CN113155344B - Flexible electronic skin device with touch information perception function - Google Patents
Flexible electronic skin device with touch information perception function Download PDFInfo
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- CN113155344B CN113155344B CN202110098482.9A CN202110098482A CN113155344B CN 113155344 B CN113155344 B CN 113155344B CN 202110098482 A CN202110098482 A CN 202110098482A CN 113155344 B CN113155344 B CN 113155344B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
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Abstract
The invention discloses a flexible electronic skin device with a touch information perception function, which comprises a first substrate, a second substrate and a third substrate, wherein the first substrate is provided with a plurality of planar electrodes; a second substrate provided with a plurality of planar electrodes, wherein the ratio of the number of the planar electrodes on the first substrate to the number of the planar electrodes on the second substrate is 1:3; a dielectric layer disposed between the first substrate and the second substrate, the dielectric layer being a flexible elastomeric dielectric material; the temperature-sensitive thin-film resistor is elastic, covers the first substrate and serves as a contact layer when the flexible electronic skin device interacts with the environment, any one of the planar electrodes on the second substrate is partially overlapped with the three planar electrodes opposite to the first substrate on the first substrate to form a unit group, the unit group comprises three capacitors distributed in a shape like a Chinese character 'pin', and the flexible electronic skin device can detect the stress size and direction of the contact surface and the stress position, sense the temperature of a contact object or the environment and judge whether the surface contact object slides or not.
Description
Technical Field
The invention relates to the technical field of touch sensing, in particular to a flexible electronic skin device with a touch information sensing function.
Background
In recent years, with the advancement of science and technology, intelligent robot technology capable of interacting with human has been developed unprecedentedly. The perception capability is given to the robot, so that the robot can acquire external environment information like life species, and the key of the intelligent robot technology development is. The touch sense is one of the most important sensing abilities of a human body, and the human body is in contact with an external object through the skin to sense information such as texture, temperature and sliding of the object.
Current manipulators perceive little to no tactile information, as compared to the large amount of contact feedback available from the human hand. The film sensor which is fully flexible and has data processing capacity is covered on the surface of the robot, and the film sensor serves as the electronic skin of the robot to realize the human body-like touch function, so that the robot is endowed with more intelligent sensing capacity. The electronic skin covered on the surface of the robot can provide timely tactile feedback in the process of interaction between the electronic skin and the outside, and the sensing comprises information such as the magnitude and direction of acting force applied to the surface of the robot by an object, the stress position, the temperature of the surface of a contact object, the slippage of the object on a contact surface and the like. When a robot performs a grabbing task in an unstructured environment, accurate tactile feedback is critical to whether the grabbing task can be successfully completed. At the same time, the flexible electronic skin of the robot surface can also provide more reliable safety and comfort when it interacts with humans.
Disclosure of Invention
The invention aims to design a flexible electronic skin device with a touch information perception function, which can be covered on the surface of a robot to be used as an electronic skin to endow the robot with touch perception capability and integrates three-dimensional force signal detection, temperature detection and sliding touch perception functions.
The invention is realized by the following technical scheme: a flexible electronic skin device with tactile information perception function comprises
A first substrate provided with a plurality of planar electrodes;
a second substrate provided with a plurality of planar electrodes, wherein the ratio of the number of the planar electrodes on the first substrate to the number of the planar electrodes on the second substrate is 1;
a dielectric layer disposed between the first substrate and the second substrate, the dielectric layer being a flexible elastomeric dielectric material;
the temperature-sensitive thin-film resistor has elasticity, covers the first substrate and serves as a contact layer when the flexible electronic skin device interacts with the environment.
In order to further realize the invention, the following arrangement mode is adopted: the planar electrode on the first substrate is arranged between the dielectric layer and the setting surface of the first substrate, and the planar electrode on the second substrate is arranged between the dielectric layer and the setting surface of the second substrate.
