CN113340481B - Pressure sensor and preparation method thereof - Google Patents

Pressure sensor and preparation method thereof Download PDF

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Publication number
CN113340481B
CN113340481B CN202110426759.6A CN202110426759A CN113340481B CN 113340481 B CN113340481 B CN 113340481B CN 202110426759 A CN202110426759 A CN 202110426759A CN 113340481 B CN113340481 B CN 113340481B
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conductive
layer
flexible substrate
substrate electrode
conductive flexible
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CN113340481A (en
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韩宋佳
刘川
万权震
周凯晨
颜安
林泽邦
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Sun Yat Sen University
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Sun Yat Sen University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning

Abstract

The invention provides a pressure sensor and a preparation method thereof, wherein the pressure sensor comprises a first layer of conductive flexible substrate electrode, a second layer of conductive flexible substrate electrode, an elastic medium array, an adhesive layer and a conductive lead; the first layer of conductive flexible substrate electrode and the second layer of conductive flexible substrate electrode are separated by an insulating elastic medium array; the conductive lead is led out from the first layer conductive flexible substrate electrode and the second layer conductive flexible substrate electrode; the sides of the first layer of conductive flexible substrate electrode and the second layer of conductive flexible substrate electrode are bonded by an adhesive layer. The pressure sensor can be widely applied to the fields of intelligent artificial limbs, high-end robots, virtual reality, wearable sensors and the like.

Description

Pressure sensor and preparation method thereof
Technical Field
The invention relates to the field of pressure sensor preparation, in particular to a pressure sensor and a preparation method thereof.
Background
The skin is used as the tissue with the largest surface area and the most important, and can assist the human body to sense various external stimuli, including mechanical stimuli, photo-thermal stimuli, electrical stimuli, physiological stimuli and the like. Mechanical stimulation is used as the most common stimulation mode, and helps the human body to respond to external environment changes in time. The flexible pressure sensor has more and more important application in hair surfaces such as health, medical treatment, sports and the like for the population with skin damage and barriers for sensing external force stimulation.
Pressure sensors with different working mechanisms have been developed according to the principle of signal conversion, including capacitive, piezoelectric, friction and piezoresistive sensors, wherein capacitive and piezoresistive sensors are more promising due to the simplicity of the manufacturing process, high sensitivity and operation stability, and the external stress is calculated by capturing the change of the electrical parameter of the response through an external circuit, for example, the piezoresistive sensor detects the mechanical signal by capturing the change of the contact resistance caused by the external stress. The pine electric appliance industry Co.Ltd.A piezoelectric composite material composed of amorphous chlorinated polyethylene, crystalline chlorinated polyethylene and piezoelectric ceramic powder is used to prepare a high-performance piezoelectric sensor (patent number: CN 1250158A). The national academy of sciences of fertilizer mixing material science Wang Yubing et al developed a flexible insulating dielectric layer made of Polydimethylsiloxane (PDMS) or vulcanized silicone Rubber (RTV), and upper and lower conductive capacitor electrode layers made of silicone grease conductive adhesive, to prepare a flexible capacitive touch sensor (patent number: CN 103424214A). The company limited in hong Kong textile and ready-made clothes research and development center uses force sensitive resistor material to develop a piezoresistive sensor for detecting plantar pressure (patent number: CN 102770742A).
The traditional silicon-based pressure sensor has little use in various fields such as biomedicine due to the characteristic that the whole sensor is not flexible and deformed. Meanwhile, the complexity of the preparation method, the high preparation cost, the high response characteristic of the used materials and other factors severely limit the application of the flexible intraocular sensor in the fields of attachable equipment, biological robots, biomedical diagnosis and treatment and the like. Many scholars at home and abroad have made a great deal of research on the problems, such as Tao Xiaoming of hong Kong university and the like, which propose a new method for processing a fabric strain sensor (patent number: CN 101598529A); methods have been proposed by the university of Qinghua, et al to improve the response characteristics of the materials used (patent numbers: CN102163687A, CN 101118948A)
Although various new preparation and doping methods are proposed for the performances of the selected materials at home and abroad at present, the detection of the extremely small limit and the extremely large range is difficult to be simultaneously realized, and the aspects of air permeability, ductility, low cost of preparation, high response speed, small volume and the like are difficult to be simultaneously ensured, so that the actual working environment of the pressure sensor is seriously displayed. With the continuous deep aging of population, the pressure sensor with higher detection and comfort performance, which is suitable for wider working environments, is increasingly demanded.
