JP5927635B2 - High-speed inversion pulse power supply - Google Patents

Description

  The present invention relates to a high-speed inversion pulse power supply device used for electroplating or the like.

  In certain types of electroplating, it is known that when a periodically reversing current is passed, the physical properties of the coating are improved, and copper plating has long been put into practical use as PR copper plating. This PR copper plating reverses the polarity with a period of several seconds or more. However, with certain types of plating, the speed can be increased to a period of one hundred microseconds to several milliseconds to significantly improve the plating quality. In recent years, it has been found to be used for chromium plating, nickel plating and the like. As a high-speed inversion pulse power supply device for performing such plating, for example, a device disclosed in Patent Document 1 has been put into practical use.

  The power supply device disclosed in Patent Document 1 is provided with a switching type bipolar DC power source that outputs positive and negative bipolar DC with respect to the neutral point, and the positive and neutral points of the bipolar DC power source The first semiconductor switch and the second semiconductor switch are connected in series between the third semiconductor switch and the fourth semiconductor between the neutral point of the bipolar DC power supply and the negative pole of the bipolar DC power supply. Connect the switch in series, connect a capacitor between the connection point of the first semiconductor switch and the second semiconductor switch and the connection point of the third semiconductor switch and the fourth semiconductor switch, Connect a fifth semiconductor switch and a sixth semiconductor switch in series between the positive and negative poles, and output from between the connection point and the neutral point of the fifth semiconductor switch and the sixth semiconductor switch. To take out Those were.

  In this power supply device, the first semiconductor switch and the fourth semiconductor switch are turned on at the end of the positive polarity pulse period and at the end of the negative polarity pulse period, and the energy stored in the circuit inductance is recovered in the capacitor. By accumulating, the current of the positive polarity pulse and the negative polarity pulse can be rapidly lowered, the second semiconductor switch and the sixth semiconductor switch are set at the start of the negative polarity pulse period, and the third pulse is set at the start of the positive polarity pulse period. There is an advantage that the current of the negative polarity pulse and the positive polarity pulse can be quickly raised by turning on each of the semiconductor switch and the fifth semiconductor switch and releasing the energy stored in the capacitor to the load. There was a problem of requiring a large number of semiconductor switches.

  In addition, a transient surge voltage is generated when the fifth semiconductor switch or the sixth semiconductor switch is turned off. To absorb this, a snubber must be provided. It was also necessary to connect the required number in parallel. For this reason, there are problems that the number of components such as semiconductor switches and snubbers increases, the structure becomes complicated, and it is difficult to increase the capacity.

JP 2011-1624 A

  The present invention has been made to solve the above-described problems and to provide a high-speed inversion pulse power supply device that can be configured with a small number of semiconductor switches and does not require a snubber for absorbing a surge voltage.

  In order to solve the above problems, the high-speed inversion pulse power supply device of the present invention is provided with a switching type bipolar DC power supply that outputs positive and negative bipolar DC with respect to the neutral point. Connect a capacitor between the positive pole and the negative pole of the bipolar DC power supply and connect the first semiconductor switch and the second semiconductor switch connected in series to connect the positive pole and neutrality of the bipolar DC power supply. A third semiconductor switch between the two points, a fourth semiconductor switch connected between the neutral point of the bipolar DC power supply and the negative pole of the bipolar DC power supply, respectively, The output is taken out between the connection point and the neutral point of the semiconductor switch.

  Here, it is preferable to provide a third coil in the transformer constituting the bipolar DC power source, and to provide a charging circuit for charging the capacitor by rectifying the electric power induced in the tertiary coil, and to provide an independent DC power source for charging the capacitor. It is preferable. Also, the first semiconductor switch and the fourth semiconductor switch are turned on at the start of the positive polarity pulse period, the first semiconductor switch is turned on during the positive polarity pulse period, and the second semiconductor switch is turned on at the start of the negative polarity pulse period. And the third semiconductor switch are turned on, and the drive signal for turning on the second semiconductor switch during the negative polarity pulse period is sequentially generated, and the output currents during the positive polarity pulse period and the negative polarity pulse period are respectively set values. It is preferable to provide a control means for controlling the bipolar DC power supply.