The cross section of the flexible electronic skin device is observed from the side surface, and the flexible electronic skin device comprises a second substrate comprising a plurality of planar electrodes, a dielectric layer, a first substrate comprising a plurality of planar electrodes and a thin film temperature-sensitive resistor from bottom to top in sequence.
In order to further realize the invention, the following arrangement modes are adopted: any one of the planar electrodes on the second substrate is partially overlapped with the three planar electrodes opposite to the planar electrodes on the first substrate to form a unit group, and the unit group comprises three capacitors distributed in a shape like a Chinese character 'pin'; when the flexible electronic skin interacts with the outside, the relative change of three capacitors (also called three-dimensional force sensing unit group capacitors) forming one unit group (also called three-dimensional force sensing unit group) reflects the stress magnitude and direction at the position, and the position of the unit group generating signals reflects the position applied by stress (contact force); the resistance value of the temperature-sensitive film resistor at the unit group reflects the temperature information of the contact surface, the continuous wavelet transformation is carried out on the time domain signal curve with the changed resistance value to obtain the time frequency curve of the resistance signal, and whether the contact surface object slides or not can be judged by analyzing the time frequency curve.
When the flexible skin device is observed from the top, any one plane electrode in the first substrate positioned on the upper layer can be partially overlapped with three plane electrodes corresponding to the second substrate positioned on the lower layer, and the overlapped parts form three capacitors with the same size and are in a linear symmetrical 'pin' shape.
A "pin" overlapping portion forms a unit set, and all three planar electrodes on the second substrate in the unit set have partial areas beyond the overlapping area.
When a normal force perpendicular to the surface is applied on top of the flexible skin device, the three capacitances constituting the cell group increase in equal proportion.
When a shear force is applied on top of the flexible skin device, the three capacitance values constituting a group of cells are differentiated to increase or decrease.
When force in any direction is applied to the flexible skin device, the planar electrode at the stress position of the first substrate moves horizontally or vertically relative to the corresponding planar electrode in the second substrate, the direction and the size of the shearing force are reflected by measuring the change of the overlapping area of the planar electrodes in the first substrate and the second substrate, and the size of the normal force is reflected by measuring the change of the distance between the overlapping areas of the planar electrodes in the first substrate and the second substrate.
The position of the cell group where the signal change is detected is the position where the external force is applied.
In order to further realize the invention, the following arrangement mode is adopted: the temperature-sensitive thin-film resistor, the first substrate, the dielectric layer and the second substrate are all stretchable, the thicknesses of the first substrate and the second substrate are both larger than that of the temperature-sensitive thin-film resistor, and the Young modulus of the first substrate and the Young modulus of the second substrate are both larger than that of the temperature-sensitive thin-film resistor; and the dielectric layer has the largest thickness and the smallest Young modulus, so that the deformation caused by the action of external force can be concentrated to the greatest extent.
In order to further realize the invention, the following arrangement mode is adopted: the substrate materials of the first substrate and the second substrate are PDMS films formed by mixing and curing a main agent and a cross-linking agent in a mass ratio of 5; the planar electrode is prepared from a silver nanowire and graphene mixed material by adopting a template spraying method; the dielectric layer is a PDMS film which is prepared by mixing and curing a main agent and a cross-linking agent in a mass ratio of 20; the temperature-sensitive film resistor is prepared by mixing PEDOT, PSS (PH 1000) and graphene powder, and preferably, the temperature-sensitive film resistor is prepared by a mixed precursor composed of PEDOT, PSS (PH 1000) and graphene powder by a spraying method.
In order to further realize the invention, the following arrangement modes are adopted: the dielectric layer is internally provided with a porous structure, and the porous structure is formed by the following specific steps: when the dielectric layer is prepared, nano-scale to micron-scale soluble particles (such as salt, sugar and the like) are filled, and the dielectric layer is put into a corresponding solvent after being solidified to form a film, so that the filled soluble particles are removed, and the formed porous structure can be used for introducing air.
