US11423686B2

US11423686B2 - Integrated fingerprint and force sensor

Info

Publication number: US11423686B2
Application number: US16/634,495
Authority: US
Inventors: Julius Minglin Tsai; Dan Benjamin
Original assignee: Qorvo US Inc
Current assignee: Nextinput Inc; Qorvo US Inc
Priority date: 2017-07-25
Filing date: 2018-07-25
Publication date: 2022-08-23
Also published as: US20200234023A1; WO2019023309A1

Abstract

Described herein is a ruggedized microelectromechanical (“MEMS”) sensor including both fingerprint and force sensing elements and integrated with complementary metal-oxide-semiconductor (“CMOS”) circuitry on the same chip. The sensor employs either piezoresistive or piezoelectric sensing elements for detecting force and also capacitive or ultrasonic sensing elements for detecting fingerprint patterns. Both force and fingerprint sensing elements are electrically connected to integrated circuits on the same chip. The integrated circuits can amplify, digitize, calibrate, store, and/or communicate force values and/or fingerprint patterns through output pads to external circuitry.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a national stage application filed under 35 U.S.C. § 371 of PCT/US2018/043616 filed Jul. 25, 2018, which claims the benefit of U.S. provisional patent application No. 62/536,645, filed on Jul. 25, 2017, and entitled “INTEGRATED FINGERPRINT AND FORCE SENSOR,” the disclosures of which is expressly incorporated herein by reference in their entireties.

FIELD OF TECHNOLOGY

The present disclosure relates to microelectromechanical (“MEMS”) force sensing integrated with fingerprint sensor on the same complementary metal-oxide-semiconductor (“CMOS”) chip.

BACKGROUND

In some mobile electronic devices, the home button is integrated with fingerprint sensor and a mechanical switch for user's convenience to simultaneously authenticate the user and turn on the device. With the increasing demand for a water proof standard for mobile devices, the mechanical button must be removed and replaced with other sensing mechanisms to turn on the device. It is therefore desired to have force integrated into such solution, but this requires extra space and elaborate mechanical design to support an extra sensor using conventional force sensing technology inside the already crowded mobile device chassis.

SUMMARY

The present disclosure pertains to a MEMS sensor including both fingerprint and force sensing on the same chip. The MEMS sensor can also include integrated circuits on the same chip. Such an integrated sensor can be created using complementary metal-oxide-semiconductor (“CMOS”) process, where the force sensing elements can be formed through existing layers from CMOS process such as doped junction or poly-silicon layers. Alternatively or additionally, the force sensing elements can be formed by disposing piezoelectric layers after the CMOS process is completed and forming electrical connections to CMOS layers.

The fingerprint sensing can be implemented through capacitive sensing where the top metal layers can be used for such purpose. Alternatively, the same piezoelectric layer which is used for force sensing can be reconfigured to launch ultrasonic waves for fingerprint sensing purpose. Combinations of the different force and fingerprint sensing integration are contemplated and exemplified but not limited to such embodiments.

An example integrated microelectromechanical (“MEMS”) force sensor is described herein. The integrated MEMS force sensor can include a sensor die, a plurality of fingerprint sensing elements arranged on the sensor die, a force sensing element arranged on the sensor die, and digital circuitry arranged on the sensor die. The fingerprint sensing elements can be configured to sense a fingerprint pattern. The force sensing element can be configured to convert a strain to an analog electrical signal that is proportional to the strain. The digital circuitry can be configured to convert the analog electrical signal to a digital electrical output signal.

Additionally, in some implementations, the force sensing element can be a piezoresistive element. Optionally, the piezoresistive element can be formed by diffusion or implantation. Optionally, the piezoresistive element can be formed by polysilicon processes during an integrated circuit process used to form the digital circuitry.

Alternatively or additionally, in other implementations, the force sensing element can be a piezoelectric element. The sensor die can further include an inter-metal dielectric (IMD) layer, and the piezoelectric element can be arranged on the IMD layer.

Alternatively or additionally, the plurality of fingerprint sensing elements can form a matrix of pixels on a surface of the sensor die.

