200523975 玖、發明說明： 【發明所屬之技術領域】 本發明是有關於一種場發射電極，特別是指一種以奈 米碳管作為發射源的場發射電極及其製造方法。 【先前技術】 應用於場發射電極的各類材料，例如金屬尖錐與鑽石 薄膜等，都需要很高的臨界電場（thresh〇ld fieM，在電流宓 度Je=10 mA/cm2所需之電場），才能夠有所表現，而有相當 多的文獻證實，當奈米碳管應用於場發射電極時，有著更 為優異的表現，顯示奈米碳管是很好的場發射電極材料。 目前，應用奈米碳管為電子發射源的場發射電極，其 製作的步驟大多是在基板上直接成長奈米碳管，再加上適 度的το件設計而製成電子發射源，其方法是置放觸媒於基 板上直接成長奈米碳纖維或奈米碳管作為電子發射源；進 步的改進則疋將奈米碳管做成陣列式，以增進奈米碳管 發射電子的性能。 在美國卷明專利第6436221 B1發明專利案，以奈米碳 吕、有機聯結劑、樹脂、銀粉混合作成一奈米碳管膠，將 之塗佈在以網印法所製得的條狀電極上，作為電子發射源 :但實驗發現，以此法所得的裝置必須在超過4·5 v_的 電場下，才可以得1GmA/em2的電流錢。又如美國第 6146230號發明專利案，則揭示以p〇iy〇xyethyiene n〇nyi phenyl ether的仿生物或為分散劑，石夕 烷的化合物或膠怨的二氧化矽為連結劑，混之以石墨粉、 20 200523975 2鑽石碳、奈米碳管、韻維粉、氮㈣、或氮化铭做成 -子發射源材料，但此發明專利並無相關實驗數據證明此 技術成果。 大致來祝，上述各發明專利的確有可能可以製作出應 5肖奈米碳管為電子發射源的場發射電極，但其缺點均在於 製Μ雜、成本較高；而如美國第614623〇號發明專利案 隹提出車乂為簡易、製作成本較低的製程技術，但卻沒有 相關實驗數據證實，或其所製成的場發射電極所需之臨界 電場較高等缺點。 口此開發出製程簡單、生產成本低的場發射電極及 =目關製私，並使完成的場發射電極具有優異的工作表現， 疋目耵學界、業界所努力克服的難題之一。 【發明内容】 ^因此，本發明之目的，是在提供一種簡易、低成本的 製k方法以衣造出以奈米碳管為電子發射源的場發射電 才虽〇 於疋本發明一種場發射奈米碳管電極的製造方法， 包含以下步驟。 (a)以低溫共燒陶瓷製程製作一具有積集化内連接線 20 路之基板。 (b )遥取一奈米碳管漿料以網版印刷方式在該基板上 形成至少一發射源。 (c)熱處理該步驟（b)之產物。 (d )燒結經過該步驟（c )之產物。 200523975 此外，以上述方法所製成之本發明—種場發射奈米碳 :電極’包含-積集化陶究基板，及一形成於該積集化陶 兗基板上的發射源。 該積集化陶瓷基板以低溫共燒陶瓷製程製作。 5亥發射源是以' ^包含一本半石卢^:士 A 、·χ· » a不木石反材及一添加有奈米銀粉 之銀膠的奈米碳管漿料以網版印刷方式形呈一環形，當施 加一電壓時可發射複數電子。 田 本發明之功效在於以低成本且簡易的網印法，製造低 臨界電場強度的場發射奈米碳管電極。 ίο 15 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之一較佳實施例的詳細說明中，將可清 楚的明白。 Θ 參閱圖1，本發明一種場發射奈米碳管電極的製造方法 I較佳實施例’ Μ以製造如目2所示之場發射奈米碳 管電極2，而可應用於例如場發射顯示器、發光元件上。 同時參閱圖2、圖3，該場發射奈米碳管電極2包含一 陶竞基板、一形成於該陶兗基板21上的電極單元24, 及一形成於該陶瓷基板21上的發射源23。 該陶瓷基板21是一積集化陶瓷基板，包含至少二具有 複數可作為電性連結用之孔洞211，及—以預定態.樣形成在 二陶莞薄帶2U間及複數孔洞211中的内連接線路213。内 連接線路亦可以採用導電材料形成導電層取代。 該電極單元24以導電材料例如銀膠形成，電性連接内 20 200523975 連接線路213 ’進而可將電麼施加於該發射源^。 5 10 15 歸射源23是選用—包含—奈米储及—添 銀粉之銀膠的奈米碳管装料，以網版印刷方式形成 介於，m〜侧㈣之間的圓環狀，當施加—電 = 單元24時，該奈米碳材中的每—奈米碳管 ^ 發射電子。 々知射子 在此，僅先概述場發射奈米碳管電極2的巨觀姓 餘相關微觀結構以及其他詳細說明，將配合以 關實驗結果一併詳述。 法/、相 參閱圖卜上述場發射奈米碳管電極2是先以步驟H ，製造-包含有複數奈米碳管之奈米碳管漿料。在本例中 ’是先選用例如二甲苯、環己稀、甲苯、$，或正己烧等 含碳元素之碳源前_，混合二茂鐵㈤⑽咖）為催化 劑以及賽吩（Thiophene)為促進劑，經由化學氣相沉積過 程’製得直徑範圍介於2G〜15Gnm之多壁奈米碳管作為奈米 碳材；再以市售包含粒徑介於〇15〜之間銀粉的銀膠 (本發明是使用MEP_Ag_PTG_5575 )，添加粒徑界於 30〜150nm之間的奈米銀粉，且奈米銀粉的重量百分比佔銀 膠内銀含量的30~100wt% ’均勻混合成一混合物；最後以 示米炭材的重昼百分比為丨〜丨5wt% ,換合相對重量百分比 介於99〜85wt%混有奈米銀粉之銀膠的混合物，以及添加比 例界於0.8〜1.8 mi/g的Triton χ_1〇〇作為介面活性劑，混合 製成奈米裝料。 备然，奈米碳材不必一定要自行製作，只需選用直徑 20 200523975 範圍介於20〜l5Gnm之多壁奈米石炭管，或是直徑範圍介於 m的示米石反纖維’均可作為本發明所須之奈米碳材 使用。此外，介面活性劑亦不以丁也⑽χ_ι〇〇為限，只需 功能相同之溶劑均可適用。 5 在進仃上述步驟11的同時，可以先行或是同步進行步 驟12，製作積集化陶瓷基板21。在此，以低溫共燒陶瓷（ LTCC)製程，選用混合玻璃與氧化鋁粉體為材料或是混合 有乳化紹纖維之複合材料為材料，製成陶竟聚料後，先以 刮刀成型方式成型出複數陶瓷薄帶212，再以雷射加工形成 1〇 複數薄帶孔洞211，經過填孔後，再選用導電材料例如銀膠 ，以網印方式形成内連接線路（或導電層）213，最後經過將 k些網印有内連接線路（或導電層）213之陶瓷薄帶212疊層 熱壓及退火熱處理，以低成本且精確的製程完成陶瓷基 板21之製作，使陶究基板21不但具有積集化内連接線路（ 或V電層）213 ’方便整合各式元件之外，同時可以耐高溫之 陶瓷材料忍受後續相關熱處理溫度。 然後進行步驟13，以網版印刷方式，以上述步驟11所 ^備完成之奈米碳管漿料為材料’在陶£基板21上形成圓 衣形之毛射源23，且環形發射源23之環形的外徑界於 2〇 12〇〇/Zm〜2〇00#m之間，寬度介於15〇/^〜500 /zm之間； 再以銀膠為材料形成電極單元24。在此要說明的是發射源 ㈣狀並不限於圓環，凡是呈矩形、三角形，或多邊形的 裒狀均可以達到本發明之預定功效，同時半徑介於 500〜1500 // m之間的圓形亦可以達到預定功效。 200523975 然後以步驟14,在大氣環境下，先以loo〜220°C的溫 度進行10〜60分鐘，再以200〜300°C的溫度進行30〜120分 鐘進行熱處理。 最後進行步驟15，在氳/氬之體積濃度比為3〜3〇 v〇1% 的氣氛下，以500〜9〇〇。