CN116625326B - High-linearity depth gauge for deep sea measurement - Google Patents
High-linearity depth gauge for deep sea measurement Download PDFInfo
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- CN116625326B CN116625326B CN202310891218.XA CN202310891218A CN116625326B CN 116625326 B CN116625326 B CN 116625326B CN 202310891218 A CN202310891218 A CN 202310891218A CN 116625326 B CN116625326 B CN 116625326B
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- 238000005259 measurement Methods 0.000 title claims abstract description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 33
- 239000003990 capacitor Substances 0.000 claims abstract description 6
- 230000008859 change Effects 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 6
- 230000035945 sensitivity Effects 0.000 claims description 4
- 238000001125 extrusion Methods 0.000 claims description 3
- 238000005452 bending Methods 0.000 claims 1
- 230000000295 complement effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C13/00—Surveying specially adapted to open water, e.g. sea, lake, river or canal
- G01C13/008—Surveying specially adapted to open water, e.g. sea, lake, river or canal measuring depth of open water
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
- G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
- G01F23/26—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring variations of capacity or inductance of capacitors or inductors arising from the presence of liquid or fluent solid material in the electric or electromagnetic fields
- G01F23/263—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring variations of capacity or inductance of capacitors or inductors arising from the presence of liquid or fluent solid material in the electric or electromagnetic fields by measuring variations in capacitance of capacitors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/30—Assessment of water resources
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Thermal Sciences (AREA)
- Fluid Mechanics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The application provides a high-linearity depth gauge for deep sea measurement, which comprises a supporting frame, a measuring device and a measuring device, wherein the supporting frame encloses a cylindrical cavity with two open ends; the two flexible electrodes are respectively covered and completely seal the openings at the two ends of the cavity, and the cavity is arranged in a vacuum state; the two flexible electrodes are separated to form a capacitor, at least one flexible electrode is used for sensing external water pressure to generate deformation, and a film-shaped insulating layer is adhered to one surface of the at least one flexible electrode, which is positioned in the cavity; the insulating layer comprises at least two units, wherein each unit comprises a central round unit and at least one round unit which is annularly arranged on the periphery of the central round unit and concentric with the central round unit, the dielectric constants of all the positions in any one unit are the same, and the dielectric constants of different units are different. The high-linearity depth gauge for deep sea measurement has extremely high linearity.
Description
Technical Field
The application belongs to the technical field of marine survey, and particularly relates to a high-linearity depth gauge for deep sea measurement.
Background
The measurement of ocean depths is of great significance for marine surveys in a manner that is commonly performed by selecting capacitive pressure sensors. In the related art, the capacitive pressure sensor comprises two electrodes which are oppositely arranged, the electrodes are driven to move through the vibrating diaphragm, the distance between the two electrodes is changed, capacitance signal change is formed, and the corresponding depth value can be obtained after the capacitance signal is processed. In the capacitive pressure sensor with the structure, the output capacitance is only in inverse proportion to the electrode spacing, so that the linearity of the capacitive pressure sensor with the structure is poor.
Therefore, it is necessary to provide a highly linear depth gauge for deep sea measurement to solve the above-mentioned problems in the background art.
Disclosure of Invention
The application provides a high-linearity depth gauge for deep sea measurement, which is characterized in that an insulating layer is divided into a plurality of units, dielectric constants of the different units are different, and the change of a capacitance signal is formed by the change of a contact area and a distance between capacitor electrodes in response to the change of water pressure, so that the linearity can be greatly improved, and the accuracy of the deep sea measurement is improved.
In order to solve the technical problems, the technical scheme of the application is as follows:
there is provided a highly linear depth gauge for deep sea measurement, comprising:
a support frame enclosing a cylindrical chamber with two open ends;
the two flexible electrodes are respectively covered and completely seal the openings at the two ends of the cavity, and the cavity is arranged in a vacuum state; the two flexible electrodes are separated to form a capacitor, at least one flexible electrode is used for sensing external water pressure to generate deformation, and a film-shaped insulating layer is adhered to one surface of the at least one flexible electrode, which is positioned in the cavity;
the insulating layer comprises at least two units, wherein each unit comprises a central round unit and at least one round unit which is annularly arranged on the periphery of the central round unit and concentric with the central round unit, the dielectric constants of all the positions in any one unit are the same, and the dielectric constants of different units are different.
