WO2013152695A1

WO2013152695A1 - Friction apparatus for generating electrical energy

Info

Publication number: WO2013152695A1
Application number: PCT/CN2013/073792
Authority: WO
Inventors: 王中林; 范凤茹; 林龙; 朱光
Original assignee: 纳米新能源（唐山）有限责任公司
Priority date: 2012-04-13
Filing date: 2013-04-07
Publication date: 2013-10-17
Also published as: WO2013152695A8

Abstract

A friction apparatus for generating electrical energy comprises: a first electrode, a second electrode and an intervening thin film (3) , wherein the first electrode comprises a first high molecular polymer insulation layer (2) of which one side surface is provided with a conductive film (1) ; the second electrode comprises a second high molecular polymer insulation layer (4) of which one side surface is provided with a conductive film (1) ; the intervening thin film (3) is a third high molecular polymer insulation layer of which one side surface is provided with a concave-convex micro-nano structure; the intervening thin film (3) integrates with the second electrode with the side surface without the concave-convex micro-nano structure being fixed on the other side surface without the conductive film (1) of the second high molecular polymer insulation layer (4) ; on the second electrode, the surface of the concave-convex micro-nano structure of the intervening thin film (3) and the surface without the conductive film (1) of the first electrode are oppositely fit and are mutually fixedly connected; and the conductive film (1) of the first high molecular polymer insulation layer (2) and the conductive film (1) of the second high molecular polymer insulation layer (4) are both the output electrodes of the friction apparatus for generating electrical energy.

Description

Friction power generator

Technical field

The present invention relates to a power generating device, and more particularly to a friction power generating device. Background technique

Nanotechnology-based energy harvesting and conversion devices, due to their unique self-generating and self-driven properties, are likely to play a key role in the manufacture and driving of self-powered nanodevices and nanosystem devices. The more attention you pay. In 2006, Professor Wang Zhonglin of the Georgia Institute of Technology in the United States successfully realized the first piezoelectric nanogenerator that converts mechanical energy into electrical energy using oxidized nanowires. Subsequently, based on the piezoelectric effect, various nano-generators based on different materials and structures were successively developed. At present, the output power of nano-generators is sufficient to drive commercial light-emitting diodes (LEDs), small liquid crystal displays, and even self-powered wireless data transmission equipment. The power density has also reached l-10 mW/cm ³ .

Generally, a generator has the effect of generating a charge, separating the positive and negative charges to generate a potential difference and driving the free electrons by a potential difference, which is based on electromagnetic, piezoelectric, thermoelectric, and even electrostatic effects. Nanogenerators rely on the piezoelectric potential generated by the oxidation of nanowires to achieve power generation. On the other hand, triboelectricity and static phenomena are a very common phenomenon that exists in all aspects of our daily lives, from walking to driving. Because it is difficult to collect and use, it is often a form of energy that people have neglected. If a new method can be used to collect the electric energy generated by friction or use this method to convert irregular kinetic energy in daily life into usable electric energy, it will have an important impact on people's daily life. So far, micro-electrostatic generators have been successfully developed and are widely used in the field of micro-electromechanical (MEMS). However, the design of micro-electrostatic generators is mainly based on inorganic silicon materials, and the fabrication of devices requires complicated processes and precise operations. The preparation of the entire device requires large equipment and special production conditions, and the cost is too high, which is not conducive to the commercialization and daily application of the generator. The Chinese invention patent document No. 200910080638.X discloses a rotary friction generator which generates electricity by using a frictional electricity generation phenomenon, and the stator friction material of the inner wall of the outer casing is in close contact with the rotor friction material of the outer wall of the rotor shaft cylinder, Rotating the rotor shaft to rotate the friction between the stator friction material and the rotor friction material to generate current and output by the rotor End output. However, the rotary friction generator requires specific mechanical energy to be used, and cannot be used to collect and convert irregular kinetic energy, such as the movement of muscle parts of the human body and disordered wind energy, and the power generation efficiency of the device is not high.

Summary of the invention

The present invention provides a friction power generating apparatus having a wider application environment and higher power generation efficiency in order to solve the problems existing in the prior art.

