ATE464692T1 - Eine elektrische stromversorgung die besonders für gleichstromplasmabehandlung anwendbar ist - Google Patents

Eine elektrische stromversorgung die besonders für gleichstromplasmabehandlung anwendbar ist

Info

Publication number
ATE464692T1
ATE464692T1 AT01202697T AT01202697T ATE464692T1 AT E464692 T1 ATE464692 T1 AT E464692T1 AT 01202697 T AT01202697 T AT 01202697T AT 01202697 T AT01202697 T AT 01202697T AT E464692 T1 ATE464692 T1 AT E464692T1
Authority
AT
Austria
Prior art keywords
power supply
direct current
electrical power
plasma treatment
particularly applicable
Prior art date
Application number
AT01202697T
Other languages
English (en)
Inventor
Alfred-Christophe Rufer
Claudio Zimmermann
Frederic Muller
Albert Bulliard
Original Assignee
Cpautomation S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cpautomation S A filed Critical Cpautomation S A
Application granted granted Critical
Publication of ATE464692T1 publication Critical patent/ATE464692T1/de

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00Conversion of dc power input into dc power output
    • H02M3/22Conversion of dc power input into dc power output with intermediate conversion into ac
    • H02M3/24Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
    • H02M3/28Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00Conversion of dc power input into dc power output
    • H02M3/22Conversion of dc power input into dc power output with intermediate conversion into ac
    • H02M3/24Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
    • H02M3/28Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
    • H02M3/325Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33569Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
    • H02M3/33571Half-bridge at primary side of an isolation transformer
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00Conversion of dc power input into dc power output
    • H02M3/22Conversion of dc power input into dc power output with intermediate conversion into ac
    • H02M3/24Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
    • H02M3/28Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
    • H02M3/325Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33569Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
    • H02M3/33573Full-bridge at primary side of an isolation transformer
AT01202697T 2001-07-16 2001-07-16 Eine elektrische stromversorgung die besonders für gleichstromplasmabehandlung anwendbar ist ATE464692T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01202697A EP1278294B9 (de) 2001-07-16 2001-07-16 Eine elektrische Stromversorgung, die besonders für Gleichstromplasmabehandlung anwendbar ist

Publications (1)

Publication Number Publication Date
ATE464692T1 true ATE464692T1 (de) 2010-04-15

Family

ID=8180642

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01202697T ATE464692T1 (de) 2001-07-16 2001-07-16 Eine elektrische stromversorgung die besonders für gleichstromplasmabehandlung anwendbar ist

Country Status (4)

