CN111048238B - Double-side conducting flexible electrode and preparation method and application thereof - Google Patents

Double-side conducting flexible electrode and preparation method and application thereof Download PDF

Info

Publication number
CN111048238B
CN111048238B CN201911131664.0A CN201911131664A CN111048238B CN 111048238 B CN111048238 B CN 111048238B CN 201911131664 A CN201911131664 A CN 201911131664A CN 111048238 B CN111048238 B CN 111048238B
Authority
CN
China
Prior art keywords
electrode
flexible
substrate
double
sided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201911131664.0A
Other languages
Chinese (zh)
Other versions
CN111048238A (en
Inventor
刘冉
周婉婷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Original Assignee
Tsinghua University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University filed Critical Tsinghua University
Priority to CN201911131664.0A priority Critical patent/CN111048238B/en
Publication of CN111048238A publication Critical patent/CN111048238A/en
Application granted granted Critical
Publication of CN111048238B publication Critical patent/CN111048238B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00—Electrotherapy; Circuits therefor
    • A61N1/02—Details
    • A61N1/04—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2503/00—Evaluating a particular growth phase or type of persons or animals
    • A61B2503/40—Animals
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02—Details of sensors specially adapted for in-vivo measurements
    • A61B2562/0209—Special features of electrodes classified in A61B5/24, A61B5/25, A61B5/283, A61B5/291, A61B5/296, A61B5/053
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
    • A61B2562/125—Manufacturing methods specially adapted for producing sensors for in-vivo measurements characterised by the manufacture of electrodes

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Animal Behavior & Ethology (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • Biomedical Technology (AREA)
  • General Health & Medical Sciences (AREA)
  • Surgery (AREA)
  • Molecular Biology (AREA)
  • Physics & Mathematics (AREA)
  • Medical Informatics (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Pathology (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)

Abstract

The invention discloses a double-sided conduction flexible electrode and a preparation method and application thereof. The double-sided conducting flexible electrode comprises a flexible substrate, an electrode and an electrode interface; the electrode and the electrode interface are arranged on the flexible substrate; wherein the electrode interfaces are disposed on both sides of one end of the flexible substrate. The preparation method comprises the following steps: preparing a single-side conducting electrode by a micro-processing method; and turning over a part of the electrode interface in the single-sided conducting electrode and the flexible base part where the part is positioned to the back of the single-sided conducting electrode in a folding mode to obtain the double-sided conducting flexible electrode. The invention has low cost, high stability and simple process, and can solve the problem of connection between the flexible electrode and subsequent circuits and equipment.

