CN104215363A - Soft tactile-slip sensation composite sensing array based on pressure-sensitive conductive rubber - Google Patents
Soft tactile-slip sensation composite sensing array based on pressure-sensitive conductive rubber Download PDFInfo
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Abstract
The invention discloses a soft tactile-slip sensation composite sensing array based on the pressure-sensitive conductive rubber. The array comprises a soft electrode layer, a middle layer and a PDMS protruded layer of a top layer which are fitted to a substrate tightly from bottom to top. The middle layer comprises a conductive rubber arrays and soft fillers, and the conductive rubber arrays are composed of arrayed conductive rubber units; the soft electrode layer under the conductive rubber units is provided with test electrode groups, and the length of one conductive rubber unit is the same as one test electrode group of the soft electrode layer; the PDMS protruded layer is provided with nine micro boss structures which are distributed evenly in an arrayed manner and which correspond to the conductive rubber units and is located right above the conductive rubber units. By the aid of the array, the problem that the majority of tactile sensors cannot detect tactile and slip signals simultaneously is solved, the detection on three-dimensional force is implemented, slip signals can be identified and extracted simultaneously, and the soft tactile-slip sensation composite sensing array is applied to three-dimensional force and slip detection of artificial intelligent prosthesis and manipulators.
Description
Technical field
The present invention relates to a kind of composite sensing array, especially relate to a kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber in robot flexibility touch sensor field.
Background technology
Flexible touch sensation sensor is that Artificial intelligent prosthesis or robot obtain the indispensable means of extraneous contact information, according to the information that touch sensor provides, intelligent artificial limb or robot can carry out perception, to realize the stable crawl to target object to physical characteristicss such as the size of target object, shape, weight, soft or hard and surfacenesses.The motion of object on touch sensor causes the vibration of high-frequency short arc to be established, and it can detect and explain the slippage of object.Because great majority can only detect forward contact force based on the point contact type sense of touch tactility apparatus of pressure sensitive, accurately can not detect tangential force, the different of relative motion and power can not be picked out, thus the Slip Signal of high-frequency short arc in None-identified grasping body process.
Therefore, research has high sensitivity and high-resolution distributed flexible tactile and slip sense compound sensor, can conveniently be loaded on the body of artificial limb or robot irregular surface, accurately can detect the Slip Signal of three-dimensional contact force and high-frequency short arc simultaneously, the gordian technique of robot automtion research, significant to rehabilitation project field.
Sensor of the prior art adopts pressure-sensitive conductive rubber, there is certain flexibility, three-dimensional force can be detected, but there are four electrode structures of proposition, its follow-up data processing method is cumbersome, and conductive rubber array does not do the process of filling flexible thing, time stressed on flexure plane, easily destroy sensor construction.
China national patent of invention (publication number CN201210193314.9) discloses a kind of human emulated robot many fingers flexible 3 D force-touch sensor and three-dimensional force detection system thereof.This sensor adopts the pressure sensitive composite material Quantum Tunneling Composites(QTC with quantum tunneling effect), when QTC is not by natural compression, its body is insulator, and resistance is up to 1k; When QTC is subject to natural compression, body generation compression set, QTC presents conductive characteristic, and resistance diminishes gradually along with the increase of pressure.This sensor entirety has flexibility, can detect three-dimensional force.But this sensor electrical polar circuit is divided into two-layer up and down, easily damages circuit in long-term loading process, and do not embody the function detecting Slip Signal, be difficult to the demand meeting intelligent artificial limb or the control of robot motion feedback.
Summary of the invention
Can only positive force detection be carried out for most touch sensor and the problem of slippage cannot be detected simultaneously, the object of the invention is to propose a kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber, also be a kind of distributed flexible tactile and slip sense composite sensing array that simultaneously can detect three-dimensional force and slippage, solve the problem that most touch sensor can not detect contact force and Slip Signal simultaneously, can conveniently be loaded on the irregular surface of intelligent artificial limb or robot, for the detection of three-dimensional contact force and Slip Signal.
