KR20200078110A - Bipolar pulse power supply circuit - Google Patents

Abstract

Provided is a power supply for supplying a bipolar pulse DC voltage signal to a load. The power supply of the present invention includes a circuit control unit and a half-bridge circuit including two power supply units and two circuit switches. Each of the two power supply units includes a rectifier circuit unit for receiving a commercial AC voltage signal and converting it into a predetermined DC voltage signal and a switch. In addition, each of the two power supply units includes a DC/DC converter unit that is configured to boost or reduce the DC voltage signal received from the rectifier circuit unit to a predetermined target DC voltage according to on/off control of the switch according to a first control signal from the circuit control unit. The two circuit switches of the half-bridge circuit are on/off-controlled according to a second control signal from the circuit control unit so that the power supply operates to output the bipolar pulse DC voltage signal, wherein the second control signal controls the two circuit switches not to be turned on at the same time. The circuit control unit includes a digital signal processor, wherein the circuit control unit performs digital signal processing based on at least one of a feedback input from each of the DC/DC converter units, a feedback input from the load, and a user input through the digital signal processor, thereby generating the first control signal and the second control signal.

Description

Bipolar pulse power supply {BIPOLAR PULSE POWER SUPPLY CIRCUIT}

The present disclosure relates to a pulse power supply, and more particularly, to a bipolar pulse power supply according to switching control through digital signal processing.

In recent years, there are an increasing number of cases where a bipolar pulse power source is required in various electric and electronic devices such as semiconductor equipment. Therefore, there is an increasing need for a power supply for bipolar pulse power supply, and when the operation control is based on an analog method, the design becomes complicated, resulting in inflexibility, slow control speed, and poor output stability.

Accordingly, there is a need to provide a bipolar pulse power supply capable of switching control according to a digital signal processing method.

According to an aspect of the present disclosure, a power supply device for supplying a bipolar pulsed DC voltage signal to a load is provided. The power supply device of the present disclosure includes a circuit controller, and a half-bridge circuit including two power supplies and two circuit switches. Each of the two power supply units, A rectifying circuit unit for receiving a commercial AC voltage signal and converting it into a predetermined DC voltage signal, and a switch, and received from the rectifying circuit unit according to on/off control of the switch according to the first control signal from the circuit control unit And a DC/DC converter configured to boost or depressurize the DC voltage signal to a predetermined target DC voltage, and the two circuit switches of the half-bridge circuit are turned on/off according to the second control signal from the circuit controller. Off control-the second control signal is controlled so that the two circuit switches are not turned on at the same time, so that the power supply unit operates to output the bipolar pulsed DC voltage signal, and the circuit control unit is a digital signal processor Including, through the digital signal processor, by performing a digital signal processing based on at least one of the feedback input from each of the DC / DC converter unit, the feedback input from the load, and the user input, the first control signal And generate the second control signal.

According to an embodiment of the present disclosure, the rectifying circuit unit includes a transformer, a bridge diode, and a smoothing capacitor connected in series, and connected in series between the bridge diode and the smoothing capacitor to turn on or turn the rectifying circuit unit. A safety device for suppressing an open/closed surge current that may occur when off, the safety device further includes a resistor and a triac connected in parallel, wherein each switch of each of the DC/DC converter parts It is an IGBT, and the digital signal processor of the circuit controller can be configured to receive each feedback input by an opto coupler.

According to the present disclosure, since the circuit switching control can be performed by the digital signal processing method, the feedback response speed of the circuit can be faster and the stability of the output can be faster than the conventional power supply according to the switching control by the analog method. It can be improved. In addition, according to the present disclosure, it is possible to respond quickly and flexibly by changing the software configuration of digital signal processing even when there is a fluctuation in load, so that the convenience of maintenance of the control circuit can be improved.

1 is a diagram schematically showing a configuration of a power supply device 100 according to an embodiment of the present disclosure.
FIG. 2 is a diagram showing an exemplary implementation circuit of the rectifying circuit portions 110a and 110b of FIG. 1.
FIG. 3 is a diagram showing an exemplary implementation circuit of the DC/DC converter units 120a and 120b of FIG. 1.
4 is a diagram illustrating exemplary implementation circuits of the constant voltage circuit unit 130 of FIG. 1.
5 is a diagram schematically showing a functional configuration of the circuit control unit 140 of FIG. 1.
6 is a diagram illustrating an exemplary implementation circuit of the half-bridge circuit unit 150 of FIG. 1.

Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. Hereinafter, when it is determined that there is a risk of unnecessarily obscuring the subject matter of the present disclosure, detailed descriptions of already known functions and configurations are omitted. In addition, it should be understood that the contents described below are only for one embodiment of the present disclosure, and the present disclosure is not limited thereto.

The terms used in this specification are only used to describe specific embodiments and are not intended to limit the present disclosure. For example, a component expressed as a singular should be understood as a concept including a plurality of components unless the context clearly refers to the singular. In addition, in the specification of the present disclosure, terms such as'include' or'have' are only intended to designate the existence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification. The use of the term is not intended to exclude the possibility of the presence or addition of one or more other features or numbers, steps, actions, components, parts or combinations thereof.

1 is a diagram schematically showing a configuration of a power supply device 100 according to an embodiment of the present disclosure. According to the drawing, the power supply device 100 includes two rectifying circuit parts 110a and 110b, two DC/DC converter parts 120a and 120b, a constant voltage circuit part 130, a circuit control part 140, and a half-bridge It includes a circuit unit 150.

According to an embodiment of the present disclosure, each of the rectifying circuit units 110a and 110b may receive an AC input voltage signal from a commercial AC power supply Vin. The rectifying circuit units 110a and 110b may rectify the input AC voltage signal Vin into a DC voltage signal. According to an embodiment of the present disclosure, the rectifying circuit units 110a and 110b may each include a bridge diode circuit. Although not specifically shown, the rectifying circuits 110a and 110b may also include smoothing capacitors to suppress ripple of the DC rectified voltage signal, respectively.

According to an embodiment of the present disclosure, the DC/DC converter units 120a and 120b are connected to corresponding rectifying circuit units 110a and 110b, respectively, to receive DC voltage signals output from the rectifying circuit units 110a and 110b. Can. As will be described later, each of the DC/DC converter units 120a and 120b is also connected to the circuit control unit 140, and can receive switching control signals from the circuit control unit 140, respectively, according to the received switching control signal. The switching elements are turned on/off to output a predetermined output voltage accordingly.

According to an embodiment of the present disclosure, as shown, the constant voltage circuit unit 130 may receive a commercial AC power supply Vin. The constant voltage circuit unit 130, although not specifically shown, may convert and output the voltage signal of the commercial AC power received above into a predetermined constant voltage DC signal through a transformer, a bridge diode circuit, and a predetermined voltage regulator. . The constant voltage DC signal from the constant voltage circuit unit 130 may be input to the circuit controller 140 at the rear stage. According to another embodiment of the present disclosure, instead of the voltage supply device 100 including a separate constant voltage circuit part, the circuit control part 140 receives the output from the rectifying circuit parts 110a and 110b and applies appropriate processing internally. It is possible to obtain a predetermined constant voltage DC signal.

According to an embodiment of the present disclosure, the circuit controller 140 generates and amplifies a PWM signal for switching control of each of the DC/DC converter units 120a and 120b, thereby amplifying each DC/DC converter unit 120a and 120b. Can be output as As illustrated, the circuit controller 140 may also receive output voltages from the DC/DC converter units 120a and 120b as feedback inputs. According to an embodiment of the present disclosure, the circuit control unit 140 may also receive a voltage signal from a load, which will be described later, as a feedback input. According to an embodiment of the present disclosure, the circuit controller 140 may generate a PWM signal for maintaining the constant voltage of each DC/DC converter unit 120a and 120b based on the received feedback input. According to an embodiment of the present disclosure, the circuit control unit 140 may generate and output each switching control signal of the half-bridge circuit unit 150 described below based on the received feedback input.

According to an embodiment of the present disclosure, the half-bridge circuit unit 150 may receive output voltages from the respective DC/DC converter units 120a and 120b. The half-bridge circuit unit 150 may also receive a switching control signal from the circuit control unit 140 as described above. The half-bridge circuit unit 150 may supply a bipolar pulse power to the load by selectively outputting voltage signals from the DC/DC converter units 120a and 120b according to the received switching control signal.

FIG. 2 is a diagram showing an exemplary implementation circuit of the rectifying circuit units 110a and 110b of FIG. 1. It should be understood that the circuit shown in this figure is one embodiment of the present disclosure, and the present disclosure is not limited thereto.

According to the drawing, the rectifying circuit units 110a and 110b may receive a commercial AC power supply Vin as an input signal. According to the drawing, the rectifying circuit units 110a and 110b may include a transformer circuit, and the voltage signal received through the transformer circuit may be stepped down to a predetermined voltage. The rectifying circuit units 110a and 110b may also include a bridge diode circuit, and may rectify the step-down voltage signal from the transformer circuit into a pulse voltage signal through the bridge diode circuit. The rectifying circuit portions 110a and 110b also include a capacitor and a resistor connected in parallel to the rear end of the bridge diode circuit, and the capacitor can be used to smooth the pulse voltage signal from the bridge diode. The resistor connected in parallel with the capacitor may be used to suppress and consume the discharge current in which charge accumulated in the capacitor is discharged when the power supply 100 is turned off. When the power supply device 100 is turned on or off, a large current (open/closed surge) may flow in the circuit by charging and discharging of the capacitor. According to an embodiment of the present disclosure, the rectifying circuit units 110a and 110b May include a safety device for suppressing the switching surge current connected in series between the bridge diode circuit and the capacitor. As shown, the safety devices may include triacs and resistors connected in parallel, respectively. For a certain period of time when the power supply 100 is turned on and a large surge current flows, the suppressed current flows through the resistor on the safety device to charge the capacitor. When charging is completed and the circuit enters a normal state, a pulse is applied to the gate terminal of the triac to turn it on, and accordingly, the current through the resistor becomes 0 and all currents can flow unrestrained through the triac. Although not specifically shown, the circuit control unit 140 may receive output voltage signals from the rectifying circuit units 110a and 110b, and generate a control signal for whether the triac is turned on based on the received signal. And output. According to an embodiment of the present disclosure, the capacity of the smoothing capacitor that can be disposed at each output terminal of the rectifying circuit units 110a and 110b is selected to be inversely proportional to the frequency of the pulse voltage signal and proportional to the magnitude of the current and the allowable voltage ripple. You can. According to one embodiment of the present disclosure, a resistor for suppressing discharge current, connected in parallel to a smoothing capacitor, may be selected to a sufficiently large value to minimize power consumption. According to an embodiment of the present disclosure, the received commercial AC power supply (Vin) signal may be converted into a predetermined DC voltage signal and output through the above-described circuit configuration.

3 is a diagram illustrating an exemplary implementation circuit of the DC/DC converter units 120a and 120b of FIG. 1. It should be understood that the circuit shown in this figure is one embodiment of the present disclosure, and the present disclosure is not limited thereto. Specifically, Figure 3 (a) is a diagram showing an exemplary circuit operation when the power switch of the DC / DC converter unit (120a, 120b) is on, Figure 3 (b) is a DC / DC converter unit It is a diagram showing an exemplary circuit operation when the power switch of (120a, 120b) is turned off.

According to an embodiment of the present disclosure, the DC/DC converter units 120a and 120b receive the smoothed DC voltage signal Vi from the rectifying circuit units 110a and 110b as an input signal and use a predetermined voltage signal. It may be a buck-boost converter that outputs by boosting or reducing pressure. The buck-boost converter is a circuit that outputs an input voltage signal at D/(1-D) times. When the D (Duty Ratio) is 0.5 or more, a boost is performed, and if it is less, a decompression is performed. As illustrated, the DC/DC converter units 120a and 120b may include a switching element S connected in series to the input voltage signal and a diode connected in parallel to the switching element S. According to an embodiment of the present disclosure, the DC/DC converter units 120a and 120b include an inductor L connected in series to a switching element, a capacitor C connected in parallel to the inductor L, and a diode D between the inductor L and the capacitor C. It can contain. According to an embodiment of the present disclosure, the switching element S may be an IGBT for high frequency and high power. According to an embodiment of the present disclosure, when the switching element S is turned on, the voltage Vs applied to the switching element S becomes 0 and the flowing current Is becomes IL. At this time, since the diode D is off, the current Id flowing through the diode D becomes 0 and the voltage Vd applied becomes Vi+Vo. At this time, since the positive voltage is applied to the inductor L, the current iL rises. According to an embodiment of the present disclosure, when the switching element S is turned off, the voltage Vs applied to the switching element S becomes Vi+Vo and the flowing current becomes Is. At this time, since the diode D is turned on, the current Id flowing through the diode D becomes IL, and the applied voltage Vd becomes 0. Here, since the negative voltage is applied to the inductor L, the current iL falls. According to an embodiment of the present disclosure, the diode D of the converter output stage may be a switching diode, and unlike a typical PN junction diode, it may be a diode including a solution for increasing the switching speed. It should be noted that according to one embodiment of the present disclosure, an RC snubber circuit may be added to the circuit to prevent the inductive voltage spike from occurring in the switching element and being destroyed.