Alternatively or additionally, the digital circuitry can be further configured to reconstruct the fingerprint pattern. For example, the fingerprint sensing elements can be operably coupled to the digital circuitry such that a signal (e.g., capacitance, ultrasonic wave, etc.) sensed by the fingerprint sensing element can be transferred to the digital circuitry for further processing.

Alternatively or additionally, in some implementations, the fingerprint sensing elements can form a matrix of conductive plates. For example, the sensor die can further include an inter-metal dielectric (IMD) layer, and the matrix of conductive plates can be arranged on the IMD layer. The fingerprint sensing elements can be operably coupled to the digital circuitry. Additionally, the digital circuitry can be further configured to measure capacitance at each of the fingerprint sensing elements, and reconstruct the fingerprint pattern using the capacitance measured at each of the fingerprint sensing elements.

Alternatively or additionally, in other implementations, the fingerprint sensing elements can form a matrix of ultrasonic transducer pixels. For example, the sensor die can further include an inter-metal dielectric (IMD) layer, and the matrix of ultrasonic transducer pixels can be arranged on the IMD layer. Each of the ultrasonic transducer pixels can include a piezoelectric element such that the ultrasonic transducer pixels can be configured to emit and sense ultrasonic waves. The fingerprint sensing elements can be operably coupled to the digital circuitry. Additionally, the digital circuitry can be further configured to reconstruct the fingerprint pattern using the ultrasonic waves.

Alternatively or additionally, the digital circuitry can be formed by complementary metal-oxide-semiconductor (“CMOS”) process.

Other systems, methods, features and/or advantages will be or may become apparent to one with skill in the art upon examination of the following drawings and detailed description. It is intended that all such additional systems, methods, features and/or advantages be included within this description and be protected by the accompanying claims.

BRIEF DESCRIPTION OF THE FIGURES

The components in the drawings are not necessarily to scale relative to each other. Like reference numerals designate corresponding parts throughout the several views. These and other features of will become more apparent in the detailed description in which reference is made to the appended drawings wherein:

FIG. 1 is a cross-sectional view of an example integrated MEMS sensor attached to the sensing plate with CMOS side facing down.

FIG. 2 is a cross-sectional view of another example integrated MEMS sensor attached to the sensing plate with CMOS side facing up.

FIG. 3 is a cross-sectional view of an example capacitive fingerprint and piezoresistive force sensing integration according to one implementation described herein.

FIG. 4 is a cross-sectional view of an example capacitive fingerprint and piezoelectric force sensing integration according to one implementation described herein.

FIG. 5 is a cross-sectional view of an example ultrasonic fingerprint and piezoresistive force sensing integration according to one implementation described herein.

FIG. 6 is a cross-sectional view of an example ultrasonic fingerprint and piezoelectric force sensing integration according to one implementation described herein.

DETAILED DESCRIPTION

The present disclosure can be understood more readily by reference to the following detailed description, examples, drawings, and their previous and following description. However, before the present devices, systems, and/or methods are disclosed and described, it is to be understood that this disclosure is not limited to the specific devices, systems, and/or methods disclosed unless otherwise specified, and, as such, can, of course, vary. It is also to be understood that the terminology used herein is for the purpose of describing particular aspects only and is not intended to be limiting.

The following description is provided as an enabling teaching. To this end, those skilled in the relevant art will recognize and appreciate that many changes can be made, while still obtaining beneficial results. It will also be apparent that some of the desired benefits can be obtained by selecting some of the features without utilizing other features. Accordingly, those who work in the art will recognize that many modifications and adaptations may be possible and can even be desirable in certain circumstances, and are contemplated by this disclosure. Thus, the following description is provided as illustrative of the principles and not in limitation thereof.

As used throughout, the singular forms “a,” “an” and “the” include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to “a sensing element” can include two or more such sensing elements unless the context indicates otherwise.

The term “comprising” and variations thereof as used herein is used synonymously with the term “including” and variations thereof and are open, non-limiting terms.

