CN108332887A - A kind of flexibility stress sensor - Google Patents
A kind of flexibility stress sensor Download PDFInfo
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- CN108332887A CN108332887A CN201810396657.2A CN201810396657A CN108332887A CN 108332887 A CN108332887 A CN 108332887A CN 201810396657 A CN201810396657 A CN 201810396657A CN 108332887 A CN108332887 A CN 108332887A
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- 239000004205 dimethyl polysiloxane Substances 0.000 claims abstract description 51
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims abstract description 51
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims abstract description 51
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims abstract description 51
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims abstract description 51
- 150000001875 compounds Chemical class 0.000 claims abstract description 40
- 229910021389 graphene Inorganic materials 0.000 claims abstract description 40
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 31
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- 238000002360 preparation method Methods 0.000 claims description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 7
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- 230000035945 sensitivity Effects 0.000 abstract description 9
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M11/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising
- D06M11/73—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with carbon or compounds thereof
- D06M11/74—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with carbon or compounds thereof with carbon or graphite; with carbides; with graphitic acids or their salts
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
The present invention is a kind of flexibility stress sensor.The sensor includes two sensory packages；Each sensory package includes PDMS adherent bases bottom and the compound nethike embrane conductive layer of covering yarn graphene, and the basal layer is formed a film and obtained after solidification by the spin coating of PDMS prepolymers or drop coating；The compound nethike embrane conductive layer of the covering yarn graphene is to be assembled in the covering yarn skeleton by graphene dispersing solution and obtained；Two sensory package fittings, wherein the side of the compound nethike embrane conductive layer of covering yarn graphene is bonded, and is located at centre, and flexibility stress sensor forms " sandwich " structure；The compound nethike embrane conductive layer of covering yarn graphene of each sensor module is all connected with a conducting wire.The significant increase of the present invention sensitivity of sensor reduces detection limit.
Description
Technical field
The present invention relates to flexibility stress sensor fields, and in particular to a kind of stress based on covering yarn-graphene nethike embrane
The preparation method of sensor.
Background technology
With the high speed development of artificial intelligence and popularizing for intelligent terminal, wearable electronic shows huge market
Foreground.Core of the flexibility stress sensor as artificial flexible electronic device in human clinical's diagnosis, health evaluating, is good for
It is latent that the fields such as health monitoring, virtual electronic, flexible touch screen, flexible electronic skin, or even industrial robot possess prodigious application
Power.
Currently, the main way of manufacture strain transducer is the variation that the deformation of sensor is changed into resistance value, that is, press
Resistor-type strain gauge.The more common preparation method of one of which is in one layer of conduction of the insertion of flexible substrates surface or covering
Material obtains the strain transducer of multilayered structure.Conductive material can be that metal film or electrical-conductive nanometer material pass through various techniques
Assembling obtains conductive film.Graphene is most thin and most hard nano material in the world at present, and resistivity is extremely low, electron transfer
Speed is exceedingly fast.Before unique two-dimensional structure and excellent electric conductivity make graphene show greatly to apply in stress sensing field
Scape.
Traditional base material be surfacing elastic film, as Polymethyl methacrylate (PDMS),
The conductive layer of Ecoflex, Dragon skin, rubber etc., surface insertion or covering is also planar structure.This planar structure
Sensor generally existing sensitivity it is not high enough, it is difficult to the shortcomings that detecting miniature deformation, limit its development and application.Therefore,
There is an urgent need to a kind of high sensitivity, while the novel strain gauge of preparation process simplicity.
Invention content
The purpose of the present invention is to provide a kind of novel high-performance flexibility stress sensing for deficiency existing for current techniques
Device.The sensor substitutes traditional planar structure material using compound nethike embrane as conductive layer, by restoring two-dimensional layer
Graphene (RGO) is coated on covering yarn surface, obtains conductive compound nethike embrane.Significant increase of the present invention sensor it is sensitive
Degree reduces detection limit.
The technical scheme is that：
A kind of flexibility stress sensor, including two sensory packages；Each sensory package include PDMS adherent bases bottom and
The compound nethike embrane conductive layer of covering yarn-graphene, the basal layer be by the spin coating of PDMS prepolymers or drop coating, form a film after solidification and
；The compound nethike embrane conductive layer of the covering yarn-graphene is to be assembled in the covering yarn skeleton by graphene dispersing solution and obtained；
Two sensory package fittings, wherein covering yarn-graphene compound nethike embrane conductive layer side is bonded, and is located at centre, and flexibility stress passes
Sensor forms " sandwich " structure；The compound nethike embrane conductive layer of covering yarn-graphene of each sensor module is all connected with one and leads
Line.
