WO2019221536A1

WO2019221536A1 - Pressure sensor and image display device including same

Info

Publication number: WO2019221536A1
Application number: PCT/KR2019/005895
Authority: WO
Inventors: 최병진
Original assignee: 동우화인켐 주식회사
Priority date: 2018-05-18
Filing date: 2019-05-17
Publication date: 2019-11-21

Abstract

A pressure sensor according to embodiments of the present invention comprises: a first electrode layer including a plurality of sensing electrode patterns that are separated from each other; a second electrode layer disposed facing the first electrode layer and provided as a common electrode for the plurality of sensing electrode patterns; and a tunneling layer disposed between the first electrode layer and the second electrode layer. A thin pressure sensor having improved flatness can be achieved by means of the second electrode layer and the tunneling layer.

Description

Pressure sensor and image display device including the same

The present invention relates to a pressure sensor and an image display device including the same. More specifically, the present invention relates to a pressure sensor including a plurality of electrode layers and an image display device including the same.

Recently, with the development of the information society, the demand for the display field is also presented in various forms. For example, a flat panel display device having features such as thinness, light weight, and low power consumption, for example, a liquid crystal display device, a plasma display panel device, Electro luminescent display devices and organic light-emitting diode display devices have been studied.

Meanwhile, various sensor members are coupled to the display device to implement a user's command input. For example, a touch sensor or a touch screen panel that receives a user's command through a touch on the screen of the display device is combined.

In addition, for example, a pressure sensor may be coupled to the display device to sense the pressure applied through the user's finger so that the operation of the display device is started or the user's command is performed.

Recently, as the thickness of the display device becomes thin, the thickness of the touch sensor or the pressure sensor also becomes thin. In this case, even the minute unevenness and the step by the electrode, the insulating pattern, etc. of the sensor member may inhibit the overall flattening of the sensor member, and the thickness uniformity of the display device may also be deteriorated.

For example, as disclosed in Korean Patent Laid-Open Publication No. 2013-0114820, a touch screen panel in which a touch sensor is coupled to various image display devices has recently been developed, but it does not include the case where the pressure sensor is coupled together.

One object of the present invention is to provide a pressure sensor having improved mechanical and electrical reliability.

One object of the present invention is to provide an image display device including a pressure sensor having improved mechanical and electrical reliability.

1. A first electrode layer comprising a plurality of sensing electrode patterns separated from each other; A second electrode layer disposed to face the first electrode layer and serving as a common electrode for the plurality of sensing electrode patterns; And a tunneling layer disposed between the first electrode layer and the second electrode layer.

2. In the above 1, wherein the second electrode layer is overlapped with the plurality of sensing electrode patterns in a plane direction, the pressure sensor.

3. In the above 2, wherein the tunneling layer is overlapped with the plurality of sensing electrode patterns in the planar direction, pressure sensor.

4. The pressure sensor according to the above 2, wherein the tunneling layer includes a plurality of spaced tunneling patterns.

5. In the above 1, wherein the tunneling layer is in contact with the second electrode layer, the pressure sensor is spaced apart from the first electrode layer.

6. In the above 5, further comprising a coupling structure for fixing the first electrode layer and the tunneling layer to form an air gap between the first electrode layer and the tunneling layer, the pressure sensor.

7. In the above 1, wherein the tunneling layer is in contact with the first electrode layer, spaced apart from the second electrode layer, the pressure sensor.

8. The pressure sensor of claim 7, further comprising a coupling structure to fix the second electrode layer and the tunneling layer so that an air gap is formed between the tunneling layer and the second electrode layer.

9. In the above 1, further comprising a first substrate on which the first electrode layer is disposed,

And the first substrate includes an active region in which the sensing electrode patterns are arranged and a peripheral region surrounding the active region.

10. The pressure sensor of claim 9, wherein the first electrode layer further comprises a first wiring branched from each of the sensing electrode patterns and extending in the active region.

11. The pressure sensor according to the above 10, further comprising a second wiring arranged in the peripheral region and electrically connected to the second electrode layer.

12. The pressure sensor of claim 11, further comprising a via structure for electrically connecting the second wire and the second electrode layer to each other.