Ranges can be expressed herein as from “about” one particular value, and/or to “about” another particular value. When such a range is expressed, another aspect includes from the one particular value and/or to the other particular value. Similarly, when values are expressed as approximations, by use of the antecedent “about,” it will be understood that the particular value forms another aspect. It will be further understood that the endpoints of each of the ranges are significant both in relation to the other endpoint, and independently of the other endpoint.

As used herein, the terms “optional” or “optionally” mean that the subsequently described event or circumstance may or may not occur, and that the description includes instances where said event or circumstance occurs and instances where it does not.

Described herein are integrated fingerprint and force sensors in a single chip. This disclosure contemplates that the assembly of such solution can be represented in the face-down or face-up configuration as depicted in FIG. 1 and FIG. 2, respectively. In FIGS. 1 and 2, a chip 105 (i.e., a sensor die) that includes both fingerprint sensing elements and force sensing elements is shown. Integration of both fingerprint and force sensing elements is described below with regard to FIGS. 3-6. As shown in FIGS. 1 and 2, the chip 105 is placed in contact with a sensing surface 104. This disclosure contemplates that the sensing surface 104 can be the part of a force-sensitive device (such as a mobile device) to which a force “F” is applied. The sensing surface 104 has opposing surfaces (e.g., top and bottom sides). The chip 105 is attached to the bottom side 103 of the sensing surface 104 in FIGS. 1 and 2. In FIG. 1, the chip 105 is attached to a flexible circuit board 101 through a solder joint 102. The solder joint 102 can serve as both electrical and mechanical connections. It should be understood that the number of solder joints 102 (i.e., two) shown in FIG. 1 is only provided as an example. This disclosure contemplates using more or less than two solder joints to attach the chip 105 to the flexible circuit board 101. Additionally, the CMOS circuitry side 106 of the chip 105 is facing away from (or down relative to) the sensing surface 104 with the chip 105 attached to the bottom side 103 of the sensing surface 104.

In FIG. 2, the chip is mechanically mounted to the flexible circuit board 101 with an electrical connection using a wire bond 207. It should be understood that the number of wire bonds (i.e., one) shown in FIG. 2 is only provided as an example. This disclosure contemplates using more or less than one wire bond to electrically couple the chip 105 to the flexible circuit board 101. Additionally, the CMOS circuitry side 106 of the chip 105 is facing toward (or up relative to) the sensing surface 104 with the CMOS circuitry side 106 of the chip 105 attached to the bottom surface 103 of the sensing plate 104. In order to provide space for the wire bond 207, a recess 208 can be provided on the chip 105. This disclosure contemplates that the flexible circuit board 101 can also be mechanically supported, i.e., the disclosure is not intended to be limited to the floating configuration shown in FIGS. 1 and 2.

Referring now to FIG. 3, a MEMS force sensor including an integrated sensor die with a combination of capacitive fingerprint sensing elements, piezoresistive sensing elements, and digital circuitry (e.g., CMOS circuitry) is shown. As depicted in FIG. 3, a cross-section of the MEMS force sensor using an integrated p-type MEMS-CMOS force sensor with a piezoresistive sensing element is shown. The chip (i.e., sensor die) includes a p-type silicon substrate 301 and an inter-metal dielectric (IMD) layer 350. Both an n-type metal-oxide-semiconductor (nMOS) transistor 310 and a p-type metal-oxide-semiconductor (pMOS) transistor 311 are fabricated on p-type silicon substrate 301. The p-type silicon substrate 301 can be a single continuous piece of material, i.e., the substrate can be monolithic. The nMOS source/drain 305 and pMOS source/drain 307 are formed through diffusion or implantation. As shown in FIG. 3, the pMOS source/drain 307 are heavily-doped p-type regions residing in a lightly-doped n-well region 306, which receives a voltage bias through a heavily-doped n-type implant 315. The nMOS source/drain 305 are heavily-doped n-type regions formed directly on the p-type silicon substrate 301. Further, a gate contact 308 (e.g., poly silicon gate) forms the channel required for each of the nMOS transistor 310 and pMOS transistor 311. The gate 308 can be formed with poly silicon with a thin oxide layer above the channel between each of the transistors. Although a p-type MEMS-CMOS force sensor is shown in FIG. 3, it should be understood that similar CMOS processes can be adapted to other starting materials, such as an n-type silicon substrate. Additionally, although a silicon substrate is provided as an example, this disclosure contemplates that the substrate can be made from a material other than silicon. Additionally, this disclosure contemplates that the MEMS force sensor can include a plurality of nMOS and pMOS devices. The nMOS and pMOS devices can form various components of the digital circuitry (e.g., CMOS circuitry). The digital circuitry can optionally include other components, which are not depicted in FIG. 3, including, but not limited to, bipolar transistors; metal-insulator-metal (“MIM”) and metal-oxide-semiconductor (“MOS”) capacitors; diffused, implanted, and polysilicon resistors; and/or diodes. The digital circuitry can include, but is not limited to, one or more of a differential amplifier or buffer, an analog-to-digital converter, a clock generator, non-volatile memory, and a communication bus. For example, the digital circuitry can include an on-chip buffer for storing the respective digital electrical output signals.

