TWI245303B - Manufacturing method and structure of multi-directional field emission display and electron emission source - Google Patents

Manufacturing method and structure of multi-directional field emission display and electron emission source Download PDF

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TWI245303B
TWI245303B TW93115243A TW93115243A TWI245303B TW I245303 B TWI245303 B TW I245303B TW 93115243 A TW93115243 A TW 93115243A TW 93115243 A TW93115243 A TW 93115243A TW I245303 B TWI245303 B TW I245303B
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Taiwan
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conductive layer
directional
conductive
substrate
patent application
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TW93115243A
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Chinese (zh)
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TW200539216A (en
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De-Feng Jan
Jr-Che Guo
Yau-Tzung Chen
Jen-Tzai Yang
Jr-Hau Wu
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Teco Nanotech Co Ltd
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Abstract

A manufacturing method and structure of multi-directional field emission display and electron emission source, which is to provide a multifaceted or cylindrical substrate, onto the surface layer of which conductive material is used to form one 1st conductive layer by utilizing sputtering, spray-coating or evaporation; onto the surface of the 1st conductive layer is formed one 2nd conductive layer, which uses carbon nanotube as raw material, through practice of electrophoresis by spray-coating or immersion into the carbon nanotube, to make the 2nd conductive layer be formed onto the surface of conductive layers; after the 2nd conductive layer is formed onto the 1st conductive layer, the 2nd conductive layer is fixed onto the 1st conductive layer by utilizing the vacuum sintering technique; the multi-directional cathode structure 1 is packaged in the interior of anode structure, in which vacuum sucking is utilized to make the multi-directional cathode structure and the anode structure package together, and after exertion of the control voltage, field emission display with stereo imaging is formed.

Description

1245303 五、發明說明(1) 【發明所屬之技術領域】 本發明係有關_種多向性 發射源製造方法及复纟士構, 4 t顯示器及多向性電子 源以產生呈有立^ i、、、、 尤私—種具有多向性電子發射 你以產玍/、有立體顯像之立體 【先前技術】 m員不裔。 隨著半導體科技技術不斷增 朝著輕、薄、短、小之目桿來卜,4夕兒裔產口 口都疋 It使P I ^ 爪叹叶,讓這些電器產品不但 Ι:Γί=攜帶外出使用外,或擺設於居家中不會 ίίί 2 使用空間,或者架設於公共場所時,不 僅不會占去過多空問,遠么 ^ ^ σσ , τ 讓靶工者也易於架設。例如,現今 平面顯不态,如LCD、ΡΠΡ、ΓΠΐ?η> θ 示器内部電子發射源::像=顯示器以改進過去的顯 ^ &旦> 了原以映像官發射,因此導致顯示器體積 里不工在搬運、擺設或架設時,皆會占去過多空 間及不=架設等缺失,但是這些LCD、PDp、〇led之顯示器 ^板设置技術受限於製程及結構限制,僅能設置一單方向 顯示。 m 一 ^ ,業者見於上述缺失,也研製一種可雙面顯示之 ^ —反,如第一圖所示,此雙面顯示器具有一陰極結構 結構4、4’ ’該陰極結構3於單一基板3 陽極結‘ ί有:子發射源3 2、3 2,。當陰極結構3與 電子菸似、4間施加控制電壓5後,該陰極結構3之 4、4,、源3 2、3 2所產生之電子束將射向陽極結構 像效果。與陽極結構4、4,產生撞擊而發光,以顯示影1245303 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a method of manufacturing a multi-directional emission source and a complex structure, a 4 t display and a multi-directional electron source to generate a stand-by ^ i ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, presence-/-,-three-dimensional stereoscopic [previous technique] m-members. As semiconductor technology continues to increase in lightness, thinness, shortness, and smallness, the birthplaces of children of all descent are 疋 It makes PI ^ claws and leaves, so that these electrical products not only Ι: Γί = carry out It will not be used outside, or placed in the home, and will not be used in the home. 2 It will not only take up too much space when it is set up in a public place. Is it far away? ^ Σσ, τ makes it easy for target workers to set up. For example, today ’s flat display states, such as LCD, PΠP, ΓΠΐ? Η &θ; internal electron emission source of the display :: image = display to improve the past display ^ & In the volume, it will take up too much space when it is transported, placed or set up, but it is not enough to set up. However, these LCD, PDp, and OLED display panel installation technologies are limited by process and structural restrictions. One direction display. m ^, the industry sees the above-mentioned shortcomings, and has also developed a double-sided display ^-In contrast, as shown in the first figure, this double-sided display has a cathode structure structure 4, 4 '' The cathode structure 3 is on a single substrate 3 Anode junctions include: sub-emission sources 3 2, 3, 2. When a control voltage 5 is applied between the cathode structure 3 and the electronic cigarette, the electron beams generated by the cathode structure 3, 4, 4, and the source 3 2, 3 2 will be directed toward the anode structure. The anode structure 4 and 4 emit light when they collide with each other to display the shadow.