The covering yarn skeleton is a diameter of 10 μm -30 μm of yarn, and yarn is spandex or one kind in polyamide fibre or two
Kind.
The thickness of the PDMS adherent base bottoms is 200 μm -500 μm.
The conducting wire is copper wire or copper foil, and the conducting wire is connect by conducting resinl with graphene conductive layer.
The conducting resinl uses conductive silver paste or conductive carbon paste.
The conducting wire connects electro-chemical test equipment, and electro-chemical test equipment includes electrochemical analyser and digital versatile
Table.
The PDMS prepolymers are the component A that the commercially available trade mark is 184 bi-component external member silicon rubber of DOW CORNING Sylgard
With component B, quality is than component A：Component B=10-15:1.
The preparation method of the flexibility stress sensor, includes the following steps：
(1) graphene dispersing solution of a concentration of 0.01-0.4mg/mL is prepared；
(2) PDMS solution is configured, by component A and component B according to mass ratio 10-15:1, it is placed in culture dish and stirs 10-30
Minute, then vacuum defoamation is then placed in baking oven precuring 10-20min at 55-65 DEG C, obtains PDMS to surface bubble-free
Solution；
(3) the PDMS solution in step (2) is taken to be spun in PET base, by film after solidification 15-25min at 55-65 DEG C
It is removed from substrate surface, obtains sticking PDMS film, thickness is 200 μm -500 μm；
(4) the compound nethike embranes of covering yarn-RGO are prepared：Covering yarn is put into UV-ozone cleaning device and is carried out at hydrophiling
Reason；Covering yarn is submerged into the RGO dispersion liquids in step (1) again, takes out and dries after impregnating 5-30min, obtain covering yarn-
The compound nethike embranes of RGO.
(5) assembly device：The compound nethike embranes of covering yarn-RGO are attached to sticking PDMS film surface, obtain a sensing
Two sensory packages are bonded, wherein the side of the compound nethike embranes of covering yarn-RGO is opposite by component；Nethike embrane both ends connecting wire, obtains
To flexibility stress sensor.
The present invention substantive distinguishing features be：
For the present invention by using the flexible covering yarn of class spring structure as flexible back bone, two-dimensional slice structure is wrapped up on surface
Graphene, conductive layer of the compound nethike embrane of covering yarn-graphene as strain transducer is obtained, to substitute the plane of surfacing
Conductive layer.Since the special class spring reticular structure of obtained compound nethike embrane is extremely sensitive to extraneous faint stress, make sensing
Device sensitivity and detection limit etc. performance all improve a lot.
Beneficial effects of the present invention are：
(1) using flexible covering yarn as skeleton, nanostructure graphene sheet layer as sensitive material, covering yarn surface is
The filament wound structure of class spring, extraneous microseism can cause fiber contacts area that significant change occurs, and deformation is transmitted
To the graphene on surface, so that two-dimensional layer graphene is in contact-is detached or Relative sliding, be conducive to the spy to minimal stress
It surveys.Compared with conventional planar structure sensor, detection resolution is significantly improved.It can be used for detecting compression, bending, vibrations etc. no
Congener stress.Should force snesor compressed detected limit up to 1.38pa, compression-sensitive degree is up to 77.1kPa-1(as schemed
4), sensitivity improves at least 20 times compared with the strain gauge of planar structure.Bending Sensitivity is 1.25cm-1(such as Fig. 6).It can
The faint vibrations (such as Fig. 7) that detected amplitude is 10 μm.
(2) contact area is effectively to detect the area of stress between being wrapped in the conductive layer on flexible fiber surface, and therefore, this is soft
The size of property strain gauge can be made that very small (length and width can accomplish to be less than 1cm, most thin reachable 500 μ of thickness
M), solve the problems, such as that existing sensor miniaturization is difficult.It is suitably applied miniaturization and integrated equipment, can detect the human body heart
The physiological signals such as jump, breathing, the Wearable for making detection health.