In order to further realize the invention, the following arrangement mode is adopted: the resistance value of the temperature-sensitive film resistor does not change obviously under the action of (uniform) pressure, and the resistance value is increased obviously under the action of tensile force.
The resistance of the temperature-sensitive thin-film resistor as the electronic skin contact surface decreases with increasing temperature.
When the temperature-sensitive film resistor is placed in the air, the temperature of the temperature-sensitive film resistor is consistent with the ambient temperature, and the measured resistance value can reflect the ambient temperature. When the temperature-sensitive film resistor is contacted with an external object, the temperature of the temperature-sensitive film resistor is gradually consistent with the surface temperature of the object under the action of heat convection, and the temperature of the contacted object can be reflected by measuring the change of the resistance value of the temperature-sensitive film resistor.
And performing continuous wavelet transformation on the resistance value change curve of the temperature-sensitive film resistor, and obtaining a time-frequency curve of the resistance signal according to a transformation result. The temperature-sensitive film resistor meets the condition that when an object on a contact surface is statically placed on the surface of the temperature-sensitive film resistor, namely the shearing force of the object on the contact surface is equal to the static friction force, a time-frequency curve of a resistance signal does not have a high-frequency signal.
When an object slides on the electronic skin contact surface, the tangential component of the acting force of the object on the contact surface is gradually larger than the maximum static friction force of the object and the contact surface, the numerical value of the surface friction force jumps at the moment of sliding, and obvious high-frequency signals appear on a time-frequency curve of a temperature-sensitive film resistor time-domain signal curve after continuous wavelet transform.
In order to further realize the invention, the following arrangement modes are adopted: the raised microstructures can be generated on the surfaces of the first substrate and the second substrate by adopting a template transfer method so as to increase the sensitivity of the microstructures under weak force.
In order to further realize the invention, the following arrangement modes are adopted: the template adopted by the template transfer printing method is a photoetching silicon template, frosted glass or silk fabric.
Compared with the prior art, the invention has the following advantages and beneficial effects:
when the electronic skin is in contact with an external object, the electronic skin can detect the magnitude and direction of the contact force, the stress position and the temperature of the surface of the object in real time, and can generate a slip signal feedback in time when the object slides on the surface of the electronic skin. The magnitude, the direction and the stress position of the contact force are realized by capacitors arranged in an array (delta-shaped) in a unit group, temperature and slippage signals are generated by a layer of flexible stretchable temperature-sensitive film resistor, time domain signals of the temperature-sensitive film resistor can reflect temperature changes under the condition of no external force action or static force action, continuous wavelet transformation is carried out on the time domain signals to obtain a time-frequency curve, and frequency components of the time-frequency curve can reflect whether a contact object on the surface of the electronic skin slips or not. .
The invention designs a flexible electronic skin device which can simultaneously sense the size and direction of three-dimensional force when contacting an external object, a stress position, a contact surface temperature and the slippage information of the object on the contact surface by combining a capacitance signal formed by the overlapping part of a planar electrode of a first substrate and a corresponding planar electrode of a second substrate, and a time domain signal and a frequency domain signal of a top layer temperature-sensitive film resistor. Compared with the prior similar invention, the invention has more comprehensive touch perception function, simple preparation method, low cost, no pollution in the preparation process and wide application prospect in the field of machine touch.
Drawings
FIG. 1 is an exploded view of the present invention.
Fig. 2 is a top plan view of the present invention.
FIG. 3 is a schematic cross-sectional view of the present invention.
Fig. 4 shows the change in capacitance of a three-dimensional set of force sensing cells when a tangential force in the positive x-axis direction is applied to the electronic skin contact surface.
FIG. 5 illustrates the change in capacitance of a three-dimensional set of force-sensing cells when a tangential force in the positive y-axis direction is applied to the electronic skin-contacting surface.