Disclosure of Invention
The invention provides a pressure sensor which simultaneously ensures air permeability, ductility, low cost of manufacture, fast response speed and small volume.
It is still another object of the present invention to provide a method for manufacturing the above pressure sensor
In order to achieve the technical effects, the technical scheme of the invention is as follows:
a pressure sensor comprises a first layer of conductive flexible substrate electrode, a second layer of conductive flexible substrate electrode, an elastic medium array, an adhesive layer and conductive leads; the first layer of conductive flexible substrate electrodes and the second layer of conductive flexible substrate electrodes are separated by an array of elastic media; the conductive lead is led out from the first layer conductive flexible substrate electrode and the second layer conductive flexible substrate electrode; edges of the first layer of conductive flexible substrate electrode and the second layer of conductive flexible substrate electrode are encapsulated by an adhesive layer.
Further, the elastic medium array is composed of an elastic spacer material comprising: polydimethyl siloxane, silicone rubber, polyurethane, polyethylene terephthalate, polyimide, platinum catalyzed silicone rubber, polyethylene naphthalate, epoxy resin, polyethylene oxide, styrene-butadiene block copolymers.
Further, the elastic spacers may be doped with conductive materials including, but not limited to: zero-dimensional nanomaterials (nanogold spheres, nanogold cubes, etc.); one-dimensional nanowires (silver nanowires, copper nanowires, gold nanowires, carbon nanotubes, etc.); two-dimensional nanomaterial (graphene and derivatives thereof, black phosphorus, hexagonal boron nitride, molybdenum disulfide, transition metal sulfide, graphite boron nitride, transition metal oxide, metal oxyhalide); conductive films (gold film, aluminum film, silver film, copper film, platinum film, ITO film, etc.); conductive polymers (PEDOT: PSS, PPY, hydrogels, organic ion gels).
Further, the shape of the elastic spacer includes: pyramidal, hemispherical, pointed conical, cylindrical, and cubic.
Further, the substrate materials of the first layer conductive flexible substrate electrode and the second layer conductive flexible substrate electrode may be, but are not limited to: fabric substrates (gauze, silk, bandages, cotton, linen, etc.), plastic substrates (PET, PEN, PMMA, PC, PU, PI, etc.), elastomeric substrates (PDMS, ecoflex, rubber, elastomeric polyurethane, etc.).
Further, the first layer conductive flexible substrate electrode and the second layer conductive flexible substrate electrode may be, but are not limited to: zero-dimensional nanomaterials (nanogold spheres, nanosilver spheres, nanocopper spheres, nanogold cubes, nanosilver cubes, nanocopper cubes, etc.) one-dimensional nanowires (nanosilver wires, nanocopper wires, nanogold wires, carbon nanotubes, etc.), two-dimensional nanomaterials (graphene and derivatives thereof, black phosphorus, hexagonal boron nitride, molybdenum disulfide, transition metal sulfides, graphite boron nitride, transition metal oxides, metal oxyhalides; etc.), conductive films (gold films, aluminum films, silver films, copper films, platinum films, ITO films, etc.), conductive polymers (PEDOT: PSS, PPY, hydrogels, organic ion gels), liquid metals, etc.
Further, the conductive lead is any conductive lead that is conductive and flexible, but has a resistance that does not exceed ten percent of the sensor resistance.
Further, the conductive lead is adhered to the substrates of the first layer conductive flexible substrate electrode and the second layer conductive flexible substrate electrode by dripping 0.5-2 ml of conductive silver paste at the tail end of the conductive lead; the conductive leads are closely contacted with the substrates of the first layer of conductive flexible substrate electrode and the second layer of conductive flexible substrate electrode through metal sewing, clamping modes or conductive adhesive tapes.
