JP5424784B2 - Power supply device for dry vacuum pump and operation method thereof - Google Patents

Description

  The present invention relates to a power supply device for a dry vacuum pump that supplies driving power to a motor for driving a dry vacuum pump.

  In recent years, dry vacuum pumps that can operate from atmospheric pressure and can easily obtain a clean vacuum environment have been used in a wide range of fields such as semiconductor manufacturing facilities. In many cases, an inverter is used in a power supply device that supplies driving power to a driving motor that drives such a dry vacuum pump. There are the following reasons for this.

(1) One is that the frequency of the drive power supplied to the drive motor is made larger than the commercial frequency with an inverter, so that the rotation speed of the drive motor is increased and the exhaust performance of the vacuum pump is improved. This is because a predetermined vacuum is obtained with a vacuum pump using the drive motor.

(2) In addition, when the desired vacuum degree is reached by the operation of the vacuum pump and the load becomes a light load operation with a very small load, the output terminal voltage is controlled so that the motor can be operated with high efficiency, This is because it is easy to control the rotational speed.

JP-A-7-143661

  The power supply device using the inverter generally has a function of preventing a failure caused by an excessive current being supplied to the drive motor by setting an upper limit value of the output current. On the other hand, in a power supply device for a dry vacuum pump equipped with an inverter used in a semiconductor manufacturing device or the like, a product generated inside the dry vacuum pump or a foreign material flowing into a flow path is between pump rotors or between a pump rotor and a pump casing. A so-called foreign object biting state is easily generated. As a countermeasure against this, there is a startup control that eliminates the biting state by supplying a startup current with an upper limit of about 10 times the rated current at the startup of the drive motor, generating a large torque in the drive motor at the startup and crushing foreign matter. May be adopted. At this time, the upper limit value of the output current set in the inverter is almost lower than 10 times the rated current required at the time of startup, and it is impossible to make both compatible, resulting in a contradiction in safety design. It was.

  When a product is generated in the dry vacuum pump or an inflow of foreign matter occurs, a large current different from the steady state flows through the electric motor that drives the dry vacuum pump. This is because the foreign matter and products in the casing of the dry vacuum pump provide mechanical resistance against the rotation of the pump rotor. Therefore, the inverter control device that tries to maintain the rated speed of the motor is rated at the rated speed. This is due to the increased current supplied to maintain the number.

  Therefore, measuring the current supplied from the inverter to the motor, the occurrence of irregular overcurrent, especially the steepness of current rise in the start-up process and the change in the maximum current, as explained above, the mechanical resistance in the vacuum pump Therefore, the change in the current supplied from the inverter to the electric motor can be used as an index for the generation of foreign matters and products in the vacuum pump casing. That is, by monitoring the inverter output current, it is possible to know the state of the foreign matter / product in the vacuum pump.

  The present invention has been made in view of the above points, and includes a drive motor that includes an inverter and accelerates to the rated rotational speed while pulverizing the foreign matter even when the foreign matter is mixed in the vacuum pump. In the start-up process, the overcurrent set value for detecting overload abnormality is rated operation in the dry vacuum pump power supply device that performs start-up control to supply start-up current about 10 times the rated current for a predetermined time. Power supply for dry vacuum pump that can stably supply current that can generate large torque different from rated operation during start-up process from drive to drive motor by setting individually according to each condition during and during start-up process It is an object of the present invention to provide a device and an operation method thereof.

