KR101990196B1 - Sensor for Measuring Strain and Pressure And Method for Manufacturing the Same - Google Patents

Abstract

A smart sensor capable of simultaneously measuring a strain and a pressure by simultaneously sensing a direction change when an external pressure is applied according to an embodiment of the present invention is characterized by comprising a third electrode portion, a second electrode portion and a first electrode portion sequentially stacked along the vertical direction, An electrode portion including an electrode portion and capable of being stretched and contracted when an external force is applied; A pressure sensing part disposed between the first electrode part and the second electrode part to connect the first electrode part and the second electrode part to each other and to detect a change in distance in a vertical direction when an external force is applied; And a strain sensing unit disposed between the second electrode unit and the third electrode unit to connect the second electrode unit and the third electrode unit to each other and sense a change in the horizontal length when an external force is applied .

Description

Technical Field [0001] The present invention relates to a sensor for measuring strain and pressure,

The present invention relates to a strain and pressure simultaneous sensor capable of measuring strain and pressure at the same time, and more particularly, to a strain and pressure sensor capable of measuring strain and pressure simultaneously at the same time The present invention relates to a strain and pressure simultaneous measurement sensor and a method of manufacturing the same.

Generally, a strain sensor is a sensor capable of detecting deformation through flexibility, and is utilized in various fields such as motion detection field, robot field, and biomedical field.

In recent years, strain sensors are used to grasp the user's walking or joint movements of the user, and statistical information is used to predict the user's body deformity, thereby being utilized as a recycling tool for the user's body aging.

Such a strain sensor must be able to sensitively detect deformation due to various operations, and must be applied to joints moving in multiple axes, so that flexibility and durability are required.

Conventionally, there has been proposed a manufacturing technique of a strain sensor that is complementary to flexibility and durability using silver (Ag) nanowires having electrical and mechanical properties.

However, the strain sensor manufactured by the above method has a problem in that it can detect only a specific deformation in one direction, but can not detect the pressure, and can acquire only partial information of multi-dimensional and random body movements.

In addition, conventionally, a pressure sensor is additionally provided separately from a strain sensor in order to detect a multidimensional motion, thereby complicating the structure of the entire sensor, increasing the volume, and increasing the manufacturing cost. there was.

Therefore, in recent years, development of a strain sensor capable of detecting a multidimensional strain has been urgently required.

U.S. Patent No. 8850897

SUMMARY OF THE INVENTION Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and it is an object of the present invention to provide a sensor module capable of measuring pressure and a sensor module capable of measuring strain, Thereby simultaneously measuring strain and pressure, and a method for manufacturing the same.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not intended to limit the invention to the precise form disclosed. It can be understood.

According to an aspect of the present invention, there is provided a smart sensor capable of simultaneously measuring a strain and a pressure by detecting a change in a direction when an external pressure acts according to an embodiment of the present invention, An electrode unit including a second electrode unit and a first electrode unit, the electrode unit being expandable and contractible when an external force is applied; A pressure sensing part disposed between the first electrode part and the second electrode part to connect the first electrode part and the second electrode part to each other and to detect a change in distance in a vertical direction when an external force is applied; And a strain sensing unit disposed between the second electrode unit and the third electrode unit to connect the second electrode unit and the third electrode unit to each other and sense a change in the horizontal length when an external force is applied .

Further, the electrode unit may include: a support portion formed of a stretchable substrate material; And a flexible electrode attached to the surface of the support portion and interconnected through the pressure sensing portion or the strain sensing portion.

In addition, the elastic electrode may be formed of nanoparticles or a conductive polymer.

Also, the pressure sensing unit and the strain sensing unit may be respectively applied to one of a dielectric, a resistor, and a piezoelectric body.

In addition, when the pressure sensing unit and the strain sensing unit are applied as a dielectric, the pressure sensing unit and the strain sensing unit can acquire a sensing signal through the capacitance method.

Also, the second electrode unit may be used as a drive terminal of a touch IC, and the first electrode unit and the third electrode unit may be used as a receive terminal of the touch IC.

In addition, when the pressure sensing unit and the strain sensing unit are applied to a resistor, the pressure sensing unit and the strain sensing unit can acquire a sensing signal through a resistance method.

