KR101836404B1 - Method for transferring graphene, graphene transferring apparatus and graphene structure - Google Patents
Method for transferring graphene, graphene transferring apparatus and graphene structure Download PDFInfo
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- KR101836404B1 KR101836404B1 KR1020150169267A KR20150169267A KR101836404B1 KR 101836404 B1 KR101836404 B1 KR 101836404B1 KR 1020150169267 A KR1020150169267 A KR 1020150169267A KR 20150169267 A KR20150169267 A KR 20150169267A KR 101836404 B1 KR101836404 B1 KR 101836404B1
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- graphene
- temperature
- metal layer
- carrier
- target substrate
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/184—Preparation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C53/00—Shaping by bending, folding, twisting, straightening or flattening; Apparatus therefor
- B29C53/56—Winding and joining, e.g. winding spirally
- B29C53/564—Winding and joining, e.g. winding spirally for making non-tubular articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/0036—Heat treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
Abstract
The present invention provides a method for producing a catalyst layer, comprising the steps of: providing a catalyst metal layer; composing graphene on at least one side of the catalyst metal layer; forming a first structure by attaching a carrier to the graphene; Forming a second structure by attaching the target substrate to the graphene while applying pressure to the graphene of the second structure and the target substrate facing each other, And removing the carrier included in the third structure by passing the third structure through a heat applying section.
Description
Embodiments of the present invention relate to a graphene transfer method, a graphene transfer apparatus and a graphene structure produced thereby, and more particularly to a graphene transfer method in which degradation of graphene characteristics occurring when transferring graphene is reduced, To a graphen transferring apparatus and a graphen structure manufactured thereby.
Currently, carbon based materials such as carbon nanotubes, diamond, graphite, and graphene are being studied in a wide variety of nanotechnologies. These materials can be used or used in field effect transistors (FETs), biosensors, nanocomposites or quantum devices.
Graphene is a semiconductor material with a bandgap of zero gap as a two-dimensional material, and is very thin, transparent, and has very high electrical conductivity. Attempts have been made to apply graphene to a transparent display, a display that can be bent or a transparent electrode of a touch panel using such a property of graphene, and studies for synthesis of large area graphene have been actively conducted recently .
Since graphene is synthesized on a large area on a wafer or a metal substrate, in order to use graphene in an electronic device, a process of transferring graphene synthesized on a substrate included in an electronic device is essentially required. However, there arises a problem that graphene characteristics are deteriorated in such transfer process.
The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a graphene transfer method, a graphene transfer apparatus, and a graphene structure manufactured by the method, . However, these problems are exemplary and do not limit the scope of the present invention.
According to one aspect of the present invention, there is provided a method of manufacturing a semiconductor device comprising the steps of providing a catalytic metal layer, synthesizing graphene on at least one side of the catalyst metal layer, attaching a carrier to the graphene to form a first structure, Removing the catalyst metal layer to form a second structure; placing the target substrate on the graphene while applying pressure to the graphene of the second structure facing the target substrate; And removing the carrier contained in the third structure by passing the third structure through a heat application section.
In one embodiment, the carrier may be a heat peeling tape having a predetermined peeling temperature.
In one embodiment, the exfoliating temperature may be between 80 and 180 degrees.
In one embodiment, removing the carrier may include separating the carrier by applying heat to the carrier contained in the third structure above the peeling temperature.
In one embodiment, removing the carrier may include separating the carrier by passing the third structure through a chamber having an internal temperature above the peel temperature.
In one embodiment, the forming of the third structure includes forming the third structure by applying pressure to the second structure and the target substrate through at least a pair of rollers can do.
In one embodiment, forming the third structure may include applying heat to the substrate at a temperature below the peeling temperature while applying pressure.
In one embodiment, the step of applying heat at a temperature below the exfoliation temperature may comprise the step of applying heat at a temperature between 30 degrees and 50 degrees.
In one embodiment, at least one of the at least one pair of rollers may comprise a hot line.
In one embodiment, each of the steps may be performed according to a reel-to-reel scheme.
According to another aspect of the present invention, there is provided a method of manufacturing a catalyst, comprising: forming a graphene on at least one surface of a catalyst metal layer; forming a carrier on the graphene to form a first structure; Removing the metal layer to form a second structure; placing the target substrate on the graphene while applying pressure to the graphene of the second structure facing the target substrate, And a heating unit for removing the carrier contained in the third structure by applying heat to the third structure.