In addition to the nMOS and

pMOS transistors

310 and 311 shown in FIG. 3, a lightly doped n-type piezoresistive sensing element 303 (sometimes referred to herein as a “force sensing element”) and a heavily doped n-type contact region 304 are formed on the same p-type silicon substrate 301. In other words, the piezoresistive sensing element and digital circuitry can be disposed on the same monolithic substrate. Accordingly, the process used to form the piezoresistive sensing element can be compatible with the process used to form the digital circuitry (e.g., the CMOS process). The lightly doped n-type piezoresistive sensing element 303 and heavily doped n-type contact region 304 can be formed by way of either diffusion, deposition, or implant patterned with a lithographic exposure process. This disclosure contemplates that the MEMS force sensor can include a plurality of piezoresistive sensing elements. Additionally, metal layers 312 and contact layers 313 can be provided to create electrical connections between the nMOS and

pMOS transistors

310 and 311 and the piezoresistive sensing element 303.

The piezoresistive sensing elements 303 can change resistance in response to deflection of a portion of the sensor die. For example, as strain is induced in the sensor die proportional to the force applied to the MEMS force sensor, a localized strain is produced on a piezoresistive sensing element such that the piezoresistive sensing element experiences compression or tension, depending on its specific orientation. As the piezoresistive sensing element compresses and tenses, its resistivity changes in opposite fashion. Accordingly, a Wheatstone bridge circuit including a plurality (e.g., four) piezoresistive sensing elements (e.g., two of each orientation relative to strain) becomes unbalanced and produces a differential voltage. This differential voltage is directly proportional to the force applied to the MEMS force sensor. This disclosure contemplates that this differential voltage can be received at and processed by the digital circuitry. For example, the digital circuitry can be configured to, among other functions, convert an analog electrical signal to a digital electrical output signal. Example MEMS force sensors using piezoresistive sensing elements are described in U.S. Pat. No. 9,487,388, issued Nov. 8, 2016 and entitled “Ruggedized MEMS Force Die;” U.S. Pat. No. 9,493,342, issued Nov. 15, 2016 and entitled “Wafer Level MEMS Force Dies;” U.S. Pat. No. 9,902,611, issued Feb. 27, 2018 and entitled “Miniaturized and ruggedized wafer level mems force sensors;” and U.S. Patent Application Publication No. 2016/0363490 to Campbell et al., filed Jun. 10, 2016 and entitled “Ruggedized wafer level mems force sensor with a tolerance trench,” the disclosures of which are incorporated by reference in their entireties.

