KR102604185B1 - Zinc oxide based partial discharge diagnosis sensor - Google Patents

Abstract

The present invention provides a sensor for detecting partial discharge, wherein the sensor for detecting partial discharge includes a support substrate, an electrode on the support substrate, a zinc oxide nanorod layer on the electrode, and the electrode on the zinc oxide nanorod layer. It is characterized in that it includes a corresponding counter electrode and an upper substrate on the counter electrode.
This invention was developed through the Korea Electric Power Corporation's Electric Power Research Institute's 2018-2021 electric power industry external contest basic research (R18XA02) "Research on self-generated, high-efficiency, low-cost smart sensors and sensor data transmission technology."

Description

Sensor for partial discharge diagnosis based on zinc oxide {ZINC OXIDE BASED PARTIAL DISCHARGE DIAGNOSIS SENSOR}

The present invention relates to a sensor for diagnosing partial discharge, and more specifically, to a sensor for diagnosing partial discharge including a structure based on zinc oxide.

Recently, with the explosive increase in power demand, power facilities are becoming larger in capacity and ultra-high voltage, and substations in each region are developing into a trend of being unmanned and managed.

In particular, according to this trend, the power IoT-based facility management model requires a paradigm differentiated from existing systems, and among existing facility management-related technologies, the diagnostic system also increases partial discharge (PD) caused by the combination of facilities. It is a trend.

Partial discharge is a general term for discharges that occur in one part rather than between electrodes. Partial discharges such as partial surface discharges caused by high electric fields on the surface of an insulating material or internal discharges that occur in voids or bubbles present inside the insulating material. There are partial discharges such as corona discharge that occurs near the tip of a sharp electrode in a gas, creeping discharge that occurs along the surface of a solid insulator, and void discharge that occurs in the pores in the solid insulator.

Starting with this partial discharge, the deterioration of the insulating material due to voltage stress may progress. When the resistivity of the particle layer collected at the dust collection electrode in an electric precipitator, etc. is very high, reverse corona discharge (reverse ionization) occurs from the surface of the particle layer toward the discharge electrode, and when the electric field strength becomes strong, reverse ions are emitted from the front of the particle layer toward the discharge electrode, causing particles to drop. By neutralizing the electric charge, the dust collection function is lost, which can cause the insulating material to become dull.

Accordingly, the demand for systems that detect partial discharge is increasing, but most of these partial discharge detection systems are high-specification, expensive products that measure and analyze small PD signals (voltage generated by the charge amount of pC, several μV). Therefore, recently, instead of directly measuring partial discharge (PD) signals, diagnostic equipment that detects light, sound, vibration, ultraviolet rays, infrared ultrasonic waves, ozone, etc. generated by partial discharge (PD) has been introduced, and is ultimately IoT-based. There is a need for facility management systems to replace existing high-spec equipment and apply portable, small, low-spec sensors.

This invention was developed through the Korea Electric Power Corporation's Electric Power Research Institute's 2018-2021 electric power industry external contest basic research (R18XA02) "Research on self-generated, high-efficiency, low-cost smart sensors and sensor data transmission technology."

Korean Patent Publication No. 10-2013-0047418, “Partial discharge diagnosis device and method for high-voltage power equipment using multiple sensors” Korean Patent Publication No. 10-1303082, “Portable partial discharge detection device”

An embodiment of the present invention seeks to provide a zinc oxide-based nanorod structure in which the aspect ratio of zinc oxide (ZnO) nanorods is controlled.

Additionally, an embodiment of the present invention seeks to provide a method of manufacturing a zinc oxide-based electrode device that adjusts the aspect ratio of the zinc oxide nanorods of the zinc oxide-based nanorod structure.

Additionally, an embodiment of the present invention seeks to provide a partial discharge detection sensor including a zinc oxide-based electrode element.

