KR102086417B1 - Pixel-type pressure sensor and method for preparing the same - Google Patents

Abstract

The present invention includes a first electrode disposed on a first substrate and including a plurality of first metal patterns having a predetermined distance; A second electrode disposed on the second substrate and including a plurality of second metal patterns having a predetermined distance; And an insulating layer disposed between the first metal pattern and the second metal pattern, the insulating layer having a predetermined gap and including a plurality of through holes, wherein the first metal pattern is disposed at one end and the other end of the first substrate. The second metal pattern is connected to one end and the other end of the second substrate in a direction perpendicular to the first metal pattern, and the plurality of through holes are positioned on the first metal pattern and the second metal pattern. Provide pressure sensor. The pressure sensor of the present invention includes an insulating layer having a hole at a pixel position between the pixelated electrode layers, so that the upper and lower electrodes are energized only when pressure is applied, thereby reducing mechanical interference of signals with which surrounding pixels react together when pressure is applied. The interlayer is inserted between the pixels and can be selectively detected. In addition, the pressure sensor of the present invention can adjust the material and the thickness of the insulating layer, it is possible to adjust the pressure recognition range by adjusting the size of the hole included in the insulating layer. In addition, the pressure sensor of the present invention is manufactured in a simple process, has a simple structure, is flexible, wearable and can be applied to electronic devices and robot electronic skin.

Description

Pixel type pressure sensor and its manufacturing method {PIXEL-TYPE PRESSURE SENSOR AND METHOD FOR PREPARING THE SAME}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pixel type pressure sensor and a method of manufacturing the same, and more particularly, to a pressure sensor including an insulating layer having a hole between pixelated electrode layers and a method of manufacturing the same.

Recently, due to the commercialization and popularization of a portable terminal or a display in which a touch input method is introduced, the range of utilization of the pressure sensor is widening. The touch-based pressure sensor is attracting attention as a technology that can be applied not only to electronic devices but also to robots that can measure and respond to external stimuli. Due to the growing interest in the ubiquitous environment and the development of humanoid robot technology, robots that respond to and cope with complex and fluid environments or external stimuli are beyond simple process robots that receive one-dimensional commands and execute them repeatedly. There is increasing interest. In order to respond to external stimuli or changes in the environment, the robot converts external stimuli or changes in the environment into electrical signals through a tactile pressure sensing system mounted on the surface of the robot and together with the user's command. React spontaneously / fluidly

In addition, the flexible element-based pressure sensor can be applied to a sensor system that manages physical activities and regular sports activities as well as emotional electronic devices and humanoid robots. Flexible element-based hypersensitivity pressure sensors can also be used as wearable sensor systems that measure heart pulse waves through human skin, or collect data such as a person's steps or habits by attaching a pressure sensor to the sole of a shoe Can be. In order to construct such a wearable sensor system, it is required to develop a sensor having excellent bending and resilience of the sensor base unit part, and excellent mechanical flexibility and stability.

Silicon-based solid state MEMS-based pressure devices can have high accuracy, but they are brittle and inflexible and fragile and cannot be applied to various or flexible surfaces. Therefore, in order to develop new types of flexible electronic devices with excellent mechanical flexibility, instead of silicon-based conductive polymers such as polypyrrole, PEDOT: PSS, polyaniline, or graphene ( Graphite, carbon nanotubes (CNT), metal nanoparticles (metal nanoparticles), and metal nanowires (metal nanowires), such as a number of nanostructured materials are attracting attention. In particular, carbon nanotubes have excellent light transmittance and conductivity, which can replace conventional ITO, have excellent chemical stability and mechanical properties, and recently, due to the development of synthetic technology, the economic efficiency is also increased. . However, in the case of a conductive polymer-based pressure sensor, there is a difficulty in constructing a pressure sensor in terms of long-term safety of the sensor system or conductivity in contact with moisture. In addition, in the case of nanomaterial-based devices, it is difficult to secure reproducibility in the manufacturing process due to the nature of the nanomaterial.

Therefore, it has excellent electrical characteristics that can be applied / applied in various fields such as humanoid-based robots, smart cars, aviation applications, simulations, process control, human-friendly IT, fingerprint identification systems, and bio-monitoring smart sensors. Or development of a pressure sensor capable of control thereof and excellent in mechanical flexibility and stability.

