CN109149992A - Improved friction nano generator - Google Patents

Improved friction nano generator Download PDF

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Publication number
CN109149992A
CN109149992A CN201710451680.2A CN201710451680A CN109149992A CN 109149992 A CN109149992 A CN 109149992A CN 201710451680 A CN201710451680 A CN 201710451680A CN 109149992 A CN109149992 A CN 109149992A
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China
Prior art keywords
friction
electrode
layer
electrical generation
generation components
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CN109149992B (en
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王杰
王中林
吴昌盛
戴叶瑾
王琪
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Beijing Institute of Nanoenergy and Nanosystems
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Beijing Institute of Nanoenergy and Nanosystems
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Priority to CN201710451680.2A priority Critical patent/CN109149992B/en
Priority to PCT/CN2018/090819 priority patent/WO2018228373A1/en
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/04Friction generators

Abstract

The present invention relates to electrical generator fields, disclose a kind of follow-on friction nanometer power generator comprising: the first electrical generation components and the second electrical generation components, wherein first electrical generation components include: the first frictional layer;And first ferroelectric layer;Wherein, first friction is placed on the surface of first ferroelectric layer;Second electrical generation components include second electrode;When the second electrode is used for second electrical generation components and the first frictional layer phase mutual friction, electric energy is exported.The present invention improves the triboelectric charge density of frictional layer by the built-in dielectric polorization of introducing ferroelectricity layer material, can obtain the generator output of higher power density.

Description

Improved friction nano generator
Technical field
The present invention relates to a kind of generators, more particularly to a kind of improved friction nanometer that mechanical energy is changed into electric energy Generator.
Background technique
Due to energy crisis and environmental pressure, people have been devoted to research and the huge energy of modern society are maintained to consume The consumption of environment is minimized simultaneously.Collecting from reproducible natural environment energy is that a kind of alleviating energy crisis has efficacious prescriptions Case.The friction for collecting the generally existing mechanical energy being but usually wasted in environment of Wang Zhonglin academician's invention in 2012 is received Rice generator (TENG), has proven to be a far-reaching solution.Before about friction nanometer power generator Research work have confirmed that it is potential be widely applied, realize from driving miniaturized electronic devices from the system driven to collection The sea wave energy of low frequency is as novel " the blue energy ".
As a collection of energy device, the dependence that the commercial applications of friction nanometer power generator are strong is close with its power Degree, and mantle friction charge density is at quadratic relation.Therefore, people be dedicated to all the time by friction material select, Structure optimization and surface modification and the methods of the modified quantity to improve triboelectric charge.Pass through from early stage with high electron affinity Polytetrafluoroethylene (PTFE) (PTFE) directly with the resulting 30 μ Cm of the metal friction of volatile de-electromation-2Friction electric quantity density, gradually mention It is raised to through the resulting 140 μ Cm in monolayer technology Mercaptamine modified gold electrode surface-2.But current improvement skill Art is usually to be modified to dielectric material or friction electrode, rarely has the improved method report using composite material, and right The promotion limited extent of triboelectric charge density.
Summary of the invention
The purpose of the invention is to overcome triboelectric charge density of the existing technology low low with output power of motor Problem, provides a kind of improved friction nano generator for converting mechanical energy to electric energy, which has more High mantle friction charge density, to obtain the effect of higher power density.
To achieve the goals above, the present invention provides a kind of improved friction nano generator, the friction nanometer generating Machine includes the first electrical generation components and the second electrical generation components, wherein
First electrical generation components include: the first frictional layer;And first ferroelectric layer;Wherein, the first friction stratification In the surface of first ferroelectric layer;
Second electrical generation components include second electrode;
When the second electrode is used for second electrical generation components and the first frictional layer phase mutual friction, electric energy is exported.
Preferably, first electrical generation components further include:
First electrode, for being electrically connected with the second electrode;
First friction is placed on the upper surface of first ferroelectric layer, and the first electrode is placed in first ferroelectricity The lower surface of layer.
Preferably, second electrical generation components are second electrode, and the phase mutual friction is the second electrode and described the One frictional layer phase mutual friction.
Preferably, second electrical generation components further include the second frictional layer, wherein second frictional layer is set to described Second electrode surface, the phase mutual friction are first frictional layer and the second frictional layer phase mutual friction.