A method of manufacturing a pressure sensor, comprising the steps of:
s1: preparing Ecoflex mixed solution I and II and nano silver wire mixed solution;
s2: uniformly coating the Ecoflex mixed solution II on two opposite sides of the upper and lower layers of gauze with the coating width of 0.5-1.5 mm, and then drying;
s3: uniformly coating the nano silver wire mixed solution on two layers of gauze, and then drying;
s4: the conductive lead passes through one side of the gauze, which is not coated with the Ecoflex mixed solution II, and a small amount of conductive silver paste is dripped at the contact position of the silver wire and the gauze, and then the gauze is dried;
s5: and (3) dripping the Ecoflex mixed solution I on the crossing points of the grids in a certain layer of gauze by using a dispensing needle, and slowly stretching to form an elastic pillar array. Then drying until the elastic support column is obviously deformed by external force and can still quickly recover to the original shape when the external force is removed;
s6: two layers of gauze, which were not attached to both sides of the gauze of the silver wire, were sealed with Ecoflex mixed solution I and then dried under the pressure of the clamping device.
Compared with the prior art, the technical scheme of the invention has the beneficial effects that:
the invention uses the Ecoflex elastic column array to support the upper conductive layer and the lower conductive layer, and the different shapes and sizes of the elastic columns and the sizes of the arrays can meet the requirements of different measuring ranges and sensitivities. And the size of the Ecoflex elastic column array with higher sensitivity can be found out through debugging and calibration while the full measurement range is wider. When the invention is not stressed, the resistance is near infinity due to the supporting function of the Ecoflex elastic column array, and when the invention is stressed, the resistance is limited, thus ensuring the extremely small limit of measurement; the flexible substrate electrode adopts gauze or elastic cloth, so that the flexible substrate electrode has certain ductility and can be normally used after being stretched. Meanwhile, due to the net structure of the silk fabric, the silk fabric has extremely high air permeability, meets the demands of some biological and medical fields, and can be worn for a long time; the invention changes the shape of the middle support elastic column array to change the conductive loop under the external stress, and the shape of the elastic column array is restored to the original state when the external force is removed. The elastic column formed by the prepared Ecoflex mixed solution has smaller elastic coefficient and Young's modulus, so that the elastic column can be quickly restored to the initial state. When the external force is too large, the elastic column can be changed in the transverse direction and the longitudinal direction, so that the Ecoflex is prevented from breaking or cracking due to the too large deformation, and the extremely high service life and overload capacity of the device are ensured; the wearable flexible pressure sensor designed by the invention is a measuring unit, but the sensor unit array can be obtained by repeating the operation method. The sensor cell array may be fabricated in conjunction with, but not limited to, a dispenser or 3D printer. The sensor can be worn on a human body and measures physical and physiological signals such as pulse, finger bending degree and the like.
Drawings
FIG. 1 is a perspective view of the structure of a pressure sensor of the present invention;
FIG. 2 is a side view of the pressure sensor of the present invention;
FIG. 3 is a flow chart of a method of manufacturing a pressure sensor according to the present invention;
FIG. 4 is a response plot of the sensitivity of the pressure sensor array of the present invention.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the present patent;
for the purpose of better illustrating the embodiments, certain elements of the drawings may be omitted, enlarged or reduced and do not represent the actual product dimensions;
it will be appreciated by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
The technical scheme of the invention is further described below with reference to the accompanying drawings and examples.
As shown in fig. 1-2, a pressure sensor comprises a first layer of conductive flexible substrate electrode 1 and a second layer of conductive flexible substrate electrode 2, an elastic medium array 3, an adhesive layer 4 and conductive leads 5; the first layer conductive flexible substrate electrode 1 and the second layer conductive flexible substrate electrode 2 are separated by an insulating elastic medium array 3; the conductive lead 5 is led out from the first layer conductive flexible substrate electrode 1 and the second layer conductive flexible substrate electrode 2; the edges of the first layer conductive flexible substrate electrode 1 and the second layer conductive flexible substrate electrode 2 are encapsulated by an adhesive layer 4.
