon nanotube film 100 by laser, and react the reaction raw material 106 on the surface of the carbon nanotube film 100; The partial surface of the laser scanning carbon nanotube film 100 is used to cause the reaction raw material 106 on the surface of the carbon nanotube film 100 to self-diffusion reaction in the direction in which the carbon nanotubes are arranged from the position of the laser scanning. When the second method is employed, the carbon nanotube film 100 can be placed on a substrate (not shown) to control the growth of the nanowire 1044 by selecting substrates of different thermal conductivity. The greater the thermal conductivity of the substrate, the faster the heat is conducted to the substrate, and the slower the conduction along the direction of the carbon nanotubes, the slower the growth rate of the nanowire 1044. Otherwise, the faster the growth rate. Since the thermal conductivity of the air is small, the nanowire 1044 has the fastest growth rate when the carbon nanotube film 100 is suspended.

The reaction starting material 106 is subjected to reaction growth of the nanowire 1044 under the reaction conditions. The nanowire 1044 grows along the length of the carbon nanotube 1042 and is uniformly dispersed or coated on the surface of the carbon nanotube 1042 to form a composite nanowire 104. Since the carbon nanotubes 1042 in the carbon nanotube film 100 are connected end to end, the prepared nanomaterial film structure 10 is a film shape, and the nano material film structure 10 includes a plurality of composite nanowires 104 arranged in parallel. . The nanomaterial film structure 10 includes a plurality of composite nanowires 104, and the length of the composite nanowire 104 is related to the length of the carbon nanotube film 100. Since the length of the carbon nanotube film 100 is not limited to several meters, the length of the composite nanowire 104 in the prepared nanomaterial film structure 10 can be several meters or more.

In this embodiment, a laser scanning is used to initiate a self-diffusion reaction to obtain a titanium oxide film structure. Among them, the speed of laser scanning is 10 cm / sec ~ 200 cm / sec, the power of laser scanning is greater than 0.5 watt. The rate of the self-diffusion reaction is greater than 10 cm/sec. Please refer to FIG. 7, which is a scanning electron micrograph of the structure of the titanium dioxide nanowire/nanocarbon tube composite film prepared according to the first embodiment of the present invention. As can be seen from FIG. 7, the titanium dioxide nanowire/nanocarbon nanotube composite film structure comprises a plurality of titanium dioxide nanowires arranged substantially in the same direction along the length of the carbon nanotubes in the carbon nanotube film. . Please refer to FIG. 8 , which is a transmission electron micrograph of a titanium dioxide nanowire in a titanium dioxide nanowire/nanocarbon nanotube composite film structure prepared according to a first embodiment of the present invention. It can be seen from Fig. 8 that the microstructure of the titanium dioxide nanowire is a plurality of continuous ellipsoid-like small particles uniformly dispersed or coated on the surface of the carbon nanotube.

The arrangement direction of the nanowires 1044 is related to the arrangement direction of the carbon nanotubes 1042 in the carbon nanotube film 100 as a template. Since the nanowire 1044 is uniformly dispersed or coated on the surface of the carbon nanotube 1042, generally, the arrangement direction of the nanowires 1044 is substantially the same as the arrangement direction of the carbon nanotubes 1042 in the carbon nanotube film 100. the same. When the carbon nanotubes 1042 in the carbon nanotube film 100 as a template are aligned in the same direction, the formed nanowires 1044 may be parallel to each other and along the carbon nanotubes 1042 in the carbon nanotube film 100. Arrange in the direction of arrangement.

Referring to FIG. 9, a second embodiment of the present invention provides a nanomaterial film structure 20 comprising a nano film 202. Wherein, the nano film 202 comprises a plurality of nanowires 204 arranged substantially in the same direction. Preferably, the plurality of nanowires 204 are parallel to the surface of the nanofilm 202 and are arranged parallel to each other.

The adjacent two nanowires 204 in the nano film 202 are in contact with each other, and are closely connected by van der Waals force to form the nano film 202 into a self-supporting structure. It can be understood that the adjacent two nanowires 204 in the nano membrane 202 can also be spaced apart, and the distance between two adjacent nanowires 204 can be greater than or equal to 0.5 nanometers and less than or equal to 100 micrometers. The thickness of the nano film 202 is from 0.5 nm to 100 μm. The length of the nanowire 204 is not limited, and may be several meters or more. The nanowire 204 has a diameter of less than 500 nanometers. The length of the nanowire 204 can be equal to the length of the nanofilm 202 such that at least one nanowire 204 extends from one end of the nanofilm 202 to the other end, thereby spanning the entire nanofilm 202. The length of the nanofilm 202 is limited by the length of the nanowire 204. In this embodiment, the length of the nanowire 204 is greater than 1 cm. The nanowire 204 includes a plurality of continuous nanoparticles, and adjacent nanoparticles are tightly joined together by van der Waals force or chemical bonds. The nanoparticles of the nanoparticles are the same as the nanoparticles of the first embodiment.