Country Link
US (1) US6567278B2 (de)
EP (1) EP1278294B9 (de)
AT (1) ATE464692T1 (de)
DE (1) DE60141822D1 (de)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW591974B (en) * 2002-11-14 2004-06-11 Richtek Technology Corp Two-phase H-bridge driving circuit and method
US7184146B2 (en) * 2003-06-24 2007-02-27 Cardinal Ig Company Methods and apparatus for evaluating insulating glass units
DE10330473A1 (de) * 2003-07-05 2005-01-27 Alstom Technology Ltd Frequenzumwandler für Hochgeschwindigkeitsgeneratoren
EP1501180A1 (de) * 2003-07-23 2005-01-26 ABB Schweiz AG Umrichterschaltung
US20050288739A1 (en) * 2004-06-24 2005-12-29 Ethicon, Inc. Medical implant having closed loop transcutaneous energy transfer (TET) power transfer regulation circuitry
US9997338B2 (en) * 2005-03-24 2018-06-12 Oerlikon Surface Solutions Ag, Pfäffikon Method for operating a pulsed arc source
WO2006099759A2 (de) 2005-03-24 2006-09-28 Oerlikon Trading Ag, Trübbach Vakuumplasmagenerator
US20060262574A1 (en) * 2005-05-20 2006-11-23 David Kelly DC high voltage to DC low voltage converter
JP4487199B2 (ja) * 2005-05-27 2010-06-23 Tdk株式会社 スイッチング電源装置
FR2893788B1 (fr) * 2005-11-21 2008-01-04 Renault Sas Alimentation electrique haute tension et reacteur a plasma
JP4797663B2 (ja) * 2006-02-03 2011-10-19 Tdk株式会社 スイッチング電源装置
US7558092B2 (en) * 2006-02-28 2009-07-07 Tdk Corporation Switching power supply unit
US8514601B2 (en) 2009-08-17 2013-08-20 Ideal Power Converters, Inc. Power conversion with added pseudo-phase
WO2011022442A2 (en) * 2009-08-17 2011-02-24 Ideal Power Converters Inc. Power conversion with added pseudo-phase
EP2874297B1 (de) 2006-06-06 2023-09-27 Ideal Power Inc. Buck-Boost Stromwandler
NZ550043A (en) * 2006-09-21 2008-01-31 Eaton Power Quality Company A switched mode power supply and method of production
JP4995277B2 (ja) * 2007-06-28 2012-08-08 新電元工業株式会社 双方向dc/dcコンバータ
US8133359B2 (en) 2007-11-16 2012-03-13 Advanced Energy Industries, Inc. Methods and apparatus for sputtering deposition using direct current
US9039871B2 (en) 2007-11-16 2015-05-26 Advanced Energy Industries, Inc. Methods and apparatus for applying periodic voltage using direct current
WO2011008567A2 (en) 2009-06-29 2011-01-20 Ideal Power Converters, Inc. Power transfer devices, methods, and systems with crowbar switch shunting energy-transfer reactance
KR101073598B1 (ko) 2009-12-17 2011-10-14 부경대학교 산학협력단 다중 병렬형 영전압 스위치형 풀 브릿지 직류-직류 변환기 및 그 제어방법
KR101140336B1 (ko) 2010-09-28 2012-05-03 한국전기연구원 절연형 벅 부스트 dc?dc 컨버터
WO2012075189A2 (en) 2010-11-30 2012-06-07 Ideal Power Converters Inc. Photovoltaic array systems, methods, and devices with bidirectional converter
US8531858B2 (en) 2011-02-18 2013-09-10 Ideal Power, Inc. Power conversion with current sensing coupled through saturating element
WO2014084925A1 (en) * 2012-11-27 2014-06-05 The Board Of Regents Of The University Of Texas System Rail plasma actuator for high-authority flow control
CN103391005A (zh) * 2013-07-24 2013-11-13 深圳市航天新源科技有限公司 一种功率可扩展的变结构变换器
US11539352B2 (en) 2013-11-14 2022-12-27 Eagle Harbor Technologies, Inc. Transformer resonant converter
US9960763B2 (en) 2013-11-14 2018-05-01 Eagle Harbor Technologies, Inc. High voltage nanosecond pulser
US10020800B2 (en) 2013-11-14 2018-07-10 Eagle Harbor Technologies, Inc. High voltage nanosecond pulser with variable pulse width and pulse repetition frequency
US10892140B2 (en) 2018-07-27 2021-01-12 Eagle Harbor Technologies, Inc. Nanosecond pulser bias compensation
US10978955B2 (en) 2014-02-28 2021-04-13 Eagle Harbor Technologies, Inc. Nanosecond pulser bias compensation
US10483089B2 (en) 2014-02-28 2019-11-19 Eagle Harbor Technologies, Inc. High voltage resistive output stage circuit
US11004660B2 (en) 2018-11-30 2021-05-11 Eagle Harbor Technologies, Inc. Variable output impedance RF generator
US11430635B2 (en) 2018-07-27 2022-08-30 Eagle Harbor Technologies, Inc. Precise plasma control system
CN115378264A (zh) 2017-02-07 2022-11-22 鹰港科技有限公司 变压器谐振转换器
KR102208429B1 (ko) 2017-08-25 2021-01-29 이글 하버 테크놀로지스, 인코포레이티드 나노초 펄스를 이용한 임의의 파형 발생
CN109873571A (zh) * 2017-12-04 2019-06-11 邹晓灵 一种通用逆变器及其控制方法
US11302518B2 (en) 2018-07-27 2022-04-12 Eagle Harbor Technologies, Inc. Efficient energy recovery in a nanosecond pulser circuit
US10607814B2 (en) * 2018-08-10 2020-03-31 Eagle Harbor Technologies, Inc. High voltage switch with isolated power
US11532457B2 (en) 2018-07-27 2022-12-20 Eagle Harbor Technologies, Inc. Precise plasma control system
US11222767B2 (en) 2018-07-27 2022-01-11 Eagle Harbor Technologies, Inc. Nanosecond pulser bias compensation
KR20230025034A (ko) 2018-08-10 2023-02-21 이글 하버 테크놀로지스, 인코포레이티드 RF 플라즈마 반응기용 플라즈마 시스(sheath) 제어
TW202308306A (zh) 2019-01-08 2023-02-16 美商鷹港科技股份有限公司 產生高壓脈波之方法
CN110165896B (zh) * 2019-04-30 2020-05-05 东南大学 一种基于集中式多绕组变压器的直流变压器及控制方法
CN110233579A (zh) * 2019-05-23 2019-09-13 北京动力源科技股份有限公司 一种并联整流拓扑结构和一种llc谐振电路
TWI778449B (zh) 2019-11-15 2022-09-21 美商鷹港科技股份有限公司 高電壓脈衝電路
WO2021134000A1 (en) 2019-12-24 2021-07-01 Eagle Harbor Technologies, Inc. Nanosecond pulser rf isolation for plasma systems
EP3968353A1 (de) * 2020-09-10 2022-03-16 Impedans Ltd Vorrichtung zur ionenenergieanalyse von plasmaprozessen
CN114285285A (zh) * 2021-05-10 2022-04-05 华北电力大学(保定) 一种基于t型桥及双变压器的新型宽电压增益直流变压器
CN114244121A (zh) * 2021-11-18 2022-03-25 北京动力源科技股份有限公司 一种dc-dc串并联拓扑结构
CN114244122A (zh) * 2021-11-24 2022-03-25 北京动力源科技股份有限公司 一种半桥llc恒功率宽范围变换器拓扑和电路
CN114244123A (zh) * 2021-11-24 2022-03-25 北京动力源科技股份有限公司 一种全桥llc恒功率宽范围变换器拓扑和电路

