JPH03191802A - Strain sensitive element - Google Patents
Strain sensitive elementInfo
- Publication number
- JPH03191802A JPH03191802A JP33358289A JP33358289A JPH03191802A JP H03191802 A JPH03191802 A JP H03191802A JP 33358289 A JP33358289 A JP 33358289A JP 33358289 A JP33358289 A JP 33358289A JP H03191802 A JPH03191802 A JP H03191802A
- Authority
- JP
- Japan
- Prior art keywords
- strain
- strain sensitive
- resistance
- sensitive
- electric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 abstract description 4
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は、抵抗線歪ゲージ等に利用される感歪素子に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a strain-sensitive element used in a resistance wire strain gauge or the like.
第７図に示すように、歪ゲージ等に利用される感歪素子
ａは、一般に同一の感歪電気抵抗材料を用いて被測定物
すの表面や、樹脂フィルム上に真空蒸着法等によって形
成される。As shown in Fig. 7, the strain-sensitive elements a used in strain gauges, etc. are generally formed using the same strain-sensitive electric resistance material on the surface of the object to be measured or on a resin film by vacuum evaporation, etc. be done.
ところで、この感歪素子は、歪に応して電気抵抗が変化
する性質を専ら利用するものであるため、例えば、被測
定物の一方向に発生ずる歪を測定する場合には、感歪素
子の長手方向を歪発生方向に一致させて使用する。By the way, this strain-sensitive element exclusively utilizes the property that electrical resistance changes in response to strain. The longitudinal direction of the strainer should be aligned with the direction of strain generation.
このような場合、上述した従来の構造であると被測定物
の歪 により、抵抗変化を生しない部分の抵抗値が感歪
素子全体の抵抗値に占める割合が大きくなるため、感歪
素子全体としての歪による抵抗変化率が小さくなり、感
度が低下する。In such a case, with the conventional structure described above, due to the strain of the object to be measured, the resistance value of the part that does not cause a resistance change will account for a large proportion of the resistance value of the entire strain-sensitive element. The rate of change in resistance due to strain becomes smaller, resulting in lower sensitivity.
そこで、この発明の課題は、全抵抗値における非変化抵
抗値の占める割合を小さくすることにより、感歪素子の
感度を上げることにある。Therefore, an object of the present invention is to increase the sensitivity of the strain-sensitive element by reducing the proportion of the unchanging resistance value in the total resistance value.
上記の課題を解決するため、この発明の感歪素子は、一
方向に延びる複数の感歪電気抵抗体を並列に配置し、各
感歪電気抵抗体を低電気抵抗体で直列に接続して一連の
感歪体を形成し、この感歪体を歪を受け得る状態で非測
定物の表面に固着するようにしたのである。In order to solve the above problems, the strain-sensitive element of the present invention has a plurality of strain-sensitive electric resistors extending in one direction arranged in parallel, and each strain-sensitive electric resistor is connected in series with a low electric resistance element. A series of strain-sensitive elements were formed, and the strain-sensitive elements were fixed to the surface of a non-measurable object in a state where they could receive strain.
前記低電気抵抗体は、低電気抵抗体と感歪電気抵抗体と
の二層構造にしてもよい。The low electric resistance body may have a two-layer structure including a low electric resistance body and a strain-sensitive electric resistance body.
以上のように構成された感歪素子をその感歪電気抵抗体
の延びる方向と歪発生方向とを一致させた状態で被測定
物に設けておくと、被測定物に生ずる歪が効率よく感歪
電気抵抗体に伝わるので感歪電気抵抗体の抵抗変化を通
して確実に電気信号に変換される。さらに、歪非発生力
向に延びる低電気抵抗体は抵抗値が小さいため、感歪素
子全体の抵抗値における感歪電気抵抗体の抵抗値の占め
る割合が大きく、感歪電気抵抗体の抵抗変化が顕著に現
われる。If the strain-sensitive element configured as described above is provided on the object to be measured with the direction in which the strain-sensitive electric resistor extends and the direction in which strain occurs coincide, the strain occurring in the object to be measured can be efficiently sensed. Since the signal is transmitted to the strain-sensitive electric resistor, it is reliably converted into an electrical signal through the resistance change of the strain-sensitive electric resistor. Furthermore, since the resistance value of the low electrical resistance element extending in the direction of the non-strain-generating force is small, the resistance value of the strain-sensitive electrical resistance element accounts for a large proportion of the resistance value of the entire strain-sensitive element, and the resistance of the strain-sensitive electrical resistance element changes. appears prominently.