The elastic medium array 3 is composed of elastic spacers, the elastic spacer material comprising: polydimethyl siloxane, silicone rubber, polyurethane, polyethylene terephthalate, polyimide, platinum catalyzed silicone rubber, polyethylene naphthalate, epoxy resin, polyethylene oxide, styrene-butadiene block copolymers.
The elastic spacers may be doped with conductive materials including, but not limited to: zero-dimensional nanomaterials (nanogold spheres, nanogold cubes, etc.); one-dimensional nanowires (silver nanowires, copper nanowires, gold nanowires, carbon nanotubes, etc.); two-dimensional nanomaterial (graphene and derivatives thereof, black phosphorus, hexagonal boron nitride, molybdenum disulfide, transition metal sulfide, graphite boron nitride, transition metal oxide, metal oxyhalide); conductive films (gold film, aluminum film, silver film, copper film, platinum film, ITO film, etc.); conductive polymers (PEDOT: PSS, PPY, hydrogels, organic ion gels).
The shape of the elastic spacer includes: pyramidal, hemispherical, pointed conical, cylindrical, and cubic.
The substrate materials of the first layer conductive flexible substrate electrode 1 and the second layer conductive flexible substrate electrode 2 may be, but are not limited to: fabric substrates (gauze, silk, bandages, cotton, linen, etc.), plastic substrates (PET, PEN, PMMA, PC, PU, PI, etc.), elastomeric substrates (PDMS, ecoflex, rubber, elastomeric polyurethane, etc.).
A first layer of conductive flexible substrate electrode 1 and a second layer of conductive flexible substrate electrode 2, the electrodes of which may be, but are not limited to: zero-dimensional nanomaterials (nanogold spheres, nanosilver spheres, nanocopper spheres, nanogold cubes, nanosilver cubes, nanocopper cubes, etc.) one-dimensional nanowires (nanosilver wires, nanocopper wires, nanogold wires, carbon nanotubes, etc.), two-dimensional nanomaterials (graphene and derivatives thereof, black phosphorus, hexagonal boron nitride, molybdenum disulfide, transition metal sulfides, graphite boron nitride, transition metal oxides, metal oxyhalides; etc.), conductive films (gold films, aluminum films, silver films, copper films, platinum films, ITO films, etc.), conductive polymers (PEDOT: PSS, PPY, hydrogels, organic ion gels), liquid metals, etc.
The conductive lead 5 is any conductive lead that is conductive and flexible, but has a resistance not exceeding ten percent of the sensor resistance.
Bonding the conductive lead 5 with the substrates of the first layer conductive flexible substrate electrode 1 and the second layer conductive flexible substrate electrode 2 by dripping 0.5-2 ml of conductive silver paste at the tail end of the conductive lead 5; the conductive lead 5 is closely contacted with the substrates of the first layer conductive flexible substrate electrode 1 and the second layer conductive flexible substrate electrode 2 through metal sewing, clamping modes or conductive adhesive tapes.
As shown in fig. 3, a method for manufacturing a pressure sensor includes the steps of:
s1: preparing Ecoflex mixed solution I and II and nano silver wire mixed solution;
s2: uniformly coating the Ecoflex mixed solution II on two opposite sides of the upper and lower layers of gauze with the coating width of 0.5-1.5 mm, and then drying;
s3: uniformly coating the nano silver wire mixed solution on two layers of gauze, and then drying;
s4: the conductive lead passes through one side of the gauze, which is not coated with the Ecoflex mixed solution II, and a small amount of conductive silver paste is dripped at the contact position of the silver wire and the gauze, and then the gauze is dried;
s5: dropping the Ecoflex mixed solution I on the crossing points of the grids in a certain layer of gauze by using a dispensing needle, and slowly stretching to form an elastic strut array; then drying until the elastic support column is obviously deformed by external force and can still quickly recover to the original shape when the external force is removed;
s6: two layers of gauze, which were not attached to both sides of the gauze of the silver wire, were sealed with Ecoflex mixed solution I and then dried under the pressure of the clamping device.