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2179477B (en) * 1985-08-23 1989-03-30 Ferranti Plc Power supply circuit
US4686617A (en) * 1986-06-06 1987-08-11 Rca Corporation Current limited constant frequency dc converter
US4761722A (en) * 1987-04-09 1988-08-02 Rca Corporation Switching regulator with rapid transient response
US5448467A (en) * 1992-04-13 1995-09-05 Ferreira; Jan A. Electrical power converter circuit
US5461297A (en) * 1993-05-24 1995-10-24 Analog Modules, Inc. Series-parallel switchable capacitor charging system
US5451962A (en) * 1994-08-26 1995-09-19 Martin Marietta Corporation Boost regulated capacitor multiplier for pulse load
US5541827A (en) * 1995-05-17 1996-07-30 Doble Engineering Company Reducing switching losses in a phase-modulated switch-mode amplifier
JP3288281B2 (ja) * 1997-09-17 2002-06-04 株式会社三社電機製作所 直流電源装置
US6310785B1 (en) 1999-09-01 2001-10-30 Regents Of The University Of Minnesota Zero voltage switching DC-DC converter

Also Published As

Publication number Publication date
US20030021125A1 (en) 2003-01-30
EP1278294B1 (de) 2010-04-14
EP1278294B9 (de) 2010-09-01
DE60141822D1 (de) 2010-05-27
US6567278B2 (en) 2003-05-20
EP1278294A1 (de) 2003-01-22

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