Preferably, second electrical generation components further include the second frictional layer and the second ferroelectric layer, the second friction stratification In the lower surface of second ferroelectric layer, the second electrode is placed in the upper surface of second ferroelectric layer, the phase mutual friction For first frictional layer and the second frictional layer phase mutual friction.
Preferably, second electrical generation components include second electrode and third electrode, wherein
The phase mutual friction be first frictional layer successively with the second electrode and third electrode phase mutual friction;
Electric signal is generated between the second electrode and third electrode.
Preferably, the second electrode is connected to the ground or equipotential.
Preferably, second electrical generation components are second electrode, and the phase mutual friction is the second electrode and described the One frictional layer phase mutual friction.
Preferably, second electrical generation components further include the second frictional layer and the second ferroelectric layer, the second friction stratification In the lower surface of second ferroelectric layer, the second electrode is placed in the upper surface of second ferroelectric layer, the phase mutual friction For first frictional layer and the second frictional layer phase mutual friction.
Preferably, the material of the ferroelectric layer is ceramic ferroelectric materials or tfe polymer electric material.
Preferably, the ceramic ferroelectric materials are barium strontium titanate or lead titanates, strontium titanates, barium strontium titanate, lead titanates or zirconium Aforementioned ferroelectric material after lead titanates or doping vario-property;
Alternatively, the tfe polymer electric material is Kynoar or polyvinylidene fluoride copolymer or polymer and ferroelectricity The compound of material.
Preferably, the thickness range of the ferroelectric layer is 10 μm of -2mm.
Preferably, the frictional layer of the electrical generation components is dielectric layer.
Preferably, the dielectric material of the dielectric layer is polytetrafluoroethylene (PTFE), polytetrafluoroethylene (PTFE), perfluoroethylenepropylene copolymerization Object, poly- trifluoro-ethylene, polyimides or dimethyl silicone polymer.
Preferably, the phase mutual friction is to separate after two electrical generation components contact with each other friction;
Or sliding is contacted with each other for two electrical generation components and generates friction;
Or it is adjacent to each other and separate for two electrical generation components.
Preferably, the friction nanometer power generator further include:
Sealing structure is true for providing between first electrical generation components and the surface of the second electrical generation components phase mutual friction It is empty.
Preferably, the vacuum ranges of the vacuum are 10-2—10-7Support.
Compared with existing friction nanometer power generator, the advantages of improved friction nano generator provided by the invention In:
Due to the setting of ferroelectric layer and frictional layer, the ferroelectric material being placed in electric field is made still to have remaining dielectric pole Change, when suitably carrying out Surface Polarization by friction in frictional layer material surface, residual polarization can enhance frictional layer capture The ability of charge.The present invention improves the triboelectric charge density of frictional layer by the built-in dielectric polorization of introducing ferroelectricity layer material, The generator output of higher power density can be obtained.
The present embodiment uses the two-layer composite of ferroelectric material and dielectric material (i.e. ferroelectric layer and frictional layer), with dielectric Material improves the surface charge density of dielectric material as frictional layer, with the residual polarization of ferroelectric material.What the present invention obtained rubs Wiping charge density, which is higher than, individually to be used dielectric material or individually uses ferroelectric material as frictional layer, and then friction nanometer hair can be improved The output power of motor.In particular, under vacuum conditions, up to 1003 μ Cm can be obtained-2Triboelectric charge density, be much higher than The limiting value for the dielectric material PTFE breakdown reported now.
In addition, being mentioned in compared with the existing technology in friction layer surface preparation the methods of nanostructure or the surface modification of material For the performance of friction nanometer power generator, friction nanometer power generator of the invention also has easy to accomplish and easy scale application Advantage.
The other feature and advantage of the embodiment of the present invention will the following detailed description will be given in the detailed implementation section.
Detailed description of the invention
Attached drawing is to further understand for providing to the embodiment of the present invention, and constitute part of specification, under The specific embodiment in face is used to explain the present invention embodiment together, but does not constitute the limitation to the embodiment of the present invention.Attached In figure:
Fig. 1 and Fig. 2 is the structural schematic diagram of the friction nanometer power generator of the embodiment of the present invention one;
Fig. 3 shows the working principle of the friction nanometer power generator according to embodiment one;
Fig. 4 shows the charge density according to a friction nanometer power generator in atmosphere and vacuum;
Fig. 5 and Fig. 6 is the structural schematic diagram of the friction nanometer power generator of the embodiment of the present invention two;And
Fig. 7 is the structural schematic diagram of the friction nanometer power generator of the embodiment of the present invention three.