  According to the present invention, the energy stored in the inductance of the circuit is recovered at the end of the positive pulse period and at the end of the negative pulse period, so the current of the positive pulse and the negative pulse falls rapidly, The recovered energy is accumulated in the capacitor and released at the start of the next negative pulse period and at the start of the positive pulse, so that the current of the next negative pulse and positive pulse rises rapidly. In this way, the current is rapidly lowered by recovering the energy stored in the circuit inductance to the capacitor, and the current is rapidly raised by discharging the energy stored in the capacitor and stored in the load. Not only does the rise and fall of the pulse current become faster, but there is an effect of higher efficiency because energy is not lost. Also, after the current of each pulse rises, the current is supplied from the bipolar DC power supply, but since the bipolar DC power supply is a switching method, it has good tracking characteristics and a pulse current with a good waveform is supplied. There are advantages to being.

  When a transformer that constitutes a bipolar DC power supply is provided with a tertiary coil and a charging circuit that charges the capacitor by rectifying the electric power induced in the tertiary coil is provided, the capacitor is charged by this charging circuit, and the positive pulse At the end of the period and at the end of the negative pulse period, the voltage of the capacitor is ensured to a voltage sufficient for the current of the next negative pulse and positive pulse to rise rapidly, so the next negative pulse and positive polarity There is an advantage that the pulse current always rises rapidly. When an independent DC power supply is used to charge the capacitor, the capacitor is charged before the first positive pulse is output at the start of operation. There is an advantage that the pulse current becomes a waveform.

  During operation, when the first semiconductor switch or the second semiconductor switch is turned off, a surge voltage may occur, but the positive terminal of the first semiconductor switch is connected to the positive terminal of the capacitor and the second semiconductor switch. Since the negative terminal is directly connected to the negative terminal of the capacitor, all such surge voltages are absorbed by the capacitor, and there is an advantage that it is not necessary to provide a separate snubber.

It is a connection diagram which shows the structure of this invention. It is a wave form diagram of the principal part at the time of operation. It is a figure which shows the path | route of the electric current at the time of operation | movement. It is a figure which shows the path | route of the electric current at the time of operation | movement. It is a figure which shows the path | route of the electric current at the time of operation | movement. It is a figure which shows the path | route of the electric current at the time of operation | movement. It is a figure which shows the path | route of the electric current at the time of operation | movement. It is a figure which shows the path | route of the electric current at the time of operation | movement.

Next, the form for implementing this invention is demonstrated concretely, referring a figure.
FIG. 1 is a connection diagram of a main circuit showing an embodiment of the present invention, in which a positive terminal of a rectifier 2 that converts AC power supplied from an AC input terminal 1 into DC power is connected to positive terminals of semiconductor switches 3a and 3b. Are connected to the minus terminals of the semiconductor switches 3a and 3b, respectively, and the plus terminals of the semiconductor switches 4a and 4b having the minus terminal connected to the minus pole of the rectifier 2. A capacitor 5 is connected between the positive pole and the negative pole of the rectifier 2.

  A primary coil 7 of the transformer 6 is connected between the connection point of the semiconductor switches 3a and 4a and the connection point of the semiconductor switches 3b and 4b. A center tap 9 is connected to the secondary coil 8 of the transformer 6. The anodes of the diodes 10a and 10b and the cathodes of the diodes 11a and 11b are connected to both ends, respectively. The cathodes of the diodes 10a and 10b are connected to each other and connected to the plus terminal of the capacitor 12, and the anodes of the diodes 11a and 11b are connected to each other and connected to the minus terminal of the capacitor 12, respectively. The semiconductor switches 3a, 3b, 4a, 4b, the transformer 6 and the diodes 10a, 10b, 11a, 11b, and the capacitor 12 are switching type bipolar DC power supplies that output positive and negative bipolar DC with respect to the neutral point. Will be configured. In this bipolar DC power source, the center tap 9 is a neutral point, the plus terminal of the capacitor 12 is a plus pole, and the minus terminal of the capacitor 12 is a minus pole.