〇的溫度，100〜700 丁〇rr的壓力下進 行10〜60分鐘的燒結處理，即完成場發射奈米碳管電極2 的製作。 ίο 15 20 在此要特別說明的是，在網印成型完環形發射源23之 後，可以另行選用一可導引電子運動的物質，像是導電物 貝，或间；丨電《數物質，例如鉑、I巴、鐵、始、鎳等金屬 元素或含此等金屬元素之合金填覆於環形發射源23所圍構 出的填覆空間中，用於發散或集中電子的運動，以 昇場發射特性。 -般市售無摻加奈米銀粉之碳管漿料與本發明之摻合 有奈米銀粉的奈米碳管漿料，經過網印成型與步驟、步 驟15、㈣16之軟烤、燒結及退火處理後，可以明顯看^ ，-般市售無摻加奈米銀粉之碳管衆料的奈米碳管間之分 散狀況如圖4,圖5所示，銀顆粒分佈不均，而本發明之^ 合有奈米銀粉的奈米漿料如圖6，圖7所示，奈米銀粉均句， 分散於其中，可增加其導電性。再參閱圖8，與_般市售無 摻加奈米銀粉之碳管漿料相比較，本發明所 奈米銀粉的奈米碳管漿料，在形成發射源之後確實 佳的場發射特性表現。 ' ^ 參閱圖 1〇’以上述本發明之製作方法製作完成 10 5 10 15 200523975 的％發射奈米碳管電極2，實 璃為陽極，4 “搭配主佈螢光粉體的ITO玻 α 1〇). I光几件後，分別在3〇〇ν(ϋ 9)、400V( 圖ίο)的工作電壓下量測其發光圖形，可知 … 之環形的發射源23可以得到相對大面積之發光面積所形成 %奈=:7二果:知，量百分― 厌何之不未名枓，成型出外# 3lmm 〇.25mm之發射源的場發射奈米碳管電極，在= 作電職圍時，具有優良的場發射特性表現。 綜所上述，由於奈米碳管具有高惰性，高電傳導性， 及極小的曲率半徑，因此相當適合作為場發射電極的材料 ，而本發明主要是以陶竞為基材，以自製的多璧奈米碳管 為材料’同時應用製作成本較低，且可以大面積塗佈，做 成大範圍之電子發射源的網版印刷製程形成場發射的電極 ’不但可以達成内連接線路積集化的要求，同時所完成的 場發射奈米碳管電極，不但臨界電壓較低，更具有優良的 場發射特性表現’而確實達到本發明開發製程簡單、生產 成本低的場發射電極掣鞀，h JL、， ^使完成的場發射電極具有優 異的工作表現之創作目的。 惟以上所述者，僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍’即大凡依本發明申請專利 範圍及發明說明書内容所作之簡單的等效變化與修飾，皆 應仍屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是-流程圖，說明本發明一種場發射奈米碳管電 20 200523975 極的製造方法的一較佳實施例； 圖2是一俯視示意圖，今明 从圖1所示之製造方法製 造之％發射奈米碳管電極； 圖3是-剖視圖，輔助圖2 法製造之場發射奈米碳管電極； 口 所丁之衣 圖4是一 SEM照片，說明一 々 又市售無換加奈来銀粉之 石厌管漿料所形成之銀粉及奈米碳管間的八气狀、兄· 圖5疋一 SEM照片，讀明同1 况明圖4之-橫截面影像，可看 ίο 15 20 出銀粉的分散並不均勻，因而造成導電度降低； 圖6是一 SEM照片，說明太欢 本^月之摻合有奈米銀粉的 奈米漿料的奈米碳管間之分散狀況； 圖7是-隨照片’說明圖6之—橫戴面影像，可看 出奈米碳官及奈米銀粉均勻分散於其中間分散狀況良好； 圖8是一量測結果曲線圖，說明-般市售無摻加奈米 銀狀碳管t料與本發明所使用之摻合有奈米銀粉的奈米 碳管漿料，在形成發射源之後的場發射特性表現； 圖9是-照片，說明本發明之場發射奈米碳管電極， 實際搭配螢光體為陽極製成發光元件後，在3gqv的工作電 壓下的發光面積； —圖10是-照片，說明本發明之場發射奈米碳管電極， 貫際搭配螢光體為陽極製成發光元件後，在4⑽V的工作電 壓下的發光面積；及 圖U是-量測結果曲線圖’說明以重量百分比為胸 %奈米碳材之奈米漿料，成型預定態樣之發射源的場發射 12 200523975 奈米碳管電極，在0-600V的工作電壓範圍的場發射特性表 現。 13 200523975 【圈式之主要元件代表符號說明】 11 步驟 21 陶瓷基板 12 步驟 211 孔洞 13 步驟 212 陶瓷薄帶 14 步驟 213 内連接線路 15 步驟 23 發射源 2 場發射奈米碳管電極 24 電極單元200523975 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a field emission electrode, and particularly to a field emission electrode using a carbon nanotube as an emission source and a method for manufacturing the same. [Previous technology] Various materials used in field emission electrodes, such as metal spikes and diamond films, require a very high critical electric field (thresh〇ld fieM, the electric field required at the current level Je = 10 mA / cm2 ) To be able to perform, and there are quite a few documents confirming that when carbon nanotubes are used in field emission electrodes, they have better performance, showing that carbon nanotubes are a good field emission electrode material. At present, field emission electrodes that use nanometer carbon tubes as electron emission sources are mostly manufactured by directly growing nanometer carbon tubes on a substrate and adding a moderate το piece design to make an electron emission source. The method is: Placing a catalyst on the substrate directly grows nano-carbon fibers or nano-carbon tubes as an electron emission source. Progressive improvements have made nano-carbon tubes into an array to improve the electron-emitting performance of the nano-carbon tubes. In U.S. Patent No. 