CN203550904U - Thickness measurement device - Google Patents
Thickness measurement device Download PDFInfo
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- CN203550904U CN203550904U CN201320609242.1U CN201320609242U CN203550904U CN 203550904 U CN203550904 U CN 203550904U CN 201320609242 U CN201320609242 U CN 201320609242U CN 203550904 U CN203550904 U CN 203550904U
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- thickness
- magnet
- sensing unit
- measurer
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Abstract
The utility model discloses a thickness measurement device which is characterized by comprising a sensing unit, a magnetic body, a connecting rod and a surface contact unit, wherein the sensing unit is located right above the magnetic body or at one side right above the magnetic body, comprises a sensing part and a corresponding circuit, and is used for measuring a component of a magnetic field of the magnetic body in a magnetic sensitive direction; the field intensity near the center of the top end of the magnetic body is uniformly distributed and is less; the connecting rod is connected with the magnetic body and the surface contact unit; the surface contact unit is contacted with a surface of an object under test, and is used for transforming the thickness variation of the surface of the object under test into the displacement of the magnetic body through the connecting rod. According to the thickness measurement device, the magnetic body is displaced by the thickness variation of the object under test through the surface contact unit via the connecting rod, and then the sensing unit detects the displacement variation of the magnetic body to measure the thickness of the object under test. The thickness measurement device has the advantages of accurate measurement, strong antijamming capability and simple structure.
Description
Technical field
The utility model relates to magnetic sensor technical field, particularly a kind of measurer for thickness that utilizes magnetic sensor to measure object thickness.
Background technology
In commercial production and daily life, conventionally to measure the surfaceness of workpiece and article and thickness, existing thickness measure mode has ultrasonic pulse reflection, the interference of light and laser displacement thickness measuring etc., different corresponding different technical characterstic and the ranges of application of measuring method.The precision of ultrasonic pulse reflection and laser displacement method is lower, and optical interferometry is only applicable to transparent film, and its volume is large and high to environmental requirement, should use inconvenience.We are not difficult to find out that existing method for measuring thickness can not meet industrial high precision and easy-to-use requirement.
The utility model provides a kind of measurer for thickness, and use magnetic sensor is sensitive element, has high precision, and easy-to-use feature can be measured roughness and the thickness of any nonmagnetic substance article.
Summary of the invention
The utility model object is to provide a kind of accurate, easy-to-use measurer for thickness of measuring.
The utility model for achieving the above object, adopts following technical scheme:
A kind of measurer for thickness, is characterized in that: comprise a sensing unit, a magnet, a connecting rod and a Surface Contact unit;
Described sensing unit be positioned at magnet directly over or the side directly over it, comprise sensing part and corresponding circuit, for measuring the component in its magnetic susceptibility direction upper magnet magnetic field;
Near field strength distribution field intensity even and that in the displacement range of its relative sensing unit, sensing unit the is applied center, top of described magnet can not make sensing unit reach capacity;
Described connecting rod connects magnet and Surface Contact unit;
Described Surface Contact unit contacts with determinand surface, for the variation in thickness on determinand surface is transformed into the displacement of magnet by connecting rod transmission.
It is further characterized in that: described Surface Contact unit comprises and not only comprise the non magnetic high-abrasive material of aciculiform, spheroid or pulley shape.
Further: the radius of described spheroid or pulley type Surface Contact unit is greater than the thickness of determinand.
Its further feature is also: described magnet comprises and not only comprise the hard ferrite material of microscler cylinder or microscler rectangular parallelepiped, or the Hard Magnetic metal material of sheet cylinder or sheet rectangular parallelepiped.
The shape that is shaped as central concave such as comprising hollow cylinder, hollow cubic body or groove type of described magnet.
Described sensing element comprises and not only comprises Hall element, anisotropic magnetoresistance element, giant magnetoresistance element or magnetic tunnel junction element.
The sensing part of described sensing unit is single resistance, half-bridge or the full bridge structure that one or more magneto-resistors form, and described magneto-resistor is in parallel or be composed in series by one or more magnetic sensor elements.
Preferred: the full-bridge of described magnetic sensor elements composition is gradient full-bridge.
Preferred: the position of described sensing unit and described magnet can be exchanged.
The utility model passes to magnet by Surface Contact unit by determinand variation in thickness, makes it produce displacement, and then the change in displacement of sensing unit detection magnet is measured determinand thickness.Have advantages of that measurement is accurate, antijamming capability is strong, simple in structure.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the first embodiment for measurer for thickness that provides of the utility model.
Fig. 2 is the schematic diagram of the second embodiment for measurer for thickness that provides of the utility model.
Fig. 3 is the schematic diagram of the third embodiment for measurer for thickness that provides of the utility model.
Fig. 4 is the curve of output schematic diagram of magnetoresistive element.
Fig. 5 is that schematic diagram is put in the position of the magneto-resistor of sensing unit.