A sensor for partial discharge detection according to an embodiment of the present invention includes an electrode formed on a support substrate, a zinc oxide nanorod layer that detects ultrasonic waves generated by partial discharge of power equipment on the electrode, and a zinc oxide nanorod layer on the zinc oxide nanorod layer. It includes a counter electrode corresponding to the electrode, an upper substrate on the counter electrode, and a wire connecting the electrode and the counter electrode.

The support substrate is selected from the group of polymer films consisting of glass and polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), and polycarbonate (PC). It is characterized by being one.

The electrode is characterized in that it is selected from the group consisting of indium tin oxide (ITO), carbon fiber, metal, conductive polymer, graphene, and carbon nanotube (Carbon nanotube, CNT).

The zinc oxide nanorods of the zinc oxide nanorod layer are characterized in that they have an aspect ratio of 5:1 to 40:1.

The counter electrode is characterized in that it is selected from the group consisting of silver (Ag), platinum (Pt), and palladium (Pd).

The upper substrate is characterized by being selected from the group consisting of polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), and polycarbonate (PC). Do it as

The ultrasonic waves are characterized in that they are ultrasonic waves in the 50 MHz to 700 MHz band.

A method of manufacturing a sensor for partial discharge detection according to another embodiment of the present invention includes the steps of preparing a substrate, forming a zinc oxide seed layer with a zinc oxide seed (ZnO seed solution) on the substrate, and the oxidation step. Forming a zinc oxide nanorod layer by growing a plurality of zinc oxide nanorods on a substrate on which a zinc seed layer is formed, and combining a substrate on which a counter electrode material is deposited on the zinc oxide nanorod layer. Includes.

The method of growing a plurality of zinc oxide nanorods on the substrate on which the zinc oxide seed layer is formed is characterized by a hydrothermal process.

The step of forming a zinc oxide seed layer is characterized by spin coating the zinc oxide seed solution on the substrate at 800 rpm to 1200 rpm for 40 to 80 seconds and drying at 80°C to 120°C for 1 to 3 minutes.

The density of the seed layer is adjusted by repeating the process of spin-coating the zinc oxide seed solution on the substrate and drying it 2 to 10 times.

The step of forming the zinc oxide nanorod layer is characterized by placing the substrate on which the zinc oxide seed layer is formed in a zinc oxide growth solution and growing it for 1 to 12 hours.

The step of forming the zinc oxide nanorod layer is characterized in that the aspect ratio of the zinc oxide nanorods of the zinc oxide nanorod layer is 5:1 to 40:1.

The zinc oxide nanorod layer in the step of forming the zinc oxide nanorod layer is characterized by detecting ultrasonic waves generated by partial discharge of power equipment.

The ultrasonic waves are characterized in that they are ultrasonic waves in the 50 MHz to 700 MHz band.

According to an embodiment of the present invention, it is possible to provide a zinc oxide-based nanorod structure that can detect ultrasonic waves generated by partial discharge.

Additionally, according to an embodiment of the present invention, a sensor for detecting partial discharge including a zinc oxide-based nanorod structure can be provided.

Additionally, according to an embodiment of the present invention, miniaturized partial discharge detection equipment can be provided using a sensor for partial discharge detection.

Figure 1 shows a schematic diagram of a sensor for detecting partial discharge according to an embodiment of the present invention.
Figure 2 shows a flow chart of a method for manufacturing a sensor for detecting partial discharge according to an embodiment of the present invention.
Figure 3 shows an SEM image of a zinc oxide-based nanorod structure of a sensor for partial discharge detection according to an embodiment of the present invention.
Figure 4 shows a device used to evaluate the characteristics of a sensor for detecting partial discharge according to an embodiment of the present invention.
Figure 5 shows the results of XRD analysis of the substrate prepared according to Preparation Example 1 of the present invention.
Figure 6 shows the partial discharge (corona discharge) detection results of the partial discharge detection sensor according to Example 1 of the present invention.
Figure 7 shows the partial discharge (corona discharge) detection results of the partial discharge detection sensor according to Example 2 of the present invention.
Figure 8 shows the partial discharge (corona discharge) detection results of the partial discharge detection sensor according to Example 3 of the present invention.
Figure 9 shows the partial discharge (corona discharge) detection results of the partial discharge detection sensor according to Example 4 of the present invention.
Figure 10 shows partial discharge (void discharge) detection results according to Example 2 of the present invention.
Figure 11 shows partial discharge (void discharge) detection results according to Comparative Example 1 of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings and the contents described in the accompanying drawings, but the present invention is not limited or limited by the embodiments.