The technical solution used in the present invention is:
The present invention includes the PDMS convexity layer of the flexible electrode layer of the bottom fitted tightly from bottom to up, middle layer and top layer; The flexible filler that middle layer comprises conductive rubber array and is filled in around conductive rubber array, conductive rubber array is the array arranged by conductive rubber unit; Flexible electrode layer immediately below conductive rubber unit is provided with test electrode group, and test electrode group is identical with conductive rubber cellular array distribution mode, and conductive rubber unit is identical with the length of side of group test electrode group of in flexible electrode layer; PDMS convexity layer is provided with equally distributed nine the miniature boss structures of 3 × 3 arrays corresponding with each conductive rubber unit, and the array element of nine miniature boss structure formation is positioned at directly over each self-corresponding conductive rubber unit.
Described conductive rubber unit is square conductive sheet rubber.
Described conductive rubber array is bonded together formation by the flexible filler of normal temperature cure.
Described conductive rubber array is the array of more than 2 × 2.
The test electrode group of described flexible electrode layer is the array distribution of more than 2 × 2.
The group number of described test electrode group is identical with the conductive rubber unit number of conductive rubber array.
Described often group test electrode group is five electrode structures in square shape, and five electrode structures are made up of the square electrode of four the right-angle triangle electrodes and center thereof that are evenly distributed on corner, are in the square electrode at center as common electrode; Often all square electrode of row test electrode group are connected in series rear extraction pin by the lead-in wire of parallel routing mode, the right-angle triangle electrode being arranged in test electrode group position on same row identical is connected in series rear extraction pin by the lead-in wire of parallel routing mode, the capable test electrode group of M draws M pin by square electrode, and N row test electrode group draws 4N pin by right-angle triangle electrode.
The Inastomer conductive rubber that described conductive rubber array adopts Japanese INABA company to produce.
Described flexible electrode layer is double-sided flex circuit plate, adopts Kapton as base material.
The invention has the beneficial effects as follows:
(1) the flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber of the present invention can detect three-dimensional contact force.In addition, adopt Inastomer conductive rubber, there is excellent piezoresistive characteristic, lag performance and the linearity, have good presser sensor effect to slight vibration, the Slip Signal of high-frequency short arc can be detected.
(2) PDMS convexity layer is positioned at the outermost layer of tactile and slip sense composite sensing array; surface has micro-protrusions structure; and be filled with flexible filler in conductive rubber array surrounding; this kind of design effectively can improve the detection sensitivity of flexible tactile and slip sense composite sensing array, and the electrode of protection composite sensing array inside and lead-in wire.
(3) pressure-sensitive conductive rubber array and flexible electrode layer are single-contact; than the mechanism form of " double contact ", manufacturing process greatly simplifies, and contact face is pressure-sensitive conductive rubber face; can guard electrode layer effectively, effectively improve the working stability performance of composite sensing array.
(4) five distribution of electrodes structures of test electrode group in flexible electrode layer in the present invention, " four electrode structures " that propose compared to prior art, the Data processing method after signals collecting is simpler.
(5) electrode in the present invention in flexible electrode layer adopts the mode of grouping series conductor wire, and effectively reduce the external number of pin of touch sensor, the conductive rubber unit of design is square shape, and structure is simple, and be easy to manufacture, technique is simpler.
Accompanying drawing explanation
Fig. 1 is vertical view of the present invention.
Fig. 2 is tactile and slip sense composite sensing array cross section structure schematic diagram of the present invention.
Fig. 3 is flexible electrode layer schematic diagram of the present invention.
Fig. 4 is the conductive rubber array schematic diagram being filled with flexible filler around of the present invention.
Fig. 5 is the structural representation of tactile and slip sense composite sensing array element of the present invention.
Fig. 6 is test electrode schematic diagram of the present invention.
Fig. 7 is the test philosophy schematic diagram of tactile and slip sense composite sensing array element of the present invention.
Fig. 8 is PDMS convexity layer schematic diagram of the present invention.