KR 10-2016-0118915 A

In order to solve the above problems, an object of the present invention includes an insulating layer having a hole at a pixel position between pixelated electrode layers, thereby providing a pressure sensor having an insulating film inserted therein to energize the upper and lower electrodes only when pressure is applied. To provide.

Another object of the present invention is to provide a pressure sensor that reduces the mechanical interference of a signal in which surrounding pixels react together when a pressure is applied, and the interlayer inserted layer has an inter pixel effect.

It is still another object of the present invention to provide a pressure sensor having a simple process, a flexible structure having a simple structure, and wearable to be applied to an electronic device and a robot electronic skin, and a manufacturing method thereof.

Still another object of the present invention is to provide a pressure sensor that can be applied to various fields, such as a bed that can grasp an elderly person, a sleep state of an infant / infant, and a chair that can grasp a user's seating state through pressure recognition.

According to one aspect of the invention,

A first elastic substrate; A first electrode array on the first elastic substrate, the first electrode array including a first conductor and a plurality of first electrode lines spaced apart from each other; An insulating layer disposed on the first electrode array and including a plurality of through holes and including an insulating elastic body; A second electrode array on the insulating layer, the second electrode array including a second conductor and including a plurality of second electrode lines spaced apart from each other; And a second elastic substrate disposed on the second electrode array, wherein the first electrode line and the second electrode line are spaced apart from each other and include a first crossing portion and a second crossing portion, respectively. Some or all of the through holes of the insulating layer are located between the first intersection and the second intersection, provide a pressure sensor.

The first electrode line and the second electrode line may be straight, and the first electrode line and the second electrode line may vertically cross each other.

When pressure is applied to the pressure sensor, part or all of the first crossing portion and the second crossing portion may contact the through hole.

An elastic body may be included between neighboring electrode lines of the plurality of first electrode lines, and an elastic body may be included between neighboring electrode lines of the plurality of second electrode lines.

The elastic modulus of the insulating elastic body may be smaller than that of the first elastic substrate and the second elastic substrate.

The first elastic substrate and the second elastic substrate are the same or different from each other, and each independently a styrene-butadiene-styrene (SBS) block copolymer, a styrene-ethylene-butylene-styrene (SEBS) block copolymer, a styrene-isoprene- Styrene (SIS) block copolymer, polyurethane (PU), polyisoprene rubber (IR), butadiene rubber (BR), ethylene-propylene-diene monomer (EPDM) rubber, polydimethylsiloxane (PDMS), silicone rubber, It may include one or more selected from the group consisting of ecoflex and dragon skin.

The insulating elastomer is a styrene-butadiene-styrene (SBS) block copolymer, a styrene-ethylene-butylene-styrene (SEBS) block copolymer, a styrene-isoprene-styrene (SIS) block copolymer, polyurethane (PU), poly Group consisting of isoprene rubber (IR), butadiene rubber (BR), ethylene-propylene-diene monomer (EPDM) rubber, polydimethylsiloxane (PDMS), silicone rubber, ecoflex and dragon skin It may include one or more selected from.

The through hole may have a diameter of 0.1 to 10 mm.

The through hole may be formed in an interval of 0.1 to 10 mm.

The through hole may include at least one selected from a cylindrical, elliptic cylindrical, polygonal cylindrical, rectangular cylindrical and square cylindrical.

Pressure sensor, characterized in that the thickness of the insulating layer is 0.5μm to 10mm.

The first electrode line and the second electrode line may be the same or different from each other, and may each independently have a width of 0.1 to 20 mm.

The first electrode line and the second electrode line may be the same as or different from each other, and each may have an interval of 0.5 to 10 mm independently.

The first electrode line and the second electrode line may be the same as or different from each other, and may each independently have a thickness of 0.05 to 100 μm.

The first electrode line and the second electrode line are the same as or different from each other, and each independently Au, Al, Ag, Be, Bi, Co, Cu, Cr, Hf, In, Mn, Mo, Mg, Ni, Nb, Pb And Pd, Pt, Rh, Re, Ru, Sb, Ta, Te, Ti, V, W, Zr, and Zn.

The first elastic substrate and / or the second elastic substrate may include a microfibril structure.