The temperature-sensitive thin film resistor comprises a 1-temperature-sensitive thin film resistor, a 2-first substrate, a 3-dielectric layer, a 4-second substrate and a 5-plane electrode.
Detailed Description
The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention.
In the description of the present invention, it is to be understood that the terms etc. indicate orientations or positional relationships based on those shown in the drawings only for the convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
It is worth noting that: in this application, when it is necessary to apply the known technology or the conventional technology in the field, the applicant may not specifically state what the known technology or/and the conventional technology is, but cannot specifically disclose the technology, and the application is considered not to be in compliance with the twenty-sixth third clause of the patent law.
The noun explains:
PDMS: polydimethylsiloxane.
PEDOT: PSS (PH 1000): poly 3, 4-ethylenedioxythiophene polystyrene sulfonate (type PH 1000).
Example 1:
a flexible electronic skin device with a touch information perception function is a flexible device which can be covered on the surface of a robot as an electronic skin to endow the robot with touch perception capability, integrates three-dimensional force signal detection, temperature detection and sliding touch perception functions, and particularly adopts the following arrangement modes as shown in figures 1 to 4: comprises that
A first substrate 2 provided with a plurality of planar electrodes 5;
a second substrate 4 provided with a plurality of planar electrodes 5, and the ratio of the number of planar electrodes 5 on the first substrate 2 to the number of planar electrodes 5 on the second substrate 4 is 1:3;
a dielectric layer 3 disposed between the first substrate 2 and the second substrate 4, the dielectric layer being a flexible and elastic dielectric material;
the temperature-sensitive thin-film resistor 1 has elasticity, covers the first substrate 2, and is used as a contact layer when the flexible electronic skin device interacts with the environment.
When the planar electrode is arranged, the planar electrode 5 on the first substrate 2 is arranged between the dielectric layer 3 and the arrangement surface of the first substrate 2, and the planar electrode 5 on the second substrate 4 is arranged between the dielectric layer 3 and the arrangement surface of the second substrate 4.
The cross section of the flexible electronic skin device is observed from the side, and the flexible electronic skin device comprises a second substrate comprising a plurality of planar electrodes, a dielectric layer, a first substrate comprising a plurality of planar electrodes and a thin-film temperature-sensitive resistor from bottom to top in sequence.
Example 2:
the present embodiment is further optimized based on the above embodiment, and the same parts as those in the foregoing technical solution will not be described herein again, as shown in fig. 1 to 4, in order to further better implement the present invention, the following setting manner is particularly adopted: any one of the planar electrodes 5 on the second substrate 4 is partially overlapped with the three planar electrodes 5 opposite to the planar electrodes on the first substrate 2 to form a unit group, and the unit group comprises three capacitors distributed in a shape like a Chinese character pin; when the flexible electronic skin interacts with the outside, the relative change of three capacitors (also called three-dimensional force sensing unit group capacitors) forming one unit group (also called three-dimensional force sensing unit group) reflects the stress magnitude and direction at the position, and the position of the unit group generating signals reflects the position applied by stress (contact force); the resistance value of the temperature-sensitive film resistor 1 at the unit group reflects the temperature information of the contact surface, continuous wavelet transformation is carried out on the time domain signal curve with the changed resistance value to obtain a time frequency curve of the resistance signal, and whether the contact surface object slides or not can be judged by analyzing the time frequency curve.
When the flexible skin device is observed from the top, any one of the planar electrodes 5 in the first substrate 2 on the upper layer can be partially overlapped with the three planar electrodes 5 corresponding to the second substrate 4 on the lower layer, and the overlapped parts form three capacitors with the same size and are in a linear symmetry shape like a Chinese character 'pin'.
One overlapping portion in the shape of a Chinese character 'pin' forms a unit group, and partial areas of three planar electrodes 5 positioned on the second substrate 4 in the unit group exceed the overlapping area.
When a normal force perpendicular to the surface is applied on top of the flexible skin device, the three capacitances that make up the cell group increase in equal proportion.