Specific embodiment
Below in conjunction with attached drawing, detailed description of the preferred embodiments.It should be understood that this place is retouched The specific embodiment stated is merely to illustrate and explain the present invention, and is not intended to restrict the invention.When for outlines device structure The described orientation such as upper and lower, are only used for the relative position of display device each section, better understand the structure of device, be not used in Limitation to device architecture.
Friction nanometer power generator provided by the invention includes the first electrical generation components and the second electrical generation components, is used for rubs mutually Or contact separation is to produce electricl energy.
In the friction nanometer power generator of existing all structures, as long as the power generation being related to can be contacted with each other at two The friction that separates or slide over each other generates the electric generator structure of electric signal, is suitable for the invention friction nanometer power generator, wraps Include slidingtype friction nanometer power generator, contact-separate type friction nanometer power generator, single electrode formula friction nanometer power generator, induction Formula friction nanometer power generator etc..The difference of the present invention and existing friction nanometer power generator are to be put forward for the first time generating rubs mutually Two surfaces in, frictional layer and ferroelectric layer are combined with each other, due to dielectric polarization remaining in ferroelectric material, rubbed at two When wiping layer (either frictional layer and electrode layer) mutually sliding friction or contact separation friction, it is close triboelectric charge can be significantly improved Degree.
Enhanced friction nanometer power generator provided by the invention and electricity-generating method are specifically introduced with reference to the accompanying drawing.
Embodiment one
A kind of typical structure of friction nanometer power generator provided in this embodiment referring to Fig. 1, including the first electrical generation components A and Second electrical generation components B, wherein the first electrical generation components A includes the first frictional layer a1, the first ferroelectric layer a2 and first electrode layer a3, Wherein, the first frictional layer a1 is placed in the upper surface of the first ferroelectric layer a2, and first electrode a3 is placed in the lower surface of the first ferroelectric layer;The Two electrical generation components B include the second frictional layer b1 the second ferroelectric layer b2 and the second electrode lay b3, wherein the second frictional layer b1 is placed in the The lower surface of two ferroelectric layer b2, second electrode b3 are placed in the upper surface of the second ferroelectric layer b2.Second electrode b3 is for the second power generation When part B and the first frictional layer a1 phase mutual friction of the first electrical generation components A, to export electric energy.In Fig. 1, second electrode b3 can be with It is connect with the first electrode a3 of the first electrical generation components A, when the first frictional layer a1 phase mutual friction of second component B and first component A, Electrostatic potential is generated in first electrode and second electrode, generates electric signal between the first electrode and the second electrode.In the first hair Electrical components A can be generated relative in the second electrical generation components B reciprocatory movement between first electrode a3 and second electrode b3 The electric signal of exchange exports, and realizes mechanical energy being changed into electric energy.
Preferably, in first or second electrical generation components, electrode, ferroelectric layer and frictional layer all can be laminate structure, mutually Stacking is fixed together, and the first electrical generation components and the second electrical generation components are respectively as whole relative motion.
For the material tool on the surface in friction nanometer power generator, needing the first frictional layer and the second frictional layer to contact with each other There are friction electrode sequence difference, i.e. surface receiving and losing electrons capacity variance, after contacting with each other separation, two friction layer surfaces have etc. The xenogenesis charge of amount.Preferably, the material of the first frictional layer and the second frictional layer is dielectric material, and the dielectric material can Think organic matter insulating material, such as fluorinated ethylene propylene copolymer, poly- trifluoro-ethylene, polyimides, polydimethylsiloxanes Alkane etc..The thickness range of two frictional layers can be 1 μm of -1mm.
First ferroelectric layer, the second ferroelectric layer use ferroelectric material, can use ceramic ferroelectric materials, such as barium titanate, titanium Aforementioned ferroelectric material after sour strontium, barium strontium titanate, lead titanates or lead zirconate titanate etc. or doping vario-property;It can also be using polymerization Object ferroelectric material, such as Kynoar or polyvinylidene fluoride copolymer or polymer and the compound of ferroelectric material etc..
First ferroelectric layer, the second ferroelectric layer thickness range can be 10 μm of -2mm.Such thickness can give frictional layer Certain mechanical strength is given, while electric charge induction will not be influenced due to too thick.
The material of first electrode and second electrode can be arbitrary conductive material, such as metal, oxide conductor or have Machine object conductor.