Description

Double-side conducting flexible electrode and preparation method and application thereof
Technical Field
The invention relates to a double-sided conduction flexible electrode and a preparation method and application thereof, belonging to the technical field of biological medicine preparation.
Background
Human body physiological information is an important index for evaluating physiological and psychological health states, and with the development of science and technology and the attention of people on health states, higher requirements are put forward on the accuracy, non-sensibility, continuity and intellectualization of human body information acquisition, and the comfortableness or even invisibility of a sensing peripheral is required. Traditional human signal acquisition equipment lets the user drag numerous wired, stereoplasm, not close to the skin medical monitoring equipment carry out each item and test, need coat electrically conductive gel between electrode and skin in the medical gel electrode use, and the long-time contact of gel and skin can lead to the skin allergy, and electrically conductive gel itself also can promote skin-electrode impedance because of the dehydration simultaneously, influences signal quality.
At present, a preparation scheme of the flexible electrode is internationally provided, and compared with the traditional electrode, the flexible electrode has the advantages of good fitting property, high comfort level, strong stability, long-term wearing and the like. The flexible electrode generally comprises a reticular metal conductive layer and an ultrathin substrate layer, due to the extremely low thickness, conformal fit with the skin can be realized, and meanwhile, the conductivity and stability of the electrode are ensured by the reticular structure. The medical device can be worn on a human body for a long time by matching with a substrate material with high biocompatibility, so that continuous and stable human body electric signal monitoring is realized. The electronic circuit adhered to the skin can be used to monitor the heart rate and muscle movements of the wearer, as with a conventional medical monitor, by attaching the electronic system to the face, forehead, nape, fingers, and by measuring the body signals at different locations respectively. However, the integrated device module at the rear end has large volume and high hardness, and is often difficult to match with the flexible electrode at the front end.
Since the electrode module needs to be in close contact with the skin, i.e. the conductive layer is between the skin and the flexible substrate, it cannot be directly connected to an external circuit. Therefore, a stable conductive interface is needed to conduct the electrical signals collected from the body surface to the outside of the substrate, so as to realize the connection with the external circuit. The main solution at present is to insert the lead directly into the skin and the middle part of the flexible sensor, which greatly reduces the advantages of lightness, thinness and insensitivity of the flexible device, affects the stability of the flexible device in contact with the human body, and affects the quality of the acquired signal. The flexible sensor has the advantages of complex double-sided conductive process, unstable performance and low feasibility in clinical use. In view of the above problems, there is a need for a flexible electrode interface design with simple process and convenient connection, which does not affect the good attachment between the electrode and the skin, and provides a stable connection for the subsequent circuit.
Disclosure of Invention
The invention aims to provide a double-side conduction flexible electrode which is high in stability and simple in process and can solve the problem of connection between the flexible electrode and subsequent circuits and equipment.
The invention provides a double-side conducting flexible electrode which comprises a flexible substrate, an electrode and an electrode interface, wherein the flexible substrate is provided with a plurality of through holes;
the electrode and the electrode interface are arranged on the flexible substrate;
wherein the electrode interfaces are disposed on both sides of one end of the flexible substrate.
In the above-mentioned double-sided conducting flexible electrode, the flexible substrate may be made of at least one flexible material selected from the following materials: silicone rubbers, copolyesters and hydrogels;