When a shear force is applied on top of the flexible skin device, the three capacitance values constituting a group of cells are differentiated to increase or decrease.
When a force in any direction is applied to the flexible skin device, the planar electrode 5 at the position where the first substrate 2 is stressed moves horizontally or vertically relative to the corresponding planar electrode 5 in the second substrate 4, the direction and the magnitude of the shearing force are reflected by measuring the change of the overlapping area of the planar electrodes 5 in the first substrate 2 and the second substrate 4, and the magnitude of the normal force is reflected by measuring the change of the distance between the overlapping areas of the planar electrodes 5 in the first substrate 2 and the second substrate 4.
The position of the cell group where the signal change is detected is the position where the external force is applied.
Example 3:
the present embodiment is further optimized based on any of the above embodiments, and the same parts as those in the foregoing technical solutions will not be described herein again, as shown in fig. 1 to fig. 4, in order to further implement the present invention, the following setting manner is particularly adopted: the temperature-sensitive thin film resistor 1, the first substrate 2, the dielectric layer 3 and the second substrate 4 are all stretchable, the thicknesses of the first substrate 2 and the second substrate 4 are both larger than that of the temperature-sensitive thin film resistor 1, and the Young modulus of the first substrate 2 and the Young modulus of the second substrate 4 are both larger than that of the temperature-sensitive thin film resistor 1; in the temperature-sensitive thin-film resistor 1, the first substrate 2, the dielectric layer 3 and the second substrate 4, the thickness of the dielectric layer 3 is the largest, the Young modulus is the smallest, and deformation caused by external force can be concentrated to the greatest extent.
Example 4:
the present embodiment is further optimized based on any of the above embodiments, and the same parts as those in the foregoing technical solutions will not be described herein again, as shown in fig. 1 to 4, in order to further better implement the present invention, the following setting modes are particularly adopted: the substrate materials of the first substrate 2 and the second substrate 4 are PDMS films formed by mixing and curing a main agent and a cross-linking agent 5 in a mass ratio of 1, preferably, the substrate materials of the first substrate 2 and the second substrate 4 are configured by a mass ratio of the main agent to the cross-linking agent of 5; the planar electrode 5 is prepared from a silver nanowire and graphene mixed material by adopting a template spraying method; the dielectric layer 3 is a PDMS film which is prepared by mixing and curing a main agent and a cross-linking agent in a mass ratio of 15-20; the temperature-sensitive thin film resistor 1 is prepared by mixing PEDOT (polyethylene glycol terephthalate): PSS (PH 1000) and graphene powder, and preferably, the temperature-sensitive thin film resistor 1 is prepared by a mixed precursor composed of PEDOT (polyethylene glycol terephthalate): PSS (PH 1000) and graphene powder through a spraying method.
Preferably, the dielectric layer 3 further has a porous structure inside, and the porous structure is specifically formed by: when the dielectric layer 3 is prepared, nano-scale to micro-scale soluble particles (such as salt, sugar, polystyrene microspheres and the like) are filled, and the solidified film is put into a corresponding solvent to remove the filled soluble particles, so that the formed porous structure can be used for introducing air and enhancing the force sensing performance of the electronic skin device.
Example 5:
the present embodiment is further optimized based on any of the above embodiments, and the same parts as those in the foregoing technical solutions will not be described herein again, as shown in fig. 1 to fig. 4, in order to further implement the present invention, the following setting manner is particularly adopted: the resistance value of the temperature-sensitive film resistor 1 does not change obviously under the action of (uniform) pressure, and the resistance value is increased (obviously) under the action of tensile force.
When the temperature-sensitive thin-film resistor is applied, when the electronic skin works under the action of external force, the temperature and the external force simultaneously affect the resistance value of the temperature-sensitive thin-film resistor 1, so that strain compensation needs to be performed on the resistance signal of the temperature-sensitive thin-film resistor 1 according to a capacitance signal generated by the delta-shaped unit group, and more accurate temperature information is obtained.