  The transformer 6 is further provided with a tertiary coil 13. The tertiary coil 13 is provided with a center tap 14, and anodes of diodes 15a and 15b are connected to both ends, respectively. The center tap 14 of the tertiary coil 13 is connected to the negative terminal of the capacitor 12, and the cathodes of the diodes 15 a and 15 b are connected to each other and connected to the positive terminal of the capacitor 12 via the resistor 16. Reference numeral 17 denotes a DC power source such as a switching system, and the AC input side of the DC power source 17 is connected to the AC input terminal 1, and the positive electrode on the DC output side is connected to the positive electrode of the capacitor 12 via the resistor 18. The negative pole is connected to the negative terminal of the capacitor 12, respectively.

  The plus terminal of the semiconductor switch 19 that is the first semiconductor switch is connected to the plus terminal of the capacitor 12, and the plus terminal and the output terminal of the semiconductor switch 20 that is the second semiconductor switch are connected to the minus terminal of the semiconductor switch 19. 21a is connected. The positive terminal of the capacitor 12 is connected to the positive terminal of the semiconductor switch 22 as a third semiconductor switch, and the center tap 9 is connected to the negative terminal of the semiconductor switch 22 and the semiconductor switch 23 as a fourth semiconductor switch. The positive terminal is connected and the output terminal 21 b is connected via the output current detector 24. The negative terminal of the semiconductor switch 23 is connected to the negative terminal of the capacitor 12.

  Thus, the capacitor 12 and the semiconductor switch 19 as the first semiconductor switch and the semiconductor switch 20 as the second semiconductor switch are connected in series between the positive pole of the bipolar DC power supply and the negative pole of the bipolar DC power supply. A semiconductor switch 22 as a third semiconductor switch is connected between the positive pole of the bipolar DC power supply and the center tap 9 which is a neutral point. A semiconductor switch 23, which is a fourth semiconductor switch, is connected to each other, and an output is taken out between a connection point between the semiconductor switch 19 and the semiconductor switch 20 and a neutral point. The semiconductor switches 3a, 3b, 4a, and 4b and the semiconductor switches 19, 20, 22, and 23 that constitute the above circuit include diodes that conduct in the reverse direction, and are preferably high-speed elements. Depending on the rated capacity, the required number shall be connected in parallel.

  In the figure, reference numeral 25 denotes a control device. The control device 25 receives an output current detection signal and an output voltage detection signal obtained from the output current detector 24, and sets an operation control circuit and operation conditions. Circuit, a reference signal generating circuit for generating a current reference signal, an error amplifying circuit, a PWM modulation circuit, and drive signals to be given to the semiconductor switches 3a, 3b, 4a, 4b and the semiconductor switches 19, 20, 22, 23 And a timing circuit for generating the DC power supply 17 and an operation circuit for the DC power supply 17 are provided. The drive signals of the semiconductor switches 3a, 3b, 4a and 4b generated by the timing circuit are isolated and amplified by the drive device 26 and applied to the semiconductor switches 3a, 3b, 4a and 4b. , 22 and 23 are insulated from the drive device 27 and amplified to be applied to the semiconductor switches 19, 20, 22 and 23. Reference numeral 28 collectively represents wiring inductances existing in the power supply device.