In figure: 1.PDMS convexity layer, 2. conductive rubber array, 3. flexible filler, 4. flexible electrode layer, 5. miniature boss structure, 6. conductive rubber unit, 7. test electrode.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
As depicted in figs. 1 and 2, the present invention includes the PDMS convexity layer 1 of the flexible electrode layer 4 of the bottom fitted tightly from bottom to up, middle layer and top layer; As shown in Figure 3 and Figure 5, flexible electrode layer 4 immediately below conductive rubber unit 6 is provided with test electrode group 7, test electrode group 7 is identical with the array distribution mode of conductive rubber unit 6, and conductive rubber unit 6 is identical with the length of side of group test electrode group 7 of in flexible electrode layer 4; As shown in Figure 4, middle layer comprises conductive rubber array 2 and is filled in the flexible filler 3 around conductive rubber array 2, and conductive rubber array 2 is the arrays arranged by conductive rubber unit 6; As shown in Figure 5 and Figure 8, PDMS convexity layer 1 is provided with the array element that equally distributed nine the miniature boss structures of 3 × 3 arrays corresponding with each conductive rubber unit 65, nine miniature boss structures 5 are formed and is positioned at directly over each self-corresponding conductive rubber unit 6.
Conductive rubber unit 6 is square conductive sheet rubber.
Surrounding is filled with the conductive rubber array 2 of flexible filler 3, and the square conductive sheet rubber having identical excellent pressure-sensitive character by more than 2 × 2 is formed, and conductive rubber array 2 is bonded together formation by the flexible filler 3 of normal temperature cure.
Conductive rubber array 2 is the array of more than 2 × 2.The test electrode group 7 of flexible electrode layer 4 is the array distribution of more than 2 × 2.The group number of test electrode group 7 is identical with conductive rubber unit 6 number of conductive rubber array 2.
As shown in Figure 6 and Figure 7, test electrode group 7: often organize test electrode group 7 structure identical, be five electrode structures in square shape, five electrode structures are made up of the square electrode of four the right-angle triangle electrodes and center thereof that are evenly distributed on corner, are in the square electrode at center as common electrode; Often all square electrode of row test electrode group 7 are connected in series rear extraction pin by the lead-in wire of parallel routing mode, the right-angle triangle electrode being arranged in test electrode group 7 position on same row identical is connected in series rear extraction pin by the lead-in wire of parallel routing mode, the capable test electrode group 7 of M draws M pin by square electrode, N row test electrode group 7 draws 4N pin by right-angle triangle electrode, i.e. total M+4N pin in flexible electrode layer 4.
The Inastomer conductive rubber that conductive rubber array 2 preferably adopts Japanese INABA company to produce.The Inastomer conductive rubber of the pressure sensitive that the present invention adopts, has excellent piezoresistive characteristic, lag performance and the linearity, has good voltage-sensitive effect to slight vibration, can detect the Slip Signal of high-frequency short arc.Its principle of work is: when not stressing, and its body of conductive rubber is insulator, and resistance is up to several megohm; When being subject to ambient pressure effect, conductive rubber generation compression set, due to piezoresistive effect, the conducting particles of constricted zone closer to each other and the external world apply electric field force effect under produce tunnel current; With the continuous increase of ambient pressure, resistance value is reduced to several ohm gradually.
Flexible electrode layer 4 is double-sided flex circuit plate, adopts Kapton as base material.
Embodiments of the invention are as follows:
According to the demand of certain applications, as require spatial resolution, three-dimensional force range, transducer sensitivity, accuracy of detection, require the indexs such as diastrophic degree, determine the spacing between the size of the size of flexible tactile and slip sense composite sensing array, tactile and slip sense composite sensing array sensing unit and unit.The range of three-dimensional force and sensitivity are determined by the size of conductive rubber slice in tactile and slip sense composite sensing array sensing unit and the size of five electrode square structures and spacing.
