WO2021189841A1 - Method for manufacturing solar cell with touch function - Google Patents

Method for manufacturing solar cell with touch function Download PDF

Info

Publication number
WO2021189841A1
WO2021189841A1 PCT/CN2020/124406 CN2020124406W WO2021189841A1 WO 2021189841 A1 WO2021189841 A1 WO 2021189841A1 CN 2020124406 W CN2020124406 W CN 2020124406W WO 2021189841 A1 WO2021189841 A1 WO 2021189841A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
solar cell
touch sensing
layer
unit
Prior art date
Application number
PCT/CN2020/124406
Other languages
French (fr)
Chinese (zh)
Inventor
李源
谢雄才
眭斌
张文进
杨亮
任国光
廖亿彬
Original Assignee
信利半导体有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 信利半导体有限公司 filed Critical 信利半导体有限公司
Publication of WO2021189841A1 publication Critical patent/WO2021189841A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Definitions

  • the present invention relates to the technical field of solar cells, and more specifically to a method for manufacturing a solar cell with touch control function.
  • the solar cell in the prior art realizes the touch function, it usually adopts an external method to attach and connect the finished touch sensing structure and the finished solar cell to the driving circuit to form a solar cell module with touch function.
  • the solar cell module is not only complex in structure, but also in terms of thickness does not meet the demand for thinner and lighter products.
  • the present invention provides a method for manufacturing a solar cell with touch function, by setting the touch sensing electrode of the touch sensing unit and the first electrode of the solar cell unit to the same material. It is completed in the same manufacturing process, and there is no need to separately manufacture the solar cell unit and the touch sensing unit, which reduces the manufacturing steps of the solar cell and reduces the complexity of processing, and has a simple structure and thin thickness.
  • a method for manufacturing a solar cell with touch function wherein the solar cell has a first area and a second area, including the following steps:
  • Step 1 Provide a transparent substrate
  • Step 2 Perform the production of the first electrode and the production of the touch sensing electrode on the same side of the transparent substrate at the same time, the first electrode and the touch sensing electrode are made of the same material, and the touch sensing electrode is a single-layer transparent Conductive oxide film structure, the touch sensing electrode is made in the first area and the first electrode is made in the second area;
  • Step 3 Making a protective layer on the outside of the touch sensing electrode to form a touch sensing unit
  • Step 4 forming a photovoltaic layer and a second electrode on the first electrode in sequence
  • Step 5 After cleaning, sequentially image and etch the second electrode and the photovoltaic layer to form a solar cell unit.
  • it further includes the production of an insulating layer and the production of an auxiliary electrode layer for the first electrode, and the insulating layer is used to insulate and separate the auxiliary electrode layer from the second electrode.
  • it further includes the binding production of the touch sensing unit and the binding production of the solar battery unit, and the binding of the touch sensing unit and the binding of the solar battery unit use the same flexible printed circuit board.
  • the auxiliary electrode layer and/or the second electrode are also used for the production of binding electrodes of the touch sensing unit.
  • the manufacturing method of the solar cell with touch function of the present invention adopts the same material for the touch sensing electrode of the touch sensing unit and the first electrode of the solar cell unit, which is completed in the same manufacturing process, and does not require the solar cell unit It is made separately from the touch sensor unit, which reduces the manufacturing steps of the solar cell and reduces the processing complexity. It can also solve the problem of the positional deviation of the touch sensor unit and the solar cell unit during separate production, and reduce the electrical connection The complexity of the flexible printed circuit board binding, and the problem of reducing the number of flexible printed circuit boards and the number of binding times;
  • the solar cell unit and the touch sensing unit are insulated from each other. Specifically, the insulation between the two can be achieved by the protective layer of the touch sensing unit, so as to prevent the solar cell unit and the touch sensing unit from affecting each other.
  • the solar battery unit and the touch sensor unit are arranged side by side and separately, when the solar battery is applied to other devices with display, the solar battery unit avoids the display area, and the solar battery unit does not produce any effect on the display area corresponding to the touch sensor unit. For any impact, the power of the solar battery is then provided to the display device with higher power consumption, which effectively improves the endurance of the display device.
  • the arrangement of the touch sensing unit of the present invention is equivalent to hollowing out the entire solar cell into the first area, and then integrating the touch sensing unit into the solar cell, so that the solar cell has a touch function;
  • the flexible printed circuit board of the present invention is electrically connected to the solar battery unit and the touch sensing unit at the same time, so that a piece of flexible printed circuit board can be used as the output of the two functions of the solar battery unit and the touch sensing unit at the same time, effectively reducing devices
  • the difficulty of binding processing and the design complexity and size of the drive motherboard are conducive to improving the integration of solar cells.
  • FIG. 1 is a process flow diagram of a method for manufacturing a solar cell with touch function according to the present invention
  • FIG. 2 is a schematic diagram of a side view structure of a solar cell with touch function of the present invention
  • FIG. 3 is a schematic diagram of the planar structure of the solar cell with touch function of the present invention.
  • FIG. 4 is a schematic diagram of the side view structure of the display insulating layer and auxiliary electrode layer of the solar cell with touch function of the present invention and the binding terminal of the display touch sensing electrode;
  • FIG. 5 is a schematic diagram of the planar structure of the flexible printed circuit board of the present invention bound to the solar cell;
  • FIG. 6 is a schematic diagram of the planar structure of the flexible printed circuit board of the solar cell with touch function of the present invention.
  • first”, “second”, and “third” are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined with “first”, “second”, and “third” may explicitly or implicitly include one or more of these features.
  • “plurality” means two or more than two, unless otherwise specifically defined.
  • the terms “installed”, “connected”, “connected”, “fixed”, “set” and other terms should be understood in a broad sense.
  • it can be a fixed connection or a fixed connection. It can be detachably connected or integrated; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediate medium, and it can also be the internal communication of two components or the interaction relationship between two components .
  • the specific meanings of the above-mentioned terms in the present invention can be understood according to specific situations.
  • the first embodiment of the present invention provides a method for manufacturing a solar cell with touch function, wherein the solar cell has a first area 10-b and a second area 10-a, as shown in FIG.
  • the second area 10-a is arranged around the first area 10-b, and is formed on the outer peripheral edge of the first area 10-b.
  • the distribution of -a is only used as an example, and should not be limited by this.
  • the first area 10-b and the second area 10-a may be arranged side by side.
  • the solar cell is in the shape of a film or a plate as a whole, and can be used on an electronic display device or an electronic wearable device to provide electrical energy for photoelectric conversion for the electronic display device and the electronic wearable device.
  • the manufacturing method of the solar cell with touch function includes the following steps:
  • Step 1 Provide a transparent substrate 10.
  • the transparent substrate 10 can be a transparent inorganic material such as glass, quartz, or a transparent organic polymer material, etc., and the light transmittance can be above 90%, and the normal display and photoelectric conversion efficiency will not be affected. , It can be rigid material or flexible material to meet different needs.
  • Step 2 On the same side of the transparent substrate 10, the first electrode 21 is made and the touch sensing electrode 31 is made at the same time.
  • the first electrode 21 and the touch sensing electrode 31 are made of the same material, and the touch sensing
  • the electrode 31 is a single-layer transparent conductive oxide film structure.
  • the touch sensing electrode 31 is fabricated in the first area 10-b and the first electrode 21 is fabricated in the second area 10-a.
  • the first electrode 21 and the touch sensing electrode 31 may be formed into a film first, and then the first electrode 21 and the touch sensing electrode 31 may be imaged and etched into a pattern.
  • the film forming temperature of the first electrode 21 and the touch sensing electrode 31 may be at room temperature or at a high temperature of 230° C.-350° C., and the film thickness may be between 20 nm and 1000 nm.
  • the first side of the first electrode 21 facing away from the transparent substrate 10 can also be selected to be textured with low-concentration HCl or an alkaline substance to form an uneven plane to improve the absorption of ambient light.
  • the first electrode 21 and the touch sensing electrode 31 can be made of TCO material, including but not limited to AZO (aluminum-doped zinc oxide), ITO (smoky tin oxide), nano-silver, magnesium-silver alloy or graphene and other transparent conductive oxide films , Improve the transmittance and reduce the impact on the display effect.
  • TCO material including but not limited to AZO (aluminum-doped zinc oxide), ITO (smoky tin oxide), nano-silver, magnesium-silver alloy or graphene and other transparent conductive oxide films , Improve the transmittance and reduce the impact on the display effect.
  • the touch sensing electrode 31 of the embodiment of the present invention adopts a single-layer transparent conductive oxide film to realize the touch function, and has a simple structure.
  • the touch sensing electrode 31 includes an emitter electrode and a receiver electrode, which is an existing technology in the prior art, and will not be repeated in this application.
  • Step 3 Form the protective layer 32 on the outer surface of the touch sensing electrode 31 to form the touch sensing unit 30.
  • the protective layer 32 covers the outside of the touch sensing electrode 31 and extends to contact with the transparent substrate 10 to achieve a comprehensive sealing protection for the touch sensing electrode 31.
  • the protective layer 32 can be made of inorganic silicon oxide, silicon nitride, or one or more of organic materials such as acrylic resin, epoxy resin, polyurethane resin, polyester resin, and polypropylene resin.
  • Step 4 forming a photovoltaic layer 22 and a second electrode 23 on the first electrode 21 in sequence.
  • the photovoltaic layer 22 can be divided into a P layer, an I layer, and an N layer.
  • the thickness of the P layer is 10 nm-30 nm
  • the film forming temperature is 150° C.-250° C.
  • the thickness of the I layer is 300 nm to 500 nm
  • the film is formed.
  • the temperature is 150°C-250°C
  • the thickness of the N layer is 20 nm-40nm
  • the film forming temperature is 150°C-250°C.
  • the photovoltaic layer 22 can be, but is not limited to, a PN or PIN device made of polysilicon, amorphous silicon or gallium arsenide materials.
  • the second electrode 23 can be a single-layer electrode film or a multi-layer electrode film, and can be, but not limited to, a single metal material, an alloy material, or a metal oxide/nitride/halide material, etc., these single metal materials, alloys, etc.
  • the metal element contained in the material or the metal oxide/nitride/halide material is one of gold, silver, copper, aluminum, nickel, or molybdenum with low resistivity.
  • Step 5 After cleaning, the second electrode 23 and the photovoltaic layer 22 are sequentially imaged and etched to form the solar cell unit 20.
  • the second electrode 23 can be chemically etched after exposure and imaging by applying glue, and the photovoltaic layer 22 can be etched by dry etching.
  • the method for manufacturing a solar cell with touch function uses the same material for the touch sensing electrode 31 of the touch sensing unit 30 and the first electrode 21 of the solar cell unit 20, and is completed in the same manufacturing process.
  • the solar cell unit 20 and the touch sensing unit 30 need to be manufactured separately, which reduces the manufacturing steps of the solar cell and reduces the complexity of processing, and can also solve the positional deviation of the touch sensing unit 30 and the solar cell unit 20 when they are manufactured separately. problem.
  • the solar cell unit 20 of the embodiment of the present invention may have a transparent structure, an opaque structure or a translucent structure.
  • the material of the second electrode 23 can be selected according to actual requirements to determine whether the solar cell unit 20 is transparent or not.
  • the solar cell unit 20 may be a solar cell unit 20 with a single junction structure, or a solar cell unit 20 connected in series with a multi-junction structure.
  • the specific arrangement of the structure can adopt the conventional technology in the prior art, and the present invention has not done anything.
  • the area of the solar battery unit 20 is directly proportional to the photoelectric conversion effect, that is, in order to receive more external light, the area of the solar battery unit 20 can be increased to obtain a better photoelectric conversion effect.
  • the equipment provides more power and prolongs the use time.
  • the solar cell unit 20 and the touch sensing unit 30 are insulated or disconnected from each other.
  • the protective layer 32 of the touch sensing unit 30 can be used to isolate the two to avoid the solar cell unit 20.
  • the touch sensing unit 30 interact with each other.
  • the solar battery unit 20 and the touch sensing unit 30 are arranged side by side and separately, when the solar battery is applied to other electronic devices with display, the touch sensing unit 30 is correspondingly formed in the display area, and the solar battery unit 20 avoids the display area.
  • the solar battery unit 20 does not have any influence on the display area corresponding to the touch sensing unit 30, and then the electric energy of the solar battery is provided to the display device with larger power consumption, which effectively improves the endurance of the display device.
  • the arrangement of the touch sensing unit 30 of the present invention is equivalent to hollowing out the entire solar cell into the first area 10-b, and then integrating the touch sensing unit 30 in the solar cell, so that the solar cell has a touch function.
  • the manufacturing method of the solar cell further includes fabricating an auxiliary electrode layer 50 on the first electrode 21, and the auxiliary electrode layer 50 is made by a physical vapor deposition method.
  • This step also includes the production of an insulating layer 40 that insulates and separates the auxiliary electrode layer 50 from the second electrode 23.
  • the auxiliary electrode layer 50 can reduce the resistance of the first electrode 21, improve the conversion efficiency of the thin-film solar cell unit 20 under strong light, and at the same time facilitate the extraction of the first electrode 21.
