CN104779832B - A kind of high performance friction generator and preparation method thereof - Google Patents

A kind of high performance friction generator and preparation method thereof Download PDF

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Publication number
CN104779832B
CN104779832B CN201510138207.XA CN201510138207A CN104779832B CN 104779832 B CN104779832 B CN 104779832B CN 201510138207 A CN201510138207 A CN 201510138207A CN 104779832 B CN104779832 B CN 104779832B
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electrode
conductive electrode
polymer film
friction generator
thin polymer
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CN104779832A (en
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张海霞
程晓亮
孟博
韩梦迪
陈号天
苏宗明
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Peking University
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Peking University
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Abstract

The invention discloses a kind of high performance friction generator and preparation method thereof, the friction generator includes the thin polymer film and conductive electrode stacked gradually, and polymer insulation layer, conductive electrode and the thin polymer film stacked gradually.The preparation method of the friction generator is to utilize single step fluorocarbon plasma handling process, in polymer surfaces formation micro-nano structure, while chemical modification is carried out, so that greatly enhance processed material is charged by friction ability.Friction generator preparation method of the present invention is simple, it is easy to mass produce, and can effectively improve the output of frictional generator, possesses the ability powered for wearable device, microelectronic device.

Description

A kind of high performance friction generator and preparation method thereof
Technical field
The present invention relates to technical field of generators, more particularly to a kind of high performance friction generator and preparation method thereof.
Background technology
The collecting energy from living environment, is widely regarded as realizing effective way of green energy resource and energy sustainable development Footpath, will be expected to play a significant role in the energy supply of wireless transmitting system, implantable medical device or even consumer electronics.Base In triboelectrification and electrostatic induction principle, the miniature friction generator prepared by the processing of simple low cost can be completed to week The high efficiency collection of collarette border mechanical energy, realizes high-output power density and energy conversion efficiency.
And the output of existing friction generator, the characteristics of have high output voltage, low output current, this causes energy to change Become extremely difficult, so as to limit its actual application value.On the other hand, its surface charge density is relatively low, and single effect turns The electricity of shifting is few, so that its energy conversion efficiency is still than relatively low.Therefore how to pass through the simply processing method of low cost To realize high output performance, the friction generator of high-density surface charge seems particularly significant.
The content of the invention
It is an object of the invention to:A kind of high performance friction generator and preparation method thereof is provided, two kinds of flexibilities are utilized Material constitutes friction-type energy collecting device to the difference of charge confinement ability, by carrying out single step plasma in polymer surfaces Processing, can form special Multi-scale model on the polymer, then pass electric charge by preparing conductive electrode on polymer Export is gone, and is designed using the external circuit of advantages of simple, can efficiently be charged, so that power storage be got off, and be carried for capacitor Exported for high voltage and high current.
A kind of high performance friction generator that the present invention is provided, has the backing material of electrode and has the sandwich of frictional layer Structure.
Further, the backing material for having electrode is the thin polymer film and conductive electrode stacked gradually;It is described to rub The sandwich structure for wiping layer is polymer insulation layer, conductive electrode and the thin polymer film stacked gradually.
Further, the thin polymer film is two kinds of different flexible insulating materials, the flexibility with polymer insulation layer Insulating materials includes polyethylene (polyethylene, PE), polyvinyl chloride (polyvinyl chloride polymer, PVC) Dimethyl silicone polymer (polydimethylsiloxane, PDMS), polyimides (polymide, PI), Parylene (parylene), polytetrafluoroethylene (PTFE) (polytetrafluoroethylene, PTFE) film.
Further, the conductive electrode is that resistivity is less than 1000 Ω m aluminium or copper is silver-colored or golden or indium tin metal oxygen Compound (ITO) or graphene or CNT or styrene sulfonic acid (PEDOT-PSS).
The present invention also provides a kind of preparation method of high performance friction generator, comprises the following steps:
S10) by plating last layer conductive electrode on a surface of thin polymer film, 2 substrate materials for having electrode are prepared Material;
S20) rubbed polymeric material using the one side spin coating for having electrode of spin coating technique backing material wherein, And the friction polymeric material is dried into film, prepare the sandwich structure for having frictional layer.
