CN208350249U

CN208350249U - A kind of high sensitivity pliable pressure sensor

Info

Publication number: CN208350249U
Application number: CN201820690049.8U
Authority: CN
Inventors: 张学锋; 柴润宁; 阮晓光; 蔡安江
Original assignee: Xian University of Architecture and Technology
Current assignee: Xian University of Architecture and Technology
Priority date: 2018-05-10
Filing date: 2018-05-10
Publication date: 2019-01-08
Anticipated expiration: 2028-05-10

Abstract

The utility model provides a kind of highly sensitive pliable pressure sensor, including top electrode, varistor layer, lower electrode, the top electrode, lower electrode are the flexible PC plate electrode for being coated with copper, and the varistor layer is made of " face-to-face " encapsulation of two layers of carbon nanotube (CNTs)/dimethyl silicone polymer (PDMS) composite material film with micro-structure.A kind of highly sensitive pliable pressure sensor disclosed by the utility model, simple process, low in cost, high sensitivity, fast response time, and stability is good.

Description

A kind of high sensitivity pliable pressure sensor

Technical field

The utility model belongs to field of sensing technologies, in particular to a kind of highly sensitive pliable pressure sensor.

Background technique

In recent years, pliable pressure sensor is since the advantages such as its Large strain, high sensitivity, high-durability are in multiple fields It has a wide range of applications, such as human motion detection, Gernral Check-up, intelligent clothing and electronic skin.

Pliable pressure sensor is broadly divided into condenser type, piezoelectric type, pressure resistance type three classes according to sensitivity principle, and preparation method is each It is not identical.Typically, based on conductive filler filled polymer with the flexible sensor of micro-structure may be implemented it is highly sensitive, The huge wave of quick response, but micro-structure processing technology, processing cost with higher, complicated technique, and technique to material The drawbacks such as take.Usually to use the advanced manufacture skill such as photoetching, electron beam evaporation plating, magnetron sputtering, oxygen plasma treatment, 3D printing Art increases the cost of manufacture of flexible sensor, limits a wide range of use of flexible sensor.

Summary of the invention

In order to overcome the disadvantages of the above prior art, the purpose of this utility model is to provide a kind of highly sensitive flexible pressures Force snesor, the transducer sensitivity height, fast response time, stability are good.

To achieve the goals above, the technical solution adopted in the utility model is:

A kind of high sensitivity pliable pressure sensor, including top electrode 1-1, varistor layer 1-2 and lower electrode 1-3, it is described Varistor layer 1-2 is carbon nano-tube/poly dimethyl siloxane composite material film, and the carbon nano-tube/poly dimethyl siloxane is multiple One surface of condensation material film is the micro-structure with protrusion, and two carbon nano-tube/poly dimethyl siloxane composite materials are thin The opposite fitting of the protrusion of film, constitutes the varistor layer 1-2.

Another surface of carbon nano-tube/poly dimethyl siloxane composite material film is plane, two carbon nano-tube/polies The plane surface of dimethyl siloxane composite material film is bonded with top electrode 1-1, lower electrode 1-3 respectively.

The top electrode 1-1, lower electrode 1-3 are the flexible PC plate electrode for being coated with copper.

The protrusion is hemispherical, is uniformly distributed.

The carbon nanotube be multi-walled carbon nanotube, 5~10 nanometers of carbon nanotube internal diameter, 10~31 nanometers of outer diameter, length It is 10~30 microns.

Compared with prior art, the utility model has the beneficial effects that

1. the utility model prepares carbon nanotube/PDMS composite material using a kind of solution blended process, simple process is easy to Operation, carbon nanotube are uniformly dispersed, and conductivity of composite material is good, and solidification post-tensioning is functional；

2. the utility model is using the simple corrosion molding preparation process of silica dioxide granule, operating process is simple, at Sheet is cheap, is easy to use on a large scale；

3. pliable pressure sensor prepared by the utility model method has good flexibility, high sensitivity, response speed Degree is fast, stability is good.

Detailed description of the invention

Fig. 1 is the structural schematic diagram of the utility model pliable pressure sensor.

In figure: top electrode 1-1, varistor layer 1-2, lower electrode 1-3.

Fig. 2 is the utility model pliable pressure sensor measurement schematic diagram.

Fig. 3 is the carbon nanotube/PDMS composite material preparation flow figure of the utility model embodiment.

Fig. 4 is the structure chart of film one in the preparation flow of the varistor layer of the utility model embodiment.

Fig. 5 is the table that silica dioxide granule is dispersed in film one in the preparation flow of the varistor layer of the utility model embodiment The structure chart in face.

Fig. 6 is the structure chart of film two in the preparation flow of the varistor layer of the utility model embodiment.

Fig. 7 is the structure chart of film three in the preparation flow of the varistor layer of the utility model embodiment.

Fig. 8 is the structure chart of bilayer film in the preparation flow of the varistor layer of the utility model embodiment.

Fig. 9 is the structure chart of laminated film in the preparation flow of the varistor layer of the utility model embodiment.

Figure 10 is the structure chart of varistor layer in the preparation flow of the varistor layer of the utility model embodiment.

Figure 11 is the structure chart of circular sensor unit in the preparation flow of the varistor layer of the utility model embodiment.

Specific embodiment

The embodiments of the present invention is described in detail with reference to the accompanying drawings and examples.