  • auxiliary electrode layer 50 is arranged on the uppermost layer to facilitate the large-area arrangement of the auxiliary electrode layer 50 to minimize the resistance of the first electrode 21.
  • the auxiliary electrode layer 50 can be extended through the hole to be in contact with the first electrode 21 by opening the second electrode 23 and the photovoltaic layer 22 (this connection is an existing Conventional technology in the technology, not shown in FIG. 4), using a small-area opening method can minimize the influence of the auxiliary electrode layer 50 on the photoelectric conversion area.
  • the solar cell manufacturing method of the present invention further includes the binding and manufacturing of the touch sensing unit 30 and the binding and manufacturing of the solar cell unit 20, the binding of the touch sensing unit 30 and the solar cell unit 20
  • the binding is preferably made of the same flexible printed circuit board, which can reduce the complexity of the flexible printed circuit board binding used for electrical connection, and reduce the number of flexible printed circuit boards and the number of binding times.
  • the lead-out electrode area of the solar cell unit 20 may be bound to the electrode binding area of the touch sensing unit 30 They are arranged side by side in the same direction of the transparent substrate 10, so that a flexible printed circuit board can be used as the output of the two functions of the solar cell unit 20 and the touch sensing unit 30 at the same time, effectively reducing the difficulty of device binding and processing and the design of the drive motherboard
  • the complexity and size are conducive to improving the integration of solar cells.
  • the electrode binding of the touch sensing unit 30 can be directly led out to the binding position 30-a of the touch sensing unit 30 through the touch sensing electrode 31, and the binding of the touch sensing unit 30
  • the position 30-a is formed between the binding positions 20-a of the solar battery unit 20, and the binding position 30-a of the touch sensing unit 30 and the binding position 20-a of the solar battery unit 20 are separated from each other.
  • the output terminal 30-b of the touch sensing unit 30 and the output terminal 20-b of the solar battery unit 20 are also arranged on the flexible printed circuit board.
  • the auxiliary electrode layer 50 and/(or) the second electrode 23 can also be used for the production of the binding electrode of the touch sensing unit 30, that is, the auxiliary electrode layer 50 and/(or) )
  • the auxiliary electrode layer 50 and/or the second electrode 23 can be simultaneously formed on the binding position 30-a of the touch sensing unit to increase the thickness of the binding electrode of the touch sensing unit 30 , So that the thickness of the binding electrode of the solar cell unit 20 and the binding electrode of the touch sensing unit 30 are the same.
  • the binding electrode of the touch sensing unit 30 can also utilize the auxiliary electrode layer 50 and/or the second electrode 23 , The thickness of the binding electrode is increased.
  • the auxiliary electrode layer 50 and the second electrode 23 used for the binding electrode should be insulated and separated from the auxiliary electrode layer 50 and the second electrode 23 of the solar cell unit 20 to form separate parts. , So as to avoid short circuit.
  • the laminated thickness of the binding electrode output terminals of different functions can also be designed to have the same thickness structure.
  • ACF isotropic Conductive Film
  • the auxiliary electrode layer 50 can be, but not limited to, metal simple substance, alloy material, metal oxide/nitride/halide material or nano-conductive material, including but not limited to evaporation, ion plating, magnetron sputtering or CVD.
  • the metal element can be Al, Ag, etc.
  • the alloy material can be magnesium-silver alloy or molybdenum-silver alloy, etc.
  • the metal oxide/nitride/halide material can be ITO or IZO, etc., nano-conductivity
  • the material can be graphene or the like.
  • the auxiliary electrode layer 50 formed of these simple metal materials, alloy materials, metal oxide/nitride/halide materials or nano-conductive materials can achieve a transparent optical effect when the thickness is less than a certain value.
  • the insulating layer When the insulating layer is made of organic matter, it can be prepared by applying glue, exposing and developing, pad printing or silk screen printing, and the process is simpler. When the insulating layer is protected by non-metallic protection such as SiNx, SiO2, etc., it can be formed by chemical weather deposition (CVD) or magnetron sputtering, and then exposed to yellow light to make the pattern and then dry-etched into the pattern.
  • CVD chemical weather deposition
  • magnetron sputtering magnetron sputtering
  • the second embodiment of the present invention provides a solar cell with touch function, which has a first area 10-b and a second area 10-a.
  • the second area 10-a is shown in FIG. a is arranged around the first area 10-b and is formed on the outer peripheral edge of the first area 10-b.
  • the distribution of the first area 10-b and the second area 10-a in the figure is only As an example, this should not be used as a limitation.
  • the first area 10-b and the second area 10-a may be arranged side by side.
  • the solar cell is in the shape of a film or a plate as a whole, and can be used on an electronic display device or an electronic wearable device to provide electrical energy for photoelectric conversion for the electronic display device and the electronic wearable device.
  • the solar cell includes a transparent substrate 10, the solar cell unit 20 and the touch sensing unit 30 are juxtaposed on the same side of the transparent substrate 10, and the touch sensing unit 30 is formed in the first area 10. -b, the solar cell unit 20 is formed in the second area 10-a.
  • the solar cell unit 20 includes a first electrode 21, a photovoltaic layer 22, and a second electrode 23 that are sequentially stacked on the transparent substrate 10, and the touch sensing unit 30 includes a touch sensing electrode 31 that is disposed on the transparent substrate 10.
  • the thickness of the first electrode 21 and the touch sensing electrode 31 formed on the transparent substrate 10 can be different according to actual conditions.
  • the mask is used for the first area 10-b or the second area 10-a. Time masking can be achieved.
  • the touch sensing electrode 31 of the touch sensing unit 30 and the first electrode 21 of the solar cell unit 20 are made of the same material and completed in the same manufacturing process, without the need to separate the solar cell unit 20 and the touch sensing unit 30. This reduces the manufacturing steps of the solar cell and reduces the complexity of the processing, and can also solve the problem of the positional deviation of the touch sensing unit 30 and the solar cell unit 20 when they are separately manufactured.
  • the solar cell unit 20 further includes an auxiliary electrode layer 50 connected to the first electrode 21.
  • the solar cell unit 20 further includes an insulating layer 40, and the auxiliary electrode layer 50 should be insulated and separated from the second electrode 23 by the insulating layer 40 to avoid short circuits.
  • the auxiliary electrode layer 50 can reduce the resistance of the first electrode 21, improve the conversion efficiency of the thin-film solar cell unit 20 under strong light, and at the same time facilitate the extraction of the first electrode 21.
  • the auxiliary electrode layer 50 shown in FIG. 4 is arranged on the uppermost layer to facilitate the large-area arrangement of the auxiliary electrode layer 50 to minimize the resistance of the first electrode 21.
  • the auxiliary electrode layer 50 can be extended through the hole to be in contact with the first electrode 21 by opening the second electrode 23 and the photovoltaic layer 22 (this connection is an existing The conventional technology in the technology, not shown in FIG. 4), the use of a small-area opening method can minimize the influence of the auxiliary electrode layer 50 on the photoelectric conversion area.
  • the auxiliary electrode layer 50 and/(or) the second electrode 23 can also be used for the production of the binding electrode of the touch sensing unit 30, that is, when the auxiliary electrode layer 50 and/(or) the second electrode 23 is made .
  • the auxiliary electrode layer 50 and/or the second electrode 23 can be fabricated on the binding electrode of the touch sensing unit at the same time to increase the thickness of the binding electrode of the touch sensing unit 30, thereby making the solar cell unit 20 bind
  • the fixed electrode and the bound electrode of the touch sensing unit 30 have the same thickness.
  • the electrode binding of the touch sensing unit 30 may also utilize the auxiliary electrode layer 50 and/or the second electrode. 23. Increase the thickness of the binding electrode.
  • the auxiliary electrode layer 50 and the second electrode 23 used for the binding electrode should be insulated from the auxiliary electrode layer 50 and the second electrode 23 of the solar cell unit 20 to form mutually independent Part to avoid a short circuit.
  • the laminated thickness of the binding electrode output terminals of different functions can also be designed to have the same thickness structure.
  • ACF anisotropic conductive film
  • the solar cell further includes a flexible printed circuit board, and the flexible printed circuit board is preferably used for binding and touch control of the solar cell unit 20 at the same time.
  • the binding of the sensing unit 30 reduces the complexity of the flexible printed circuit board binding used for electrical connection, and reduces the number of flexible printed circuit boards and the number of binding times.
  • the binding area of the solar cell unit 20 that is, the binding area of the first electrode 21 and the second electrode 23
  • the binding area of the touch sensing unit 30 may be arranged side by side in the same direction of the transparent substrate 10.
  • a flexible printed circuit board can be used as the output of the two functions of the solar cell unit 20 and the touch sensor unit 30 at the same time, which effectively reduces the difficulty of binding and processing of the device and the design complexity and size of the driving motherboard, which is beneficial to improve the solar energy.
  • the degree of integration of the battery is beneficial to improve the solar energy.
  • the binding position 30-a of the touch sensing unit 30 is formed between the binding positions 20-a of the solar cell unit 20, and the binding position 30-a of the touch sensing unit 30 is connected to the solar cell unit 20.
  • the binding positions 20-a of the battery cells 20 are separated from each other.
  • the output terminal 30-b of the touch sensing unit 30 and the output terminal 20-b of the solar battery unit 20 are also arranged on the flexible printed circuit board.
  • the first electrode 21 and the touch sensing electrode 31 can be made of TCO material, including but not limited to AZO (aluminum-doped zinc oxide), ITO (smoky tin oxide), nano-silver, magnesium-silver alloy or graphene and other transparent conductive oxide films .
  • TCO material including but not limited to AZO (aluminum-doped zinc oxide), ITO (smoky tin oxide), nano-silver, magnesium-silver alloy or graphene and other transparent conductive oxide films .
  • AZO aluminum-doped zinc oxide
  • ITO silicaluminum-doped zinc oxide
  • nano-silver magnesium-silver alloy
  • graphene graphene and other transparent conductive oxide films
  • the second electrode 23 can be a single-layer electrode film or a multi-layer electrode film, and can be, but not limited to, a single metal material, an alloy material, or a metal oxide/nitride/halide material, etc., these single metal materials, alloys, etc.
  • the metal element contained in the material or the metal oxide/nitride/halide material is one of gold, silver, copper, aluminum, nickel, or molybdenum with low resistivity.
  • the auxiliary electrode layer 50 can be, but not limited to, metal simple substance, alloy material, metal oxide/nitride/halide material or nano-conductive material, including but not limited to evaporation, ion plating, magnetron sputtering or CVD.
  • the metal element can be Al, Ag, etc.
  • the alloy material can be magnesium-silver alloy or molybdenum-silver alloy, etc.
  • the metal oxide/nitride/halide material can be ITO or IZO, etc., nano-conductivity
  • the material can be graphene or the like.
  • the auxiliary electrode layer 50 formed of these simple metal materials, alloy materials, metal oxide/nitride/halide materials or nano-conductive materials can achieve a transparent optical effect when the thickness is less than a certain value.
  • the photovoltaic layer 22 can be, but is not limited to, a PN or PIN device made of polysilicon, amorphous silicon or gallium arsenide materials.
  • the first electrode 21 and the second electrode 23 form a loop, so that the charge carriers generated by the photovoltaic layer 22 are excited by light irradiation to form a current, thereby providing electrical energy for the device.
  • the first electrode 21 shown in FIG. 1 is irradiated by external light.
  • external light is directly irradiated on the first electrode 21 through the transparent substrate 10, and the second electrode 23 is the back electrode irradiated with the back light.
  • the transparent substrate 10 may be transparent inorganic materials such as glass, quartz, or transparent organic polymer materials, etc., and the light transmittance is only required to be above 90%, and normal display will not be affected. And the efficiency of photoelectric conversion, it can be a rigid material or a flexible material to meet different needs.
  • the protective layer 32 used to cover the touch sensing electrode 31 is preferably, but not limited to, transparent photoresist (organic polymer material) or inorganic SiO2, SiNx, and other materials.
  • the solar cell unit 20 and the touch sensing unit 30 are insulated from each other.
  • the protective layer 32 of the touch sensing unit 30 can be used to isolate the two to avoid the solar cell unit 20 and the touch sensing unit.
  • the units 30 influence each other.
  • the solar battery unit 20 and the touch sensor unit 30 are arranged side by side and separately, when the solar battery is applied to other devices with display, the solar battery unit 20 avoids the display area, and the solar battery unit 20 corresponds to the touch sensor unit 30
  • the display area does not have any impact, and then the power of the solar battery is provided to the display device with larger power consumption, which effectively improves the endurance of the display device.
  • the arrangement of the touch sensing unit 30 of the present invention is equivalent to hollowing out the entire solar cell into the first area 10-b, and then integrating the touch sensing unit 30 in the solar cell, so that the solar cell has a touch function.
  • the solar cell unit 20 of the embodiment of the present invention may have a transparent structure, an opaque structure or a translucent structure.
  • the material of the second electrode 23 can be selected according to actual requirements to determine whether the solar cell unit 20 is transparent or not.
  • the solar cell unit 20 can be a solar cell unit 20 with a single junction structure or a solar cell unit 20 connected in series with a multi-junction structure.
  • the specific arrangement of the structure can adopt the conventional technology in the prior art, and the present invention will not do too much.
  • the area of the solar cell unit 20 is directly proportional to the photoelectric conversion effect, that is, in order to receive more external light, the area of the solar cell unit 20 can be increased to obtain a better photoelectric conversion effect.
  • the equipment provides more power and prolongs the use time.