A fabric material adhered to an outer surface of the first electrode portion and the third electrode portion; And a spacer provided between the first electrode unit and the second electrode unit.

The electrode unit may have a lattice structure.

In addition, the pressure sensing unit may be formed to have a larger width than the strain sensing unit.

According to another aspect of the present invention, there is provided a strain and pressure simultaneous sensor capable of simultaneously measuring a strain and a pressure by sensing a change due to an external pressure according to an embodiment of the present invention, Forming a strain sensing part on a part of the upper surface of the part; Forming a second space on an upper surface of the third electrode portion; Stacking the stretchable second electrode portion on a first region of the upper surface of the second space and an upper surface of the strain sensing portion; Forming a pressure sensing part on at least a part of the upper surface of the second electrode part; Forming a first space on at least a part of a top surface of the second space, at least a part of a second area excluding the first area and an upper surface of the second electrode; Stacking a first electrode portion stretchable on an upper surface of the first space and the pressure sensing portion; And forming the third electrode portion, the second electrode portion, and the first electrode portion, which are stacked, in a lattice structure by perforating the third electrode portion, the second electrode portion, and the first electrode portion.

According to an embodiment of the present invention, a pressure sensing unit for measuring pressure between a plurality of electrode units and a strain sensing unit for measuring strain are provided to simultaneously detect a change in direction when an external pressure is applied, It is possible to simultaneously measure strain and pressure.

Further, by stacking a plurality of electrode portions capable of measuring pressure and strain in a single module form, the structure can be simplified, the volume can be reduced, and a more compact smart sensor can be provided, as well as manufacturing cost can be reduced.

In addition, since the smart sensor is formed in a lattice structure, the occurrence of twisting can be minimized, and the elongation and contraction of the electrode portion can be facilitated.

It should be understood, however, that the effects obtained by the present invention are not limited to the above-mentioned effects, and other effects not mentioned may be clearly understood by those skilled in the art from the following description It will be possible.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate preferred embodiments of the invention and, together with the description of the invention given below, serve to further understand the technical idea of the invention. And should not be construed as interpreted.
1 is a plan view of a strain and pressure simultaneous measurement sensor according to an embodiment of the present invention.
2 is a cross-sectional view illustrating a strain and pressure simultaneous measurement sensor according to an embodiment of the present invention.
3 is a plan view showing first to third electrode units of a strain and pressure simultaneous sensor according to an embodiment of the present invention.
FIG. 4 is a cross-sectional view illustrating a state where a strain and pressure measuring sensor according to an embodiment of the present invention is applied to clothes or the like.
5 to 6 are process diagrams illustrating a manufacturing process of a sensor for measuring strain and pressure simultaneously according to an embodiment of the present invention.
7 is a flowchart illustrating a method of manufacturing a sensor for measuring strain and pressure simultaneously according to an embodiment of the present invention.
FIG. 8 shows an example of a resistive strain sensor viewed from the upper side in connection with the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. However, the description of the present invention is merely an example for structural or functional explanation, and the scope of the present invention should not be construed as being limited by the embodiments described in the text. That is, the embodiments are to be construed as being variously embodied and having various forms, so that the scope of the present invention should be understood to include equivalents capable of realizing technical ideas. Also, the purpose or effect of the present invention should not be construed as limiting the scope of the present invention, since it does not mean that a specific embodiment should include all or only such effect.

The meaning of the terms described in the present invention should be understood as follows.

The terms "first "," second ", and the like are intended to distinguish one element from another, and the scope of the right should not be limited by these terms. For example, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component. It is to be understood that when an element is referred to as being "connected" to another element, it may be directly connected to the other element, but there may be other elements in between. On the other hand, when an element is referred to as being "directly connected" to another element, it should be understood that there are no other elements in between. On the other hand, other expressions that describe the relationship between components, such as "between" and "between" or "neighboring to" and "directly adjacent to" should be interpreted as well.

It should be understood that the singular " include "or" have "are to be construed as including a stated feature, number, step, operation, component, It is to be understood that the combination is intended to specify that it does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise defined. Commonly used predefined terms should be interpreted to be consistent with the meanings in the context of the related art and can not be interpreted as having ideal or overly formal meaning unless explicitly defined in the present invention.