The resistance of the temperature-sensitive thin-film resistor as the electronic skin contact surface decreases with increasing temperature.
When the temperature-sensitive film resistor 1 is placed in the air, the temperature is consistent with the ambient temperature, and the measured resistance value can reflect the ambient temperature. When the temperature-sensitive film resistor 1 contacts with an external object, the temperature of the temperature-sensitive film resistor gradually accords with the surface temperature of the object under the action of heat convection, and the temperature of the contact object can be reflected by measuring the change of the resistance value of the temperature-sensitive film resistor.
And (3) performing Continuous Wavelet Transform (CWT) on the resistance value change curve (i.e. time domain signal) of the temperature-sensitive thin-film resistor 1, and obtaining a time-frequency curve of the resistance signal according to a transform result. The temperature-sensitive film resistor 1 meets the requirement that when an object on a contact surface is statically placed on the surface of the temperature-sensitive film resistor, namely the shearing force of the object on the contact surface is equal to the static friction force, a time-frequency curve of a resistance signal does not have a high-frequency signal.
Before the object slides on the electronic skin contact surface, the tangential component of the acting force of the object on the contact surface is gradually larger than the maximum static friction force of the object and the contact surface, the surface friction value jumps at the moment of sliding, and obvious high-frequency signals appear on a time-frequency curve of a time-domain signal curve of the temperature-sensitive film resistor 1 after Continuous Wavelet Transform (CWT).
Example 6:
the present embodiment is further optimized based on any of the above embodiments, and the same parts as those in the foregoing technical solutions will not be described herein again, as shown in fig. 1 to 4, in order to further better implement the present invention, the following setting modes are particularly adopted: the raised microstructures can be generated on the surfaces of the first substrate and the second substrate by adopting a template transfer method so as to increase the sensitivity of the microstructures under weak force.
The template adopted by the template transfer printing method is a photoetching silicon template, ground glass or silk fabric.
Example 7:
referring to the device structure diagram, the plan view and the cross section diagram shown in fig. 1 to 3, the flexible electronic skin device in the embodiment is composed of a second substrate 4 containing 27 planar electrodes 5, a first substrate 2 containing 9 planar electrodes 5, a dielectric substance (dielectric layer 3) arranged between the first substrate 2 and the second substrate 4, and a temperature-sensitive thin film resistor 1 arranged above the first substrate 2. Any one of the planar electrodes 5 in the first substrate and the corresponding three planar electrodes 5 in the second substrate 4 may form a three-dimensional force sensing unit group shaped like a Chinese character 'pin'. The temperature-sensitive thin-film resistor 1 is used as a contact layer of the flexible electronic skin and the outside, senses temperature information and judges whether an object in contact with the surface of the flexible electronic skin device slides on the surface.
The preparation process of the flexible electronic skin device comprises the following steps:
step 1: preparing one part of PDMS precursor with the mass ratio of the main agent to the cross-linking agent being 5.
Step 2: respectively preparing the two precursors into films and curing the films for 2 hours at the temperature of 80 ℃, wherein the precursors with the configuration ratio of 5; the precursor with the preparation ratio of 20 is prepared by adopting an injection molding method, and the formed film is thicker and is used as the dielectric layer 3;
and 3, step 3: depositing the mixed dispersion liquid of the silver nanowires and the graphene on the first substrate 2 and the second substrate 4 as a planar electrode 5 by adopting a template spraying method;
and 4, step 4: aligning the first substrate 2, the second substrate 4 and the dielectric layer 3 after the planar electrode 5 is deposited under a microscope, and attaching the two substrates by stamping;
and 5: PEDOT: PSS (PH 1000) and graphene (powder) were mixed at a ratio of 10:1, mixing and fully stirring to obtain a uniform dispersion liquid, and depositing the dispersion liquid above a first substrate 2 by a spraying method;
and 6: and (4) annealing the sample obtained in the step (5) at 160 ℃ for 2 hours to obtain the complete electric flexible electronic skin device.