6436221 B1 invention patent, nano carbon carbon, organic binder, resin, and silver powder are mixed to make a nano carbon tube glue, which is coated on the strip electrode prepared by the screen printing method. As an electron emission source: but experiments have found that the device obtained by this method must be under an electric field exceeding 4 · 5 v_ in order to get 1GmA / em2 current money. Another example is U.S. Patent No. 6146230, which reveals that a biomimetic or a dispersant using p〇i〇xyethyiene n〇nyi phenyl ether as a dispersing agent, a compound of stone oxane or silicon dioxide as a binding agent, mixed with Graphite powder, 20 200523975 2 Diamond carbon, nano carbon tube, rhyme powder, nitrogen hafnium, or nitride inscription-made of sub-emitter source material, but this invention patent does not have relevant experimental data to prove this technical achievement. In general, the above invention patents may indeed make field emission electrodes that should use 5 nanometer carbon tubes as the electron emission source, but their disadvantages are that they are expensive and expensive; for example, US No.61462330 The invention patent case proposes that the car is a simple and low-cost process technology, but there is no relevant experimental data to confirm it, or its manufactured field emission electrode requires a higher critical electric field and other disadvantages. Developed a field emission electrode with simple manufacturing process and low production cost, and made the field emission electrode with excellent performance. It is one of the problems that the academic and industry have been trying to overcome. [Summary of the Invention] ^ Therefore, the object of the present invention is to provide a simple and low-cost manufacturing method to fabricate field emission electricity using nano carbon tubes as the electron emission source. A method for manufacturing an emission nano-tube electrode includes the following steps. (a) A low-temperature co-fired ceramic process is used to fabricate a substrate with 20 integrated interconnect lines. (b) Taking a nano carbon tube paste remotely to form at least one emission source on the substrate by screen printing. (c) heat treating the product of step (b). (d) sintering the product after step (c). 200523975 In addition, the present invention-field emission nano carbon: electrode'comprised by the method described above includes an integrated ceramic substrate and an emission source formed on the integrated ceramic substrate. The integrated ceramic substrate is manufactured by a low-temperature co-fired ceramic process. The 5H emission source is a screen printing method that contains a half-stone Lu ^: 士 A, · χ · »a non-wood stone anti-material and a silver glue with nano-silver powder added. It is shaped like a ring and emits multiple electrons when a voltage is applied. The invention has the effect of manufacturing a field emission nanometer carbon tube electrode with a low critical electric field strength by a low cost and simple screen printing method. 