CN105067159A - Capacitive pressure sensor and preparing method thereof - Google Patents
Capacitive pressure sensor and preparing method thereof Download PDFInfo
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- CN105067159A CN105067159A CN201510434068.5A CN201510434068A CN105067159A CN 105067159 A CN105067159 A CN 105067159A CN 201510434068 A CN201510434068 A CN 201510434068A CN 105067159 A CN105067159 A CN 105067159A
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Abstract
The invention discloses a capacitive pressure sensor and a preparing method thereof. The capacitive pressure sensor is composed of an insulating layer and two pieces of substrates including electrodes. The insulating layer is arranged between the two layers of electrodes. The insulating layer is a porous elastic film. According to the invention, the insulating layer adopts the porous elastic film, so that the sensitivity of the capacitive pressure sensor to pressures is increased, and the high-sensitivity pressure range of the capacitive pressure sensor is simultaneously increased; in addition, the porous elastic film is made of a material low in cost, the processing technology is simple, and the cost of the capacitive pressure sensor is lowered.
Description
Technical field
The present invention relates to a kind of electron device, being specifically related to a kind of is capacitance pressure transducer, of insulation course and preparation method thereof based on porous elastic film, belongs to electronic technology field.
Background technology
The pressure transducer that capacitance pressure transducer, utilizes capacitance sensitive elements to be converted to the electricity that becomes with it certain relation by measuring pressure and export, be characterized in that structure is simple, power is little, and dynamic response is fast.Its non-sensitive part is exactly the capacitor with variable element, and its modal form is made up of two parallel poles, interpolar presss from both sides with the capacitor of insulation film.When film is experienced pressure and is out of shape, the electric capacity formed between film and fixed electorde changes, by metering circuit and the exportable electric signal becoming certain relation with voltage, the sensitivity of this electric signal is roughly directly proportional to the area of film and pressure and is inversely proportional to the tension force of film and the film distance to fixed electorde.
Along with the development of wearable device, the pressure transducer as its important composition parts is had higher requirement, comprises flexible, high sensitivity, fast response and the compatibility with human body.For meeting these requirements, adopt and the insulation course of the elastic insulating material of human body compatibility as capacitor.But simple employing elastic film is limited as its elastic performance of insulating layer material, can not obtain high sensitivity.Therefore, the elastic performance how increasing insulation course has become an important research direction.Current technology is the silicon chip of employing microstructure is template, and the method peeled off again after silicon chip is formed film obtains the elastic insulating layer that surface has microstructure, thus improves the sensitivity of sensor.But there is following drawback in this method: the use of (1) template adds the cost of technique; (2) the as easy as rolling off a log deformation of microstructure that film surface is formed is compacted, and can only have higher sensitivity in small pressure limit.Meanwhile, how to ensure the microstructure of film surface fit with electrode and device and circuit integrated time do not compressed and will be become a difficult problem yet.Therefore, the deformability how increasing these resilient materials has great importance in the pressure limit of the sensitivity and increase high sensitivity that strengthen capacitance pressure transducer.
Summary of the invention
The object of the invention is, a kind of capacitance pressure transducer, and preparation method thereof is provided, solve capacitance pressure transducer, elastic non-conductive layer be stressed effect time deformation quantity little problem, increase elastic insulating layer be stressed effect time deformation, thus improve the susceptibility of capacitance pressure transducer.
The present invention is achieved by the following technical solutions:
A kind of capacitance pressure transducer, the substrate comprising electrode by insulation course and two panels forms, and described insulation course, between two-layer electrode, is characterized in that, described insulation course is porous elastic film.
According to capacitance pressure transducer, provided by the present invention, it is characterized in that, described poroelasticity film is polymer foam or is formed after being heating and curing after being mixed by heat curing resilient material and expanded material.
According to capacitance pressure transducer, provided by the present invention, it is characterized in that, described polymer foam comprises neoprene (CR), nitrile rubber (NBR), tygon (PE), Polyvinylchloride (PVC), polyethylene vinyl acetate (EVA), processes for chemically crosslinked polyethylene (XPE) and amino resins (Melamine).
According to capacitance pressure transducer, provided by the present invention, it is characterized in that, described heat curing resilient material comprises dimethyl silicone polymer (PDMS), polyurethane (PU) and platinum catalysis silica gel (Ecoflex).