In the present embodiment, in structure shown in FIG. 1, the first frictional layer a1 of second component B and first component A mutually rub It wipes, the specially phase mutual friction of the second frictional layer b1 and the first frictional layer a1.
Since conductor material and the dielectric material of frictional layer have different friction electrode sequences, when phase mutual friction It can produce surface charge.Referring to fig. 2, the second electrical generation components can only include the second electrode lay b3, by second electrode b3 with First frictional layer a1 phase mutual friction generates electric signal output between first electrode a3 and second electrode b3.
It should be noted that the phase mutual friction of two electrical generation components mentioned in the present invention, is not limited in sliding friction, Referring to shown in arrow in Fig. 1, separated after friction being contacted with each other for two electrical generation components, or two electrical generation components are mutual The sliding that is in contact generates friction, can also be adjacent to each other and separate for two electrical generation components.
Since the ferroelectric layer being placed in electric field still has remaining dielectric polarization, when making frictional layer table in friction process After face suitably carries out Surface Polarization, the residual polarization for the ferroelectric layer being stacked with frictional layer can enhance it and capture charge Ability.In order to improve the triboelectric charge density of frictional layer, the present embodiment is by introducing the built-in dielectric polorization of ferroelectric layer come real Existing surface and polarization of dielectric couple to improve the performance of friction nanometer power generator.
Its working principle of friction nanometer power generator is as shown in Figure 3 in the present embodiment.Second hair of friction nanometer power generator Electrical components are made of Cu electrode 11, and the first generator component includes being adhered to the PTFE layer 21 of 31 upper surface of ferroelectric layer (first rubbing Wipe layer) and it is adhered to the first electrode Cu electrode 12 of 31 lower surface of ferroelectric layer, it is electrically connected between Cu electrode 11 and Cu electrode 12.When When Cu electrode 11 is in contact with PTFE layer 21, it will generate the xenogenesis charge (as shown in figure 3i) of equivalent on their surface.Cu Electrode 11 and PTFE layer 21 separate, the induction gesture of 21 surface charge of PTFE layer or the polarization on surface, it will cause in ferroelectric layer 31 dielectric polarization, under short circuit condition, the Surface Polarization generated therefrom can also drive positive charge to migrate from Cu electrode 11 On to Cu electrode 12 (as shown in Fig. 3 ii), electric current is generated in load 41, until the first electrical generation components and the second electrical generation components Distance reaches up to one balance (as shown in Fig. 3 iii), at this time no current.When Cu electrode 11 is again close to PTFE layer 21 When, the Surface Polarization of decrease will make the positive charge transport on Cu electrode 12 to Cu electrode 11 (as shown in Fig. 3 iv), in load 41 It is upper to generate opposite electric current, until Cu electrode 11 and PTFE layer 21 are in contact (as shown in Fig. 3 v).
Due to dielectric hysteresis, the polarization in ferroelectric material will not be completely eliminated, and remaining built-in dielectric polorization will Play the role of negative electrical charge trap, and then enhances the ability that PTFE captures charge in contact electrification.In other words, from rubbing The Surface Polarization for wiping electrification will induce the polarization of built-in ferroelectricity layer material, while the latter is during subsequent contact electrification The former will be enhanced until reaching balance.Surface and polarization of dielectric coupling will greatly enhance friction nanometer power generator work The total amount for the triboelectric charge that process generates.
Using in a specific friction nanometer power generator of Fig. 2 structure, ferroelectricity layer material uses barium titanate ceramics (BT), First frictional layer dielectric material is used as frictional layer using polytetrafluoroethylene (PTFE) (PTFE), and two kinds of materials are all the disk that diameter is 1cm, PTFE is pasted in the upper surface of BT, and lower surface is pasted metal first electrode Cu, is then attached on substrate.Wherein BT with a thickness of 0.5mm, PTFE are with a thickness of 0.2mm.Pass through with the Ni metal (second electrode) being fixed on another substrate with PTFE and contacts-separate Mode triboelectrification, test result is shown (leftmost curve in Fig. 4) under atmospheric environment, and output charge density reaches 142 μ Cm-2, It is not only above respectively with PFTE and BT and the resulting 120 μ Cm of charge density of copper electrode friction-2With 15 μ Cm-2, and it is higher than rear two The summation of person has fully demonstrated the synergistic effect of two kinds of materials in the present embodiment.