13. The pressure sensor of above 12, wherein a plurality of the via structures are arranged along the peripheral region of the first substrate.

14. The pressure sensor of 12 above, further comprising at least one via pad arranged on the peripheral region of the first substrate and electrically connecting the via structure and the second wiring to each other.

15. In the above 12, further comprising a coupling structure for fixing the tunneling layer and the first electrode layer,

The via structure penetrates through the coupling structure.

16. In the above 11, wherein the first substrate comprises a circuit connection,

And the first wiring and the second wiring are gathered together at the circuit connecting portion.

17. The pressure sensor of 1 above, wherein the tunneling layer comprises quantum tunneling composites (QTC).

18. The pressure sensor of claim 1, wherein the tunneling layer and the second electrode layer each have a single layer shape covering the sensing electrode patterns as a whole in a planar direction.

19. The pressure sensor of any one of 1 to 18 above;

A display panel stacked on the pressure sensor; And

And a touch sensor stacked on the display panel.

20. The image display apparatus according to the above 19, wherein the touch sensor comprises a capacitive sensor.

The pressure sensor according to the embodiments of the present invention is disposed on the first electrode layer and the first electrode layer including a plurality of sensing electrode patterns that provide a sensing domain, and is provided as a common electrode for the plurality of sensing electrode patterns. It may include a second electrode layer. Since the second electrode layer is provided as a common electrode layer covering the plurality of independent sensing electrode patterns, the flattening of the pressure sensor is increased and a thinner pressure sensor can be realized.

A tunneling layer may be disposed between the first electrode layer and the second electrode layer to provide selective signal generation in a region to which pressure is applied. The tunneling layer may also be provided as a common layer for the sensing electrode patterns included in the first electrode layer, thereby improving flatness of the pressure sensor.

In some embodiments, a via structure may connect the second electrode layer to the driving circuit at the same level as the first electrode layer. Accordingly, the bonding process between the second electrode layer and the first electrode layer and the flexible circuit board may be implemented in one layer, and thus, a thinned pressure sensor may be implemented while reducing the bezel area.

The pressure sensor can be applied to an image display device such as a flexible display to effectively provide folding or folding characteristics.

1 is a schematic cross-sectional view illustrating a pressure sensor in accordance with example embodiments.

2 is a schematic plan view illustrating an arrangement of a first electrode layer of a pressure sensor according to example embodiments.

3 is a schematic plan view illustrating a coupling structure of a pressure sensor according to example embodiments.

4 and 5 are schematic plan views for describing a tunneling layer and a second electrode layer, respectively, according to exemplary embodiments.

6 is a schematic cross-sectional view illustrating a pressure sensor in accordance with some example embodiments.

7 is a schematic cross-sectional view illustrating a pressure sensor in accordance with some example embodiments.

8 is a schematic plan view for explaining an arrangement of a first electrode layer of a pressure sensor according to some exemplary embodiments.

9 is a schematic plan view illustrating a coupling structure of a pressure sensor in accordance with some example embodiments.

10 is a schematic cross-sectional view illustrating a pressure sensor in accordance with some example embodiments.

11 is a schematic cross-sectional view illustrating an image display device according to example embodiments.

Embodiments of the present invention provide a pressure sensor including a first electrode layer including a plurality of spaced apart sensing electrode patterns and a second electrode layer disposed on the first electrode layer and provided as a common counter electrode to the sensing electrode patterns. to provide. In addition, an image display device including the pressure sensor is provided.

In example embodiments, the pressure sensor may be a resistive sensor. For example, an electrical signal may be generated by detecting a voltage change caused by energization according to the pressure of the first and second electrode layers. For example, the pressure sensor may be disposed on the rear side of the image display device so as not to be exposed to the user.

Hereinafter, exemplary embodiments of the present invention will be described in more detail with reference to the accompanying drawings. However, the following drawings attached to the present specification are intended to illustrate preferred embodiments of the present invention, and together with the contents of the present invention serves to further understand the technical spirit of the present invention, the present invention described in such drawings It should not be construed as limited to matters.