According to capacitance pressure transducer, provided by the present invention, it is characterized in that, described expanded material comprises azoisobutyronitrile, ABVN, toluene sulfonyl hydrazide, bis oxide (benzene sulphur is cruel) rib, sodium bicarbonate, ammonium bicarbonate.
According to capacitance pressure transducer, provided by the present invention, it is characterized in that, described heat curing resilient material and expanded material blending ratio are between 10:1-10:3.
According to capacitance pressure transducer, provided by the present invention, it is characterized in that, described electrode comprises Graphene, graphite, carbon black, single wall and multi-walled carbon nano-tubes, metal, metal oxide, metal nanometer line, metal and metal oxide nanoparticles, described metal comprises gold, silver, copper, al and ni, and described metal oxide comprises tin indium oxide (ITO) and Fluorin doped tin-oxide (FTO).
According to capacitance pressure transducer, provided by the present invention, it is characterized in that, described substrate comprises glass, polyethylene terephthalate (PET), PEN (PEN), polyimide (PI), dimethyl silicone polymer (PDMS) and polycarbamate (PU).
Another technical scheme of the present invention is as follows:
A preparation method for capacitance pressure transducer, it comprises the following steps:
1) ethanolic solution, acetone soln and deionized water is utilized to carry out ultrasonic cleaning to substrate, dry after cleaning, adopt oxygen plasma or this substrate surface of UV/ozone process;
2) adopt vacuum evaporation, magnetron sputtering, spin coating, spraying, blade coating or intaglio printing mode on substrate, prepare electrode;
3) substrate attaching two panels being comprised electrode, to the both sides up and down of the porous elastic film as insulation course, obtains required capacitance pressure transducer; Wherein, porous elastic film is polymer foam or is formed after being heating and curing after being mixed by heat curing resilient material and expanded material, and electrode and porous elastic film contact, and substrate is in outermost.
According to the preparation method of capacitance pressure transducer, provided by the present invention, it is characterized in that, the preparation method of the described porous elastic film by being formed after being heating and curing after heat curing resilient material and expanded material mixing comprises the following steps:
1) take heat curing resilient material and expanded material respectively and both mixed, blending ratio is 10:1-10:3;
2) PET film is positioned on smooth base plate, the pad that PET film both sides rational height is consistent, mixed uniformly heat curing resilient material and expanded material are fallen in PET film;
3), on the heat curing resilient material another PET film being covered mixing and expanded material, with glass bar or metal bar in PET film surface scrolls or promotion, homogenize material is made to be distributed in two-layer PET film;
4) cover on PET film atop with the cover plate of surfacing, relative position between fixed base plate and cover plate and height, then heat in its global transfer to warm table, in heating process, expanded material produces gas simultaneously with the solidification of heat curing resilient material, forms porous structure.
5), after heat curing resilient material solidifies completely, remove base plate, cover plate and two PET film, obtain required porous elastic film.
Beneficial effect of the present invention is: porous elastic film is capacitive insulating layer, due to the existence of film Hole, make, when film is stressed effect, there is larger thickness deformation quantity, the capacitance variation amount of capacitor is increased, sensor is increased the susceptibility of pressure, porous elastic film just can be made to be compacted due to large pressure need be applied simultaneously, add the pressure limit of pressure transducer hypersensitivity; The material price that film adopts is low, and processing technology is simple, reduces the cost of pressure transducer.
Accompanying drawing explanation
Fig. 1 is the structural representation of capacitance pressure transducer, of the present invention.
Fig. 2 is the response of capacitance pressure transducer, to pressure of the embodiment of the present invention 2.
Wherein, 1 substrate, 2 electrodes, 3 insulation courses.
Embodiment
Elaborate to embodiments of the invention below in conjunction with accompanying drawing, this embodiment gives detailed embodiment and concrete operating process premised on technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, capacitance pressure transducer, of the present invention, the substrate 1 comprising electrode 2 by insulation course 3 and two panels forms; Described electrode 2 is positioned on transparent substrate 1, and is positioned at the both sides up and down of described insulation course 3, and described insulation course 3 is between two-layer electrode 2, and this insulation course 3 is porous elastic film.