1245303 五、發明說明(2) 雖然,此種雙面顯示器能夠雙面顯示影像,但是電子 束仍呈現單向性發射,無法讓電子發射源所發射之電子束 呈現多向性發射’以產生平面顯示器之立體化顯像效果。 【發明内容】 本發明之主要目&,4 了改進傳統平面顯# 發射源僅能單方向發射電子束之缺车、吐々 發明將電子發射源製作成可以多i缺失存在,本 菸执雷工,s嘈正品萌-⑽立 發射電子束之多向性 毛叹電子源,讓千面顯不益產生立體化影像效 為達上述之目的,本發明之吝&从以々 向性電子發射源製造方法及其結盖j π ^射顯示器及多 體或圓柱體之玻璃基材,於美^ ,系以提供一多面柱狀 鍍技術將導電材料之銀膠成形於、,利用濺鍍、喷塗或蒸 導電層,於前述之第一導恭土材表面,以形成一第一 ,此第二導電層以奈米上形成有-第二導電層 米碳管中電泳實施,讓第二蓬♦饵,透過噴塗或浸泡於奈 第二導電層成形於第一導=層成形於導電層表面,在 :讓第二導電層固著於第雷:後,利用真空燒結技術 二:性發射電子束之第二導層表面上’即以完成具有 結構内部,再 :方:多向性陰極結構封裝 構封裳在一起,在施讓多向性陰極結構與, J ”發射顯示器。 工制電壓後,以形成立體顯 t貫施方式】 明如^有關本發明之技術内容及$ 月如下: 坪細說明,現配合圖式說 第7頁 1245303 五、發明說明(3) 請參閱 構及基板結 示意圖。如 性電子發射 之電子發射 向性陰極源 上述所 供一多面柱 「第二 構上形 圖所示 源'製造 源結構 結構之 之多向 狀體之 基材1 N三、 成有導 :本發 方法及 ’製作 多向性 性陰極 玻璃基 1表層 於上述 濺鍍、喷塗或蒸鍍技術將 表面,以形成一第一導電 待,上述之第一導電 層1 2表面上形成有一第 二導電層1 3以奈米碳管 碳管中電泳實施,讓第二 面上; 四圖所示」 電層結構盥多明之基板結 明之多向性二/生陰極結構完成 其C發射顯示器及多向 形成具有多向顯示器 場發射顯示器1射電子束之多 m在製作時’首要步驟是提 衬1 1 ; =成—第一導電層1 2 ,是利用 ^電材料之銀膠成形於基材1 1 層1 2 ; 層1 2製作完成後,於第一導電 二導電層(陰極層)1 3 ,此第 為材料,透過喷塗或浸泡於奈米 導電層1 3成形於導電層1 2表1245303 V. Description of the invention (2) Although this type of double-sided display can display images on both sides, the electron beam still exhibits unidirectional emission, and the electron beam emitted by the electron emission source cannot exhibit multi-directional emission 'to produce a plane The stereoscopic display effect of the display. [Summary of the invention] The main purpose of the present invention is to improve the traditional flat display. The emission source can only emit electron beams in one direction. The invention of the invention makes the electron emission source to be able to be absent. Lei Gong, s noisy authentic Meng-Li multi-directional hair electron source that emits electron beams, so that thousands of faces are unfavorable to produce a three-dimensional image effect. In order to achieve the above-mentioned purpose, the invention & Manufacturing method of electron emission source and its cover j π ^ radiation display and glass body of multi-body or cylinder, Yu Mei ^, is to provide a multi-sided columnar plating technology to form silver glue of conductive material, using Sputtering, spraying or vaporizing a conductive layer on the surface of the aforementioned first conductive earth material to form a first, the second conductive layer is formed by electrophoresis in a carbon tube formed with nano-second conductive layer, The second bait is sprayed or immersed in Nai. The second conductive layer is formed on the surface of the first conductive layer. After the second conductive layer is fixed on the first layer, the vacuum sintering technique is used. : On the surface of the second guide layer of the sexually-emitting electron beam There is structure inside, and then: Fang: Multi-directional cathode structure is encapsulated and sealed together, and the multi-directional cathode structure is given, and the “J” emission display. After the system voltage is applied, it will be implemented in three-dimensional display. For example, the technical content and the month of the present invention are as follows: Detailed description, please refer to the diagram on page 7 1245303 V. Description of the invention (3) Please refer to the schematic diagram of the structure and the substrate junction. Cathode source A polyhedral column provided above "the source shown in the second figure of the top configuration" manufactures the base material of the structure of the multidirectional object 1 N III. It has a guide: the method of the present invention and the method of "making multidirectional The surface layer of the glass cathode substrate 1 is formed on the surface of the above-mentioned sputtering, spraying or evaporation technology to form a first conductive layer. A second conductive layer 13 is formed on the surface of the first conductive layer 12 described above. The electrophoretic implementation in the tube carbon tube allows the second surface; as shown in the four figures, the electric layer structure, the substrate, and the multidirectional bipolar / green cathode structure complete its C emission display and form a multidirectional display field emission. Display 1 radio When the beam is made, the first step is to make the lining 1 1; = to form the first conductive layer 1 2, which is formed on the substrate 1 1 layer 1 2 using silver glue of electrical materials; after the layer 12 is completed, In the first conductive two conductive layer (cathode layer) 1 3, this first material is sprayed or immersed in the nano conductive layer 1 3 and is formed in the conductive layer 1 2