In order to solve the above problems, the present invention includes a rectifier, a DC circuit including a smoothing capacitor, an inverter, converts AC power from an AC power source into DC power by the rectifier, and passes the DC circuit through the DC circuit. A power supply device for a dry vacuum pump configured to supply to an inverter, convert the AC power to a predetermined frequency by the inverter, and supply the drive motor to drive a dry vacuum pump, wherein the inverter starts the dry vacuum pump A function of increasing the drive torque of the drive motor by supplying a current that is a predetermined multiple of the rated current, and an abnormality or failure of the dry vacuum pump when the output current of the inverter exceeds a predetermined set current value An overcurrent detection / protection function for detecting the overcurrent detection, the overcurrent detection / protection function at the start-up and at the rated operation of the dry vacuum pump. The set current value is individually set, and in the starting process of the dry vacuum pump, the set current value is set to a predetermined excessive current value exceeding a predetermined overload current value, and when the starting process of the dry vacuum pump is completed The set current value is set to an overload current value of the predetermined load , and a function is provided to detect when the overcurrent value is exceeded during the starting process of the dry vacuum pump to the rated operation state. It is characterized by.

The present invention also includes a rectifier, a DC circuit including a smoothing capacitor, and an inverter, and converts AC power from an AC power source into DC power by the rectifier, and supplies the DC power to the inverter via the DC circuit. A power supply device for a dry vacuum pump configured to convert the AC power into a predetermined frequency and supply it to a drive motor that drives the dry vacuum pump, wherein the inverter is a predetermined multiple of a rated current when the dry vacuum pump is activated. A function of increasing the drive torque of the drive motor by supplying a current of overcurrent, and overcurrent detection for detecting an abnormality or failure of the dry vacuum pump when the output current of the inverter exceeds a predetermined set current value. The overcurrent detection / protection function individually sets the set current value when starting the dry vacuum pump and during rated operation. In the starting process of the dry vacuum pump, the set current value is set to a predetermined excessive current value exceeding a predetermined overload current value, and when the starting process of the dry vacuum pump is completed, the set current value is set to the predetermined value. In addition to the load overload current value, it detects when the overcurrent value is exceeded during the start-up process of the dry vacuum pump to the rated operation state, and when it does not exceed it, the overcurrent detection / protection function is enabled. It has a feature that does not.

Further, in the power supply device for the dry vacuum pump according to the present invention, the set current value in the start-up process is set to an arbitrary current value required when the dry vacuum pump does not increase to the rated rotation speed due to an external factor. It is characterized by doing.
In the dry vacuum pump power supply device according to the present invention, the external factor is the biting of foreign matter / product by the rotor of the dry vacuum pump.
In the dry vacuum pump power supply device according to the present invention, the overcurrent detection / protection function includes a function of detecting a time during which an output current of the inverter exceeds the overcurrent set value. To do.
Further, according to the present invention, in the power supply device for the dry vacuum pump, the dry vacuum pump does not increase to an appropriate rotational speed due to an external factor while the dry vacuum pump reaches a rated rotational speed in the starting step. In this case, the restart is repeated, and the number of revolutions at which the output current of the inverter exceeds the excessive current is accumulated at the time of restart including the first start, and detection from the start command generation of the drive motor to the rated speed is detected. When the number of times exceeds a predetermined number of times, it is determined that a failure has occurred due to an external factor, and the start-up operation of the dry vacuum pump is stopped, or failure information is displayed on the host device report or outside the dry vacuum pump It is characterized by having a function.

  In the dry vacuum pump power supply device according to the present invention, the failure due to the external factor is a failure due to foreign matter biting by a rotor in the dry vacuum pump.

  Further, the present invention is the above-described dry vacuum pump power supply device, wherein the dry vacuum pump rotation speed reaches the rated rotation speed, and after shifting to the rated operation, the operation exceeding the predetermined overload current value at the rated operation When a condition occurs, the number of occurrences per unit time, the total number of occurrences, the duration of one occurrence, and the weighting of these, and determining the failure state of the dry vacuum pump by preset failure diagnosis, failure information Is provided with a function of reporting to the host device or displaying it outside the dry vacuum pump.