Described poroelasticity film is polymer foam, and this polymer foam comprises neoprene (CR), nitrile rubber (NBR), tygon (PE), Polyvinylchloride (PVC), polyethylene vinyl acetate (EVA), processes for chemically crosslinked polyethylene (XPE) and amino resins (Melamine).
Described poroelasticity film or formed after being heating and curing after being mixed by heat curing resilient material and expanded material.Described heat curing resilient material comprises dimethyl silicone polymer (PDMS), polyurethane (PU) and platinum catalysis silica gel (Ecoflex).Described expanded material comprises azoisobutyronitrile, ABVN, toluene sulfonyl hydrazide, bis oxide (benzene sulphur is cruel) rib, sodium bicarbonate, ammonium bicarbonate.The blending ratio of described heat curing resilient material and expanded material is between 10:1-10:3.
Described electrode 2 comprises Graphene, graphite, carbon black, single wall and multi-walled carbon nano-tubes, metal, metal oxide, metal nanometer line, metal and metal oxide nanoparticles, described metal comprises gold, silver, copper, al and ni, and described metal oxide comprises tin indium oxide (ITO) and Fluorin doped tin-oxide (FTO).
Described substrate 1 comprises glass, polyethylene terephthalate (PET), PEN (PEN), polyimide (PI), dimethyl silicone polymer (PDMS) and polycarbamate (PU).
The preparation method of capacitance pressure transducer, of the present invention comprises the following steps:
1) ethanolic solution, acetone soln and deionized water is utilized to carry out ultrasonic cleaning to substrate 1, dry after cleaning, adopt oxygen plasma or this substrate 1 surface of UV/ozone process.
2) adopt vacuum evaporation, magnetron sputtering, spin coating, spraying, blade coating or intaglio printing mode prepare electrode 2 on substrate 1.
3) substrate 1 two panels being comprised electrode 2 fits to the both sides up and down of the porous elastic film as insulation course 3, obtains required capacitance pressure transducer; Wherein electrode 2 and porous elastic film contact, and substrate 1 is in outermost.
The preparation method of the described porous elastic film by being formed after being heating and curing after heat curing resilient material and expanded material mixing comprises the following steps:
1) take heat curing resilient material and expanded material respectively and both mixed, blending ratio is 10:1-10:3;
2) PET film is positioned on smooth base plate, the pad that PET film both sides rational height is consistent, mixed uniformly heat curing resilient material and expanded material are fallen in PET film;
3), on the heat curing resilient material another PET film being covered mixing and expanded material, with glass bar or metal bar in PET film surface scrolls or promotion, homogenize material is made to be distributed in two-layer PET film;
4) cover on PET film atop with the cover plate of surfacing, relative position between fixed base plate and cover plate and height, then heat in its global transfer to warm table, in heating process, expanded material produces gas simultaneously with the solidification of heat curing resilient material, forms porous structure;
5), after heat curing resilient material solidifies completely, remove base plate, cover plate and two PET film, obtain required porous elastic film.
The preparation method of described capacitance pressure transducer, is described below by way of specific embodiment.
Embodiment 1
The poroelasticity film that the present embodiment is formed after adopting and being mixed by heat curing resilient material and expanded material after being heating and curing.Described heat curing resilient material is dimethyl silicone polymer (PDMS), and described expanded material is azoisobutyronitrile.The blending ratio of described heat curing resilient material and expanded material is 10:1.The preparation method of described porous elastic film is described above.
The preparation of described capacitance pressure transducer, is completed by following concrete steps:
(1) ethanolic solution, acetone soln and the deionized water flexible transparent substrate 1 to polyethylene terephthalate (PET) is utilized to clean, dry up with drying nitrogen after cleaning, and adopt oxygen plasma or UV/ozone process substrate surface;
(2) mode of spin coating is adopted to prepare nano silver wire electrode on substrate 1;
(3) PET substrate attaching two panels being comprised nano silver wire electrode, to the upper and lower both sides of porous elastic film, obtains required capacitance pressure transducer.Wherein nano silver wire electrode and porous elastic film contacts, PET substrate is in outermost.
Embodiment 2
The poroelasticity film that the present embodiment is formed after adopting and being mixed by heat curing resilient material and expanded material after being heating and curing.Described heat curing resilient material is polyurethane (PU), and described expanded material is toluene sulfonyl hydrazide.The blending ratio of described heat curing resilient material and expanded material is 10:2.The preparation method of described porous elastic film is described above.