Preferably, the high-linearity depth is a contact pressure sensor, and when the external pressure is equal to the critical pressure, the two flexible electrodes just contact but do not form mutual extrusion; when the external water pressure is smaller than the critical pressure, the two flexible electrodes are not contacted; when the external water pressure is greater than the critical pressure, the two flexible electrodes are contacted and mutually extruded.
Preferably, the critical pressure of the highly linear depth gauge is less than one standard atmospheric pressure.
Preferably, the flexible electrode comprises a deformation area and a fixing area, wherein the deformation area is opposite to the cavity, the fixing area is located on the periphery of the deformation area, the fixing area is fixed with the frame, the deformation area is used for sensing external water pressure to generate deformation, and the shape of the deformation area is identical to the cross section shape of the cavity.
Preferably, the center circle unit is taken as the 1 st unit, the plurality of ring units at the periphery of the central round unit are sequentially a 2 nd unit and a 3 rd unitIndividual units first->A unit of->Dielectric constant of individual units->Expressed as:
;
wherein ,；
in the formula ,representing the distance between any point on the insulating layer and the center point; />Representing the dielectric constant and +.>Is a theoretical functional relationship of (2); />Indicate->Inner diameter of individual units>Indicate->Outer diameter of individual units>When (I)>；/>Representing the sensitivity of the output capacitance of the contact portion when the two flexible electrodes are in contact; />Representing the radius of the chamber; />Representing the height of the chamber; />Representing the thickness of the insulating layer; />Represents the vacuum dielectric constant; and />The flexural rigidity, young's modulus, poisson's ratio and thickness of the deformation region are respectively expressed.
Preferably, the two flexible electrodes are used for sensing external water pressure to generate deformation, and the insulating layers are adhered to one surface of the two flexible electrodes, which is positioned in the cavity.
Preferably, one of the flexible electrodes is used for sensing deformation caused by external water pressure, the other flexible electrode is isolated from external water body through the substrate and is not influenced by the external water pressure, and the insulating layer is arranged on the flexible electrode connected with the substrate.
Preferably, the insulating layer and the central axis of the flexible electrode are positioned on the same straight line, and the radius of the insulating layer is smaller than that of the flexible electrode.
Preferably, the ring widths of the plurality of ring units are not equal, and the ring widths gradually increase from the inner side to the outer side to the middle.
The application provides a high-linearity depth gauge for deep sea measurement, which is characterized in that an insulating layer is divided into a plurality of units, dielectric constants of the different units are different, and a capacitance signal change is formed by the contact area and the interval change between capacitor electrodes in response to the water pressure change, so that the linearity can be greatly improved, and the accuracy of the deep sea measurement can be improved.
Drawings
FIG. 1 shows a schematic structure of a highly linear depth gauge according to the present application;
FIG. 2 is a schematic plan view of the insulating layer shown in FIG. 1;
FIG. 3 shows the theoretical dielectric constant of the insulating layer shown in FIG. 2After taking the logarithm, and->Is a relationship of (2);
FIG. 4 shows a state of use of the highly linear depth gauge shown in FIG. 1;
FIG. 5 shows a capacitance-pressure plot for the highly linear depth gauge shown in FIG. 1;
FIG. 6 is a graph showing the capacitance-pressure curve comparison of the highly linear depth gauge of FIG. 1 with a conventional depth gauge;
FIG. 7 is a schematic view of another highly linear depth gauge according to the present application;
FIG. 8 shows a state of use of the highly linear depth gauge shown in FIG. 7;
FIG. 9 shows a capacitance-pressure plot for the highly linear depth gauge shown in FIG. 7;
FIG. 10 shows a capacitance-pressure curve comparison of the highly linear depth gauge of FIG. 7 with a conventional depth gauge.
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
Referring to fig. 1-10 in combination, the present application provides a highly linear depth gauge 100 for deep sea measurement, comprising a support frame 10 and a flexible electrode 20.
The support frame 10 encloses a cylindrical chamber 11 open at both ends. The number of the flexible electrodes 20 is two, the two flexible electrodes 20 respectively cover and completely seal the openings at the two ends of the chamber 11, and the chamber 11 is in a vacuum state.
In the highly linear depth gauge 100, a flexible electrode is adopted to equivalently replace a combined structure of a vibrating diaphragm, a connecting piece and an electrode in a traditional pressure sensor, so that the whole structure is simpler. The flexible electrodes directly sense the external water pressure and deform under the action of the external water pressure, so that the capacitance between the two flexible electrodes 20 changes. In traditional non-contact pressure sensor, come the perception external water pressure through the vibrating diaphragm, the deformation of vibrating diaphragm needs to transmit to the electrode through corresponding connection structure for the deformation of vibrating diaphragm and the change of electric capacity do not directly produce the connection, and the influence of vibrating diaphragm to the electric capacity change still receives the connection structure between vibrating diaphragm and the polar plate. In the highly linear depth gauge 100 provided by the application, external water pressure directly acts on the flexible electrode, so that more sensitive pressure change can be obtained and the detection sensitivity can be improved compared with the traditional non-contact pressure sensor.
Further, the highly linear depth gauge 100 is a contact pressure sensor, that is, in the measurement process, contact can be made between the two flexible electrodes 20, and after contact, with the increase of the contact area, a change of capacitance can still be brought, so as to continue the measurement process.
The flexible electrode 20 includes a deformation region 21 opposite to the chamber 11 and a fixing region 22 located at the periphery of the deformation region 21, the fixing region 22 is fixed to the support frame 10, and the shape of the deformation region 21 is the same as the cross-sectional shape of the chamber 11, and is circular. In the use process, the deformation area 21 is used for sensing the external water pressure to generate deformation, so that the distance between the two flexible electrodes 20 is changed, and the capacitance is changed; the fixing region 22 serves only for the fixing action and is not deformed.
The highly linear depth gauge 100 includes the following states during use:
(1) Critical state: the external water pressure on the deformation zone 21 is equal to the critical pressure, and the two flexible electrodes 20 just contact, but do not generate extrusion;
(2) Low pressure state: the external water pressure on the deformation area 21 is smaller than the critical pressure, and the two flexible electrodes 20 are not contacted, so that a certain distance is kept;
(3) High pressure state: the deformation area 21 is subjected to external water pressure greater than critical pressure, and the two flexible electrodes 20 are contacted and extruded.
At least one of the flexible electrodes 20 is provided with a film-like insulating layer 30 on a surface thereof located in the chamber 11. It should be noted that, when the insulating layer 30 is not attached to the surface of the flexible electrode 20, the flexible electrode is a conductive electrode sheet, the two conductive electrode sheets are separated to form a capacitor, and when the insulating layer 30 is attached to the surface of the flexible electrode, that is, a double-layer structure including the conductive electrode sheet and the insulating layer is formed, when the two flexible electrodes are contacted, the two conductive electrode sheets are separated by the insulating layer, and are not contacted.
In the traditional non-contact pressure sensor, two electrodes are driven to move in parallel through a vibrating diaphragm, once the two electrodes are contacted, the distance between the two electrodes cannot change any more, the output capacitance of the whole sensor cannot change any more, and the pressure measurement threshold value of the sensor is reached. Therefore, to obtain a larger measurement range, the distance between the two electrodes needs to be increased, so that the electrodes obtain a larger variation stroke, which increases the volume of the sensor. In the present application, the flexible electrodes 20 directly deform, and since the degree of freedom of the central position of the flexible electrodes 20 is greater than that of the edge position, the deformation of the central position is greater than that of the edge position, so that the central positions of the two flexible electrodes 20 will contact first, and the area of the contact part will gradually increase with the increase of the measurement depth.
The insulating layer 30 comprises at least two units, wherein each unit comprises a central round unit 31 and at least one annular unit 32 which is arranged around the central round unit 31 and concentric with the central round unit 31, and the dielectric constants of all the units are the same; the dielectric constants of the different cells are different.
