ATE464692T1 - Eine elektrische stromversorgung die besonders für gleichstromplasmabehandlung anwendbar ist - Google Patents
Eine elektrische stromversorgung die besonders für gleichstromplasmabehandlung anwendbar istInfo
- Publication number
- ATE464692T1 ATE464692T1 AT01202697T AT01202697T ATE464692T1 AT E464692 T1 ATE464692 T1 AT E464692T1 AT 01202697 T AT01202697 T AT 01202697T AT 01202697 T AT01202697 T AT 01202697T AT E464692 T1 ATE464692 T1 AT E464692T1
- Authority
- AT
- Austria
- Prior art keywords
- power supply
- direct current
- electrical power
- plasma treatment
- particularly applicable
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33569—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
- H02M3/33571—Half-bridge at primary side of an isolation transformer
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33569—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
- H02M3/33573—Full-bridge at primary side of an isolation transformer
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01202697A EP1278294B9 (de) | 2001-07-16 | 2001-07-16 | Eine elektrische Stromversorgung, die besonders für Gleichstromplasmabehandlung anwendbar ist |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE464692T1 true ATE464692T1 (de) | 2010-04-15 |
Family
ID=8180642
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT01202697T ATE464692T1 (de) | 2001-07-16 | 2001-07-16 | Eine elektrische stromversorgung die besonders für gleichstromplasmabehandlung anwendbar ist |
Country Status (4)
Country | Link |
---|---|
US (1) | US6567278B2 (de) |
EP (1) | EP1278294B9 (de) |
AT (1) | ATE464692T1 (de) |
DE (1) | DE60141822D1 (de) |
Families Citing this family (52)
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TW591974B (en) * | 2002-11-14 | 2004-06-11 | Richtek Technology Corp | Two-phase H-bridge driving circuit and method |
US7184146B2 (en) * | 2003-06-24 | 2007-02-27 | Cardinal Ig Company | Methods and apparatus for evaluating insulating glass units |
DE10330473A1 (de) * | 2003-07-05 | 2005-01-27 | Alstom Technology Ltd | Frequenzumwandler für Hochgeschwindigkeitsgeneratoren |
EP1501180A1 (de) * | 2003-07-23 | 2005-01-26 | ABB Schweiz AG | Umrichterschaltung |
US20050288739A1 (en) * | 2004-06-24 | 2005-12-29 | Ethicon, Inc. | Medical implant having closed loop transcutaneous energy transfer (TET) power transfer regulation circuitry |
US9997338B2 (en) * | 2005-03-24 | 2018-06-12 | Oerlikon Surface Solutions Ag, Pfäffikon | Method for operating a pulsed arc source |
WO2006099759A2 (de) | 2005-03-24 | 2006-09-28 | Oerlikon Trading Ag, Trübbach | Vakuumplasmagenerator |
US20060262574A1 (en) * | 2005-05-20 | 2006-11-23 | David Kelly | DC high voltage to DC low voltage converter |
JP4487199B2 (ja) * | 2005-05-27 | 2010-06-23 | Tdk株式会社 | スイッチング電源装置 |
FR2893788B1 (fr) * | 2005-11-21 | 2008-01-04 | Renault Sas | Alimentation electrique haute tension et reacteur a plasma |
JP4797663B2 (ja) * | 2006-02-03 | 2011-10-19 | Tdk株式会社 | スイッチング電源装置 |
US7558092B2 (en) * | 2006-02-28 | 2009-07-07 | Tdk Corporation | Switching power supply unit |