The terminology used herein is for describing embodiments and is not intended to limit the invention. As used herein, singular forms also include plural forms, unless specifically stated otherwise in the context. As used herein, “comprises” and/or “comprising” refers to the presence of one or more other components, steps, operations and/or elements. or does not rule out addition.

As used herein, “embodiment,” “example,” “aspect,” “example,” etc. should be construed to mean that any aspect or design described is better or advantageous than other aspects or designs. It's not like that.

Additionally, the term 'or' means an inclusive OR 'inclusive or' rather than an exclusive OR 'exclusive or'. That is, unless otherwise stated or clear from the context, the expression 'x uses a or b' means any of the natural inclusive permutations.

Additionally, as used in this specification and claims, the singular expressions “a” or “an” generally mean “one or more,” unless otherwise indicated or it is clear from the context that the singular refers to singular forms. It should be interpreted as

Additionally, a part of an act, layer, area, component request, etc., is said to be "on" or "on" another part, not only when it is directly on top of the other part, but also when there are other acts, layers, areas, or components in between. Also includes cases where etc. are included.

Hereinafter, a sensor for detecting partial discharge according to an embodiment of the present invention will be described with reference to the attached drawings.

Referring to FIG. 1, the sensor for partial discharge detection includes a substrate 110 including a support substrate 112 and an electrode 114, a zinc oxide nanorod layer 120 on the substrate 110, and a zinc oxide nanorod layer. It includes a counter electrode 130 corresponding to the electrode 114 on (120), an upper substrate 140 on the counter electrode 130, and a wire 150 connecting the electrode 112 and the counter electrode 130. do.

The support substrate 114 is a polymer film group consisting of glass, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), and polycarbonate (PC). It can be one selected from .

The electrode 112 may be made of indium tin oxide (ITO), carbon fiber, metal, conductive polymer, graphene, or carbon nanotube (CNT).

The zinc oxide nanorods of the zinc oxide nanorod layer 120 are characterized as having an aspect ratio of 5:1 to 40:1, preferably 11:1 to 35:1, and more preferably 21:1. .

The aspect ratio refers to the ratio of the average diameter of the surface on which one zinc oxide nanorod is attached to the substrate and the average length of one zinc oxide nanorod.

The counter electrode 130 may be silver (Ag), platinum (Pt), or palladium (Pd) (please list the types of electrodes usable in the present invention), and more specifically, it may be silver (Ag).

The upper substrate 140 may be polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), or polycarbonate (PC). Specifically, It may be a polyethylene naphthalate (PEN) film.

The zinc oxide nanorod layer 120 can detect ultrasonic waves generated by partial discharge of power equipment, and the ultrasonic waves may be in the 50 MHz to 700 MHz band.

Referring to Figure 2, the method of manufacturing a sensor for partial discharge detection includes preparing a substrate,

It includes forming a zinc oxide seed layer, forming a zinc oxide nanorod layer, and combining it with a counter electrode.

More specifically, preparing a substrate, forming a zinc oxide seed layer with a zinc oxide seed (ZnO seed) solution on the substrate, forming a plurality of zinc oxide seeds on the substrate on which the zinc oxide seed layer is formed. It includes growing nanorods to form a zinc oxide nanorod layer and combining a substrate on which a counter electrode material is deposited on the zinc oxide nanorod layer.