the silicone rubber may specifically include polydimethylsiloxane (abbreviated as PDMS in english) and/or silicone gel; the copolyester may specifically comprise polyethylene glycol based copolyester and/or cyclohexanediol; the hydrogel may specifically comprise polyvinyl alcohol;
the electrode comprises a bonding layer/electrode layer;
the bonding layer/electrode layer is a chromium/gold layer, and the thickness of the bonding layer/electrode layer is 30-70 nm/100-300 nm, and specifically can be 50nm/300 nm.
In the invention, the flexible substrate arranged at the electrode interface is arranged in a double-layer manner; the method is realized by the following steps: the electrode interface is arranged on one side of the flexible substrate, and then 1) a part of the electrode interface or 2) a part of the electrode interface and the flexible substrate part where the electrode interface is arranged are turned to the other side of the flexible substrate in a folding mode to realize that the electrode interface is arranged on two sides of one end of the flexible substrate.
The invention also provides a preparation method of the double-sided conducting flexible electrode, which comprises the following steps: preparing a single-side conducting electrode by a micro-processing method; and turning over a part of the electrode interface in the single-sided conducting electrode and the flexible base part where the part is positioned to the back of the single-sided conducting electrode in a folding mode to obtain the double-sided conducting flexible electrode.
In the preparation method, the preparation of the single-side conducting electrode by adopting a micro-processing method comprises the following steps:
1) cleaning the substrate by using deionized water;
2) pouring the polymethyl methacrylate anisole solution on a substrate, homogenizing, and then air-drying to obtain the substrate with a polymethyl methacrylate sacrificial layer;
3) uniformly coating a polyimide film on the polymethyl methacrylate sacrificial layer, and then heating to pre-cure and solidify the polyimide film to obtain a substrate with the polyimide film;
4) sputtering a chromium/gold layer on the surface of the polyimide film of the substrate with the polyimide film by adopting a metal magnetron sputtering method to serve as a bonding layer/an electrode layer to obtain the substrate with the electrode;
5) spin-coating photoresist on the substrate with the electrode, and then soft-baking;
6) carrying out contact exposure on the substrate processed in the step 5) by using a mask plate, and developing;
7) soaking the substrate with the electrode processed in the step 6) in a gold corrosive liquid, and patterning the gold layer; then soaking the chromium layer in a chromium corrosive liquid, and patterning the chromium layer; and finally, etching the polyimide film by adopting oxygen plasma for hollowing to obtain the single-side conducting electrode.
In the present invention, the developing solution may be a common developing solution known in the art, and specifically may be prepared by adding cold water to 1000 ml, and mixing with 750 ml of warm water (52 ═ 125.6 ° f), 2 g of 4-methylaminophenol sulfate, 100 g of anhydrous sodium sulfite, 5 g of hydroquinone, and 2 g of borax.
The metal magnetron sputtering method is carried out by adopting the conventional conditions known in the field;
the gold corrosive liquid is a common reagent known in the field, and specifically can be HCl and HNO with the mass ratio of 3:13Mixing to obtain the final product;
the chromium corrosion solution is a common reagent known in the field, and specifically can be KMnO with the mass ratio of 2:3:124NaOH and H2O is mixed to prepare;
the oxygen plasma etching is performed using conventional conditions well known in the art.
In the above preparation method, the substrate is a silicon wafer or a glass sheet;
in the step 2), the spin coating time can be 30-50 seconds, specifically 30 seconds, the rotating speed can be 500-1000 rpm, and the air drying time can be 30-60 minutes, specifically 30 minutes; the mass ratio of the polymethyl methacrylate to the anisole in the polymethyl methacrylate anisole solution is 5 to 10 percent;
in the step 3), the uniform coating time can be 30-60 seconds, specifically 60 seconds, and the rotating speed can be 2000-2500 rpm;