The MEMS force sensor shown in FIG. 3 can include a capacitive fingerprint sensor. For example, the MEMS force sensor can include a plurality of fingerprint sensing elements 302 (e.g., conductive plates) arranged at a surface of the IMD layer 350. The fingerprint sensing elements 302 can form a matrix of conductive plates. The conductive plates can optionally be made of copper or an aluminum-silicon-copper (Al—Si—Cu) alloy, which are conductive materials used in conventional CMOS processes. Each of the fingerprint sensing elements 302 is a pixel in the matrix. This disclosure contemplates that the matrix can be an n×m matrix of conductive plates, where n and m are integers. In some implementations, n can equal m. In other implementations, n does not equal m. It should be understood that the number of conductive plates in the matrix effects the resolution of the fingerprint sensor. Using more conductive plates increases the resolution of the fingerprint sensor, while using less conductive plates decreases the resolution of the fingerprint sensor. Additionally, each of the fingerprint sensing elements 302 can be connected to a respective capacitor circuit (not shown), which stores an electrical charge. A fingerprint is a pattern of ridges and valleys in the skin at the surface of finger. The distance from the ridge/valley to fingerprint sensing element 302 modulates the capacitance or charges stored in the capacitor circuit thus making it possible to process and re-construct the fingerprint pattern with the digital circuitry. This disclosure contemplates that the fingerprint sensor (e.g., the fingerprint sensing elements 302 and respective capacitors) can be operably coupled to the digital circuitry (e.g., the CMOS circuitry described above) such that the fingerprint pattern can be digitally reconstructed by the digital circuitry. Accordingly, the MEMS force sensor shown in FIG. 3 includes a piezoresistive sensing element 303, fingerprint sensing elements 302, and digital circuitry (e.g., nMOS and pMOS devices) all on the same chip.

Referring now to FIG. 4, another example MEMS force sensor including an integrated sensor die with a combination of capacitive fingerprint sensing elements, piezoelectric sensing elements, and digital circuitry (e.g., CMOS circuitry) is shown. As depicted in FIG. 4, a cross-section of the MEMS force sensor using an integrated p-type MEMS-CMOS force sensor with a piezoelectric sensing element is shown. The chip (i.e., sensor die) includes a p-type silicon substrate 301 and an inter-metal dielectric (IMD) layer 350. Both an n-type metal-oxide-semiconductor (nMOS) transistor 310 and a p-type metal-oxide-semiconductor (pMOS) transistor 311 are fabricated on p-type silicon substrate 301. The p-type silicon substrate 301 can be a single continuous piece of material, i.e., the substrate can be monolithic. The nMOS source/drain 305 and pMOS source/drain 307 are formed through diffusion or implantation. As shown in FIG. 4, the pMOS source/drain 307 are heavily-doped p-type regions residing in a lightly-doped n-well region 306, which receives a voltage bias through a heavily-doped n-type implant 315. The nMOS source/drain 305 are heavily-doped n-type regions formed directly on the p-type silicon substrate 301. Further, a gate contact 308 (e.g., poly silicon gate) forms the channel required for each of the nMOS transistor 310 and pMOS transistor 311. The gate 308 can be formed with poly silicon with a thin oxide layer above the channel between each of the transistors. Although a p-type MEMS-CMOS force sensor is shown in FIG. 4, it should be understood that similar CMOS processes can be adapted to other starting materials, such as an n-type silicon substrate. Additionally, although a silicon substrate is provided as an example, this disclosure contemplates that the substrate can be made from a material other than silicon. As described above, this disclosure contemplates that the MEMS force sensor can include a plurality of nMOS and pMOS devices, and the nMOS and pMOS devices can form various components of the digital circuitry (e.g., CMOS circuitry). The digital circuitry can optionally include other components, which are not depicted in FIG. 4, including, but not limited to, bipolar transistors; metal-insulator-metal (“MIM”) and metal-oxide-semiconductor (“MOS”) capacitors; diffused, implanted, and polysilicon resistors; and/or diodes. The digital circuitry can include, but is not limited to, one or more of a differential amplifier or buffer, an analog-to-digital converter, a clock generator, non-volatile memory, and a communication bus. For example, the digital circuitry can include an on-chip buffer for storing the respective digital electrical output signals.

The MEMS force sensor shown in FIG. 4 can also include a piezoelectric element 409 (sometimes referred to herein as a “force sensing element”), which is arranged between opposing

electrodes

410, 411. As shown in FIG. 4, the piezoelectric element 409 and opposing

electrodes

410, 411 are arranged on the IMD layer 350. The piezoelectric element 409 can be formed after completion of the integrated circuit process used to form the digital circuitry (e.g., the CMOS process). It should be understood that a single piezoelectric element is shown in FIG. 4 only as an example. This disclosure contemplates that the MEMS force sensor can include a plurality of piezoelectric elements. When a force is applied to the MEMS force sensor, the strain is transferred to piezoelectric element 409, which converts the strain into charge. In other words, the piezoelectric element 409 can change an electrical characteristic (i.e., charge) in response to deflection of a portion of the MEMS force sensor. Thus, the change in electrical characteristic can be detected as an analog electrical signal (e.g., change in voltage) at the opposing

electrodes

410, 411. The analog electrical signal can be transferred to the digital circuitry (e.g., the CMOS circuitry described above) for further processing. This disclosure contemplates that the change in voltage can be correlated with the amount of “F” applied to the MEMS force sensor. Additionally, metal layers and contact layers 313 can be provided to create electrical connections between the nMOS and

pMOS transistors

310 and 311 and the piezoelectric element 409.

The MEMS force sensor shown in FIG. 4 can also include a capacitive fingerprint sensor. For example, the MEMS force sensor can include a plurality of fingerprint sensing elements 302 (e.g., conductive plates) arranged on the IMD layer 350. The capacitive fingerprint sensor is described above with regard to FIG. 3 and is therefore not described in further detail below. Accordingly, the MEMS force sensor shown in FIG. 4 includes a piezoelectric element 409, fingerprint sensing elements 302, and digital circuitry (e.g., nMOS and pMOS devices) all on the same chip.

Referring now to FIG. 5, another example MEMS force sensor including an integrated sensor die with a combination of ultrasonic fingerprint sensing elements, piezoresistive sensing elements, and digital circuitry (e.g., CMOS circuitry) is shown. As depicted in FIG. 5, a cross-section of the MEMS force sensor using an integrated p-type MEMS-CMOS force sensor with a piezoresistive sensing element is shown. The chip (i.e., sensor die) includes a p-type silicon substrate 301 and an inter-metal dielectric (IMD) layer 350. Both an n-type metal-oxide-semiconductor (nMOS) transistor 310 and a p-type metal-oxide-semiconductor (pMOS) transistor 311 are fabricated on p-type silicon substrate 301. The nMOS source/drain 305 and pMOS source/drain 307 are formed through diffusion or implantation. As shown in FIG. 5, the pMOS source/drain 307 are heavily-doped p-type regions residing in a lightly-doped n-well region 306, which receives a voltage bias through a heavily-doped n-type implant 315. The nMOS source/drain 305 are heavily-doped n-type regions formed directly on the p-type silicon substrate 301. Further, a gate contact 308 (e.g., poly silicon gate) forms the channel required for each of the nMOS transistor 310 and pMOS transistor 311. In addition to the nMOS and

pMOS transistors

310 and 311 shown in FIG. 5, a lightly doped n-type piezoresistive sensing element 303 and a heavily doped n-type contact region 304 are formed on the same p-type silicon substrate 301. In other words, the piezoresistive sensing element and digital circuitry can be disposed on the same monolithic substrate. Accordingly, the process used to form the piezoresistive sensing element can be compatible with the process used to form the digital circuitry (e.g., the CMOS process). Additionally, metal layers 312 and contact layers 313 can be provided to create electrical connections between the nMOS and

pMOS transistors

310 and 311 and the piezoresistive sensing element 303. It should be understood that the piezoresistive sensing elements and digital circuitry (e.g., CMOS circuitry) is the same as described above with regard to FIG. 3 and is therefore not described in further detail below.

The MEMS force sensor shown in FIG. 5 can include an ultrasonic fingerprint sensor. For example, as depicted in FIG. 5, the MEMS force sensor can include a plurality of ultrasonic transducer pixels 512 arranged on the IMD layer 350. Each ultrasonic transducer pixel 512 can include a piezoelectric element 409, which is arranged between opposing

electrodes

410, 411. The ultrasonic transducer pixels 512 can be formed after completion of the integrated circuit process used to form the digital circuitry (e.g., the CMOS process). The ultrasonic transducer pixels 512 can form a matrix. This disclosure contemplates that the matrix can be an n×m matrix of pixels, where n and m are integers. In some implementations, n can equal m. In other implementations, n does not equal m.

Each ultrasonic transducer pixel 512 can emit ultrasonic waves and can also sense the reflected signal in a scan pattern. In other words, each ultrasonic transducer pixel 512 can act as a transmitter and a receiver. As described above, a fingerprint is a pattern of ridges and valleys in the skin at the surface of finger. When an ultrasonic wave is transmitted against the finger, portions of the wave are absorbed by the finger and portions of the wave are reflected back towards the fingerprint sensor. This depends on the pattern of ridges and valleys. This disclosure contemplates that the fingerprint sensor (e.g., the ultrasonic transducer pixels 512) can be operably coupled to the digital circuitry (e.g., the CMOS circuitry described above) such that the fingerprint pattern can be digitally reconstructed by the digital circuitry. For example, the ultrasonic waves sensed at the ultrasonic transducer pixels 512 can be transferred to the digital circuitry for processing, and the digital circuitry can be configured to reconstruct the fingerprint pattern from such data. Accordingly, the MEMS force sensor shown in FIG. 5 includes a piezoresistive sensing element 303, ultrasonic transducer pixels 512, and digital circuitry (e.g., nMOS and pMOS devices) all on the same chip.

Referring now to FIG. 6, another example MEMS force sensor including an integrated sensor die with a combination of ultrasonic fingerprint sensing elements, piezoelectric sensing elements, and digital circuitry (e.g., CMOS circuitry) is shown. As depicted in FIG. 6, a cross-section of the MEMS force sensor using an integrated p-type MEMS-CMOS force sensor with a piezoresistive sensing element is shown. The chip (i.e., sensor die) includes a p-type silicon substrate 301 and an inter-metal dielectric (IMD) layer 350. Both an n-type metal-oxide-semiconductor (nMOS) transistor 310 and a p-type metal-oxide-semiconductor (pMOS) transistor 311 are fabricated on p-type silicon substrate 301. The nMOS source/drain 305 and pMOS source/drain 307 are formed through diffusion or implantation. As shown in FIG. 6, the pMOS source/drain 307 are heavily-doped p-type regions residing in a lightly-doped n-well region 306, which receives a voltage bias through a heavily-doped n-type implant 315. The nMOS source/drain 305 are heavily-doped n-type regions formed directly on the p-type silicon substrate 301. Further, a gate contact 308 (e.g., poly silicon gate) forms the channel required for each of the nMOS transistor 310 and pMOS transistor 311. It should be understood that the digital circuitry (e.g., CMOS circuitry) is the same as described above with regard to FIG. 4 and is therefore not described in further detail below.

The MEMS force sensor shown in FIG. 6 can also include a force sensing element 613 and an ultrasonic fingerprint sensor. As depicted in FIG. 6, the MEMS force sensor can include a piezoelectric force sensing element 613 and a plurality of ultrasonic transducer pixels 512 arranged on the IMD layer 350. It should be understood that a single piezoelectric force sensing element 613 is shown in FIG. 6 only as an example. This disclosure contemplates that the MEMS force sensor can include a plurality of piezoelectric force sensing elements. Each piezoelectric force sensing element 613 and each ultrasonic transducer pixel 512 can include a piezoelectric element 409, which is arranged between opposing

electrodes

410, 411. The piezoelectric force sensing element 613 and the ultrasonic transducer pixels 512 can be formed after completion of the integrated circuit process used to form the digital circuitry (e.g., the CMOS process). Additionally, metal layers and contact layers 313 can be provided to create electrical connections between the nMOS and

pMOS transistors

310 and 311 and the piezoelectric force sensing element 613. Piezoelectric force sensing elements are described above with regard to FIG. 4 and ultrasonic transducer pixels are described above with regard to FIG. 6 and therefore these elements are not described in further detail below. Accordingly, the MEMS force sensor shown in FIG. 6 includes a piezoelectric force sensing element 613, ultrasonic transducer pixels 512, and digital circuitry (e.g., nMOS and pMOS devices) all on the same chip.