As shown in Figure 3, the test electrode group 7 of the flexible electrode layer 4 of embodiment adopts the array distribution of 3 × 3, and namely flexible electrode layer 4 comprises nine groups of test electrode groups 7 and 15 terminal pins, adopts double-sided flex circuit plate to avoid the intersection gone between.Wherein, often organizing test electrode group 7 is five electrode structures, overall in square shape, is in the square electrode at center as common electrode, the central point line of the square electrode at four right-angle triangle electrodes and center is in 90 ° mutually, is evenly distributed on the corner of square electrode.The central electrode of three row is connected in series by the lead-in wire of flexible electrode layer 4 respectively, draws three pins of the genesis analysis of corresponding three row; Right-angle triangle electrode identical for three groups of test electrode group 7 positions be arranged on same row is connected in series by the lead-in wire of flexible electrode layer 4 respectively, draws 12 pins of the genesis analysis of corresponding three row; Flexible electrode layer 4 has 15 pins.The wire laying mode that in flexible electrode layer 4, each electrode is connected with each pin leads adopts parallel routing mode.
As shown in Figure 4, embodiment adopts the square conductive sheet rubber with pressure-sensitive character to be the distribution of 3x3 array.
Miniature boss structure 5 on the PDMS convexity layer 1 of embodiment is 9:1 with the number ratio of conductive rubber unit 6, forms equally distributed nine the miniature boss structures 5 of corresponding 3x3 array on each conductive rubber unit 6 as shown in Figure 8.
Manufacture the present invention's flexible tactile and slip sense composite sensing array, first by flexible circuit printing technology manufacturing flexible electrode layer 4, utilize screen printing technique to be spin-coated in the square electrode of flexible electrode layer 4 regularly by high-purity conductive silver glue; Then square conductive sheet rubber is pasted onto in square electrode; Then flexible filler 3 is filled into the blank position of flexible electrode layer 4, normal temperature cure is shaping; Finally be filled with being bonded in surrounding by die marks PDMS convexity layer 1 out on the conductive rubber array 2 of flexible filler 3.Like this, flexible tactile and slip sense composite sensing array as depicted in figs. 1 and 2 is just obtained.
Three-dimensional contact force of the present invention and slippage Cleaning Principle as follows:
As shown in Fig. 5, Fig. 6 and Fig. 7, power is conducted to conductive rubber unit 6 by the miniature boss structure 5 of flexible convex aliquation by the three-dimensional force of any direction, and the elastic deformation of the flexible filler 3 of surrounding is larger than conductive rubber unit 6.Due to the piezoresistive effect of conductive rubber unit 6 and the contact resistance between conductive rubber array 2 and flexible electrode layer 4, have four equivalent resistance R
1, R
2, R
3, R
4.When strain occurs conductive rubber unit 6, resistance will change.Four resistance export voltage signal corresponding with it through respective testing circuit respectively, are converted into three-dimensional force F by following principle
x, F
y, F
zmeasurement, thus obtain Arbitrary 3 D power.
As only F
xduring effect, because be subject to the compressive strain of equal extent, resistance R
1, R
4reduce; Because be subject to the tension of equal extent, resistance R
2, R
3increase, and resistance R
2, R
3increase amplitude and resistance R
1, R
4reduction amplitude is identical.Namely
As only F
yduring effect, because be subject to the compressive strain of equal extent, resistance R
1, R
2reduce; Because be subject to the tension of equal extent, resistance R
3, R
4increase, and resistance R
3, R
4increase amplitude and resistance R
1, R
2reduction amplitude is identical.
As only F
zduring effect, because be subject to the compressive strain of equal extent, resistance R
1, R
2, R
3, R
4reduce, and the amplitude of minimizing is identical.
According to above-mentioned analysis, the relation between three-dimensional force and four voltage dependent resistor (VDR) change in resistance can be derived.Test of many times obtains the change in resistance data of three-dimensional force and four voltage dependent resistor (VDR)s, obtains the linear relationship of the stressed of three-dimensional and the change in resistance of four voltage dependent resistor (VDR)s, thus accurately can measure the three-dimensional force of reality through linear decoupling zero.
In addition, the Inastomer conductive rubber adopted due to the present invention has excellent piezoresistive effect, and lag performance is low, and the linearity is high, can identify the Slip Signal of high-frequency short arc.After measuring three-dimensional force, by signal processing analysis horizontal tangential power, wavelet analysis is utilized to extract the slippage jump signal of the high-frequency short arc of horizontal direction, can determine whether fast slippage occurs, be applicable to robot and capture the size regulating grip force in article process, realize grip force mobile equilibrium.Compare with the existing three-dimensional force sensor based on conductive rubber, the sensitivity and degree of accuracy that three-dimensional force measured by the sensor designed by the present invention all improve more than 10%.