Abstract

Provided is a method for manufacturing a solar cell with a touch function. The solar cell has a first area (10-b) and a second area (10-a). The method comprises: providing a transparent substrate (10); simultaneously manufacturing a first electrode (21) and a touch sensing electrode (31) at the same side of the transparent substrate (10), wherein the first electrode (21) and the touch sensing electrode (31) are made of the same material, the touch sensing electrode (31) is of a single-layer transparent conductive oxide film structure, the touch sensing electrode (31) is manufactured in the first area (10-b), and the first electrode (21) is manufactured in the second area (10-a); manufacturing a protective layer (32) on the outer side of the touch sensing electrode (31) to form a touch sensing unit (30); performing, on the first electrode (21), film formation on a photovoltaic layer (22) and a second electrode (23) in turn; and after cleaning, performing imaging etching on the second electrode (23) and the photovoltaic layer (22) in turn to form a solar cell unit (20). There is no need to separately manufacture the solar cell unit (20) and the touch sensing unit (30), such that the number of manufacturing steps of a solar cell are reduced, and the complexity of processing is also reduced.

Description

一种具有触控功能的太阳能电池制造方法Method for manufacturing solar cell with touch function 技术领域Technical field
本发明涉及太阳能电池技术领域，更具体地涉及一种具有触控功能的太阳能电池制造方法。The present invention relates to the technical field of solar cells, and more specifically to a method for manufacturing a solar cell with touch control function.
背景技术Background technique
目前，现有技术中的太阳能电池在实现触控功能时，通常采用外挂的方式，将成品的触控感应结构与成品的太阳能电池贴合并连接到驱动电路上形成具有触控功能的太阳能电池组件，该太阳能电池组件不仅结构复杂，而且在厚度方面也不满足产品的轻薄化需求。At present, when the solar cell in the prior art realizes the touch function, it usually adopts an external method to attach and connect the finished touch sensing structure and the finished solar cell to the driving circuit to form a solar cell module with touch function. , The solar cell module is not only complex in structure, but also in terms of thickness does not meet the demand for thinner and lighter products.
技术解决方案Technical solutions
为了解决所述现有技术的不足，本发明提供了一种具有触控功能的太阳能电池制造方法，通过将触控感应单元的触控感应电极与太阳能电池单元的第一电极设置为同一材质，在同一制程中完成，不需要将太阳能电池单元和触控感应单元分开制作，减少了太阳能电池的制作步骤和降低了加工的复杂程度，结构简单、厚度薄。In order to solve the shortcomings of the prior art, the present invention provides a method for manufacturing a solar cell with touch function, by setting the touch sensing electrode of the touch sensing unit and the first electrode of the solar cell unit to the same material. It is completed in the same manufacturing process, and there is no need to separately manufacture the solar cell unit and the touch sensing unit, which reduces the manufacturing steps of the solar cell and reduces the complexity of processing, and has a simple structure and thin thickness.
本发明所要达到的技术效果通过以下方案实现：一种具有触控功能的太阳能电池制造方法，其中太阳能电池具有第一区域和第二区域，包括以下步骤：The technical effect to be achieved by the present invention is achieved by the following scheme: a method for manufacturing a solar cell with touch function, wherein the solar cell has a first area and a second area, including the following steps:
步骤一：提供一透明基板；Step 1: Provide a transparent substrate;
步骤二：在透明基板的同一侧、同时进行第一电极的制作和触控感应电极的制作，所述第一电极和触控感应电极采用相同材料制作，所述触控感应电极为单层透明导电氧化膜结构，所述触控感应电极制作在第一区域和所述第一电极制作在第二区域；Step 2: Perform the production of the first electrode and the production of the touch sensing electrode on the same side of the transparent substrate at the same time, the first electrode and the touch sensing electrode are made of the same material, and the touch sensing electrode is a single-layer transparent Conductive oxide film structure, the touch sensing electrode is made in the first area and the first electrode is made in the second area;
步骤三：在触控感应电极的外侧制作保护层形成触控感应单元；Step 3: Making a protective layer on the outside of the touch sensing electrode to form a touch sensing unit;
步骤四：在所述第一电极上依次进行光伏层和第二电极的成膜；Step 4: forming a photovoltaic layer and a second electrode on the first electrode in sequence;
步骤五：清洗后依次对第二电极和光伏层进行成像刻蚀形成太阳能电池单元。Step 5: After cleaning, sequentially image and etch the second electrode and the photovoltaic layer to form a solar cell unit.
优选地，还包括绝缘层的制作和对第一电极进行辅助电极层的制作，所述绝缘层用于辅助电极层与第二电极绝缘隔开。Preferably, it further includes the production of an insulating layer and the production of an auxiliary electrode layer for the first electrode, and the insulating layer is used to insulate and separate the auxiliary electrode layer from the second electrode.
优选地，还包括对触控感应单元的绑定制作和太阳能电池单元的绑定制作，所述触控感应单元的绑定和太阳能电池单元的绑定采用同一柔性印刷线路板。Preferably, it further includes the binding production of the touch sensing unit and the binding production of the solar battery unit, and the binding of the touch sensing unit and the binding of the solar battery unit use the same flexible printed circuit board.
优选地，所述辅助电极层和/或第二电极还用于触控感应单元的绑定电极制作。Preferably, the auxiliary electrode layer and/or the second electrode are also used for the production of binding electrodes of the touch sensing unit.
有益效果Beneficial effect
1、本发明的具有触控功能的太阳能电池制造方法，通过将触控感应单元的触控感应电极与太阳能电池单元的第一电极采用同一材质，在同一制程中完成，不需要将太阳能电池单元和触控感应单元分开制作，减少了太阳能电池的制作步骤和降低了加工的复杂程度，还可以解决分开制作时触控感应单元和太阳能电池单元的位置偏差的问题，降低用于电性连接的柔性印刷线路板绑定复杂程度，以及减少柔性印刷线路板的数量和绑定次数的问题；1. The manufacturing method of the solar cell with touch function of the present invention adopts the same material for the touch sensing electrode of the touch sensing unit and the first electrode of the solar cell unit, which is completed in the same manufacturing process, and does not require the solar cell unit It is made separately from the touch sensor unit, which reduces the manufacturing steps of the solar cell and reduces the processing complexity. It can also solve the problem of the positional deviation of the touch sensor unit and the solar cell unit during separate production, and reduce the electrical connection The complexity of the flexible printed circuit board binding, and the problem of reducing the number of flexible printed circuit boards and the number of binding times;
2、所述太阳能电池单元和触控感应单元相互绝缘设置，具体可通过触控感应单元的保护层实现两者的绝缘隔开，避免太阳能电池单元和触控感应单元相互产生影响。并且，由于太阳能电池单元和触控感应单元并列分开设置，当太阳能电池应用在其它带显示的设备时，太阳能电池单元避开显示区域，且太阳能电池单元对触控感应单元对应的显示区域不产生任何影响，再将太阳能电池的电能提供给功耗较大的显示设备，有效提升显示设备的续航能力。本发明的触控感应单元的设置相当于将整块太阳能电池镂空成第一区域，再将触控感应单元集成在太阳能电池内，实现太阳能电池具有触控功能；2. The solar cell unit and the touch sensing unit are insulated from each other. Specifically, the insulation between the two can be achieved by the protective layer of the touch sensing unit, so as to prevent the solar cell unit and the touch sensing unit from affecting each other. In addition, since the solar battery unit and the touch sensor unit are arranged side by side and separately, when the solar battery is applied to other devices with display, the solar battery unit avoids the display area, and the solar battery unit does not produce any effect on the display area corresponding to the touch sensor unit. For any impact, the power of the solar battery is then provided to the display device with higher power consumption, which effectively improves the endurance of the display device. The arrangement of the touch sensing unit of the present invention is equivalent to hollowing out the entire solar cell into the first area, and then integrating the touch sensing unit into the solar cell, so that the solar cell has a touch function;
3、本发明的柔性印刷线路板同时电性连接太阳能电池单元和触控感应单元，这样可以使用一片柔性印刷线路板同时作为太阳能电池单元和触控感应单元的两种功能的输出，有效减少器件的绑定加工难度和驱动主板的设计复杂度和外形尺寸，有利于提高太阳能电池的集成度。3. The flexible printed circuit board of the present invention is electrically connected to the solar battery unit and the touch sensing unit at the same time, so that a piece of flexible printed circuit board can be used as the output of the two functions of the solar battery unit and the touch sensing unit at the same time, effectively reducing devices The difficulty of binding processing and the design complexity and size of the drive motherboard are conducive to improving the integration of solar cells.
附图说明Description of the drawings
图1为本发明具有触控功能的太阳能电池制造方法的工艺流程图；FIG. 1 is a process flow diagram of a method for manufacturing a solar cell with touch function according to the present invention;
图2为本发明具有触控功能的太阳能电池的侧视结构示意图；2 is a schematic diagram of a side view structure of a solar cell with touch function of the present invention;
图3为本发明具有触控功能的太阳能电池的平面结构示意图；3 is a schematic diagram of the planar structure of the solar cell with touch function of the present invention;
图4为本发明具有触控功能的太阳能电池显示绝缘层和辅助电极层以及显示触控感应电极绑定端子处的侧视结构示意图；4 is a schematic diagram of the side view structure of the display insulating layer and auxiliary electrode layer of the solar cell with touch function of the present invention and the binding terminal of the display touch sensing electrode;
图5为本发明的柔性印刷线路板绑定在太阳能电池上的平面结构示意图；5 is a schematic diagram of the planar structure of the flexible printed circuit board of the present invention bound to the solar cell;
图6为本发明具有触控功能的太阳能电池的柔性印刷线路板的平面结构示意图。6 is a schematic diagram of the planar structure of the flexible printed circuit board of the solar cell with touch function of the present invention.
本发明的实施方式Embodiments of the present invention
下面结合附图和实施例对本发明进行详细的说明，所述实施例的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的，旨在用于解释本发明，而不能理解为对本发明的限制。The present invention will be described in detail below with reference to the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, in which the same or similar reference numerals indicate the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary, and are intended to explain the present invention, but should not be construed as limiting the present invention.
在本发明的描述中，需要理解的是，术语“长度”、“宽度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。In the description of the present invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", The orientation or positional relationship indicated by "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description. It does not indicate or imply that the pointed device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention.
此外，术语“第一”、“第二”、“第三”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”、“第三”的特征可以明示或者隐含地包括一个或者多个该特征。在本发明的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。In addition, the terms "first", "second", and "third" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined with "first", "second", and "third" may explicitly or implicitly include one or more of these features. In the description of the present invention, "plurality" means two or more than two, unless otherwise specifically defined.
在本发明中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”、“设置”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，还可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本发明中的具体含义。In the present invention, unless otherwise clearly defined and defined, the terms "installed", "connected", "connected", "fixed", "set" and other terms should be understood in a broad sense. For example, it can be a fixed connection or a fixed connection. It can be detachably connected or integrated; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediate medium, and it can also be the internal communication of two components or the interaction relationship between two components . For those of ordinary skill in the art, the specific meanings of the above-mentioned terms in the present invention can be understood according to specific situations.
实施例一Example one