Although the subject matter has been described in language specific to structural features and/or methodological acts, it is to be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are disclosed as example forms of implementing the claims.

Claims

What is claimed:

1. An integrated microelectromechanical (“MEMS”) force sensor, comprising:

a sensor die comprising an inter-metal dielectric (IMD) layer arranged over a substrate,

a plurality of fingerprint sensing elements arranged on the sensor die, wherein:

the fingerprint sensing elements comprise conductive plates arranged on the IMD layer, and

the plurality of fingerprint sensing elements is configured to sense a fingerprint pattern,

a force sensing element arranged on the sensor die, wherein the force sensing element is configured to convert a strain to an analog electrical signal that is proportional to the strain, and

digital circuitry arranged on the sensor die, wherein the digital circuitry is configured to convert the analog electrical signal to a digital electrical output signal.

2. The integrated MEMS force sensor of claim 1, wherein the force sensing element is a piezoresistive element.

3. The integrated MEMS force sensor of claim 2, wherein the piezoresistive element is formed by diffusion or implantation.

4. The integrated MEMS force sensor of claim 2, wherein the piezoresistive element is formed by polysilicon processes during an integrated circuit process used to form the digital circuitry.

5. The integrated MEMS force sensor of claim 1, wherein the force sensing element is a piezoelectric element.

6. The integrated MEMS force sensor of claim 5, wherein the piezoelectric element is arranged on the IMD layer.

7. The integrated MEMS force sensor of claim 1, wherein the plurality of fingerprint sensing elements form a matrix of pixels on a surface of the sensor die.

8. The integrated MEMS force sensor of claim 1, wherein the digital circuitry is further configured to reconstruct the fingerprint pattern.

9. The integrated MEMS force sensor of claim 8, wherein the fingerprint sensing elements are operably coupled to the digital circuitry.

10. The integrated MEMS force sensor of claim 1, wherein the fingerprint sensing elements are operably coupled to the digital circuitry.

11. The integrated MEMS force sensor of claim 1, wherein the digital circuitry is further configured to measure capacitance at each of the fingerprint sensing elements.

12. The integrated MEMS force sensor of claim 11, wherein the digital circuitry is configured to reconstruct the fingerprint pattern using the capacitance measured at each of the fingerprint sensing elements.

13. The integrated MEMS force sensor of claim 1, wherein the digital circuitry is formed by complementary metal-oxide-semiconductor (“CMOS”) process.

14. An integrated microelectromechanical (“MEMS”) sensor, comprising:

a sensing plate; and

a sensor die attached to a bottom surface of the sensing plate, the sensor die comprising:

an inter-metal dielectric (IMD) layer arranged over a substrate,

a plurality of conductive plates arranged on the IMD layer, the plurality of conductive plates configured to sense a fingerprint pattern, and

a force sensing element configured to convert a strain to an analog electrical signal that is proportional to the strain.

15. The integrated MEMS sensor of claim 14, wherein the sensor die further comprises digital circuitry operably coupled to the force sensing element, the digital circuitry configured to convert the analog electrical signal to a digital electrical output signal.

16. The integrated MEMS sensor of claim 14, further comprising a flexible circuit board operably coupled to the sensor die.

17. The integrated MEMS sensor of claim 14, wherein the sensor die further comprises digital circuitry operably coupled to the plurality of conductive plates, the digital circuitry configured to measure capacitance at each conductive plate in the plurality of conductive plates.

18. The integrated MEMS sensor of claim 17, wherein the digital circuitry is configured to reconstruct the fingerprint pattern using the capacitance measured at each conductive plate in the plurality of conductive plates.

19. The integrated MEMS sensor of claim 14, wherein the force sensing element is one of a piezoresistive element or a piezoelectric element arranged between opposing electrodes.

20. The integrated MEMS sensor of claim 19, wherein the piezoresistive element or the piezoelectric element is arranged on the IMD layer.