US8514601B2 (en) | 2009-08-17 | 2013-08-20 | Ideal Power Converters, Inc. | Power conversion with added pseudo-phase |
WO2011022442A2 (en) * | 2009-08-17 | 2011-02-24 | Ideal Power Converters Inc. | Power conversion with added pseudo-phase |
EP2874297B1 (de) | 2006-06-06 | 2023-09-27 | Ideal Power Inc. | Buck-Boost Stromwandler |
NZ550043A (en) * | 2006-09-21 | 2008-01-31 | Eaton Power Quality Company | A switched mode power supply and method of production |
JP4995277B2 (ja) * | 2007-06-28 | 2012-08-08 | 新電元工業株式会社 | 双方向dc/dcコンバータ |
US8133359B2 (en) | 2007-11-16 | 2012-03-13 | Advanced Energy Industries, Inc. | Methods and apparatus for sputtering deposition using direct current |
US9039871B2 (en) | 2007-11-16 | 2015-05-26 | Advanced Energy Industries, Inc. | Methods and apparatus for applying periodic voltage using direct current |
WO2011008567A2 (en) | 2009-06-29 | 2011-01-20 | Ideal Power Converters, Inc. | Power transfer devices, methods, and systems with crowbar switch shunting energy-transfer reactance |
KR101073598B1 (ko) | 2009-12-17 | 2011-10-14 | 부경대학교 산학협력단 | 다중 병렬형 영전압 스위치형 풀 브릿지 직류-직류 변환기 및 그 제어방법 |
KR101140336B1 (ko) | 2010-09-28 | 2012-05-03 | 한국전기연구원 | 절연형 벅 부스트 dc?dc 컨버터 |
WO2012075189A2 (en) | 2010-11-30 | 2012-06-07 | Ideal Power Converters Inc. | Photovoltaic array systems, methods, and devices with bidirectional converter |
US8531858B2 (en) | 2011-02-18 | 2013-09-10 | Ideal Power, Inc. | Power conversion with current sensing coupled through saturating element |
WO2014084925A1 (en) * | 2012-11-27 | 2014-06-05 | The Board Of Regents Of The University Of Texas System | Rail plasma actuator for high-authority flow control |
CN103391005A (zh) * | 2013-07-24 | 2013-11-13 | 深圳市航天新源科技有限公司 | 一种功率可扩展的变结构变换器 |
US11539352B2 (en) | 2013-11-14 | 2022-12-27 | Eagle Harbor Technologies, Inc. | Transformer resonant converter |
US9960763B2 (en) | 2013-11-14 | 2018-05-01 | Eagle Harbor Technologies, Inc. | High voltage nanosecond pulser |
US10020800B2 (en) | 2013-11-14 | 2018-07-10 | Eagle Harbor Technologies, Inc. | High voltage nanosecond pulser with variable pulse width and pulse repetition frequency |
US10892140B2 (en) | 2018-07-27 | 2021-01-12 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
US10978955B2 (en) | 2014-02-28 | 2021-04-13 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
US10483089B2 (en) | 2014-02-28 | 2019-11-19 | Eagle Harbor Technologies, Inc. | High voltage resistive output stage circuit |
US11004660B2 (en) | 2018-11-30 | 2021-05-11 | Eagle Harbor Technologies, Inc. | Variable output impedance RF generator |
US11430635B2 (en) | 2018-07-27 | 2022-08-30 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
CN115378264A (zh) | 2017-02-07 | 2022-11-22 | 鹰港科技有限公司 | 变压器谐振转换器 |
KR102208429B1 (ko) | 2017-08-25 | 2021-01-29 | 이글 하버 테크놀로지스, 인코포레이티드 | 나노초 펄스를 이용한 임의의 파형 발생 |
CN109873571A (zh) * | 2017-12-04 | 2019-06-11 | 邹晓灵 | 一种通用逆变器及其控制方法 |
US11302518B2 (en) | 2018-07-27 | 2022-04-12 | Eagle Harbor Technologies, Inc. | Efficient energy recovery in a nanosecond pulser circuit |