In another aspect of the present invention, (a) manufacturing a first electrode array by patterning a plurality of first electrode lines including a first conductor on a first elastic substrate and spaced apart from each other ; (b) patterning a plurality of second electrode lines including a second conductor on the second elastic substrate and spaced apart from each other to fabricate a second electrode array; (c) forming an insulating layer on the first electrode array, the insulating layer comprising a plurality of through holes and comprising an insulating elastomer; And (d) manufacturing a first electrode array / insulation layer / second electrode array by placing the second electrode line of the second electrode array manufactured in step (b) on the insulation layer so as to contact the insulation layer. It provides a method of manufacturing a pressure sensor comprising a.

After the step (d) of the manufacturing method of the pressure sensor, (e) heat-treating the first electrode array / insulating layer / second electrode array to increase the adhesion between the insulating layer and the neighboring layer; It may further include.

In step (d), the heat treatment can be carried out at a temperature of 50 to 200 ° C.

Prior to step (a), the thermally annealed first and / or second elastic substrates are thermally annealed, and the thermally annealed first and / or second elastic substrates are stretched to form microfibrils. It may further comprise the step (a ') of manufacturing a first elastic substrate and / or a second elastic substrate comprising a (microfibril) structure.

The pressure sensor of the present invention includes an insulating layer having a hole at the pixel position between the pixelated electrode layers, thereby energizing the upper and lower electrodes when pressure is applied, and selectively reducing pressure by reducing mechanical interference of signals with which surrounding pixels react together. Is possible.

In addition, the pressure sensor of the present invention can adjust the material and the thickness of the insulating layer, it is possible to adjust the pressure recognition range by adjusting the size of the hole included in the insulating layer.

In addition, the pressure sensor of the present invention is manufactured in a simple process, has a simple structure, is flexible, wearable and can be applied to electronic devices and robot electronic skin.

In addition, the pressure sensor of the present invention can be applied to various fields such as electronic skin and wearable device, as well as a bed that can grasp the sleeping state of the elderly, infant / infant, etc. through pressure recognition, and a chair that can grasp the seating state of the user. have.

1 is a schematic view of a pressure sensor manufactured according to Example 1.
2 is a graph showing the results of measuring the current change according to the pressure of the pressure sensor manufactured according to Example 1.
3 is a result of analyzing the pressure sensing characteristics of one pixel before the tension of the pressure sensor manufactured according to an embodiment of the present invention.
4 is a result of analyzing the pressure sensing characteristics of one pixel after the tension of the pressure sensor manufactured according to an embodiment of the present invention.
5 is a result of analyzing the pressure sensing characteristics of the various pixels before the tension of the pressure sensor manufactured according to an embodiment of the present invention.
6 is a result of analyzing the pressure sensing characteristics of the various pixels after the tension of the pressure sensor manufactured according to an embodiment of the present invention.
7 is a graph showing a change in current when a pressure is applied to the pressure sensor.
8 is a graph showing a relative current change according to pressure applied to a pressure sensor including through holes having diameters of different sizes.

As the invention allows for various changes and numerous embodiments, particular embodiments will be illustrated and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, it should be understood to include all transformations, equivalents, and substitutes included in the spirit and scope of the present invention. In the following description of the present invention, if it is determined that the detailed description of the related known technology may obscure the gist of the present invention, the detailed description thereof will be omitted.

In addition, terms including ordinal numbers such as first and second to be used below may be used to describe various components, but the components are not limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

In addition, when a component is said to be "formed" or "laminated" on another component, it may be directly attached to, or laminated to, the front or one side on the surface of the other component, but the intermediate It will be understood that other components may exist in the.

Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, components, or a combination thereof.

Figure 1 shows a schematic diagram of the pressure sensor of the present invention.

Hereinafter, the pressure sensor of the present invention will be described with reference to FIG. 1.

The present invention is a first elastic substrate; A first electrode array on the first elastic substrate, the first electrode array including a first conductor and a plurality of first electrode lines spaced apart from each other; An insulating layer disposed on the first electrode array and including a plurality of through holes and including an insulating elastic body; A second electrode array on the insulating layer, the second electrode array including a second conductor and including a plurality of second electrode lines spaced apart from each other; And a second elastic substrate disposed on the second electrode array, wherein the first electrode line and the second electrode line are spaced apart from each other and include a first crossing portion and a second crossing portion, respectively. Some or all of the through holes of the insulating layer are located between the first intersection and the second intersection, provide a pressure sensor.