The preparation of described capacitance pressure transducer, is completed by following concrete steps:
(1) ethanolic solution, acetone soln and the deionized water flexible transparent substrate 1 to PEN (PEN) is utilized to clean, dry up with drying nitrogen after cleaning, and adopt oxygen plasma or UV/ozone process substrate surface;
(2) adopt the mode of spin coating on substrate, prepare single pipe electrode;
(3) PEN substrate attaching two panels being comprised single pipe electrode, to the upper and lower both sides of porous elastic film, obtains required capacitance pressure transducer.Wherein single pipe electrode and porous elastic film contacts, PEN substrate is in outermost.
Fig. 2 is the response of capacitance pressure transducer, to pressure of embodiment 2.
Embodiment 3
The poroelasticity film that the present embodiment is formed after adopting and being mixed by heat curing resilient material and expanded material after being heating and curing.Described heat curing resilient material is platinum catalysis silica gel (Ecoflex), and described expanded material is sodium bicarbonate.The blending ratio of described heat curing resilient material and expanded material is 10:3.The preparation method of described porous elastic film is described above.
The preparation of described capacitance pressure transducer, is completed by following concrete steps:
(1) utilize ethanolic solution, acetone soln and the deionized water flexible transparent substrate 1 to polyimide (PI) to clean, dry up with drying nitrogen after cleaning, and adopt oxygen plasma or UV/ozone process substrate surface;
(2) mode of spin coating is adopted to prepare graphite electrode on substrate 1;
(3) PI substrate attaching two panels being comprised graphite electrode, to the upper and lower both sides of porous elastic film, obtains required capacitance pressure transducer.Wherein graphite electrode and porous elastic film contacts, PI substrate is in outermost.
Embodiment 4
The present embodiment adopts polymer foam as poroelasticity film, and this polymer foam is tygon (PE).
The preparation of described capacitance pressure transducer, is completed by following concrete steps:
(1) ethanolic solution, acetone soln and the deionized water flexible transparent substrate 1 to dimethyl silicone polymer (PDMS) is utilized to clean, dry up with drying nitrogen after cleaning, and adopt oxygen plasma or UV/ozone process substrate surface;
(2) mode of spin coating is adopted to prepare gold electrode on substrate 1;
(3) dimethyl silicone polymer (PDMS) substrate attaching two panels being comprised gold electrode, to the upper and lower both sides of tygon (PE) polyfoam, obtains required capacitance pressure transducer.Wherein gold electrode and tygon (PE) porous elastic film contacts, dimethyl silicone polymer (PDMS) substrate is in outermost.
Embodiment 5
The present embodiment adopts polymer foam as poroelasticity film, and this polymer foam is amino resins (Melamine).
The preparation of described capacitance pressure transducer, is completed by following concrete steps:
(1) utilize ethanolic solution, acetone soln and the deionized water flexible transparent substrate 1 to polycarbamate (PU) to clean, dry up with drying nitrogen after cleaning, and adopt oxygen plasma or UV/ozone process substrate surface;
(2) mode of spin coating is adopted to prepare tin indium oxide (ITO) electrode on substrate 1;
(3) polycarbamate (PU) substrate attaching two panels being comprised tin indium oxide (ITO) electrode, to the upper and lower both sides of amino resins (Melamine) polyfoam, obtains required capacitance pressure transducer.Wherein tin indium oxide (ITO) electrode and amino resins (Melamine) porous elastic film contacts, polycarbamate (PU) substrate is in outermost.
Claims (10)
1. a capacitance pressure transducer, the substrate comprising electrode by insulation course and two panels forms, and described insulation course, between two-layer electrode, is characterized in that, described insulation course is porous elastic film.
2. capacitance pressure transducer, according to claim 1, is characterized in that, described poroelasticity film is polymer foam or is formed after being heating and curing after being mixed by heat curing resilient material and expanded material.
3. capacitance pressure transducer, according to claim 2, is characterized in that, described polymer foam is neoprene, nitrile rubber, tygon, Polyvinylchloride, polyethylene vinyl acetate, processes for chemically crosslinked polyethylene or amino resins.
4. capacitance pressure transducer, according to claim 2, is characterized in that, described heat curing resilient material is dimethyl silicone polymer, polyurethane or platinum catalysis silica gel.
