JPS57144454A - Production of oxygen concentration detecting element - Google Patents

Production of oxygen concentration detecting element

Info

Publication number
JPS57144454A
JPS57144454A JP56029347A JP2934781A JPS57144454A JP S57144454 A JPS57144454 A JP S57144454A JP 56029347 A JP56029347 A JP 56029347A JP 2934781 A JP2934781 A JP 2934781A JP S57144454 A JPS57144454 A JP S57144454A
Authority
JP
Japan
Prior art keywords
substrate
oxygen concn
detecting element
manufactured
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56029347A
Other languages
Japanese (ja)
Other versions
JPH0147739B2 (en
Inventor
Masayuki Toda
Kazuo Matoba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP56029347A priority Critical patent/JPS57144454A/en
Publication of JPS57144454A publication Critical patent/JPS57144454A/en
Publication of JPH0147739B2 publication Critical patent/JPH0147739B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To improve the productivity of an oxygen concn. detecting element by forming plural pieces of oxygen concn. detecting parts on one sheet of substrate, parting these then laminating these discretely on substrates buried with heating elements. CONSTITUTION:Heating elements 15 are printed and laminated on a substrate blank material 11a, and a substrate blank material 11b is laminated by pressure on this, whereby a substrate 11 is manufactured. Oxygen concn. detecting parts 23 are formed by first forming plural pieces of reference electrodes 12 on a substrate 17 by a PVD method such as vacuum vapor deposition or sputtering, then forming oxygen ion conductive solid electrolytes 13, measuring electrodes 14 and protection layers 16 successively on the reference electrodes 12 by a PVD method using a metallic mask of a prescribed shape. Plural pieces of the parts 23 on the substrate 17 are divided and cut after this and are manufactured to the individual parts 23. The substrate 11 and the part 23 manufactured in this way are adhered by means of adhesives 18, whereby an oxygen concn. detecting element 10 is obtained.
JP56029347A 1981-03-03 1981-03-03 Production of oxygen concentration detecting element Granted JPS57144454A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56029347A JPS57144454A (en) 1981-03-03 1981-03-03 Production of oxygen concentration detecting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56029347A JPS57144454A (en) 1981-03-03 1981-03-03 Production of oxygen concentration detecting element

Publications (2)

Publication Number Publication Date
JPS57144454A true JPS57144454A (en) 1982-09-07
JPH0147739B2 JPH0147739B2 (en) 1989-10-16

Family

ID=12273687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56029347A Granted JPS57144454A (en) 1981-03-03 1981-03-03 Production of oxygen concentration detecting element

Country Status (1)

Country Link
JP (1) JPS57144454A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59166854A (en) * 1983-03-14 1984-09-20 Toyota Central Res & Dev Lab Inc Limiting current type oxygen sensor
JPS6118854A (en) * 1984-07-06 1986-01-27 Nippon Denso Co Ltd Oxygen concentration detecting element
JPH0755765A (en) * 1993-08-12 1995-03-03 Toyota Central Res & Dev Lab Inc Thin film laminated air-fuel ratio sensor
JP2008275456A (en) * 2007-04-27 2008-11-13 Atago:Kk Concentration measuring device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59166854A (en) * 1983-03-14 1984-09-20 Toyota Central Res & Dev Lab Inc Limiting current type oxygen sensor
JPH0522177B2 (en) * 1983-03-14 1993-03-26 Toyoda Chuo Kenkyusho Kk
JPS6118854A (en) * 1984-07-06 1986-01-27 Nippon Denso Co Ltd Oxygen concentration detecting element
JPH0755765A (en) * 1993-08-12 1995-03-03 Toyota Central Res & Dev Lab Inc Thin film laminated air-fuel ratio sensor
JP2008275456A (en) * 2007-04-27 2008-11-13 Atago:Kk Concentration measuring device

Also Published As

Publication number Publication date
JPH0147739B2 (en) 1989-10-16

Similar Documents

Publication Publication Date Title
EP0478010A3 (en) Process for producing a continuous web of an electrically insulated metallic substrate
JPS57144454A (en) Production of oxygen concentration detecting element
ES8302306A1 (en) Conductivity cell
JPS5726163A (en) Mask for forming thin film and its manufacture
JPS5734447A (en) Production of film structure oxygen sensor element
JPS6438998A (en) Thin film el display element
JPS55162275A (en) Manufacture of solar battery
JPS575372A (en) Thin film diode and manufacture thereof
JPS5775467A (en) Substrage for solar battery
JPS57100093A (en) Manufacture of transfer type decorative foil
JPS5745289A (en) Production of multidimentional semiconductor device
JPS5588026A (en) Production of optical display cell
JPS57206024A (en) Method of forming electrode onto compound semiconductor
JPS5642382A (en) Formation of surface electrode for solar battery
JPS5249990A (en) Method for vacuum evaporation of multi layr film
JPS5435176A (en) Depositing method by vacuum evaporation
JPS55138072A (en) Overlayed metallized silver layer
JPS57119327A (en) Production of electrochromic display device
JPS5433879A (en) Boron film forming process
JPS5210997A (en) Method of manufacturing electrode for discharge processing
JPS6431654A (en) Recording head
JPS56120052A (en) Indicator panel enclosure and its manufacturing method
JPS5632351A (en) Manufacture of patterned laminated glass
JPS5763753A (en) Positive subatrate of fluorescent display tube andits manufacturing method
JPS55137671A (en) Photo-charging silver-halogen battery