The preparation method of the Ecoflex mixed solution I in this embodiment comprises:
1) Mixing Ecoflex A and Ecoflex B according to a volume ratio of 1:1 at room temperature in air;
2) Taking 4mL of each of the two solutions;
3) The mixed solution is implanted into a rotation-revolution instrument, and revolution is carried out for 60 seconds and rotation is carried out for 30 seconds;
4) Placing the fully mixed solution into a vacuum box, and standing for 10s after the solution is completely vacuumized.
The preparation method of the Ecoflex mixed solution II in this example comprises:
1) Mixing Ecoflex A, ecoflexB, thickener and retarder according to a certain proportion at room temperature in air;
2) Mixing Ecoflex A, ecoflex B and thickener in the volume ratio of 4:4:0.1 without or with reduced retarder;
3) The mixed solution is implanted into a rotation-revolution instrument, and revolution is carried out for 60 seconds and rotation is carried out for 30 seconds;
4) Placing the fully mixed solution into a vacuum box, and standing for 10s after the solution is completely vacuumized.
In this embodiment, the preparation method of the nano silver wire mixed solution includes:
1) Preparing a nano silver wire mixed solution, and mixing 0.5% of hydroxypropyl methylcellulose (HPMC), a photoinitiator, nano silver wires and absolute ethyl alcohol in a mass ratio of 4:2:18:27 in air at room temperature to prepare the nano silver wire mixed solution;
2) Putting the mixed solution into a rotation-revolution instrument, and firstly revolving for 60s and then rotating for 30s;
3) Placing the fully mixed solution in a vacuum box, and standing for 60s after completely vacuumizing.
Test effect:
as shown in FIG. 4, the performance of a portion of the sensing cells is tested using a sensor array
1. Under quasi-steady state, slowly placing standard weights with different weights, recording the piezoresistive response of the sensor, and drawing a sensitivity-pressure response curve;
2. testing the stability of the service life under the conditions that the applied stress is 0.98kPa and the applied frequency is 1.8Hz, namely simulating the human body contact pressure;
3. under the pressure action of the same frequency and different intensities, the piezoresistance of the flexible sensor is recorded, and the response capacity of the sensor to the stress intensity is tested under the conditions that the pressure intensity is 15Pa,30Pa,125Pa,1.15kPa and 2.3kPa respectively;
4. under the pressure action of different frequencies and the same strength, the piezoresistance of the flexible sensor is recorded, the pressure applied by the pressure sensor is respectively 2.5Hz,9.8Hz,14.8Hz and 24.6Hz, the impact of different frequencies is simulated, and the stable response capability of the sensor to the frequency is tested;
the flexible pressure sensor is worn on the wrist to measure extremely weak physiological signals such as pulse, and because each part of the sensor is flexible, the sensor can be well attached to the epidermis of a human body through self deformation, and because of good air permeability, a wearer has extremely comfortable experience. Transmitting the transmitted resistance change electrical signals to a terminal, and drawing a data graph; the flexible pressure sensor has high sensitivity to load and is suitable for pressure testing in different environments. Especially under the pressure conditions commonly used in life, the sensitivity presents near-linear response, and has wide prospect in the field of medical and health. Under the load action of the same strength and increased frequency, the piezoresistive response strength does not show obvious change, and no obvious asynchronism and frequency difference exists between the response frequency and the load action frequency, so that the stability of the sensor is good, the sensor is suitable for long-term pressure test, and can be used for sports, medical science, health monitoring and other aspects; the Ecoflex elastic pillar array and the flexible silk fabric substrate electrode adopted have certain tensile properties, and can provide a basis for measuring tensile stress.
By combining the above examples, the flexible pressure sensor detection device and the sensing device provided by the invention have reasonable design, excellent performance and wide application range, and the sensor is easy to integrate, can monitor the change of external stress at any time, and can effectively judge whether the physiological and medical problems exist in a wearer.