如图1-图3所示，本发明实施例一提供一种具有触控功能的太阳能电池制造方法，其中太阳能电池具有第一区域10-b和第二区域10-a，图2中所示第二区域10-a环绕第一区域10-b设置，形成在第一区域10-b的外周边缘，本领域技术人员应当理解的是图中所述第一区域10-b和第二区域10-a的分布仅作为示例，不应以此为限定，还可以例如是第一区域10-b和第二区域10-a并列设置等。所述太阳能电池整体呈膜状或者板状，可以用于电子显示设备上或者电子穿戴设备上，为电子显示设备和电子穿戴设备提供光电转换的电能。As shown in FIGS. 1 to 3, the first embodiment of the present invention provides a method for manufacturing a solar cell with touch function, wherein the solar cell has a first area 10-b and a second area 10-a, as shown in FIG. The second area 10-a is arranged around the first area 10-b, and is formed on the outer peripheral edge of the first area 10-b. Those skilled in the art should understand that the first area 10-b and the second area 10 are described in the figure. The distribution of -a is only used as an example, and should not be limited by this. For example, the first area 10-b and the second area 10-a may be arranged side by side. The solar cell is in the shape of a film or a plate as a whole, and can be used on an electronic display device or an electronic wearable device to provide electrical energy for photoelectric conversion for the electronic display device and the electronic wearable device.
具体地，所述具有触控功能的太阳能电池制造方法包括以下步骤：Specifically, the manufacturing method of the solar cell with touch function includes the following steps:
步骤一：提供一透明基板10。Step 1: Provide a transparent substrate 10.
所述透明基板10可以是玻璃、石英等透明的无机材料或透明的有机高分子聚合物材料等，满足光的透过率在90%以上即可，不会影响正常的显示和光电转换的效率，其可以是刚性材质，也可以是柔性材质，以满足不同需求。The transparent substrate 10 can be a transparent inorganic material such as glass, quartz, or a transparent organic polymer material, etc., and the light transmittance can be above 90%, and the normal display and photoelectric conversion efficiency will not be affected. , It can be rigid material or flexible material to meet different needs.
步骤二：在透明基板10的同一侧、同时进行第一电极21的制作和触控感应电极31的制作，所述第一电极21和触控感应电极31采用相同材料制作，所述触控感应电极31为单层透明导电氧化膜结构，所述触控感应电极31制作在第一区域10-b和所述第一电极21制作在第二区域10-a。Step 2: On the same side of the transparent substrate 10, the first electrode 21 is made and the touch sensing electrode 31 is made at the same time. The first electrode 21 and the touch sensing electrode 31 are made of the same material, and the touch sensing The electrode 31 is a single-layer transparent conductive oxide film structure. The touch sensing electrode 31 is fabricated in the first area 10-b and the first electrode 21 is fabricated in the second area 10-a.
本制作步骤中，可以先进行第一电极21和触控感应电极31的成膜，再对第一电极21和触控感应电极31成像、刻蚀成图案。所述第一电极21和触控感应电极31的成膜温度可以是在室温下进行，也可以在高温230℃-350℃下成膜，成膜厚度在20nm-1000nm之间。所述第一电极21背向透明基板10的第一侧还可以选择用低浓度HCl或碱性物质制绒形成凹凸不平的平面，以提高环境光的吸收。In this manufacturing step, the first electrode 21 and the touch sensing electrode 31 may be formed into a film first, and then the first electrode 21 and the touch sensing electrode 31 may be imaged and etched into a pattern. The film forming temperature of the first electrode 21 and the touch sensing electrode 31 may be at room temperature or at a high temperature of 230° C.-350° C., and the film thickness may be between 20 nm and 1000 nm. The first side of the first electrode 21 facing away from the transparent substrate 10 can also be selected to be textured with low-concentration HCl or an alkaline substance to form an uneven plane to improve the absorption of ambient light.
所述第一电极21和触控感应电极31可以采用TCO材质，包括但不限于AZO（掺铝氧化锌）、ITO（氧化烟锡）、纳米银、镁银合金或石墨烯等透明导电氧化膜，提高透过率和减少对显示效果的影响。The first electrode 21 and the touch sensing electrode 31 can be made of TCO material, including but not limited to AZO (aluminum-doped zinc oxide), ITO (smoky tin oxide), nano-silver, magnesium-silver alloy or graphene and other transparent conductive oxide films , Improve the transmittance and reduce the impact on the display effect.
本发明实施例的触控感应电极31采用单层透明导电氧化膜实现触控功能，结构简单。常规结构中，所述触控感应电极31包括发射极和接收极，为现有技术中的已有技术，本申请不作赘述。The touch sensing electrode 31 of the embodiment of the present invention adopts a single-layer transparent conductive oxide film to realize the touch function, and has a simple structure. In a conventional structure, the touch sensing electrode 31 includes an emitter electrode and a receiver electrode, which is an existing technology in the prior art, and will not be repeated in this application.
步骤三：在触控感应电极31的外表面制作保护层32形成触控感应单元30。Step 3: Form the protective layer 32 on the outer surface of the touch sensing electrode 31 to form the touch sensing unit 30.
优选地，所述保护层32覆盖在触控感应电极31的外侧并延伸至与透明基板10接触，实现对触控感应电极31的全面密封保护作用。所述保护层32的材质可以采用无机的氧化硅、氮化硅，或亚克力树脂、环氧树脂、聚氨酯树脂、聚酯树脂及聚丙烯树脂等有机材料中的一种或多种。Preferably, the protective layer 32 covers the outside of the touch sensing electrode 31 and extends to contact with the transparent substrate 10 to achieve a comprehensive sealing protection for the touch sensing electrode 31. The protective layer 32 can be made of inorganic silicon oxide, silicon nitride, or one or more of organic materials such as acrylic resin, epoxy resin, polyurethane resin, polyester resin, and polypropylene resin.
步骤四：在所述第一电极21上依次进行光伏层22和第二电极23的成膜。Step 4: forming a photovoltaic layer 22 and a second electrode 23 on the first electrode 21 in sequence.
具体地，所述光伏层22可以分为P层、I层和N层，其中P层厚度为10nm-30nm，成膜温度为150℃-250℃， I层厚度为300 nm -500nm，成膜温度为150℃-250℃，N层厚度为20 nm -40nm，成膜温度为150℃-250℃。Specifically, the photovoltaic layer 22 can be divided into a P layer, an I layer, and an N layer. The thickness of the P layer is 10 nm-30 nm, the film forming temperature is 150° C.-250° C., the thickness of the I layer is 300 nm to 500 nm, and the film is formed. The temperature is 150°C-250°C, the thickness of the N layer is 20 nm-40nm, and the film forming temperature is 150°C-250°C.
所述光伏层22可以但不限于为采用多晶硅、非晶硅或砷化镓类材质制作形成的PN或PIN型器件。The photovoltaic layer 22 can be, but is not limited to, a PN or PIN device made of polysilicon, amorphous silicon or gallium arsenide materials.
所述第二电极23可以是单层电极膜或多层电极膜，可以但不限于采用单体金属材质、合金材质或金属氧化物/氮化物/卤化物材质等，这些单体金属材质、合金材质或金属氧化物/氮化物/卤化物材质中含有的金属元素为电阻率较低的金、银、铜、铝、镍或钼等之一。The second electrode 23 can be a single-layer electrode film or a multi-layer electrode film, and can be, but not limited to, a single metal material, an alloy material, or a metal oxide/nitride/halide material, etc., these single metal materials, alloys, etc. The metal element contained in the material or the metal oxide/nitride/halide material is one of gold, silver, copper, aluminum, nickel, or molybdenum with low resistivity.
步骤五：清洗后依次对第二电极23和光伏层22进行成像刻蚀形成太阳能电池单元20。Step 5: After cleaning, the second electrode 23 and the photovoltaic layer 22 are sequentially imaged and etched to form the solar cell unit 20.
其中第二电极23可以采用涂胶曝光成像后进行化学刻蚀，光伏层22可以采用干刻的方式进行刻蚀。The second electrode 23 can be chemically etched after exposure and imaging by applying glue, and the photovoltaic layer 22 can be etched by dry etching.
本发明实施例一的具有触控功能的太阳能电池制造方法，通过将触控感应单元30的触控感应电极31与太阳能电池单元20的第一电极21采用同一材质，在同一制程中完成，不需要将太阳能电池单元20和触控感应单元30分开制作，减少了太阳能电池的制作步骤和降低了加工的复杂程度，还可以解决分开制作时触控感应单元30和太阳能电池单元20的位置偏差的问题。According to the first embodiment of the present invention, the method for manufacturing a solar cell with touch function uses the same material for the touch sensing electrode 31 of the touch sensing unit 30 and the first electrode 21 of the solar cell unit 20, and is completed in the same manufacturing process. The solar cell unit 20 and the touch sensing unit 30 need to be manufactured separately, which reduces the manufacturing steps of the solar cell and reduces the complexity of processing, and can also solve the positional deviation of the touch sensing unit 30 and the solar cell unit 20 when they are manufactured separately. problem.
本发明实施例的太阳能电池单元20可以是透明的结构、不透明的结构或者是半透明的结构，具体可依据实际需求选择第二电极23的材质决定太阳能电池单元20的透明与否。所述太阳能电池单元20可以是单结结构的太阳能电池单元20，也可以是多结结构串联的太阳能电池单元20，其结构的具体设置方式可采用现有技术中的常规技术，本发明不作过多阐述和限定。所述太阳能电池单元20设置的面积与光电转换的效果成正比，即为了更大的接收外界光照射，则提高太阳能电池单元20的面积，就能获得更好的光电转换效果，从而为应用的设备提供更多的电能，延长使用时间。The solar cell unit 20 of the embodiment of the present invention may have a transparent structure, an opaque structure or a translucent structure. Specifically, the material of the second electrode 23 can be selected according to actual requirements to determine whether the solar cell unit 20 is transparent or not. The solar cell unit 20 may be a solar cell unit 20 with a single junction structure, or a solar cell unit 20 connected in series with a multi-junction structure. The specific arrangement of the structure can adopt the conventional technology in the prior art, and the present invention has not done anything. Explain and define more. The area of the solar battery unit 20 is directly proportional to the photoelectric conversion effect, that is, in order to receive more external light, the area of the solar battery unit 20 can be increased to obtain a better photoelectric conversion effect. The equipment provides more power and prolongs the use time.
应当理解的是，所述太阳能电池单元20和触控感应单元30相互绝缘或者绝缘断开设置，具体可通过触控感应单元30的保护层32实现两者的绝缘隔开，避免太阳能电池单元20和触控感应单元30相互产生影响。并且，由于太阳能电池单元20和触控感应单元30并列分开设置，当太阳能电池应用在其它带显示的电子设备时，触控感应单元30对应形成在显示区域，太阳能电池单元20避开显示区域，且太阳能电池单元20对触控感应单元30对应的显示区域不产生任何影响，再将太阳能电池的电能提供给功耗较大的显示设备，有效提升显示设备的续航能力。本发明的触控感应单元30的设置相当于将整块太阳能电池镂空成第一区域10-b，再将触控感应单元30集成在太阳能电池内，实现太阳能电池具有触控功能。It should be understood that the solar cell unit 20 and the touch sensing unit 30 are insulated or disconnected from each other. Specifically, the protective layer 32 of the touch sensing unit 30 can be used to isolate the two to avoid the solar cell unit 20. And the touch sensing unit 30 interact with each other. Moreover, since the solar battery unit 20 and the touch sensing unit 30 are arranged side by side and separately, when the solar battery is applied to other electronic devices with display, the touch sensing unit 30 is correspondingly formed in the display area, and the solar battery unit 20 avoids the display area. In addition, the solar battery unit 20 does not have any influence on the display area corresponding to the touch sensing unit 30, and then the electric energy of the solar battery is provided to the display device with larger power consumption, which effectively improves the endurance of the display device. The arrangement of the touch sensing unit 30 of the present invention is equivalent to hollowing out the entire solar cell into the first area 10-b, and then integrating the touch sensing unit 30 in the solar cell, so that the solar cell has a touch function.
如图4所示，作为本发明实施例一的进一步改进，所述太阳能电池的制造方法还包括对第一电极21进行辅助电极层50的制作，所述辅助电极层50通过物理气相沉积方式一次性成膜形成。该步骤还包括绝缘层40的制作，所述绝缘层40使辅助电极层50与第二电极23绝缘隔开。所述辅助电极层50可以降低第一电极21的电阻，提高薄膜太阳能电池单元20在强光下的转化效率，同时有利于第一电极21的引出。本领域技术人员应当理解的是，图4所示的辅助电极层50设置在最上层，是为了便于辅助电极层50的大面积设置，以最大程度地降低第一电极21的电阻，当辅助电极层50与第一电极21接触连接时，可以通过将第二电极23和光伏层22进行开孔的方式使辅助电极层50通过该孔延伸至与第一电极21接触连接（该连接为现有技术中的常规技术，图4中未示出），利用小面积开孔的方式可以最大程度地降低辅助电极层50对光电转换面积的影响。As shown in FIG. 4, as a further improvement of the first embodiment of the present invention, the manufacturing method of the solar cell further includes fabricating an auxiliary electrode layer 50 on the first electrode 21, and the auxiliary electrode layer 50 is made by a physical vapor deposition method. Sexual film formation. This step also includes the production of an insulating layer 40 that insulates and separates the auxiliary electrode layer 50 from the second electrode 23. The auxiliary electrode layer 50 can reduce the resistance of the first electrode 21, improve the conversion efficiency of the thin-film solar cell unit 20 under strong light, and at the same time facilitate the extraction of the first electrode 21. Those skilled in the art should understand that the auxiliary electrode layer 50 shown in FIG. 4 is arranged on the uppermost layer to facilitate the large-area arrangement of the auxiliary electrode layer 50 to minimize the resistance of the first electrode 21. When the auxiliary electrode When the layer 50 is in contact with the first electrode 21, the auxiliary electrode layer 50 can be extended through the hole to be in contact with the first electrode 21 by opening the second electrode 23 and the photovoltaic layer 22 (this connection is an existing Conventional technology in the technology, not shown in FIG. 4), using a small-area opening method can minimize the influence of the auxiliary electrode layer 50 on the photoelectric conversion area.