The substrate in the step of preparing the substrate includes a support substrate and an electrode, and the support substrate is glass, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polyethersulfone. , PES) or polycarbonate (PC). Additionally, the electrode may be indium tin oxide (ITO), carbon fiber, metal, conductive polymer, graphene, or carbon nanotube (CNT), and specifically, indium tin oxide (Indium Tin Oxide, It may be ITO).

The substrate in the step of preparing the substrate may have a resistance of 50 ohm/sq to 500 ohm/sq. The unit of resistance is ohm/sq or Ω It can be written as /□.

Methods for growing a plurality of zinc oxide nanorods on a substrate on which the zinc oxide seed layer is formed include a hydrothermal process, a CVD method, an electro-deposition method, and a sol- It may be a gel method (sol-gel method), molecular beam deposition method, sputtering method, or pulse laser deposition method, and preferably, it may be a hydrothermal synthesis method.

The hydrothermal synthesis method is a method of artificially reproducing the natural crystallization process of minerals in an underground hydrothermal mine and crystallizing specific metal particles as if they were growing. A typical hydrothermal synthesis method is performed at high temperature and high pressure, but the hydrothermal synthesis method of the present invention is characterized by being performed at a low temperature and normal pressure of 50 to 100°C.

In the step of forming a zinc oxide seed layer, the zinc oxide seed solution may be spin coated on the substrate at 800 rpm to 1200 rpm for 40 to 80 seconds, and dried at 80°C to 120°C for 1 minute to 3 minutes. Specifically, spin coating at 1000 rpm for 60 seconds and drying at 100°C for 2 minutes.

The process of spin coating and drying the zinc oxide seed solution on the substrate can be repeated 2 to 10 times to adjust the density of the seed layer. Preferably, it is better to adjust the density of the seed layer by repeating this step 5 times.

The density of the seed layer affects the aspect ratio growth of the zinc oxide nanorods, and the zinc oxide nanorod layer formed under the influence of the density of the seed layer affects the effectiveness of ultrasonic detection by partial discharge.

The density of the seed layer can be confirmed by the peak size at a specific position in the XRD results, and when the peak at a specific position is confirmed, it can be determined that a seed layer with the same density distribution to some extent has been formed. Using the identified seed layer is advantageous for the growth of nanorods.

In the step of forming the zinc oxide nanorod layer, the substrate on which the zinc oxide seed layer is formed can be placed in a zinc oxide growth solution and grown for 1 to 12 hours, preferably for 3 to 9 hours.

In the step of forming the zinc oxide nanorod layer, the aspect ratio of the zinc oxide nanorods may be 5:1 to 40:1, preferably 5:1 to 35:1, and more preferably 11:1. It may be 21:1.

In the step of combining the substrate on which the counter electrode material is deposited on the zinc oxide nanorod layer, the counter electrode material may be one selected from the group consisting of silver (Ag), platinum (Pt), and palladium (Pd).

In the combining step, the zinc oxide nanorod layer and the electrode material deposition portion of the substrate on which the positive material is deposited are combined to contact each other.

The zinc oxide nanorod layer in the step of forming the zinc oxide nanorod layer can detect ultrasonic waves generated by partial discharge of power equipment such as transformers, power transmission equipment, distribution equipment, GIS (gas insulated switchgear), etc. The ultrasonic waves may be ultrasonic waves in the 50 MHz to 700 MHz band.

As described above, although the present invention has been described with reference to limited embodiments and drawings, the present invention is not limited to the above embodiments, and various modifications and variations can be made from these descriptions by those skilled in the art. This is possible. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined by the claims and equivalents thereof as well as the claims described later.

Preparation example 1.

To form ZnO nanorods (zinc oxide nanorods) on a substrate, a wet chemical method (hydrothermal process) that allows large-area growth at low temperatures was used.