The present invention also includes a rectifier, a DC circuit including a smoothing capacitor, and an inverter, and converts AC power from an AC power source into DC power by the rectifier, and supplies the DC power to the inverter via the DC circuit. The operation method of the power supply device for the dry vacuum pump configured to convert the alternating current power into a predetermined frequency and supply it to a drive motor that drives the dry vacuum pump, wherein the inverter has a rated current when the dry vacuum pump is activated. of a function of enhancing the driving torque of the drive motor by supplying a predetermined multiple of the current, said a dry vacuum pump activation step the inverter output is greater than a predetermined excessive current value exceeding a predetermined overload current value of In such a case, an overcurrent detection / protection function for detecting an abnormality or failure of the dry vacuum pump is activated, and the dry vacuum pump At the time when the activation process is completed when the output of the inverter becomes a predetermined overload current value or more, and wherein the actuating said overcurrent detection and protection.

  The present invention sets the overload current set value for detecting an overload abnormality individually according to the conditions during the rated operation and the startup process, thereby providing a large torque current different from the rated operation during the startup process. The effect of being able to provide a power supply device for a dry vacuum pump that can be stably supplied from the inverter to the drive motor and an operation method thereof can be expected.

FIG. 1 is a diagram showing a circuit configuration of a power supply device for a dry vacuum pump using an inverter. FIG. 2 is a diagram showing motor rotation speed and inverter output current in normal overcurrent control by the dry vacuum pump power supply device shown in FIG. FIG. 3 is a diagram showing the motor speed and inverter output current in the normal overcurrent control by the dry vacuum pump power supply device shown in FIG. FIG. 4 is a diagram showing the motor speed and the inverter output current in the normal overcurrent control by the dry vacuum pump power supply device shown in FIG. FIG. 5 is a diagram showing the motor rotation speed and the inverter output current in the normal overcurrent control by the power supply device for the dry vacuum pump shown in FIG. FIG. 6 is a diagram showing a start-up operation flow by the power supply device for a dry vacuum pump according to the present invention. FIG. 7 is a diagram showing a weighting example of overcurrent generated by one activation of the dry vacuum pump. FIG. 8 is a diagram showing an example of a dry vacuum pump that includes a booster pump and a main pump and operates independently. FIG. 9 is a diagram illustrating an example of a dry vacuum pump that operates in cooperation with a host device including a booster pump and a main pump.

  Hereinafter, embodiments of the present invention will be described in detail. FIG. 1 is a diagram showing a circuit configuration of a power supply device for a dry vacuum pump. As shown in the figure, the dry vacuum pump power supply device includes a rectifier 11, a DC circuit 13 including a smoothing capacitor 12, an inverter 14, and an inverter control unit 15, and AC power from the AC power supply 16 is converted into DC power by the rectifier 11. And is supplied to the inverter 14 via the DC circuit 13. The inverter 14 converts the AC power into AC power having a predetermined frequency under the control of the inverter control unit 15, and drives the dry vacuum pump 18 using the converted AC power. The electric motor 17 is configured to be supplied.

  In the inverter 14 of the power supply device 10 for the dry vacuum pump, it is possible to set the set value of the overcurrent limit for each operation condition of the inverter 14. Specifically, after the start command is input from the control panel 19 to the inverter control unit 15, the overcurrent set value A is set in the start process until the drive motor 17 starts to reach the rated speed or the predetermined target speed. The overcurrent detection / protection function is effective as the upper limit. That is, the current (inverter output current) supplied from the inverter 14 to the drive motor 17 is detected by the current detector 20, and even if the detected inverter output current exceeds the overload current value, the overcurrent set value A is exceeded. Unless the overcurrent detection / protection function is enabled, the overcurrent detection / protection function is enabled when the inverter output current exceeds the overcurrent set value A (monitors the foreign matter biting state of the dry vacuum pump). Further, when the rotational speed of the drive motor 17 (motor rotational speed) reaches the rated rotational speed or a predetermined target rotational speed, an overcurrent detection / protection function with the overcurrent set value B (A> B) as an upper limit. Becomes effective. That is, when the current value detected by the current detector 20 exceeds the overcurrent set value B, the overcurrent detection / protection function is validated.