In one embodiment, the carrier may be a thermal peel tape having a peel temperature between 80 and 180 degrees.
In one embodiment, the heating unit may apply heat to the carrier included in the third structure at a temperature equal to or higher than the peeling temperature.
In one embodiment, the heating section may include a chamber having an internal temperature equal to or higher than the peeling temperature.
In one embodiment, the pressing portion may include at least a pair of rollers.
In one embodiment, at least one of the at least one pair of rollers includes a hot line, and the pressing portion applies heat to the third structure at a temperature lower than the pressure and the peeling temperature.
According to still another aspect of the present invention, there is provided a graphene structure produced by the graphene transfer method of at least one of the first to the tenth aspects.
Other aspects, features, and advantages other than those described above will be apparent from the following detailed description, claims, and drawings.
According to an embodiment of the present invention as described above, a graphene transfer method capable of improving the characteristics of transferred graphene by reducing degradation of graphene characteristics occurring when transferring graphene, A graphene structure can be provided. Of course, the scope of the present invention is not limited by these effects.
1 is a flowchart illustrating a method of transferring graphene according to an embodiment of the present invention.
2 is a process diagram schematically showing the graphene transfer method of FIG.
FIG. 3 is a schematic cross-sectional view of the catalyst metal layer provided in accordance with step S100 of FIG. 1, corresponding to FIG.
4 is a cross-sectional side view corresponding to IV of Fig. 2, schematically showing a state in which graphene is synthesized in the catalyst metal layer according to step S110 of Fig.
5 is a side cross-sectional view corresponding to V of Fig. 2, schematically showing a state in which a carrier is attached to the graphene according to step S120 of Fig.
6 is a cross-sectional side view corresponding to Fig. 2 VI, schematically illustrating a state in which the catalyst metal layer is removed according to step S130 of Fig.
7 is a cross-sectional side view schematically showing a state of applying pressure according to step S140 of Fig.
8 is a side cross-sectional view corresponding to VIII of FIG. 2, schematically illustrating a state in which a target substrate contacts graphene in accordance with step S140 of FIG.
9 is a side cross-sectional view schematically showing a state of applying heat according to step S150 of FIG.
10 is a side cross-sectional view corresponding to X in Fig. 2, schematically showing a state in which carriers are removed according to step S150 in Fig.
11 is a partial process state diagram schematically showing one embodiment of steps S140 and S150 of FIG.
12 is a partial process state diagram schematically showing another embodiment of steps S140 and S150 in Fig.
BRIEF DESCRIPTION OF THE DRAWINGS The present invention is capable of various modifications and various embodiments, and specific embodiments are illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention and methods of achieving them will be apparent with reference to the embodiments described in detail below with reference to the drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals refer to like or corresponding components throughout the drawings, and a duplicate description thereof will be omitted .
It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. As used in the specification, "comprises" and / or "comprising" do not exclude the presence or addition of the stated components, steps, operations, and / or elements. The terms first, second, etc. may be used to describe various elements, but the elements should not be limited by terms. Terms are used only for the purpose of distinguishing one component from another.
In the present specification, when various components such as layers, films, regions, plates, and the like are referred to as being "on" another component, it is to be understood that not only is there a " . Also, for convenience of explanation, the components may be exaggerated or reduced in size. For example, the size and thickness of each component shown in the drawings are arbitrarily shown for convenience of explanation, and thus the present invention is not necessarily limited to those shown in the drawings.
FIG. 1 is a flowchart showing a method of transferring graphene according to an embodiment of the present invention, and FIG. 2 is a process diagram schematically showing a graphene transferring method of FIG. Hereinafter, reference numerals for the layers formed or removed in each step will be described with reference to FIGS. 3 to 10. FIG.
Referring to FIGS. 1 and 2, a graphene transfer method according to an embodiment includes the steps of providing a catalyst metal layer 10 (S100), synthesizing
≪ Step S100 &
The
The
In FIG. 3, the case where the
≪ Step S110 &
When the
The
A carbon source in the gaseous methane (CH 4), carbon monoxide (CO), ethane (C 2 H 6), ethylene (CH 2), ethanol (C 2 H 5), acetylene (C 2 H 2), propane (CH 3 CH 2 CH 3), propylene (C 3 H 6), butane (C 4 H 10), pentane (CH 3 (CH 2) 3 CH 3), pentene (C 5 H 10), dicyclopentadiene (C 5 H 6), hexane (C 6 H 14), cyclohexane (C 6 H 12), benzene (C 6 H 6), toluene (C 7 H 8), etc. there are one or more selected from the included carbon atoms the group may be used . Such a gaseous carbon source is separated into carbon atoms and hydrogen atoms at high temperatures.