Fig. 6 is the electrical connection schematic diagram of the magneto-resistor of sensing unit.
Fig. 7 is the curve of output schematic diagram of full-bridge type sensing unit.
Fig. 8 is a kind of magnet shape schematic diagram in the utility model.
Fig. 9 is the second magnet shape schematic diagram in the utility model.
Figure 10 is the field intensity map in the magnet center region of optimum in the present embodiment.
Embodiment
Below in conjunction with drawings and Examples, summary of the invention of the present utility model is further described.
As shown in Figure 1, the device for thickness measure that the present embodiment provides comprises sensing unit 11, magnet 12, L shaped connecting rod 13 and pulley 14.Described sensing unit 11 comprises sensing part and corresponding circuit.Sensing unit 11 be positioned at magnet 12 directly over or directly over a side, the magnetizing direction of magnet 12 is 31, the magnetic-field-sensitive direction of sensing unit 11 is 1, the magnetic field 32 that sensing unit 11 can be measured magnet 12 is along the component size in its magnetic-field-sensitive direction 1.When this measurement mechanism work, the Surface Contact of pulley 14 and determinand 21, determinand 21 is placed in along continuous straight runs on a standard platform and slides, pulley 14 is along with slight upper and lower displacement occurs in the out-of-flatness on determinand 21 surfaces, L shaped connecting rod 13 drives magnet 12 along with the upper and lower displacement of pulley 14, to produce take vertical direction as main displacement simultaneously, the relative position of magnet 13 and sensing unit 11 is also along with changing, its magnetic field 32 also changes along the component size in sensing unit 11 magnetic-field-sensitive directions 1 thereupon, the field intensity output electrical signals that sensing unit 11 changes by measurement, thereby we can obtain with the waveform that correction card is analyzed its output signal the surfaceness of determinand 21.For thickness measure, between determinand 21 and platform, there is a difference in height step, when determinand 21 passes through pulley 14, thereby can cause the relatively large displacement of pulley 14 to measure the thickness of determinand 21 by the height step between determinand 21 and platform.
The measurer for thickness that the utility model provides also can adopt the connecting rod of other two kinds of shapes.As shown in Figure 2, one end of microscler connecting rod 13 is pulley 14, the other end is magnet 12, pulley is along with rough surface and the determinand 21 of determinand 21 move up and down with the height step that platform forms, microscler connecting rod 13 drives magnet 12 that upper and lower displacement occurs simultaneously, 11 of sensing units are measured because the displacement of magnet 13 causes the variation of its magnetic field 32 along component in its magnetic-field-sensitive direction 1, thereby measure its surfaceness and thickness.The connecting rod that Fig. 3 adopts is that upper and lower displacement is changed into magnet 12 take horizontal direction as main displacement, and sensing unit 11 is measured magnet 12 again because change in displacement causes the component variation of its magnetic field along magnetic-field-sensitive direction 1.
First three pulley 14 of planting in embodiment is a kind of Surface Contact unit, except adopting pulley, also can adopt spherical or needle point structure.While adopting spherical and pulley shape, the diameter of pulley is greater than by the thickness of determinand, if adopt needle point structure, the power enough little (being generally a milligram power level) on contact measured thing 21 surfaces and movement velocity are wanted enough slow and determinand caused cut or causes the fracture of needle point avoiding.
In the utility model, the position of sensing unit 11 and magnet 12 can be exchanged simultaneously, and sensing unit 11 is connected with connecting rod 13 and with its motion, magnet 12 is positioned at fixing position.
Fig. 4 is the curve of output schematic diagram of magnetic resistance type (anisotropic magnetoresistance, giant magnetoresistance or magnetic tunnel-junction) magnetic sensor elements.Its electrical resistance outfield changes between its saturation field-Hs and Hs, and when the outfield applying is greater than the absolute value of its saturation field along the absolute value of the field intensity of sensitive direction, its resistance is constant.
The magnetic sensor elements of sensing unit 11 can adopt Hall element, anisotropic magnetoresistance element, giant magnetoresistance element or magnetic tunnel junction element.If employing Hall element transducing part is generally single electric resistance structure that discrete component forms, its curve of output is voltage-field curve, and saturation field is very large, and sensitivity and precision are lower.In the utility model, preferential selection is highly sensitive, and signal value is large, and saturation field is large, magnetic tunnel junction element low in energy consumption.Conventionally sensing unit 11 is placed in magnet 12 directly over or depart from directly over be positioned at one side.For the magnet 12 of cylindricality or rectangular structure, if its magnetizing direction is 31, its magnetic field 32 is distributed as sine wave in magnetic-field-sensitive direction 1, and along with sensing element 11 is away from magnet 12 centers, top, the field intensity in magnetic field 32 strengthens gradually, then reduces again.If sensing unit 11 is excessively far away within the specific limits apart from the center on magnet 12 tops, magnetic field 32 can make magnetic sensor elements reach capacity and cannot output voltage.Therefore for magnet 12, we require its field intensity (H)-position (R) curve (wherein R refers to the distance along magnetic-field-sensitive direction 1 to center, magnet top) near its center, top, to want enough little and mild, make magnet 12 in the scope that sensing unit 11 moves relatively, the magnetic field 32 that sensing unit 11 is applied can not cause sensing unit 11 saturated.Generally we can be by the shape caving in centered by magnet design, as hollow cylinder, hollow cubic body etc.The optimal selection that the magnet of the groove shapes shown in hollow cylinder and Fig. 9 is as shown in Figure 8 the present embodiment, its H-R curve as shown in figure 10.