Taking the central round unit as the 1 st unit, the plurality of ring units at the periphery of the central round unit are sequentially a 2 nd unit and a 3 rd unitIndividual units first->A unit of->Dielectric constant of individual units->Expressed as:
;
wherein ,；
in the formula ,representing the distance between any point on the insulating layer and the center point; />Representing the dielectric constant and +.>Is a theoretical functional relationship of (2); />Indicate->Inner diameter of individual units>Indicate->Outer diameter of individual units>When (I)>；/>Representing the sensitivity of the output capacitance of the contact portion when the two flexible electrodes are in contact; />Representing the radius of the chamber; />Representing the height of the chamber; />Representing the thickness of the insulating layer; />Represents the vacuum dielectric constant; and />The flexural rigidity, young's modulus, poisson's ratio and thickness of the deformation region are respectively expressed.
After the two electrodes are in contact, the output capacitance of the highly linear depth gauge 100 includes two parts, one part being the output capacitance of the contact part and the other part being the output capacitance of the non-contact part. Due to the existence of stress, the flexible electrode 20 is easy to generate nonlinear change between the area of the contact part and the external water pressure during the deformation process, thereby causing nonlinear change between the capacitance of the contact part and the external environment, and the dielectric constants of different units of the insulating layer 30 are setIn the derivation of (2), deriving +.>And->And guiding the arrangement of dielectric constants of different units in the insulating layer 30 according to the function relationship, the nonlinearity of the capacitance of the contact part caused by the existence of stress can be well compensated, so that the output capacitance of the contact part can keep higher linearity with the external pressure. The distance between the non-contact parts is gradually reduced, the area of the non-contact parts is also gradually reduced, and the capacitance of the non-contact parts is increased firstlyRemains substantially unchanged after large due to +.>The capacitance-pressure curve of the non-contact portion has piecewise high linearity, and complements the variation trend of the capacitance-pressure curve of the contact portion, and the total capacitance output by the high linearity depth gauge 100 is the sum of the capacitance of the contact portion and the capacitance of the non-contact portion, so the high linearity depth gauge 100 provided by the application has high linearity.
Preferably, the insulating layer 30 is aligned with the central axis of the flexible electrode 20, and the radius of the insulating layer 30 is smaller than the radius of the flexible electrode 20. The edge position of the flexible electrode 20 has small deformation amount and small influence on the total capacitance change, so that the insulating layer 30 can be omitted from the position corresponding to the edge of the flexible electrode 20, thereby reducing the manufacturing cost of the high linearity depth gauge 100. Meanwhile, in order to ensure that the pole pieces of the two flexible electrodes 20 are not directly contacted in the use process of the high-linearity depth gauge 100, so that the short circuit is caused to damage the sensor, the radius of the insulating layer 30 is larger than the contact radius of the high-linearity depth gauge 100 when water pressure is acted on the range of the measuring range.
Due toThe two ends of the curve have a large trend and the middle has a small trend, so the ring widths of the plurality of ring units 32 are not equal, and the ring widths gradually increase from the inner side to the outer side to the middle, so that the high linearity depth gauge 100 has high linearity and simplifies the design flow of the insulating layer 30.
Referring to fig. 5-6, in an embodiment of the present application, two flexible electrodes 20 are used for sensing deformation caused by external water pressure, and the insulating layer 30 is attached to one surface of the two flexible electrodes 20 located in the chamber 11. As can be seen from fig. 5, the contact portion capacitance can maintain a high linearity, while the non-contact portion capacitance has a piecewise high linearity; as can be seen from fig. 6, the linearity of the present embodiment is 1.2% and that of the conventional depth gauge is 8.4% compared to the conventional depth gauge, and the present embodiment has higher linearity.
Referring to fig. 9 to 10, in another embodiment of the present application, one of the flexible electrodes 20 is used for sensing deformation of external water pressure, the other flexible electrode 20 is isolated from external water body by the substrate 40 and is not affected by external water pressure, and the insulating layer 30 is disposed on the flexible electrode 20 connected to the substrate 40. As can be seen from fig. 8, the contact portion capacitance can maintain a high linearity, while the non-contact portion capacitance has a piecewise high linearity; as can be seen from fig. 9, the linearity of the present embodiment is 1.8% and that of the ordinary depth gauge is 8.4% compared to the ordinary depth gauge, and the present embodiment has higher linearity.