进一步地，本发明的太阳能电池制造方法中，还包括对触控感应单元30的绑定制作和太阳能电池单元20的绑定制作，所述触控感应单元30的绑定和太阳能电池单元20的绑定优选采用同一柔性印刷线路板制作，可以降低用于电性连接的柔性印刷线路板绑定复杂程度，以及减少柔性印刷线路板的数量和绑定次数的问题。Further, the solar cell manufacturing method of the present invention further includes the binding and manufacturing of the touch sensing unit 30 and the binding and manufacturing of the solar cell unit 20, the binding of the touch sensing unit 30 and the solar cell unit 20 The binding is preferably made of the same flexible printed circuit board, which can reduce the complexity of the flexible printed circuit board binding used for electrical connection, and reduce the number of flexible printed circuit boards and the number of binding times.
具体地，如图5和图6所示，所述太阳能电池单元20的引出电极区域（即第一电极21和第二电极23的引出电极区域）可以与触控感应单元30的电极绑定区域并列设置在透明基板10的同一方向，这样可以使用一片柔性印刷线路板同时作为太阳能电池单元20和触控感应单元30的两种功能的输出，有效减少器件的绑定加工难度和驱动主板的设计复杂度和外形尺寸，有利于提高太阳能电池的集成度。Specifically, as shown in FIGS. 5 and 6, the lead-out electrode area of the solar cell unit 20 (that is, the lead-out electrode area of the first electrode 21 and the second electrode 23) may be bound to the electrode binding area of the touch sensing unit 30 They are arranged side by side in the same direction of the transparent substrate 10, so that a flexible printed circuit board can be used as the output of the two functions of the solar cell unit 20 and the touch sensing unit 30 at the same time, effectively reducing the difficulty of device binding and processing and the design of the drive motherboard The complexity and size are conducive to improving the integration of solar cells.
如图6所示，所述触控感应单元30的电极绑定可以通过触控感应电极31直接引出至触控感应单元30的绑定位30-a，所述触控感应单元30的绑定位30-a形成在太阳能电池单元20的绑定位20-a之间，触控感应单元30的绑定位30-a与太阳能电池单元20的绑定位20-a相互隔开。所述柔性印刷线路板上还布设有触控感应单元30的输出端子30-b和太阳能电池单元20的输出端子20-b。As shown in FIG. 6, the electrode binding of the touch sensing unit 30 can be directly led out to the binding position 30-a of the touch sensing unit 30 through the touch sensing electrode 31, and the binding of the touch sensing unit 30 The position 30-a is formed between the binding positions 20-a of the solar battery unit 20, and the binding position 30-a of the touch sensing unit 30 and the binding position 20-a of the solar battery unit 20 are separated from each other. The output terminal 30-b of the touch sensing unit 30 and the output terminal 20-b of the solar battery unit 20 are also arranged on the flexible printed circuit board.
进一步地，如图4所示，所述辅助电极层50和/（或）第二电极23还可以用于触控感应单元30的绑定电极制作，即在制作辅助电极层50和/（或）第二电极23时，可以在触控感应单元的绑定位30-a上同时制作辅助电极层50和/（或）第二电极23，以增加触控感应单元30的绑定电极的厚度，进而使太阳能电池单元20的绑定电极和触控感应单元30绑定电极的厚度一致。具体来说，为了提高太阳能电池单元20和触控感应单元30绑定电极的平整性，所述触控感应单元30的绑定电极还可以利用辅助电极层50和/（或）第二电极23，使绑定电极的厚度增加，此时用于绑定电极的辅助电极层50和第二电极23应当与太阳能电池单元20的辅助电极层50和第二电极23绝缘隔开形成相互独立的部分，以免发生短路。Further, as shown in FIG. 4, the auxiliary electrode layer 50 and/(or) the second electrode 23 can also be used for the production of the binding electrode of the touch sensing unit 30, that is, the auxiliary electrode layer 50 and/(or) ) In the case of the second electrode 23, the auxiliary electrode layer 50 and/or the second electrode 23 can be simultaneously formed on the binding position 30-a of the touch sensing unit to increase the thickness of the binding electrode of the touch sensing unit 30 , So that the thickness of the binding electrode of the solar cell unit 20 and the binding electrode of the touch sensing unit 30 are the same. Specifically, in order to improve the flatness of the binding electrodes of the solar cell unit 20 and the touch sensing unit 30, the binding electrode of the touch sensing unit 30 can also utilize the auxiliary electrode layer 50 and/or the second electrode 23 , The thickness of the binding electrode is increased. At this time, the auxiliary electrode layer 50 and the second electrode 23 used for the binding electrode should be insulated and separated from the auxiliary electrode layer 50 and the second electrode 23 of the solar cell unit 20 to form separate parts. , So as to avoid short circuit.
本发明通过将太阳能电池单元20的绑定电极与触控感应单元30的绑定电极设置在同一个区域，不同功能的绑定电极输出端子的叠层厚度也可以设计成厚度相同的结构，在通过ACF（各向异性导电膜）作为与柔性印刷线路板电性连接的过程，有利于ACF采用相同的型号、宽度和绑定条件，一次同时完成太阳能电池单元20和触控感应单元30的绑定，相对于将其分别独立开、分别绑定的情况，减少了加工次数、降低加工难度，提高了材料的利用率和成品率。In the present invention, by arranging the binding electrode of the solar cell unit 20 and the binding electrode of the touch sensing unit 30 in the same area, the laminated thickness of the binding electrode output terminals of different functions can also be designed to have the same thickness structure. Through the ACF (Anisotropic Conductive Film) as the process of electrical connection with the flexible printed circuit board, it is beneficial for the ACF to adopt the same model, width and binding conditions to complete the binding of the solar cell unit 20 and the touch sensor unit 30 at the same time. Compared with the situation where they are separately opened and bound separately, the number of processing is reduced, the difficulty of processing is reduced, and the utilization rate of materials and the yield rate of materials are improved.
所述辅助电极层50可以但不限于采用金属单质、合金材质、金属氧化物/氮化物/卤化物材质或纳米导电材质等，包括但不限于采用蒸镀、离子镀、磁控溅射或CVD等成膜工艺制成；其中金属单质可以是Al、Ag等单质，合金材质可为镁银合金或钼银合金等，金属氧化物/氮化物/卤化物材质可为ITO或IZO等，纳米导电材质可为石墨烯等。这些金属单质、合金材质、金属氧化物/氮化物/卤化物材质或纳米导电材质形成的辅助电极层50在厚度小于一定值时，即可达到透明的光学效果。The auxiliary electrode layer 50 can be, but not limited to, metal simple substance, alloy material, metal oxide/nitride/halide material or nano-conductive material, including but not limited to evaporation, ion plating, magnetron sputtering or CVD. The metal element can be Al, Ag, etc., the alloy material can be magnesium-silver alloy or molybdenum-silver alloy, etc. The metal oxide/nitride/halide material can be ITO or IZO, etc., nano-conductivity The material can be graphene or the like. The auxiliary electrode layer 50 formed of these simple metal materials, alloy materials, metal oxide/nitride/halide materials or nano-conductive materials can achieve a transparent optical effect when the thickness is less than a certain value.
当绝缘层采用有机物时，可以通过涂胶曝光显影、移印或丝印的方式制备，工艺更为简单。当绝缘层采用SiNx、SiO2等非金属保护时，可通过采用化学气象沉积（CVD）或磁控溅射等方式来成膜，然后利用黄光线曝光做出图形后干刻蚀成图形。When the insulating layer is made of organic matter, it can be prepared by applying glue, exposing and developing, pad printing or silk screen printing, and the process is simpler. When the insulating layer is protected by non-metallic protection such as SiNx, SiO2, etc., it can be formed by chemical weather deposition (CVD) or magnetron sputtering, and then exposed to yellow light to make the pattern and then dry-etched into the pattern.
实施例二Example two
结合图2、图3所示，本发明实施例二提供一种具有触控功能的太阳能电池，具有第一区域10-b和第二区域10-a，图2中所示第二区域10-a环绕第一区域10-b设置，形成在第一区域10-b的外周边缘，本领域技术人员应当理解的是图中所述第一区域10-b和第二区域10-a的分布仅作为示例，不应以此为限定，还可以例如是第一区域10-b和第二区域10-a并列设置等。所述太阳能电池整体呈膜状或者板状，可以用于电子显示设备上或者电子穿戴设备上，为电子显示设备和电子穿戴设备提供光电转换的电能。As shown in FIGS. 2 and 3, the second embodiment of the present invention provides a solar cell with touch function, which has a first area 10-b and a second area 10-a. The second area 10-a is shown in FIG. a is arranged around the first area 10-b and is formed on the outer peripheral edge of the first area 10-b. Those skilled in the art should understand that the distribution of the first area 10-b and the second area 10-a in the figure is only As an example, this should not be used as a limitation. For example, the first area 10-b and the second area 10-a may be arranged side by side. The solar cell is in the shape of a film or a plate as a whole, and can be used on an electronic display device or an electronic wearable device to provide electrical energy for photoelectric conversion for the electronic display device and the electronic wearable device.
本发明实施例中，所述太阳能电池包括透明基板10，所述透明基板10的同一侧并列设置有太阳能电池单元20和触控感应单元30，所述触控感应单元30形成在第一区域10-b，所述太阳能电池单元20形成在第二区域10-a。所述太阳能电池单元20包括依次层叠设置在透明基板10上的第一电极21、光伏层22和第二电极23，所述触控感应单元30包括设置在透明基板10上的触控感应电极31和覆盖触控感应电极31的保护层32，其中所述第一电极21和触控感应电极31由相同材料、同时形成，即所述第一电极21和触控感应电极31在透明基板10上呈同一水平面设置，而不是上下层叠的位置关系，当然，第一电极21和触控感应电极31在透明基板10上形成的厚度可以根据实际情况而不同。当第一电极21和触控感应电极31在透明基板10上形成的厚度不同时，在PVD（物理气相沉积）的过程中，对应第一区域10-b或第二区域10-a采用MASK分时遮蔽即可实现。In the embodiment of the present invention, the solar cell includes a transparent substrate 10, the solar cell unit 20 and the touch sensing unit 30 are juxtaposed on the same side of the transparent substrate 10, and the touch sensing unit 30 is formed in the first area 10. -b, the solar cell unit 20 is formed in the second area 10-a. The solar cell unit 20 includes a first electrode 21, a photovoltaic layer 22, and a second electrode 23 that are sequentially stacked on the transparent substrate 10, and the touch sensing unit 30 includes a touch sensing electrode 31 that is disposed on the transparent substrate 10. And the protective layer 32 covering the touch sensing electrode 31, wherein the first electrode 21 and the touch sensing electrode 31 are formed of the same material at the same time, that is, the first electrode 21 and the touch sensing electrode 31 are on the transparent substrate 10 They are arranged on the same horizontal plane instead of being stacked up and down. Of course, the thickness of the first electrode 21 and the touch sensing electrode 31 formed on the transparent substrate 10 can be different according to actual conditions. When the thicknesses of the first electrode 21 and the touch sensing electrode 31 formed on the transparent substrate 10 are different, during the PVD (Physical Vapor Deposition) process, the mask is used for the first area 10-b or the second area 10-a. Time masking can be achieved.
本发明通过将触控感应单元30的触控感应电极31与太阳能电池单元20的第一电极21采用同一材质，在同一制程中完成，不需要将太阳能电池单元20和触控感应单元30分开制作，减少了太阳能电池的制作步骤和降低了加工的复杂程度，还可以解决分开制作时触控感应单元30和太阳能电池单元20的位置偏差的问题。In the present invention, the touch sensing electrode 31 of the touch sensing unit 30 and the first electrode 21 of the solar cell unit 20 are made of the same material and completed in the same manufacturing process, without the need to separate the solar cell unit 20 and the touch sensing unit 30. This reduces the manufacturing steps of the solar cell and reduces the complexity of the processing, and can also solve the problem of the positional deviation of the touch sensing unit 30 and the solar cell unit 20 when they are separately manufactured.
如图4所示，作为本发明实施例的进一步改进，所述太阳能电池单元20还包括与第一电极21连接的辅助电极层50。所述太阳能电池单元20还包括绝缘层40，所述辅助电极层50应当通过绝缘层40与第二电极23绝缘隔开，避免短路发生。所述辅助电极层50可以减少第一电极21的电阻，提高薄膜太阳能电池单元20在强光下的转化效率，同时有利于第一电极21的引出。As shown in FIG. 4, as a further improvement of the embodiment of the present invention, the solar cell unit 20 further includes an auxiliary electrode layer 50 connected to the first electrode 21. The solar cell unit 20 further includes an insulating layer 40, and the auxiliary electrode layer 50 should be insulated and separated from the second electrode 23 by the insulating layer 40 to avoid short circuits. The auxiliary electrode layer 50 can reduce the resistance of the first electrode 21, improve the conversion efficiency of the thin-film solar cell unit 20 under strong light, and at the same time facilitate the extraction of the first electrode 21.
本领域技术人员应当理解的是，图4所示的辅助电极层50设置在最上层，是为了便于辅助电极层50的大面积设置，以最大程度地降低第一电极21的电阻，当辅助电极层50与第一电极21接触连接时，可以通过将第二电极23和光伏层22进行开孔的方式使辅助电极层50通过该孔延伸至与第一电极21接触连接（该连接为现有技术中的常规技术，图4中未示出），利用小面积开孔的方式可以最大程度地降低辅助电极层50对光电转换面积的影响。Those skilled in the art should understand that the auxiliary electrode layer 50 shown in FIG. 4 is arranged on the uppermost layer to facilitate the large-area arrangement of the auxiliary electrode layer 50 to minimize the resistance of the first electrode 21. When the auxiliary electrode When the layer 50 is in contact with the first electrode 21, the auxiliary electrode layer 50 can be extended through the hole to be in contact with the first electrode 21 by opening the second electrode 23 and the photovoltaic layer 22 (this connection is an existing The conventional technology in the technology, not shown in FIG. 4), the use of a small-area opening method can minimize the influence of the auxiliary electrode layer 50 on the photoelectric conversion area.