Three assuming a three-dimensional force sensing unit setInitial capacitance values of the three-dimensional force sensing unit groups are respectively C1, C2 and C3, and under the action of any static external force, the change rates of the three capacitance values relative to the initial values are respectively delta C1, delta C2 and delta C3. By e 0 Denotes the vacuum dielectric constant,. Epsilon r The relative dielectric constant of the dielectric substance is represented, S represents the overlapping area of capacitor plates, d represents the distance between the plates, and the capacitance calculation formula is as follows:
when a certain unit group is acted by a force vertical to the surface of the electronic skin, three capacitances S forming the unit group are unchanged, d is reduced, so that the three capacitance values of the unit group are increased in equal proportion, wherein delta C1= delta C2= delta C3, and the Z direction is the moment; when a shear force in the positive x-axis direction is applied to the contact surface of the e-skin, as shown in fig. 4, C1 is unchanged, C2 is decreased, C3 is increased, δ C1=0, δ C2= - δ C3; when a force in the positive y-axis direction acts on the electronic skin surface, as shown in fig. 5, C1 increases, C2, C3 decreases, and δ C1= - δ C2= - δ C3; when a static force F (Fx, fy, fz) in any direction is applied to the electronic skin surface, the values of C1, C2, and C3 are respectively changed to C1', C2', and C3', and it can be inferred that the sensitivities (δ Fx, δ Fy, δ Fz) of the three-dimensional force sensing can be respectively expressed as:
therefore, the capacitance array composed of the first substrate 2, the second substrate 4 and the dielectric layer 3 can be used for sensing three-dimensional force information.
When an object is placed on the surface of the electronic skin statically, the temperature-sensitive thin-film resistor 1 of the contact surface outputs a resistance signal which changes along with the change of the surface temperature. When the shearing force applied by the object to the electronic skin contact surface is increased and gradually greater than the maximum static friction force, or the normal pressure is reduced, so that the maximum static friction force of the contact surface is gradually smaller than the shearing force applied by the object on the electronic skin contact surface, the object slides on the surface of the electronic skin. At the moment when the object is turned from a static state to a sliding state, high-frequency vibration occurs in the material of the temperature-sensitive thin-film resistor 1 due to sudden change of the surface shear force signal, and the output signal generates high-frequency vibration along with the high-frequency vibration. And (3) performing continuous wavelet transform on the resistance signal, wherein the sampling frequency can be 10kHz, and obtaining time-frequency information (time-frequency curve) of the resistance signal. A significantly higher high frequency signal than under static force can be observed at the instant before the slip occurs. Since the strain affects the resistance of the temperature-sensitive thin-film resistor 1, strain compensation must be performed on the temperature-sensitive resistor signal according to the response characteristics of the temperature-sensitive thin-film resistor 1 under different external forces when analyzing data. Therefore, the (elastic) thin-film temperature-sensitive resistor 1 is used as a contact surface of the electronic skin, and the time-domain signal and the time-frequency signal of the (elastic) thin-film temperature-sensitive resistor can be used for detecting temperature information of the contact surface and slippage information of an object on the surface of the electronic skin respectively.
Through the embodiment, the flexible electronic skin with the touch sensing function in the process of interacting with the outside can be applied to industrial intelligent manufacturing and medical services, such as intelligent operation, pathological diagnosis and the like.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and all simple modifications and equivalent variations of the above embodiments according to the technical spirit of the present invention are within the scope of the present invention.