the heating temperature of the pre-curing can be 150-200 ℃, specifically 150 ℃, and the time can be 5-10 minutes, specifically 5 minutes; the heating temperature of the curing can be 200-250 ℃, particularly 210 ℃, and the time is 1-1.5 hours; the pre-curing is carried out on a hot plate, and the curing is carried out in an oven;
in the step 5), the rotation speed of the spin coating can be 3000-3500 rpm, specifically 3000 rpm, and the time can be 30-60 seconds, specifically 30 seconds;
the soft drying temperature can be 100-150 ℃, specifically 110 ℃, and the time can be 1-2 minutes, specifically 2 minutes.
In the invention, the polymethyl methacrylate is abbreviated as PMMA, and the polyimide is abbreviated as PI.
In the above preparation method, the step of folding a part of the electrode interface and the flexible substrate portion on which the electrode interface is located to the back of the single-sided conduction electrode is implemented by the following steps:
8) attaching a water soluble adhesive tape to the surface of the electrode of the single-side conducting electrode;
9) soaking and dissolving the polymethyl methacrylate sacrificial layer by using acetone or anisole to obtain a released electrode;
10) adhering the released electrode to the flexible substrate;
11) and folding the electrode interface part to the back of the flexible substrate, and then putting the flexible substrate into water to remove the water soluble adhesive tape, thereby obtaining the double-sided conducting flexible electrode.
In the preparation method, the time for soaking and dissolving in the step 8) can be 2-3 hours, specifically 2.5 hours.
In the present invention, the water soluble adhesive tape is a common water soluble adhesive tape known in the art.
In the above preparation method, the preparation of the flexible substrate comprises the following steps: and spin-coating 1-3 layers of the flexible material on a plastic sheet, and then drying in an oven to obtain the flexible substrate.
In the preparation method, when the flexible material is the silicone gel, the 1 st to 3 rd layers of the silicone gel are prepared by mixing the liquid A and the liquid B in a mass ratio of 1: 1-2, 1: 3-10 and 1: 1-2 in sequence; the mass ratio of the spin-coating three-layer liquid A to the spin-coating three-layer liquid B can be 1:1, 1:5 and 1: 1;
the rotating speed of the spin coating can be 1500-2500 rpm, the time can be 10-30 seconds, and specifically 10 seconds;
the drying time can be 30-40 minutes, specifically 30 minutes, and the temperature can be 60-90 ℃, specifically 80 ℃, 60-80 ℃, 80-90 ℃ or 70-90 ℃.
In the present invention, A, B solution in the silica gel is a common reagent known in the art.
The double-sided conduction flexible electrode is applied to the preparation of an electric signal measuring device;
wherein the electric signal measuring device is specifically applied to any one of the following 1) to 6);
1) a device for collecting physiological electrical signals of a human body; 2) a device for collecting physiological electrical signals of animals; 3) matching circuit electrodes; 4) an industrial electrode; 5) a medical electrode; 6) stimulating and/or energizing the electrodes.
The invention has the following advantages:
1. the electrode has good conductivity and stretchability, and meets the requirement of human body physiological signal acquisition; 2. the electrode adopts a folding process to solve the contradiction between the attachment of the flexible electrode and the skin and the connection with a subsequent circuit, and has the advantages of convenient use, repeated use, replaceable connecting circuit and the like; 3. the electrode realizes double-sided conduction of the flexible electrode by utilizing a single-layer micromachining process and a simple folding scheme, and has the advantages of low cost, high stability and simple process.
Drawings
Fig. 1 is a flow chart of the preparation of the double-side conducting flexible electrode of the present invention.
Fig. 2 is a schematic structural diagram of a double-sided conducting flexible electrode according to the present invention.
In FIG. 2, 11 the electrode interfaces of the double-sided conductive flexible front surface; 12 conducting electrodes on the front side of the flexible electrode on two sides; 13 conducting the flexible substrate on the front surface of the flexible electrode on two sides; 21 double-sided conducting flexible back electrode interface; 23 double-sided conducting the flexible substrate on the back of the flexible electrode.
Fig. 3 is a drawing illustrating the tensile test results of the double-sided conductive flexible electrode according to the present invention.
Fig. 4 is a graph showing the comparison result of the contact impedance between the double-sided conductive flexible electrode and the silver/silver chloride electrode according to the present invention.
The individual labels in FIG. 4 are as follows: 1 is the contact impedance of the double-sided conduction flexible electrode, 2 is the contact impedance of the double-sided conduction flexible electrode (3h), 3 is the contact impedance of the silver/silver chloride electrode, and 4 is the contact impedance of the silver/silver chloride electrode (3 h).
Detailed Description
The experimental procedures used in the following examples are all conventional procedures unless otherwise specified.
Materials, reagents and the like used in the following examples are commercially available unless otherwise specified.
Example 1 preparation of a double-sided conductive Flexible electrode
And preparing by a micromachining method, after obtaining the single-side conducting electrode, turning the interface part of the electrode to the back of the substrate in a folding mode, and obtaining the double-side conducting flexible electrode.
According to the scheme shown in figure 1, the specific preparation method is as follows:
the single-side conducting electrode is prepared by adopting a micro-processing method and comprises the following steps:
1. and cleaning the silicon wafer by using deionized water.
2. The PMMA (polymethyl methacrylate) anisole solution (7%) was poured onto a silicon wafer and homogenized (500 rpm, 30 seconds) and placed in a fume hood for air drying for 30 minutes.
3. A PI film (2000 rpm, 60 seconds) was applied uniformly over the PMMA sacrificial layer.
4. The PI film was pre-cured by placing the wafer on a hot plate at 150 ℃ for 5 minutes.
5. And (3) putting the silicon wafer into an oven at 210 ℃ to be heated for 1.5 hours to cure the PI film.
6. The surface of PI (polyimide) material is made by magnetron sputtering with metal (background vacuum degree is 4.5 × 10)- 4Pa，Sputtering gas pressure was 0.6Pa, sputtering current was 0.06A, sputtering voltage of chrome gold was 145V and 285V, respectively) chrome/gold layer having sputtering thickness of 50nm/300nm, respectively, was used as bonding layer/electrode layer.
7. Spin-on resist (3000 rpm, 30 seconds).
8. Soft-baking at 110 deg.C for 2 min.
9. The reticle is aligned to the substrate, contact exposed, and developed (917 MIF).
10. And soaking the electrode in a gold corrosive liquid to pattern the gold layer.
11. And soaking the electrode in a chromium corrosion solution, and patterning the chromium layer.
12. And etching the PI layer by using oxygen plasma (the flow rate of oxygen is 300mL/min, the flow rate of nitrogen is 300mL/min, the power is 300W, and the time is 12 minutes) to carry out hollowing so as to obtain the single-side conduction electrode.
The interface part of the electrode (II) is turned over to the back of the substrate in a folding mode, so that double-sided conduction of the single-sided conduction electrode is realized, and the steps are as follows:
1. and (3) attaching a water soluble adhesive tape to the surface of the electrode prepared by the micro-processing technology.
2. And soaking and dissolving the PMMA sacrificial layer for 2.5 hours by adopting acetone or anisole.
3. Respectively preparing silicon gel with the mass ratio of the solution A to the solution B being 1:1 and 1: 5.
4. Spin-coating three layers of silica gel (2500 rpm, 10 seconds) with the mass ratio of the solution A to the solution B being 1:1, 1:5 and 1:1 respectively on a plastic sheet, and drying in an oven at 80 ℃ for 30 minutes.
5. The released electrode is stuck on a flexible adhesive substrate (also called flexible substrate).
6. The interface portion of the electrode is folded over to the back of the flexible substrate.
7. The electrode is placed into water to dissolve the water soluble adhesive tape, so that the electrode is completely transferred to the flexible viscous substrate, and the double-sided conduction flexible electrode is obtained, namely the double-sided conduction flexible electrode, and the structure of the double-sided conduction flexible electrode is shown in figure 2.
Example 2 double-sided conduction Flexible electrode Performance test
The double-sided conductive flexible electrode (flexible electrode for short) prepared in embodiment 1 of the invention is subjected to performance tests, and the tests are respectively carried out on four aspects of stretchability, contact impedance, fitting property and waterproofness for human body physiological electrical signal acquisition.