15 [Embodiment] The foregoing and other technical contents, features, and effects of the present invention will be clearly understood in the following detailed description of a preferred embodiment with reference to the accompanying drawings. Θ Referring to FIG. 1, a method I for manufacturing a field emission nano carbon tube electrode according to a preferred embodiment of the present invention is used to manufacture the field emission nano carbon tube electrode 2 as shown in FIG. 2, which can be applied to, for example, a field emission display. On the light-emitting element. Referring to FIG. 2 and FIG. 3 at the same time, the field emission carbon nanotube electrode 2 includes a ceramic substrate, an electrode unit 24 formed on the ceramic substrate 21, and an emission source 23 formed on the ceramic substrate 21. . The ceramic substrate 21 is an integrated ceramic substrate including at least two holes 211 having a plurality of holes that can be used for electrical connection, and-in a predetermined state, formed between the two ceramic thin strips 2U and the plurality of holes 211. Connection line 213. The interconnecting lines can also be replaced by a conductive layer using a conductive material. The electrode unit 24 is formed of a conductive material such as silver paste, and is electrically connected to the internal wiring 20 200523975. The connection line 213 ′ can further apply electricity to the emission source ^. 5 10 15 The retroreflective source 23 is a nano carbon tube material filled with silver glue containing silver powder and silver powder. It is screen-printed to form a ring shape between m and side ridges. When -electricity = unit 24 is applied, each-nanometer carbon tube in the nano-carbon material emits electrons. Here we only summarize the macroscopic structure and other detailed descriptions of the field observation nanometer carbon nanotube electrode 2 and other detailed descriptions, which will be detailed in conjunction with the experimental results. The method / phase is described with reference to FIG. 1. The above-mentioned field-emission carbon nanotube electrode 2 is firstly manufactured in a step H-a carbon nanotube slurry containing a plurality of carbon nanotubes. In this example, 'the carbon source containing carbon elements such as xylene, cyclohexane, toluene, $, or n-hexane is first selected, mixed with ferrocene, as a catalyst, and Thiophene as a promoter. Agent, through the chemical vapor deposition process, to obtain a multi-walled carbon nanotube with a diameter ranging from 2G to 15Gnm as a carbon nanomaterial; and then a commercially available silver colloid containing silver powder having a particle size between 0.15 to 15 In the present invention, MEP_Ag_PTG_5575 is used. Nano silver powder with a particle size boundary between 30 and 150 nm is added, and the weight percentage of the nano silver powder accounts for 30 to 100 wt% of the silver content in the silver gel. The weight percentage of the carbon material is 5 to 5 wt%, and the relative weight percentage is 99 to 85 wt%, a mixture of silver glue mixed with nano silver powder, and Triton χ_1, whose addition ratio is in the range of 0.8 to 1.8 mi / g. 