1 is a schematic cross-sectional view illustrating a pressure sensor in accordance with example embodiments. 2 is a schematic plan view illustrating an arrangement of a first electrode layer of a pressure sensor according to example embodiments. 3 is a schematic plan view illustrating a coupling structure of a pressure sensor according to example embodiments. 4 and 5 are schematic plan views for describing a tunneling layer and a second electrode layer, respectively, according to exemplary embodiments.

Referring to FIG. 1, the pressure sensor may include a first electrode layer 110 and a second electrode layer 150 facing each other. A tunneling layer 140 may be disposed on the bottom surface of the second electrode layer 150.

In some embodiments, an air gap 130 may be formed between the tunneling layer 140 and the first electrode layer 110.

The first electrode layer 110 may be disposed on the first substrate 100a. As the first substrate 100a, for example, a substrate material and an insulating film material which are commonly used in an image display device may be used without particular limitation. For example, the first substrate 100a may be a cyclic olefin polymer (COP), polyethylene terephthalate (PET), polyacrylate (PAR), polyetherimide (PEI), polyethylene naphthalate (PEN), or polyphenylene sulfide (PPS), polyallylate, polyimide (PI), cellulose acetate propionate (CAP), polyethersulfone (PES), cellulose triacetate (TAC), polycarbonate (PC), cyclic olefin copolymer Polymer-based materials such as (COC), polymethyl methacrylate (PMMA), and the like.

Referring to FIG. 2, the first electrode layer 110 may include a plurality of sensing electrode patterns 115 arranged on the top surface of the first substrate 100a. The first electrode layer 110 may further include first wires 116 electrically connected to the sensing electrode patterns 115.

In example embodiments, each of the sensing electrode patterns 115 may be provided to a sensing domain of a pressure sensor. For example, the sensing electrode patterns 115 may be physically spaced apart from each other to function as independent sensing domains. In addition, the sensing electrode patterns 115 may be electrically separated from each other.

The first electrode layer 110 or the sensing electrode patterns 115 may include a transparent conductive oxide or a metal. The transparent conductive oxide may include, for example, indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium zinc oxide (IZTO), cadmium tin oxide (CTO), or the like. The metal is, for example, silver (Ag), gold (Au), copper (Cu), aluminum (Al), platinum (Pt), palladium (Pd), chromium (Cr), titanium (Ti), tungsten (W). ), Niobium (Nb), tantalum (Ta), vanadium (V), iron (Fe), manganese (Mn), cobalt (Co), nickel (Ni), zinc (Zn), tin (Sn) or alloys thereof It may include.

In some embodiments, the first electrode layer 110 or the sensing electrode patterns 115 may be formed of the metal or the alloy, and may not include the transparent conductive oxide. As described above, the pressure sensor may be disposed on the rear side of the image display device and may not be recognized by the user. Accordingly, the sensing sensitivity may be improved by forming the first electrode layer 110 or the sensing electrode patterns 115 using the metal or alloy having low resistance and high conductivity.

In FIG. 2, the sensing electrode patterns 115 are illustrated as having a rectangular shape, but the shape of the sensing electrode patterns 115 may be variously changed in consideration of the shape of the image display device or the pressure sensor, the pattern density, and the like. . In addition, the sensing electrode patterns 115 may include patterns having different sizes and shapes.

As shown in FIG. 2, the first substrate 100a includes a first region I and a second region II, so that the pressure sensor also includes the first region I and the second region II. ) Can be separated.

The first region I may correspond to an active region in which pressure sensing is performed. The sensing electrode patterns 115 may be arranged in the first region I. The second region II may correspond to a peripheral region or a bezel region of the first substrate 100a or the pressure sensor.

The first region I forms an edge of the first substrate 100a from an area where the sensing electrode patterns 115 are disposed, an area between the sensing electrode patterns 115, and a side surface of the sensing electrode patterns 115. It may include a margin area up to a predetermined distance.

In example embodiments, first wirings 116 connected to the sensing electrode patterns 115 may be arranged together on the first substrate 100a of the first region I. The first wires 116 may branch from each of the sensing electrode patterns 115 to extend on the first region I. FIG.

In example embodiments, the first interconnections 116 may be distributed in the area between the sensing electrode patterns 115 and the margin area. By arranging the first wirings 116 in the first region I provided as the active region, an area of the second region II that may serve as the bezel region may be reduced.