As shown in Figure 1, the utility model pliable pressure sensor, including top-down top electrode 1-1, varistor layer 1-2, Lower electrode 1-3.Wherein top electrode 1-1, lower electrode 1-3 are copper electrode, such as are coated with the flexible PC plate electrode of copper.Varistor layer 1- 2 have carbon nano-tube/poly dimethyl siloxane (CNTs/PDMS) laminated film " face-to-face " fitting group of micro-structure by two At micro-structure refers to the protrusion on carbon nano-tube/poly dimethyl siloxane composite material film surface, two carbon nano-tube/polies two The protrusion of methylsiloxane laminated film is opposite, and as a kind of typical structure, protrusion can be hemispherical, is uniformly distributed.

The utility model pliable pressure sensor measurement principle is as shown in Fig. 2, when external applied load slight change, the first micro-structure The contact area meeting of carbon nanotube/PDMS laminated film and the second micro-structure carbon nanotube/PDMS laminated film bulge-structure It changes, the resistance between upper/lower electrode changes therewith.

With reference to Fig. 3, Fig. 4, Fig. 5, Fig. 6, Fig. 7, Fig. 8, Fig. 9, Figure 10 and Figure 11, the utility model high sensitivity pliable pressure The preparation method of sensor, includes the following steps:

Step 1: carbon nano-tube/poly dimethyl siloxane composite material is prepared using solution blended process, detailed process is as follows:

1) taking carbon nanotube is raw material, is added in chloroformic solution, by ultrasonic disperse 4 hours, keeps its evenly dispersed. Wherein carbon nanotube is multi-walled carbon nanotube, and 5~10 nanometers of carbon nanotube internal diameter, 10~31 nanometers of outer diameter, length is 10~30 Micron.

2) it takes PDMS to be added in chloroformic solution, by magnetic agitation, obtains PDMS dilution.

3) above two solution is mixed, ultrasonic disperse 1 hour, obtains evenly dispersed carbon nanotube/PDMS/ chlorine again Imitative solution.

4) mechanical stirring carbon nanotube/PDMS/ chloroformic solution, and it is aided with ultrasound, so that the chloroform in solution is volatilized completely.

5) curing agent is added according to 10:1 in obtained composite material, and stirs evenly, be placed on 20 in vacuum environment ~30 minutes, bubble is sloughed, obtains gluey carbon nanotube/PDMS composite material, the mass percent of carbon nanotube is 4%.

Step 2: varistor layer is prepared, steps are as follows:

1) dimethyl silicone polymer host agent and curing agent are uniformly mixed, stands 20~30 minutes under vacuum conditions, taken off Remove bubble.

2) dimethyl silicone polymer for obtaining step 1) spin coating on a silicon substrate, spin coating rate is 1500rpm, when spin coating Between be 40s, obtain one 4-1 of film in homogeneous thickness, as shown in Figure 4；

3) taking diameter is 4~5 microns of silica dioxide granule 4-2, is added in dehydrated alcohol, ultrasonic disperse 15 minutes, Obtain evenly dispersed silica ethanol solution；

4) the silica ethanol solution is fitted into spray gun, on pressurized spray to one surface 4-1 of film, dioxy Silicon carbide particle 4-2 is dispersed in the surface of one 4-1 of film, as shown in Figure 5；

5) 2~3 hours are stood in a vacuum drying oven, obtains two 4-3 of film embedded with silica dioxide granule 4-2, then Be heating and curing, solidification temperature be 80 DEG C, curing time 2 hours, as shown in Figure 6；

6) two 4-3 of film is placed into the hydrofluoric acid dilutions that mass concentration is 5%, etching time is 30 minutes, rotten The silica dioxide granule 4-2 that eating away is embedded, surface leave neat pit, obtain three 4-4 of film, as shown in Figure 7；

7) pattern transfer technology is utilized, using three 4-4 of film as substrate, by carbon nano-tube/poly dimethyl siloxane composite wood Material is spun on substrate, obtains bilayer film 4-5, as shown in figure 8, removing after solidification, obtains the laminated film with micro-structure 4-6, as shown in Figure 9；

8) step 7 is repeated, the laminated film 4-6 for similarly having micro-structure is obtained；

9) by two laminated film 4-6 with micro-structure, i.e. protrusion is opposite with protrusion face-to-face is packaged, and is tied Structure 4-7, i.e. varistor layer 1-2, as shown in Figure 10.

Step 3: production flexible sensor, detailed process are as follows:

1) on structure 4-7, stamp out circular sensor unit 4-8, as shown in figure 11；

2) circular sensor unit 4-8 is Nian Jie with top electrode 1-1, lower electrode 1-3 respectively with conductive silver glue, and use lead It draws in order to measure, sensor production is completed.

Claims

1. a kind of high sensitivity pliable pressure sensor, including top electrode (1-1), varistor layer (1-2) and lower electrode (1-3), The varistor layer (1-2) is carbon nano-tube/poly dimethyl siloxane composite material film, which is characterized in that the carbon nanotube/ One surface of dimethyl silicone polymer composite material film is the micro-structure with protrusion, two carbon nano-tube/poly dimethyl The opposite fitting of the protrusion of silicone composite material film, constitutes the varistor layer (1-2).

2. highly sensitive pliable pressure sensor according to claim 1, which is characterized in that the top electrode (1-1), lower electricity Pole (1-3) is the flexible PC plate electrode for being coated with copper.

3. highly sensitive pliable pressure sensor according to claim 1, which is characterized in that the protrusion is hemispherical, Even distribution.

4. highly sensitive pliable pressure sensor according to claim 1, which is characterized in that the carbon nanotube is multi wall carbon Nanotube, 5~10 nanometers of carbon nanotube internal diameter, 10~31 nanometers of outer diameter, length is 10~30 microns.