Claims (7)
1. A flexible electronic skin device having a tactile information sensing function, comprising: comprises that
A first substrate (2) provided with a plurality of planar electrodes (5);
a second substrate (4) provided with a plurality of planar electrodes (5), and the ratio of the number of planar electrodes (5) on the first substrate (2) to the number of planar electrodes (5) on the second substrate (4) is 1:3;
the dielectric layer (3) is arranged between the first substrate (2) and the second substrate (4), the planar electrode (5) on the first substrate (2) is arranged between the dielectric layer (3) and the arrangement surface of the first substrate (2), and the planar electrode (5) on the second substrate (4) is arranged between the dielectric layer (3) and the arrangement surface of the second substrate (4);
the temperature-sensitive thin-film resistor (1) covers the first substrate (2) and is used as a contact layer when the flexible electronic skin device interacts with the environment;
any one of the planar electrodes (5) on the second substrate (4) is partially overlapped with the three planar electrodes (5) opposite to the planar electrodes on the first substrate (2) to form a unit group, and the unit group comprises three capacitors distributed in a shape like a Chinese character pin; when the flexible electronic skin interacts with the outside, the relative change of three capacitors forming a unit group reflects the stress magnitude and direction at the position, and the position of the unit group generating signals reflects the position applied by the stress; the resistance value of the temperature-sensitive thin-film resistor (1) reflects the temperature information of the contact surface, continuous wavelet transformation is carried out on a time domain signal curve with the change of the resistance value to obtain a time frequency curve of a resistance signal, and whether the contact surface object slides or not can be judged by analyzing the time frequency curve.
2. A flexible electronic skin device with a tactile information perception function according to claim 1, wherein: the temperature-sensitive thin film resistor (1), the first substrate (2), the dielectric layer (3) and the second substrate (4) are all stretchable, and the dielectric layer (3) is largest in thickness and smallest in Young modulus.
3. A flexible electronic skin device with a tactile information perception function according to claim 1, wherein: the substrate materials of the first substrate (2) and the second substrate (4) are taken as main agents and are mixed and cured with a cross-linking agent according to the mass ratio of (5); the planar electrode (5) is prepared from a silver nanowire and graphene mixed material by adopting a template spraying method; the dielectric layer (3) is a PDMS film which is generated by mixing a main agent and a cross-linking agent in a mass ratio of 15-20; the temperature-sensitive film resistor (1) is prepared by mixing PEDOT (PEDOT-PSS) (PH 1000) and graphene powder.
4. A flexible electronic dermatological device with tactile-information perceiving function according to claim 1, wherein: the dielectric layer (3) is internally provided with a porous structure, and the porous structure is formed by the following specific steps: and filling nano-scale to micron-scale soluble particles when the dielectric layer (3) is prepared, and putting the dielectric layer into a corresponding solvent after the dielectric layer is solidified into a film to remove the filled soluble particles, thus obtaining the dielectric layer.
5. A flexible electronic skin device with a tactile information perception function according to claim 1, wherein: the resistance value of the temperature-sensitive film resistor (1) is not obviously changed under the action of pressure, and is increased under the action of tensile force.
6. A flexible electronic dermatological device with tactile-information perceiving function according to claim 1, wherein: the raised microstructures can be formed on the surfaces of the first substrate and the second substrate by a template transfer printing method, so that the sensitivity of the microstructures under weak force can be improved.
7. A flexible electronic skin device with a tactile information perception function according to claim 6, wherein: the template adopted by the template transfer printing method is a photoetching silicon template, ground glass or silk fabric.
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| CN114136505A (en) * | 2021-12-09 | 2022-03-04 | 福州京东方光电科技有限公司 | Sensor, detection circuit thereof and electronic skin |
| CN114441461B (en) * | 2021-12-16 | 2024-04-02 | 之江实验室 | Proximity sense-contact sense sensor based on micro-nano optical fiber |
| CN114489338B (en) * | 2022-01-25 | 2024-03-29 | 同济大学 | Multilayer electronic skin structure |
| CN114536355B (en) * | 2022-01-26 | 2023-07-07 | 浙江大学 | Extensible reconfigurable multistage sensing flexible robot skin |
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