In some embodiments, an insulating layer may be further formed on the first substrate 100a to at least partially cover the first wires 116.

Terminals of the first wires 116 may be assembled at the circuit connection 118. In some embodiments, the circuit connection 118 may have a tail shape protruding from the first substrate 100a.

In one embodiment, the circuit connection 118 may be provided as a terminal portion of the pressure sensor. For example, the ends of the first wires 116 may be directly connected to a driving circuit such as an integrated circuit (IC) chip through the pad region P through the circuit connection 118.

In an embodiment, the ends of the first wires 116 may be connected to a connector of the controller board connected to the integrated circuit IC through the pad region P. FIG.

In one embodiment, the circuit connection 118 may be provided as a pad portion of the pressure sensor. For example, a passivation layer is formed at the circuit connection portion 118 covering the ends of the first wires 116 or the pads connected to the first wires 116, as shown in FIG. 2. The passivation layer portion may be removed at (P) to expose the ends or pads. In one embodiment, the insulating layer may extend to the circuit connection 118 to serve as the passivation layer.

The first wirings 116 and the driving circuit may be electrically connected to each other through a pad member P, for example, through a separate circuit member such as a flexible printed circuit board FPCB.

According to exemplary embodiments, since the second electrode layer 150 is formed as a common electrode, the number of electrode patterns and wirings may be reduced. Therefore, in one embodiment, the connection with the driving circuit can be implemented without a separate circuit member such as FPCB.

As shown in FIG. 1, the first electrode layer 110 may be coupled to be spaced apart from the second electrode layer 150 and the tunneling layer 140 through the coupling structure 160.

Referring to FIG. 3, the coupling structure 160 may be formed along the edge of the pressure sensor, and may include a structure capable of coupling a plurality of sheet members such as, for example, a gasket. The gasket may be formed of, for example, double-sided tape or by dispensing a resin-based adhesive.

The coupling structure 160 may have a shape substantially the same as or similar to that of the edge of the first substrate 100a, and may include an opening that exposes the first region I. The sensing electrode patterns 115 may be exposed through the opening.

As illustrated in FIG. 1, the tunneling layer 140 and the second electrode layer 150 may be sequentially disposed on the first electrode layer 110.

4 and 5, the tunneling layer 140 and the second electrode layer 150 may have a shape substantially the same as or similar to that of the first substrate 100a.

In some embodiments, the tunneling layer 140 and the second electrode layer 150 may cover the sensing electrode patterns 115 included in the first electrode layer 110 in the planar direction. Accordingly, the second electrode layer 150 may be provided as a common counter electrode with respect to the sensing electrode patterns 115.

In some embodiments, the tunneling layer 140 and the second electrode layer 150 may substantially entirely overlap the first region I of the first substrate 100a in the planar direction. In addition, the tunneling layer 140 and the second electrode layer 150 may at least partially overlap the second region II of the first substrate 100a in the planar direction.

Tunneling layer 140 may comprise Quantum Tunneling Composites (QTC). For example, it may be formed using a QTC composition including a binder resin, tunneling particles, and the like. The binder resin may include a rubber or elastomeric material, and the tunneling particles may include metal particles capable of implementing a tunneling effect such as nickel.

The tunneling layer 140 may directly contact the second electrode layer 150 and may face the first electrode layer 110. In example embodiments, the tunneling layer 140 may be spaced apart from the first electrode layer 110 by the coupling structure 160, and an air gap between the tunneling layer 140 and the first electrode layer 110 may be formed. 130 may be formed.

When pressure is applied to the second electrode layer 150 through, for example, a user's finger, a local region of the tunneling layer 140 may contact the sensing electrode pattern 115 included in the first electrode layer 110. . An electrical signal may be generated by energization between the second electrode layer 150 and the sensing electrode pattern 115 due to the tunneling effect occurring in the local region of the tunneling layer 140.

The second electrode layer 150 may include a conductive material substantially the same as or similar to that of the first electrode layer 110. In one embodiment, the second electrode layer 150 may be formed of a metal or an alloy.

As described above, as the second electrode layer 150 is provided as a common counter electrode with respect to the sensing electrode patterns 115, the second electrode layer 150 eliminates the step caused by the sensing electrode patterns 115. To function as a planarization layer.