〇As a surface active agent, mixed into a nano-charged. Note that it is not necessary to make nano-carbon materials by yourself, just choose a multi-wall nano-carbon tube with a diameter of 20 200523975 and a range of 20 ~ 15Gnm, or a smistone anti-fiber with a diameter of m. The nano carbon material required by the present invention is used. In addition, the surface active agent is not limited to Ding Yixian, only solvents with the same function can be used. 5 While performing step 11 above, step 12 may be performed in advance or simultaneously to produce an integrated ceramic substrate 21. Here, in the low-temperature co-fired ceramic (LTCC) process, mixed glass and alumina powder or a composite material mixed with emulsified fiber is used as the material. After the ceramic material is made, it is first formed by scraper molding. A plurality of ceramic thin strips 212 are produced, and then laser processing is used to form 10 plurality of thin strip holes 211. After filling the holes, conductive materials such as silver glue are selected to form the internal connection lines (or conductive layers) 213 by screen printing. Finally, After laminating heat-pressed and annealed heat treatment of ceramic thin strips 212 screen-printed with internal connection lines (or conductive layers) 213, the production of ceramic substrate 21 is completed at a low cost and accurate process, so that ceramic substrate 21 not only has The integrated interconnecting circuit (or V electrical layer) 213 'facilitates the integration of various components, and at the same time, the ceramic material that can withstand high temperatures can withstand subsequent related heat treatment temperatures. Then, step 13 is performed, using a screen printing method, using the carbon nanotube paste prepared in step 11 as a material, to form a round-shaped hair emission source 23 on a ceramic substrate 21, and a ring-shaped emission source 23 The outer diameter boundary of the ring is between 2100 / Zm ~ 200 ## m, and the width is between 15 / ^ ~ 500 / zm; and the electrode unit 24 is formed by using silver paste as a material. It is to be noted here that the ㈣ shape of the emission source is not limited to a circular ring. Any 裒 shape that is rectangular, triangular, or polygonal can achieve the predetermined effect of the present invention, and a circle with a radius between 500 and 1500 // m Shape can also achieve a predetermined effect. 200523975 Then in step 14, under the atmospheric environment, first perform a heat treatment at a temperature of loo ~ 220 ° C for 10 ~ 60 minutes, and then a temperature of 200 ~ 300 ° C for 30 ~ 120 minutes. Finally, step 15 is performed, in an atmosphere having a volumetric concentration ratio of krypton / argon of 3 to 30 v01%, and 500 to 900. The sintering treatment was performed at a temperature of 100 ° C and 700 ° C to 10 rr for 10 to 60 minutes, and the field emission carbon