  When an event that exceeds the overcurrent set value A occurs during the start-up process of the drive motor 17 with respect to the overcurrent set value A, it is determined that the biting state has occurred, and until the rated rotational speed is reached. By recording information such as the number of times that the current exceeding the overcurrent set value A was detected in the period, the total time, or the duration of one time, and performing calculation processing after weighting each information The degree of product / abnormality in the dry vacuum pump 18 is determined.

  For the overcurrent set value B, if an event occurs in which the current value detected by the current detector 20 exceeds the overcurrent set value B during the rated rotational operation of the drive motor 17, the biting state / foreign object suction And record information such as the number of occurrences of the detected current exceeding the overcurrent set value B per unit time, the total time, or the time continued once, and weight each information Is used to determine the degree of product / foreign matter generation in the dry vacuum pump 18.

  FIG. 2 shows the rotation speed (motor rotation speed) of the normal overcurrent control motor 17 and the output current (inverter output current) of the inverter 14 when the dry vacuum pump is operated by the power supply device for the dry vacuum pump shown in FIG. It is a figure which shows a state. As shown in the figure, the overcurrent set value is set with the overcurrent set value B effective during normal rated operation as the upper limit. When a start command signal is input to the inverter control unit 15 from the control panel 19, the current (inverter output current) I supplied from the inverter 14 to the drive motor 17 by the control of the inverter control unit 15 is shown in FIG. The rotational speed N of the drive motor 17 increases from 0 to the rated rotational speed Ns, and when the rated rotational speed Ns is reached, the output current I of the inverter 14 becomes substantially constant. In this case, the overcurrent detection / protection function is not enabled. That is, it does not monitor the foreign matter biting state in the dry vacuum pump.

  FIG. 3 shows a power supply device for the dry vacuum pump shown in FIG. 1, in which the overcurrent set value A during the start-up process of the dry vacuum pump is approximately four times the overcurrent set value B effective during normal rated operation (A≈4 × B It is a figure which shows the rotation speed of an overcurrent control at the time of setting to), and an inverter output current state. Here, foreign matter is caught between the rotors of the dry vacuum pump 18 and between the rotor and the casing in the initial stage of the start-up, the rotation speed does not increase, and the output current I of the inverter 14 increases rapidly. This is a case where the foreign matter is crushed before the overcurrent set value A is reached, and then the rotational speed N of the drive motor 17 increases linearly to the rated rotational speed Ns. In this case, the overcurrent detection / protection function is enabled and the time during which the inverter output current I exceeds the overcurrent set value A is detected.

  As in FIG. 3, FIG. 4 shows the overcurrent control speed and inverter output current state when the overcurrent set value during the start-up process of the dry vacuum pump is set to A and the overcurrent set value B during rated operation. FIG. Here, foreign matter is caught between the rotors of the dry vacuum pump 18 or between the rotor and the casing in the initial stage of the start-up, the rotation speed does not increase, the output current I of the inverter 14 increases, and the overcurrent set value A is set. In this case, the drive torque of the drive motor 17 is increased by the large inverter output current I, the foreign matter is crushed, and then the rotational speed N of the drive motor 17 increases linearly to the rated rotational speed Ns. In this case, the overcurrent detection / protection function is enabled, and the number of times that the inverter output current I exceeds the overcurrent set value A is measured.

  As in FIG. 3, FIG. 5 shows the overcurrent control speed and inverter output current when the overcurrent set value during the starting process of the dry vacuum pump is set to A and the overcurrent set value during rated operation is set to B. It is a figure which shows a state. Here, foreign matter is caught between the rotors of the dry vacuum pump 18 or between the rotor and the casing in the initial stage of the start-up, the rotation speed does not increase, the output current I of the inverter 14 increases, and the overcurrent set value A is set. Exceeding phenomenon occurs a plurality of times (two times in the figure), but the drive torque of the drive motor 17 increases due to the large inverter output current I, and foreign matters are crushed. It is a case of rising.