The first electrode line and the second electrode line may be straight, and the first electrode line and the second electrode line may vertically cross each other.

When pressure is applied to the pressure sensor, part or all of the first crossing portion and the second crossing portion may contact the through hole.

An elastic body may be included between neighboring electrode lines of the plurality of first electrode lines, and an elastic body may be included between neighboring electrode lines of the plurality of second electrode lines.

The second electrode array and the first electrode array may be orthogonal to form a lattice pattern, and an intersection where the first electrode line of the first electrode array and the second electrode line of the second electrode array intersect may be referred to as a pixel. have.

The elastic modulus of the insulating elastic body may be smaller than that of the first elastic substrate and the second elastic substrate.

The first elastic substrate and the second elastic substrate are the same or different from each other, and each independently a styrene-butadiene-styrene (SBS) block copolymer, a styrene-ethylene-butylene-styrene (SEBS) block copolymer, a styrene-isoprene- Styrene (SIS) block copolymer, polyurethane (PU), polyisoprene rubber (IR), butadiene rubber (BR), ethylene-propylene-diene monomer (EPDM) rubber, polydimethylsiloxane (PDMS), silicone rubber, Ecoflex, dragon skin, and the like.

The insulating elastomer is a styrene-butadiene-styrene (SBS) block copolymer, a styrene-ethylene-butylene-styrene (SEBS) block copolymer, a styrene-isoprene-styrene (SIS) block copolymer, polyurethane (PU), poly Isoprene rubber (IR), butadiene rubber (BR), ethylene-propylene-diene monomer (EPDM) rubber, polydimethylsiloxane (PDMS), silicone-based rubber, ecoflex, dragon skin, etc. can do.

The through hole may have a diameter of 0.1 to 10 mm, preferably 0.2 to 10 mm, and more preferably 0.5 to 10 mm. The diameter of the through-hole is less than 0.1 mm is not preferable because the size is too narrow, the sensing capacity can be reduced, more than 10mm is preferable because the large area allows more contact between the upper and lower electrode layers to degrade the function as a sensor Not.

The gap in which the through holes are formed may be 0.1 to 10 mm, preferably 0.5 to 8 mm, more preferably 1 to 6 mm. Since the through-holes are densely formed under the condition that the gap of the through-holes is less than 0.1 mm, the selective sensing ability may be reduced, which is not preferable, and more than 10 mm may allow more contact between the upper and lower electrode layers due to the large area. It is not preferable because the function is degraded.

The through hole may be cylindrical, elliptic cylindrical, polygonal cylindrical, rectangular cylindrical, square cylindrical, or the like.

In the pressure sensor of the present invention, when the insulating layer is present between the first electrode array and the second electrode array, when pressure is applied to a specific pixel, pressure is not transmitted to the region of another pixel. However, if the distance between pixels is too close, interference may occur, so a critical distance is required.

The insulating layer may have a thickness of 0.5 μm to 10 mm, preferably 1 μm to 5 mm, and more preferably 2 μm to 1 mm. Under the condition that the thickness of the insulating layer is less than 0.5μm, the thickness may be too thin and interference may occur, and thus the sensing ability may be reduced.

The insulating layer may serve to prevent the pressure from being transferred to the region where the pressure is not applied.

The first electrode line and the second electrode line may be the same or different from each other, and may each independently have a width of 0.1 to 20 mm, preferably 0.2 to 15 mm, more preferably 0.5 to 10 mm. Less than 0.01 mm is not preferable because the width is too narrow, the sensing capacity can be reduced, and more than 20 mm is not preferable because the amount of change in the current value through the deformation of the electrode layer due to the application of pressure due to the high conductivity of the electrode line is insensitive.

The first electrode line and the second electrode line may be the same as or different from each other, and each may have an interval of 0.5 to 10 mm, preferably 0.8 to 8 mm, more preferably 1 to 6 mm. It is not preferable in the case where the spacing is less than 0.5 mm because the spacing between the electrode lines may be narrow, which may cause interference, and thus the selective sensing ability may be reduced. This is undesirable because the strain becomes insensitive.

 Since the first electrode line and / or the second electrode line are positioned in the through hole, the gap between the through hole and the first electrode line and / or the second electrode line may be the same.

The first electrode line and the second electrode line may be the same as or different from each other, and may each independently have a thickness of 0.05 to 100 μm, preferably 0.1 to 100 μm, and more preferably 0.5 to 100 μm. If the thickness is less than 0.05 μm, the thickness is too small, and thus the sensing ability may be reduced, and if the thickness is over 100 μm, the conductivity of the electrode line is excessively high, which is not preferable because the current value does not sufficiently change due to the deformation of the electrode line.

The first electrode line and the second electrode line are the same as or different from each other, and each independently Au, Al, Ag, Be, Bi, Co, Cu, Cr, Hf, In, Mn, Mo, Mg, Ni, Nb, Pb , Pd, Pt, Rh, Re, Ru, Sb, Ta, Te, Ti, V, W, Zr, Zn and the like may be used, and Au may be preferably used.

The first elastic substrate and / or the second elastic substrate may include a microfibril structure.

The pressure sensor of the present invention may have a tensile strength (e) of 5 to 60%, it can selectively detect the pressure even in the tensioned state.

In the pressure sensor of the present invention, since the electrode is formed on the polymer substrate, the electrode is deformed when pressure is applied. Therefore, when pressure is applied, the pattern formed on the electrode is contacted through the through hole to change the resistance value, thereby detecting the pressure.

The pressure sensor of the present invention may have the largest resistance value when no pressure is applied.

When no pressure is applied, the electrode lines of the first substrate and the second substrate separated by the insulating layer are brought into contact with each other as the pressure above the threshold is applied, thereby energizing and measuring the current value.

As the applied pressure increases, the area of contact between the electrode lines increases and the measured current value increases, which can be interpreted as recognizing a higher pressure.

In addition, since each pixel is physically separated by an insulating layer, pressure can be recognized without signal interference between pixels.

Hereinafter, the manufacturing method of the pressure sensor of the present invention will be described.

First Elastic substrate  Including a first conductor on each other, Spaced  A plurality of first electrode lines are patterned to produce a first electrode array (step a).

Prior to step (a), the thermally annealed first and / or second elastic substrates are thermally annealed, and the thermally annealed first and / or second elastic substrates are stretched to form microfibrils. It may further comprise the step (a ') of manufacturing a first elastic substrate and / or a second elastic substrate comprising a (microfibril) structure.

2nd Elastic substrate  A second conductor on top of each other, Spaced  A plurality of second electrode lines are patterned to produce a second electrode array (step b).

The patterning can be performed by vacuum deposition using a mask.

Steps (a) and (b) do not necessarily have to be performed in order and can be performed simultaneously.

Prior to steps (a) and (b), the first and / or second substrates are thermally annealed such that the first and / or second substrates have a microfibril structure upon stretching. It may further comprise a step.

Next, a plurality of on the first electrode array Through hole  And an insulating layer comprising the insulating elastomer (step c).

Next, the second electrode line of the second electrode array manufactured in step (b) On insulation layer  Remind to touch Insulation layer  Positioned on the first electrode array / Insulation layer Prepare a second electrode array (step d).

After step (d), heat treating the first electrode array / insulating layer / second electrode array to increase the adhesion between the insulating layer and the neighboring layer; It may further include.

The insulating layer may be heat treated to have high adhesion between the first electrode array and the second electrode array, and the heat treatment may be performed at a temperature of 50 to 200 ° C., preferably 60 to 150 ° C., preferably It may be carried out at a temperature of 70 to 130 ℃.

After step (b), the method may further include connecting conductive lines to the first metal pattern and the second metal pattern.

Hereinafter, the present invention will be described in more detail with reference to Examples. However, this is for illustrative purposes and the scope of the present invention is not limited thereto.

EXAMPLE

Preparation Example 1 Preparation of a First Substrate and a Second Substrate Containing Microfibrils

Polystyrene-block-polybutadiene-block-polystyrene (SBS) block copolymer (Mw = 140,000, polydispersity index = 1.2, volume fraction of PS = 0.3), an elastic substrate, was vacuum-heated at 150˚C, and then cooled to room temperature. 150% uniaxial stretching to prepare the first substrate and the second substrate of 4cm X 4cm size microfibrils formed. After 150% elongation, about 10% residual elongation will remain.

Preparation Example 2 Insulating Layer Including Through Hole

Polystyrene-block-polybutadiene-block-polystyrene (SBS) block copolymer (2㎛ thick) is punched into a 1mm X 1mm square frame. Through holes of 1mm diameter are arranged at 3mm intervals, total 16 through holes are formed. An insulating layer including a through hole was manufactured.

Preparation Example 3 Preparation of Insulating Layer Including Through Hole

Manufactured except that a polystyrene-block-polybutadiene-block-polystyrene (SBS) block copolymer having a thickness of 5 µm was used instead of a polystyrene-block-polybutadiene-block-polystyrene (SBS) block copolymer having a thickness of 2 µm. An insulating layer was prepared in the same manner as in Example 2.

Preparation Example 4 Insulating Layer Including Through Hole

Manufactured except that a polystyrene-block-polybutadiene-block-polystyrene (SBS) block copolymer having a thickness of 10 μm was used instead of a polystyrene-block-polybutadiene-block-polystyrene (SBS) block copolymer having a thickness of 2 μm. An insulating layer was prepared in the same manner as in Example 2.

Preparation Example 5 Insulating Layer Including Through Hole

Manufactured except that a polystyrene-block-polybutadiene-block-polystyrene (SBS) block copolymer having a thickness of 20 μm was used instead of a polystyrene-block-polybutadiene-block-polystyrene (SBS) block copolymer having a thickness of 2 μm. An insulating layer was prepared in the same manner as in Example 2.

Example 1: pixel type pressure sensor

The first electrode line including four linear gold lines by patterning Au on a first substrate manufactured according to Preparation Example 1 by sputtering Au (75 nm thick, 4 cm long, 1 mm wide, 3 mm) to form a first electrode array, and a second electrode array was manufactured in the same manner as the second electrode array.

The insulating layer manufactured according to Preparation Example 2 is disposed on the first electrode array, and the through hole is positioned on the first electrode line.

The first electrode line and the second electrode line were perpendicular to each other, and the second electrode line included in the second electrode array was formed on the insulating layer so as to contact the insulating layer. In this case, 16 pixels are formed by allowing the second electrode line to be positioned in the through hole of the insulating layer.

Thereafter, annealing was performed at 100 ° C. for 30 minutes to improve adhesiveness, thereby preparing a pressure sensor including an insulating layer between the first electrode array and the second electrode array.

The wire is connected to the Au wire at the end of each of the first electrode line and the second electrode line, the sensor is manufactured so that the resistance value can be measured respectively.

Example 2 Pressure Sensor

A pixel type pressure sensor was manufactured in the same manner as in Example 1, except that the insulating layer prepared according to Preparation Example 3 was used instead of the insulating layer prepared according to Preparation Example 2.

Example 3 Pressure Sensor

A pixel type pressure sensor was manufactured in the same manner as in Example 1, except that the insulating layer prepared according to Preparation Example 4 was used instead of the insulating layer prepared according to Preparation Example 2.

Example 4 Pressure Sensor

A pixel type pressure sensor was manufactured in the same manner as in Example 1, except that the insulating layer prepared according to Preparation Example 5 was used instead of the insulating layer prepared according to Preparation Example 2.

[Test Example]

Test Example 1 Analysis of Current Change According to Pressure

Figure 2 shows the current change with a given pressure of the pressure sensor prepared according to Examples 1 to 4.

Referring to FIG. 2, the pressure sensor of Example 1 was found to be 25 μA at 10 kPa pressure and about 37 μA at about 28 kPa pressure, and the pressure sensor of Example 2 was 26 μA at about 12 kPa pressure and about 34 kPa. About 37.5 μA at pressure, the pressure sensor of Example 3 is about 25 μA at about 18 kPa pressure, about 38 μA at about 57 kPa pressure, and the pressure sensor of Example 4 is about 26 μA at about 27 kPa pressure, about It was found to be about 37.5 μA at 78 kPa pressure.

These results indicate that the thicker the thickness of the insulating layer included in the pressure sensor should be given a strong pressure to change the current, it is determined that the permissible pressure range can be adjusted by adjusting the thickness of the insulating layer.