Therefore, even when the pressure sensor is thinned, improved flatness with reduced level can be ensured, and flatness of the image display device to which the pressure sensor is coupled can also be improved. In addition, the tunneling layer 140 may also be provided as a common layer to substantially eliminate the step caused by the sensing electrode patterns 115.

In addition, by spatially separating the tunneling layer 140 and the sensing electrode patterns 115 through the air gap 130, it is possible to suppress electric field diffusion in the horizontal direction. Therefore, as the electric field is concentrated in the vertical direction between the second electrode layer 150 and the first electrode layer 110, the resolution and sensitivity of the pressure sensor may be improved.

In some embodiments, the tunneling layer 140 may be in contact with the first electrode layer 110, and the air gap 130 may be omitted.

Referring back to FIG. 1, a second substrate 100b may be disposed on the second electrode layer 150. For example, after the second electrode layer 150 and the tunneling layer 140 are sequentially stacked on the second substrate 100b, the first substrate 100a and the coupling structure 160 on which the first electrode layer 110 is formed are formed. Can be combined with each other.

For example, the second substrate 100b may include a polymer-based material substantially the same as or similar to that of the first substrate 100a.

Referring to FIG. 6, the tunneling layer 140 may contact the first electrode layer 110. In this case, the tunneling layer 140 substantially covers the sensing electrode patterns 115 included in the first electrode layer 110. Provided as a common layer can eliminate the step. In addition, the tunneling layer 140 and the second electrode layer 150 may be combined and fixed to be spaced apart from each other by the coupling structure 160 to form an air gap 130.

When the tunneling layer 140 is in contact with the first electrode layer 110, pressure is applied to the surface of the first electrode layer 110 through a user's finger, so that the tunneling layer 140 and the second electrode layer 150 may be energized. have.

7 is a schematic cross-sectional view illustrating a pressure sensor in accordance with some example embodiments. 8 is a schematic plan view for explaining an arrangement of a first electrode layer of a pressure sensor according to some exemplary embodiments. 9 is a schematic plan view illustrating a coupling structure of a pressure sensor in accordance with some example embodiments.

Detailed descriptions of substantially the same or similar structures and structures as those described with reference to FIGS. 1 to 5 will be omitted.

7 to 9, a via structure 155 may be formed to electrically connect the second electrode layer 150 to the driving circuit. For example, a via hole may be formed in the coupling structure 160, and a via structure may be formed in the via hole. The via hole may pass through the tunneling layer 140. In this case, the via structure 155 may extend from the second electrode layer 150 to penetrate the tunneling layer 140 and the coupling structure 160.

As illustrated in FIG. 8, a second wiring 153 may be arranged on the first substrate 100a to be electrically connected to the second electrode layer 150 through the via structure 155.

According to example embodiments, the second wiring 153 may be arranged on the peripheral area or the second area II of the first substrate 100a. The second wiring 153 may be assembled at the circuit connection portion 118 together with the first wirings 116.

Accordingly, the second wiring 153 and the first wiring 116 can be electrically connected to the driving circuit through one circuit connecting portion 118. Therefore, the electrical connection with the driving circuit of the first and second electrode layers 110 and 150 can be realized without a separate circuit member such as an FPCB or through, for example, one FPCB. Therefore, the thin pressure sensor can be easily implemented.

In addition, since the second electrode layer 150 is formed as the common electrode as described above, the number of the second wirings 153 may be reduced to reduce the area of the bezel area.

In some embodiments, via pad 157 may be disposed on which via structure 155 is seated. In this case, the second wiring 153 branches and extends from the via pad 157, and the second wiring 153 extends through the second electrode layer 150, the via structure 155, the via pad 157, and the second wiring 153. Signal transmission between the electrode layer 150 and the driving circuit may be performed.

The pressure sensor may include at least one via structure 155. In some embodiments, as shown in FIG. 9, a plurality of via structures 155 may be arranged along an edge of the coupling structure 160 or a peripheral area of the first substrate 100a. Therefore, the signal transfer resistance from the second electrode layer 150 to the driving circuit can be reduced.

