CN105870316B - A kind of flexible piezoelectric energy harvester and preparation method thereof - Google Patents
A kind of flexible piezoelectric energy harvester and preparation method thereof Download PDFInfo
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- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- 239000010949 copper Substances 0.000 claims abstract description 24
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910052802 copper Inorganic materials 0.000 claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 20
- 239000002121 nanofiber Substances 0.000 claims abstract description 19
- 239000002390 adhesive tape Substances 0.000 claims abstract description 9
- 229920001166 Poly(vinylidene fluoride-co-trifluoroethylene) Polymers 0.000 claims abstract description 8
- 229920001721 polyimide Polymers 0.000 claims abstract description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 16
- 238000010041 electrostatic spinning Methods 0.000 claims description 10
- 238000001523 electrospinning Methods 0.000 claims description 9
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-dimethylformamide Substances CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 7
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 7
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 7
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 7
- 229920002120 photoresistant polymer Polymers 0.000 claims description 7
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 7
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 7
- 229920001577 copolymer Polymers 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 4
- 229910021578 Iron(III) chloride Inorganic materials 0.000 claims description 3
- 239000003292 glue Substances 0.000 claims description 3
- 238000001259 photo etching Methods 0.000 claims description 3
- XLOFNXVVMRAGLZ-UHFFFAOYSA-N 1,1-difluoroethene;1,1,2-trifluoroethene Chemical group FC(F)=C.FC=C(F)F XLOFNXVVMRAGLZ-UHFFFAOYSA-N 0.000 claims description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 2
- 229920001038 ethylene copolymer Polymers 0.000 claims description 2
- 239000010410 layer Substances 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 239000011241 protective layer Substances 0.000 claims description 2
- 238000007711 solidification Methods 0.000 claims description 2
- 230000008023 solidification Effects 0.000 claims description 2
- 125000002573 ethenylidene group Chemical group [*]=C=C([H])[H] 0.000 claims 1
- 239000000835 fiber Substances 0.000 abstract description 8
- 230000001172 regenerating effect Effects 0.000 abstract description 5
- 230000000737 periodic effect Effects 0.000 abstract description 2
- 238000009987 spinning Methods 0.000 abstract description 2
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 abstract 1
- -1 dimethyl siloxane Chemical class 0.000 abstract 1
- 238000005538 encapsulation Methods 0.000 abstract 1
- 229920005573 silicon-containing polymer Polymers 0.000 abstract 1
- 230000003068 static effect Effects 0.000 abstract 1
- 238000001039 wet etching Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 8
- 239000002033 PVDF binder Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 239000002086 nanomaterial Substances 0.000 description 3
- 239000002070 nanowire Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011056 performance test Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 241001124569 Lycaenidae Species 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000005030 aluminium foil Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 238000010036 direct spinning Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- PQIOSYKVBBWRRI-UHFFFAOYSA-N methylphosphonyl difluoride Chemical group CP(F)(F)=O PQIOSYKVBBWRRI-UHFFFAOYSA-N 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000006250 one-dimensional material Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/02—Forming enclosures or casings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
- H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/098—Forming organic materials
-
- H10N30/702—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
Abstract
A kind of flexible piezoelectric energy harvester of present invention offer and preparation method thereof.The collection of energy device includes mainly parallel flexible copper electrode, Static Spinning P（VDF‑TrFE）Nanofiber and the dimethyl silicone polymer shell of encapsulation.The preparation method of the device includes mainly following three aspect：1）Parallel equally spaced copper electrode is prepared on copper-clad polyimide film using the method for wet etching；2）The P orderly in flexible electrode surface collection with parallel electrode method is collected in conjunction with high speed rotating plate（VDF‑TrFE）Nanofiber；3）Electrode and fiber are removed together, device is packaged into dimethyl siloxane after drawing positive and negative electrode with copper adhesive tape.The device can generate the current value of the peak-to-peak voltage value and 120nA of 2V under the action of external periodic force.Energy regenerating device provided by the invention is simple in structure, can collect the mechanical energy wasted during external environment and human motion, have broad application prospects in the following flexible wearable apparatus field.
Description
Technical field
The present invention relates to piezoelectric device technologies more particularly to a kind of flexible piezoelectric collection of energy device and preparation method thereof.