The present invention provides a friction power generating device including a first electrode, a second electrode, and an intermediate film, the first electrode including a first polymer insulating layer provided with a conductive film on one surface; the second electrode a second polymer insulating layer comprising a conductive film on one side; the intermediate film is a third polymer insulating layer, and one side surface thereof is provided with a micro-nano-convex structure, and the intermediate film is not provided The surface of the micro-nano uneven structure is fixed on the surface of the second polymer insulating layer on which the conductive film is not disposed, and is integrated with the second electrode; on the second electrode, the surface of the intermediate film micro-nano concave-convex structure And a surface of the first polymer insulating layer and the conductive film on the second polymer insulating layer are both friction generating devices; Output electrode.

The materials of the first polymer polymer insulating layer, the second polymer polymer insulating layer, and the third polymer polymer insulating layer of the present invention may be the same or different. If the three-layer polymer insulating layer is made of the same material, the amount of charge that causes triboelectric charging is small. Preferably, the first polymer insulating layer is different from the material of the third polymer insulating layer. The first polymer polymer insulating layer and the second polymer polymer insulating layer are preferably the same, and the material type can be reduced, making the production of the present invention more convenient.

Further preferably, the first polymer polymer insulating layer, the second polymer polymer insulating layer, and the third polymer polymer insulating layer are transparent materials. The first polymer polymer insulating layer, the second polymer polymer insulating layer, and the third polymer polymer insulating layer are each selected from a transparent high polymer polyethylene terephthalate (PET), One of polydidecylsiloxane (PDMS), polystyrene (PS), polydecyl methacrylate (PMMA), polycarbonate (PC), and liquid crystal polymer (LCP). The conductive film is one of indium tin oxide (ITO), a graphene electrode, and a silver nanowire film. After using the above preferred materials, then the entire device is a fully transparent and flexible Device. The transparent power generating device of the present invention can be used in the field of high definition liquid crystal displays such as screens of smartphones, touch screens, and other self-driven electronic display screens.

Optionally, the first electrode, the second electrode and the intervening film are all flexible flat structures, and the electrodes are frictionally electrified by any bending and deformation. The flexible flat structure can expand the application environment of the friction power generating device, collect and convert irregular kinetic energy, such as the movement of the muscle part of the human body and the disordered wind energy.

Preferably, the micro/nano-convex structure of the surface of the intermediate film is a nano- to micro-scale uneven structure. The micro/nano concave-convex structure on the surface of the intermediate film is a regular concave-convex structure, and the concave-convex structure is one of a stripe shape, a cubic shape, a quadrangular pyramid shape or a cylindrical shape. The micro/nano concave-convex structure is a nano-scale to a micro-scale concave-convex structure; the nano-concave structure is preferably a nano-scale concave-convex structure having a size of 50 nm to 300 nm, and the nano concave-convex structure can increase the frictional contact area, thereby improving the frictional electrification efficiency. When the friction power generating device provided by the present invention does not need to be specially made to be completely transparent, and the material of the first polymer insulating layer and the third polymer insulating layer are different, the first polymer The polymer insulating layer, the second polymer insulating layer, and the third polymer insulating layer are respectively selected from the group consisting of polyimide film, aniline resin film, polyacetal film, ethyl cellulose film, and polyamide. Film, melamine furfural film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, polyethylene adipate film, poly(phenylene terephthalate) film, Fiber (recycled) sponge film, polyurethane elastomer film, styrene propylene copolymer film, styrene butadiene copolymer film, rayon film, polyfluorene film, methacrylate film, polyvinyl alcohol film, polyethylene Alcohol film, polyester film, polyisobutylene film, polyurethane flexible sponge film, polyethylene terephthalate film, polyvinyl butyral One of a film, a furfural phenol film, a neoprene film, a butadiene propylene copolymer film, a natural rubber film, a polyacrylonitrile film, an acrylonitrile vinyl chloride film, and a polyethylene propylene glycol carbonate film.

Of course, when the invention is not completely transparent, the conductive film can be a metal film, and the metal film can be any conductive material, such as a conductive polymer, stainless steel, etc.; preferably gold, silver, One of platinum, aluminum, nickel, copper, titanium, iron, selenium and alloys thereof preferably has a thickness of 50 nm to 200 nm. The conductive film can be plated on the surface of the insulating layer by vacuum sputtering or evaporation.

Optionally, the outer edges of the first electrode and the second electrode are connected by a tape or the like. Alternatively, the friction power generating device in the present invention is a friction generator. Further, the friction The number of generators may be plural, and a plurality of friction generators may be connected in parallel or in series to form a friction generator set.