5. capacitance pressure transducer, according to claim 2, is characterized in that, described expanded material is azoisobutyronitrile, ABVN, toluene sulfonyl hydrazide, bis oxide rib, sodium bicarbonate or ammonium bicarbonate.
6. capacitance pressure transducer, according to claim 2, is characterized in that, the blending ratio of described heat curing resilient material and expanded material is between 10:1-10:3.
7. capacitance pressure transducer, according to claim 1, it is characterized in that, described electrode is Graphene, graphite, carbon black, single wall and multi-walled carbon nano-tubes, metal, metal oxide, metal nanometer line or metal and metal oxide nanoparticles, described metal is gold, silver, copper, aluminium or nickel, and described metal oxide is tin indium oxide or Fluorin doped tin-oxide.
8. capacitance pressure transducer, according to claim 1, is characterized in that, described substrate is glass, polyethylene terephthalate, PEN, polyimide, dimethyl silicone polymer or polycarbamate.
9. a preparation method for capacitance pressure transducer, according to claim 1, is characterized in that, comprises the following steps:
1) ethanolic solution, acetone soln and deionized water is utilized to carry out ultrasonic cleaning to substrate, dry after cleaning, adopt oxygen plasma or this substrate surface of UV/ozone process;
2) adopt vacuum evaporation, magnetron sputtering, spin coating, spraying, blade coating or intaglio printing mode on substrate, prepare electrode;
3) substrate attaching two panels being comprised electrode, to the both sides up and down of the porous elastic film as insulation course, obtains required capacitance pressure transducer; Wherein, porous elastic film is polymer foam or is formed after being heating and curing after being mixed by heat curing resilient material and expanded material, and electrode and porous elastic film contact, and substrate is in outermost.
10. the preparation method of capacitance pressure transducer, according to claim 9, is characterized in that, the preparation method of the described porous elastic film by being formed after being heating and curing after heat curing resilient material and expanded material mixing comprises the following steps:
1) take heat curing resilient material and expanded material respectively and both mixed, blending ratio is 10:1-10:3;
2) PET film is positioned on smooth base plate, the pad that PET film both sides rational height is consistent, mixed uniformly heat curing resilient material and expanded material are fallen in PET film;
3), on the heat curing resilient material another PET film being covered mixing and expanded material, with glass bar or metal bar in PET film surface scrolls or promotion, homogenize material is made to be distributed in two-layer PET film;
4) cover on PET film atop with the cover plate of surfacing, relative position between fixed base plate and cover plate and height, then heat in its global transfer to warm table, in heating process, expanded material produces gas simultaneously with the solidification of heat curing resilient material, forms porous structure;
5), after heat curing resilient material solidifies completely, remove base plate, cover plate and two PET film, obtain required porous elastic film.
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| CN110346078A (en) * | 2019-07-30 | 2019-10-18 | 天津大学 | Capacitive pliable pressure sensor and its preparation method and application |
| CN112255280A (en) * | 2020-10-09 | 2021-01-22 | 海南大学 | Preparation method of flexible and air-permeable sensor |
| CN112781757A (en) * | 2020-12-26 | 2021-05-11 | 重庆华知光环保科技有限责任公司 | Flexible capacitive pressure sensor based on graphene and preparation method thereof |
| CN112781757B (en) * | 2020-12-26 | 2023-10-31 | 重庆华知光环保科技有限责任公司 | Flexible capacitive pressure sensor based on graphene and preparation method thereof |
| CN113218543A (en) * | 2021-05-07 | 2021-08-06 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible pressure sensor, dielectric layer thereof and preparation method of dielectric layer |
| CN113588140A (en) * | 2021-07-08 | 2021-11-02 | 上海交通大学 | Pressure sensor, pressure sensing array and preparation method thereof |
| CN114034416A (en) * | 2021-10-19 | 2022-02-11 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Flexible capacitive sensor and preparation method thereof |
| CN114323369A (en) * | 2021-12-22 | 2022-04-12 | 北京石墨烯技术研究院有限公司 | Flexible pressure sensor, preparation method thereof and wearable device |
| CN114323369B (en) * | 2021-12-22 | 2024-03-26 | 北京石墨烯技术研究院有限公司 | Flexible pressure sensor, manufacturing method thereof and wearable device |
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