JP2011017626A - Mechanical quantity detection member and mechanical quantity detection apparatus - Google Patents
Mechanical quantity detection member and mechanical quantity detection apparatus Download PDFInfo
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- JP2011017626A JP2011017626A JP2009162599A JP2009162599A JP2011017626A JP 2011017626 A JP2011017626 A JP 2011017626A JP 2009162599 A JP2009162599 A JP 2009162599A JP 2009162599 A JP2009162599 A JP 2009162599A JP 2011017626 A JP2011017626 A JP 2011017626A
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0445—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0447—Position sensing using the local deformation of sensor cells
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04102—Flexible digitiser, i.e. constructional details for allowing the whole digitising part of a device to be flexed or rolled like a sheet of paper
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Abstract
Description
本発明は、変位、力、および加速度などの力学量を静電容量方式で検知する力学量検知部材、及び電子機器等の入力装置として好適な力学量検知装置に関するものである。 The present invention relates to a mechanical quantity detection member that detects a mechanical quantity such as displacement, force, and acceleration by an electrostatic capacity method, and a mechanical quantity detection device suitable as an input device for an electronic device or the like.
従来、電子機器等の一般的な入力装置、すなわち入力ユーザーインターフェース（ＵＩ）としては、キーボードをはじめとして、押しボタンスイッチに代表されるスイッチ類が多く用いられてきた。リモートコントローラやマウスも含めて、スイッチ類の動作は、通常、物理的な接触によってオンかオフかを選択する二者択一の動作である。このようなＵＩは、入力情報が増え選択肢が増えるに従い、ボタンやキー等が増えてしまい、操作性が著しく悪化するのみならず、電子機器のデザインにまで制約を与えることになる。 Conventionally, as a general input device such as an electronic device, that is, an input user interface (UI), switches such as a keyboard and a representative of a push button switch have been used in many cases. The operation of the switches, including the remote controller and the mouse, is usually an alternative operation for selecting on or off by physical contact. In such a UI, as input information increases and choices increase, the number of buttons, keys, and the like increase, which not only significantly deteriorates operability but also restricts the design of electronic devices.
近年、マウス、タッチパッド、およびタッチスクリーン等のポインティングデバイスと、出力ＵＩとの間に連動性をもたせることにより、直感的な操作を可能とするグラフィカルＵＩ（ＧＵＩ）が多く用いられている。 2. Description of the Related Art In recent years, a graphical UI (GUI) that enables intuitive operation by providing a linkage between a pointing device such as a mouse, a touch pad, and a touch screen and an output UI is often used.
マウスには、押しボタンスイッチによるクリック感によって快適な操作感が得られる特徴がある。しかし、マウスを走行させる操作面が必要であるので、操作面を配置できる環境下でないと用いることができない不都合がある。 The mouse has a feature that a comfortable operation feeling can be obtained by a click feeling by a push button switch. However, since an operation surface for running the mouse is necessary, there is a disadvantage that it cannot be used unless the operation surface can be arranged.
タッチパッドやペンタブレット等のタッチセンシングデバイスには、抵抗膜式、静電容量式、および表面弾性波式等の多くの方式が実用化されており、現金自動預け払い機（ＡＴＭ）、各種携帯情報端末、およびカーナビゲーションシステム等に多く搭載されている。しかし、通常のタッチセンシングデバイスでは、１つの操作ポイントにおいて、オンかオフかを選択する二者択一の操作が可能であるのみで、それ以上の複雑な情報処理を行うことは困難である。従って、取り扱う情報が多くなると、タッチ面を２次元的に拡大せざるを得なくなり、スイッチ類と同様、操作性が悪化するとともに、電子機器のデザインに制約を与えることになる。また、タッチセンシングデバイスには、押しボタンスイッチと異なり、クリック感がないので、直感的な取り扱いができず、操作がぎこちなくなりやすい。加えて、視覚障害者による操作や、暗所での手探りでの操作は、非常に困難である。 Many types of touch sensing devices such as touchpads and pen tablets have been put to practical use, such as resistive film type, capacitance type, and surface acoustic wave type. Automatic teller machines (ATMs), various mobile phones, etc. Many are installed in information terminals and car navigation systems. However, with a normal touch sensing device, it is difficult to perform more complicated information processing by only performing an alternative operation of selecting on or off at one operation point. Therefore, if the information to be handled increases, the touch surface must be expanded two-dimensionally, and the operability is deteriorated and the design of the electronic device is restricted as in the case of the switches. Also, unlike a push button switch, a touch sensing device does not have a click feeling, so it cannot be handled intuitively and the operation is likely to be awkward. In addition, operations by visually impaired persons or groping in the dark are very difficult.