进一步地，所述辅助电极层50和/（或）第二电极23还可以用于触控感应单元30的绑定电极制作，即在制作辅助电极层50和/（或）第二电极23时，可以在触控感应单元的绑定电极上同时制作辅助电极层50和/（或）第二电极23，以增加触控感应单元30的绑定电极的厚度，进而使太阳能电池单元20的绑定电极和触控感应单元30的绑定电极的厚度一致。具体来说，为了提高太阳能电池单元20和触控感应单元30的绑定电极的平整性，所述触控感应单元30的电极绑定还可以利用辅助电极层50和/（或）第二电极23，使绑定电极的厚度增加，此时用于绑定电极的辅助电极层50和第二电极23应当与太阳能电池单元20的辅助电极层50和第二电极23绝缘隔开形成相互独立的部分，以免发生短路。Further, the auxiliary electrode layer 50 and/(or) the second electrode 23 can also be used for the production of the binding electrode of the touch sensing unit 30, that is, when the auxiliary electrode layer 50 and/(or) the second electrode 23 is made , The auxiliary electrode layer 50 and/or the second electrode 23 can be fabricated on the binding electrode of the touch sensing unit at the same time to increase the thickness of the binding electrode of the touch sensing unit 30, thereby making the solar cell unit 20 bind The fixed electrode and the bound electrode of the touch sensing unit 30 have the same thickness. Specifically, in order to improve the flatness of the binding electrodes of the solar cell unit 20 and the touch sensing unit 30, the electrode binding of the touch sensing unit 30 may also utilize the auxiliary electrode layer 50 and/or the second electrode. 23. Increase the thickness of the binding electrode. At this time, the auxiliary electrode layer 50 and the second electrode 23 used for the binding electrode should be insulated from the auxiliary electrode layer 50 and the second electrode 23 of the solar cell unit 20 to form mutually independent Part to avoid a short circuit.
本发明通过将太阳能电池单元20的绑定电极与触控感应单元30的绑定电极设置在同一个区域，不同功能的绑定电极输出端子的叠层厚度也可以设计成厚度相同的结构，在通过ACF（各向异性导电膜）作为与柔性印刷线路板电性连接的过程，有利于ACF采用相同的型号、宽度和绑定条件，一次同时完成太阳能电池单元20和触控感应单元30电极的绑定，相对于将其分别独立开、分别绑定的情况，减少了加工次数、降低加工难度，提高了材料的利用率和成品率。In the present invention, by arranging the binding electrode of the solar cell unit 20 and the binding electrode of the touch sensing unit 30 in the same area, the laminated thickness of the binding electrode output terminals of different functions can also be designed to have the same thickness structure. Through ACF (anisotropic conductive film) as the process of electrical connection with the flexible printed circuit board, it is beneficial for the ACF to adopt the same model, width and binding conditions to complete the electrode of the solar cell unit 20 and the touch sensor unit 30 at the same time. Binding, compared to the situation where they are separately opened and bound separately, it reduces the number of processing, reduces the difficulty of processing, and improves the utilization rate and yield of materials.
如图5、图6所示，作为本发明实施例的进一步改进，所述太阳能电池还包括一柔性印刷线路板，所述柔性印刷线路板优选同时用于太阳能电池单元20的绑定和触控感应单元30的绑定，降低用于电性连接的柔性印刷线路板绑定复杂程度，以及减少柔性印刷线路板的数量和绑定次数的问题。具体地，所述太阳能电池单元20的绑定区域（即第一电极21和第二电极23的绑定区域）可以与触控感应单元30的绑定区域并列设置在透明基板10的同一方向，这样可以使用一片柔性印刷线路板同时作为太阳能电池单元20和触控感应单元30的两种功能的输出，有效减少器件的绑定加工难度和驱动主板的设计复杂度和外形尺寸，有利于提高太阳能电池的集成度。As shown in FIG. 5 and FIG. 6, as a further improvement of the embodiment of the present invention, the solar cell further includes a flexible printed circuit board, and the flexible printed circuit board is preferably used for binding and touch control of the solar cell unit 20 at the same time. The binding of the sensing unit 30 reduces the complexity of the flexible printed circuit board binding used for electrical connection, and reduces the number of flexible printed circuit boards and the number of binding times. Specifically, the binding area of the solar cell unit 20 (that is, the binding area of the first electrode 21 and the second electrode 23) and the binding area of the touch sensing unit 30 may be arranged side by side in the same direction of the transparent substrate 10. In this way, a flexible printed circuit board can be used as the output of the two functions of the solar cell unit 20 and the touch sensor unit 30 at the same time, which effectively reduces the difficulty of binding and processing of the device and the design complexity and size of the driving motherboard, which is beneficial to improve the solar energy. The degree of integration of the battery.
如图6所示，所述触控感应单元30的绑定位30-a形成在太阳能电池单元20的绑定位20-a之间，触控感应单元30的绑定位30-a与太阳能电池单元20的绑定位20-a相互隔开。所述柔性印刷线路板上还布设有触控感应单元30的输出端子30-b和太阳能电池单元20的输出端子20-b。As shown in FIG. 6, the binding position 30-a of the touch sensing unit 30 is formed between the binding positions 20-a of the solar cell unit 20, and the binding position 30-a of the touch sensing unit 30 is connected to the solar cell unit 20. The binding positions 20-a of the battery cells 20 are separated from each other. The output terminal 30-b of the touch sensing unit 30 and the output terminal 20-b of the solar battery unit 20 are also arranged on the flexible printed circuit board.
所述第一电极21和触控感应电极31可以采用TCO材质，包括但不限于AZO（掺铝氧化锌）、ITO（氧化烟锡）、纳米银、镁银合金或石墨烯等透明导电氧化膜。本发明实施例的触控感应电极31采用单层透明导电氧化膜实现触控功能，结构简单。The first electrode 21 and the touch sensing electrode 31 can be made of TCO material, including but not limited to AZO (aluminum-doped zinc oxide), ITO (smoky tin oxide), nano-silver, magnesium-silver alloy or graphene and other transparent conductive oxide films . The touch sensing electrode 31 of the embodiment of the present invention adopts a single-layer transparent conductive oxide film to realize the touch function, and has a simple structure.
所述第二电极23可以是单层电极膜或多层电极膜，可以但不限于采用单体金属材质、合金材质或金属氧化物/氮化物/卤化物材质等，这些单体金属材质、合金材质或金属氧化物/氮化物/卤化物材质中含有的金属元素为电阻率较低的金、银、铜、铝、镍或钼等之一。The second electrode 23 can be a single-layer electrode film or a multi-layer electrode film, and can be, but not limited to, a single metal material, an alloy material, or a metal oxide/nitride/halide material, etc., these single metal materials, alloys, etc. The metal element contained in the material or the metal oxide/nitride/halide material is one of gold, silver, copper, aluminum, nickel, or molybdenum with low resistivity.
所述辅助电极层50可以但不限于采用金属单质、合金材质、金属氧化物/氮化物/卤化物材质或纳米导电材质等，包括但不限于采用蒸镀、离子镀、磁控溅射或CVD等成膜工艺制成；其中金属单质可以是Al、Ag等单质，合金材质可为镁银合金或钼银合金等，金属氧化物/氮化物/卤化物材质可为ITO或IZO等，纳米导电材质可为石墨烯等。这些金属单质、合金材质、金属氧化物/氮化物/卤化物材质或纳米导电材质形成的辅助电极层50在厚度小于一定值时，即可达到透明的光学效果。The auxiliary electrode layer 50 can be, but not limited to, metal simple substance, alloy material, metal oxide/nitride/halide material or nano-conductive material, including but not limited to evaporation, ion plating, magnetron sputtering or CVD. The metal element can be Al, Ag, etc., the alloy material can be magnesium-silver alloy or molybdenum-silver alloy, etc. The metal oxide/nitride/halide material can be ITO or IZO, etc., nano-conductivity The material can be graphene or the like. The auxiliary electrode layer 50 formed of these simple metal materials, alloy materials, metal oxide/nitride/halide materials or nano-conductive materials can achieve a transparent optical effect when the thickness is less than a certain value.
所述光伏层22可以但不限于为采用多晶硅、非晶硅或砷化镓类材质制作形成的PN或PIN型器件。The photovoltaic layer 22 can be, but is not limited to, a PN or PIN device made of polysilicon, amorphous silicon or gallium arsenide materials.
所述第一电极21和第二电极23形成回路，使得光伏层22受光照射激发产生的电荷载流子形成电流，从而为设备提供电能，图1中所示第一电极21为受到外界光照射的前电极，外界光透过透明基板10直接照射在第一电极21上，第二电极23则为背向光照射的背电极。The first electrode 21 and the second electrode 23 form a loop, so that the charge carriers generated by the photovoltaic layer 22 are excited by light irradiation to form a current, thereby providing electrical energy for the device. The first electrode 21 shown in FIG. 1 is irradiated by external light. For the front electrode, external light is directly irradiated on the first electrode 21 through the transparent substrate 10, and the second electrode 23 is the back electrode irradiated with the back light.
本发明实施例中所述透明基板10可以是玻璃、石英等透明的无机材料或透明的有机高分子聚合物材料等，满足光的透过率在90%以上即可，不会影响正常的显示和光电转换的效率，其可以是刚性材质，也可以是柔性材质，以满足不同需求。用于覆盖触控感应电极31的保护层32优选但不限于透明光阻（有机高分子材料）或无机类的SiO2、SiNx等材质。In the embodiment of the present invention, the transparent substrate 10 may be transparent inorganic materials such as glass, quartz, or transparent organic polymer materials, etc., and the light transmittance is only required to be above 90%, and normal display will not be affected. And the efficiency of photoelectric conversion, it can be a rigid material or a flexible material to meet different needs. The protective layer 32 used to cover the touch sensing electrode 31 is preferably, but not limited to, transparent photoresist (organic polymer material) or inorganic SiO2, SiNx, and other materials.
应当理解的是，所述太阳能电池单元20和触控感应单元30相互绝缘设置，具体可通过触控感应单元30的保护层32实现两者的绝缘隔开，避免太阳能电池单元20和触控感应单元30相互产生影响。并且，由于太阳能电池单元20和触控感应单元30并列分开设置，当太阳能电池应用在其它带显示的设备时，太阳能电池单元20避开显示区域，且太阳能电池单元20对触控感应单元30对应的显示区域不产生任何影响，再将太阳能电池的电能提供给功耗较大的显示设备，有效提升显示设备的续航能力。本发明的触控感应单元30的设置相当于将整块太阳能电池镂空成第一区域10-b，再将触控感应单元30集成在太阳能电池内，实现太阳能电池具有触控功能。It should be understood that the solar cell unit 20 and the touch sensing unit 30 are insulated from each other. Specifically, the protective layer 32 of the touch sensing unit 30 can be used to isolate the two to avoid the solar cell unit 20 and the touch sensing unit. The units 30 influence each other. Moreover, since the solar battery unit 20 and the touch sensor unit 30 are arranged side by side and separately, when the solar battery is applied to other devices with display, the solar battery unit 20 avoids the display area, and the solar battery unit 20 corresponds to the touch sensor unit 30 The display area does not have any impact, and then the power of the solar battery is provided to the display device with larger power consumption, which effectively improves the endurance of the display device. The arrangement of the touch sensing unit 30 of the present invention is equivalent to hollowing out the entire solar cell into the first area 10-b, and then integrating the touch sensing unit 30 in the solar cell, so that the solar cell has a touch function.
本发明实施例的太阳能电池单元20可以是透明的结构、不透明的结构或者是半透明的结构，具体可依据实际需求选择第二电极23的材质决定太阳能电池单元20的透明与否。所述太阳能电池单元20可以单结结构的太阳能电池单元20，也可以是多结结构串联的太阳能电池单元20，其结构的具体设置方式可采用现有技术中的常规技术，本发明不作过多阐述和限定。所述太阳能电池单元20设置的面积与光电转换的效果成正比，即为了更大的接收外界光照射，则提高太阳能电池单元20的面积，就能获得更好的光电转换效果，从而为应用的设备提供更多的电能，延长使用时间。The solar cell unit 20 of the embodiment of the present invention may have a transparent structure, an opaque structure or a translucent structure. Specifically, the material of the second electrode 23 can be selected according to actual requirements to determine whether the solar cell unit 20 is transparent or not. The solar cell unit 20 can be a solar cell unit 20 with a single junction structure or a solar cell unit 20 connected in series with a multi-junction structure. The specific arrangement of the structure can adopt the conventional technology in the prior art, and the present invention will not do too much. Explain and qualify. The area of the solar cell unit 20 is directly proportional to the photoelectric conversion effect, that is, in order to receive more external light, the area of the solar cell unit 20 can be increased to obtain a better photoelectric conversion effect. The equipment provides more power and prolongs the use time.
最后需要说明的是，以上实施例仅用以说明本发明实施例的技术方案而非对其进行限制，尽管参照较佳实施例对本发明实施例进行了详细的说明，本领域的普通技术人员应当理解依然可以对本发明实施例的技术方案进行修改或者等同替换，而这些修改或者等同替换亦不能使修改后的技术方案脱离本发明实施例技术方案的范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the embodiments of the present invention and not to limit them. Although the embodiments of the present invention are described in detail with reference to the preferred embodiments, those of ordinary skill in the art should It is understood that modifications or equivalent replacements can still be made to the technical solutions of the embodiments of the present invention, and these modifications or equivalent replacements cannot cause the modified technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims (4)