nanotube electrode 2 was completed. ίο 15 20 It should be particularly noted here that after the ring-shaped emission source 23 is screen-printed, a substance that can guide the movement of electrons, such as a conductive shell, or between, can be selected separately; Platinum, Ibar, iron, metal, nickel and other metal elements or alloys containing these metal elements are filled in the filling space surrounded by the ring-shaped emission source 23 and used to diverge or concentrate the movement of electrons to raise the field Emission characteristics. -Normally commercially available carbon tube paste without nano silver powder and nano carbon tube paste with nano silver powder of the present invention, after screen printing forming and steps, soft baking, sintering and annealing of steps 15 and 16 After the treatment, it can be clearly seen that the general dispersion of the carbon nanotubes without carbon nanotubes added with nano silver powder is shown in Figs. 4 and 5. The silver particles are unevenly distributed. ^ The nano paste containing nano silver powder is shown in Figure 6 and Figure 7. The nano silver powder is homogeneous and dispersed in it to increase its conductivity. Referring to FIG. 8 again, compared with a commercially available carbon tube paste containing no nano-silver powder, the nano-carbon tube paste of the nano-silver powder of the present invention does have a better field emission characteristic performance after forming an emission source. '^ Please refer to FIG. 10' The% emissive carbon nanotube electrode 2 with 10 5 10 15 200523975 was completed by the above-mentioned manufacturing method of the present invention, solid glass as anode, 4 “ITO glass α 1 with fluorescent powder of main cloth 〇). After a few pieces of I light, the luminous pattern is measured at the working voltage of 3〇ν (ϋ 9) and 400V (图 ίο), it can be seen that the ring-shaped emission source 23 can obtain a relatively large area of light Area formed by% Nai =: 7 Ergo: Knowing, 100% of the amount-what is irrelevant, forming a field emission nano carbon tube electrode of # 3lmm 〇.25mm emission source, at = for electrical duty It has excellent field emission characteristics. In summary, due to the high inertness, high electrical conductivity, and extremely small radius of curvature of carbon nanotubes, it is quite suitable as a material for field emission electrodes, and the present invention is mainly based on Tao Jing is used as the substrate, and the self-made multi-carbon nano tube is used as the material. At the same time, the production cost is low, and it can be coated on a large area to form a wide range of electron emission sources. 