1. Tensile test
The resistance change of the flexible electrode is tested by a universal stretching instrument when the flexible electrode is stretched, and the result is shown in figure 3, and the resistance value of the electrode is greatly increased between the stretching and 25-30% of the original length, so that the electrode is broken. The stretching rate of the human skin is within 20%, so that the electrode can well meet the requirement of human signal testing.
2. Contact resistance testing
The results of the human body impedance tests on the flexible electrode of the present invention and the conventional Ag/AgCl wet electrode are shown in FIG. 4. The specific method comprises the following steps: the flexible electrode and the Ag/AgCl electrode are respectively pasted on the forearm of a human body by 5cm, the P4000 impedance analyzer is adopted to record the electrode-skin impedance between the two electrodes, the scanning frequency is from 1000Hz to 10Hz, alternating voltages with different frequencies and the mean square value of 100mV are applied to the two electrodes, and 20 data are obtained. From fig. 4, the impedance difference between the Ag/AgCl electrode and the flexible electrode of the present invention is not much, but after 3 hours of application, the impedance of the Ag/AgCl electrode is increased due to the volatile impedance of the conductive adhesive, and the impedance of the flexible electrode of the present invention remains stable, thereby illustrating the electrical stability of the flexible electrode of the present invention in long-term electrical signal acquisition.
3. Test for adhesion and Water repellency
The fitting degree and the waterproof performance of the flexible electrode and the skin are tested, and the test result shows that the flexible electrode can keep good conformal fitting with the skin and perfectly follow the skin deformation under the condition of large deformation such as stretching, extrusion and the like after being applied to the skin.
Even if the pasted flexible electrode is directly placed under a water tap to be punched, the pasting conditions of the flexible electrode and the skin before and after wetting are kept consistent, and the fact that the flexible electrode has the waterproof and sweat-proof functions is proved to have important significance for long-term signal acquisition in the future.
Example 3 preparation of double-sided conductive Flexible electrode
The preparation method is the same as that of the embodiment 1, except that three layers of flexible material silicone gel are replaced in the step (II) in the embodiment 1; the step (ii) implemented in this embodiment is as follows:
the interface part of the electrode (II) is turned over to the back of the substrate in a folding mode, so that double-sided conduction of the single-sided conduction electrode is realized, and the steps are as follows:
1. and (3) attaching a water soluble adhesive tape to the surface of the electrode prepared by the micro-processing technology.
2. And soaking and dissolving the PMMA sacrificial layer for 2.5 hours by adopting acetone or anisole.
3. A silicone gel with a mass ratio of liquid A to liquid B of 1:1 was prepared, and a PDMS solution (mixture of PDMS and a curing agent in a mass ratio of 10: 1) was prepared.
4. Spin-coating three layers of silicone gel, PDMS and silicone gel (2500 rpm, 10 seconds) on a plastic sheet, and drying in an oven at 80 deg.C for 30 minutes.
5. The released electrode is stuck on a flexible adhesive substrate (also called flexible substrate).
6. The interface portion of the electrode is folded over to the back of the flexible substrate.
7. The electrode is placed into water to dissolve the water soluble adhesive tape, so that the electrode is completely transferred to the flexible viscous substrate, and the double-sided conduction flexible electrode is obtained, namely the double-sided conduction flexible electrode, and the structure of the double-sided conduction flexible electrode is shown in figure 2.
In this embodiment, the double-sided conductive flexible electrode prepared by the above method is similar to the performance test result of the double-sided conductive flexible electrode prepared in embodiment 1 of the present invention, and has good stretchability, contact resistance, adhesiveness, and water resistance.