  1. 一种具有触控功能的太阳能电池制造方法，其中太阳能电池具有第一区域和第二区域，其特征在于，包括以下步骤：A method for manufacturing a solar cell with touch function, wherein the solar cell has a first area and a second area, is characterized in that it comprises the following steps:
    步骤一：提供一透明基板；Step 1: Provide a transparent substrate;
    步骤二：在透明基板的同一侧、同时进行第一电极的制作和触控感应电极的制作，所述第一电极和触控感应电极采用相同材料制作，所述触控感应电极为单层透明导电氧化膜结构，所述触控感应电极制作在第一区域和所述第一电极制作在第二区域；Step 2: Perform the production of the first electrode and the production of the touch sensing electrode on the same side of the transparent substrate at the same time, the first electrode and the touch sensing electrode are made of the same material, and the touch sensing electrode is a single-layer transparent Conductive oxide film structure, the touch sensing electrode is made in the first area and the first electrode is made in the second area;
    步骤三：在触控感应电极的外侧制作保护层形成触控感应单元；Step 3: Making a protective layer on the outside of the touch sensing electrode to form a touch sensing unit;
    步骤四：在所述第一电极上依次进行光伏层和第二电极的成膜；Step 4: forming a photovoltaic layer and a second electrode on the first electrode in sequence;
    步骤五：清洗后依次对第二电极和光伏层进行成像刻蚀形成太阳能电池单元。Step 5: After cleaning, sequentially image and etch the second electrode and the photovoltaic layer to form a solar cell unit.
  2. 如权利要求1所述的具有触控功能的太阳能电池制造方法，其特征在于，还包括绝缘层的制作和对第一电极进行辅助电极层的制作，所述绝缘层用于辅助电极层与第二电极绝缘隔开。The method for manufacturing a solar cell with touch control function according to claim 1, characterized in that it further comprises the production of an insulating layer and the production of an auxiliary electrode layer for the first electrode, and the insulating layer is used for the auxiliary electrode layer and the second electrode layer. The two electrodes are insulated and separated.
  3. 如权利要求2所述的具有触控功能的太阳能电池制造方法，其特征在于，还包括对触控感应单元的绑定制作和太阳能电池单元的绑定制作，所述触控感应单元的绑定和太阳能电池单元的绑定采用同一柔性印刷线路板。The method for manufacturing a solar cell with touch function according to claim 2, characterized in that it further comprises the binding production of the touch sensing unit and the binding production of the solar cell unit, and the binding of the touch sensing unit The same flexible printed circuit board is used for binding with the solar cell unit.
  4. 如权利要求3所述的具有触控功能的太阳能电池制造方法，其特征在于，所述辅助电极层和/或第二电极还用于触控感应单元的绑定电极制作。The method for manufacturing a solar cell with touch function according to claim 3, wherein the auxiliary electrode layer and/or the second electrode are also used for the production of the binding electrode of the touch sensing unit.
PCT/CN2020/124406 2020-03-23 2020-10-28 Method for manufacturing solar cell with touch function WO2021189841A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202010208144.1 2020-03-23
CN202010208144.1A CN111403501A (en) 2020-03-23 2020-03-23 Manufacturing method of solar cell with touch function