Above-mentioned embodiment is used for explaining and the present invention is described, instead of limits the invention, and in the protection domain of spirit of the present invention and claim, any amendment make the present invention and change, all fall into protection scope of the present invention.
Claims (9)
1. based on a flexible tactile and slip sense composite sensing array for pressure-sensitive conductive rubber, it is characterized in that: the PDMS convexity layer (1) comprising the flexible electrode layer (4) of the bottom fitted tightly from bottom to up, middle layer and top layer; Middle layer comprises conductive rubber array (2) and is filled in conductive rubber array (2) flexible filler (3) around, and conductive rubber array (2) is the array arranged by conductive rubber unit (6); Flexible electrode layer (4) immediately below conductive rubber unit (6) is provided with test electrode group (7), test electrode group (7) is identical with the array distribution mode of conductive rubber unit (6), and conductive rubber unit (6) is identical with the length of side of one group of test electrode group (7) in flexible electrode layer (4); PDMS convexity layer (1) is provided with equally distributed nine the miniature boss structures (5) of 3 × 3 arrays corresponding with each conductive rubber unit (6), and the array element that nine miniature boss structures (5) are formed is positioned at directly over each self-corresponding conductive rubber unit (6).
2. a kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber according to claim 1, is characterized in that: described conductive rubber unit (6) is square conductive sheet rubber.
3. a kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber according to claim 1, is characterized in that: described conductive rubber array (2) is bonded together formation by the flexible filler (3) of normal temperature cure.
4. a kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber according to claim 1, is characterized in that: described conductive rubber array (2) is the array of more than 2 × 2.
5. a kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber according to claim 1, is characterized in that: the test electrode group (7) of described flexible electrode layer (4) in more than 2 × 2 array distribution.
6. a kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber according to claim 1, is characterized in that: the group number of described test electrode group (7) is identical with conductive rubber unit (6) number of conductive rubber array (2).
7. according to the arbitrary described a kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber of claim 1 ~ 6, it is characterized in that: described often group test electrode group (7) is five electrode structures in square shape, five electrode structures are made up of the square electrode of four the right-angle triangle electrodes and center thereof that are evenly distributed on corner, are in the square electrode at center as common electrode; Often all square electrode of row test electrode group (7) are connected in series rear extraction pin by the lead-in wire of parallel routing mode, the right-angle triangle electrode being arranged in test electrode group (7) position on same row identical is connected in series rear extraction pin by the lead-in wire of parallel routing mode, the capable test electrode group (7) of M draws M pin by square electrode, and N row test electrode group (7) draws 4N pin by right-angle triangle electrode.
8., according to the arbitrary described a kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber of claim 1 ~ 6, it is characterized in that: the Inastomer conductive rubber that described conductive rubber array (2) adopts Japanese INABA company to produce.
9. according to the arbitrary described a kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber of claim 1 ~ 6, it is characterized in that: described flexible electrode layer (4) is double-sided flex circuit plate, adopt Kapton as base material.