The magnetic field 32 of control magnet 12 can also be chosen different materials by employing along the component size of magnetic-field-sensitive direction 1 and control according to demand, and for example the remanent magnetism of ferrite hard magnetic material is less, and its magnetic field is also less than normal, and ferrimagnet adopts longer shape.For SmCo or the large material of this class remanent magnetism of neodymium iron boron, also can be made chip shape to reduce the component size of its magnetic field along the magnetic-field-sensitive direction 1 of sensing unit.
Should be appreciated that the above detailed description of the technical solution of the utility model being carried out by preferred embodiment is illustrative and not restrictive.Those of ordinary skill in the art modifies reading the technical scheme that can record each embodiment on the basis of the utility model instructions, or part technical characterictic is wherein equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution depart from the spirit and scope of the each embodiment technical scheme of the utility model.
Claims (9)
1. a measurer for thickness, is characterized in that: comprise a sensing unit, a magnet, a connecting rod and a Surface Contact unit;
Described sensing unit be positioned at magnet directly over or the side directly over it, comprise sensing part and corresponding circuit, for measuring the component in its magnetic susceptibility direction upper magnet magnetic field;
Near field strength distribution field intensity even and that in the displacement range of its relative sensing unit, sensing unit the is applied center, top of described magnet can not make sensing unit reach capacity;
Described connecting rod connects magnet and Surface Contact unit;
Described Surface Contact unit contacts with determinand surface, for the variation in thickness on determinand surface is transformed into the displacement of magnet by connecting rod.
2. measurer for thickness as claimed in claim 1, is characterized in that: described Surface Contact unit comprises and not only comprise the non magnetic high-abrasive material of aciculiform, spheroid or pulley shape.
3. measurer for thickness as claimed in claim 2, is characterized in that: the radius of described spheroid or pulley type Surface Contact unit is greater than the thickness of determinand.
4. measurer for thickness as claimed in claim 1, is characterized in that: described magnet comprises and not only comprise the hard ferrite material of microscler cylinder or microscler rectangular parallelepiped, or the Hard Magnetic metal material of sheet cylinder or sheet rectangular parallelepiped.
5. measurer for thickness as claimed in claim 1, is characterized in that: the shape of described magnet comprises and not only comprise the shape of the central concave of hollow cylinder, hollow cubic body or groove type.
6. measurer for thickness as claimed in claim 1, is characterized in that: described sensing unit comprises and not only comprise Hall element, anisotropic magnetoresistance element, giant magnetoresistance element or magnetic tunnel junction element.
7. measurer for thickness as claimed in claim 1, it is characterized in that: the sensing part of described sensing unit is single resistance, half-bridge or the full bridge structure that one or more magneto-resistors form, described magneto-resistor is in parallel or be composed in series by one or more magnetic sensor elements.
8. measurer for thickness as claimed in claim 7, is characterized in that: the full-bridge of described magnetic sensor elements composition is gradient full-bridge.
9. measurer for thickness as claimed in claim 1, is characterized in that: the position of described sensing unit and described magnet is exchanged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320609242.1U CN203550904U (en) | 2013-09-29 | 2013-09-29 | Thickness measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320609242.1U CN203550904U (en) | 2013-09-29 | 2013-09-29 | Thickness measurement device |
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| Publication Number | Publication Date |
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| CN203550904U true CN203550904U (en) | 2014-04-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201320609242.1U Expired - Lifetime CN203550904U (en) | 2013-09-29 | 2013-09-29 | Thickness measurement device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103499271A (en) * | 2013-09-29 | 2014-01-08 | 无锡乐尔科技有限公司 | Thickness measurement device |
| CN108355910A (en) * | 2018-01-19 | 2018-08-03 | 苏州特米特自动化科技有限公司 | A kind of online automatic dispensing machine and gluing process |
-
2013
- 2013-09-29 CN CN201320609242.1U patent/CN203550904U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103499271A (en) * | 2013-09-29 | 2014-01-08 | 无锡乐尔科技有限公司 | Thickness measurement device |
| CN108355910A (en) * | 2018-01-19 | 2018-08-03 | 苏州特米特自动化科技有限公司 | A kind of online automatic dispensing machine and gluing process |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140416 |
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| CX01 | Expiry of patent term |