The same or similar reference numerals correspond to the same or similar components;
the positional relationship depicted in the drawings is for illustrative purposes only and is not to be construed as limiting the present patent;
it is to be understood that the above examples of the present invention are provided by way of illustration only and not by way of limitation of the embodiments of the present invention. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are desired to be protected by the following claims.

Claims (6)

1. A pressure sensor, characterized by comprising a first layer of conductive flexible substrate electrode (1) and a second layer of conductive flexible substrate electrode (2), an elastic medium array (3), an adhesive layer (4) and conductive leads (5); the first layer conductive flexible substrate electrode (1) and the second layer conductive flexible substrate electrode (2) are separated by an elastic medium array (3); the conductive leads (5) are led out from the first layer conductive flexible substrate electrode (1) and the second layer conductive flexible substrate electrode (2); edges of the first layer conductive flexible substrate electrode (1) and the second layer conductive flexible substrate electrode (2) are encapsulated through an adhesive layer (4);
the elastic medium array (3) is composed of elastic spacers, the elastic spacer material comprising: polydimethyl siloxane, silicone rubber, polyurethane, polyethylene terephthalate, polyimide, platinum catalyzed silicone rubber, polyethylene naphthalate, epoxy resin, polyethylene oxide, styrene-butadiene block copolymers; the shape of the elastic spacer includes: pyramidal, hemispherical, pointed conical, cylindrical, cubic; the conductive lead (5) is any conductive lead that is conductive and flexible, but has a resistance of no more than ten percent of the sensor resistance;
preparing Ecoflex mixed solutions I and II and nano silver wire mixed solution during manufacturing; uniformly coating the Ecoflex mixed solution II on two opposite sides of the upper and lower layers of gauze, wherein the coating width is 0.5-1.5 mm, and then drying; uniformly coating the nano silver wire mixed solution on two layers of gauze, and then drying; the conductive lead passes through one side of the gauze, which is not coated with the Ecoflex mixed solution II, and a small amount of conductive silver paste is dripped at the contact position of the silver wire and the gauze, and then the gauze is dried; dropping the Ecoflex mixed solution I on the crossing points of the grids in a certain layer of gauze by using a dispensing needle, and slowly stretching to form an elastic strut array; then drying until the elastic support column is obviously deformed by external force and can still quickly recover to the original shape when the external force is removed; two layers of gauze, which were not attached to both sides of the gauze of the silver wire, were sealed with Ecoflex mixed solution I and then dried under the pressure of the clamping device.
2. The pressure sensor of claim 1, wherein the elastic spacer is doped with a conductive material comprising: zero-dimensional nano material, one-dimensional nano wire, two-dimensional nano material, conductive film and conductive polymer.
3. The pressure sensor according to claim 1, characterized in that the substrate material of the first layer of conductive flexible substrate electrode (1) and the second layer of conductive flexible substrate electrode (2) comprises: fabric substrates, plastic substrates, and elastomeric substrates.
4. A pressure sensor according to claim 3, characterized in that the electrode material of the first layer of conductive flexible substrate electrode (1) and the second layer of conductive flexible substrate electrode (2) comprises: zero-dimensional nano material, one-dimensional nano wire, two-dimensional nano material, conductive film, conductive polymer and liquid metal.
5. Pressure sensor according to claim 4, characterized in that the conductive leads (5) are bonded to the substrates of the first layer of conductive flexible substrate electrode (1) and the second layer of conductive flexible substrate electrode (2) by dripping 0.5-2 ml of conductive silver paste at the ends of the conductive leads (5).
6. Pressure sensor according to claim 5, characterized in that the conductive leads (5) are in close contact with the substrates of the first layer of conductive flexible substrate electrode (1) and the second layer of conductive flexible substrate electrode (2) by means of metal stitching, clamping or conductive adhesive tape.
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CN107644806A (en) * 2017-08-30 2018-01-30 中山大学 The graphical preparation method of the orderly self assembly of metal oxide and metal-oxide film

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