'Not only can it meet the requirements for the accumulation of interconnected lines, The field emission nano-carbon tube electrode completed at the time not only has a low threshold voltage, but also has excellent field emission characteristics. It does reach the field emission electrode control of the invention with simple development process and low production cost, h JL ,, ^ The creative purpose of making the completed field emission electrode have excellent working performance. However, the above are only the preferred embodiments of the present invention. When this cannot be used to limit the scope of the present invention, that is, to apply for the present invention The simple equivalent changes and modifications made by the scope of the patent and the description of the invention should still fall within the scope of the patent of the present invention. [Brief Description of the Drawings] Figure 1 is a flow chart illustrating a field emission nanocarbon of the present invention. Guandian 20 200523975 A preferred embodiment of a method for manufacturing a pole; Figure 2 is a schematic plan view, and today is a% -emission nanometer carbon tube electrode manufactured from the manufacturing method shown in Figure 1; Figure 3 is-a cross-sectional view, auxiliary to Figure 2 Field emission nanometer carbon tube electrode manufactured by the method; Figure 4 is a SEM photograph, illustrating the formation of the anaerobic tube slurry without the exchange of silver powder. Figure 5: A SEM photograph between the powder and the nano-carbon tube. Read the same situation as in Figure 4-cross-sectional image. You can see ίο 15 20 The silver powder is not uniformly dispersed, which causes The conductivity decreases; Figure 6 is a SEM photograph illustrating the dispersion between the carbon nanotubes of the nano-carbon slurry mixed with the nano-silver powder in Tai Huan Ben; Figure 7 is-illustrated with the photo ' —Across the image, it can be seen that the nano-carbon and nano-silver powder are evenly dispersed in the middle. The dispersion is good; Figure 8 is a graph of the measurement results, which shows that the commercially available non-doped nano-silver carbon tube t Material and the nano-carbon tube slurry mixed with nano-silver powder used in the present invention after field emission characteristics are formed; FIG. 9 is a photograph illustrating the field-emission nano-tube electrode of the present invention, The actual light-emitting area at a working voltage of 3gqv after the light-emitting element is actually matched with the phosphor as an anode; FIG. 10 is a photograph illustrating the field emission nanometer carbon tube electrode of the present invention, and the phosphor is used as the anode throughout After making the light-emitting element, the light-emitting area under the working voltage of 4⑽V; and the figure U is- The test result graph 'illustrates the field emission of a nanometer carbon paste with a weight percentage of chest% carbon material, forming a predetermined shape of the emission source 12 200523975 nanometer carbon tube electrode, the field in the operating voltage range of 0-600V Emission characteristics. 13 200523975 [Description of the main components of the circle type] 11 Step 21 Ceramic substrate 12 Step 211 Hole 13 Step 212 Ceramic ribbon 14 Step 213 Interconnecting line 15 Step 23 Emission source 2 Field emission nano carbon tube electrode 24 Electrode unit