Optionally, the friction power generating device of the present invention is a self-powered pressure sensor, wherein the conductive film on the first polymer insulating layer and the conductive film on the second polymer insulating layer are self-powered The output electrode of the sensing signal of the pressure sensor.

The friction power generating device provided by the present invention generates electric energy by means of a charge pump effect of a triboelectric potential, which is a single, low cost and mass production method. Based on a two-layer structure, the peak voltage output reaches 18V and the current is 0.7μΑ. The friction generator of the present invention has several unique advantages over other existing micro energy harvesting methods. First of all, this is a new type of power generation device based on novel principles and methods. It is likely to open up new research fields for the research and application of organic electronic devices and flexible electronics. Secondly, the manufacturing process of the entire device is not required. Expensive raw materials and advanced manufacturing equipment will benefit its large-scale industrial production and practical applications. Finally, the unit is based on a flexible polymer sheet that is easy to process, has a long life and is easily integrated with other processes. The friction generator demonstrates its good application prospects, and can obtain energy from many irregular activities such as human activities, tire rotation, wave fluctuations, mechanical vibration, etc., providing self-powered and self-driven for personal electronic products, environmental monitoring, medical science, etc. Equipment, with great commercial and practical potential.

BRIEF abstract

1a and lb are schematic structural views of a friction power generating device of the present invention;

2a to 2f are schematic views showing a manufacturing process of an embodiment of a friction power generating device according to the present invention; and FIGS. 3a to 3c are schematic views showing a micro-nano-convex structure of an intervening film surface according to a specific embodiment of the friction power generating device of the present invention;

4 is a diagram showing a feather drop induction test result of an embodiment of a self-powered pressure sensor of the friction power generating device of the present invention;

5a to 5c are diagrams showing the results of response speed test of an embodiment of the self-powered pressure sensor of the friction power generating device of the present invention.

In the figure: i - conductive film, 2-first polymer insulation layer, 3-interior film, 4-second High polymer insulation layer.

Preferred embodiment of the invention

The specific embodiments of the present invention are further described below in conjunction with the accompanying drawings.

The present invention provides a friction power generating device including a first electrode, a second electrode, and an intermediate film, the first electrode including a first polymer insulating layer provided with a conductive film on one surface; the second electrode a second polymer insulating layer provided with a conductive film on one side; the intermediate film is a third polymer insulating layer, and a micro-nano-convex structure is disposed on one surface thereof; The surface of the micro-nano concave-convex structure is fixed on a surface of the second polymer insulating layer on which the conductive film is not provided, and is integrated with the second electrode; on the second electrode, the surface of the intermediate film micro-nano concave-convex structure is The surface of the first electrode not provided with the conductive film is directly attached and fixedly connected; the conductive film on the first polymer insulating layer and the conductive film on the second polymer insulating layer are outputs of the friction power generating device electrode.

The friction power generating device provided by the present invention can be flexibly designed in various forms as needed, for example, a friction generator that directly targets power generation, or a pressure sensor that performs pressure sensing using a charging pump effect of a frictional electric potential. The following is mainly a friction generator and a pressure sensor as an example to introduce the friction power generating device provided by the present invention.

First, the specific implementation of the friction power generator as a friction generator is introduced.

Figures la and lb show a typical structure of a fully transparent friction generator based on a polymer. The friction generator is constructed as a "sandwich" structure composed of two different polymer sheets, two polymer sheets stacked on each other with an intervening film 3 interposed therebetween. As shown in FIG. 1a, polyethylene terephthalate (PET) is used as the first polymer insulating layer 2, and one side surface thereof is plated with an indium tin oxide (ITO) conductive film 1 . A first electrode is formed by the two layers of the insulating layer 2 and the conductive film 1. The other electrode is also made of polyethylene terephthalate (PET) as the second polymer insulating layer 4, and is coated with an indium tin oxide (ITO) conductive film 1 on one side thereof. The ITO conductive film and the PET together form a second electrode; the difference is that the second polymer polymer insulating layer 4 is pasted with the intermediate film 3, and the intermediate film 3 is a polydisiloxane (PDMS) film, which is formed on the intermediate film. It is a regular quadrangular pyramid type micro-nano concave-convex structure. The ITO conductive film of the first electrode and the ΓΓΟ conductive film of the second electrode serve as output electrodes for current and voltage, and are externally connected Ammeter (not shown). As shown in FIG. 1b of the specification, when the friction generator is bent, the PDMS film and the PET film of the first electrode frictionally induce a charge, the induced charge forms an internal potential, and further induces a charge on the conductive film ITO, respectively, and connects the external circuit. Current can be generated.