Further, the step S20) also include:Carried out before another polymeric material drying fluorine carbon etc. from Daughter is handled.
Further, the instrument that the fluorocarbon plasma processing is used is reactive ion etching machine (Reactive Ion Etching, RIE) or sense coupling machine (Inductively Coupled Plasma, ICP).
Further, the thin polymer film is that flexible insulating material includes polyethylene terephthalate (polyethylene terephthalate, PET), lucite etc..
Further, another polymeric material be dimethyl silicone polymer (polydimethylsiloxane, ) or polyimides (polymide, PI) or polytetrafluoroethylene (PTFE) (polytetrafluoroethylene, PTFE) PDMS.
Further, the step S20) after, in addition to step S30) will have using support frame or formation domes The backing material of electrode and the sandwich structure for having frictional layer are assembled into friction generator.
Further, the support frame is aluminium flake or copper sheet or pet film (polyethylene terephthalat, PET) or lucite (polymethyl methacrylate, PMMA) and spring Combining structure.
The present invention has following advantageous effects:
1st, high performance grinding generator of the invention is had compared with based on piezoelectricity, the Minitype energy collector of electromagnetic type It is flexible high, and do not need functional material to achieve that energy is changed, and there is the characteristics of energy conversion efficiency is high;
2nd, the production of the friction generator of diversified forms, and the friction of production are applicable to using the preparation method of the present invention The flexible high, fan-out capability of generator is strong.
Brief description of the drawings
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the application, not Inappropriate limitation of the present invention is constituted, in the accompanying drawings:
Fig. 1 is a kind of structural representation of high performance friction generator of the embodiment of the present invention 1;
Fig. 2 is a kind of preparation method schematic flow sheet of high performance friction generator of the embodiment of the present invention 2;
Fig. 3 is a kind of preparation method schematic flow sheet of high performance friction generator of the embodiment of the present invention 3.
Embodiment
Describe the present invention in detail below in conjunction with accompanying drawing and specific embodiment, herein illustrative examples of the invention And explanation is used for explaining the present invention, but it is not as a limitation of the invention.
Fig. 1 is a kind of structural representation of high performance friction generator of the present invention.
Embodiment 1:
Shown in Figure 1, the present embodiment is that a kind of high performance grinding generator of the invention is contact separation formula structure, including The thin polymer film 1 and conductive electrode 2 stacked gradually, and polymer insulation layer 3, conductive electrode 2 and the polymerization stacked gradually Thing film 1.
Preferably, the thin polymer film 1 and polymer insulation layer 3 are flexible insulating material, the flexible insulating material Including polyethylene (polyethylene, PE), polyvinyl chloride (polyvinyl chloride polymer, PVC) poly dimethyl Siloxanes (polydimethylsiloxane, PDMS), polyimides (polymide, PI), Parylene (parylene), Polytetrafluoroethylene (PTFE) (polytetrafluoroethylene, PTFE) film etc..
Preferably, the conductive electrode 2 is metal such as aluminium, copper, silver, gold or the semiconductor that resistivity is less than 1000 Ω m Material includes indium tin oxide (ITO) and conducting electrode such as graphene, CNT and styrene sulfonic acid (PEDOT-PSS)。
It should be noted that in the present embodiment, thin polymer film 1 and conductive electrode 2 can integrated have electrode Backing material;Polymer insulation layer 3, conductive electrode 2 and thin polymer film 1 can be become one with frictional layer Sandwich structure.Optionally, in addition to the support frame that plays a supportive role, the substrate material that can will have electrode using the supporting support Material and the sandwich structure with frictional layer are assembled into friction generator.Also arch knot directly can be formed in itself using backing material Structure can will be implanted equipment as carriage as support frame, or when friction generator of the present invention is as implantation equipment Frame.
The material of support frame can be had metal or polymeric material such as aluminium flake, the copper sheet of some strength, gather to benzene two Formic acid glycol ester film (polyethylene terephthalat, PET), lucite (polymethyl Methacrylate, PMMA) and spring combining structure.
Embodiment 2:
Fig. 2 is a kind of preparation method schematic flow sheet of high performance friction generator of the present embodiment.
Shown in reference picture 2, a kind of preparation method of high performance grinding generator of the invention, specific procedure of processing is as follows:
Step S10:By plating last layer conductive electrode on a surface of thin polymer film, 2 linings for having electrode are prepared Bottom material.
Preferably, the step S10) in, the thin polymer film is that flexible insulating material includes poly terephthalic acid second two Alcohol ester (polyethylene terephthalate, PET), lucite etc..
Preferably, the step S10) in, conductive electrode is using the metal for having stronger conductive capability such as aluminium, copper, silver, gold or half Conductor material includes indium tin oxide (ITO) and conducting electrode such as graphene, CNT and styrene sulfonic acid (PEDOT-PSS)。
Step S20:Rubbed using the spin coating technique one side spin coating that a backing material for having electrode has conductive electrode wherein Polymeric material is wiped, and the friction polymeric material is dried into film, the sandwich structure for having frictional layer is prepared.
Preferably, the step S20) in, it is described friction polymeric material for can by spin-coating film and be different from institute State another polymeric material of thin polymer film, it is such as dimethyl silicone polymer (polydimethylsiloxane, PDMS), poly- Acid imide (polytetrafluoroethylene (PTFE) (polytetrafluoroethylene, PTFE) etc..
As a kind of preferred scheme of the present embodiment, in step S20) after, in addition to step S30:Utilize support frame The backing material for having electrode and the sandwich structure for having frictional layer are assembled into friction generator.Preferably, the step S30) in, The support frame is to have metal or polymeric material such as aluminium flake, copper sheet, the polyethylene terephthalate of some strength thin Film (polyethylene terephthalat, PET), lucite (polymethyl methacrylate, PMMA) and bullet The combining structure of spring.It should be noted that this step is optional step, also arch knot directly can be formed in itself using backing material Structure can will be implanted equipment as carriage as support frame, or when friction generator of the present invention is as implantation equipment Frame.
Embodiment 3:
Fig. 3 is a kind of preparation method schematic flow sheet of high performance friction generator of the embodiment of the present invention 3.
It is shown in Figure 3 as a kind of preferred scheme of above-described embodiment 2, a kind of high performance friction hair of the present embodiment The preparation method of motor comprises the following steps:
Step S10:Prepare the backing material for having electrode.
In the present embodiment, thin polymer film uses PET, and conductive electrode uses ITO.
Specifically, the step is:Substrate is used as in thin polymer film PET surface plating last layer conductive electrode ITO Material.
Step S210:Spin-coatable polymeric material.
In the present embodiment, polymeric material uses the PDMS different from thin polymer film.
Specifically, there is the one side spin coating PDMS of conductive electrode in backing material using spin coating technique.
Step S220:Corona treatment.
Specifically, fluorocarbon plasma processing is carried out to PDMS.
The step S220) in, the instrument of the fluorocarbon plasma processing is the equipment that can produce plasma, is such as reacted Ion etching machine (Reactive Ion Etching, RIE), sense coupling machine (Inductively Coupled Plasma, ICP) or other equipment that can produce plasma.
Step S230:Dry film forming.
Specifically, by PDMS oven for drying film forming.
Step S30:Assembled formation.
Specifically, using support frame formation friction generator.
It should be noted that made as described above step, its process sequence not immobilizes, it is adjustable according to actual needs Whole process sequence deletes processing step.
High performance grinding generator provided by the present invention and preparation method thereof has following beneficial technique effect:
1st, the present invention can be big to the difference composition friction-type energy collecting device of charge confinement ability using two kinds of flexible materials Amplitude improves the existing Minitype energy collector based on frictional electricity principle, practical has great impetus to its;
2nd, friction generator of the invention can be applied to various forms of friction generators such as contact separation formula, single electric level formula And slidingtype, for improving its energy conversion efficiency;
3rd, friction generator of the invention can process to form oscillatory type energy collecting device, for collecting the vibration in environment Energy;
4th, friction generator of the invention is compared with based on piezoelectricity, the Minitype energy collector of electromagnetic type, due to using soft Property insulating materials, therefore have the advantages that it is flexible high, do not need functional material, energy conversion efficiency high;
5th, the preparation method of friction generator proposed by the present invention due to use single step fluorocarbon plasma handling process, Polymer surfaces formation micro-nano structure, while chemical modification is carried out, so as to greatly enhance being charged by friction for processed material Ability, compared with other method, can inherently carry high power output and its conversion efficiency, and be applicable to diversified forms Friction generator, and final output object has the advantages that flexible height, fan-out capability are strong.
A kind of high performance friction generator proposed by the present invention and preparation method thereof is described in detail above, with Help understands the central principle and method of present aspect.It should be noted that embodiments described above, is not constituted to the skill The restriction of art scheme protection domain.It is any above-mentioned embodiment spirit and principle within made modification, equivalent substitution and Improve etc., it should be included within the protection domain of the technical scheme.