Example  Configuration

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a cross-sectional view of a strain and pressure simultaneous sensor according to an embodiment of the present invention, and FIG. 3 is a cross-sectional view illustrating a strain and pressure sensor according to an embodiment of the present invention. FIG. 4 is a cross-sectional view illustrating a state where a strain and pressure measurement sensor according to an embodiment of the present invention is applied to clothes or the like. FIG.

Referring to FIGS. 1 and 2, a strain and pressure simultaneous sensor 100 (hereinafter, referred to as 'strain and pressure simultaneous sensor 100') according to an embodiment of the present invention is attached to a body or clothes, A strain and pressure simultaneous measurement sensor (100) capable of measuring a strain and a pressure at the same time by simultaneously detecting a change in direction when an external pressure is applied according to a body movement, and includes an electrode unit (10).

The electrode unit 10 includes a third electrode unit 15, a second electrode unit 13 and a first electrode unit 11 which are sequentially stacked along a vertical direction and are formed into a structure that can be stretched and contracted when an external force is applied do.

Each electrode unit 10 is formed in the form of a sheet or a film. When an external force acts, the electrode unit 10 is expanded and contracted in the X-axis and Y-axis directions in FIG.

3, each electrode unit 10 may include a support portion 10a formed of an elastic substrate material and a flexible electrode 10b attached to a surface of the support portion 10a. Here, the attachment means all the forms in which the elastic electrode 10b is attached to the surface of the support portion 10a through a process such as printing, vapor deposition, or adhesion.

Here, the support portion 10a may be formed of an elastic substrate material such as PDMS (polydimethylsiloxane) or Ecoflex.

The elastic electrode 10b provided on the support portion 10a of each electrode portion 10 and interconnected through a pressure sensing portion 20 or a strain sensing portion 30 to be described later is formed of nanoparticles or conductive polymer . For example, the nanoparticles may be applied as one of silver, carbon black, CNT, and graphene.

In addition, the present strain and pressure simultaneous measurement sensor 100 includes a pressure sensing unit 20 and a strain sensing unit 30.

2, the pressure sensing unit 20 is disposed between the first electrode unit 11 and the second electrode unit 13 and connects the first electrode unit 11 and the second electrode unit 13 to each other And when the external force is applied, it is expanded and contracted in the vertical direction (the Z-axis direction in Fig. 2) to sense a change in the vertical direction. At this time, the first electrode part 11 is supported between the first electrode part 11 and the second electrode part 13 where the pressure sensing part 20 is provided, and a spacer (not shown) capable of being elastically deformed 50 may be installed. Accordingly, even when the external force is released, the gap between the first electrode unit 11 and the second electrode unit 13 can be maintained constant.

The strain sensing unit 30 is disposed between the second electrode unit 13 and the third electrode unit 15 and connects the second electrode unit 13 and the third electrode unit 15 to each other. And is expanded and contracted in the horizontal direction (the Y-axis direction in Fig. 2) to sense the area change in the horizontal direction.

That is, in the present simultaneous strain and pressure measurement sensor 100, when an external force acts, the pressure sensing part 20 disposed between the first electrode part 11 and the second electrode part 13 changes the distance in the vertical direction The strain sensing unit 30 disposed between the second electrode unit 13 and the third electrode unit 15 senses a change in the area in the horizontal direction so that strain and pressure can be simultaneously measured .

Meanwhile, the pressure sensing unit 20 and the strain sensing unit 30 may be applied to any one of a dielectric, a resistor, and a piezoelectric body. Here, the pressure sensing unit 20 and the strain sensing unit 30 may be applied in the same form or may be applied in different forms.

In one embodiment, when the pressure sensing part 20 and the strain sensing part 30 are applied as a dielectric, the pressure sensing part 20 and the strain sensing part 30 acquire a sensing signal according to the change through the capacitance method. can do. At this time, the second electrode part 13 is used as a drive terminal, and the first electrode part 11 and the third electrode part 15 can be used as a receive terminal.