Test Example 2 Analysis of Pressure Sensing Characteristics

Test Example 2-1: Analysis of pressure sensing ability for one pixel before and after tension

Figure 3 shows the results of analyzing the sensing capability of the pressure sensor when the pressure is applied to one pixel before bending, Figure 4 shows the results of the sensing capability analysis of the pressure sensor when the pressure is applied to one pixel after bending.

Referring to FIG. 3, when pressure was applied to one pixel 2, 3 before tensioning, it was confirmed that only the pixel 2, 3 to which the pressure was applied reacts.

In addition, referring to FIG. 4, when pressure is applied to only one pixel 2, 3 in a state in which the pressure sensor of the present invention is bent (30% tensile), the pixel 2, 3 to which pressure is applied without interference of another region is applied. Only responding could be confirmed.

Therefore, the pressure sensor manufactured according to the present invention is analyzed to exhibit the same performance even in a situation in which physical deformation is applied due to the insulation layer of the through-hole, which can react only to a specific region without surrounding interference.

Test Example 2-2: Analysis of Pressure Sensing Capability for Several Pixels Before and After Tension

Figure 5 shows the results of analyzing the sensing capacity of the pressure sensor when the pressure is applied to several pixels at the same time before bending, Figure 6 shows the results of the sensing capability analysis of the pressure sensor when the pressure is applied to several pixels at the same time after bending will be.

Referring to FIG. 5, when pressure is applied to various pixels of the pressure sensor using a cap, only the region to which pressure is applied is selectively analyzed.

In addition, referring to FIG. 6, when pressure is applied to one or more pixels while the pressure sensor of the present invention is bent (30% tensile), only the pixels to which pressure is applied can be selectively reacted and sensed simultaneously without interference of other regions. Appeared.

Therefore, the pressure sensor of the present invention was analyzed to be able to selectively detect the pressure at the same time even if pressure is applied to various areas irrespective of bending.

Test Example 3: Sensitivity Analysis of Pressure Sensor

7 is a graph showing a change in current when a pressure is applied to the pressure sensor. A pressure sensor with a 10 mm x 10 mm through hole, 0.5 mm thick insulating layer, and 5 mm electrode width was applied at 50 kPa to test the current change.

Referring to FIG. 7, it is analyzed that the pressure sensor of the present invention has excellent sensitivity when the pressure value is removed and the pressure value is changed within a time of 250 ms.

Test Example 4 Analysis of Pressure Sensing Ability According to the Size of Through Hole

8 is a graph showing a relative current change according to pressure applied to a pressure sensor including through holes having diameters of different sizes. Current changes were tested by pressing two pressure sensors with 10 mm x 10 mm, 5 mm x 5 mm square through-holes, 0.5 mm thick insulating layer, and 3 mm electrode width with a 4 mm diameter round tip.

Referring to FIG. 8, the larger the size of the through hole, the smaller the influence of the intermediate insulation layer on the change of the electrode layer due to the application of pressure, thereby causing a current change at a relatively low pressure. On the other hand, when the size of the through hole is small, higher pressure is required to deform the electrode layer to cause a current change due to the influence of the intermediate insulating layer surrounding the pixel.

Therefore, it was analyzed that a difference in the pressure range that can be detected according to the difference in the size of the through hole occurs.

The scope of the present invention is shown by the following claims rather than the above description, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included in the scope of the present invention. do.

Claims (20)