Background technology
After decades of development, electronic equipment is gradually to micromation, portability and flexible development, except chargeable lithium electricity
The research of novel powering device outside pond has great importance to the independent equipment of present and future development and system.One reason
The power supply thought disclosure satisfy that the energy requirement of various portable equipments first, while frequently need not charge and replace.Exist recently
Field of nanometer material technology had it is quite a lot of about from environment obtain energy be used for self-generating system research, wherein be based on nanometer
The nano energy collecting device of piezoelectric material collecting mechanical energy causes extensive concern.It is inorganic with high piezoelectric constant first
Nano material, such as ZnO, PZT, KNN, the nano materials such as BaTiO3 are studied at first is prepared into nano energy recycling device, still
There are two bottleneck factor constrain their nano energy recycling in use, it is necessary first to high temperature come make material crystalline at
Shape, followed by inorganic nano material are too crisp, cannot bear big deformation.It is compared with inorganic piezoelectric material, organic Ferroelectric Copolymers
PVDF and its copolymer have a better flexibility, transparency, and the good characteristic of plasticity and workability enables their conducts
The material of energy regenerating device is applied in wearable or implantation equipment.People's success at present utilizes even on different substrates
Glue method, cladding process etc. are prepared for PVDF, and P (VDF-TrFE) piezoelectric membrane is used for energy regenerating device, but passes through these methods
The PVDF thin film of preparation needs to carry out after mechanical stretching under very high electric field to can show excellent piezoelectric property
To polarization.These requirements limit the application of PVDF and its copolymer in nano energy recycles device.And method of electrostatic spinning is
The important method of one-dimensional material is prepared at present, studies have shown that in electro-spinning process, the electric field force that high-voltage DC power supply provides makes
Jet stream stretches division, and PVDF and P (VDF-TrFE) the dipole ordered arrangement in highfield, it is subsequent that this so that they do not need
Polarization is obtained with good piezoelectric property, at the same studies have shown that the P (VDF-TrFE) of orderly orientation has higher β
Content.Although there are many report for preparing recuperator about P (VDF-TrFE) electrostatic spinning at present, there is also one at present at that time
A little problems need to solve.First, electrostatic spinning is all Direct Spinning on aluminium foil or copper foil at present, and when use needs them
Transfer, this process is easily damaged tunica fibrosa, when tunica fibrosa is directly as energy regenerating device, the insufficient pressure of extraneous low frequency with
So that big deformation occurs for fiber, the piezoelectricity transfer efficiency of energy regenerating device is reduced.
Invention content
Technical problem to be solved by the invention is to provide a kind of flexible piezoelectric energy harvesters and preparation method thereof.
A kind of flexible piezoelectric energy harvester, including multiple flexible parallel copper electrodes, P（VDF-TrFE）Nanofiber and packet
The PDMS of periphery is overlayed on, electrode is drawn with copper adhesive tape in the both ends of the parallel copper electrode, the P（VDF-TrFE）Nanometer
Entire device is enveloped perpendicular to copper electrode surface alignment, the PDMS and plays protective effect by fiber.
For the copper electrode on Kapton, the thickness of copper electrode is 50-100um, the number of the copper electrode
It is 20-60, spacing 100-200um, width 30-100um.Two end electrodes are as positive and negative extraction electrode, width 1000-
5000um。
P（VDF-TrFE）The diameter of nanofiber is in 50nm-500nm.Angle between most of nanofiber and level exists
Within 20 ° of ranges.
The preparation method of above-mentioned flexible piezoelectric energy harvester is as follows：
The method applied in the present invention is the method for rotating parallel pole electrostatic spinning, with P（VDF-TrFE）（Inclined difluoro second
Alkene-trifluoro-ethylene copolymer）For raw material, the mixed solution of n,N dimethylformamide and acetone is solvent, prepares novel flexible pressure
Electric flux collector.
（One）A layer photoresist protective layer is prepared using the method for photoetching on copper-clad polyimide film, in FeCl3It is molten
Unprotected Cu is eroded in liquid, after the photoresist for getting rid of electrode surface is cleaned multiple times with alcohol and acetone, just obtain
Parallel pole；
（Two）The electrospun solution used is copolymerized for P (VDF-TrFE) solution of 20wt% with vinylidene fluoride-trifluoro-ethylene
Object is raw material, and solvent is the mixed liquor of DMF and acetone（Wherein the volume content of acetone is between 10%-40%）, will with adhesive tape
Parallel pole is fixed on turntable side, so that parallel pole is grounded with copper adhesive tape, and delivery rate is 0.3 ml/L, electrostatic spinning voltage
For 15 kV；
（Three）The nanofiber after electrospinning and electrode are removed, with scissors by the junction of electrode to cropping, in parallel electricity
Electrode is drawn with copper adhesive tape in the both ends of pole, and finally entire device is encapsulated with PDMS.