The separated carbon atoms are deposited on the heated
Although not shown, the process of forming the
4 is a side cross-sectional view corresponding to IV in Fig. 2, schematically showing a state in which the
≪ Step S120 &
In step S120, the first structure 1 can be formed by attaching the
The
The peeling temperature may vary depending on the material constituting the adhesive member (not shown). According to one embodiment, the peeling temperature may be about 80 degrees to about 150 degrees.
The
≪ Step S130 &
The first structure 1 transported by the
The catalytic metal
≪ Step S140 &
The
Referring to FIGS. 2, 7 and 8, the
According to one embodiment, the
The
If a high-temperature heat is applied to the
≪ Step S150 &
In step S150, the
The
As described above, the step of attaching the
11 is a partial process state diagram schematically showing another embodiment of steps S140 and S150 of FIG.
Referring to FIG. 11, in step S140, the
The
The
12 is a partial process state diagram schematically showing one embodiment of steps S140 and S150 of FIG.
Referring to FIG. 12, the graphene transfer method according to an embodiment of the present invention is a method in which
The
The
Heat can be applied at a temperature lower than the peeling temperature while applying pressure to the
The
The
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is evident that many alternatives, modifications and variations will be apparent to those skilled in the art . Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.
1: first structure 2: second structure
3: Third structure 4: Graphene structure
10: catalyst metal layer 20: graphene
30: Carrier 40: Target substrate
100: graphen transfer device 110: graphen forming part
120: Carrier forming part 130: Catalytic metal layer removal
140: pressing part 150: heating part
Claims (17)
Synthesizing graphene on at least one side of the catalytic metal layer;
Attaching a carrier provided with a heat peeling tape having a predetermined peeling temperature to the graphene to form a first structure;
Removing the catalyst metal layer from the first structure to form a second structure;
Attaching the target substrate to the graphene while applying pressure and simultaneously applying heat to the graphene of the second structure opposite to the target substrate and forming a third structure; And
And removing the carrier contained in the third structure by passing the third structure through an interval of applying a pressure equal to or lower than the atmospheric pressure and a heat equal to or higher than the separation temperature.
Wherein the peeling temperature is 80 to 180 degrees.
Wherein removing the carrier comprises separating the carrier by passing the third structure through a chamber having an internal temperature equal to or greater than the peel temperature.
Wherein forming the third structure comprises applying pressure to form the third structure by passing the second structure and the target substrate between at least a pair of rollers, .
Wherein the forming of the third structure is performed while applying heat at a temperature of 30 to 50 degrees,
Wherein at least one of said at least one pair of rollers comprises a hot line.
Wherein each of the steps is performed according to a reel-to-reel method.
A carrier forming portion for attaching a carrier provided with a heat peeling tape having a predetermined peeling temperature to the graphene to form a first structure;
A catalyst metal layer removal step of removing the catalyst metal layer from the first structure to form a second structure;
A pressing portion that forms a third structure by applying pressure to the graphene of the second structure facing the target substrate and attaching the target substrate to the graphene while applying a temperature lower than the peeling temperature; And
And a heater for removing the carrier contained in the third structure by applying a pressure of atmospheric pressure or less and a heat of the peeling temperature or more to the third structure.
Wherein the peeling temperature is 80 to 180 degrees.
Wherein the heating section includes a chamber having an internal temperature equal to or higher than the peeling temperature.
Wherein the pressing portion includes at least a pair of rollers.
Wherein at least one of said at least one pair of rollers comprises a hot line.
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Citations (2)
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US20130220530A1 (en) | 2012-02-24 | 2013-08-29 | Kuanping Gong | Method of transferring graphene |
KR101829095B1 (en) | 2011-09-21 | 2018-02-13 | 내셔널 유니버시티 오브 싱가포르 | Methods of nondestructively delaminating graphene from a metal substrate |
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KR101829095B1 (en) | 2011-09-21 | 2018-02-13 | 내셔널 유니버시티 오브 싱가포르 | Methods of nondestructively delaminating graphene from a metal substrate |
US20130220530A1 (en) | 2012-02-24 | 2013-08-29 | Kuanping Gong | Method of transferring graphene |
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