In addition, 142 μ Cm-2Charge density close to aerial reason of the PTFE film as frictional layer with a thickness of 0.2mm By limiting value.It can be calculated by avalanche breakdown theory, when the surface charge density of the PTFE film reaches 143 μ Cm-2When, Air breakdown will occur, surface charge density is caused to be clamped down on.
In order to further increase the output performance of friction nanometer power generator in the present embodiment, the friction nanometer hair of the present embodiment Motor can also include sealing structure, the sealing structure be used in the first electrical generation components A and the second electrical generation components B phase mutual friction or Vacuum is provided between the surface of person's contact separation.By by the surface of the first electrical generation components A and the second electrical generation components B phase mutual friction Between be set as vacuum, the first frictional layer can be provided and when the second frictional layer (or second electrode) rubs in a vacuum, very Empty vacuum ranges can be 10-2—10-7Support, especially when vacuum degree reaches 10-6When torr or more, it is possible to prevente effectively from Air breakdown.It is experimentally confirmed that its triboelectric charge density reaches 1003 μ Cm-2(as shown in right side graph in Fig. 4), much larger than big Charge density (142 μ Cm in gas-2)。
Sealing structure is not particularly limited in the present embodiment, can provide the knot of vacuum for arbitrary structures Structure, such as the sealing structure that the first electrical generation components and the second electrical generation components are fully wrapped around.Above-mentioned vacuum can by vacuum tank and Vacuum pumping pump is realized.
Embodiment two:
The second electrode b3 of second electrical generation components is electrically connected with the first electrode a3 of the first electrical generation components in embodiment one, this Two electrodes are mutually mobile with external force in the structure of sample, are unfavorable for the use of device.
In the present embodiment, the typical structure of generator referring to Fig. 5, including the first electrical generation components A and the second electrical generation components, In, the first electrical generation components A includes the first frictional layer a1 and the first ferroelectric layer a2, wherein the first frictional layer a1 is placed in the first ferroelectricity The upper surface of layer a2;Second electrical generation components include the second electrode lay b3.Second electrode b3 is for second electrode and the first Power Generation Section When the first frictional layer a1 phase mutual friction of part A, electric energy is exported.
In the present embodiment, second electrode b3 be can connect to ground or equipotential, also can connect to other conductors.
It can also include the second frictional layer b1 in other embodiments referring to Fig. 6, the second frictional layer b1 is set to the Two lower surfaces electrode b3, phase mutual friction is the first frictional layer a1 and the second frictional layer between the second electrical generation components and the first frictional layer B1 phase mutual friction.
In the friction nanometer power generator of the present embodiment, the material of each layer in the first electrical generation components and the second electrical generation components with Structure can be identical as in embodiment one.Equally, it can also generate electricity under vacuum conditions, to improve charge density.? Here without repeating.
The electricity generating principle of the friction nanometer engine of the present embodiment is similar with embodiment one, not repeated description herein.
Embodiment three:
In the present embodiment, the typical structure of friction nanometer power generator is referring to Fig. 7, including the first electrical generation components and the second power generation Component, wherein the first electrical generation components include the first frictional layer a1 and the first ferroelectric layer a2, wherein the first frictional layer a1 is placed in the The surface of one ferroelectric layer a2;Second electrical generation components include the second electrode lay b3 and third electrode b4.Second electrode b3 and third electricity Pole electrical connection, between the second electrical generation components and the first frictional layer phase mutual friction be the first frictional layer a1 successively with second electrode b3 and Third electrode b4 phase mutual friction, in the first electrical generation components and the mutual friction process of the second electrical generation components, due to electrostatic induction, electricity Lotus is flowed between second electrode and third electrode, generates electric signal.
In the friction nanometer power generator of the present embodiment, the material of each layer in the first electrical generation components and the second electrical generation components with Structure can be identical as in embodiment one.Wherein, third electrode can be identical as the material of first electrode or second electrode. Equally, it can also generate electricity under vacuum conditions, to improve charge density.Herein without repeating.
The electricity generating principle of the friction nanometer engine of the present embodiment is similar with embodiment one, not repeated description herein.
It is described the prefered embodiments of the present invention in detail above in conjunction with attached drawing, still, the present invention is not limited thereto.At this , can be with various simple variants of the technical solution of the present invention are made in the range of the technology design of invention, including each particular technique Feature is combined in any suitable manner.In order to avoid unnecessary repetition, the present invention is to various combinations of possible ways No further explanation will be given.But it should also be regarded as the disclosure of the present invention for these simple variants and combination, belongs to the present invention Protection scope.