  The setting items of the operating conditions are each time of the positive polarity pulse and the negative polarity pulse, that is, the pulse width of the positive polarity pulse and the negative polarity pulse, the output current of the positive polarity pulse and the negative polarity pulse, and the reference signal generation circuit is set. The current reference signal is generated according to the operating conditions. The error amplifier amplifies the difference between the output current detection signal and the current reference signal and supplies the signal to the PWM modulation circuit. The PWM modulation circuit uses the signals from the error amplifier to switch the semiconductor switches 3a, 3b, 4a, 4b. The on-time is changed. The operation circuit of the DC power supply 17 gives an operation command signal to the DC power supply 17 when necessary according to a command from the operation control circuit.

  The control device 25 configured as described above operates as follows. First, an operation command signal is given to the DC power source 17 at the start of operation. After a while, a drive signal is given to the semiconductor switches 19 and 23, and the positive pulse period starts. The drive signal is continuously supplied to the semiconductor switch 19 for the set positive pulse period, and the drive signal is supplied to the semiconductor switch 23 for a predetermined time and stopped. After the drive signal applied to the semiconductor switch 23 is stopped, the drive signal is applied alternately to the semiconductor switches 3a and 4b and the semiconductor switches 3b and 4a, and continues for the positive pulse period. When the positive pulse period ends, the drive signal applied to all the semiconductor switches is stopped.

  A drive signal is given to the semiconductor switches 20 and 22 after having been paused for a while after the end of the positive polarity pulse period, but continuously given to the semiconductor switch 20 for the set negative polarity pulse period, and to the semiconductor switch 22 for a certain period of time. Just give and stop. After the drive signal applied to the semiconductor switch 22 is stopped, the drive signal is applied alternately to the semiconductor switches 3a and 4b and the semiconductor switches 3b and 4a, and continues during the negative pulse period. When the negative polarity pulse period ends, the drive signal applied to all the semiconductor switches is stopped. After a short period of time after the end of the negative pulse period, a drive signal is again applied to the semiconductor switches 19 and 23 to obtain a positive pulse period, which is repeated thereafter.

  The operation of the high-speed inversion pulse power supply device configured as described above will be described below. Basically, the positive polarity pulse and the negative polarity pulse are output alternately. However, in the case of plating, since a film is formed during the positive polarity energization period, the normal positive polarity energization time is usually several times the negative polarity energization period. Set as above. In FIG. 2, while the positive polarity pulse and the negative polarity pulse are alternately output, after the positive polarity pulse falls at t2, the negative polarity pulse rises at t3, and after the negative polarity pulse falls at t4, the next time at t1 The waveform of the main part when the positive pulse rises is shown. A and B are drive signals for the semiconductor switch 19 and the semiconductor switch 20 which are the first semiconductor switch and the second semiconductor switch, respectively. Drive signals for the semiconductor switches 22 and 23, which are the third semiconductor switch and the fourth semiconductor switch, E is a drive signal for the semiconductor switches 3a and 4b, F is a drive signal for the semiconductor switches 3b and 4a, and G is Positive output voltage of bipolar DC power supply, H is negative output voltage of bipolar DC power supply, J is output voltage, K is output current, L is capacitor 1 Current, M is the voltage of the capacitor 12.

  The AC power supplied from the AC input terminal 1 is converted into DC power by the rectifier 2, smoothed by the capacitor 5, and supplied to the circuits of the semiconductor switches 3a, 3b, 4a and 4b. When the positive pulse time and negative pulse time, the output current of the positive pulse and the output current of the negative pulse are set, and the operation command is given to the operation control circuit by the contact of the push button switch, the operation state is entered, and the DC power source 17 An operation command signal is given. When the DC power supply 17 is in an operating state and the capacitor 12 is charged through the resistor 18, a drive signal is given to the semiconductor switches 19 and 23, and the semiconductor switch 19 and the semiconductor switch 23 are turned on.