It can be understood that by removing the carbon nanotube film 100 from the nano-material film structure 10 prepared in the first embodiment, a pure nano-material film structure 20 can be obtained. The method of removing the carbon nanotube film 100 is related to the material of the nanowire 1044. Preferably, the carbon nanotube film 100 can be removed by a process of high temperature oxidation. For example, the reaction product is placed in a high temperature furnace and kept at 500 ° C ~ 1000 ° C for 1 hour to 4 hours. It can be understood that the method of removing the carbon nanotube film 100 by high temperature oxidation is limited to when the nanowire 1044 is a high temperature resistant material, such as a metal oxide, a non-metal nitride or the like.

In this embodiment, the titanium dioxide film structure is heat-treated in an atmosphere to remove the carbon nanotube film 100 to obtain a pure titanium oxide film structure. The heat treatment temperature was 900 ° C, and the heat treatment rate of the heat treatment was 10 K / min. Referring to FIG. 10, the plurality of pure titanium dioxide nanowires form a titanium dioxide nano film having self-supporting properties. The titanium dioxide nanofilm has a thickness of less than 100 nm. The titanium dioxide nanowire in the titanium dioxide nano film has a length of 900 μm or more and a diameter of 100 nm or less.

Referring to FIG. 11, a third embodiment of the present invention provides a nanomaterial film structure 30 comprising a plurality of laminated composite nanomembranes 302. The composite nano film 302 has the same structure as the composite nano film 102 provided by the first embodiment of the present invention. The alignment direction of the composite nanowires 304 in the adjacent two composite nanofilms 302 forms an angle α, which is greater than or equal to 0 degrees and less than or equal to 90 degrees. When α is greater than 0 degrees, a plurality of composite nanowires 304 are disposed at intersection, and a plurality of uniformly distributed micropores 306 are formed in the nanomaterial film structure 30, and the pores of the micropores 306 are 1 nm to 5 μm. . The two composite nanowires 304 which are in contact with each other and are disposed at the same time can be combined by van der Waals force, or can be reacted to form a common node 308, that is, the chemical bond is tightly connected to form a self-supporting film structure 30 of the nano material. structure. When the two composite nanowires 304 which are in contact with each other and are disposed to form a common node 308, the structure of the nano-material thin film structure 30 is made stronger, the mechanical strength is greater, and it is not easily broken during use.

Referring to FIG. 12, a method for fabricating a nanomaterial film structure 30 according to a third embodiment of the present invention includes the following steps:

In step one, at least two carbon nanotube films 300 are provided.

The carbon nanotube film 300 has the same structure as the carbon nanotube film 100 provided by the first embodiment of the present invention. In this embodiment, the two carbon nanotube films 300 are overlapped and disposed on a metal substrate, and the arrangement directions of the carbon nanotubes in the two carbon nanotube films 300 are perpendicular.

In the second step, at least two kinds of reaction raw materials 310 are introduced into the carbon nanotube film 300, and a reaction raw material layer (not shown) having a thickness of 50 nm to 100 nm is formed on the surface of the carbon nanotube structure 300.

The method of introducing the reaction raw material 310 is the same as the method of introducing the reaction raw material 106 in the first embodiment of the present invention.

In this embodiment, a layer of 100 nm thick titanium is deposited on each of two opposite surfaces of the carbon nanotube film 300 disposed by intersection by magnetron sputtering.

In the third step, the reaction raw material 310 is initiated to react to grow the nanostructure material film structure 30.

The method of initiating the reaction of the starting material 310 is the same as the method of initiating the reaction of the starting material 306 in the first embodiment of the present invention.

In this embodiment, a self-diffusion reaction initiated by laser scanning is used to obtain a titanium dioxide film structure. Among them, the speed of laser scanning is 10 cm / sec ~ 200 cm / sec, the power of laser scanning is 0.4 watt ~ 10 watts. The rate of the self-diffusion reaction is greater than 10 cm/sec.