Claims (6)

1. a kind of high performance friction generator, it is characterised in that include the backing material of electrode and have Sanming City of frictional layer Structure is controlled, the sandwich structure includes polymer insulation layer, conductive electrode and the thin polymer film become one, described poly- Compound insulating barrier is to be rubbed polymeric material using the one side spin coating for having electrode of spin coating technique backing material wherein Make, and fluorocarbon plasma processing is carried out before the friction polymeric material drying, then by fluorocarbon plasma The friction polymeric material after processing is dried into film;
The backing material for having electrode and the sandwich structure for having frictional layer are assembled into using support frame or formation domes Friction generator, the support frame is aluminium flake or copper sheet or pet film (polyethylene Terephthalat, PET) or lucite (polymethyl methacrylate, PMMA) and spring combining structure;
The backing material for having electrode is the thin polymer film and conductive electrode stacked gradually;The sandwich for having a frictional layer Structure is polymer insulation layer, conductive electrode and the thin polymer film stacked gradually;
The conductive electrode is that resistivity is less than 1000 Ω m aluminium or copper is silver-colored or golden or indium tin oxide (ITO) or stone Black alkene or CNT or styrene sulfonic acid (PEDOT-PSS).
2. high performance friction generator according to claim 1, it is characterised in that the thin polymer film, polymer Insulating barrier is flexible insulating material, and the flexible insulating material includes polyethylene (polyethylene, PE), polyvinyl chloride It is (polyvinyl chloride polymer, PVC) dimethyl silicone polymer (polydimethylsiloxane, PDMS), poly- Acid imide (polymide, PI), Parylene (parylene), polytetrafluoroethylene (PTFE) (polytetrafluoroethylene, PTFE) film.
3. a kind of preparation method of high performance friction generator, it is characterised in that comprise the following steps:
S10) by plating last layer conductive electrode on a surface of thin polymer film, 2 backing materials for having electrode are prepared;
S20) rubbed polymeric material using the one side spin coating for having electrode of spin coating technique backing material wherein, in institute Fluorocarbon plasma processing is carried out before stating friction polymeric material drying, then is rubbed described in after fluorocarbon plasma is handled Polymeric material drying film forming is wiped, the sandwich structure for having frictional layer is prepared, the sandwich structure includes becoming one Polymer insulation layer, conductive electrode and thin polymer film;
S30) using support frame or domes are formed by the backing material for having electrode and the sandwich structure group for having frictional layer Friction generator is dressed up, the support frame is aluminium flake or copper sheet or pet film (polyethylene terephthalat, PET) or lucite (polymethyl methacrylate, PMMA) and spring Combining structure;
The backing material for having electrode is the thin polymer film and conductive electrode stacked gradually;The sandwich for having a frictional layer Structure is polymer insulation layer, conductive electrode and the thin polymer film stacked gradually;
The conductive electrode is that resistivity is less than 1000 Ω m aluminium or copper is silver-colored or golden or indium tin oxide (ITO) or stone Black alkene or CNT or styrene sulfonic acid (PEDOT-PSS).
4. preparation method according to claim 3, it is characterised in that the instrument that the fluorocarbon plasma processing is used for Reactive ion etching machine (Reactive Ion Etching, RIE) or sense coupling machine (Inductively Coupled Plasma, ICP).
5. preparation method according to claim 4, it is characterised in that the thin polymer film includes for flexible insulating material Polyethylene terephthalate (polyethylene terephthalate, PET), lucite.
6. preparation method according to claim 3, it is characterised in that the friction polymeric material is poly dimethyl silicon Oxygen alkane (polydimethylsiloxane, PDMS) or polyimides (polymide, PI) or polytetrafluoroethylene (PTFE) (polytetrafluoroethylene, PTFE).
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