  4 and 5, foreign matter is caught between the rotors of the dry vacuum pump 18 and between the rotor and the casing at the initial start-up, but the foreign matter is crushed in a short time, and then the drive motor 17 is rotated. The number N shows an example in which the speed has risen linearly up to the rated speed Ns. However, when a foreign object is caught and the drive motor 17 does not start, a restart operation is performed and the inverter output current I is detected each time. Then, the number of times that the detected inverter output current I exceeds the overcurrent set value A (I> A) is measured, and if the number of times exceeds the predetermined number, it is determined that an abnormality has occurred in the dry vacuum pump 18. Then, display an external abnormality and stop the start of the dry vacuum pump. In addition, by notifying the host device of the occurrence of the abnormality, the dry vacuum pump 18 is stopped by a command from the host device.

  FIG. 6 is a diagram showing a flow of start-up operation by the power supply device for the dry vacuum pump according to the present invention. When there is a dry vacuum pump start signal in step ST1, the inverter 14 is started in step ST2 and the overcurrent set value A is set. Subsequently, in step ST3, it is determined whether the dry vacuum pump 18 is bitten and the drive motor 17 is not started. If YES, the process proceeds to step ST4, and the inverter current I exceeds the overcurrent set value A ( A <I) The number of times is accumulated, and when the number of times of accumulation is less than a predetermined number (less than 10 in the figure), the process proceeds to step ST5, a restart operation is performed, and the process proceeds to step ST2. If the number of times is greater than or equal to a predetermined time (10 times or more in the figure), the process proceeds to step ST6, an external abnormality is displayed, and the start of the dry vacuum pump is stopped.

  In step ST3, biting does not occur and the dry vacuum pump 18 (drive motor 17) is activated, and when the rotational speed of the dry vacuum pump 18 reaches the rated rotational speed (step ST7), the overcurrent installation value is switched to B. (Step ST8), the process proceeds to Step ST9, and the normal rated operation is performed.

  After the dry vacuum pump 18 (drive motor 17) reached the rated speed and shifted to the rated operation, the inverter output current I exceeded the overcurrent set value B (I> B) during the rated operation. In this case, the number of occurrences per unit time, the total number of occurrences, the duration of one occurrence, and the weights for these, and the failure state of the dry vacuum pump 18 is determined by a preset failure diagnosis, and it is determined as a failure. Then, the failure information is reported to the host device, or a lamp or the like which is an external display means of the dry vacuum pump 18 is turned on.

  FIG. 7 is a diagram showing a weighting example of overcurrent generated by one activation of the dry vacuum pump, that is, a reference example in which the overcurrent detection / protection function determines a prediction forecast and a reference example in which a failure is determined. If the dry vacuum pump does not start due to the number of retries, that is, foreign object biting or the like, restart is performed, but the number of restarts is 5 times to determine the prediction forecast, and 20 times to determine the failure. Further, the prediction forecast is determined when the inverter output current I exceeds the overcurrent set value A (I> A) 5 times, and the failure is determined 10 times. Further, the prediction prediction is determined at an integration time of 100 ms when the inverter output current I exceeds the overcurrent set value A, and a failure is determined at 3000 sm. As described above, the prediction prediction and the failure are determined based on the number of retries, the number of times that the inverter output current I exceeds the overcurrent set value A, and the accumulated time that the inverter output current I exceeds the overcurrent set value A.

  FIG. 8 is a diagram showing a configuration of a dry vacuum unit 30 that includes a booster pump 31 and a main pump 32 and is operated independently by an operation panel 35. The booster pump 31 includes a dry vacuum pump 31a and a drive motor 31b that drives the dry vacuum pump 31a, and supplies a drive current from the power supply device 33 to the drive motor 31b. The main pump 32 includes a dry vacuum pump 32a and a drive motor 32b that drives the dry vacuum pump 32a, and supplies a drive current from the power supply device 34 to the drive motor 32b. Each of the power supply devices 33 and 34 is a power supply device for a dry vacuum pump having the same configuration as that shown in FIG. In the dry vacuum unit 30, the dry vacuum pump 31a and the main pump 32 of the booster pump 31 have abnormalities such as the inclusion of foreign matter in the dry vacuum pumps 31a and 32a, and the overcurrent detection / protection function determines the prediction forecast. The prediction forecast is displayed on the operation panel 35, and the booster pump 31 and the main pump 32 are stopped.