  Since the load can be equivalently regarded as a series circuit of an inductance L and a resistor R, in FIGS. 3 to 8, the load is represented by a series circuit of an inductance L and a resistor R. When the semiconductor switch 19 and the semiconductor switch 23 are turned on, as indicated by arrows in FIG. 3, the capacitor 12 to the semiconductor switch 19, the wiring inductance 28, the output terminal 21a, the inductance L, the resistor R, the output terminal 21b, the output current detector 24, A current flows through the path of the semiconductor switch 23, and a positive polarity pulse with a positive output terminal 21a and a negative output terminal 21b is output. At this time, the positive pulse rises rapidly due to the high charging voltage of the capacitor 12. Thereafter, the drive signal is no longer applied to the semiconductor switch 23, the drive signals are alternately applied to the semiconductor switches 3a, 4b and the semiconductor switches 3b, 4a, and the semiconductor switches 3a, 4b and the semiconductor switches 3b, 4a are alternately turned on. An alternating current flows through the primary coil 7 of the transformer 6, and alternating current power is induced in the secondary coil 8.

  The AC power induced in the secondary coil 8 is rectified by the diodes 10a and 10b, and as shown by arrows in FIG. 4, the semiconductor switch 19, the wiring inductance 28, the output terminal 21a, the inductance L, the resistor R, the output terminal 21b, and the output A current flows through the path of the current detector 24 and the center tap 9, and a positive polarity pulse is output continuously at the output terminal 21a and at the output terminal 21b. The output current is detected by the output current detector 24, and an error between the detected output current detection signal and the set current reference signal is amplified and applied to the PWM modulation circuit. The PWM modulation circuit controls the pulse width of the drive signal applied to the semiconductor switches 3a and 4b and the semiconductor switches 3b and 4a so that the error is minimized, and the output current of the positive polarity pulse is controlled to the set current value. . Here, when an anode plate is connected to the output terminal 21a and an object to be plated is connected to the output terminal 21b and immersed in a plating solution, a plating film is formed.

  As described above, when current flows from the capacitor 12 through the path of the semiconductor switch 19, the output terminal 21a, the inductance L, the resistor R, the output terminal 21b, the output current detector 24, and the semiconductor switch 23, the charge of the capacitor 12 is loaded. And the voltage of the capacitor 12 is lowered. Thereafter, while the positive pulse is output, AC power is also induced in the tertiary coil 13 of the transformer 6, so that AC power is rectified by the diodes 15 a and 15 b and supplied to the capacitor 12 through the resistor 16. Thus, the capacitor 12 is charged and the reduced voltage is recovered.

  When the positive pulse period ends, no drive signal is applied to all the semiconductor switches, and all the semiconductor switches are turned off. Energy is stored in the wiring inductance 28 and the inductance L, and the wiring inductance 28, output terminal 21a, inductance L, resistance R, output terminal 21b, output current detector 24, output current detector 24, as indicated by arrows in FIG. A current flows through the path of the semiconductor switch 22, the capacitor 12, and the semiconductor switch 20, the energy stored in the wiring inductance 28 and the inductance L is transferred to the capacitor 12, and the current of the positive pulse rapidly decreases to zero. become. As a result, the voltage of the capacitor 12 increases. At this time, in the semiconductor switch 22 and the semiconductor switch 20, a current flows through a diode in a reverse direction built in.

  After a short pause, a drive signal is applied to the semiconductor switch 22 and the semiconductor switch 20, and when the semiconductor switch 22 and the semiconductor switch 20 are turned on, the capacitor 12 to the semiconductor switch 22, the output current detector are indicated by arrows in FIG. 24, current flows through the path of the output terminal 21b, the resistor R, the inductance L, the output terminal 21a, the wiring inductance 28, and the semiconductor switch 20, and a negative polarity pulse with a negative output terminal 21a and a positive output terminal 21b is output. The At this time, the negative pulse rapidly rises due to the high voltage of the capacitor 12 as in the case of the positive pulse. Thereafter, the drive signal is no longer applied to the semiconductor switch 22, the drive signals are alternately applied to the semiconductor switches 3a, 4b and the semiconductor switches 3b, 4a, and the semiconductor switches 3a, 4b and the semiconductor switches 3b, 4a are alternately turned on. An alternating current flows through the primary coil 7 of the transformer 6, and alternating current power is induced in the secondary coil 8.