二者択一的操作を越えた、より多様な情報入力を可能にするために、入力時の圧力や変位を入力情報として検知することが考えられる。圧力をセンシングする装置としては、抵抗線式やピエゾ式など、多種多様な圧力センサが実用化されており、スイッチングデバイスに圧力センサを備えることによって、入力時の筆圧を反映した入力情報制御を可能とするペン入力装置も登場している。しかし、一般に用いられる圧力センサでは、金属の薄板やプラスチックの薄膜からなるダイアフラムを介して圧力源の圧力を受け、ダイアフラムに加わる圧力またはダイアフラムの変位や変形を変換素子などで検知することによって、圧力を電気信号に変換する。この際、圧力源に影響を与えて圧力が変化してしまわないように、また、圧力と電気信号との間に比例関係などの簡単な関係が成り立つように、ダイアフラムの変形量は小さく抑えられるように設計されている。従って、圧力センサでは、広範囲の圧力を検知することはできるが、変位としては最大で１ｍｍ程度の変位を読み取ることが限界である。また、筆圧をセンシングするには、筆圧が変化しないように、ペンの筆圧を受けとめる筆記面が十分な固さを有することが必要になる。このため、筆圧をセンシングする入力装置では、固い筆記面を固いペンでなぞることになり、操作者が自然で心地よい感触や快適な操作感を得ることは難しい。 In order to make it possible to input more diverse information beyond the alternative operation, it is conceivable to detect pressure and displacement at the time of input as input information. A wide variety of pressure sensors, such as resistance wire type and piezo type, have been put to practical use as pressure sensing devices. By providing a pressure sensor in the switching device, input information control that reflects the writing pressure at the time of input can be performed. Pen input devices that make it possible have also appeared. However, a pressure sensor that is generally used receives pressure from a pressure source through a diaphragm made of a thin metal plate or plastic thin film, and detects the pressure applied to the diaphragm or the displacement or deformation of the diaphragm by a conversion element or the like. Is converted into an electrical signal. At this time, the amount of deformation of the diaphragm can be kept small so that the pressure does not change by affecting the pressure source, and so that a simple relationship such as a proportional relationship is established between the pressure and the electric signal. Designed to be Therefore, the pressure sensor can detect a wide range of pressures, but the maximum displacement is limited to reading a displacement of about 1 mm. Further, in order to sense the writing pressure, it is necessary that the writing surface for receiving the writing pressure of the pen has sufficient hardness so that the writing pressure does not change. For this reason, in an input device that senses writing pressure, a hard writing surface is traced with a hard pen, and it is difficult for the operator to obtain a natural and comfortable feel and a comfortable operation feeling.
一方、変位をセンシングする装置としては、静電容量方式の変位センサがあり、多くの公開特許公報が開示されている。このセンサは、コンデンサの原理を応用した非接触式微小変位センサの１種であり、電極間の距離に反比例して静電容量が変化することを利用して、小さな変位を高精度で測定することができる。静電容量の微小な変化を高精度に検出するためには、周波数変調、振幅変調、位相変調などの方法が採られ、静電容量型変位センサは０．２〜１０ｍｍの変位を１〜１０μｍの精度で検出することができる。 On the other hand, as a device for sensing displacement, there is a capacitance type displacement sensor, and many published patent publications are disclosed. This sensor is a kind of non-contact type micro displacement sensor that applies the principle of capacitor, and measures small displacement with high accuracy by utilizing the fact that capacitance changes in inverse proportion to the distance between electrodes. be able to. In order to detect a minute change in capacitance with high accuracy, methods such as frequency modulation, amplitude modulation, and phase modulation are adopted, and a capacitance type displacement sensor is capable of detecting a displacement of 0.2 to 10 mm to 1 to 10 μm. It is possible to detect with accuracy.
変位センサを応用した入力装置としては、例えば、後述の特許文献１に、パネルに対して作用する力を検出する力検出手段を備えたパネルセンサであって、力の強さの違いに対応して、力検出手段が弱い力を検出する検出部と強い力を検出する検出部とを備えていることを特徴とする、パネルセンサが提案されている。 As an input device to which a displacement sensor is applied, for example, Patent Document 1 described later is a panel sensor provided with a force detection means for detecting a force acting on a panel, and corresponds to a difference in the strength of the force. Thus, a panel sensor has been proposed in which the force detection means includes a detection unit that detects a weak force and a detection unit that detects a strong force.
図７は、このパネルセンサの一例を示す部分断面図である。パネルセンサ１００は、主として、四角形状のパネル１１０と、その四隅に配置されたパネル支持部１２０および力検出手段（力センサ）１３０とで構成されている。パネル１１０に加えられた力はパネル支持部１２０を介して力センサ１３０に伝えられる。図７は、パネルセンサ１００の１つの隅（角）の近傍を示している。 FIG. 7 is a partial cross-sectional view showing an example of this panel sensor. The panel sensor 100 mainly includes a rectangular panel 110, panel support portions 120 and force detection means (force sensors) 130 disposed at the four corners thereof. The force applied to the panel 110 is transmitted to the force sensor 130 via the panel support part 120. FIG. 7 shows the vicinity of one corner (corner) of the panel sensor 100.