The microstructure of the novel flexible piezoelectric energy collector is as shown in Fig. 4, is received using what this method obtained
Rice fiber size is uniform, has good order.
The performance test results of the novel flexible piezoelectric energy collector are as shown in Fig. 5, make in external periodic force
Under, which has sensitive responding ability, can generate the peak-to-peak voltage value and 120nA peak to peak current values of 2V.
On the one hand the method for the present invention can utilize electrostatic by piezoelectric nano fiber direct electrospinning to parallel pole flexible
Spinning process polarizes P (VDF-TrFE) nanofiber, while rotating parallel pole method collection ordered nano-fibers can be effective
Improve the content of β phases in P (VDF-TrFE).It is P's (VDF-TrFE) using the parallel pole with certain altitude as substrate
Deformation improves space.These optimize the structure and manufacture craft of energy harvester so that energy harvester has preferably pressure
Electrotransformation efficiency.
Description of the drawings
Fig. 1 is flexible piezoelectric energy harvester schematic diagram.
Fig. 2 is parallel pole schematic diagram.
Fig. 3 is the experimental provision schematic diagram for rotating parallel pole electrostatic spinning.
Fig. 4 is P (VDF-TrFE) nanofiber micro-structure diagram after electrostatic spinning.
Fig. 5 is the electrical performance testing figure of novel flexible piezoelectric energy collector.
Specific implementation mode
A kind of preparation method of novel flexible piezoelectric energy collector proposed by the present invention, including step：
1. the preparation method of flexible parallel copper electrodes, including following sub-step：
1）Electrode pattern is transferred on copper-clad polyimide film using photoetch method, step is specially：What is cleaned
Kapton coats Su8-2050 photoresists, and then the mask plate for being printed on parallel pole pattern is covered and is coated with photoetching in substrate
The one side of glue after sample substrate is placed in exposed under UV light 120 seconds, is put the substrate that exposure finishes in photoresist developer into
Development 40 seconds, taking-up are rinsed well with deionized water and after drying up to get to the substrate with electrode pattern.
2）Electrode is made using the method for corrosion, this step mainly comprises the following steps：Sample substrate is put into 1mol/L
20-30 minutes in FeCl3 solution, then with solution washes away photoresist is used, i.e., the copper electricity of rule is obtained on polyimide substrate
Pole.The spacing of electrode is 150um, is highly 50um, width 100um, and obtained electrode schematic diagram is as shown in Figure 2.
2. the preparation process of orderly P (VDF-TrFE) nanofiber
As shown in Fig. 2, pasting the electrode prepared in 1 in rotating circular disc（Diameter 20cm）Side, Cu electrode surface copper
Conducting resinl is grounded.P（VDF-TrFE）A concentration of the 20% of solution, delivery rate are that 0.3 ml/L. electrostatic spinning voltages are 15 kV,
Solidification distance is 15 cm.The rotating speed of turntable is set as 1000rpm.The electrospinning time is 30 minutes.
3. the making of novel flexible piezoelectric energy collector
The step is specially：The nanofiber after electrospinning and electrode are removed, is cropped the junction of electrode with scissors.
Electrode is drawn with copper adhesive tape at the both ends of parallel pole, finally entire device is encapsulated with PDMS.
4. the microscopic appearance of novel flexible piezoelectric energy collector characterizes
As shown in figure 4, we pass through P after SEM observation electrostatic spinnings（VDF-TrFE）The microstructure of fiber.Such as scheme a, b
It is shown, it can be seen that the surface of fiber is uniform ground, and most nanofibers is flat takes on the electrode.Scheming c and d is
SEM schemes under the different amplification of Ferroelectric Copolymers P (VDF-TrFE) nanofiber prepared using rotation parallel pole, can be with
Find out this method prepare nanofiber have it is very good along the orderly orientation of parallel pole and the diameter of fiber it is uniform,
Nano wire is parallel to the vertical direction of electrode.We count the diameter and distribution angle of nano wire, such as figure e and f institutes
Show, it can be seen that the distribution of the nanofiber diameter of electrospinning concentrates between 250-350 nm.Nano wire and level simultaneously
Angle between line is largely concentrated mainly in ± 10 ° of region, illustrates the nanometer that we prepare by rotating parallel pole
Fiber has good orientation.
5. the performance test of novel flexible piezoelectric energy collector
The step is specially：Device surface is periodically beaten using a machinery loading device, utilizes oscillograph and electrification
Learn the electric property that work station records the energy harvester.As shown in Fig. 5, device produces the output of the V of a peak-to-peak value ~ 2
Voltage, the output current of ~ 120 nA.
It will be understood by those skilled in the art that in each embodiment of aforementioned present invention, it can as needed rationally in practical application
The width of electrode in parallel pole, interelectrode distance, the height of electrode and different electrospinning parameters are set, to meet
Real work needs.
Claims (4)
1. a kind of preparation method of flexible piezoelectric energy harvester, the flexible piezoelectric energy harvester, including it is multiple flexible flat
Row copper electrode, P（VDF-TrFE）Nanofiber and the PDMS for being coated on periphery, the both ends copper glue of the parallel copper electrode
Band draws electrode, the P（VDF-TrFE）Nanofiber is perpendicular to copper electrode surface alignment, and the PDMS is by entire device packet
It covers and is afford to live in protective effect, it is characterised in that preparation method includes the following steps：
（One）A layer photoresist protective layer is prepared using the method for photoetching on copper-clad polyimide film, in FeCl3It is rotten in solution
The unprotected Cu of eating away, after the photoresist for getting rid of electrode surface is cleaned multiple times with alcohol and acetone, just obtained parallel electricity
Pole；
（Two）The electrospun solution used is with vinylidene fluoride-trifluoro-ethylene copolymer for P (VDF-TrFE) solution of 20wt%
Raw material, solvent are the mixed liquor of DMF and acetone, and parallel pole is fixed on turntable side with adhesive tape, makes parallel electricity with copper adhesive tape
Pole is grounded, and delivery rate is 0.3 ml/L, and electrostatic spinning voltage is 15 kV；
（Three）The nanofiber after electrospinning and electrode are removed, with scissors by the junction of electrode to cropping, in parallel pole
Electrode is drawn with copper adhesive tape in both ends, and finally entire device is encapsulated with PDMS.
2. preparation method according to claim 1, which is characterized in that P (VDF-TrFE) solution, with vinylidene fluoride-three
Fluoride copolymers are raw material, and solvent is the mixed liquor of DMF and acetone, and wherein the volume content of acetone is between 10-40%.
3. preparation method according to claim 1, it is characterised in that：In electro-spinning process, solidification distance is 15 cm.
4. preparation method according to claim 1, it is characterised in that：The rotating speed of turntable is set as 1000rpm.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106328803A (en) * | 2016-10-12 | 2017-01-11 | 上海师范大学 | Piezoelectric energy recycling device and preparation method thereof |
| CN108231993B (en) * | 2017-03-22 | 2022-07-05 | 苏州贝骨新材料科技有限公司 | Polarization method and application of piezoelectric electret material component |
| CN107014526A (en) * | 2017-04-28 | 2017-08-04 | 青岛大学 | A kind of Zinc oxide-base micro nanometer fiber array flexible pressure sensor and preparation method thereof |
| CN110522103B (en) * | 2019-08-29 | 2021-05-28 | 西安交通大学 | Mask thermoelectric energy collector based on electrostatic spinning PVDF-TrFE fiber film |
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|---|---|---|---|---|
| CN102954848A (en) * | 2011-08-16 | 2013-03-06 | 中国科学技术大学 | Novel flexible mechanical sensor and preparation method thereof |
| CN103367629A (en) * | 2012-11-06 | 2013-10-23 | 国家纳米科学中心 | Nano-generator and manufacturing method thereof as well as fiber array manufacturing method |
| CN104291264A (en) * | 2014-10-17 | 2015-01-21 | 华中科技大学 | Nano-piezoelectric fiber based flexible energy-harvesting device and manufacturing method thereof |
| CN105527014A (en) * | 2016-01-12 | 2016-04-27 | 湖北大学 | Manufacturing method for flexible vibration sensor based on PVDF nanofiber |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102954848A (en) * | 2011-08-16 | 2013-03-06 | 中国科学技术大学 | Novel flexible mechanical sensor and preparation method thereof |
| CN103367629A (en) * | 2012-11-06 | 2013-10-23 | 国家纳米科学中心 | Nano-generator and manufacturing method thereof as well as fiber array manufacturing method |
| CN104291264A (en) * | 2014-10-17 | 2015-01-21 | 华中科技大学 | Nano-piezoelectric fiber based flexible energy-harvesting device and manufacturing method thereof |
| CN105527014A (en) * | 2016-01-12 | 2016-04-27 | 湖北大学 | Manufacturing method for flexible vibration sensor based on PVDF nanofiber |
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