(3) preparation process is relatively easy, and preparation condition is easy to implement.Covering yarn-graphene conductive nethike embrane is by impregnating certainly
The methods of assembling can prepare completion, and easy to assembly；The flexibility stress sensor can carry out device under air, atmospheric pressure environment
Encapsulation, can effectively reduce cost, and be suitable for extensive prepare.
Description of the drawings
Fig. 1 is the structural schematic diagram of the flexibility stress sensor of the present invention；
Fig. 2 is the microstructural image that graphene is wrapped in covering yarn skeleton surface；
Fig. 3 is the compression response curve figure of the flexibility stress sensor of the present invention；
Fig. 4 is the conductance change rate of the flexibility stress sensor of the present invention with the curve graph of pressure change；
Fig. 5 is the bending response curve graph of the flexibility stress sensor of the present invention；
Fig. 6 is the curve graph that the conductance change rate of the flexibility stress sensor of the present invention changes with radius of curvature；
Fig. 7 is the vibration responding curve graph of the flexibility stress sensor of the present invention；
Specific implementation mode
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.
Graphene dispersing solution of the present invention is well known materials, is to pass through electronation using graphene oxide as raw material
Method is prepared, and a concentration of 0.01mg/mL-0.4mg/mL of graphene, solvent is water.
As shown in Figure 1, a kind of flexibility stress sensor according to the present invention, including：Upper substrate, upper layer covering yarn-graphite
The compound nethike embrane of alkene, the lower layer's covering yarn-compound nethike embrane of graphene, lower substrate, conducting wire.
The present invention provides the preparation method of the flexibility stress sensor, includes the following steps：
Embodiment 1：
(1) RGO dispersion liquids are prepared：Hydration is added in graphene oxide (GO) aqueous dispersions (0.01mg/mL, 100mL)
92 DEG C of reduction 1h of hydrazine (375 μ L), extra precipitation are filtered out with gauze, obtain RGO dispersion liquids (0.01mg/mL).
(2) the compound nethike embranes of covering yarn-RGO are prepared：By covering yarn (blended Fypro 85%, spandex 15%；Diameter 15
μm) be put into UV-ozone cleaning device using ultraviolet lighting and ozone treatment 2min, make its surface hydrophilic, then leaching completely again
Profit 5min in RGO dispersion liquids, then paves and is placed in culture dish, and the compound nethike embranes of covering yarn-RGO are made in 60 DEG C of drying 2h,
As shown in Fig. 2, the rectangle that the nethike embrane made is cut into 1cm × 3cm is spare.
(3) PDMS film is prepared：It is the component A of 184 bi-component external member silicon rubber of DOW CORNING Sylgard to take the commercially available trade mark
With component B in mass ratio 10:1 ratio, which is placed in culture dish, stirs 20min, vacuum defoamation to surface bubble-free, 60 DEG C of precuring
16min.(the component A is host agent Polymethyl methacrylate prepolymer, and component B is the prepolymer with vinyl sidechain
And crosslinking agent-following embodiment is same).Above-mentioned solution is spun on polyethylene terephthalate (PET) substrate surface, will be revolved
The PDMS film coated, which is put into 60 DEG C of air dry ovens, cures 20min, by film from PET base sur-face peeling, obtains thickness
Upper substrate and lower substrate for 200 μm of PDMS films as sensor (PDMS film still has certain viscosity at this time).
(4) sensor is assembled：Covering yarn-RGO composite webs are adhered to PDMS film surface.It is 1cm, thickness width
The copper sheet of 0.02mm is fixed on the both ends (as shown in Figure 1) of the compound nethike embranes of covering yarn-RGO with conductive silver glue, and centre reserves
A sensory package is prepared as sensing response area in the distance of 1.5cm.Two sensory packages are assembled face-to-face, are extruded
Go out extra air, assembled device is put into 3h in 60 DEG C of air dry ovens, makes PDMS film completion of cure to get to three
The flexibility stress sensor of Mingzhi's structure.
Embodiment 2：
(1) RGO dispersion liquids are prepared：In (the middle addition hydration of graphene oxide (GO) aqueous dispersions (0.05mg/mL, 100mL)
92 DEG C of reduction 1h of hydrazine (375 μ L), extra precipitation are filtered out with gauze, obtain RGO dispersion liquids (0.05mg/mL).