力センサ１３０は、ダイアフラム部１３１、電極１３２、基板１３３、内部枠１３４、梁部１３５、固定枠１３６、電極１３７、および支持体１３８を備えている。ダイアフラム部１３１は、伸縮性を有する薄膜１３１ａと、張力を保った状態で薄膜１３１ａを支持する支持部１３１ｂとで構成され、電極１３２とともに基板１３３上に固定されている。薄膜１３１ａには（図示省略した）変位電極が設けられており、変位電極と電極１３２とは第１のコンデンサを形成している。基板１３３は、内部枠１３４、梁部１３５、および固定枠１３６を介して支持体１３８上に配置されている。梁部１３５は、所定の弾性を有する材料からなり、電極１３２と、支持体１３８上の電極１３７とは、第２のコンデンサを形成している。 The force sensor 130 includes a diaphragm portion 131, an electrode 132, a substrate 133, an inner frame 134, a beam portion 135, a fixed frame 136, an electrode 137, and a support body 138. The diaphragm 131 is composed of a stretchable thin film 131 a and a support 131 b that supports the thin film 131 a while maintaining tension, and is fixed on the substrate 133 together with the electrode 132. The thin film 131a is provided with a displacement electrode (not shown), and the displacement electrode and the electrode 132 form a first capacitor. The substrate 133 is disposed on the support body 138 via the internal frame 134, the beam portion 135, and the fixed frame 136. The beam portion 135 is made of a material having a predetermined elasticity, and the electrode 132 and the electrode 137 on the support 138 form a second capacitor.
パネル１１０を押し下げる方向に小さな力が作用する場合には、図７（ｂ）に示すように、薄膜１３１ａが伸張変形し、薄膜１３１ａ上の変位電極が変位する。この変位を、第１のコンデンサの静電容量の変化として検出する。パネル１０１に作用する力が強くなると、薄膜１３１ａと電極１３２との間隔は狭まるので、第１のコンデンサの静電容量は大きくなる。 When a small force is applied in a direction to push down the panel 110, the thin film 131a is stretched and deformed as shown in FIG. 7B, and the displacement electrode on the thin film 131a is displaced. This displacement is detected as a change in the capacitance of the first capacitor. When the force acting on the panel 101 is increased, the distance between the thin film 131a and the electrode 132 is reduced, so that the capacitance of the first capacitor is increased.
パネル１１０に作用する力がさらに強くなると、図７（ｃ）に示すように、薄膜１３１ａと電極１３２とは密着してしまい、第１のコンデンサの静電容量はほとんど変化しない。この場合、梁部１３５がたわむことによって、電極１３２が固定されている基板１３３が図の下向きに変位する。この変位を、第２のコンデンサの静電容量の変化として検出する。 When the force acting on the panel 110 is further increased, as shown in FIG. 7C, the thin film 131a and the electrode 132 are brought into close contact with each other, and the capacitance of the first capacitor hardly changes. In this case, when the beam portion 135 is bent, the substrate 133 to which the electrode 132 is fixed is displaced downward in the drawing. This displacement is detected as a change in the capacitance of the second capacitor.
上述したように、入力時の筆圧を圧力センサでセンシングする入力装置では、固いペンで固い筆記面をなぞることになり、操作者が自然で心地よい感触や快適な操作感を得ることは難しい。 As described above, in an input device that senses the writing pressure at the time of input with a pressure sensor, a hard writing surface is traced with a hard pen, and it is difficult for an operator to obtain a natural and comfortable feeling and a comfortable operational feeling.
入力時の変位を変位センサでセンシングする入力装置では、通常、入力はダイアフラムによって受けとめられ、ダイアフラムの変位が静電容量方式などで検知される。従来の変位センサでは、入力の大きさとダイアフラムの変形量との間に線形性などの単純な関係が成り立つことを重視して、ダイアフラムの材料として比較的硬い材料が用いられ、ダイアフラムの変形量が小さく抑えられるように設計されている。このような変位センサを用いた入力装置では、筆圧をセンシングする入力装置と同様、操作者が自然で心地よい感触や快適な操作感を得ることは難しい。 In an input device that senses displacement at the time of input with a displacement sensor, the input is normally received by a diaphragm, and the displacement of the diaphragm is detected by a capacitance method or the like. In conventional displacement sensors, a relatively hard material is used as the material of the diaphragm, focusing on the fact that a simple relationship such as linearity is established between the magnitude of the input and the amount of deformation of the diaphragm, and the amount of deformation of the diaphragm is small. It is designed to be kept small. In an input device using such a displacement sensor, it is difficult for an operator to obtain a natural and comfortable feeling and a comfortable operation feeling, as in an input device that senses writing pressure.