Claims (17)

1. a kind of improved friction nano generator, which is characterized in that the friction nanometer power generator includes the first electrical generation components With the second electrical generation components, wherein
First electrical generation components include: the first frictional layer;And first ferroelectric layer;Wherein, first friction is placed on institute State the surface of the first ferroelectric layer;
Second electrical generation components include second electrode;
When the second electrode is used for second electrical generation components and the first frictional layer phase mutual friction, electric energy is exported.
2. friction nanometer power generator according to claim 1, which is characterized in that first electrical generation components further include:
First electrode, for being electrically connected with the second electrode;
First friction is placed on the upper surface of first ferroelectric layer, and the first electrode is placed in first ferroelectric layer Lower surface.
3. friction nanometer power generator according to claim 1 or 2, which is characterized in that second electrical generation components are second Electrode, the phase mutual friction are the second electrode and the first frictional layer phase mutual friction.
4. friction nanometer power generator according to claim 1 or 2, which is characterized in that second electrical generation components further include Second frictional layer, wherein second frictional layer is set to the second electrode surface, and the phase mutual friction rubs for described first Wipe layer and the second frictional layer phase mutual friction.
5. friction nanometer power generator according to claim 1 or 2, which is characterized in that second electrical generation components further include Second frictional layer and the second ferroelectric layer, second friction are placed on the lower surface of second ferroelectric layer, the second electrode It is placed in the upper surface of second ferroelectric layer, the phase mutual friction is that first frictional layer mutually rubs with second frictional layer It wipes.
6. friction nanometer power generator according to claim 1, which is characterized in that second electrical generation components include the second electricity Pole and third electrode, wherein
The phase mutual friction be first frictional layer successively with the second electrode and third electrode phase mutual friction;
Electric signal is generated between the second electrode and third electrode.
7. friction nanometer power generator according to claim 1, which is characterized in that the second electrode is connected to the ground or waits Current potential.
8. friction nanometer power generator according to claim 7, which is characterized in that second electrical generation components are the second electricity Pole, the phase mutual friction are the second electrode and the first frictional layer phase mutual friction.
9. friction nanometer power generator according to claim 7, which is characterized in that second electrical generation components further include second Frictional layer and the second ferroelectric layer, second friction are placed on the lower surface of second ferroelectric layer, and the second electrode is placed in The upper surface of second ferroelectric layer, the phase mutual friction are first frictional layer and the second frictional layer phase mutual friction.
10. -9 described in any item friction nanometer power generators according to claim 1, which is characterized in that the material of the ferroelectric layer For ceramic ferroelectric materials or tfe polymer electric material.
11. friction nanometer power generator according to claim 10, which is characterized in that the ceramic ferroelectric materials are strontium titanates Aforementioned ferroelectric material after barium or lead titanates, strontium titanates, barium strontium titanate, lead titanates or lead zirconate titanate or doping vario-property;
Alternatively, the tfe polymer electric material is Kynoar or polyvinylidene fluoride copolymer or polymer and ferroelectric material Compound.
12. -11 described in any item friction nanometer power generators according to claim 1, which is characterized in that the thickness of the ferroelectric layer Range is 10 μm of -2mm.
13. -12 described in any item friction nanometer power generators according to claim 1, which is characterized in that the electrical generation components rub Wiping layer is dielectric layer.
14. friction nanometer power generator according to claim 13, which is characterized in that the dielectric material of the dielectric layer is poly- Tetrafluoroethene, polytetrafluoroethylene (PTFE), fluorinated ethylene propylene copolymer, poly- trifluoro-ethylene, polyimides or dimethyl silicone polymer.
15. -10 described in any item friction nanometer power generators according to claim 1, which is characterized in that the phase mutual friction is two A electrical generation components separate after contacting with each other friction;
Or sliding is contacted with each other for two electrical generation components and generates friction;
Or it is adjacent to each other and separate for two electrical generation components.
16. -15 described in any item friction nanometer power generators according to claim 1, which is characterized in that the friction nanometer generating Machine further include:
Sealing structure, for providing vacuum between first electrical generation components and the surface of the second electrical generation components phase mutual friction.
17. friction nanometer power generator according to claim 16, which is characterized in that the vacuum ranges of the vacuum are 10-2—10-7Support.
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CN112751499A (en) * 2019-10-29 2021-05-04 苏州大学 Friction nanometer generator based on micro-electro-mechanical system and preparation method thereof
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