As shown in Figures 2a to 2f, a method of fabricating the above described fully transparent generator is provided. The fabrication of the above fully transparent generator is carried out in the order shown in Figures 2a to 2f. First, a patterned silicon template (shown in Figure 2a) was fabricated, and a 4-inch (100) crystal wafer was photolithographically patterned on the surface. The patterned silicon wafer is anisotropically etched by a wet etching process to form a quadrangular pyramid array structure, and an isotropic etching process is performed by a dry etching process. The engraved template was cleaned with acetone and isopropyl alcohol, and then all of the templates were subjected to surface silanization in an atmosphere of trimethyl chlorosilane (manufactured by Sigma Aldrich Co., Ltd.), and the silicon template was processed for use. A PDMS film having a microstructured surface was prepared by first mixing a PDMS precursor and a curing agent (Sylgard 184, Tow Corning) at a mass ratio of 10:1. The mixture is then applied to the surface of the silicon template. After the vacuum degassing process, the excess mixture on the surface of the wafer is removed by spin coating to form a thin PDMS liquid film. The entire template was cured in an environment of 85 degrees Celsius for 1 hour, after which a uniform layer of PDMS film with a specific microstructure array was peeled off from the template. Then, the film is fixed on a clean polyethylene terephthalate (PET) insulating layer coated with an indium tin oxide (ITO) conductive film by a thin layer of The cured PDMS layer acts as a tie layer. After curing, the PDMS film is firmly fixed to the insulating layer of PET. Then, another PET insulating layer coated with an ITO conductive film is overlaid on the PDMS layer to form a sandwich-like device. There are transparent conductive ITO electrodes on the top and bottom of the device. The two short side edges of the device are bonded with plain transparent tape to ensure that the PET layer and the PDMS layer have sufficient contact area at the interface. Then, two copper wires were respectively fixed on the upper and lower ITO electrodes with silver paste, and the entire flexible transparent nanogenerator was prepared. The effective size of the generator is uniformly fixed to 4.5 cmxl.2 cm, and the thickness of the entire device is approximately 460 μη.

In the embodiment of the present invention, three PDMS graphic array manufacturing processes are provided, including stripe shape (figure

2c), cube (shown in Figure 2d) and quadrangular pyramid (shown in Figure 2e). The surface micrographs of these three nano-convex structures are shown in Figures 3a-3c, and the array unit size of each PDMS is limited to about 10 microns. A pattern array with smaller scale elements can also be prepared with dimensions as small as 5 microns and with the same high quality features. The inset in Figures 3a-3c represents a 45° tilt. High magnification images, with scale sizes of 5 microns and 100 microns, respectively, are shown in the figures. High resolution

SEM photographs show that all of the array elements are very uniform and regular, indicating that this is a very effective method for preparing large-scale uniform plastic microstructures. More importantly, each quadrangular pyramid unit has a sharp tip with a complete geometry that will help it increase the friction area during power generation and increase the power output efficiency of the friction generator. In addition, the prepared PDMS film has good stretchability and transparency.

In order to characterize the electrical energy output performance of the friction generator made above, a comparatively characterized device with different morphology PDMS films was used. When a linear motor motor is used to control the bending and release of the friction generator at a frequency (at a frequency of 0.33 Hz and a deformation of 0.13 %), the maximum output voltage and current signals of the device with quadrangular pyramid structure are as high as 18 V and 0.7 μ, respectively. A (current density of 0.13 μA / cm ² ) is comparable to piezoelectric generators based on piezoelectric materials and complex designs. Compared with flat-plate friction generators, the output efficiency of a friction generator with a regular pattern array is significantly increased, which can be attributed to two main factors: (1) The friction effect of a film with a micro-nano-convex structure is much higher than that of the equivalent A flat film of thickness. A uniform rough surface has a large contact area, which can generate more surface charge during the friction process and improve the frictional electrification efficiency. (2) The capacity of the film having the micro/nano-convex structure during the rubbing process is remarkably increased due to the presence of air voids and an increase in the effective dielectric constant. When the two polymer films are completely bonded, the reduction in air voids and the reduction in friction properties result in a significant decrease in power output capability. Therefore, a device based on a quadrangular pyramid or a cubic PDMS film has an almost 5-6 times higher power output than a device without a micro-nano-convex structure.

In this embodiment, characteristics such as flexibility, high power output, and transparency are uniformly integrated into a single friction generator. The application problem of the friction generator in some specific fields is solved, but the invention is not limited to being specially made transparent. Moreover, in the embodiment, the flexible flat structure can expand the application environment of the friction generator, collect and convert irregular kinetic energy, such as the movement of the muscle part of the human body and disordered wind energy, etc., but the invention is not limited to being specially made flexible. Flat structure.

Another embodiment is also a structure as shown in FIGS. 1a to 1b, except that the first polymer insulating layer is a rectangular (4.5 cm x 1.2 cm) polyimide film (thickness 125 μm, DuPont 500 Å, Kapton), one side surface is coated with an alloy metal film 1 (thickness lOOnm, Au) by a sputtering coating method, two layers form a first electrode; the other electrode is also rectangular (4.5cmx 1.2cm) polyimide film (thickness 125μηι, DuPont 500ΗΝ, Kapton) as the second polymer insulating layer 4, and an alloy metal film 1 is coated on one side thereof by a sputter coating method (thickness lOOnm, Au), the alloy film and Kapton jointly form a second electrode; the difference is that the second polymer polymer insulating layer 4 is pasted with the intermediate film 3, and the intermediate film 3 is a flexible polydecyl acrylate ( The thickness of the film is 50 μm, ΡΜΜΑ), and the intervening film has a regular pyramid-shaped micro-nano-convex structure. The alloy film of the first electrode and the alloy film of the second electrode serve as output electrodes for current and voltage, and are connected to an ammeter. The test result of this embodiment is that the maximum output voltage and current signals are 12V and 0.5 μA (current density of 0.07 μA/cm ² ), respectively.

The friction generator of the present invention satisfies the principle of linear superposition of basic circuit connections, that is, whether the forward or reverse connection is connected to the measuring device, the total output current can be enhanced (in the same direction) or reduced (opposite direction) in the manner of parallel devices. . Therefore, it is possible to utilize a method of parallelly connecting a plurality of friction generators in parallel, and it is possible to simultaneously assemble a multi-layer generator by using a thin panel structure of the friction generator, thereby increasing the output current. In addition, it is also possible to form a friction power generating unit by connecting a plurality of friction generators in series or in parallel to increase the output power per unit area.

This embodiment demonstrates an innovative and effective method of obtaining energy by friction when the friction power generating device is a friction generator. Friction generators rely on internal friction to generate electrical energy due to changes in electrical potential and the induced effects of metal plates on both sides. It is a single, efficient and low cost method.

After introducing the specific implementation of the friction power generator as a friction generator, the following describes the specific implementation of the friction sensor as a piezoelectric sensor. Since the frictional power generating device of the present invention can generate electricity by friction, when the friction generating device is a piezoelectric sensor, the piezoelectric sensor is a self-powered pressure sensor. Since the self-powered pressure sensor is basically the same as the structure and manufacturing method of the friction motor described above, the structure and manufacturing method of the self-powered pressure sensor will be described below with reference to Figs. 1a to 1b and Figs. 2a to 2f.

Figure la and Figure lb show a typical structure of a fully transparent self-powered pressure sensor based on a polymer. The self-powered pressure sensor acts like a sandwich structure consisting of two different polymer sheets, two polymer sheets stacked on each other with an intervening film 3 interposed therebetween. As shown in FIG. 1, polyethylene terephthalate (PET) is used as the first polymer insulating layer 2, and an indium tin oxide (ITO) conductive film 1 is plated on one surface thereof. A first electrode is formed by the two layers of the insulating layer 2 and the conductive film 1. Due to the main electrode in the self-powered pressure sensor The function is to induce pressure, and therefore, the first electrode is also referred to as a first sensing electrode. The other electrode, that is, the other sensing electrode, also uses polyethylene terephthalate (PET) as the second polymer insulating layer 4, and is plated with indium tin oxide (ITO) on one side thereof. The film 1 , the ITO conductive film and the PET jointly form a second electrode, which is also referred to as a second sensing electrode; the difference is that the second polymer polymer insulating layer 4 is pasted with the intervening film 3, and the intervening film 3 is polydimethylene. A siloxane (PDMS) film having a regular pyramid-shaped micro-nano-convex structure formed on the intermediate film. The ITO conductive film of the first sensing electrode and the ITO conductive film of the second sensing electrode serve as output electrodes of the sensing signal, and a measuring meter (not shown) is externally connected. As shown in FIG. 1b of the specification, when the self-powered pressure sensor is subjected to pressure or bending, the PDMS film and the PET film of the first sensing electrode frictionally induce a charge, and the induced charge forms an internal potential, and further induces respectively on the conductive film ITO. The charge is discharged, and the external circuit can be connected to output an induced signal.

The drawings 2a to 2f provide a method of fabricating the fully transparent self-powered pressure sensor shown in Figs. la and lb. The fabrication of the above fully transparent sensor is performed in the order of Figs. 2a to 2f. A patterned silicon template (shown in Figure 2a) is first created, and a 4-inch (100) crystal wafer is lithographically patterned on the surface. The patterned silicon wafer is anisotropically etched by a wet etching process, and a concave quadrangular pyramid array structure can be engraved, and the isotropic etching can be performed by a dry etching process to form a concave cube array structure. The engraved template was cleaned with acetone and isopropyl alcohol, and then all the templates were surface-silanized in an atmosphere of trimethylchlorosilane (Sigma Aldrich), and the silicon template was processed for later use. A PDMS film having a microstructured surface was prepared by first mixing a PDMS precursor and a curing agent (Sylgard 184, Tow Corning) in a mass ratio of 10:1. The mixture is then applied to the surface of the silicon template. After the vacuum degassing process, the excess mixture on the surface of the silicon wafer is removed by spin coating to form a thin layer.

PDMS liquid membrane. The entire template was cured in an environment of 85 degrees Celsius for 1 hour, after which a uniform layer of PDMS film with a specific microstructure array was able to be peeled off from the template. Then, the film is fixed on a clean polyethylene terephthalate (PET) insulating layer coated with an indium tin oxide (ITO) conductive film by a thin layer of uncured The PDMS layer acts as a bonding layer. After curing, the PDMS film is firmly attached to the insulating layer of PET. Then, another PET insulating layer coated with an ITO conductive film is overlaid on the PDMS layer to form a sandwich-like device. There are transparent conductive ITO electrodes on the top and bottom of the device. The two short side edges of the device are bonded with plain transparent tape to ensure that the PET layer and the PDMS layer have sufficient connections at the interface. Touch area. Then, two copper wires are respectively fixed on the upper and lower ITO electrodes with silver paste, and the entire flexible transparent self-powered pressure sensor is prepared. The effective size of the sensor is uniformly fixed at 4.5 cm x 1.2 cm, and the thickness of the entire device is approximately 460 μm.

Three PDMS pattern array fabrication processes are provided in the embodiments of the present invention, including stripe (shown in Figure 2c), cube (shown in Figure 2d), and quadrangular pyramid (shown in Figure 2e). The surface micrographs of the three nano-convex structures are shown in Figures 3a-3c, and the array unit size of each PDMS is limited to about 10 microns. A pattern array with smaller scale elements can also be prepared with dimensions as small as 5 microns and with the same high quality features. The insets in Figures 3a-3c represent 45° tilt high magnification images, each shown separately A 5 micron and 100 micron scale is available. High resolution SEM photographs show that all array elements are very uniform and regular, indicating that this is a very efficient method for preparing large scale uniform plastic microstructures. More importantly, each quadrangular pyramid unit has a sharp tip with a complete geometry that will help it increase the friction area during pressure sensing and increase the sensitivity of the pressure sensor. In addition, the prepared PDMS film has good stretchability and transparency.

Among the three different types of devices, the self-supply voltage sensor composed of a quadrangular pyramid structure PDMS film has the highest response sensitivity. In addition, the response of the pressure sensor was measured when a small feather fell (20 mg, contact pressure of about 0.4 Pa). As shown in Figure 4 of the specification, the sensor shows two opposite voltage signal peaks indicating the process of feather contact and disengagement, respectively. In the specific process, when the feather falls on the sensor, it has two processes: the initial contact with the sensor and the center of gravity completely falls on the sensor. The peak signal of the pressure sensor clearly shows these two different details during the feather drop. The above results show that the self-powered pressure sensor of the present invention can be used to measure subtle pressure changes in real life and its high sensitivity.

The pressure sensor of the present invention is a self-powered device based on self-generating output, eliminating the need for an external power source, making and using a more compact, and more sensitive to pressure sensing. Second, the response of the sensor of the present invention to pressure is a peak signal rather than a ground state curve. Therefore, its response speed is extremely fast, and there is no signal lag in the fast switching process. To illustrate this, the present invention measures the response of a self-powered pressure sensor when applying a different frequency of force as a time resolved response as shown in Figures 5a-5c of the specification. A linear motor motor is used to apply light pressures of different frequencies at frequencies of 1 Hz, 5 Hz and 10 Hz, respectively. The result shows that By increasing the application frequency to 10 Hz, the self-powered pressure sensor still has clear resolution, and the output voltage signal is not significantly reduced, which indicates that the self-powered pressure sensor of the present invention has a fast response characteristic and a good deterministic property.

In this embodiment, features such as flexibility, high electrical energy output, and transparency are collectively concentrated in a single self-powered pressure sensor. The application problem of the self-powered pressure sensor in some specific fields is solved, but the invention is not limited to the limitation of making transparency. Moreover, in this embodiment, the flexible flat structure can expand the application environment of the self-powered pressure sensor, such as the pressure measurement of the surface irregular object, and can be made into a portable sensor by random bending, but the invention is not limited to the special flexible flat plate. structure. Moreover, the micro/nano concave-convex structure in the embodiment of the present invention can increase the frictional contact area, thereby improving the frictional electrification efficiency and improving the sensitivity of the pressure sensor.

Another embodiment is also a structure as shown in FIG. 1a, except that the first polymer insulating layer adopts a rectangular (4.5 cm×1.2 cm) polyimide film (thickness 125 μm, DuPont 500 ΗΝ, Kapton). One side surface is plated with an alloy metal film 1 (thickness lOOnm, Au) by a sputtering coating method, two layers form a first sensing electrode; and the other sensing electrode is also rectangular (4.5 cm x 1.2 cm) polyimide An amine film (thickness 125 μm, DuPont 500, Kapton) is used as the second polymer insulating layer 4, and an alloy metal film 1 (thickness lOOnm, Au) is plated on one surface thereof by a sputter coating method. The alloy film and the Kapton jointly form a second sensing electrode; the difference is that the second polymer insulating layer 4 is pasted with the intermediate film 3, and the intervening film 3 is polydecyl acrylate (thickness 50 μηι, ΡΜΜΑ), on the intervening film. There is a regular quadrangular pyramid type micro-nano concave-convex structure. The alloy film of the first sensing electrode and the alloy film of the second sensing electrode are connected to the measuring meter as output electrodes of current and voltage.

Therefore, the present invention provides a self-powered pressure sensor that is cleverly fabricated using the principle of triboelectric charging, which has the characteristics of high sensitivity, compactness, low cost, good stability, and fast response.

The pressure sensor provided by the present invention utilizes a charging pump effect of a triboelectric potential, which is a pressure sensor that is skillfully fabricated using the principle of triboelectric charging. Since the pressure sensor is based on the principle of frictional power generation, it can self-power the drive by eliminating the external power supply during use. It is a self-generating drive device with high sensitivity, good stability and fast response. Moreover, based on the two-layer structure, the micro-nano-convex structure on the surface of the intervening film makes the friction-induced charge generation easier, thereby further improving the sensitivity of the pressure sensor. The entire device manufacturing process does not require expensive raw materials Materials and advanced manufacturing equipment, which will benefit its large-scale industrial production and practical applications. Finally, the device is based on a flexible polymer sheet that is easy to process, has a long service life, and is easily integrated with other processing techniques. The present invention is not limited to the above-described embodiments, and any variations, modifications, and alterations that can be made by those skilled in the art without departing from the scope of the present invention fall within the scope of the present invention.

INDUSTRIAL APPLICABILITY The friction power generating device provided by the present invention generates electric energy by relying on internal friction to change electric potential and induced effects of metal plates on both sides, and is a novel power generating device based on novel principles and methods, which is likely to It opens up new research fields for the research and application of organic electronic devices and flexible electronics. Secondly, the entire device manufacturing process does not require expensive raw materials and advanced manufacturing equipment, which will facilitate its large-scale industrial production and practical application. In addition, it is based on a flexible polymer sheet, easy to process, has a long service life, and is easily integrated with other processing processes. The friction power generator shows its good application prospects, and can obtain energy from many irregular activities such as human activities, tire rotation, wave fluctuations, mechanical vibration, etc., providing self-powered and self-driven for personal electronic products, environmental monitoring, medical science, etc. Equipment, with great commercial and practical potential.

Claims

Claim

A friction power generating device comprising a first electrode, a second electrode and an intermediate film, the first electrode comprising a first polymer insulating layer provided with a conductive film on one side surface;

The second electrode includes a second polymer insulating layer provided with a conductive film on one side surface;

The intervening film is a third polymer insulating layer, and one side surface thereof is provided with a micro-nano concave-convex structure;

The surface of the intervening film which is not provided with the micro/nano concave-convex structure is fixed on the side surface of the second polymer insulating layer which is not provided with the conductive film, and is integrated with the second electrode;

On the second electrode, the surface of the intervening film micro/nano-convex structure is directly opposite to the surface of the first electrode where the conductive film is not disposed;

The conductive film on the first polymer insulating layer and the conductive film on the second polymer insulating layer are output electrodes of the friction power generating device.

The friction power generating device according to claim 1, wherein materials of the first polymer insulating layer, the second polymer insulating layer, and the third polymer insulating layer are different .

The friction power generator according to claim 1, wherein a material of the first polymer insulating layer is the same as a material of the second polymer insulating layer, and the third polymer The material of the polymer insulation layer is different.

The friction power generator according to claim 1, wherein a material of the first polymer electrolyte insulating layer is different from a material of the third polymer polymer insulating layer.

The friction power generating device according to claim 4, wherein the first polymer insulating layer, the second polymer insulating layer, and the third polymer insulating layer are transparent material.

The friction power generating device according to claim 5, wherein the first polymer insulating layer, the second polymer insulating layer, and the third polymer insulating layer The materials are each selected from the group consisting of transparent high molecular weight polyethylene terephthalate, polydimethylsiloxane, polystyrene, polymethyl methacrylate, polycarbonate, and liquid crystal polymer. One.

The friction power generating device according to claim 6, wherein the conductive film is one of an indium tin oxide, a graphene electrode, and a silver nanowire film.

The friction power generating apparatus according to claim 1, wherein the first electrode, the second electrode, and the intermediate film are flexible flat plates, which cause frictional electrification of the electrodes by any bending or deformation.

The friction power generating apparatus according to claim 1, wherein the micro/nano concave-convex structure on the surface of the intermediate film is a nano-scale to micro-scale uneven structure.

The friction power generating device according to claim 9, wherein the micro/nano concave-convex structure on the surface of the intermediate film is a regular concave-convex structure, and the concave-convex structure is striped, cubic, quadrangular, and cylindrical. One kind.

The friction power generating device according to claim 4, wherein the first polymer insulating layer, the second polymer insulating layer, and the third polymer insulating layer are respectively polyimide films , aniline formaldehyde resin film, polyoxymethylene film, ethyl cellulose film, polyamide film, melamine formaldehyde film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, polyadipate B Glycol ester film, diallyl phthalate film, fiber (recycled) sponge film, polyurethane elastomer film, styrene propylene copolymer film, styrene butadiene copolymer film, rayon film, polymethyl Base film, methacrylate film, polyvinyl alcohol film, polyvinyl alcohol film, polyester film, polyisobutylene film, polyurethane flexible sponge film, polyethylene terephthalate film, polyvinyl butyral film , Formaldehyde phenol film, neoprene film, butadiene propylene copolymer film, natural rubber film, polyacrylonitrile film, One of an acrylonitrile vinyl chloride film and a polyvinyl propylene glycol carbonate film.

The friction power generating apparatus according to claim 1, wherein the first electrode and the outer edge of the second electrode are connected by a tape.

The friction power generating device according to claim 1, wherein the first polymer insulating layer and the conductive film on the second polymer insulating layer are plated by vacuum sputtering or evaporation. On the surface of the insulation layer.

The friction power generating device according to claim 1, wherein the conductive film is a metal film, wherein the metal film is made of gold, silver, platinum, aluminum, nickel, copper, titanium, iron, selenium and alloys thereof. One of them.

The friction power generating device according to any one of claims 1 to 14, wherein the friction power generating device is a friction power generator.

16. The friction power generating apparatus according to claim 15, wherein the number of the friction generators is plural, and the plurality of friction generators are connected in parallel or in series to form a friction generator set.

The friction power generating device according to any one of claims 1 to 14, wherein the friction power generating device is a self-powered pressure sensor, wherein the conductive film on the first polymer insulating layer and the second polymer are polymerized The conductive film on the insulating layer of the material is an output electrode of the sensing signal of the self-powered pressure sensor.