また、ダイアフラムの変形量が小さく抑えられているので、広い範囲の入力を受けとめるには、特許文献１の例にも見られるように、ダイアフラムを支持する弾性体（特許文献１の例では梁部１３５）が変形する構成とする必要が生じる。このため、入力装置の構造が複雑になり、大型化して、操作性が低下する。 In addition, since the deformation amount of the diaphragm is suppressed to be small, in order to receive a wide range of input, as seen in the example of Patent Document 1, an elastic body that supports the diaphragm (the beam portion in the example of Patent Document 1). 135) needs to be deformed. This complicates the structure of the input device, increases the size, and reduces operability.
本発明の目的は、上記のような実情に鑑み、二者択一的操作を越えた、より多様な情報入力が可能であり、かつ、自然で心地よい感触や快適な操作感が得られ、しかも、小型、簡素で、その操作が使用環境による制約を受けにくく、電子機器の入力装置として好適な力学量検知装置、及びそれを可能にする力学量検知部材を提供することにある。 In view of the above circumstances, the object of the present invention is to allow more diverse information input beyond the alternative operation, and to obtain a natural and comfortable feeling and a comfortable operation feeling. An object of the present invention is to provide a mechanical quantity detection device that is small, simple, and that is less susceptible to restrictions due to the use environment, and that is suitable as an input device for an electronic device, and a mechanical quantity detection member that enables this.
即ち、本発明は、
接触物体による押圧に応じて接触部を含む一部又は全部が変形し、接触物体による押 圧がなくなると元の形状を回復する基体と、
前記基体の表面又は内部に複数個が固定され、そのうちの少なくとも１個は前記基体 の変形部（前記変形に際し変形及び変位する領域）に配置されている変位電極である電 極と、
前記電極に接続された配線と
を有し、
前記変形に際し、前記変位電極は、前記基体から分離することなく、かつ導電性を損 なうことなく、前記変形部の変形及び変位に追従して変形及び変位し、
前記変形部の変形及び変位が、前記電極間の静電容量の変化として検知される
、力学量検知部材に係わる。
That is, the present invention
A base body that recovers the original shape when part or all of the contact portion is deformed in response to the pressing by the contact object and the pressing force by the contact object disappears;
A plurality of electrodes are fixed to the surface or inside of the base, and at least one of them is an electrode that is a displacement electrode disposed in a deformed portion of the base (a region that is deformed and displaced during the deformation);
A wiring connected to the electrode,
In the deformation, the displacement electrode is deformed and displaced following the deformation and displacement of the deformed portion without being separated from the base body and without impairing conductivity.
The present invention relates to a mechanical quantity detection member in which deformation and displacement of the deformation portion are detected as a change in capacitance between the electrodes.
また、
前記力学量検知部材と、
前記配線を介して前記電極に電気的に接続され、前記接触物体による押圧で生じる前 記電極間の静電容量の変化を、電気信号として検出する検出回路部と
を有する、力学量検知装置に係わる。
Also,
The mechanical quantity detection member;
A mechanical quantity detection device having a detection circuit unit that is electrically connected to the electrodes via the wiring and detects a change in capacitance between the electrodes caused by pressing by the contact object as an electric signal. Involved.
本発明の力学量検知部材によれば、前記接触物体による押圧に応じて前記基体の前記変形部の形状が変化すると、前記変形部に固定されている前記変位電極が、前記基体から分離することなく、前記変形部の変形及び変位に追従して変形及び変位する。この変形に際し、前記変位電極の導電性が損なわれることはないので、この変位の大きさに応じて前記変位電極と他の電極との間の静電容量が変化する。この静電容量の変化は、例えば、前記配線を介して接続された静電容量検出回路によって電気信号に変換される。この結果、前記基体の前記変形部の変形及び変位の大きさ、又は、その原因となった前記押圧の大きさが、電気信号などに変換されて検知される。そして、前記接触物体による押圧がなくなると、前記基体は元の形状を回復し、前記変位電極は元の位置に復帰するので、前記電極間の静電容量も元の大きさに戻る。 According to the mechanical quantity detection member of the present invention, when the shape of the deformed portion of the base changes in response to the pressing by the contact object, the displacement electrode fixed to the deformable portion is separated from the base. Instead, it deforms and displaces following the deformation and displacement of the deforming part. In this deformation, the conductivity of the displacement electrode is not impaired, and the capacitance between the displacement electrode and another electrode changes according to the magnitude of the displacement. This change in capacitance is converted into an electric signal by, for example, a capacitance detection circuit connected via the wiring. As a result, the magnitude of the deformation and displacement of the deformed portion of the base body or the magnitude of the pressure that caused the deformation is converted into an electric signal and detected. Then, when the pressure by the contact object disappears, the base body recovers its original shape, and the displacement electrode returns to its original position, so that the capacitance between the electrodes also returns to the original size.