For example, the via structure 155 may be formed through a dispensing or jetting process using a conductive material such as gold, silver, copper, and carbon paste. Accordingly, the via structure 155 may be easily formed without a complicated chemical process or a plating process.

10 is a schematic cross-sectional view illustrating a pressure sensor in accordance with some example embodiments. Detailed descriptions of substantially the same or similar structures and structures as those described with reference to FIGS. 1 to 5 will be omitted.

Referring to FIG. 10, the tunneling layer 140 may include a plurality of tunneling patterns 145 separated from each other. In an embodiment, the tunneling particles 145 may be formed to be substantially separated from each other by controlling the distribution of the aforementioned tunneling particles in the tunneling layer 140 for each region. In one embodiment, the QTC composition is applied locally on the second electrode layer 150 such that the tunneling patterns 145 are substantially physically completely separated in an island type pattern, thereby tunneling patterns 145. May be formed.

As the tunneling layer 140 includes the separated tunneling pattern 145, it is possible to more effectively suppress electric field spreading in the horizontal direction. Therefore, as the electric field is concentrated in the vertical direction between the second electrode layer 150 and the first electrode layer 110, signal interference in the horizontal direction is significantly reduced, thereby improving the resolution and sensitivity of the pressure sensor.

Referring to FIG. 11, the image display device may include a display panel 200 and a touch sensor 270 sequentially stacked on the pressure sensor 50.

The pressure sensor 50 may include the structure and configuration described with reference to FIGS. 1 to 9. The pressure sensor 50 may be disposed below the display panel 200 and disposed to the rear side of the image display device.

For example, the display panel 200 may be stacked on the pressure sensor 50 through the first adhesive layer 202.

The display panel 200 may include a pixel electrode 210, a pixel defining layer 220, a display layer 230, an opposite electrode 240, and an encapsulation layer 250 disposed on the panel substrate 205. Can be.

A pixel circuit including a thin film transistor TFT may be formed on the panel substrate 205, and an insulating layer covering the pixel circuit may be formed. The pixel electrode 210 may be electrically connected to the drain electrode of the TFT, for example.

In some embodiments, the panel substrate 205 includes a flexible resin such as polyimide, in which case the image display device may be provided as a flexible display.

The pixel defining layer 220 may be formed on the insulating layer to expose the pixel electrode 210 to define a pixel region. The display layer 230 is formed on the pixel electrode 210, and the display layer 230 may include, for example, a liquid crystal layer or an organic emission layer.

The opposite electrode 240 may be disposed on the pixel defining layer 220 and the display layer 230. The counter electrode 240 may be provided as, for example, a common electrode or a cathode of the image display device. An encapsulation layer 250 for protecting the display panel 200 may be stacked on the counter electrode 240.

For example, the touch sensor 270 may be stacked on the display panel 200 through the second adhesive layer 260. The touch sensor 270 may include, for example, a capacitive sensor of mutual capacitance type or self capacitance type. The touch sensor 270 may be disposed on the front side of the image display device. Therefore, since the sensing electrode of the touch sensor may be visually recognized by the user, the sensing electrode may include a transparent conductive oxide having high transmittance (for example, ITO).

The window substrate 290 may be stacked on the touch sensor 280 through, for example, the third adhesive layer 280.

In some embodiments, an optical layer, such as a polarizing layer, may be further included between the window substrate 290 and the touch sensor 280, or between the touch sensor 280 and the display panel 200.

Hereinafter, experimental examples including preferred embodiments are provided to help understanding of the present invention, but these examples are only for exemplifying the present invention, and do not limit the appended claims, and the scope and spirit of the present invention. It is apparent to those skilled in the art that various changes and modifications to the embodiments can be made within the scope, and such variations and modifications are within the scope of the appended claims.

실시예Example

15 (3 x 5) sensing electrode patterns (20 mm x 25 mm x length) on a first substrate (23 µm thick) made of tri-acetyl-cellulose (TAC); (1st electrode layer) was formed. The laminate including a QTC layer (thickness: 12 mu m) and a second electrode layer (thickness: 3,000 mu m) having the same area covers the sensing electrode patterns as a whole, and the second electrode layer is formed of the sensing electrode patterns with the QTC layer interposed therebetween. Bonded to face. A pressure sensor sample was prepared by stacking a second substrate (thickness: 23 μm) made of TAC on the second electrode layer.