  FIG. 9 is a diagram illustrating a configuration of a dry vacuum unit 40 that performs a cooperative operation with a host device. The booster pump 41 includes a dry vacuum pump 41a and a drive motor 41b that drives the dry vacuum pump 41a, and supplies a drive current from the power supply device 43 to the drive motor 41b. The main pump 42 includes a dry vacuum pump 42a and a drive motor 42b that drives the dry vacuum pump 42a, and supplies a drive current from the power supply device 44 to the drive motor 42b. The power supply devices 43 and 44 are dry vacuum pump power supply devices having the same configuration as that shown in FIG. In the dry vacuum unit 40, when the dry vacuum pump 41a or the main pump 42 of the booster pump 41 has an abnormality such as the foreign matter biting in the dry vacuum pumps 41a and 42a, the overcurrent detection / protection function determines the prediction forecast. Reports the prediction forecast information to the host device, and if it determines a failure, it reports the failure information and stops the booster pump 41 and the main pump 42 in response to a command from the host device.

  The embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the technical idea described in the claims and the specification and drawings. Can be modified.

  The present invention includes an inverter, and even when foreign matter is mixed in the vacuum pump, a predetermined multiple of the rated current is applied in the starting process of the drive motor so as to accelerate the rated foreign matter while pulverizing the foreign matter. In a dry vacuum pump power supply unit that performs start-up control that supplies a certain start-up current for a predetermined time, the overcurrent detection value for detecting overload abnormality of the overcurrent detection / protection function is started during rated operation. By setting individually according to each condition in the process, it is used as a power supply device for a dry vacuum pump that can stably supply a current that can generate large torque from the inverter to the drive motor during the starting process. be able to.

DESCRIPTION OF SYMBOLS 10 Power supply apparatus for dry vacuum pumps 11 Rectifier 12 Smoothing capacitor 13 DC circuit 14 Inverter 15 Inverter control part 16 AC power supply 17 Drive motor 18 Dry vacuum pump 19 Control panel 20 Current detector 30 Dry vacuum pump unit 31 Booster pump 32 Main pump 33 Power supply device 34 Power supply device 35 Operation panel 40 Dry vacuum pump unit 41 Booster pump 42 Main pump 43 Power supply device 44 Power supply device

Claims (9)