この際、前記接触物体の押し込み量の違い（アナログ量）を情報として区別することができる。また、前記接触物体である手指などは、押し込み量に応じて徐々に増加する前記基体の反発力を感じながら押し込んでいくので、自然で心地よい感触や快適な操作感が得られる。しかも、前記力学量検知部材は、小型で、簡素であり、大きな形状の自由度が得られる。また、別途操作面などを必要としないので、その操作が使用環境による制約を受けにくい。 At this time, the difference (analog amount) in the pressing amount of the contact object can be distinguished as information. Further, since the finger or the like as the contact object is pushed in while feeling the repulsive force of the base that gradually increases according to the push-in amount, a natural and comfortable feeling and a comfortable operation feeling can be obtained. Moreover, the mechanical quantity detection member is small and simple, and a large degree of freedom can be obtained. In addition, since a separate operation surface is not required, the operation is not easily restricted by the use environment.
本発明の力学量検知装置は、本発明の力学量検知部材を用いて構成されているので、上述した効果を得ることができる。この結果、前記接触物体の押し込み量の違い（アナログ量）に応じて、二者択一的操作を越えた、より多様な情報の入力が可能であり、自然で心地よい感触や快適な操作感が得られ、かつ、小型で、簡素であり、その操作が使用環境による制約を受けにくい、電子機器の入力装置などを実現できる。 Since the mechanical quantity detection device of the present invention is configured using the mechanical quantity detection member of the present invention, the above-described effects can be obtained. As a result, it is possible to input more diverse information beyond the alternative operation according to the difference in the amount of pressing of the contact object (analog amount), and a natural and comfortable feeling and a comfortable operation feeling are possible. It is possible to realize an input device for an electronic device that is obtained and is small and simple and whose operation is not easily restricted by the use environment.
本発明の力学量検知部材において、前記基体の位置を区画するように分画された複数の前記電極が、電極ごとに独立した前記配線とともに設けられており、前記接触物体が前記基体を押圧する位置の違いが、前記区画を単位として識別可能であるのがよい。 In the mechanical quantity detection member of the present invention, the plurality of electrodes divided so as to partition the position of the base are provided together with the wiring independent for each electrode, and the contact object presses the base. The difference in position should be identifiable in units of the section.
また、前記電極のうちの少なくとも１つが、前記変位電極に対向する位置に配置されているのがよい。 Moreover, it is preferable that at least one of the electrodes is disposed at a position facing the displacement electrode.
また、前記変位電極と、前記の変位電極に対向配置されている電極との組が、２〜１０組み直列に接続して設けられているのがよい。 Further, it is preferable that 2 to 10 pairs of the displacement electrode and the electrode disposed to face the displacement electrode are connected in series.
また、前記変位電極の材料が、カーボンナノチューブ又は導電性高分子であるのがよい。 The material of the displacement electrode is preferably a carbon nanotube or a conductive polymer.
また、前記接触物体による押圧で生じる前記変位電極の伸縮率が、２００％以上であるのがよい。 Moreover, the expansion / contraction rate of the displacement electrode generated by pressing by the contact object may be 200% or more.
また、前記接触物体による押圧で生じる前記電極間の距離の変化量が、１ｍｍ以上であるのがよい。 Moreover, it is preferable that the amount of change in the distance between the electrodes caused by pressing by the contact object is 1 mm or more.
また、前記基体の材料がエラストマー（弾力性のある高分子物質）であるのがよく、とくに、多孔性のエラストマーであるのがよい。この際、前記基体の材料が、ばね定数が０．１Ｎ／ｍｍ以下の材料であるのがよい。また、前記基体に、カーボンナノチューブが０．０５以下の質量比で添加されているのがよい。 Further, the material of the substrate is preferably an elastomer (elastic polymer substance), and in particular, a porous elastomer is preferable. At this time, the base material is preferably a material having a spring constant of 0.1 N / mm or less. Further, it is preferable that carbon nanotubes are added to the substrate at a mass ratio of 0.05 or less.
また、片手に握って操作できる形状を有するのがよい。 Moreover, it is good to have a shape which can be operated by holding it with one hand.
また、前記基体が、フレキシブル材料からなる密閉容器に、気体、液体、又はゲル状固体が充填されてなる構造体であるのがよい。 Moreover, it is preferable that the base body is a structure in which a sealed container made of a flexible material is filled with a gas, a liquid, or a gel-like solid.
また、前記電極間を占める前記基体の比誘電率が１．１以上であるのがよい。 The relative permittivity of the base occupying between the electrodes may be 1.1 or more.
本発明の力学量検知装置は、他の電子機器とともに用いられ、前記接触物体による押圧の大きさに応じた電気信号を前記他の電子機器に出力する入力装置として構成されているのがよい。 The mechanical quantity detection device of the present invention is preferably used as an input device that is used together with another electronic device and outputs an electric signal corresponding to the magnitude of the pressure applied by the contact object to the other electronic device.
次に、本発明の好ましい実施の形態を図面参照下に具体的に説明する。 Next, a preferred embodiment of the present invention will be specifically described with reference to the drawings.