なお、前記低電気抵抗体を低電気抵抗体と感歪電気抵抗
体との二層構造にした場合も低電気抵抗体単独の場合と
同様に感歪電気抵抗体の抵抗変化が顕著に現われる。Note that even when the low electrical resistance body has a two-layer structure of a low electrical resistance body and a strain-sensitive electric resistor, the change in resistance of the strain-sensitive electric resistor appears as remarkable as in the case where the low electric resistance body is used alone.
〔実施例］ 以下、実施例について図面を参照して説明する。〔Example] Examples will be described below with reference to the drawings.
第１図および第２図に示すように、この感歪素子１０は
、並列に配置された一方向に延びる複数の感歪電気抵抗
体１１と、この感歪電気抵抗体１１を直列に接続する低
電気抵抗体１２とから成り、被測定体Ａ上に直接真空蒸
着して形成されている。As shown in FIGS. 1 and 2, this strain-sensitive element 10 includes a plurality of strain-sensitive electric resistors 11 arranged in parallel and extending in one direction, and the strain-sensitive electric resistors 11 are connected in series. It is formed by direct vacuum deposition on the object A to be measured.
前記感歪電気抵抗体１１は、６０％Ｃｕ−４０％Ｎｉ合
金で形成されており、前記低電気抵抗体１２はＡｕで形
成されている。The strain-sensitive electrical resistor 11 is made of a 60% Cu-40% Ni alloy, and the low electrical resistor 12 is made of Au.
このようにしておくと、６０％Ｃｕ−４０％Ｎ１合金は
電気抵抗率ＲＣｕ−Ｎｉが４９×ｌ０−ｂΩ−ｃｍであ
り、一方のＡｕの電気抵抗率ＲＡｕは２．２Ｘ １０−
６Ω・Ｃｌ１１であるので、前記低電気抵抗体１２部分
を感歪電気抵抗体１１と同一の６０％Ｃｕ−４０％Ｎ１
合金で形成した場合に比べその電気抵抗が約１７２２に
低下し、感歪電気抵抗体１１の抵抗変化が顕著に現われ
る。In this way, the electrical resistivity RCu-Ni of the 60% Cu-40% N1 alloy is 49×10-bΩ-cm, while the electrical resistivity RAu of Au is 2.2×10-cm.
6Ω・Cl11, the low electrical resistance element 12 is made of the same 60% Cu-40% N1 as the strain-sensitive electrical resistor 11.
Compared to the case where it is made of an alloy, its electrical resistance is reduced to about 1722, and the resistance change of the strain-sensitive electrical resistor 11 becomes noticeable.
また、製造方法についていえば、従来は、第８図乃至第
１０図の各（ａ）図に示すような３種類のマスクｅ、ｆ
、 ｇを使用し、各（１））図に示すように、感歪素子
ａと電極体Ｃとを順次蒸着していくのが一般的である。Regarding the manufacturing method, conventionally, three types of masks e and f are shown in each of FIGS. 8 to 10 (a).
, g, and the strain-sensitive element a and the electrode body C are generally deposited one after another as shown in each (1)).