Publications (1)

Publication Number Publication Date
WO2021189841A1 true WO2021189841A1 (en) 2021-09-30

Family

ID=71431128

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2020/124406 WO2021189841A1 (en) 2020-03-23 2020-10-28 Method for manufacturing solar cell with touch function

Country Status (2)

Country Link
CN (1) CN111403501A (en)
WO (1) WO2021189841A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111403501A (en) * 2020-03-23 2020-07-10 信利半导体有限公司 Manufacturing method of solar cell with touch function
TWI808720B (en) * 2022-04-13 2023-07-11 凌巨科技股份有限公司 Solar energy touch panel, method of manufacturing solar energy touch device, and solar energy touch device including the same

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202145301U (en) * 2011-05-05 2012-02-15 展触光电科技股份有限公司 Touch panel with photoelectric conversion function and touch electronic device
US20130234127A1 (en) * 2010-12-28 2013-09-12 Nec Lighting, Ltd. Organic electroluminescent lighting device and method for manufacturing the lighting device
CN104571698A (en) * 2014-12-26 2015-04-29 京东方科技集团股份有限公司 Touch panel, manufacturing method for touch panel and touch display device comprising touch panel
CN104850269A (en) * 2015-06-10 2015-08-19 合肥鑫晟光电科技有限公司 Touch screen and touch display device
CN108365032A (en) * 2018-02-10 2018-08-03 云南承泰科技有限公司 Capacitance touching control photovoltaic solar integrated panel
CN110221726A (en) * 2019-06-10 2019-09-10 京东方科技集团股份有限公司 Touch base plate, display panel
CN111403501A (en) * 2020-03-23 2020-07-10 信利半导体有限公司 Manufacturing method of solar cell with touch function
CN211350671U (en) * 2020-03-23 2020-08-25 信利半导体有限公司 Solar cell with touch control function

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8169684B2 (en) * 2002-09-30 2012-05-01 Gentex Corporation Vehicular rearview mirror elements and assemblies incorporating these elements
KR101131227B1 (en) * 2010-08-17 2012-03-28 삼성전기주식회사 touch panel having solar cell
CN206819664U (en) * 2017-06-09 2017-12-29 信利光电股份有限公司 A kind of display device
CN110174973B (en) * 2019-06-18 2022-10-25 京东方科技集团股份有限公司 Display device, display panel and manufacturing method thereof

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130234127A1 (en) * 2010-12-28 2013-09-12 Nec Lighting, Ltd. Organic electroluminescent lighting device and method for manufacturing the lighting device
CN202145301U (en) * 2011-05-05 2012-02-15 展触光电科技股份有限公司 Touch panel with photoelectric conversion function and touch electronic device
CN104571698A (en) * 2014-12-26 2015-04-29 京东方科技集团股份有限公司 Touch panel, manufacturing method for touch panel and touch display device comprising touch panel
CN104850269A (en) * 2015-06-10 2015-08-19 合肥鑫晟光电科技有限公司 Touch screen and touch display device
CN108365032A (en) * 2018-02-10 2018-08-03 云南承泰科技有限公司 Capacitance touching control photovoltaic solar integrated panel
CN110221726A (en) * 2019-06-10 2019-09-10 京东方科技集团股份有限公司 Touch base plate, display panel
CN111403501A (en) * 2020-03-23 2020-07-10 信利半导体有限公司 Manufacturing method of solar cell with touch function
CN211350671U (en) * 2020-03-23 2020-08-25 信利半导体有限公司 Solar cell with touch control function

Also Published As

Publication number Publication date
CN111403501A (en) 2020-07-10

Similar Documents

Publication Publication Date Title
CN211350671U (en) Solar cell with touch control function
US11495699B2 (en) Thin-film photovoltaic cell with high photoelectric conversion rate and preparation process thereof
WO2021189841A1 (en) Method for manufacturing solar cell with touch function
CN106463561B (en) Crystalline silicon solar battery, crystalline silicon solar cell module and their manufacturing method
US11309445B2 (en) Thin-film photovoltaic cell series structure and preparation process of thin-film photovoltaic cell series structure
WO2022222953A1 (en) Solar cell and electronic device
CN107318269A (en) Solar cell and its manufacture method, solar module and wiring plate
TWI730701B (en) Method for manufacturing thin film solar cell and thin film solar cell
WO2021139332A1 (en) Display module having integrated thin film solar cell, and manufacturing method therefor
CN211150569U (en) Thin film solar cell
CN210836906U (en) Display module integrated with thin-film solar cell
EP4095936B1 (en) Solar cell, method for preparing same, smart glasses, and electronic device
WO2020237696A1 (en) Manufacturing method for thin-film photovoltaic cell and thin-film photovoltaic cell
JP5427863B2 (en) Solar cells
WO2021169568A1 (en) Display mother board and preparation method therefor, display substrate and display device
CN211150572U (en) Thin film solar cell
WO2021226868A1 (en) Driving substrate, fabrication method therefor and display apparatus
CN211265495U (en) Solar cell manufactured based on TFT technology
JP5569139B2 (en) Solar cell module
TWI765653B (en) Solar cell module and solar cell display
CN211265494U (en) Novel solar cell manufactured based on TFT technology
CN211350675U (en) Annular series connection structure of photovoltaic cell
TWI808720B (en) Solar energy touch panel, method of manufacturing solar energy touch device, and solar energy touch device including the same
CN113917723B (en) Display screen integrating light sensor and solar battery and preparation method thereof
CN107851678A (en) Solar module

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20927941

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20927941

Country of ref document: EP

Kind code of ref document: A1