First, 0.02 M of zinc acetate dihydrate (Zn(CH3COO)2·2H2O, Aldrich) was dissolved in 50 ml of ethanol at room temperature using a stirrer for 30 min. Afterwards, in order to dissolve everything, the temperature was additionally raised to 90°C and stirred for an additional 10 min. The ZnO seed solution prepared in this way is cleaned with IPA and Acetone, dried, and then the ITO/Glass substrate treated with plasma (Ar) is immersed in the ZnO seed solution to remove impurities and increase surface wettability, using the ASM (Aqueous solution method) method. A seed layer was formed. At this time, the ITO/Glass substrate is used having a sheet resistance of about 30 Ω/□.

To form a ZnO seed layer, the ZnO seed solution was dropped on the ITO/Glass substrate, and then spin coating was performed at 1000 rpm for 60 s. The spin-coated substrate was dried on a 100 hot-plate for 2 min to adsorb the seeds and remove the organic solvent. This process was repeated 5 times to adjust the density of the ZnO seed layer.

Example 1.

In Preparation Example 1, the ITO/Glass substrate on which the ZnO seed layer was formed was mixed with 0.025 M Zinc nitrate hexahydrate (Zn(NO3)2·6H2O, Aldrich) and 0.025 M Hexamethylenetetramine (C6H12N4, Aldrich) in 300 ml of distilled water at a temperature of 75°C. It was added to the growth solution prepared by dissolving it using a stirrer and grown in a 90°C hot air oven for 9 hours.

A substrate on which a ZnO nanorod-based structure with an aspect ratio of 35:1 was formed was prepared in the same manner as above.

As described above, a substrate (glass or film, 1 cm , 3M) is attached. The PEN film (125㎛) on which Ag is deposited is cut to a size similar to the lower plate and bonded to the lower plate. Then, wires are fixed to each electrode (ITO, Ag) with Kapton tape to manufacture a sensor element having the structure shown in FIG. 1.

Example 2.

The same procedure as in Example 1 was performed, but the reaction time was 6 hours to prepare a substrate on which a ZnO nanorod-based structure with an aspect ratio of 21:1 was formed.

A sensor device was manufactured in the same manner as Example 1, using a substrate on which a ZnO nanorod-based structure was formed with an aspect ratio of the ZnO nanorod of 21:1.

Example 3.

The same procedure as in Example 1 was performed, but the reaction time was 3 hours to prepare a substrate on which a ZnO nanorod-based structure with an aspect ratio of 11:1 was formed.

Using a substrate on which a ZnO nanorod-based structure having an aspect ratio of the ZnO nanorod of 11:1 was formed, a sensor device was manufactured in the same manner as in Example 1.

Example 4.

The same procedure as in Example 1 was performed, except that the reaction time was 1 hour to prepare a substrate on which a ZnO nanorod-based structure with an aspect ratio of 5:1 was formed.

Using a substrate on which a ZnO nanorod-based structure having an aspect ratio of the ZnO nanorod of 5:1 was formed, a sensor device was manufactured in the same manner as Example 1.

Comparative Example 1.

Prepare a commercialized sensor, the HFCT (High Frequency Current Transformer) sensor.

Characteristic evaluation 1.

The substrate prepared according to Preparation Example 1 above was subjected to XRD (X-ray diffraction) analysis using an X-ray diffraction analyzer. The analysis results are shown in Figure 5.

Referring to FIG. 5, as a result of XRD analysis of the substrate prepared according to Preparation Example 1, it was confirmed that crystals on the (110) plane were well formed through the size of the peak at 2theta 15 degrees. Through this, it can be seen that the density of the seed layer of the substrate prepared according to Preparation Example 1 makes it easy to grow ZnO nanorods.

Characteristic evaluation 2.

A partial discharge simulation experiment using corona discharge was conducted to check whether the sensor was detected. The partial discharge was performed using the equipment shown in FIG. 4.