The sensing electrode patterns and the second electrode layer include a silver alloy, and the QTC layer is made of Peratech.

비교예Comparative example

The first electrode layer has a width of 3.5 mm, a length of 62 mm, and the second electrode layer has a width of 3.5 mm and a length of 127 mm so that line patterns each include a 13 × 35 array.

Specifically, the line patterns of the first electrode layer are arranged in the X direction and the line patterns of the second electrode layer to extend in the Y direction and intersect with each other, and are arranged at the intersection of the line pattern of the first electrode layer and the line pattern of the second electrode layer overlapping each other. QTC patterns of 3 mm (width) x 3 mm (length) were formed, respectively.

A pressure sensor sample was prepared in the same manner as in the examples except for the configuration and conditions of the first electrode layer, the QTC pattern, and the second electrode layer.

실험예: 단차 시인 평가Experimental Example: Step recognition

Ten panels of at least 1.0 left and right with visual acuity were visually observed the pressure sensor samples of the examples and comparative examples at a distance of 30 cm under a three-wavelength lamp illumination in the direction of the second substrate.

For the pressure sensor sample of the example, all ten panels answered that the step was not recognized by the second substrate surface, and for the pressure sensor sample of the comparative example, all ten panels answered that the step that protruded to the second substrate surface was recognized.

Claims

A first electrode layer including a plurality of sensing electrode patterns separated from each other;

A second electrode layer disposed to face the first electrode layer and serving as a common electrode for the plurality of sensing electrode patterns; And

And a tunneling layer disposed between the first electrode layer and the second electrode layer.
The pressure sensor of claim 1, wherein the second electrode layer overlaps the plurality of sensing electrode patterns in a planar direction.
The pressure sensor of claim 2, wherein the tunneling layer entirely overlaps the plurality of sensing electrode patterns in the planar direction.
The pressure sensor of claim 2, wherein the tunneling layer comprises a plurality of spaced tunneling patterns.
The pressure sensor of claim 1, wherein the tunneling layer is in contact with the second electrode layer and spaced apart from the first electrode layer.
The pressure sensor according to claim 5, further comprising a coupling structure for fixing the first electrode layer and the tunneling layer such that an air gap is formed between the first electrode layer and the tunneling layer.
The pressure sensor of claim 1, wherein the tunneling layer is in contact with the first electrode layer and spaced apart from the second electrode layer.
The pressure sensor of claim 7, further comprising a coupling structure that fixes the second electrode layer and the tunneling layer such that an air gap is formed between the tunneling layer and the second electrode layer.
The method of claim 1, further comprising a first substrate on which the first electrode layer is disposed,

And the first substrate includes an active region in which the sensing electrode patterns are arranged and a peripheral region surrounding the active region.
The pressure sensor of claim 9, wherein the first electrode layer further includes a first wiring branched from each of the sensing electrode patterns to extend in the active region.
The pressure sensor of claim 10, further comprising a second wiring arranged in the peripheral region and electrically connected to the second electrode layer.
The pressure sensor of claim 11, further comprising a via structure electrically connecting the second wiring and the second electrode layer to each other.
The pressure sensor of claim 12, wherein a plurality of the via structures are arranged along the peripheral region of the first substrate.
The pressure sensor of claim 12, further comprising at least one via pad arranged on the peripheral region of the first substrate and electrically connecting the via structure and the second wiring to each other.
The method of claim 12, further comprising a coupling structure for fixing the tunneling layer and the first electrode layer,

The via structure penetrates through the coupling structure.
The method of claim 11, wherein the first substrate comprises a circuit connection,

And the first wiring and the second wiring are gathered together at the circuit connecting portion.
The pressure sensor of claim 1, wherein the tunneling layer comprises quantum tunneling composites (QTC).
The pressure sensor of claim 1, wherein the tunneling layer and the second electrode layer each have a single layer shape covering the sensing electrode patterns as a whole in a planar direction.
The pressure sensor of claim 1;

A display panel stacked on the pressure sensor; And

And a touch sensor stacked on the display panel.
20. The image display device of claim 19, wherein the touch sensor comprises a capacitive sensor.