  When AC power is induced in the secondary coil 8, it is rectified by the diodes 11a and 11b, and as indicated by arrows in FIG. 7, the center tap 9, the output current detector 24, the output terminal 21b, the resistor R, the inductance L, and the output terminal. A current flows through the path of 21a, the wiring inductance 28, and the semiconductor switch 20, and a negative polarity pulse is output continuously at the output terminal 21a and at the output terminal 21b. The output current is controlled to the set current value as in the case of the positive pulse. In addition, in the case of the positive polarity pulse, the capacitor 12 whose voltage is decreased by supplying electric charges to the load at the rising edge of the negative polarity pulse is charged with the power from the tertiary coil 13 during the negative polarity pulse period, and the voltage is recovered. It is the same.

  When the negative polarity pulse period ends, no drive signal is applied to all the semiconductor switches, and all the semiconductor switches are turned off. As shown by arrows in FIG. 8, the inductance L, output terminal 21a, wiring inductance 28, semiconductor switch 19, capacitor 12, semiconductor switch 23, output current detector 24, output terminal are shown in FIG. 8 by the energy stored in the wiring inductance 28 and the inductance L. Current flows through the path of 21b and resistor R, the energy stored in the wiring inductance 28 and the inductance L is transferred to the capacitor 12, and the current of the negative pulse rapidly decreases to zero. As a result, the voltage of the capacitor 12 rises, and the current flows through the diode in the reverse direction built in the semiconductor switch 19 and the semiconductor switch 23 as in the case of the positive pulse.

  After a short pause after the end of the negative pulse period, the semiconductor switch 19 and the semiconductor switch 23 are turned on to become the positive pulse period again, and thereafter the positive pulse period and the negative pulse period are repeated in the same manner. Polarity pulse and negative polarity pulse are output alternately. Here, at the end of the positive polarity pulse period and at the end of the negative polarity pulse period, the energy stored in the inductance L and the wiring inductance 28 is transferred to and stored in the capacitor 12, and at the start of the negative polarity pulse period and the positive polarity. At the start of the pulse period, the energy stored in the capacitor 12 is released to the load, but the energy stored and the energy released are changed depending on the operating conditions such as the load current. Therefore, the magnitude of the voltage change of the capacitor 12 due to the stored energy and the released energy also changes depending on the operating conditions such as the load current.

  The voltage of the capacitor 12 illustrated in FIG. 2 is positive when the negative pulse rises because the energy released at the start of the negative pulse period is larger than the energy recovered at the end of the positive pulse period. Lower than during the pulse period, and since the energy released at the start of the positive pulse period is less than the energy recovered at the end of the negative pulse period, the positive pulse rises more than during the negative pulse period It represents the state of being. In any case, energy stored in the inductance L and the wiring inductance 28 at the end of each pulse period is recovered by the capacitor 12 and released at the start of the next reverse polarity pulse period, so there is no energy loss. There is an advantage of good efficiency.

  In FIG. 2, the voltage of the capacitor 12 that has decreased when the negative polarity pulse rises then increases, indicating that the capacitor 12 is charged with the power from the tertiary coil 13 during the negative polarity pulse period. The capacitor 12 is charged by the electric power from the tertiary coil 13 during the positive polarity pulse period and the negative polarity pulse period, and it is ensured to a voltage sufficient for the next negative polarity pulse and positive polarity pulse to rise rapidly. There is an advantage that the negative polarity pulse and the positive polarity pulse always rise rapidly. Since the capacitor 12 is charged with the electric power from the tertiary coil 13 in this way and the DC power source 17 does not need to be continuously operated, the operation command signal is not given after the operation is started and the capacitor 12 stops. The DC power supply 17 can be omitted if the first positive pulse rise at the start of operation is sacrificed.