US10607814B2 (en) * | 2018-08-10 | 2020-03-31 | Eagle Harbor Technologies, Inc. | High voltage switch with isolated power |
US11532457B2 (en) | 2018-07-27 | 2022-12-20 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
US11222767B2 (en) | 2018-07-27 | 2022-01-11 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
KR20230025034A (ko) | 2018-08-10 | 2023-02-21 | 이글 하버 테크놀로지스, 인코포레이티드 | RF 플라즈마 반응기용 플라즈마 시스(sheath) 제어 |
TW202308306A (zh) | 2019-01-08 | 2023-02-16 | 美商鷹港科技股份有限公司 | 產生高壓脈波之方法 |
CN110165896B (zh) * | 2019-04-30 | 2020-05-05 | 东南大学 | 一种基于集中式多绕组变压器的直流变压器及控制方法 |
CN110233579A (zh) * | 2019-05-23 | 2019-09-13 | 北京动力源科技股份有限公司 | 一种并联整流拓扑结构和一种llc谐振电路 |
TWI778449B (zh) | 2019-11-15 | 2022-09-21 | 美商鷹港科技股份有限公司 | 高電壓脈衝電路 |
WO2021134000A1 (en) | 2019-12-24 | 2021-07-01 | Eagle Harbor Technologies, Inc. | Nanosecond pulser rf isolation for plasma systems |
EP3968353A1 (de) * | 2020-09-10 | 2022-03-16 | Impedans Ltd | Vorrichtung zur ionenenergieanalyse von plasmaprozessen |
CN114285285A (zh) * | 2021-05-10 | 2022-04-05 | 华北电力大学(保定) | 一种基于t型桥及双变压器的新型宽电压增益直流变压器 |
CN114244121A (zh) * | 2021-11-18 | 2022-03-25 | 北京动力源科技股份有限公司 | 一种dc-dc串并联拓扑结构 |
CN114244122A (zh) * | 2021-11-24 | 2022-03-25 | 北京动力源科技股份有限公司 | 一种半桥llc恒功率宽范围变换器拓扑和电路 |
CN114244123A (zh) * | 2021-11-24 | 2022-03-25 | 北京动力源科技股份有限公司 | 一种全桥llc恒功率宽范围变换器拓扑和电路 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
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GB2179477B (en) * | 1985-08-23 | 1989-03-30 | Ferranti Plc | Power supply circuit |
US4686617A (en) * | 1986-06-06 | 1987-08-11 | Rca Corporation | Current limited constant frequency dc converter |
US4761722A (en) * | 1987-04-09 | 1988-08-02 | Rca Corporation | Switching regulator with rapid transient response |
US5448467A (en) * | 1992-04-13 | 1995-09-05 | Ferreira; Jan A. | Electrical power converter circuit |
US5461297A (en) * | 1993-05-24 | 1995-10-24 | Analog Modules, Inc. | Series-parallel switchable capacitor charging system |
US5451962A (en) * | 1994-08-26 | 1995-09-19 | Martin Marietta Corporation | Boost regulated capacitor multiplier for pulse load |
US5541827A (en) * | 1995-05-17 | 1996-07-30 | Doble Engineering Company | Reducing switching losses in a phase-modulated switch-mode amplifier |
JP3288281B2 (ja) * | 1997-09-17 | 2002-06-04 | 株式会社三社電機製作所 | 直流電源装置 |
US6310785B1 (en) | 1999-09-01 | 2001-10-30 | Regents Of The University Of Minnesota | Zero voltage switching DC-DC converter |
-
2001
- 2001-07-16 EP EP01202697A patent/EP1278294B9/de not_active Expired - Lifetime
- 2001-07-16 AT AT01202697T patent/ATE464692T1/de not_active IP Right Cessation
- 2001-07-16 DE DE60141822T patent/DE60141822D1/de not_active Expired - Lifetime
-
2002
- 2002-06-27 US US10/185,822 patent/US6567278B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20030021125A1 (en) | 2003-01-30 |
EP1278294B1 (de) | 2010-04-14 |
EP1278294B9 (de) | 2010-09-01 |
DE60141822D1 (de) | 2010-05-27 |
US6567278B2 (en) | 2003-05-20 |
EP1278294A1 (de) | 2003-01-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |