RU2013132038A - METHOD FOR PRODUCING MULTI-LAYERED GRADIENT COATING BY MAGNETRON SPRAYING METHOD - Google Patents
METHOD FOR PRODUCING MULTI-LAYERED GRADIENT COATING BY MAGNETRON SPRAYING METHOD Download PDFInfo
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- RU2013132038A RU2013132038A RU2013132038/02A RU2013132038A RU2013132038A RU 2013132038 A RU2013132038 A RU 2013132038A RU 2013132038/02 A RU2013132038/02 A RU 2013132038/02A RU 2013132038 A RU2013132038 A RU 2013132038A RU 2013132038 A RU2013132038 A RU 2013132038A
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Abstract
1. Способ получения многослойного градиентного покрытия методом магнетронного напыления, включающий нанесение на предварительно очищенную поверхность металлической подложки адгезионного слоя тугоплавких металлов в среде инертного газа, а затем нитридов тугоплавких металлов в газовой смеси инертного и реакционного газа, отличающийся тем, что содержание нитридов тугоплавких металлов изменяют в направлении толщины напыляемого слоя с получением на поверхности покрытия нитридного слоя.2. Способ по п.1, отличающийся тем, что содержание нитридов тугоплавких металлов изменяют от 0% до 100%, выдерживают до получения требуемой толщины нитридного слоя, затем уменьшают в обратном порядке, выдерживают до получения требуемой толщины слоя тугоплавких металлов и вновь увеличивают в направлении толщины напыляемого слоя.3. Способ по п.2, отличающийся тем, что для увеличения и уменьшения содержания нитридов тугоплавких металлов давление реакционного газа изменяют по линейной зависимости, соответственно, от 0 до 8·10Па, а затем в обратном порядке.4. Способ по п.2, отличающийся тем, что процесс повторяют до достижения требуемой толщины покрытия.1. A method of producing a multilayer gradient coating by magnetron sputtering, comprising applying to a pre-cleaned surface of a metal substrate an adhesive layer of refractory metals in an inert gas, and then refractory metal nitrides in a gas mixture of an inert and reaction gas, characterized in that the content of refractory metal nitrides is changed in the direction of the thickness of the sprayed layer to obtain a nitride layer on the coating surface. 2. The method according to claim 1, characterized in that the content of refractory metal nitrides is changed from 0% to 100%, maintained until the desired thickness of the nitride layer is obtained, then reduced in the reverse order, maintained until the desired thickness of the refractory metal layer is obtained and again increased in the thickness direction sprayed layer. 3. The method according to claim 2, characterized in that in order to increase and decrease the content of refractory metal nitrides, the pressure of the reaction gas is linearly changed, respectively, from 0 to 8 · 10 Pa, and then in the reverse order. The method according to claim 2, characterized in that the process is repeated until the desired coating thickness is achieved.
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RU2013132038/02A RU2551331C2 (en) | 2013-07-10 | 2013-07-10 | Method of production of multi-layer gradient coating by method of magnetron deposition |
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RU2013132038/02A RU2551331C2 (en) | 2013-07-10 | 2013-07-10 | Method of production of multi-layer gradient coating by method of magnetron deposition |
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RU2013132038A true RU2013132038A (en) | 2015-01-20 |
RU2551331C2 RU2551331C2 (en) | 2015-05-20 |
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RU2013132038/02A RU2551331C2 (en) | 2013-07-10 | 2013-07-10 | Method of production of multi-layer gradient coating by method of magnetron deposition |
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Cited By (1)
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WO2023201766A1 (en) * | 2022-04-18 | 2023-10-26 | 东南大学 | Anti-corrosion and anti-fouling composite treatment method for surface of additive manufacturing metal part |
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RU2635617C1 (en) * | 2016-12-23 | 2017-11-14 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Российский химико-технологический университет имени Д.И. Менделеева" | Method of filtration material production |
RU2669953C1 (en) * | 2017-08-29 | 2018-10-17 | Публичное акционерное общество "Региональный инжиниринговый центр промышленных лазерных технологий "КАИ - Лазер" | Device for hybrid laser-acoustic creation of functional-gradient material |
RU2697145C1 (en) * | 2018-06-19 | 2019-08-12 | Андрей Валентинович Пакулин | Carbon-zinc coating, coating production method and coated structure |
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JP2001003166A (en) * | 1999-04-23 | 2001-01-09 | Nippon Sheet Glass Co Ltd | Method for coating surface of substrate with coating film and substrate by using the method |
DE102004033342A1 (en) * | 2004-07-09 | 2006-02-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Process for producing wear-resistant and fatigue-resistant edge layers in titanium alloys and components produced therewith |
RU2423550C1 (en) * | 2009-11-30 | 2011-07-10 | Общество с ограниченной ответственностью "Производственное предприятие Турбинаспецсервис" | Heat protecting cover for turbine blades and procedure for its fabrication |
EP2363510A1 (en) * | 2010-02-26 | 2011-09-07 | IMC Infomusic Consultants GmbH | Surface coatings for medical implants |
RU2433209C1 (en) * | 2010-06-15 | 2011-11-10 | Государственное образовательное учреждение высшего профессионального образования "Пермский государственный технический университет" | Method for obtaining wear-resistant and thermodynamically resistant multi-layer coating on basis of high-melting metals and their compounds |
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Cited By (1)
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WO2023201766A1 (en) * | 2022-04-18 | 2023-10-26 | 东南大学 | Anti-corrosion and anti-fouling composite treatment method for surface of additive manufacturing metal part |
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