  In addition, the current is supplied from the bipolar DC power supply after the pulse current rises, but since the bipolar DC power supply uses a switching method, it has good trackability and can supply a pulse current with a good waveform. There is. While the positive and negative pulses are alternately output, a surge voltage may be generated when the semiconductor switches 19 and 20 are turned off. The positive terminal of the semiconductor switch 19 is connected to the positive terminal of the capacitor 12 and the semiconductor switch. Since the negative terminal of the switch 20 is directly connected to the negative terminal of the capacitor 12, all such surge voltages are absorbed by the capacitor 12, and there is an advantage that it is not necessary to provide a separate snubber.

  In the above-described embodiment, the resistor 16 is used to limit the charging current from the tertiary coil 13, but a part or all of the resistor 16 can be replaced with a reactor. As described above, the magnitude or the like of the voltage change of the capacitor 12 changes depending on the operating conditions such as the load current, but the pulse current may overshoot if the voltage of the capacitor 12 at the rising edge of each pulse becomes too high. This is particularly likely to occur when the set current is reduced. When a reactor is used for current limiting, the charging voltage of the capacitor 12 changes depending on the duty of the on-time of the semiconductor switches 3a, 3b, 4a, 4b, so that the output current is small and the semiconductor switches 3a, 3b, 4a, 4b When the duty of the on-time is small, there is an advantage that the charging voltage of the capacitor 12 becomes lower and the overshoot is suppressed.

DESCRIPTION OF SYMBOLS 1 AC input terminal 2 Rectifier 3a, 3b, 4a, 4b Semiconductor switch 5 Capacitor 6 Transformer 7 Primary coil 8 Secondary coil 9 Center tap 10a, 10b, 11a, 11b Diode 12 Capacitor 13 Tertiary coil 14 Center tap 15a, 15b Diode DESCRIPTION OF SYMBOLS 16 Resistor 17 DC power supply 18 Resistor 19, 20 Semiconductor switch 21a, 21b Output terminal 22, 23 Semiconductor switch 24 Output current detector 25 Control apparatus 26, 27 Drive apparatus 28 Wiring inductance L Inductance R Resistance

Claims (4)

  A switching type bipolar DC power supply that outputs positive and negative bipolar DC to the neutral point is provided, and a capacitor is connected between the positive pole of the bipolar DC power supply and the negative pole of the bipolar DC power supply. Connect the one semiconductor switch and the second semiconductor switch connected in series, and between the positive and neutral points of the bipolar DC power supply, the third semiconductor switch, the neutral point of the bipolar DC power supply and The fourth semiconductor switch is connected between the negative poles of the bipolar DC power supply, and the output is taken out between the connection point and the neutral point of the first semiconductor switch and the second semiconductor switch. High speed inversion pulse power supply.   2. A high-speed inversion pulse power supply device according to claim 1, wherein the transformer constituting the bipolar DC power supply is provided with a tertiary coil, and a charging circuit for rectifying electric power induced in the tertiary coil and charging the capacitor is provided. .   3. The high-speed inversion pulse power supply device according to claim 1, further comprising an independent DC power supply for charging the capacitor.   The first semiconductor switch and the fourth semiconductor switch are turned on at the start of the positive polarity pulse period, the first semiconductor switch is turned on during the positive polarity pulse period, and the second semiconductor switch and the second semiconductor switch are turned on at the start of the negative polarity pulse period. The drive signals for turning on the third semiconductor switch and turning on the second semiconductor switch during the negative polarity pulse period are sequentially generated, and the output currents become the respective set values during the positive polarity pulse period and the negative polarity pulse period. 4. A high-speed inversion pulse power supply device according to claim 1, further comprising control means for controlling the bipolar DC power supply.

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