A rectifier, a DC circuit including a smoothing capacitor, an inverter, AC power from an AC power source is converted into DC power by the rectifier, supplied to the inverter through the DC circuit, and AC power having a predetermined frequency is supplied by the inverter. Is a power supply device for a dry vacuum pump configured to be supplied to a drive motor that drives the dry vacuum pump,
When the dry vacuum pump is started, the inverter supplies a current that is a predetermined multiple of a rated current to increase the drive torque of the drive motor, and when the output current of the inverter exceeds a predetermined set current value. With an overcurrent detection / protection function for detecting an abnormality or failure of the dry vacuum pump,
The overcurrent detection / protection function individually sets the set current value at each of startup and rated operation of the dry vacuum pump, and the set current value is set to a predetermined overload in the startup process of the dry vacuum pump. A predetermined excessive current value exceeding the current value is set, and when the starting process of the dry vacuum pump is completed, the set current value is set to the overload current value of the predetermined load , and the rated operation is started from the starting process of the dry vacuum pump. A power supply device for a dry vacuum pump comprising a function of detecting when the excessive current value is exceeded during reaching a state . A rectifier, a DC circuit including a smoothing capacitor, an inverter, AC power from an AC power source is converted into DC power by the rectifier, supplied to the inverter through the DC circuit, and AC power having a predetermined frequency is supplied by the inverter. Is a power supply device for a dry vacuum pump configured to be supplied to a drive motor that drives the dry vacuum pump,
When the dry vacuum pump is started, the inverter supplies a current that is a predetermined multiple of a rated current to increase the drive torque of the drive motor, and when the output current of the inverter exceeds a predetermined set current value. With an overcurrent detection / protection function for detecting an abnormality or failure of the dry vacuum pump,
The overcurrent detection / protection function individually sets the set current value at each of startup and rated operation of the dry vacuum pump, and the set current value is set to a predetermined overload in the startup process of the dry vacuum pump. A predetermined excessive current value exceeding the current value is set, and when the starting process of the dry vacuum pump is completed, the set current value is set to the overload current value of the predetermined load, and the rated operation is started from the starting process of the dry vacuum pump. A power supply device for a dry vacuum pump comprising a function of detecting when an excessive current value is exceeded during reaching a state and not making an overcurrent detection / protection function effective when the excessive current value is not exceeded. In the power supply device for dry vacuum pumps according to claim 1 or 2,
The set current value in the starting step is set to an arbitrary current value required when the dry vacuum pump does not increase to the rated speed due to an external factor. In the dry vacuum pump power supply device according to claim 3,
The power source apparatus for a dry vacuum pump characterized in that the external factor is biting of foreign matter / product by a rotor of the dry vacuum pump. In the power supply device for dry vacuum pumps according to any one of claims 1 to 4,
The power supply device for a dry vacuum pump, wherein the overcurrent detection / protection function has a function of detecting a time during which the output current of the inverter exceeds the overcurrent set value. In the power supply device for dry vacuum pumps according to any one of claims 1 to 5 ,
In the start-up process, if the dry vacuum pump does not increase to an appropriate speed due to an external factor while the dry vacuum pump reaches the rated speed, the restart is repeated and restarted including the initial start-up. Sometimes when the output current of the inverter exceeds the excessive current, and the number of detections from the start command generation of the drive motor to the rated speed exceeds the preset number of times, due to external factors A power supply device for a dry vacuum pump, comprising a function of judging that a failure has occurred and stopping the start-up operation of the dry vacuum pump and reporting failure information to the host device or outside the dry vacuum pump . In the dry vacuum pump power supply device according to claim 6 ,
The failure due to the external factor is a failure due to foreign matter biting by a rotor in the dry vacuum pump. In the power supply device for dry vacuum pumps according to claim 1 or 2 ,
If the dry vacuum pump reaches the rated speed and shifts to rated operation, and if an operating condition exceeding the specified overload current value during rated operation occurs, the number of occurrences per unit time, total integration A function for determining the failure state of the dry vacuum pump by pre-determined failure diagnosis with the number of occurrences, one occurrence duration, and weighting, and reporting the failure information to the host device or displaying it outside the dry vacuum pump A power supply device for a dry vacuum pump, comprising: A rectifier, a DC circuit including a smoothing capacitor, an inverter, AC power from an AC power source is converted into DC power by the rectifier, supplied to the inverter through the DC circuit, and AC power having a predetermined frequency is supplied by the inverter. A method for operating a power supply device for a dry vacuum pump configured to be supplied to a drive motor that drives the dry vacuum pump,
The inverter has a function of increasing the drive torque of the drive motor by supplying a current that is a predetermined multiple of a rated current when the dry vacuum pump is started.
An overcurrent detection / protection function for detecting an abnormality or failure of the dry vacuum pump when the output of the inverter exceeds a predetermined overload current value exceeding a predetermined overload current value in the starting process of the dry vacuum pump When the output of the inverter becomes equal to or higher than the predetermined overload current value at the time when the starting process of the dry vacuum pump is completed, the overcurrent detection / protection function is activated. Operation method of power supply device for dry vacuum pump.

Images