According to an embodiment of the present disclosure, although not specifically illustrated, the DC/DC converter units 120a and 120b may receive a switching control signal for the switching element S from the circuit control unit 140. As will be described later, the circuit control unit 140 may include a digital signal processor and a driving IC, and the digital signal processor is a current output voltage (not specifically shown) from each of the DC/DC converter units 120a and 120b. However, it may be, for example, an output voltage measured through a voltage sensor or the like disposed on the output terminal capacitor C of each converter unit, and the present disclosure is not limited thereto). The digital signal processor can generate a PWM signal with a duty ratio to obtain a desired output voltage based on the received feedback input value. For example, the digital signal processor of the circuit control unit 140 may calculate a D value for maintaining a constant voltage through a PID code and change the PWM signal according to the calculated D value, thereby minimizing the overshoot in the transient state to minimize the circuit angle. The burden on the device can be reduced. The circuit control unit 140 may also amplify the PWM signal generated above through the driving IC and transmit it to the DC/DC converter units 120a and 120b as a switching control signal for the switching element S. There is an internal capacitance between the gate, drain, and source of the switching element S (e.g., IGBT element) and it can be turned on only when it is charged.The amplification (current amplification) of the PWM signal by the driving IC is turned on. The total heating value can be reduced by shortening the time and turn-off time and shortening the current flowing time. Usually, the maximum allowable current of a GPIO such as a digital signal processor is not sufficient to turn on and off the switching element S quickly enough. If it is not turned on or off quickly enough, it is impossible to maintain the operational reliability of the converter, and the possibility of heat generation of the switching element S and consequent decrease in efficiency and burnout increases. Therefore, it is important to design a driving IC for proper amplification of the PWM signal. According to one embodiment of the present disclosure, in order to minimize the possibility of modulation of the PWM waveform by the flux linkage, the driving IC output terminal of the circuit control unit 140 and the gate of the switching element S of the DC/DC converter circuit units 120a and 120b Alternatively, it may be desirable to minimize the distance to the base.

The inductor L of the DC/DC converter units 120a and 120b may function to store energy in the form of a magnetic field during the state in which the switching element S is turned on and then transfer energy (or current) to the load during the turn-off. have. According to an embodiment of the present disclosure, the greater the inductance of the inductor L, the more the current can be smoothed to have a constant value (DC). This is a principle similar to that of the output terminal capacitor C smoothing the voltage to a constant value, so it is necessary to determine the allowable maximum ripple according to the maximum used voltage and current, and calculate the capacitance and inductance values accordingly. According to an embodiment of the present disclosure, in order to minimize EMI (Electro Magnetic Interference) due to leakage flux, a Troidal coil may be used as the inductor L. In the case of capacitor C, a film capacitor can be used for high voltage, high frequency, and high capacity.

4 is a diagram illustrating exemplary implementation circuits of the constant voltage circuit unit 130 of FIG. 1. According to the drawing, the constant voltage circuit unit 130 may receive a commercial AC power AC as an input and decompress the input AC voltage signal to a predetermined voltage signal through a transformer. The constant voltage circuit unit 130 may also rectify the decompressed AC voltage signal into a pulsating voltage signal through a bridge diode circuit, and obtain and output a desired constant voltage signal using a voltage regulator (eg, 7820, 7833 regulator, etc.). have.

5 is a diagram schematically showing a functional configuration of the circuit control unit 140 of FIG. 1. As illustrated, the circuit control unit 140 may include a DC/DC converter driving control unit 510 and a half-bridge circuit driving control unit 520.

According to an embodiment of the present disclosure, the circuit control unit 140 may receive a constant voltage DC signal from the constant voltage circuit unit 130 as an operating power source of the circuit control unit 140. According to an embodiment of the present disclosure, the circuit control unit 140 may also receive respective feedback inputs from each output terminal of the DC/DC converter units 120a and 102b. The circuit control unit 140 may also receive a feedback input of an output voltage from a load at the rear end of the half-bridge circuit unit 150.

As illustrated, the DC/DC converter driving control unit 510 may include a digital signal processor 512 and a DC/DC converter driving IC 514. As described above, the feedback input input from each output terminal of the DC/DC converter units 120a and 102b and/or the feedback input input from the load may be input to the digital signal processor 512, and the digital signal processor 512 may be PWM signals for maintaining a constant voltage of each DC/DC converter unit 120a or 120b may be generated based on the received feedback inputs. The driving IC 514 may receive the PWM signal generated by the digital signal processor 512 and amplify and output the received PWM signal to be suitable for each switching control of the DC/DC converter units 120a and 120b. .

According to an embodiment of the present disclosure, the half-bridge circuit driving control unit 520 is driven for the half-bridge circuit unit 150 based on a user input from the outside and/or a feedback input received from the above-described load. Control signals can be generated. The half-bridge circuit unit 150 is configured to output a desired bipolar pulse voltage signal by controlling on/off of two switches, as described later. During a positive half cycle, the first switch is turned on and the second switch is It is turned off, and during the negative half cycle, the second switch is turned on and the second switch is turned off. When both the first and second switches of the half-bridge circuit unit 150 are turned on at the same time, the entire circuit becomes a short circuit with zero resistance, and there is a risk that a large current may flow and the circuit may be destroyed. The bridge circuit driving control unit 520 may operate to generate a predetermined dead time in which both switches of the half-bridge circuit unit 150 are turned off between a positive half cycle and a negative half cycle.

6 is a diagram showing an exemplary implementation circuit of the half-bridge circuit unit 150 of FIG. 1. It should be understood that the circuit shown in this figure is one embodiment of the present disclosure, and the present disclosure is not limited thereto. As illustrated, the half-bridge circuit unit 150 may include two power supply units and two switches (eg, IGBT switches) that respectively output a predetermined DC voltage signal.

According to an embodiment of the present disclosure, the power supply device 100 may include two power supplies. Each of the two power supplies receives a commercial AC power signal, converts it into a DC signal smoothed by a bridge diode, a capacitor, or the like, and converts the DC signal to a predetermined value using a DC/DC converter (for example, a buck-boost converter). It can be configured to convert the voltage step-up and step-down voltage signal. According to an embodiment of the present disclosure, the power supply device 100 includes a half-bridge circuit composed of two of the aforementioned power units and two switches (eg, IGBT), and turns on/off each switch of the half-bridge circuit Through control, a predetermined bipolar DC pulse power signal can be supplied to the load.

According to an embodiment of the present disclosure, generation of a switch on/off control signal for step-up or decompression of a DC/DC converter, each switch on/off control signal of a half-bridge circuit, or the like is software by a digital signal processor. Can be implemented as Therefore, there is an advantage that stable and fast control of the circuit is possible.

According to an embodiment of the present disclosure, for the part where the feedback input from the power supply circuit is connected to the digital signal processor of the circuit control unit, for electrical isolation, an optocoupler may be used, and the present disclosure is not limited thereto.

As will be appreciated by those skilled in the art, the present disclosure is not limited to the examples described herein, but may be variously modified, reconstructed, and replaced without departing from the scope of the present disclosure. For example, it should be understood that according to an embodiment of the present disclosure, there may be various criteria and methods for capturing and recording screen images, and the present invention is not limited to the above-described embodiments. For example, various techniques described herein can be implemented by hardware or software, or a combination of hardware and software.

Claims (2)

A power supply for supplying a bipolar pulsed DC voltage signal to a load,
Circuit control, and
A half-bridge circuit including two power supply units and two circuit switches,
Each of the two power supplies,
A rectifying circuit unit for receiving a commercial AC voltage signal and converting it into a predetermined DC voltage signal, and
DC/DC comprising a switch and configured to boost or decompress the DC voltage signal received from the rectifying circuit unit to a predetermined target DC voltage according to on/off control of the switch according to the first control signal from the circuit control unit Including a converter part,
The two circuit switches of the half-bridge circuit are controlled on/off according to a second control signal from the circuit control unit. The second control signal is controlled so that the two circuit switches are not turned on at the same time. , The power supply operates to output the bipolar pulsed DC voltage signal,
The circuit controller includes a digital signal processor, and through the digital signal processor, digital signal processing based on at least one of a feedback input from each of the DC/DC converter units, a feedback input from the load, and a user input. By performing, configured to generate the first control signal and the second control signal,
Power supply. According to claim 1,
The rectifying circuit unit includes a transformer, a bridge diode, and a smoothing capacitor connected in series, and connected in series between the bridge diode and the smoothing capacitor to open and close surge currents that may occur when the rectifying circuit is turned on or off. Safety device for restraining-the safety device further comprises a resistor and a triac connected in parallel-
The switches of each of the DC/DC converter units are IGBTs,
The digital signal processor of the circuit controller is configured to receive each feedback input by an opto coupler,
Power supply.

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