Claims (12)

1. A double-sided conduction flexible electrode is characterized in that: the double-sided conducting flexible electrode comprises a flexible substrate, an electrode and an electrode interface;
the electrode and the electrode interface are arranged on the flexible substrate;
wherein the electrode interfaces are arranged on both sides of one end of the flexible substrate;
the double-sided conducting flexible electrode is prepared by the following steps:
preparing a single-side conducting electrode by a micro-processing method; and turning over a part of the electrode interface in the single-sided conducting electrode and the flexible base part where the part is positioned to the back of the single-sided conducting electrode in a folding mode to obtain the double-sided conducting flexible electrode.
2. The double-sided conductive flexible electrode according to claim 1, wherein: the flexible substrate is made of at least one flexible material selected from the following materials: silicone rubbers, copolyesters and hydrogels;
the electrode comprises a bonding layer/electrode layer;
the bonding layer/electrode layer is a chromium/gold layer, and the thickness of the bonding layer/electrode layer is 30-70 nm/100-300 nm.
3. The double-sided conductive flexible electrode according to claim 2, wherein: the silicone rubber comprises polydimethylsiloxane and/or silicone gel; the copolyester comprises polyethylene glycol-based copolyester and/or cyclohexanediol; the hydrogel comprises polyvinyl alcohol.
4. The method for preparing a double-sided conducting flexible electrode as claimed in any one of claims 1 to 3, comprising the steps of: preparing a single-side conducting electrode by a micro-processing method; and turning over a part of the electrode interface in the single-sided conducting electrode and the flexible base part where the part is positioned to the back of the single-sided conducting electrode in a folding mode to obtain the double-sided conducting flexible electrode.
5. The method of claim 4, wherein: the preparation method of the single-side conducting electrode by adopting a micro-processing method comprises the following steps:
1) cleaning the substrate by using deionized water;
2) pouring the polymethyl methacrylate anisole solution on a substrate, homogenizing, and then air-drying to obtain the substrate with a polymethyl methacrylate sacrificial layer;
3) uniformly coating a polyimide film on the polymethyl methacrylate sacrificial layer, and then heating to pre-cure and solidify the polyimide film to obtain a substrate with the polyimide film;
4) sputtering a chromium/gold layer on the surface of the polyimide film of the substrate with the polyimide film by adopting a metal magnetron sputtering method to serve as a bonding layer/an electrode layer to obtain the substrate with the electrode;
5) spin-coating photoresist on the substrate with the electrode, and then soft-baking;
6) carrying out contact exposure on the substrate processed in the step 5) by using a mask plate, and developing;
7) soaking the substrate with the electrode processed in the step 6) in a gold corrosive liquid, and patterning the gold layer; then soaking the chromium layer in a chromium corrosive liquid, and patterning the chromium layer; and finally, etching the polyimide film by adopting oxygen plasma for hollowing to obtain the single-side conducting electrode.
6. The method of claim 5, wherein: the substrate is a silicon wafer or a glass sheet;
in the step 2), the glue homogenizing time is 30-50 seconds, the rotating speed is 500-1000 rpm, and the air drying time is 30-60 minutes; the mass ratio of the polymethyl methacrylate to the anisole in the polymethyl methacrylate anisole solution is 5 to 10 percent;
in the step 3), the uniform coating time is 30-60 seconds, and the rotating speed is 2000-2500 rpm;
the heating temperature of the pre-curing is 150-200 ℃, and the time is 5-10 minutes; the heating temperature of the curing is 200-250 ℃, and the time is 1-1.5 hours;
in the step 5), the rotating speed of the spin coating is 3000-3500 rpm, and the time is 30-60 seconds;
the soft drying temperature is 100-150 ℃, and the time is 1-2 minutes.
7. The production method according to any one of claims 4 to 6, characterized in that: a part of the electrode interface and the flexible base part where the electrode interface is located are turned to the back of the single-side conducting electrode in a folding mode, and the method is realized through the following steps:
8) attaching a water soluble adhesive tape to the surface of the electrode of the single-side conducting electrode;
9) soaking and dissolving the polymethyl methacrylate sacrificial layer by using acetone or anisole to obtain a released electrode;
10) adhering the released electrode to the flexible substrate;
11) and folding the electrode interface part to the back of the flexible substrate, and then putting the flexible substrate into water to remove the water soluble adhesive tape, thereby obtaining the double-sided conducting flexible electrode.
8. The method of claim 7, wherein: the time for soaking and dissolving in the step 8) is 2-3 hours.
9. The method of claim 7, wherein: the preparation of the flexible substrate comprises the following steps: and spin-coating 1-3 layers of the flexible material on a plastic sheet, and then drying in an oven to obtain the flexible substrate.
10. The method of claim 9, wherein: when the flexible material is the silicon gel, the 1 st to 3 rd layers of the silicon gel are prepared by mixing liquid A and liquid B in a mass ratio of 1: 1-2, 1: 3-10 and 1: 1-2 in sequence;
the spin coating speed is 1500-2500 rpm, and the time is 10-30 seconds;
the drying time is 30-40 minutes, and the temperature is 60-90 ℃.
11. Use of a double-sided conducting flexible electrode according to any one of claims 1-3 in the preparation of an electrical signal measuring device.
12. Use according to claim 11, characterized in that: the use of the electrical signal measuring device as in any one of 1) to 6) below;
1) a device for collecting physiological electrical signals of a human body; 2) a device for collecting physiological electrical signals of animals; 3) matching circuit electrodes; 4) an industrial electrode; 5) a medical electrode; 6) stimulating and/or energizing the electrodes.
CN201911131664.0A 2019-11-19 2019-11-19 Double-side conducting flexible electrode and preparation method and application thereof Active CN111048238B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911131664.0A CN111048238B (en) 2019-11-19 2019-11-19 Double-side conducting flexible electrode and preparation method and application thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911131664.0A CN111048238B (en) 2019-11-19 2019-11-19 Double-side conducting flexible electrode and preparation method and application thereof