(2) the compound nethike embranes of covering yarn-RGO are prepared：By covering yarn (blended Fypro 85%, spandex 15%；Diameter 20
μm) hydrophilicity-imparting treatment is carried out in UV-ozone cleaning device, then complete wetting 10min in RGO dispersion liquids paves placement
In culture dish, 60 DEG C of drying 2h repeat above-mentioned immersion step 2 times, the compound nethike embranes of covering yarn-RGO, the nethike embrane that will be made are made
The rectangle for being cut into 1cm × 3cm is spare.
(3) PDMS film is prepared：It is the component A of 184 bi-component external member silicon rubber of DOW CORNING Sylgard to take the commercially available trade mark
With component B in mass ratio 10:1 ratio, which is placed in culture dish, stirs 20min, vacuum defoamation to surface bubble-free, 60 DEG C of precuring
16min.Above-mentioned solution is spun on polyethylene terephthalate (PET) substrate surface, the good PDMS film of spin coating is put
Enter in 60 DEG C of air dry ovens and cure 30min, by film from PET base sur-face peeling, obtains the PDMS film that thickness is 300 μm
As the upper substrate of sensor and lower substrate (PDMS film still has certain viscosity at this time).
(4) sensor is assembled：Covering yarn-RGO composite webs are adhered to PDMS film surface.It is 1cm, thickness width
The copper sheet of 0.02mm is fixed on the both ends (as shown in Figure 1) of the compound nethike embranes of covering yarn-RGO with conductive silver glue, and centre reserves
A sensory package is prepared as sensing response area in the distance of 1.5cm.Two sensory packages are assembled face-to-face, are extruded
Go out extra air, assembled device is put into 3h in 60 DEG C of air dry ovens, makes PDMS film completion of cure to get to three
The flexibility stress sensor of Mingzhi's structure.
Embodiment 3：
(1) RGO dispersion liquids are prepared：In (the middle addition hydration of graphene oxide (GO) aqueous dispersions (0.1mg/mL, 100mL)
92 DEG C of reduction 1h of hydrazine (375 μ L), extra precipitation are filtered out with gauze, obtain RGO dispersion liquids (0.1mg/mL).
(2) the compound nethike embranes of covering yarn-RGO are prepared：By covering yarn (blended Fypro 85%, spandex 15%；Diameter 20
μm) hydrophilicity-imparting treatment is carried out in UV-ozone cleaning device, then complete wetting 15min in RGO dispersion liquids paves placement
In culture dish, 60 DEG C of drying 2h repeat above-mentioned immersion step 4 times, the compound nethike embranes of covering yarn-RGO, the nethike embrane that will be made are made
The rectangle for being cut into 1cm × 3cm is spare.
(3) PDMS film is prepared：It is the component A of 184 bi-component external member silicon rubber of DOW CORNING Sylgard to take the commercially available trade mark
With component B in mass ratio 10:1 ratio, which is placed in culture dish, stirs 20min, vacuum defoamation to surface bubble-free, 60 DEG C of precuring
16min.Above-mentioned solution is spun on polyethylene terephthalate (PET) substrate surface, the good PDMS film of spin coating is put
Enter in 60 DEG C of air dry ovens and cure 35min, by film from PET base sur-face peeling, obtains the PDMS film that thickness is 400 μm
As the upper substrate of sensor and lower substrate (PDMS film still has certain viscosity at this time).
(4) sensor is assembled：Covering yarn-RGO composite webs are adhered to PDMS film surface.It is 1cm, thickness width
The copper sheet of 0.02mm is fixed on the both ends (as shown in Figure 1) of the compound nethike embranes of covering yarn-RGO with conductive silver glue, and centre reserves
A sensory package is prepared as sensing response area in the distance of 1.5cm.Two sensory packages are assembled face-to-face, are extruded
Go out extra air, assembled device is put into 3h in 60 DEG C of air dry ovens, makes PDMS film completion of cure to get to three
The flexibility stress sensor of Mingzhi's structure.
Embodiment 4：
(1) RGO dispersion liquids are prepared：In (the middle addition hydration of graphene oxide (GO) aqueous dispersions (0.2mg/mL, 100mL)
92 DEG C of reduction 1h of hydrazine (375 μ L), extra precipitation are filtered out with gauze, obtain RGO dispersion liquids (0.2mg/mL).