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| CN105222702A (en) * | 2015-11-14 | 2016-01-06 | 际华三五一五皮革皮鞋有限公司 | Three dimensionality resistance-type curved surface sensor |
| CN106096591A (en) * | 2016-07-20 | 2016-11-09 | 四川东鼎里智信息技术有限责任公司 | Hand exercise signal acquiring system based on flexible circuit |
| CN106802200A (en) * | 2017-02-23 | 2017-06-06 | 北京航空航天大学 | A kind of flexible vector tactile and slip sense compound sensor |
| CN108178121A (en) * | 2018-02-07 | 2018-06-19 | 北京先通康桥医药科技有限公司 | Palaption probe and its manufacturing method |
| CN108613759A (en) * | 2018-05-03 | 2018-10-02 | 佛山琴笙科技有限公司 | A kind of touch sensor skin |
| CN108760095A (en) * | 2018-06-04 | 2018-11-06 | 重庆大学 | The method of flexible touch sensation sensor unit, sensor and its tactile distribution monitoring |
| CN111347445A (en) * | 2020-02-20 | 2020-06-30 | 安徽建筑大学 | Flexible touch sensor capable of detecting sliding touch force |
| CN111537115A (en) * | 2020-04-27 | 2020-08-14 | 西安交通大学 | Piezoresistive flexible three-dimensional force sensor array and preparation method thereof |
| CN112179410A (en) * | 2020-09-24 | 2021-01-05 | 之江实验室 | Multifunctional flexible touch sensor and preparation method thereof |
| CN112857630A (en) * | 2021-01-15 | 2021-05-28 | 之江实验室 | Three-dimensional convex flexible touch sensor of soft robot hand and manufacturing method |
| CN113155344A (en) * | 2021-01-25 | 2021-07-23 | 电子科技大学 | Flexible electronic skin device with touch information perception function |
| JP7295013B2 (en) | 2019-12-25 | 2023-06-20 | Ｎｉｓｓｈａ株式会社 | pressure detector |
| CN108178121B (en) * | 2018-02-07 | 2024-05-03 | 北京先通康桥医药科技有限公司 | Palpation probe and manufacturing method thereof |
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| CN105222702A (en) * | 2015-11-14 | 2016-01-06 | 际华三五一五皮革皮鞋有限公司 | Three dimensionality resistance-type curved surface sensor |
| CN106096591A (en) * | 2016-07-20 | 2016-11-09 | 四川东鼎里智信息技术有限责任公司 | Hand exercise signal acquiring system based on flexible circuit |
| CN106096591B (en) * | 2016-07-20 | 2019-04-16 | 四川东鼎里智信息技术有限责任公司 | Hand exercise signal acquiring system based on flexible circuit |
| CN106802200A (en) * | 2017-02-23 | 2017-06-06 | 北京航空航天大学 | A kind of flexible vector tactile and slip sense compound sensor |
| CN108178121A (en) * | 2018-02-07 | 2018-06-19 | 北京先通康桥医药科技有限公司 | Palaption probe and its manufacturing method |
| CN108178121B (en) * | 2018-02-07 | 2024-05-03 | 北京先通康桥医药科技有限公司 | Palpation probe and manufacturing method thereof |
| CN108613759A (en) * | 2018-05-03 | 2018-10-02 | 佛山琴笙科技有限公司 | A kind of touch sensor skin |
| CN108613759B (en) * | 2018-05-03 | 2020-06-02 | 湖南厚生医疗器械有限公司 | Touch sensor skin |
| CN108760095A (en) * | 2018-06-04 | 2018-11-06 | 重庆大学 | The method of flexible touch sensation sensor unit, sensor and its tactile distribution monitoring |
| CN108760095B (en) * | 2018-06-04 | 2020-07-03 | 重庆大学 | Flexible touch sensor unit, sensor and touch distribution monitoring method thereof |
| JP7295013B2 (en) | 2019-12-25 | 2023-06-20 | Ｎｉｓｓｈａ株式会社 | pressure detector |
| CN111347445A (en) * | 2020-02-20 | 2020-06-30 | 安徽建筑大学 | Flexible touch sensor capable of detecting sliding touch force |
| CN111537115A (en) * | 2020-04-27 | 2020-08-14 | 西安交通大学 | Piezoresistive flexible three-dimensional force sensor array and preparation method thereof |
| CN112179410B (en) * | 2020-09-24 | 2022-03-01 | 之江实验室 | Multifunctional flexible touch sensor and preparation method thereof |
| CN112179410A (en) * | 2020-09-24 | 2021-01-05 | 之江实验室 | Multifunctional flexible touch sensor and preparation method thereof |
| CN112857630A (en) * | 2021-01-15 | 2021-05-28 | 之江实验室 | Three-dimensional convex flexible touch sensor of soft robot hand and manufacturing method |
| CN113155344A (en) * | 2021-01-25 | 2021-07-23 | 电子科技大学 | Flexible electronic skin device with touch information perception function |
| CN113155344B (en) * | 2021-01-25 | 2022-10-18 | 电子科技大学 | Flexible electronic skin device with touch information perception function |
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