［実施の形態１］
実施の形態１では、主として、請求項１、３〜１１、１４に記載した力学量検知部材、および請求項１５、１６に記載した力学量検知装置の例について説明する。
[Embodiment 1]
In the first embodiment, examples of the mechanical quantity detection member described in claims 1, 3 to 11, and 14 and the mechanical quantity detection device described in claims 15 and 16 will be mainly described.
図１は、実施の形態１に基づく、平板形入力部材として構成された力学量検知部材１０の構造を示す断面図である。力学量検知部材１０は、基体１、変位電極２、変位電極２に対向配置された電極３、並びに、変位電極２および電極３を形成し、保護するための電極支持体４および５で構成されている。 FIG. 1 is a cross-sectional view showing the structure of a mechanical quantity detection member 10 configured as a flat plate-type input member based on the first embodiment. The mechanical quantity detection member 10 includes a base body 1, a displacement electrode 2, an electrode 3 disposed opposite to the displacement electrode 2, and electrode supports 4 and 5 for forming and protecting the displacement electrode 2 and the electrode 3. ing.
基体１は、エラストマー（弾力性のある高分子物質）からなり、接触物体による押圧の大きさに応じて接触部を含む一部又は全部が変形するが、接触物体による押圧がなくなると元の形状を回復する。変位電極２は、例えばカーボンナノチューブ層からなり、基体１の変形部（基体１の変形に際し変形および変位する領域）に固定されている。カーボンナノチューブには強さとしなやかさがあり、基体１の変形に際し、基体１から分離することなく、かつ、導電性を損なうことなく、変形部の変形および変位に追従して変形および変位する。電極３を配置する位置はとくに限定されるわけではないが、変位電極２に対向する位置であれば、変位電極２と電極３との間に効率よく静電容量が形成されるので好ましい。図１では、変位電極２に対向配置される電極３を１つ示したが、複数個の電極を対向配置してもよい。 The substrate 1 is made of an elastomer (elastic polymer substance), and part or all of the contact portion including the contact portion is deformed depending on the size of the pressure by the contact object. To recover. The displacement electrode 2 is made of, for example, a carbon nanotube layer, and is fixed to a deformed portion of the substrate 1 (a region that is deformed and displaced when the substrate 1 is deformed). Carbon nanotubes have strength and flexibility. When the substrate 1 is deformed, the carbon nanotubes are deformed and displaced following the deformation and displacement of the deformed portion without being separated from the substrate 1 and without impairing conductivity. The position where the electrode 3 is disposed is not particularly limited, but a position facing the displacement electrode 2 is preferable because an electrostatic capacity is efficiently formed between the displacement electrode 2 and the electrode 3. In FIG. 1, one electrode 3 disposed to face the displacement electrode 2 is shown, but a plurality of electrodes may be disposed to face each other.
電極支持体４および５は、変位電極２および電極３を形成したり、保護したりするために設けられているが、機能的には前記基体の一部と見なすべきものである。従って、電極支持体４および５は基体１と同じエラストマーからなるのがよい。そして、接触物体による押圧の大きさに応じて接触部を含む一部又は全部が変形するが、接触物体による押圧がなくなると元の形状を回復する。 The electrode supports 4 and 5 are provided for forming and protecting the displacement electrode 2 and the electrode 3, but should be regarded as a part of the base in terms of function. Therefore, the electrode supports 4 and 5 are preferably made of the same elastomer as the substrate 1. Then, part or all of the contact portion including the contact portion is deformed according to the magnitude of the pressure by the contact object, but the original shape is restored when the pressure by the contact object is lost.
図１（ａ）および（ｂ）に示すように、接触物体による押圧に応じて基体１の形状が変化すると、変形部に固定されている変位電極２が変位するので、この変位の大きさに応じて変位電極２と電極３との間の静電容量がＱａからＱｂへ変化する。この静電容量の変化は、（図示省略した）配線を介して接続された静電容量検出回路によって、電気信号に変換される。この結果、基体１の変形部の変形および変位の大きさ、又は、その原因となった押圧の大きさが、電気信号に変換されて検知される。接触物体による押圧がなくなると、基体１は元の形状を回復し、変位電極２は元の位置に復帰するので、電極間の静電容量も元の大きさに戻る。 As shown in FIGS. 1 (a) and 1 (b), when the shape of the substrate 1 changes in response to the pressing by the contact object, the displacement electrode 2 fixed to the deformed portion is displaced, so that the magnitude of this displacement is increased. Accordingly, the capacitance between the displacement electrode 2 and the electrode 3 changes from Qa to Qb. This change in capacitance is converted into an electrical signal by a capacitance detection circuit connected via wiring (not shown). As a result, the magnitude of the deformation and displacement of the deformed portion of the base body 1 or the magnitude of the pressure that caused the deformation is converted into an electrical signal and detected. When the pressure by the contact object disappears, the base body 1 recovers its original shape, and the displacement electrode 2 returns to its original position, so that the capacitance between the electrodes also returns to its original size.