Publications (2)

Publication Number Publication Date
CN111048238A CN111048238A (en) 2020-04-21
CN111048238B true CN111048238B (en) 2021-01-12

Family

ID=70232165

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201911131664.0A Active CN111048238B (en) 2019-11-19 2019-11-19 Double-side conducting flexible electrode and preparation method and application thereof

Country Status (1)

Country Link
CN (1) CN111048238B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112641448B (en) * 2020-12-18 2023-02-24 浙江大学 Flexible magnetic compatible implanted electroencephalogram electrode array and preparation method thereof
CN113855322B (en) * 2021-09-22 2022-06-10 西安电子科技大学 Wireless fully-integrated flexible stretchable artificial larynx based on mechanical acoustics and preparation method thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101172185A (en) * 2007-09-21 2008-05-07 中国科学院上海微系统与信息技术研究所 Process for producing implantation type two-sided flexible tiny array electrode
CN104576965A (en) * 2014-12-29 2015-04-29 北京维信诺科技有限公司 Flexible display device capable of being electrically connected end to end and preparation method thereof
CN105552206A (en) * 2015-12-12 2016-05-04 西安交通大学 Manufacturing method of flexible implantable power supply based on infrared light remote charging
CN105640535A (en) * 2016-03-17 2016-06-08 镇江市高等专科学校 Organism surface electrical signal detecting electrode array

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000286518A (en) * 1999-03-29 2000-10-13 Sanyo Electric Co Ltd Header terminal provided at cof substrate
US8355768B2 (en) * 2007-12-17 2013-01-15 California Institute Of Technology Micromachined neural probes
CN109990926A (en) * 2013-11-28 2019-07-09 阪东化学株式会社 Sense piece and static capacity type sensor
CN204271144U (en) * 2014-12-29 2015-04-15 北京维信诺科技有限公司 A kind of flexible display apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101172185A (en) * 2007-09-21 2008-05-07 中国科学院上海微系统与信息技术研究所 Process for producing implantation type two-sided flexible tiny array electrode
CN104576965A (en) * 2014-12-29 2015-04-29 北京维信诺科技有限公司 Flexible display device capable of being electrically connected end to end and preparation method thereof
CN105552206A (en) * 2015-12-12 2016-05-04 西安交通大学 Manufacturing method of flexible implantable power supply based on infrared light remote charging
CN105640535A (en) * 2016-03-17 2016-06-08 镇江市高等专科学校 Organism surface electrical signal detecting electrode array

Also Published As

Publication number Publication date
CN111048238A (en) 2020-04-21

Similar Documents

Publication Publication Date Title
Zhuo et al. High sensitivity flexible capacitive pressure sensor using polydimethylsiloxane elastomer dielectric layer micro-structured by 3-D printed mold
Tang et al. Multilayered electronic transfer tattoo that can enable the crease amplification effect
Lee et al. Self-adhesive epidermal carbon nanotube electronics for tether-free long-term continuous recording of biosignals
CN109077713B (en) Preparation method of human epidermis physiological electrode sensor
CN111048238B (en) Double-side conducting flexible electrode and preparation method and application thereof
US9816882B2 (en) Electronic skin, preparation method and use thereof
Jeong et al. Capacitive Epidermal Electronics for Electrically Safe, Long–Term Electrophysiological Measurements
CN104523368B (en) A kind of wearable flexible electronic adhesive bandage and human health detection system
CN103462601B (en) Electrode for medical service pastes and preparation method thereof
CN109044326B (en) Printing technology-based fully-flexible dry electrode and preparation method thereof
Wang et al. Stretchable, multifunctional epidermal sensor patch for surface electromyography and strain measurements
CN107941386A (en) Flexible force-touch sensor, sensing element based on transparent organism material and preparation method thereof
CN109770866B (en) Preparation method of high-sensitivity electronic skin
CN108332887A (en) A kind of flexibility stress sensor
Zheng et al. Large area solution processed poly (dimethylsiloxane)-based thin film sensor patch for wearable electrocardiogram detection
CN104706335A (en) Application of electronic skin to pulse detection and pulse detection system and method
CN204364227U (en) A kind of wearable flexible electronic adhesive bandage and human health detection system
Zhou et al. Nano foldaway skin-like E-interface for detecting human bioelectrical signals
CN112587140B (en) Self-attaching bionic octopus sucking disc micro-nano structure dry electrode
CN111789575B (en) Flexible skin electrochemical sensor based on polymer support
CN113218296A (en) Elastic strain sensor and preparation method thereof
CN204863062U (en) A flexible sensor and speculum robot for speculum robot
TWI234449B (en) A electrocardiogram measuring device and its method
CN113171094B (en) Flexible detection circuit for human body emotional state information, preparation method and integrated system
Lu et al. Stretchability, conformability, and low-cost manufacture of epidermal sensors

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant