JP5006229B2 - Solar cell inspection equipment - Google Patents

Description

  The present invention relates to an apparatus for inspecting general performance of a solar cell, such as a solar cell, a string in which solar cells are connected in a row, and a solar cell panel in which a plurality of strings are arranged in parallel.

  As a method of utilizing solar energy, a silicon type solar cell is known. In the production of solar cells, it is important to evaluate the performance of whether the solar cells have the desired power generation capability. In performance evaluation, output characteristics are usually measured.

  The output characteristic is performed as a photoelectric conversion characteristic for measuring the current-voltage characteristic of the solar cell under light irradiation. Solar light is desirable as the light source, but a solar simulator is used because the irradiation intensity varies depending on the weather. In the solar simulator, a xenon lamp, a metal halide lamp, or the like is used instead of sunlight. Further, when these light sources are turned on for a long time, the light amount changes due to a temperature rise or the like. Therefore, the output characteristic curve of the solar cell is obtained by plotting the collected data using the flash light of these lamps with the horizontal axis representing voltage and the vertical axis representing current (see, for example, Patent Document 1).

  As a method different from the solar simulator, Patent Document 2 proposes a method of generating electroluminescence (EL) by applying a voltage in the forward direction to a polycrystalline silicon solar cell element. By observing the EL emitted from the solar cell element, the current density distribution can be understood, and the defect of the solar cell element can be known from the non-uniform current density distribution. That is, a portion that does not emit light can be determined as a defective portion, and if the area of the defective portion is less than a predetermined amount, it can be determined that it has a predetermined power generation capability.

  FIG. 7 is a diagram schematically showing the configuration of the inspection apparatus described in Patent Document 2. As shown in FIG. The inspection apparatus 10 includes a dark room 11, a CCD camera 12 provided above the dark room 11, a power supply 14 for supplying a current to the solar cells 13 placed on the floor of the dark room 11, And an image processing device 15 for processing an image signal.

The dark room 11 has a window 11a. A finder 12a of the CCD camera 12 is provided here, and a photographed image of the CCD camera 12 can be confirmed by looking into it with the naked eye. A personal computer is used as the image processing device 15.
JP2007-88419 WO / 2006/059615

  The inspection apparatus 10 shown in FIG. 7 places the solar battery cell 13 downward and takes a picture with a camera from above. The EL emitted from the solar battery cell 13 has a wavelength of 1,000 nm to 1,300 nm. It is faint light and can only be detected in the dark room 11. If the object to be measured is a single solar battery cell, the dark room 11 may be small because it is about 100 mm square.

  However, when it becomes a solar cell panel, it becomes a size of about 2 m × 1 m, and the dark room 11 needs to be large enough to accommodate it. Moreover, since the solar cell panel to be measured cannot be photographed by the CCD camera 12 unless it is placed in the dark room, a door that allows the solar cell panel to be taken in and out must be provided in the dark room. When the inspection apparatus is configured to be carried into such a dark room, it is necessary to ensure light shielding when the installed door is closed. Moreover, it is necessary to provide the positioning member and conveyance guide member of the solar cell carried in the inspection apparatus in the darkroom. Furthermore, it is necessary to provide an energizing means for passing a current through the solar cell in the darkroom. Such a structure is complicated and expensive.

  In addition, the following problems occur when such an inspection apparatus is incorporated as one apparatus of a solar cell panel production line. When the entire solar cell panel is photographed and inspected by the camera due to an increase in the size of the solar cell panel to be measured, if the camera is provided below the solar cell panel, it is between the solar cell panel and the camera. It is necessary to set a long distance. Therefore, when trying to unify the solar cell pass line (height dimension from the factory floor to the position where the solar panel is transported) on the production line, the factory floor is dug down only at the place where this inspection device is installed. I have to do it. Therefore, the incidental cost when the apparatus is introduced becomes expensive.

  The present invention has been made in view of such circumstances, and provides an inspection device for a solar cell that has a simple structure and is inexpensive, and is an EL device that emits EL by flowing a forward current through the solar cell. It is aimed.

  In order to achieve the above object, a solar cell inspection apparatus according to the present invention includes a dark room having a flat upper surface, a transparent plate provided on the upper surface of the dark room, on which a solar cell to be measured is placed, It is characterized by having a reflection plate provided inside the dark room and inclined with respect to the transparent plate, and a camera for copying an image of an object to be measured reflected on the reflection plate.

  In addition, the inspection apparatus may be configured such that a moving mechanism is provided in the darkroom to move the camera within the darkroom within a plane that intersects the transparent plate.

  Further, a temperature / humidity adjusting device that maintains the temperature and humidity in the darkroom is provided, a configuration in which the reflector supporter can absorb expansion and contraction due to expansion of the reflector, and reflection of the reflector. An automatic cleaning device is provided to clean the surface, and heating means such as a heater for temperature adjustment and heating / cooling of Peltier elements are used on the back surface of the reflecting plate to keep the temperature of the reflecting plate substantially constant. It can also be set as the structure which provided the means, and can be set as the structure which provided the pipe for temperature adjustment which flows the fluid for heat exchange.

  According to the solar cell inspection apparatus of the present invention, when a solar cell to be measured is placed on the transparent plate on the upper surface of the dark room from the outside of the dark room, the camera in the dark room takes an image of the solar cell. be able to. Since current is passed through the solar cell during shooting, the solar cell emits EL light. By photographing this light emission state with a camera and analyzing it with an image processing apparatus connected to the camera, it is possible to know the presence or absence of a solar cell defect.

  The solar cell can be inspected by placing it on the upper surface of the dark room from outside the dark room, and there is no need to provide a door for taking in and out the solar cell as the object to be measured. Therefore, the dark room can be reduced in size and the structure can be simplified. In particular, since the reflecting plate is provided so as to be inclined with respect to the transparent plate, the camera can be disposed on the side surface of the dark room. Therefore, the height of the dark room can be lowered even if the solar cell panel as the object to be measured is enlarged. Thereby, the pass line of a manufacturing line can be unified with the pre-process and post-process of the inspection apparatus of this invention.

Furthermore, in the case of a solar cell panel, in a production line (manufacturing apparatus such as a laminating apparatus), it is conveyed with its light receiving surface facing down. Therefore, the solar cell panel can be placed on the inspection device without being inverted by providing the inspection device of the present invention with a transparent plate on the upper surface of the dark room.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

<1> Object to be measured (solar cell panel)
First, an example of an object to be measured 200 that is an object handled by the inspection apparatus of the present invention will be described. FIG. 6 is an explanatory diagram of the configuration of the solar cell measured by the inspection apparatus of the present invention, (a) is a plan view that describes the solar cells inside the solar cell, and (b) is the plan view. It is sectional drawing.

  As shown in the plan view of FIG. 6 (a), the solar cell panel as the device to be measured 200 forms a string 25 in which a plurality of square solar cells 28 are connected in series by lead wires 29. The string is connected by a plurality of column lead wires 29.

  The solar cell that is the device under test 200 may be a single solar cell 28 or a string 25 in which a plurality of solar cells 28 are linearly connected. It may be a solar cell panel 30 in which the solar cells 28 are arranged in a matrix.

  Further, as shown in FIG. 6B, the cross-sectional structure of the object to be measured is interposed between the back material 22 arranged on the upper side and the transparent cover glass 21 arranged on the lower side through the fillers 23 and 24. It has a configuration in which a plurality of strings 25 are sandwiched.

  For the back material 22, for example, a material such as polyethylene resin is used. For the fillers 23 and 24, for example, EVA resin (polyethylene vinyl acetate resin) or the like is used. The string 25 has a configuration in which the solar cells 28 are connected via the lead wires 29 between the electrodes 26 and 27 as described above.

  Such a solar cell panel is obtained by laminating components by laminating constituent members as described above, applying a pressure under a vacuum heating state by a laminating apparatus, and causing EVA to undergo a crosslinking reaction.

  Moreover, as the DUT 200, a solar cell generally called a thin film type can be targeted.

  In this typical thin-film structure example, a power generation element composed of a transparent electrode, a semiconductor, and a back electrode is previously deposited on a transparent cover glass disposed on the lower side. And, such a thin film type solar cell panel, with a transparent cover glass facing downward, a solar cell element on the glass is covered with a filler, and further, a back material is covered on the filler, It is obtained by laminating in the same way.

  As described above, the thin-film solar cell panel as the DUT 200 is simply changed to a power generating element on which a crystal cell is deposited, and the basic sealing structure is the same as that of the crystal cell described above.

<2> Overall Structure of Inspection Apparatus FIG. 1 is a diagram showing a configuration of an inspection apparatus according to the present invention, where (a) is a plan view, (b) is a front view, and (c) is a right side view. In the solar cell inspection apparatus 100 of the present invention shown in these drawings, a transparent box 112 made of synthetic resin such as acrylic resin or glass is attached to a square box-shaped dark room 110 and a flat upper surface 111 thereof. . In the darkroom, a camera 120 for inspecting and measuring a solar cell as the object to be measured 200 and a moving mechanism 130 are provided on the side surface. However, the moving mechanism 130 of the camera 120 may not be provided depending on the application.

  Except for the transparent plate 112 on the upper surface 111, the dark room 110 is made of a light shielding material that prevents light from entering the dark room 110. Of course, after the solar cell is placed on the upper surface 111 as the device under test 200, the entire upper surface 111 including the device under test 200 may be covered with a light shielding means. The four side surfaces and the bottom surface other than the top surface are all light-shielding members.

  On the upper surface 111, a pair of guide members 114 that guide the conveyance of the DUT 200 is provided. The distance between the guide members 114 and 114 can be changed according to the size of the DUT 200.

<3> Conveyance Guide and Positioning of Measured Object The guide members 114 are elongated rails having a rectangular cross section, and a pair of guide members 114 are provided on the upper surface of the inspection apparatus 100 according to the present invention along the flow direction of the measured object 200. A plurality of rollers 115 are arranged on the inner side surface of each guide member 114, and the object to be measured 200 is moved and conveyed on the rollers 115. Accordingly, the cover glass 21 on the lower surface does not come into contact with the transparent plate 112 on the upper surface of the inspection apparatus 100 while the object to be measured 200 is being conveyed and measured. The guide member 114 can be adjusted in accordance with the width dimension of the object 200 to be measured by the moving rail 116, the feed screw 117, and the handle 118 arranged on the carry-in side and the carry-out side of the object 200 to be measured. It has become. That is, one of the feed screws 117 is a right-hand thread and the other is a left-hand thread. By rotating the handle 118, the guide members 114 and 114 approach and separate from each other with a constant center position. It is like that. Further, the feed screw 117 on the carry-in side and the carry-out side are connected by a cross shaft 113 provided with a bevel gear, and by rotating the handle 118, both the feed screws 117 can be rotated simultaneously by the bevel gear.

  On one side of the conveyance guide 114, there is a positioning bracket 119 that can be taken in and out by an actuator or the like, and the object to be measured 200 is positioned in the conveyance direction by projecting the positioning bracket 119. The positioning bracket 119 is not configured to be taken in and out from the side surface of the guide member 114, but may be configured to be moved up and down from the upper side of the guide member or to be swung down from the guide member.

<4> Camera for Shooting EL light emitted from the DUT 200 is weak light having a wavelength of 1,000 nm to 1,300 nm, and is emitted in a dark room, and the camera 120 for photographing the weak light. . Therefore, it is necessary to use a CCD camera having high sensitivity to weak light as the photographing camera 120.

<5> Camera Movement Mechanism Inside the Dark Room The movement mechanism 130 includes a z-axis guide part 131 and a pair of x-axis guide parts 132 and 132. The camera 120 is attached to the z-axis guide part 131 and can be moved up and down in the z-axis direction. The z-axis guide part 131 can be moved back and forth in the x-axis direction by the x-axis guide part 132.
As the z-axis guide part 131 and the x-axis guide part 132, various linear actuators, a motor and a ball screw mechanism, and the like can be used.

<6> Reflector in Dark Room Inside the dark room, there is a reflector 140 made of aluminum provided to be inclined with respect to the transparent plate 112. The reflecting surface of the reflecting plate 140 is mirror-like and is inclined with respect to the transparent plate 112 so that the camera 120 attached to the side surface of the dark room is placed on the transparent plate 112. An image of the measurement object 200 can be taken. In the embodiment, the inclination angle is approximately 45 °, but is not limited to this angle.

  With the moving mechanism 130, the camera 120 can be moved to an arbitrary position in the z-x plane, and the entire surface of the DUT 200 can be imaged. In the embodiment, the moving mechanism 130 moves the camera 120 in a plane perpendicular to the transparent plate 112, but is not limited to a right angle.

<7> Other devices In addition to the above, although not shown, the power supply 14 and the image processing device 15 using a personal computer shown in the conventional example of FIG. 7 are provided. Furthermore, by using the personal computer, the moving mechanism 130 can be controlled so that the entire solar battery panel as the DUT 200 can be taken as a single photograph or taken for each solar battery cell 28 here. .

<8> Method for Using Inspection Device Using the solar cell panel as an example of the object to be measured 200, a method for using the solar cell inspection device of the present invention will be described.

  The solar cell panel manufactured and carried out by the laminating apparatus or the like is then transported to the front of the solar cell inspection apparatus of the present invention by a conveyor or the like. The conveyed solar cell panel is guided between a pair of guide members 114 and 114 and moves on a roller 115 provided inside the guide member to reach the dark room 110. After that, the positioning member 119 provided so as to be able to be taken in and out by an actuator or the like is projected on the side surface of the guide member 114, thereby positioning in the transport direction.

  Thereafter, light is shielded by a light shielding cover or the like from a gap between the transparent plate 112 and the DUT 200 so that the light does not enter the dark room 110.

  The solar cell panel, which is the object 200 to be measured, reaches a predetermined position in the dark room 110, stops on the transparent plate 112 of the dark room 110 with the transparent cover glass plate facing downward, and is connected to a power source (not shown). Is done. Since the DUT 200 is smaller than the transparent plate 112, light enters the dark room from the surroundings, and therefore, the entire upper surface of the dark room 110 is covered from above the DUT 200 with a light shielding cover described later. Next, a forward current is passed through the device under test 200 from the power source. As a result, the DUT 200 emits EL, and the camera 120 takes a picture.

  When the entire measurement object 200 is photographed by the inspection apparatus 100 and inspected by the image, the camera 120 is moved to the dark room 110, for example, at the position shown in FIG. 1 without using a moving mechanism or without using a moving mechanism. It is possible to shoot with fixing. The measured object 200 in this case is any of the solar battery cell 28, a string 25 in which a plurality of solar cells are connected by lead wires, and a matrix-like solar battery panel 30 in which the strings 25 are connected by a plurality of column lead wires. Good.

  When the inspection apparatus 100 shoots the solar cells arranged in a matrix on the solar cell panel 30 one by one and inspects them with the images, a moving mechanism 130 is necessary so that the camera can be moved in the dark room. .

  The moving mechanism 130 is driven by a control device using a personal computer (not shown), and the camera 120 takes a picture of the solar cells 28 arranged in a matrix on the solar panel 30 one by one and performs image processing including a personal computer. Send image data to the device. The image processing apparatus takes out and analyzes a portion that does not emit light from the image of each solar battery cell, determines pass / fail for each solar battery 28, and determines whether the solar battery panel 30 as a whole from the pass / fail result for all the solar battery cells. Judgment of pass or fail.

  In addition, the photographing by the camera 120 may be performed by moving the camera for each one of the solar cells, or for each of the several solar cells, or may be fixed without moving the camera, and the entire solar cell panel 30 may be used.

  The light shielding cover covers the entire upper part of the upper surface 110 of the dark room. However, in the case of the solar cell panel 30, the resin back material 22 is opaque and has sufficient light shielding properties. Further, the upper surface 111 of the dark room 110 is also made of a light shielding member other than the transparent plate 112. Therefore, it is sufficient to cover only the gap between the upper surface of the dark room 110 and the DUT 200 with the light shielding member. When the DUT 200 is in close contact with the transparent plate 112 and is larger than the transparent plate 112, and the entire transparent plate 112 is covered with the DUT 200, the light shielding means is unnecessary.

  In addition, the following problems occur when the reflector is provided in the dark room 110 and the solar cell panel as the object to be measured is inspected by the camera as in the present invention.

  The ambient temperature around the dark room 110 changes unless the inspection apparatus of the present invention is installed in a temperature-controlled room. Further, since the inside of the dark room 110 is hermetically sealed, when a large number of objects to be measured that have been laminated and heated are repeatedly photographed, the heat is transferred into the dark room 110 and the temperature rises. Due to this temperature rise, the large reflector 140 is thermally expanded. In such a state, if the reflecting plate is fixed with a normal bolt or the like, it will be distorted. Due to the distortion of the reflector, the reflector is warped. Further, since the reflecting plate 140 faces upward, there is a possibility that dust and dirt adhere to it and become dirty and the reflecting surface is fogged. Further, the humidity in the dark room may change, and in this case, condensation may occur on the reflecting surface of the reflecting plate. These problems related to the reflector cause a distortion or unclearness in the captured image of the object 200 to be measured, resulting in a decrease in accuracy of defect inspection of the solar cell panel.

  The present invention also provides a specific means for solving such a problem, and an embodiment thereof will be described below.

  2A and 2B are diagrams showing a configuration for purifying the air in the dark room 110 and maintaining the inside of the dark room 110 at a constant temperature. FIG. 2A is a plan view and FIG. 2B is a front view. A temperature / humidity adjuster 150 (air processor) is provided outside the dark room 110. The temperature / humidity adjuster 150 can keep the temperature and humidity of air constant. A discharge pipe 151 of the temperature / humidity adjuster 150 is connected to one side of the dark room 110, and supplies air from the temperature / humidity adjuster 150 through the filter 152 into the dark room 110. The air cools the inside of the dark room 110, maintains the temperature and humidity constant, passes through the filter 153, is sucked into the suction pipe 154, is collected in the temperature and humidity regulator 150, and circulates. The filter 152 is supplied to the dark room 110 with the dust in the air from the temperature / humidity adjuster 150 removed, and the filter 153 removes the dust from the air in the dark room 110 and sends it to the temperature / humidity adjuster 150. This cleans the air in the dark room 110 and prevents dust from adhering to the reflector 140 and the camera 120.

  In addition, when it is not necessary to keep the greenhouse degree constant only with the dust collection function, filters 152 and 153 may be provided and a dust collector may be installed at the temperature and humidity regulator 150.

  3A and 3B are views showing a state in which an automatic cleaning device 160 for removing dust on the reflection surface of the reflection plate 140 is attached, in which FIG. 3A is a front view and FIG. 3B is a side view. Support frames 161 are fixed on both sides of the reflector 140, and a scraper 162 is installed between the left and right support frames 161. The scraper 162 can move up and down on the support frame 161 by an appropriate moving means such as a linear actuator (not shown) provided on the support frame 161 or the like, and can intermittently clean the reflection plate 140 to remove dust. . In addition, condensation may occur on the reflection plate 140 during cold weather, but condensation can be removed by wiping with the scraper 162. It is desirable that the scraper 162 does not damage the surface of the aluminum reflector 140. As such a thing, the thing which attached the sponge thing to the front-end | tip etc. for a resin board, a thin bristle brush, and dew condensation removal etc. can be considered, for example.

  4A and 4B are diagrams showing a mounting structure of the reflecting plate 140, where FIG. 4A is a front view, and FIG. 4B is a cross-sectional view taken along line AA in FIG. The reflection plate 140 is supported at four corners by four support tools 170 supported on the wall surface of the dark room 110 or the like. By the way, since the size of the reflecting plate 140 is as large as the size of the DUT 200, the thermal expansion occurs even with a slight temperature change. If the four corners are fixed, it appears as a warp, and the shape of the DUT 200 reflected on the reflecting surface is distorted. Therefore, in the support 170, the groove 170a is formed long in the length direction of the reflection plate 140 (the left-right direction in FIG. 4A). As a result, when the reflecting plate 140 expands or contracts, expansion and contraction in the length direction can be absorbed by the groove 170a. Next, absorption of expansion and contraction in the width direction is absorbed by the support 170 being attached to the dark room 110 in a slidable state. Alternatively, the depth of the groove 170a of the upper support 170 may be increased to absorb the expansion and contraction of the reflecting plate 140 in the width direction.

  FIGS. 5A and 5B are diagrams showing another embodiment in which the temperature of the reflecting plate 140 is kept constant, where FIG. 5A is a front view and FIG. 5B is a side view. In this embodiment, a meandering electric heater 180 for temperature adjustment is attached to the back surface of the reflector 140, and a constant current is passed through the electric heater 180 for temperature adjustment to generate heat. The temperature of the reflecting plate 140 is kept constant by heat generated from the electric heater, and deformation and warpage due to thermal expansion can be prevented. Further, as shown in the figure, the electric heater 180 for temperature adjustment is appropriately divided into the longitudinal direction of the reflection plate 140 and attached as a plurality of meandering electric heaters, and when the temperature is individually controlled, the entire reflection plate 140 is the same. This is desirable because it can be kept at temperature. In addition, it is desirable that the electric heater 180 for temperature adjustment is attached to the entire surface of the reflection plate 140 as in the illustrated embodiment, but only the both ends of the reflection plate 140 may be used.