第8頁 五、發明說明(4) 制電塵時,該第二導電層13所產生之電子束 陽極ό士馗i發射至陽極結構(圖中未示)i,讓電子束與 防極結構產生撞擊發光。 性陰:i:::五ΐ所示」,係'本發明之陽極結構與多向 結槿制意圖。如圖所示··在上述之多向性陰極 内部衣成後,將多向性陰極結構1封裝於陽極結構2 形狀之=Ϊ極結構2提供一與多向性陰極結構1外觀相同 成—宽$基材2 1 ,該基材ί 1内表面利用銀膠材料形 :上:電層2 2,再利用螢光粉(可為卜㈠三原 2 3 之第一導電層2 2表面上形成有-第二導電層 2封梦,1 :抽真空方式讓多向性陰極結構1與陽極結構 于凌在一起,以形成立體場發射顯示哭。 電壓後,致使多向性; 陽極結構2之第- 束射向陽極結構2 ’在 具有立㈣電子束撞擊後發光,以產生 體"、、員像之立肢%發射顯示器。 進一步,在於上述之玻璃其姓 體之形狀外,還可以為圓柱::材11除了可為多面柱狀 更進一步,在於上述之所楹 色時:以產生具有彩色立體顯像之場發;;、:、Β三原 光粉為單一顏色時,以產生二罢纟、、、不态。若是螢 上述僅為本發明之較佳明效果之燈管。 發明實施範圍。即凡依本發明^ =已’亚非用來限定本 化與修倚,皆為本發明專利範範圍所做的均等變 1245303 圖式簡單說明 【圖式之簡单說明】 第一圖,係傳統雙面場發射顯示器示意圖。 第二圖,係本發明之基板結構示意圖。 第三圖,係本發明之基板結構上形成有導電層結構示意圖 〇 第四圖,係本發明之多向性陰極結構完成示意圖。 第五圖,係本發明之陽極結構與多向性陰極結構封裝示意 圖。 <習知> 陰極結構 3 陽極結構 4、 4’ 基板 3 1 電子發射源 3 2、3 2 ’ 控制電壓 5 <本發明> 多向性陰極結構 1 基材 1 1 第一導電層 1 2 第二導電層 1 3 陽極結構 2 基材 2 1 第一導電層 2 2 第二導電層 2 3 iPage 8 V. Description of the invention (4) When making electric dust, the electron beam anode generated by the second conductive layer 13 is emitted to the anode structure (not shown in the figure) i, so that the electron beam and the electrode prevention structure Generate impact luminescence. Sexual yin: i ::: as shown in the five chapters "is the anode structure of the present invention and the multi-directional hibiscus intention. As shown in the figure .... After the interior of the above-mentioned multi-directional cathode is formed, the multi-directional cathode structure 1 is encapsulated in the anode structure 2. The shape of the anode structure 2 provides the same appearance as the multi-directional cathode structure 1— The width of the substrate 2 1 is 1. The inner surface of the substrate 1 is made of silver glue material. The upper surface is an electrical layer 2 2 and then a fluorescent powder (which can be formed on the surface of the first conductive layer 2 2 of the Puyuan Sanyuan 2 3). Yes-the second conductive layer 2 seals the dream, 1: the vacuum is applied to make the polytropic cathode structure 1 and the anode structure together to form a three-dimensional field emission display. After the voltage, it causes multidirectionality; the anode structure 2 The first beam is directed toward the anode structure 2 'after the impact with the Richtek electron beam to emit light to generate a body ", a member of the erect limb% emission display. Further, in addition to the shape of the above-mentioned glass and its surname, it is also possible to As a cylinder: In addition to the material 11 can be a multi-faceted columnar, in the above-mentioned color: to produce a field with a color stereoscopic display ;;,:, B three primary light powder to produce two Stop ,,, not. If the above is only a better explanation of the present invention The tube of fruit. The scope of the invention. That is, wherever in accordance with the present invention ^ = has been used to limit the localization and repair, all are equal changes for the scope of the patent scope of the invention 1245303 Brief description] The first diagram is a schematic diagram of a conventional double-sided field emission display. The second diagram is a schematic diagram of a substrate structure of the present invention. The third diagram is a schematic diagram of a conductive layer structure formed on the substrate structure of the present invention. The fourth diagram is Figure 5 shows the completed schematic diagram of the multi-directional cathode structure of the present invention. Figure 5 shows the schematic diagram of the anode structure and multi-directional cathode structure packaging of the present invention. ≪ Knowledge > Cathode Structure 3 Anode Structure 4, 4 'Substrate 3 1 Electron emission source 3 2, 3 2 'Control voltage 5 < Invention > Polytropic cathode structure 1 Substrate 1 1 First conductive layer 1 2 Second conductive layer 1 3 Anode structure 2 Substrate 2 1 First conductive Layer 2 2 second conductive layer 2 3 i

第10頁Page 10

Claims (1)

1245303 、申凊專利範圍 4 在施加 發射。 、一種多向 多面柱狀體 成形於上述 成形於上述 控制電壓時 、如申請專 其中,該基 、如申請專 其中,該基 、如申請專 其中,該基 、一種多向 圓柱狀體之 成形於上述 成形於上述 控制電壓時 、一種多向 )、提供一 )、於上述 於基材表面 性電子發射源結構,包括有: 之基材; 基材表面形成一第一導電層; 第一導電層表面之多向性第二導電層, ’該第二導電層產生之電子束呈多向性 利範圍第1項所述之多向性電子發射源 材為玻璃材質所製成。 利範圍第1項所述之多向性電子發射源 材表面所形成之第一導電層係為銀膠材 利範圍第1項所述之多向性電子發射源 材表面所形成之第二導電層係為奈米碳 性電子發射源結構,包括有·· 基材; 基材表面形成一第一導電層; 第一導電層表面之多向性第二導電層, ’該第二導電層產生之電子束呈多向性 ('生電子發射源製作方法,包括有: 多面柱狀體之基材; 基材表層透過濺鍍枯 ’以形成-第—導電:將卜電材料之藏 1245303 六、申請專利範圍 C)、待,上述之第一導電層製作完成後,於第一導 電層表面上透過喷塗,讓第二導電層成形於導電層表面 上; d)、待,上述之第二導電層成形於第一導電層表 面,再利用真空燒結技術,讓第二導電層固著於第一導電 層表面上,即以完成具有多向性發射電子束之第二導電 〇 7、 如申請專利範圍第6項所述之多向性電子發射源 結構,其中,該基材表面可透過喷塗或蒸鍍之任一種技術 將導電材料成形於基材表面上形成第一導電層。 8、 如申請專利範圍第6項所述之多向性電子發射源 結構’其中’該導電材料可為銀谬。 9、 如申請專利範圍第6項所述之多向性電子發射源 結構,其中,該第二導電層以奈米碳管為材料。 1 0、如申請專利範圍第6項所述之多向性電子發射 源結構,其中,該第一導電層表面上還可透過浸泡於奈米 碳管中電泳實施,讓第二導電層成形於導電層表面上。 1 1 一種多向性電子發射源製作方法,包括有: a )、提供一圓柱狀體之基材; b )、於上述基材表層透過濺鍍技術將導電材料之銀 膠成形於基材表面,以形成一第一導電層; c)、待,上述之第一導電層製作完成後,於第一導 電層表面上透過喷塗,讓第二導電層成形於導電層表面上1245303, application scope of patent application 4 Launching. 1. A multi-directional multi-faceted cylindrical body is formed when the above-mentioned forming is performed at the above-mentioned control voltage, such as the application of the base, the application of the base, the application of the base, the application of the base, the formation of a multi-directional cylindrical body When the above is formed at the control voltage, a multi-directional), providing one), the above-mentioned surface electron emission source structure on the substrate includes: a substrate; a first conductive layer is formed on the surface of the substrate; the first conductive The second-direction conductive layer on the surface of the layer is a glass material. The first conductive layer formed on the surface of the multi-directional electron emission source material described in Item 1 is the second conductive layer formed on the surface of the multi-directional electron emission source material described in Item 1 of Silver Range. The layer system is a nano-carbon electron emission source structure, and includes a base material; a first conductive layer is formed on the surface of the base material; a multi-directional second conductive layer on the surface of the first conductive layer; The electron beam is multi-directional ('The production method of the raw electron emission source includes: a substrate of a multi-faceted columnar body; the surface layer of the substrate is dried by sputtering') to form-the first-conductive: the storage of electrical materials 1245303 six (Applicable patent scope C). After the above first conductive layer is manufactured, the second conductive layer is formed on the surface of the conductive layer by spraying on the surface of the first conductive layer; d). The two conductive layers are formed on the surface of the first conductive layer, and then the vacuum sintering technology is used to fix the second conductive layer on the surface of the first conductive layer, so as to complete the second conductive layer having a multi-directionally emitting electron beam. Patent Application Scope No. 6 Electron emission source as much anisotropic structure, wherein the surface of the substrate may be any of the techniques through spraying or vapor deposition of a conductive material forming a first conductive layer formed on the substrate surface. 8. The structure of the polytropic electron emission source described in item 6 of the scope of the patent application, wherein the conductive material may be silver. 9. The multi-directional electron emission source structure according to item 6 of the scope of the patent application, wherein the second conductive layer is made of a carbon nanotube. 10. The multi-directional electron emission source structure described in item 6 of the scope of the patent application, wherein the surface of the first conductive layer can also be implemented by electrophoresis by immersion in a carbon nanotube, so that the second conductive layer is formed on On the surface of the conductive layer. 1 1 A method for manufacturing a multi-directional electron emission source, including: a) a substrate provided with a cylindrical body; b) forming a silver paste of a conductive material on the surface of the substrate through sputtering technology on the surface of the substrate To form a first conductive layer; c) After the first conductive layer is manufactured, spray coating on the surface of the first conductive layer to form the second conductive layer on the surface of the conductive layer. 第12頁 Ϊ245303 六 申請專利範 圍 d 面,再μ 待,上述之第二導電層成形於第 ^ ^ 層4:用真空燒結技術第二導電層固i:第電層 層。面上’即以完成具有多向性發射 =弟—導電 、 米之弟二導電 1 2 、一種多向性場發射顯示哭, 該〜2向性陰極結構,其上具有:多:f有: 上二:表面形成一第一導電I 面柱狀體之基材, 乂成,多向性第二導電層;、'义弟一導電層表面之 基材内:極結構,提供-包覆多向性黔柘级 -導電利用導電材料形成-第-i,;構之基材’該 多向祕二表面上形成有—第二導電声,電層,於前述之第 射顯示;極結構與陽極結構封震在:起利::真空方式讓 〇〇 x形成立體場發 顯-的3 、如申請專利範圍第1 ? XS 、下^ ’纟中,該陰極結構之基材為:述之多向性場發射 顯示匕:申請專利範圍第二::材質所製成。 μ ,、中,該陰極結構之基材夺& <之多向性場發射 層係^銀膠材質。 面所形成之第一導電 顯示器 碳管。 、如申請專利範圍第丄2 其中,該基材表面所形成之#述之多向性場發射 如申請專利範圍第丄2 ,其中,該陽極結構之基、述之多向性場發 7、如申請專利範圍第才f破螭材質所製成。 2項所述之多向性場發 乐二導電層係為奈米 顯示器 第13頁 1245303 六、申請專利範圍 顯示器,其中,該陽極結構之基材表面所形成之第一導電 層係為銀膠材質。 1 8 、如申請專利範圍第1 2項所述之多向性場發射 顯示器,其中,、該陽極結構之第二導電層可為螢光粉材 料。 1 9 、如申請專利範圍第1 8項所述之多向性場發射 顯示器,其中,該螢光粉可為R、G、B三原色所構成。 2 0、如申請專利範圍第1 8項所述之多向性場發射 顯示器,其中,該螢光粉可為單一顏色。Page 12 Ϊ245303 Six patent application range d plane, and then wait until the second conductive layer is formed on the ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ 2 ^ v2v2vvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvvv when the vacuum conductive sintering technology is applied to the second vulnerabilities On the surface, it is completed with multi-directional emission = brother-conductive, Mi's second conductive 1 2, a kind of multi-directional field emission display cry, the ~ 2-directional cathode structure, which has: more: f has: Upper two: the substrate on the surface of which a first conductive I-plane columnar body is formed, formed into a multi-directional second conductive layer; inside the substrate on the surface of the conductive layer of Yiyi: polar structure, providing-covering multiple Anisotropic Guizhou-conductivity is formed using conductive materials-the -i ,; the structure of the substrate 'formed on the surface of the multi-directional secret-the second conductive acoustic, electrical layer, shown in the aforementioned first shot; polar structure and The sealing of the anode structure is as follows: the advantage: the vacuum method allows 〇x to form a three-dimensional field to show -3, as in the scope of the patent application No. 1? XS, below ^ 纟, the substrate of the cathode structure is: Multidirectional Field Emission Display Dagger: Patent Application Scope Second: Made of Material. The substrate of the cathode structure captures & < a multi-directional field emission layer made of ^ silver glue. Surface of the first conductive display carbon tube. For example, in the scope of patent application No. 丄 2, where the polycrystalline field emission described in ## formed on the surface of the substrate is in the scope of patent application No. 丄 2, where the base of the anode structure and the multidirectional field emission described in 7, Such as the scope of the patent application is only made of broken materials. The two-dimensional conductive layer described in item 2 is a nanometer display. Page 12 1245303 6. Application for a patent range display, wherein the first conductive layer formed on the surface of the substrate of the anode structure is silver glue. Material. 18. The polytropic field emission display as described in item 12 of the scope of patent application, wherein the second conductive layer of the anode structure may be a phosphor material. 19. The multi-directional field emission display as described in item 18 of the scope of patent application, wherein the phosphor can be composed of three primary colors: R, G, and B. 20. The multi-directional field emission display as described in item 18 of the scope of patent application, wherein the phosphor can be a single color. 第14頁Page 14
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8048256B2 (en) 2007-02-09 2011-11-01 Tsinghua University Carbon nanotube film structure and method for fabricating the same
US8734996B2 (en) 2007-06-01 2014-05-27 Tsinghua University Anode of lithium battery and method for fabricating the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8048256B2 (en) 2007-02-09 2011-11-01 Tsinghua University Carbon nanotube film structure and method for fabricating the same
US8734996B2 (en) 2007-06-01 2014-05-27 Tsinghua University Anode of lithium battery and method for fabricating the same

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