しかし、この感歪素子１０の場合は低電気抵抗体１２と
同一材料で電極部１３を形成することにより、第３図（
ａ）および第４図（ａ）に示すように、感歪電気抵抗体
１１用のマスク（イ）と低電気抵抗体１２および電極部
１３用のマスク（ロ）の二枚で第３図（ｂ）および第４
図（ｂ）に示すように順次蒸着していくことができるの
で生産性も良い。However, in the case of this strain-sensitive element 10, the electrode part 13 is formed of the same material as the low electrical resistance body 12, as shown in FIG.
As shown in FIG. 3 (a) and FIG. b) and fourth
As shown in Figure (b), the deposition can be performed sequentially, resulting in good productivity.
なお、この発明の感歪素子は第５図に示すように、同一
材料で一連の感歪電気抵抗体１１を形成した後に所要部
に低電気抵抗体１２を重ね合わせるようにしてもよい。As shown in FIG. 5, the strain-sensitive element of the present invention may be constructed by forming a series of strain-sensitive electrical resistors 11 of the same material and then overlapping low electrical resistors 12 at required portions.
また、第６図に示すように、樹脂フィルム１４上に各抵
抗体１１．１２および電極部１３を蒸着し、この樹脂フ
ィルム１４を介して被測定物に貼り付けるようにしても
よい。Alternatively, as shown in FIG. 6, the resistors 11, 12 and the electrode portions 13 may be deposited on a resin film 14 and attached to the object to be measured via the resin film 14.
さらに、被測定物あるいは樹脂フィルム等への感歪素子
の形成方法も例示のような真空蒸着法に限定されず、ス
パッタリング、イオンブレーティング等の各種ＰＶＤ法
またはスクリーン印刷法であってもよい。Furthermore, the method for forming the strain-sensitive element on the object to be measured or the resin film is not limited to the vacuum evaporation method as exemplified, but may be any of various PVD methods such as sputtering and ion blasting, or screen printing methods.
以上のように、この発明の感歪素子は、一方向に延びる
複数の感歪電気抵抗体を並列に配置し、各感歪電気抵抗
体を低電気抵抗体で直列に接続する構成にしたため、一
方向に発生する歪のみを感知することができ、しかも、
感歪電気抵抗体の抵抗値が感歪素子全体の抵抗値に占め
る割合が大きくなるのでその抵抗変化が顕著に現われ、
感歪素子の悪魔が向上する。As described above, the strain-sensitive element of the present invention has a configuration in which a plurality of strain-sensitive electrical resistors extending in one direction are arranged in parallel, and each strain-sensitive electrical resistor is connected in series with a low electrical resistance member. It is possible to sense only distortion occurring in one direction, and
As the resistance value of the strain-sensitive electrical resistor occupies a large proportion of the resistance value of the entire strain-sensitive element, the change in resistance becomes noticeable.
The demon of the sensitive distortion element improves.
第１図はこの発明に係る一実施例を示す斜視図、第２図
は同上の要部を示す拡大斜視図、第３図および第４図は
製造過程を示す平面図、第５図は変形例を示す斜視図、
第６図は他の実施例を示す平面図である。
また、第７図は従来例を示す斜視図であり、第８図乃至
第１０図は同上の製造過程を示す平面図である。
１０・・・・・・感歪素子、 １１・・・・・・感歪
電気抵抗体、１２・・・・・・低電気抵抗体、１３・・
・・・・電極部、１４・・
樹脂フィルム。
同Fig. 1 is a perspective view showing one embodiment of the present invention, Fig. 2 is an enlarged perspective view showing the main parts of the same, Figs. 3 and 4 are plan views showing the manufacturing process, and Fig. 5 is a modified version. A perspective view showing an example,
FIG. 6 is a plan view showing another embodiment. Moreover, FIG. 7 is a perspective view showing a conventional example, and FIGS. 8 to 10 are plan views showing the manufacturing process of the same. 10...Strain sensitive element, 11...Strain sensitive electrical resistor, 12...Low electrical resistance body, 13...