To confirm partial discharge detection, a corona discharge with 10 pC (pico coulomb) was generated. The sensor prepared in Example 1 was mounted on the pillar next to the partial discharge, and the change in voltage was observed using an electrometer (6514, Keithley) connected to the sensor to see if the signal changed when partial discharge occurred.

The fact that a partial discharge actually occurred was confirmed through an oscilloscope connected to the sensor prepared through the commercially available Comparative Example 1. Through the oscilloscope, a voltage change occurred when a partial discharge occurred, and there was no voltage change when a partial discharge did not occur. confirmed.

As described above, the results of a 10 pC corona discharge simulation experiment using Example 1 (a sensor based on ZnO nanorod with an aspect ratio of 35:1) were converted to FFT (Fast Fourier Transform), and the results are shown in FIG. 6 Shown.

Referring to FIG. 6, (a) is the actual voltage data, (b) is the FFT conversion of this, and (c) is the frequency of the X-axis converted to a log scale. . As shown in last (c), it was confirmed that partial discharge signals were detected in the 70 MHz, 115 MHz, and 520 MHz frequency bands.

Characteristic evaluation 3.

The same characteristics as the above characteristic evaluation 2 were performed, but instead of the sensor prepared in Example 1, the sensor prepared in Example 2 (a sensor based on ZnO nanorod with an aspect ratio of 21:1) was used.

The confirmation results are shown in Figure 7.

Characteristic evaluation 4.

The same characteristic evaluation as 2 was performed, but instead of the sensor prepared in Example 1, it was confirmed using the sensor prepared in Example 3 (a sensor based on ZnO nanorod with an aspect ratio of 11:1).

The confirmation results are shown in Figure 8.

Characteristic evaluation 5.

The same characteristics as the above characteristic evaluation 2 were performed, but instead of the sensor prepared in Example 1, it was confirmed using the sensor prepared in Example 4 (a sensor based on ZnO nanorod with an aspect ratio of 5:1).

The confirmation results are shown in Figure 9.

FIG. 7, FIG. 8, and FIG. 9 are FFT conversion results of partial discharge experiment results of a sensor based on ZnO nanorod with aspect ratios of 21:1, 11:1, and 5:1, respectively. 7 to 9 above, it can be seen that peaks occurred at frequencies of 70 MHz, 115 MHz, and 520 MHz, identical to the results of characteristic evaluation 4.

In addition, it can be confirmed that the sensor based on zinc oxide nanorod (ZnO nanorod) with an aspect ratio of 21:1 has a slightly sharper peak at the 520 MHz frequency, effectively detecting the high frequency region under the same partial discharge conditions. there was.

Characteristic evaluation 6.

The same procedure as characteristic evaluation 2 above was performed, but void discharge was used instead of corona discharge.

For confirmation, a void discharge with 50 pC (pico coulomb) was generated. The sensor prepared through Example 2 and Comparative Example 1 was mounted on the pillar next to where partial discharge occurs, and the voltage change was measured using an electrometer (6514, Keithley) connected to the sensor to see if the signal changes when partial discharge occurs. observed.

The fact that a partial discharge actually occurred was confirmed through an oscilloscope connected to the sensor prepared through the commercially available Comparative Example 1. Through the oscilloscope, a voltage change occurs when a partial discharge occurs, and when a partial discharge does not occur, the voltage changes. It was confirmed that there was no change.

The results confirmed using the sensor prepared through Example 2 are shown in FIG. 10, and the results confirmed using the sensor prepared through Comparative Example 1 are shown in FIG. 11.

Figure 10 shows the results of FFT conversion of the results of a void discharge simulation test of 50 pC using Example 2 (sensor based on ZnO nanorod with an aspect ratio of 21:1). As a result, a high peak was confirmed at 15 MHz.

The results of FIG. 10 were compared with the results of FIG. 11, which are the results of a commercially available partial discharge detection sensor. As a result, it can be seen that Figure 11 shows a relatively high peak at 10 MHz compared to the result in Figure 10. This is a result of confirming that the sample manufactured according to FIG. 10 can detect a different frequency region under the same discharge conditions as that of FIG. 11.