(2) the compound nethike embranes of covering yarn-RGO are prepared：By covering yarn (blended Fypro 85%, spandex 15%；Diameter 30
μm) hydrophilicity-imparting treatment is carried out in UV-ozone cleaning device, then complete wetting 20min in RGO dispersion liquids paves placement
In culture dish, 60 DEG C of drying 2h repeat above-mentioned immersion step 6 times, the compound nethike embranes of covering yarn-RGO, the nethike embrane that will be made are made
The rectangle for being cut into 1cm × 3cm is spare.
(3) PDMS film is prepared：It is the component A of 184 bi-component external member silicon rubber of DOW CORNING Sylgard to take the commercially available trade mark
With component B in mass ratio 10:1 ratio, which is placed in culture dish, stirs 20min, vacuum defoamation to surface bubble-free, 60 DEG C of precuring
16min.Above-mentioned solution is spun on polyethylene terephthalate (PET) substrate surface, the good PDMS film of spin coating is put
Enter in 60 DEG C of air dry ovens and cure 35min, by film from PET base sur-face peeling, obtains the PDMS film that thickness is 400 μm
As the upper substrate of sensor and lower substrate (PDMS film still has certain viscosity at this time).
(4) sensor is assembled：Covering yarn-RGO composite webs are adhered to PDMS film surface.It is 1cm, thickness width
The copper sheet of 0.02mm is fixed on the both ends (as shown in Figure 1) of the compound nethike embranes of covering yarn-RGO with conductive silver glue, and centre reserves
A sensory package is prepared as sensing response area in the distance of 1.5cm.Two sensory packages are assembled face-to-face, are extruded
Go out extra air, assembled device is put into 3h in 60 DEG C of air dry ovens, makes PDMS film completion of cure to get to three
The flexibility stress sensor of Mingzhi's structure.
Embodiment 5：
(1) RGO dispersion liquids are prepared：In (the middle addition hydration of graphene oxide (GO) aqueous dispersions (0.4mg/mL, 100mL)
92 DEG C of reduction 1h of hydrazine (375 μ L), extra precipitation are filtered out with gauze, obtain RGO dispersion liquids (0.4mg/mL).
(2) the compound nethike embranes of covering yarn-RGO are prepared：By covering yarn (blended Fypro 85%, spandex 15%；Diameter 30
μm) hydrophilicity-imparting treatment is carried out in UV-ozone cleaning device, then complete wetting 30min in RGO dispersion liquids paves placement
In culture dish, 60 DEG C of drying 2h repeat above-mentioned immersion step 8 times, the compound nethike embranes of covering yarn-RGO, the nethike embrane that will be made are made
The rectangle for being cut into 1cm × 3cm is spare.
(3) PDMS film is prepared：It is the component A of 184 bi-component external member silicon rubber of DOW CORNING Sylgard to take the commercially available trade mark
With component B in mass ratio 10:1 ratio, which is placed in culture dish, stirs 20min, vacuum defoamation to surface bubble-free, 60 DEG C of precuring
16min.Above-mentioned solution is spun on polyethylene terephthalate (PET) substrate surface, the good PDMS film of spin coating is put
Enter in 60 DEG C of air dry ovens and cure 45min, by film from PET base sur-face peeling, obtains the PDMS film that thickness is 500 μm
As the upper substrate of sensor and lower substrate (PDMS film still has certain viscosity at this time).
(4) sensor is assembled：Covering yarn-RGO composite webs are adhered to PDMS film surface.It is 1cm, thickness width
The copper sheet of 0.02mm is fixed on the both ends (as shown in Figure 1) of the compound nethike embranes of covering yarn-RGO with conductive silver glue, and centre reserves
A sensory package is prepared as sensing response area in the distance of 1.5cm.Two sensory packages are assembled face-to-face, are extruded
Go out extra air, assembled device is put into 3h in 60 DEG C of air dry ovens, makes PDMS film completion of cure to get to three
The flexibility stress sensor of Mingzhi's structure.