  Further, the electric heater for temperature adjustment in FIG. 5 may be a heating / cooling device such as a Peltier element, or may be configured as a pipe for flowing a temperature adjusting gas or water.

  In the solar cell inspection apparatus 100 of the present invention, since the solar cell as the object to be measured 200 may be placed outside the dark room, a door for taking the object 200 into and out of the dark room becomes unnecessary. Further, the power source and wiring for supplying current to the solar cell may be outside the dark room 110 and is not required at all in the dark room. Therefore, the structure of the dark room 110 can be simplified. In particular, since the reflector 140 is attached to the device under test 200 so as to be inclined, the height of the dark room 110 can be reduced, and the apparatus can be downsized. In addition, incidental work such as digging down the part where the device is installed in order to unify the pass line of the production line becomes unnecessary.

  In addition, the solar cell inspection apparatus 100 of the present invention is used by being disposed on a production line such as a solar cell panel. ing. In a normal processing process such as laminating a solar battery panel, since the light-receiving surface of the solar battery is transported downward, it is not necessary to reverse when placed on the inspection apparatus 100, so that the manufacturing process can be simplified. .

  By providing the temperature inside the dark room 110 with the temperature / humidity adjuster 150 or providing an electric heater 180 for temperature adjustment, the reflector 140 can be kept at a constant temperature to prevent deformation and warpage. Further, by providing the filters 152 and 153 or the automatic cleaning device 160, it is possible to prevent the reflecting surface of the reflecting plate 140 from being soiled and to clearly show the object 200 to be measured. Thereby, the precision of the defect inspection of the solar cell panel can be maintained with high precision.

It is a figure which shows the inspection apparatus of the solar cell of this invention, (a) is a top view, (b) is a front view, (c) is a right view. It is a figure which shows the structure which purifies the air in a dark room, and maintains a dark room at fixed temperature, (a) is a top view, (b) is a front view. It is a figure which shows the state which attached the automatic cleaning apparatus which removes dust to a reflecting plate, (a) is a front view, (b) is a side view. It is a figure which shows the attachment structure of a reflecting plate, (a) is a front view, (b) is the sectional view on the AA line of (a). It is a figure which shows another Example which maintains the temperature of a reflecting plate constant, (a) is a front view, (b) is a side view. It is explanatory drawing of the structure of the solar cell measured with the inspection apparatus of this invention, (a) is the top view described so that the photovoltaic cell inside a solar cell might be understood, (b) is the sectional drawing. . It is a figure which shows typically the structure of the inspection apparatus of the conventional solar cell.

Explanation of symbols

28 Solar cell 30 Solar panel 100 Solar cell inspection device 110 Dark room 111 Upper surface 112 Transparent plate 114 Guide member 115 Roller 116 Moving rail 117 Feed screw 118 Handle 119 Positioning bracket 120 Camera 130 Moving mechanism 140 Reflecting plate 150 Temperature / humidity adjustment Device 160 Automatic cleaning device 162 Scraper 170 (Reflector) support 180 Electric heater for temperature adjustment (or Peltier element, piping)
200 DUT

Claims (7)

  A dark room having a flat upper surface, a transparent plate on the upper surface of the dark room on which a solar cell to be measured is placed, and provided inside the dark room and inclined with respect to the transparent plate An inspection apparatus for a solar cell, comprising: a reflecting plate; and a camera that captures an image of an object to be measured reflected on the reflecting plate.   The solar cell inspection apparatus according to claim 1, wherein a moving mechanism is provided in the darkroom to move the camera within the darkroom within a plane that intersects the transparent plate.   The solar cell inspection apparatus according to claim 1, further comprising a temperature and humidity adjusting device that maintains a constant temperature and humidity in the darkroom.   The solar cell inspection apparatus according to any one of claims 1 to 3, wherein the support for the reflector is configured to absorb expansion and contraction due to expansion of the reflector.   The solar cell inspection device according to claim 1, further comprising an automatic cleaning device that cleans a reflection surface of the reflection plate.   6. The solar cell inspection apparatus according to claim 1, wherein a temperature adjusting device is provided on the back surface of the reflecting plate to keep the temperature of the reflecting plate substantially constant.   6. The sun according to claim 1, further comprising: a temperature adjusting pipe through which a heat exchange fluid flows to maintain a substantially constant temperature of the reflecting plate on a back surface of the reflecting plate. Battery inspection device.

Images