As described above, although the present invention has been described with reference to limited embodiments and drawings, the present invention is not limited to the above embodiments, and various modifications and variations can be made from these descriptions by those skilled in the art. This is possible. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined by the claims and equivalents thereof as well as the claims described later.

100: Sensor for partial discharge detection
110: substrate
112: electrode 114: support substrate
120: Zinc oxide nanorod layer
130: counter electrode
140: upper substrate
150: wire

Claims (15)

Electrodes formed on a support substrate;
A zinc oxide nanorod layer on the electrode that detects ultrasonic waves generated by partial discharge of power equipment;
A counter electrode corresponding to the electrode on the zinc oxide nanorod layer; and
Includes an upper substrate on the counter electrode,
A sensor for detecting partial discharge, characterized in that the zinc oxide nanorods of the zinc oxide nanorod layer have an aspect ratio of 5:1 to 40:1. According to paragraph 1,
The support substrate is selected from the group of polymer films consisting of glass and polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), and polycarbonate (PC). A sensor for detecting partial discharge, characterized in that there is one.
According to paragraph 1,
The electrode is a sensor for partial discharge detection, characterized in that one selected from the group consisting of indium tin oxide (ITO), carbon fiber, metal, conductive polymer, graphene, and carbon nanotube (CNT).
delete According to paragraph 1,
A sensor for partial discharge detection, wherein the counter electrode is one selected from the group consisting of silver (Ag), platinum (Pt), and palladium (Pd).
According to paragraph 1,
The upper substrate is characterized by being selected from the group consisting of polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), and polycarbonate (PC). A sensor for partial discharge detection.
According to paragraph 1,
A sensor for partial discharge detection, characterized in that the ultrasonic waves are ultrasonic waves in the 50MHz to 700MHz band.
Preparing a substrate;
Forming a zinc oxide seed layer on the substrate using a zinc oxide seed (ZnO seed) solution;
forming a zinc oxide nanorod layer by growing a plurality of zinc oxide nanorods on the substrate on which the zinc oxide seed layer is formed; and
Combining a substrate on which a counter electrode material is deposited on the zinc oxide nanorod layer,
The step of forming the zinc oxide nanorod layer is a method of manufacturing a sensor for partial discharge detection, wherein the zinc oxide nanorod layer has an aspect ratio of zinc oxide nanorods of 5:1 to 40:1. According to clause 8,
A method of manufacturing a sensor for partial discharge detection, characterized in that the method of growing a plurality of zinc oxide nanorods on the substrate on which the zinc oxide seed layer is formed is a hydrothermal process.
According to clause 8,
The step of forming a zinc oxide seed layer involves spin coating the zinc oxide seed solution on the substrate at 800 rpm to 1200 rpm for 40 to 80 seconds and drying at 80°C to 120°C for 1 to 3 minutes. Sensor manufacturing method.
According to clause 10,
A method of manufacturing a sensor for partial discharge detection, characterized in that the density of the seed layer is adjusted by repeating the process of spin coating and drying the zinc oxide seed solution on the substrate 2 to 10 times.
According to clause 8,
The step of forming the zinc oxide nanorod layer is a method of manufacturing a sensor for partial discharge detection, characterized in that the substrate on which the zinc oxide seed layer is formed is placed in a zinc oxide growth solution and grown for 1 to 12 hours.
delete According to clause 8,
A method of manufacturing a sensor for partial discharge detection, characterized in that the zinc oxide nanorod layer in the step of forming the zinc oxide nanorod layer detects ultrasonic waves generated by partial discharge of power equipment.
According to clause 14,
A method of manufacturing a sensor for partial discharge detection, characterized in that the ultrasonic waves are ultrasonic waves in the 50MHz to 700MHz band.