Please refer to FIG. 13, which is a scanning electron micrograph of the structure of a titanium dioxide nanowire/nanocarbon tube composite film prepared according to a third embodiment of the present invention. As can be seen from FIG. 13, the titanium dioxide nanowire/nanocarbon nanotube composite film structure grown in this embodiment comprises two titanium dioxide nanowire/nanocarbon nanotube composite films. Each of the titanium dioxide nanowire/nanocarbon nanotube composite film comprises a plurality of titanium dioxide nanowires arranged substantially in the same direction along the length of the carbon nanotubes in the carbon nanotube film, and two titanium dioxide nanoparticles The arrangement direction of the titanium dioxide nanowires in the film is perpendicular. It can be understood that by controlling the laying angle of the carbon nanotube film, different TiO 2 film structures can be prepared.

Referring to FIG. 14, a fourth embodiment of the present invention provides a nanomaterial film structure 40 comprising a plurality of laminated nanofilms 402. The nano film 402 has the same structure as the nano film 202 provided by the second embodiment of the present invention. The alignment direction of the nanowires 404 in the adjacent two nanofilms 402 forms an angle α, which is greater than or equal to 0 degrees and less than or equal to 90 degrees. When α is greater than 0 degrees, a plurality of nanowires 404 are disposed to intersect each other, and a plurality of uniformly distributed microholes 406 are formed in the nanomaterial film structure 40, and the pores of the microholes 406 are 1 nm to 5 μm. The two nanowires 404 which are in contact with each other and are disposed at the same time can be combined by van der Waals force, and can also react to form a common node 408, that is, the chemical bond is tightly connected, so that the nano-material film structure 40 forms a self-supporting structure. . When the two nanowires 404 which are in contact with each other and are disposed to form a common node 408, the structure of the nano-material film structure 40 is made stronger, the mechanical strength is greater, and it is not easily broken during use.

It can be understood that the nano-material film structure 40 can be obtained by removing the carbon nanotube film 300 from the nano-material film structure 30 provided in the third embodiment. In the present embodiment, the carbon nanotube film 300 is removed by a high temperature oxidation process. During the high temperature oxidation, two nanowires 404 that are in contact with each other and intersect to form a common node 408.

Since the nano material film structure provided by the present invention comprises at least one nano film, and the nano film comprises a plurality of nanowires arranged substantially in the same direction, the nano material film has an anisotropic structure, so that The directional heat conduction or electrical conductivity characteristics expand the application range of the nano material film structure.

In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

10,20,30,40. . . Nanomaterial film structure

100,300. . . Nano carbon tube film

102,302. . . Composite nano film

104,304. . . Composite nanowire

1042. . . Carbon nanotube

1044,204,404. . . Nanowire

106,310. . . Reaction material

202,402. . . Nano film

306,406. . . Microporous

308,408. . . node

1 is a schematic view showing the structure of a thin film of a nano material according to a first embodiment of the present invention.

2 is a flow chart of a method for preparing a thin film structure of a nano material according to a first embodiment of the present invention.

3 is a flow chart showing a process for preparing a thin film structure of a nano material according to a first embodiment of the present invention.

Figure 4 is a scanning electron micrograph of a carbon nanotube film prepared in accordance with a first embodiment of the present invention.

Fig. 5 is a schematic view showing the structure of a carbon nanotube segment in the carbon nanotube film of Fig. 4.

Figure 6 is a scanning electron micrograph of a carbon nanotube film deposited with a titanium layer prepared in accordance with a first embodiment of the present invention.

Fig. 7 is a scanning electron micrograph of the structure of a titanium dioxide nanowire/nanocarbon tube composite film prepared according to the first embodiment of the present invention.

Figure 8 is a transmission electron micrograph of the titanium dioxide nanowire in the titanium dioxide nanowire/nanocarbon nanotube composite film structure of Figure 7.

Figure 9 is a schematic view showing the structure of a thin film of a nano material according to a second embodiment of the present invention.

Figure 10 is a scanning electron micrograph of a titanium oxide film structure prepared in accordance with a second embodiment of the present invention.

Figure 11 is a schematic view showing the structure of a thin film of a nano material according to a third embodiment of the present invention.

12 is a flow chart showing a process for preparing a thin film structure of a nano material according to a third embodiment of the present invention.

Figure 13 is a scanning electron micrograph of a structure of a titanium dioxide nanowire/nanocarbon nanotube composite film prepared according to a third embodiment of the present invention.