この際、接触物体の押し込み量（アナログ量）の違いを情報として区別することができるので、力学量検知部材１０を入力手段として用いる力学量検知装置は、二者択一的操作を越えた、より多様な情報の入力が可能な入力装置を実現することができる。また、手指は押し込み量に応じて徐々に増加する基体１の反発力を感じながら押し込んでいくので、自然な押し込み感覚や心地よい感触が感じられる入力が可能となり、直感的で快適な操作が可能な入力装置を実現できる。 At this time, since the difference in the pushing amount (analog amount) of the contact object can be distinguished as information, the mechanical quantity detection device using the mechanical quantity detection member 10 as an input means has exceeded an alternative operation. An input device capable of inputting more various information can be realized. In addition, since the finger is pushed in while feeling the repulsive force of the base body 1 that gradually increases according to the amount of push-in, it is possible to input a natural push-in feeling and a pleasant feel, and an intuitive and comfortable operation is possible. An input device can be realized.
力学量検知部材１０を電子機器への入力装置に応用する場合、接触物体の押し込み量が連続的なアナログ量であるとしても、これをそのまま入力情報として用いることは少ない。例えば、接触物体として手指を用いる場合、前記基体に相当する基体１および電極支持体４から受ける反発力の大きさなどから、押し込み量の違いを容易に２〜５段階程度に区別して感知することができる。この場合、２つ〜５つ程度に明瞭に区分された押し込み量の範囲のそれぞれが１つの入力情報として扱われる。また、押し込み量が連続的なアナログ量として扱われる場合でも、それは、スクロール速度の設定など、厳密な正確性を必要としない用途である。 When the mechanical quantity detection member 10 is applied to an input device to an electronic device, even if the pressing amount of the contact object is a continuous analog quantity, it is rarely used as input information. For example, when a finger is used as the contact object, the difference in the amount of pressing is easily distinguished and sensed in about 2 to 5 stages based on the magnitude of the repulsive force received from the base 1 corresponding to the base and the electrode support 4. Can do. In this case, each of the ranges of the push amount clearly divided into about 2 to 5 is treated as one input information. Even when the push-in amount is treated as a continuous analog amount, it is an application that does not require strict accuracy, such as setting the scroll speed.
本発明の特徴は、上述した観点に立って、前記基体（力学量検知部材１０では基体１および電極支持体４）の大きな変形を好ましく利用する点にある。先述したように、一般的な物理計測に用いられる変位センサにおいては、入力の大きさとダイアフラムの変形量との間に線形性などの単純な関係が成り立つこと、あるいは厳密な再現性が得られることなどを重視して、ダイアフラムの材料として比較的硬い材料が用いられ、ダイアフラムの変形量は小さく抑えられるように設計されている。このような変位センサを入力装置に応用すると、自然で心地よい感触や快適な操作感が得られない原因になる。上述したように、入力装置に応用される変位センサにおいては、入力と出力との間に厳密な線形性や再現性がアナログ的に成り立つことは必要ではない。従って、前記基体が厳密な線形性や再現性が成り立つ範囲をこえて変形することが、許容される。しかも、前記基体の大きな変形を好ましく利用することによって、従来犠牲にされてきた、自然で心地よい感触や快適な操作感が得られることになる。 The feature of the present invention is that, from the viewpoint described above, a large deformation of the base (the base 1 and the electrode support 4 in the mechanical quantity detection member 10) is preferably used. As described above, in a displacement sensor used for general physical measurement, a simple relationship such as linearity is established between the input size and the amount of deformation of the diaphragm, or strict reproducibility is obtained. In consideration of the above, a relatively hard material is used as a material of the diaphragm, and the deformation amount of the diaphragm is designed to be kept small. When such a displacement sensor is applied to an input device, a natural and comfortable touch and a comfortable operation feeling cannot be obtained. As described above, in a displacement sensor applied to an input device, it is not necessary that strict linearity and reproducibility be established in an analog manner between input and output. Therefore, it is allowed that the substrate is deformed beyond the range where strict linearity and reproducibility are established. In addition, by preferably utilizing the large deformation of the base body, a natural and comfortable feeling and a comfortable operation feeling that have been sacrificed in the past can be obtained.
しかも、力学量検知部材１０は、小型で、簡素であり、大きな形状の自由度が得られる。また、別途操作面などを必要としないので、マウスと異なり、その操作が使用環境による制約を受けにくい。 Moreover, the mechanical quantity detection member 10 is small and simple, and a large degree of freedom can be obtained. In addition, since a separate operation surface or the like is not required, unlike a mouse, its operation is not easily restricted by the usage environment.