The embodiments of the present application have been described above with reference to the accompanying drawings, but the present application is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those having ordinary skill in the art without departing from the spirit of the present application and the scope of the claims, which are to be protected by the present application.
Claims (5)
1. A highly linear depth gauge for deep sea measurement, comprising:
a support frame enclosing a cylindrical chamber with two open ends;
the two flexible electrodes are respectively covered and completely seal the openings at the two ends of the cavity, and the cavity is arranged in a vacuum state; the two flexible electrodes are separated to form a capacitor, at least one flexible electrode is used for sensing external water pressure to generate deformation, and a film-shaped insulating layer is adhered to one surface of the at least one flexible electrode, which is positioned in the cavity; the flexible electrode comprises a deformation area and a fixing area, wherein the deformation area is arranged opposite to the cavity, the fixing area is positioned at the periphery of the deformation area, the fixing area is fixed with the frame, the deformation area is used for sensing external water pressure to generate deformation, and the shape of the deformation area is the same as the cross section shape of the cavity;
the insulating layer comprises a central round unit and a plurality of round ring units which are annularly arranged on the periphery of the central round unit and concentric with the central round unit, the dielectric constants of all the positions in any one unit are the same, and the dielectric constants of different units are different; the ring widths of the plurality of ring units are unequal, and the ring widths gradually increase from the inner side to the outer side to the middle;
the high-linearity depth gauge is a contact type pressure sensor, and when the external pressure is equal to the critical pressure, the two flexible electrodes just contact but do not form mutual extrusion; when the external water pressure is smaller than the critical pressure, the two flexible electrodes are not contacted; when the external water pressure is greater than the critical pressure, the two flexible electrodes are contacted and mutually extruded;
taking the central round unit as the 1 st unit, the plurality of ring units at the periphery of the central round unit are sequentially a 2 nd unit and a 3 rd unitIndividual units first->A unit of->Dielectric constant of individual units->Expressed as:
；
wherein ,；
in the formula ,representing the distance between any point on the insulating layer and the center point; />Representing the dielectric constant and +.>Is a theoretical functional relationship of (2); />Indicate->Inner diameter of individual units>Indicate->Outer diameter of individual units>In the time-course of which the first and second contact surfaces,；/>representing the sensitivity of the output capacitance of the contact portion when the two flexible electrodes are in contact; />Representing the radius of the chamber; />Representing the height of the chamber; />Representing the thickness of the insulating layer; />Represents the vacuum dielectric constant; /> and />Respectively representing the bending rigidity, young modulus, poisson's ratio and thickness of the deformation region;
after the two electrodes are contacted, the output capacitance of the high-linearity depth gauge comprises two parts, wherein one part is the output capacitance of the contact part, the other part is the output capacitance of the non-contact part, and the non-contact part capacitance-pressure curve has piecewise high linearity and is complementary with the change trend of the capacitance-pressure curve of the contact part.
2. The highly linear depth gauge for deep sea measurement of claim 1 wherein the critical pressure of the highly linear depth gauge is less than one standard atmospheric pressure.
3. The high linearity depth gauge for deep sea measurement according to claim 1, wherein two flexible electrodes are used for sensing deformation caused by external water pressure, and one surface of the two flexible electrodes, which is positioned in the cavity, is stuck with the insulating layer.
4. The high linearity depth gauge for deep sea measurement according to claim 1, wherein one of the flexible electrodes is used for sensing deformation of external water pressure, the other flexible electrode is isolated from external water body by a substrate and is not influenced by external water pressure, and the insulating layer is arranged on the flexible electrode connected with the substrate.
5. The highly linear depth gauge for deep sea measurement of claim 1 wherein the insulating layer is co-linear with the central axis of the flexible electrode and the radius of the insulating layer is smaller than the radius of the flexible electrode.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310891218.XA CN116625326B (en) | 2023-07-20 | 2023-07-20 | High-linearity depth gauge for deep sea measurement |
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| CN202310891218.XA CN116625326B (en) | 2023-07-20 | 2023-07-20 | High-linearity depth gauge for deep sea measurement |
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