Fig. 3 is round robin curve of the sensor in example 1 to compressive deformation.In 1kPa pressure, sensor sheet reveals
Good round robin performance.Fig. 4 is curve of the sensor conductance change rate in example 1 with pressure change, and slope can react
The compression-sensitive degree of sensor.Pressure<0.3kPa, high sensitivity reach 77.1kPa-1.Meanwhile sensor has very wide detection model
It encloses, the minimum slight pressure that can be used for detecting 1.38pa, highest can detect the pressure of 80kPa.Fig. 5 is the sensor in example 1
To the response curve of Bending Deformation.It is 1.5cm in radius of curvature, sensor sheet reveals stable and sensitive round robin
Energy.Fig. 6 is the curve that the sensor conductance change rate in example 1 changes with radius of curvature, Bending Sensitivity 1.25cm-1.Fig. 7
The round robin curve that faint dextrorotation is shaken for the sensor in example 1.Amplitude is 10 μm, frequency 1HZ, sensor performance
Go out apparent response signal.The above electrochemical data is tested by Shanghai Chen Hua electrochemical workstation CHI-760E, using permanent electricity
Bit pattern, voltage 1V.Various deformation are provided by Dynamic Mechanical Analyzer DMA (Q800, TA Instruments).
Should force snesor traditional planar structure material is substituted by using compound nethike embrane as conductive layer, greatly carry
The sensitivity for having risen sensor reduces detection limit, is suitable for the efficient detection of a variety of deformation.
The operation principle of flexibility stress sensor of the present invention is：The flexibility stress sensor original state, upper and lower two
Part sensory package part contacts, and forms conducting structure.Under extraneous stress, substrate is deformed upon and is conducted to covering yarn
The deformation of skeleton and the conductive layer on skeleton surface, skeleton makes the contact area of surface conductive layer change, and causes graphene film
It is in contact-detaches and Relative sliding between layer, change so as to cause sensor conductance rate.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all the present invention spirit and
Within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.
Unaccomplished matter of the present invention is known technology.
Claims (4)
1. a kind of flexibility stress sensor, it is characterized in that the sensor includes two sensory packages；Each sensory package includes
PDMS adherent bases bottom and the compound nethike embrane conductive layer of covering yarn-graphene, the basal layer be by the spin coating of PDMS prepolymers or
Drop coating forms a film and obtains after solidification；The compound nethike embrane conductive layer of the covering yarn-graphene is to be assembled in institute by graphene dispersing solution
It states covering yarn skeleton and obtains；Two sensory package fittings, wherein the side of the compound nethike embrane conductive layer of covering yarn-graphene is bonded,
Positioned at centre, flexibility stress sensor forms " sandwich " structure；The compound nethike embrane of covering yarn-graphene of each sensor module
Conductive layer is all connected with a conducting wire；
The covering yarn skeleton is a diameter of 10 μm -30 μm of yarn, and yarn is one or both of spandex or polyamide fibre；
The thickness of the PDMS adherent base bottoms is 200 μm -500 μm.
2. flexibility stress sensor as described in claim 1, it is characterized in that the conducting wire is copper wire or copper foil, described leads
Line is compound with graphene conductive layer by conducting resinl；
The conducting resinl uses conductive silver paste or conductive carbon paste.
3. flexibility stress sensor as described in claim 1, it is characterized in that the PDMS prepolymers are the commercially available trade mark is
Component A in 184 bi-component external member silicon rubber of healthy and free from worry Sylgard and component B, quality is than component A：Component B=10-15:1.
4. the preparation method of flexibility stress sensor as described in claim 1, it is characterized in that including the following steps：
（1）Prepare the graphene dispersing solution of a concentration of 0.01-0.4 mg/mL；
（2）PDMS solution is configured, by component A and component B according to mass ratio 10-15:1 is placed in culture dish and stirs 10-30 minutes,
Then vacuum defoamation is then placed in 55-65 in baking oven to surface bubble-freeoPrecuring 10-20 min under C, obtain PDMS solution；
（3）Take step（2）In PDMS solution be spun in PET base, 55-65oCure film under C after 15-25 min from base
Bottom surface is removed, and sticking PDMS film is obtained, and thickness is 200 μm -500 μm；
（4）Prepare the compound nethike embranes of covering yarn-RGO：Covering yarn is put into UV-ozone cleaning device and carries out hydrophilicity-imparting treatment；Again
Covering yarn is submerged into step（1）In RGO dispersion liquids, take out and dry after impregnating 5-30 min, it is multiple to obtain covering yarn-RGO
Close nethike embrane；
（5）Fill device：The compound nethike embranes of covering yarn-RGO are attached to sticking PDMS film surface, obtain a sensory package,
Two sensory packages are bonded, wherein the side of the compound nethike embranes of covering yarn-RGO is opposite；Nethike embrane both ends connecting wire, obtains soft
Property strain gauge.
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