CN105870316A - Flexible piezoelectric energy collector and manufacturing method thereof - Google Patents
Flexible piezoelectric energy collector and manufacturing method thereof Download PDFInfo
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- CN105870316A CN105870316A CN201610344067.6A CN201610344067A CN105870316A CN 105870316 A CN105870316 A CN 105870316A CN 201610344067 A CN201610344067 A CN 201610344067A CN 105870316 A CN105870316 A CN 105870316A
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- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 239000010949 copper Substances 0.000 claims abstract description 28
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 26
- 229910052802 copper Inorganic materials 0.000 claims abstract description 25
- 238000000034 method Methods 0.000 claims abstract description 19
- 239000002121 nanofiber Substances 0.000 claims abstract description 19
- 239000002390 adhesive tape Substances 0.000 claims abstract description 10
- 239000004205 dimethyl polysiloxane Substances 0.000 claims abstract description 8
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims abstract description 8
- 229920001721 polyimide Polymers 0.000 claims abstract description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 16
- 238000002360 preparation method Methods 0.000 claims description 13
- 238000010041 electrostatic spinning Methods 0.000 claims description 10
- 238000001523 electrospinning Methods 0.000 claims description 9
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 7
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 7
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 7
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 229920001577 copolymer Polymers 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-dimethylformamide Substances CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 4
- 238000001259 photo etching Methods 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 4
- XLOFNXVVMRAGLZ-UHFFFAOYSA-N 1,1-difluoroethene;1,1,2-trifluoroethene Chemical group FC(F)=C.FC=C(F)F XLOFNXVVMRAGLZ-UHFFFAOYSA-N 0.000 claims description 3
- 229920001038 ethylene copolymer Polymers 0.000 claims description 3
- 239000002070 nanowire Substances 0.000 claims description 3
- 238000005253 cladding Methods 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 239000010410 layer Substances 0.000 claims description 2
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 239000011241 protective layer Substances 0.000 claims description 2
- 238000007711 solidification Methods 0.000 claims description 2
- 230000008023 solidification Effects 0.000 claims description 2
- 125000002573 ethenylidene group Chemical group [*]=C=C([H])[H] 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 229920001166 Poly(vinylidene fluoride-co-trifluoroethylene) Polymers 0.000 abstract description 7
- 239000000835 fiber Substances 0.000 abstract description 7
- 230000000737 periodic effect Effects 0.000 abstract description 2
- -1 polydimethylsiloxane Polymers 0.000 abstract 2
- 238000004806 packaging method and process Methods 0.000 abstract 1
- 238000001039 wet etching Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 8
- 239000002033 PVDF binder Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000001172 regenerating effect Effects 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000002086 nanomaterial Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000011056 performance test Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000005030 aluminium foil Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 238000010036 direct spinning Methods 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 150000002466 imines Chemical class 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000006250 one-dimensional material Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/02—Forming enclosures or casings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
- H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/098—Forming organic materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/1061—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive fibres
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
Abstract
The invention provides a flexible piezoelectric energy collector and a manufacturing method thereof. The energy collector mainly comprises flexible copper electrodes distributed in parallel, electrostatic-spun P(VDF-TrFE) nanofibers and a polydimethylsiloxane casing for packaging. The manufacturing method of the energy collector mainly comprises the following steps: 1) the copper electrodes which are distributed in parallel at an equal interval are prepared on a copper-clad polyimide film with a wet etching method; 2) orderly P(VDF-TrFE) nanofibers are collected on surfaces of the flexible electrodes with a high-speed rotary plate collection method and a parallel electrode method; 3) the electrodes and the fibers are taken off together and are packaged with dimethyl siloxane after positive and negative electrodes are lead out with copper adhesive tapes. The flexible piezoelectric energy collector can have the peak-to-peak voltage value of 2V and the current value of 120 nA under the action of periodic external force. The energy collector is simple in structure, can collect mechanical energy wasted in external environments and in the human motion process and has wide application prospect in the field of wearable equipment in the future.
Description
Technical field
The present invention relates to piezoelectric device technology, particularly relate to a kind of flexible piezoelectric collection of energy device and preparation method thereof.
Background technology
Through the development of decades, electronic equipment is gradually to miniaturization, portability and flexible development, except chargeable lithium electricity
Present and the equipment of future development independence and system are had great importance by the research of the novel powering device outside pond.One reason
First the power supply thought disclosure satisfy that the energy requirement of various portable equipment, without the need for charging frequently and changing.Exist recently
Field of nanometer material technology has had quite a lot of about obtaining the energy research for self-generating system from environment, wherein based on nanometer
The nano energy collecting device of piezoelectric collecting mechanical energy causes to be paid close attention to widely.First there is the inorganic of high piezoelectric constant
Nano material, such as ZnO, the most studied nano energy that is prepared as of nano material such as PZT, KNN, BaTiO3 reclaims device, but
Two bottleneck factor are had to constrain their use in nano energy reclaims, it is necessary first to high temperature makes material crystalline become
Shape, next to that inorganic nano material is the most crisp, it is impossible to bear big deformation.Compare with inorganic piezoelectric material, organic Ferroelectric Copolymers
PVDF and copolymer thereof have the good characteristic of more preferable pliability, transparency, plasticity and workability makes their energy conduct
The material of energy regenerating device, is applied in wearable or implantation equipment.People's success at present utilizes even on different substrates
Glue method, cladding process etc. is prepared for PVDF, P (VDF-TrFE) piezoelectric membrane and is used for energy regenerating device, but by these methods
The PVDF thin film of preparation, in order to show the piezoelectric property of excellence, needs to carry out after mechanical stretching under the highest electric field
To polarization.These requirements limit the application in nano energy reclaims device of PVDF and copolymer thereof.And method of electrostatic spinning is
Preparing the important method of one-dimensional material at present, research shows, in electro-spinning process, the electric field force that high-voltage DC power supply provides makes
Jet stretching division, PVDF and P (VDF-TrFE) dipole ordered arrangement in highfield, it is follow-up that this makes them need not
Polarization is obtained with good piezoelectric property, and research shows simultaneously, and the P (VDF-TrFE) of orientation has higher β in order
Content.Although preparing the report of recuperator much about P (VDF-TrFE) electrostatic spinning at present, there is also one the most at present
A little problems need to solve.First, current electrostatic spinning be all Direct Spinning on aluminium foil or Copper Foil, need them during use
Transfer, this process is easily damaged fibrous membrane, when fibrous membrane is directly as energy regenerating device, the insufficient pressure of extraneous low frequency with
Make fiber that big deformation occur, reduce the piezoelectricity conversion efficiency of energy regenerating device.
Summary of the invention
The technical problem to be solved is to provide a kind of flexible piezoelectric energy harvester and preparation method thereof.
A kind of flexible piezoelectric energy harvester, including multiple flexible parallel copper electrodes, P(VDF-TrFE) nanofiber and bag
Overlaying on the PDMS of periphery, electrode is drawn by the two ends copper adhesive tape of described parallel copper electrode, described P(VDF-TrFE) nanometer
Fiber is perpendicular to copper electrode surface alignment, and whole device is enveloped and plays protective effect by described PDMS.
Described copper electrode is on Kapton, and the thickness of copper electrode is 50-100um, the number of described copper electrode
For 20-60, spacing is 100-200um, and width is 30-100um.Two end electrodes is as positive and negative extraction electrode, and width is 1000-
5000um。
P(VDF-TrFE) diameter of nanofiber is at 50nm-500nm.Angle between major part nanofiber and level exists
Within 20 ° of scopes.
The preparation method of above-mentioned flexible piezoelectric energy harvester is as follows:
The method applied in the present invention is the method rotating parallel pole electrostatic spinning, with P(VDF-TrFE) (vinylidene fluoride-
Trifluoro-ethylene copolymer) be the mixed solution of raw material, DMF and acetone be solvent, prepare novel flexible piezoelectricity
Energy harvester.
(1) way of photoetching is utilized to prepare a layer photoetching compound protective layer, at FeCl on copper-clad polyimide thin film3Molten
Liquid erodes unprotected Cu, after the photoresist of getting rid of electrode surface is cleaned multiple times with ethanol and acetone, just obtain
Parallel pole；
(2) electrospun solution used is P (VDF-TrFE) solution of 20wt%, with vinylidene fluoride-trifluoro-ethylene copolymer is
Raw material, solvent is the mixed liquor (wherein the volume content of acetone is between 10%-40%) of DMF and acetone, with adhesive tape by parallel
Electrode is fixed on rotating disk side, makes parallel pole ground connection with copper adhesive tape, and delivery rate is 0.3 ml/L, and electrostatic spinning voltage is 15
kV；
(3) take off the nanofiber after electrospinning and electrode, with shears, the junction of electrode is cropped, at parallel pole
Electrode is drawn by two ends copper adhesive tape, finally with PDMS, whole device is encapsulated.
The microstructure of described novel flexible piezoelectric energy catcher as shown in Figure 4, utilizes what the method obtained to receive
Rice fiber size is homogeneous, has good order.
The performance test results of described novel flexible piezoelectric energy catcher as shown in Figure 5, is made at external periodic force
Under with, this energy harvester has sensitive responding ability, can produce peak-to-peak voltage value and the 120nA peak to peak current value of 2V.
The inventive method, by direct for piezoelectric nano fiber electrospinning to flexible parallel pole, on the one hand can utilize electrostatic
P (VDF-TrFE) nanofiber is polarized by spinning process, and rotate parallel pole method collection ordered nano-fibers can be effective simultaneously
Improve the content of β phase in P (VDF-TrFE).Utilize and there is the parallel pole of certain altitude as substrate, for P's (VDF-TrFE)
Deformation improves space.These structures optimizing energy harvester and processing technology so that energy harvester has preferably pressure
Electricity transformation efficiency.
Accompanying drawing explanation
Fig. 1 is flexible piezoelectric energy harvester schematic diagram.
Fig. 2 is parallel pole schematic diagram.
Fig. 3 is the experimental provision schematic diagram rotating parallel pole electrostatic spinning.
Fig. 4 is P (VDF-TrFE) nanofiber micro-structure diagram after electrostatic spinning.
Fig. 5 is the electrical performance testing figure of novel flexible piezoelectric energy catcher.
Detailed description of the invention
The preparation method of a kind of novel flexible piezoelectric energy catcher that the present invention proposes, including step:
1. the preparation method of flexible parallel copper electrodes, including following sub-step:
1) using photoetch method to be transferred to by electrode pattern on copper-clad polyimide thin film, step is particularly as follows: at clean polyamides
Imines thin film coats Su8-2050 photoresist, then the mask plate being printed on parallel pole pattern is covered and scribbles photoresist at substrate
Simultaneously, after sample substrate being placed in exposed under UV light 120 seconds, put development in photoresist developer into exposing complete substrate
40 seconds, after taking-up deionized water is rinsed well and dried up, i.e. obtain the substrate with electrode pattern.
2) way using corrosion makes electrode, mainly comprising the following steps of this step: sample substrate is put into 1mol/L
In FeCl3 solution 20-30 minute, then use solution washes away photoresist, on polyimide substrate, i.e. obtain the copper electricity of rule
Pole.The spacing of electrode is 150um, and height is 50um, and width is 100um, and the electrode schematic diagram obtained is as shown in Figure 2.
2. the preparation process of orderly P (VDF-TrFE) nanofiber
Rotating disk (diameter 20cm) side as in figure 2 it is shown, pasted by the electrode of preparation in 1, Cu electrode surface copper conducts electricity
Glued joint ground.P(VDF-TrFE) concentration of solution is 20%, delivery rate be 0.3 ml/L. electrostatic spinning voltage be 15 kV, solidification
Distance is 15 cm.The rotating speed of rotating disk is set to 1000rpm.The electrospinning time is 30 minutes.
3. the making of novel flexible piezoelectric energy catcher
The junction of electrode, particularly as follows: the nanofiber after taking off electrospinning and electrode, is cropped by this step with shears.Flat
Electrode is drawn by the two ends of row electrode copper adhesive tape, finally with PDMS, whole device is encapsulated.
4. the microscopic appearance of novel flexible piezoelectric energy catcher characterizes
As shown in Figure 4, we observe P(VDF-TrFE after electrostatic spinning by SEM) microstructure of fiber.As schemed a, shown in b,
The surface that can be seen that fiber is uniform ground, and the nanofiber of the overwhelming majority is flat riding on electrode.Figure c and d is to utilize
Rotate SEM figure under the different amplification of Ferroelectric Copolymers P (VDF-TrFE) nanofiber prepared by parallel pole, it can be seen that
Nanofiber prepared by the method has the best homogeneous along the orderly orientation of parallel pole and the diameter of fiber, nanometer
Line is parallel to the vertical direction of electrode.Diameter and the distribution angle of nano wire are added up by we, as shown in figure e and f, and can
To find out that the distribution of the nanofiber diameter of electrospinning concentrates between 250-350 nm.Simultaneously between nano wire and horizontal line
Angle major part be concentrated mainly on ± region of 10 ° in, illustrate that the nanofiber that we prepare by rotating parallel pole is
There is good orientation.
5. the performance test of novel flexible piezoelectric energy catcher
This step, particularly as follows: utilize a machinery loading device periodically to beat device surface, utilizes oscillograph and electrochemistry work
Make station and record the electric property of this energy harvester.As shown in Figure 5, device creates the output electricity of peak-to-peak value ~ 2 V
Pressure, the output electric current of ~ 120 nA.
It will be understood by those skilled in the art that in each embodiment of the invention described above, can be the most reasonable in actual application
Arranging the width of electrode in parallel pole, interelectrode distance, the height of electrode and different electrospinning parameters, to meet
Real work needs.
Claims (6)
1. a flexible piezoelectric energy harvester, including multiple flexible parallel copper electrodes, P (VDF-TrFE) nanofiber and cladding
At peripheral PDMS, electrode is drawn by the two ends copper adhesive tape of described parallel copper electrode, described P (VDF-TrFE) Nanowire
Dimension is perpendicular to copper electrode surface alignment, and whole device is enveloped and plays protective effect by described PDMS.
Energy harvester the most according to claim 1, it is characterised in that described copper electrode on Kapton, copper
The thickness of electrode is 50-100um, and the number of described copper electrode is 20-60, and spacing is 100-200um, and width is 30-
100um。
3. the preparation method of the flexible piezoelectric energy harvester described in claim 1, it is characterised in that comprise the steps:
(1) way of photoetching is utilized to prepare a layer photoetching compound protective layer, at FeCl on copper-clad polyimide thin film3Corruption in solution
The unprotected Cu of eating away, after the photoresist of getting rid of electrode surface is cleaned multiple times with ethanol and acetone, just obtained parallel electricity
Pole；
(2) electrospun solution used is P (VDF-TrFE) solution of 20wt%, with vinylidene fluoride-trifluoro-ethylene copolymer is
Raw material, solvent is the mixed liquor of DMF and acetone, with adhesive tape, parallel pole is fixed on rotating disk side, makes parallel electricity with copper adhesive tape
Pole ground connection, delivery rate is 0.3ml/L, and electrostatic spinning voltage is 15kV；
(3) take off the nanofiber after electrospinning and electrode, with shears, the junction of electrode is cropped, at parallel pole
Electrode is drawn by two ends copper adhesive tape, finally with PDMS, whole device is encapsulated.
Preparation method the most according to claim 3, it is characterised in that P (VDF-TrFE) solution, with vinylidene fluoride-three
Fluoride copolymers is raw material, and solvent is the mixed liquor of DMF and acetone, and wherein the volume content of acetone is between 10-40%.
Preparation method the most according to claim 3, it is characterised in that: in electro-spinning process, solidification distance is 15cm.
Preparation method the most according to claim 3, it is characterised in that: the rotating speed of rotating disk is set to 1000rpm.
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| CN106328803A (en) * | 2016-10-12 | 2017-01-11 | 上海师范大学 | Piezoelectric energy recycling device and preparation method thereof |
| CN107014526A (en) * | 2017-04-28 | 2017-08-04 | 青岛大学 | A kind of Zinc oxide-base micro nanometer fiber array flexible pressure sensor and preparation method thereof |
| CN108231993A (en) * | 2017-03-22 | 2018-06-29 | 贝骨新材料科技（上海）有限公司 | Piezoelectric electret material component and preparation method and application |
| CN110522103A (en) * | 2019-08-29 | 2019-12-03 | 西安交通大学 | A kind of mask thermoelectric energy collector based on electrostatic spinning PVDF-TrFE fiber membrane |
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| CN110522103A (en) * | 2019-08-29 | 2019-12-03 | 西安交通大学 | A kind of mask thermoelectric energy collector based on electrostatic spinning PVDF-TrFE fiber membrane |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105870316B (en) | 2018-07-24 |
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