In another embodiment, when the pressure sensing part 20 and the strain sensing part 30 are applied as resistors, the pressure sensing part 20 and the strain sensing part 30 can obtain a sensing signal of a resistance method.

In addition, the present strain and pressure simultaneous measurement sensor 100 can be transferred to clothes or the like and formed integrally.

4, the present strain and pressure simultaneous measurement sensor 100 includes a fabric material 40 attached to an outer surface of a first electrode unit 11 and a third electrode unit 15, And a spacer 50 provided between the first electrode part 13 and the second electrode part 13. For example, an insulating layer may be provided between the second electrode unit 13 and the third electrode unit 15.

 The fabric material 40 may be attached to the outer surfaces of the first electrode unit 11 and the third electrode unit 15 through the flexible polymer material for transfer.

The spacer 50 is disposed between the first electrode unit 11 and the second electrode unit 13 where the pressure sensing unit 20 is provided and when the external force is applied to the first electrode unit 11, Can support. Accordingly, even when the external force is released, the gap between the first electrode unit 11 and the second electrode unit 13 can be maintained constant.

Referring to FIG. 1, the electrode unit 10 may have a lattice structure.

That is, in the present strain and pressure simultaneous measurement sensor 100, a portion where the elastic electrode 10b does not pass through the electrode portion 10 is punctured to form the electrode portion 10 in a lattice structure, thereby minimizing the occurrence of torsion The electrode unit 10 can be easily expanded and contracted.

Further, the pressure sensing part 20 may be formed to have a larger width than the strain sensing part 30.

That is, when the external force is applied, the pressure sensing unit 20 receives the external force in the vertical direction and senses a change in the distance. Accordingly, the strain sensing unit 30 can have a greater rigidity than the strain sensing unit 30 The width of the first and second electrodes may be larger than the width of the second electrode.

Example  Way

Hereinafter, a method of manufacturing a strain and pressure measuring sensor according to an embodiment of the present invention will be described.

For the sake of convenience, the strain and pressure simultaneous measurement sensor 100 will be described with reference to the same reference numerals used for explaining the manufacturing method of the strain and pressure simultaneous sensor according to the embodiment of the present invention. And the same or duplicated description will be omitted.

5 and 6 are flow charts showing a manufacturing process of a strain and pressure simultaneous measurement sensor according to an embodiment of the present invention, FIG. 7 is a flowchart showing a manufacturing method of a strain and pressure simultaneous measurement sensor according to an embodiment of the present invention, to be.

Referring to FIG. 7, a method of manufacturing a strain and pressure simultaneous measurement sensor according to an embodiment of the present invention (hereinafter, referred to as a 'method for manufacturing a strain and pressure simultaneous measurement sensor 100' A method for manufacturing a strain and pressure simultaneous measurement sensor (100) capable of detecting a change in an axial direction simultaneously and simultaneously measuring strain and pressure, comprising: stacking a second electrode part (13) on an upper part of a third electrode part (15) The third electrode unit 15 and the second electrode unit 13 are connected to each other (S100).

More specifically, as shown in FIG. 3, the present method for producing a strain and pressure simultaneous measurement sensor includes a third electrode portion 15 that can be expanded and contracted in the X-axis direction and a second electrode portion 13 that can be expanded and contracted in the Y- Respectively. 5, the strain sensing unit 30 is formed on the upper surface of the third electrode unit 15, and then the third electrode unit 15 And the third electrode part 15 and the second electrode part 13 are connected to each other.

7, the present strain and pressure simultaneous sensor manufacturing method includes the steps of stacking a first electrode portion 11 on an upper portion of a second electrode portion 13 stacked on a third electrode portion 15 , And the second electrode unit 13 and the second electrode unit 13 are connected to each other (S200).

More specifically, the present strain and pressure simultaneous measurement sensor manufacturing method forms the first electrode portion 11, as shown in Fig. 6, the pressure sensing part 20 and the spacer 50 are formed on the upper surface of the second electrode part 13, and then the pressure sensing part 20 and the spacer 50 are formed on the upper surface of the second electrode part 13, The first electrode part 11 is laminated on the upper part of the second electrode part 13 stacked on the upper part of the three electrode part 15 so that the second electrode part 13 and the first electrode part 11 are connected to each other do.

Referring to FIG. 7 again, the present strain and pressure simultaneous sensor manufacturing method includes a third electrode unit 15, a second electrode unit 13, and a first electrode unit (not shown) sequentially stacked using an external device 11 are integrally perforated to form the strain and pressure simultaneous measurement sensor 100 in a lattice structure (S300).

Example  effect

As described above, according to the embodiment of the present invention, the pressure sensing part 20 for measuring the pressure between the plurality of electrode parts 10 and the strain sensing part 30 for measuring the strain are provided, It is possible to simultaneously measure strain and pressure even when a multidimensional external pressure acts.

In addition, by stacking a plurality of electrode parts 10 capable of measuring pressure and strain in a single module form, it is possible to simplify the structure and reduce the volume to provide a more compact sensor 100 for simultaneous strain and pressure measurement Of course, the manufacturing cost can be reduced.

In addition, by forming the strain and pressure simultaneous measurement sensor 100 in a lattice structure, the occurrence of twisting can be minimized, and the elongation and contraction of the electrode unit 10 can be facilitated.

Meanwhile, FIG. 8 shows an example of the resistive strain sensor viewed from the upper side in relation to the present invention.

8, in the resistance type strain sensor 100 proposed by the present invention, a specific top view of the second electrode portion 13, the third electrode portion 15, and the strain sensing portion 30, .

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The foregoing description of the preferred embodiments of the invention disclosed herein has been presented to enable any person skilled in the art to make and use the present invention. While the present invention has been particularly shown and described with reference to preferred embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. For example, those skilled in the art can utilize each of the configurations described in the above-described embodiments in a manner of mutually combining them. Accordingly, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

The present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. Accordingly, the above description should not be construed in a limiting sense in all respects and should be considered illustrative. The scope of the present invention should be determined by rational interpretation of the appended claims, and all changes within the scope of equivalents of the present invention are included in the scope of the present invention. The present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein. In addition, claims that do not have an explicit citation in the claims may be combined to form an embodiment or be included in a new claim by amendment after the filing.

100. Simultaneous strain and pressure sensor
10. Electrode
10a. Support
10b. Elastic electrode
11. First electrode portion
13. Second electrode portion
15. Third electrode section
20. Pressure sensing unit
30. Strain sensing unit
40. Fabric material
50. Spacer

Claims (11)

1. A smart sensor capable of simultaneously measuring a strain and a pressure by detecting a direction change when an external pressure acts,
An electrode part including a third electrode part, a second electrode part and a first electrode part sequentially stacked along a vertical direction, the electrode part being able to expand and contract upon application of an external force;
A pressure sensing part disposed between the first electrode part and the second electrode part to connect the first electrode part and the second electrode part to each other and to detect a change in distance in a vertical direction when an external force is applied; And
And a strain sensing unit disposed between the second electrode unit and the third electrode unit for connecting the second electrode unit and the third electrode unit to each other and detecting a change in length in a horizontal direction when an external force is applied,

The electrode unit includes:
A support formed of a stretchable substrate material; And
And a flexible electrode attached to the surface of the support portion and interconnected through the pressure sensing portion or the strain sensing portion,
The stretchable electrode is formed of nanoparticles or conductive polymers,

The pressure sensing part and the strain sensing part are each applied as one of a dielectric, a resistor, and a piezoelectric body,

When the pressure sensing part and the strain sensing part are applied as a dielectric, the pressure sensing part and the strain sensing part acquire a sensing signal through a capacitive sensing method,

The second electrode unit is used as a drive terminal of a touch integrated circuit (IC)
The first electrode portion and the third electrode portion are used as a receive terminal of the touch IC,

When the pressure sensing part and the strain sensing part are applied as resistors,
Wherein the pressure sensing unit and the strain sensing unit acquire a sensing signal through a resistance method,

A fabric material adhered to an outer surface of the first electrode part and the third electrode part; And
And a spacer provided between the first electrode portion and the second electrode portion,

Wherein the electrode portion is formed in a lattice structure,

Wherein the pressure sensing unit is formed to have a larger width than the strain sensing unit. delete delete delete delete delete delete delete delete delete delete

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