A first elastic substrate;
A first electrode array on the first elastic substrate, the first electrode array including a first conductor and a plurality of first electrode lines spaced apart from each other;
An insulating layer on the first electrode array and including a plurality of through holes and including an insulating elastic body;
A second electrode array on the insulating layer, the second electrode array including a second conductor and including a plurality of second electrode lines spaced apart from each other; And
Located on the second electrode array, and a second elastic substrate;
The first electrode line and the second electrode line are spaced apart from each other and cross each other, and include a first crossing portion and a second crossing portion, respectively.
Some or all of the through holes of the insulating layer are located between the first intersection and the second intersection;
The first elastic substrate and the second elastic substrate are the same or different from each other, and each independently a styrene-butadiene-styrene (SBS) block copolymer, a styrene-ethylene-butylene-styrene (SEBS) block copolymer and a styrene-isoprene- Styrene (SIS) block copolymer comprises one or more selected from the group consisting of,
Wherein the first elastic substrate and the second elastic substrate each include a microfibril structure. The method of claim 1,
The first electrode line and the second electrode line are straight;
And the first electrode line and the second electrode line perpendicularly cross each other. The method of claim 1,
And when the pressure is applied to the pressure sensor, a part or all of the first crossing portion and the second crossing portion come into contact with each other through the through hole. The method of claim 1,
An elastic body between adjacent electrode lines of the plurality of first electrode lines,
And a elastic body between adjacent electrode lines of the plurality of second electrode lines. The method of claim 1,
And a modulus of elasticity of the insulating elastic body is smaller than that of the first elastic substrate and the second elastic substrate. delete The method of claim 1,
The insulating elastomer is a styrene-butadiene-styrene (SBS) block copolymer, a styrene-ethylene-butylene-styrene (SEBS) block copolymer, a styrene-isoprene-styrene (SIS) block copolymer, polyurethane (PU), poly Group consisting of isoprene rubber (IR), butadiene rubber (BR), ethylene-propylene-diene monomer (EPDM) rubber, polydimethylsiloxane (PDMS), silicone rubber, ecoflex and dragon skin Pressure sensor comprising at least one selected from. The method of claim 1,
Pressure sensor, characterized in that the through hole has a diameter of 0.1 to 10mm. The method of claim 1,
Pressure sensor, characterized in that the through hole is formed in the interval of 0.1 to 10mm. The method of claim 1,
The through-hole is a pressure sensor, characterized in that it comprises at least one selected from the cylindrical, elliptical cylinder, polygonal cylinder, rectangular cylinder type and square cylinder type. The method of claim 1,
Pressure sensor, characterized in that the thickness of the insulating layer is 0.5μm to 10mm. The method of claim 1,
The first sensor line and the second electrode line is the same or different from each other, each independently a pressure sensor, characterized in that the width of 0.1 to 20mm. The method of claim 1,
Pressure sensor, characterized in that the first electrode line and the second electrode line is the same or different from each other, each independently 0.5 to 10mm interval. The method of claim 1,
And the first electrode line and the second electrode line are the same as or different from each other, and each independently has a thickness of 0.05 to 100 μm. The method of claim 1,
The first electrode line and the second electrode line are the same as or different from each other, and each independently Au, Al, Ag, Be, Bi, Co, Cu, Cr, Hf, In, Mn, Mo, Mg, Ni, Nb, Pb Pressure sensor comprising at least one selected from the group consisting of, Pd, Pt, Rh, Re, Ru, Sb, Ta, Te, Ti, V, W, Zr, and Zn. delete (a ') thermally annealing the first elastic substrate and the second elastic substrate, respectively, and stretching the thermally annealed first and second elastic substrates, respectively, to include a microfibril structure. Manufacturing a first elastic substrate and a second elastic substrate, respectively;
(a) fabricating a first electrode array by patterning a plurality of first electrode lines including a first conductor on the first elastic substrate including a microfibril structure and spaced apart from each other;
(b) fabricating a second electrode array by patterning a plurality of second electrode lines spaced apart from each other and including a second conductor on the second elastic substrate including a microfibril structure;
(c) forming an insulating layer on the first electrode array, the insulating layer comprising a plurality of through holes and comprising an insulating elastomer; And
(d) manufacturing a first electrode array / insulation layer / second electrode array by placing the second electrode line of the second electrode array manufactured in step (b) on the insulating layer so as to contact the insulating layer. Including,
The first elastic substrate and the second elastic substrate are the same or different from each other, and each independently a styrene-butadiene-styrene (SBS) block copolymer, a styrene-ethylene-butylene-styrene (SEBS) block copolymer and a styrene-isoprene- Method for producing a pressure sensor comprising at least one member selected from the group consisting of styrene (SIS) block copolymer. The method of claim 17,
After the step (d) of the manufacturing method of the pressure sensor,
(e) heat treating the first electrode array / insulation layer / second electrode array to increase the adhesion between the insulation layer and the neighboring layer; Method of producing a pressure sensor, characterized in that it further comprises. The method of claim 17,
In step (d), the method of manufacturing a pressure sensor, characterized in that the heat treatment is carried out at a temperature of 50 to 200 ℃. delete

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