...Electrode part, 14... Resin film. same
Claims (2)
置し各感歪電気抵抗体を低電気抵抗体で直列に接続して
一連の感歪体を形成し、この感歪体を歪を受け得る状態
で被測定物の表面に固着するようにした感歪素子。(1) A plurality of strain-sensitive electrical resistors extending in one direction are arranged in parallel, and each strain-sensitive electrical resistor is connected in series with a low electrical resistance member to form a series of strain-sensitive members. A strain-sensitive element that is fixed to the surface of an object to be measured in a state where it can receive strain.
体との二層構造にした請求項（１）記載の感歪素子。(2) The strain-sensitive element according to claim (1), wherein the low electrical resistance body has a two-layer structure of a low electrical resistance body and a strain-sensitive electric resistance body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33358289A JPH03191802A (en) | 1989-12-21 | 1989-12-21 | Strain sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33358289A JPH03191802A (en) | 1989-12-21 | 1989-12-21 | Strain sensitive element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03191802A true JPH03191802A (en) | 1991-08-21 |
Family
ID=18267658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33358289A Pending JPH03191802A (en) | 1989-12-21 | 1989-12-21 | Strain sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03191802A (en) |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5183883A (en) * | 1990-09-28 | 1993-02-02 | Mercian Corporation | Conjugate of adriamycin and cyclodextrin |
| US5450755A (en) * | 1992-10-21 | 1995-09-19 | Matsushita Electric Industrial Co., Ltd. | Mechanical sensor having a U-shaped planar coil and a magnetic layer |
| CN103727871A (en) * | 2013-12-20 | 2014-04-16 | 广西科技大学 | Resistance strain gauge |
| KR101701222B1 (en) * | 2015-10-07 | 2017-02-06 | 월드잉 주식회사 | Wrist temper sporting goods |
| JP2018040776A (en) * | 2016-09-09 | 2018-03-15 | 株式会社ＮｅｊｉＬａｗ | Sensor structure and component having the same |
| JP2019132790A (en) * | 2018-02-02 | 2019-08-08 | ミネベアミツミ株式会社 | Strain gauge |
| JP2019132791A (en) * | 2018-02-02 | 2019-08-08 | ミネベアミツミ株式会社 | Strain gauge |
| JP2019184344A (en) * | 2018-04-05 | 2019-10-24 | ミネベアミツミ株式会社 | Strain gauge and manufacturing method therefor |
| CN110824181A (en) * | 2019-10-18 | 2020-02-21 | 中国航空工业集团公司西安飞行自动控制研究所 | Signal connection method for low-resistance sensitive device |
| JP2021051091A (en) * | 2020-12-24 | 2021-04-01 | 株式会社ＮｅｊｉＬａｗ | Sensor structure patterning method |
| WO2021193405A1 (en) * | 2020-03-24 | 2021-09-30 | ミネベアミツミ株式会社 | Strain gauge |
| US11543309B2 (en) | 2017-12-22 | 2023-01-03 | Minebea Mitsumi Inc. | Strain gauge and sensor module |
| US11543308B2 (en) | 2017-09-29 | 2023-01-03 | Minebea Mitsumi Inc. | Strain gauge |
| US11542590B2 (en) | 2017-09-29 | 2023-01-03 | Minebea Mitsumi Inc. | Strain gauge |
| US11692806B2 (en) | 2017-09-29 | 2023-07-04 | Minebea Mitsumi Inc. | Strain gauge with improved stability |
| US11774303B2 (en) | 2018-10-23 | 2023-10-03 | Minebea Mitsumi Inc. | Accelerator, steering wheel, six-axis sensor, engine, bumper and the like |