Figure 14 is a schematic view showing the structure of a thin film of a nano material according to a fourth embodiment of the present invention.

20. . . Nanomaterial film structure

202. . . Nano film

204. . . Nanowire

Claims (26)

A nanomaterial film structure comprising at least one layer of nano film, the improvement comprising: the nano film comprising a plurality of nanowires arranged substantially in the same direction, and the nanowire consisting of a plurality of continuous nanoparticles . The nano material film structure according to claim 1, wherein the nanowire in the nano film extends from one end of the nano film to the other end. The nano material film structure according to claim 1, wherein the plurality of nanowires in the nano film are arranged substantially in parallel with each other. The nano material film structure according to claim 3, wherein two adjacent nanowires in the nano film are in contact with each other and are closely connected by a van der Waals force. The film structure of nanomaterials according to claim 4, wherein the nano film is a self-supporting structure. The film structure of the nano material according to claim 3, wherein a distance between two adjacent nanowires in the nano film is greater than or equal to 0.5 nm and less than or equal to 100 μm. The nano material film structure according to claim 1, wherein the nano film has a thickness of 0.5 nm to 100 μm. The film structure of the nano material according to claim 1, wherein the film structure of the nano material comprises at least two laminated nano films, and the adjacent two nano films pass through the van der Waals Force or chemical bonds are tightly connected. The nanomaterial film structure according to claim 8, wherein the nanowires in the adjacent two nanofilms are disposed to intersect. The film structure of the nano material according to claim 9, wherein the film structure of the nano material comprises a plurality of uniformly distributed micropores having a pore diameter of 1 nm or more and 5 μm or less. The nanomaterial thin film structure according to claim 9, wherein the two nanowires that are in contact with each other and intersect to form a common node. The nanomaterial film structure according to claim 1, wherein the nanoparticle has a particle diameter of 1 nm or more and 500 nm or less. The nanomaterial film structure according to claim 1, wherein the adjacent nanoparticles in the nanowire are closely connected together by van der Waals force or chemical bond. The nano material film structure according to claim 1, wherein the nano particles comprise metal nanoparticles, non-metallic nanoparticles, alloy nanoparticles, metal compound nanoparticles and polymer nanoparticles. One or several of the particles. The nano material film structure according to claim 14, wherein the nano particles comprise metal oxide nanoparticles, metal nitride nanoparticles, metal carbide nanoparticles, and cerium oxide nanoparticles. One or more of particles, niobium nitride nanoparticles, and niobium carbide nanoparticles. A nano material film structure comprising at least one composite nano film, the improvement comprising: the composite nano film comprising a plurality of composite nanowires arranged substantially in the same direction, and each composite nanowire comprises at least one A carbon nanotube and a plurality of continuous nanoparticles coated on the surface of the carbon nanotube. The nanomaterial film structure according to claim 16, wherein the composite nanowire in the composite nanofilm extends from one end of the composite nanofilm to the other end. The nano material film structure of claim 16, wherein each of the composite nanowires comprises a plurality of end-to-end carbon nanotubes and a plurality of carbon nanotube surfaces coated on the end-to-end Continuous nanoparticle. The film structure of the nanomaterial according to claim 16, wherein the nanoparticle and the carbon nanotube are tightly bonded by a van der Waals force or a chemical bond. The nanomaterial film structure of claim 16, wherein the plurality of continuous nanoparticles in the composite nanowire are coated on at least a portion of a surface of the carbon nanotube. The nanomaterial film structure of claim 16, wherein the plurality of continuous nanoparticles in the composite nanowire completely encapsulates the entire carbon nanotube. A nano material film structure comprising at least one composite nano film, the improvement comprising: the composite nano film comprising a plurality of nano carbon lines arranged substantially in the same direction and a plurality of continuous nano particles coated on each At least part of the surface of a nanocarbon pipeline. The nano material thin film structure according to claim 22, wherein the nano carbon pipeline comprises a plurality of carbon nanotubes connected end to end in substantially the same direction. The nanomaterial film structure according to claim 22, wherein the nanoparticle and the nanocarbon pipeline are tightly bonded by a van der Waals force or a chemical bond. The nanomaterial film structure of claim 22, wherein the plurality of continuous nanoparticles in the composite nanowire are coated on at least a portion of a surface of the nanocarbon pipeline. The nanomaterial film structure of claim 22, wherein the plurality of continuous nanoparticles in the composite nanowire completely encapsulates the entire nanocarbon pipeline.