| WO2024010027A1 (en) * | 2022-07-07 | 2024-01-11 | ミネベアミツミ株式会社 | Strain gauge |
-
1989
- 1989-12-21 JP JP33358289A patent/JPH03191802A/en active Pending
Cited By (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5183883A (en) * | 1990-09-28 | 1993-02-02 | Mercian Corporation | Conjugate of adriamycin and cyclodextrin |
| US5450755A (en) * | 1992-10-21 | 1995-09-19 | Matsushita Electric Industrial Co., Ltd. | Mechanical sensor having a U-shaped planar coil and a magnetic layer |
| CN103727871A (en) * | 2013-12-20 | 2014-04-16 | 广西科技大学 | Resistance strain gauge |
| KR101701222B1 (en) * | 2015-10-07 | 2017-02-06 | 월드잉 주식회사 | Wrist temper sporting goods |
| JP2021119354A (en) * | 2016-09-09 | 2021-08-12 | 株式会社NejiLaw | Sensor structure and member having sensor structure |
| JP2018040776A (en) * | 2016-09-09 | 2018-03-15 | 株式会社ＮｅｊｉＬａｗ | Sensor structure and component having the same |
| US11702730B2 (en) | 2017-09-29 | 2023-07-18 | Minebea Mitsumi Inc. | Strain gauge |
| US11692806B2 (en) | 2017-09-29 | 2023-07-04 | Minebea Mitsumi Inc. | Strain gauge with improved stability |
| US11542590B2 (en) | 2017-09-29 | 2023-01-03 | Minebea Mitsumi Inc. | Strain gauge |
| US11543308B2 (en) | 2017-09-29 | 2023-01-03 | Minebea Mitsumi Inc. | Strain gauge |
| US11543309B2 (en) | 2017-12-22 | 2023-01-03 | Minebea Mitsumi Inc. | Strain gauge and sensor module |
| JP2019132791A (en) * | 2018-02-02 | 2019-08-08 | ミネベアミツミ株式会社 | Strain gauge |
| CN111656129B (en) * | 2018-02-02 | 2023-08-22 | 美蓓亚三美株式会社 | Strain gauge |
| US11326967B2 (en) | 2018-02-02 | 2022-05-10 | Minebea Mitsumi Inc. | Strain gauge with improved temperature effect detection |
| CN111656129A (en) * | 2018-02-02 | 2020-09-11 | 美蓓亚三美株式会社 | Strain gauge |
| WO2019151345A1 (en) * | 2018-02-02 | 2019-08-08 | ミネベアミツミ株式会社 | Strain gauge |
| JP2019132790A (en) * | 2018-02-02 | 2019-08-08 | ミネベアミツミ株式会社 | Strain gauge |
| CN111919083A (en) * | 2018-04-05 | 2020-11-10 | 美蓓亚三美株式会社 | Strain gauge and manufacturing method thereof |
| US11747225B2 (en) | 2018-04-05 | 2023-09-05 | Minebea Mitsumi Inc. | Strain gauge with improved stability and stress reduction |
| CN111919083B (en) * | 2018-04-05 | 2023-08-22 | 美蓓亚三美株式会社 | Strain gauge and method for manufacturing same |
| JP2019184344A (en) * | 2018-04-05 | 2019-10-24 | ミネベアミツミ株式会社 | Strain gauge and manufacturing method therefor |
| US11774303B2 (en) | 2018-10-23 | 2023-10-03 | Minebea Mitsumi Inc. | Accelerator, steering wheel, six-axis sensor, engine, bumper and the like |
| CN110824181B (en) * | 2019-10-18 | 2021-10-15 | 中国航空工业集团公司西安飞行自动控制研究所 | Signal connection method for low-resistance sensitive device |
| CN110824181A (en) * | 2019-10-18 | 2020-02-21 | 中国航空工业集团公司西安飞行自动控制研究所 | Signal connection method for low-resistance sensitive device |
| WO2021193405A1 (en) * | 2020-03-24 | 2021-09-30 | ミネベアミツミ株式会社 | Strain gauge |
| JP2021051091A (en) * | 2020-12-24 | 2021-04-01 | 株式会社ＮｅｊｉＬａｗ | Sensor structure patterning method |
| WO2024010027A1 (en) * | 2022-07-07 | 2024-01-11 | ミネベアミツミ株式会社 | Strain gauge |
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