以上のように、力学量検知部材１０を用いることによって、従来にはなかった、多様な情報の入力が可能で、自然で心地よい感触や快適な操作感が得られ、かつ、小型で、簡素であり、その操作が使用環境による制約を受けにくい、電子機器の入力装置などを実現できる。 As described above, by using the mechanical quantity detection member 10, it is possible to input a variety of information, which has not been possible in the past, and a natural and comfortable feel and a comfortable operation feeling can be obtained, and it is small and simple. In addition, it is possible to realize an input device of an electronic device in which the operation is not easily restricted by the use environment.
なお、力学量検知部材１０では、直接検知される力学量は変位電極２の変位の大きさであるが、その原因となった接触物体による押圧の大きさが間接的に検知されている。また、一定質量のおもりを接触物体として配置しておけば、このおもりに作用する加速度を押圧に変換することができるので、加速度を力学量として検知することもできる。 In the mechanical quantity detection member 10, the mechanical quantity directly detected is the magnitude of the displacement of the displacement electrode 2, but the magnitude of the pressure by the contact object that causes it is indirectly detected. Further, if a weight having a constant mass is arranged as a contact object, the acceleration acting on the weight can be converted into a pressure, and therefore the acceleration can be detected as a mechanical quantity.
また、例えば、基体１が積層体であるような場合には、基体１の内部に埋め込むように、変位電極２とそれに対向配置される電極３との組を２〜１０組み直列に配置するのもよい。このようにすると、形成される各コンデンサにおける電極間の距離が小さくなり、静電容量が増加するので、静電容量の変化の検知が容易になる。 Further, for example, when the substrate 1 is a laminated body, 2 to 10 pairs of the displacement electrode 2 and the electrode 3 arranged to face the displacement electrode 2 are arranged in series so as to be embedded in the substrate 1. Also good. If it does in this way, since the distance between the electrodes in each capacitor to be formed becomes small and the capacitance increases, it becomes easy to detect the change in the capacitance.
変位電極２の材料は、カーボンナノチューブまたは導電性高分子であるのがよい。これらの材料は伸縮性に優れ、かつ伸縮時にその導電特性を保持する。従来の変位センサの電極材料として用いられている金属などの硬い材料は、力学量検知部材１０の変位電極２として必要な性質を満たすことができない。力学量検知部材１０が実現できる理由の１つとして、１２０％以上の伸縮を加えても、引き伸ばされた状態で導通を保持する、カーボンナノチューブなどの新しい電極材料が利用できるようになったことを挙げることができる。 The material of the displacement electrode 2 is preferably a carbon nanotube or a conductive polymer. These materials are excellent in stretchability and retain their conductive properties when stretched. A hard material such as a metal used as an electrode material of a conventional displacement sensor cannot satisfy properties required for the displacement electrode 2 of the mechanical quantity detection member 10. One of the reasons why the mechanical quantity detection member 10 can be realized is that a new electrode material such as a carbon nanotube that can maintain conduction in an expanded state can be used even when 120% or more of expansion / contraction is applied. Can be mentioned.
接触物体による押圧で生じる変位電極２の伸縮率が、２００％以上であるのがよい。例えば、変形部の幅と同程度以上の押し込み量（変位電極２の変位量）を、変形の形状によらず確実に実現するには、２００％程度以上の伸縮率が必要である。 The expansion / contraction rate of the displacement electrode 2 generated by pressing by the contact object is preferably 200% or more. For example, in order to reliably realize a pressing amount (displacement amount of the displacement electrode 2) equal to or greater than the width of the deformed portion regardless of the shape of the deformation, an expansion / contraction rate of approximately 200% or more is required.
接触物体による押圧で生じる電極間の距離の変化量が、１ｍｍ以上であるのがよい。とくに、変位電極２の材料としてカーボンナノチューブ層を利用することによって、ダイアフラム方式やスペーサー方式では実現できない、１ｃｍ以上の変位を可能にすることができるので、変位電極２の材料としてカーボンナノチューブ層を用いるのが好ましい。 The amount of change in the distance between the electrodes caused by pressing by the contact object is preferably 1 mm or more. In particular, by using a carbon nanotube layer as the material of the displacement electrode 2, a displacement of 1 cm or more which cannot be realized by the diaphragm method or the spacer method can be made possible. Therefore, the carbon nanotube layer is used as the material of the displacement electrode 2. Is preferred.
基体１、並びに電極支持体４および５の材料は、エラストマー（弾力性のある高分子物質）であるのがよい。例えば、アクリルゴム、アクリロニトリルブタジエンゴム、イソプレンゴム、ウレタンゴム、エチレンプロピレンゴム、エピクロルヒドリンゴム、スチレンブタジエンゴム、シリコーンゴム、ポリウレタンゴムなどである。とくに、上記材料が、多孔性のエラストマー、例えば、生物海綿質、多孔質ポリマー、発泡成型ゴム、ポリウレタンスポンジ等であるのがよい。エラストマーは、弾性体として例えば、２００％を超える、非常に大きな引っ張り伸び率を示し、かつ、優れた引っ張り強度および収縮率を有するので好ましい。また、多孔性のエラストマーは、多数の空隙をもった状態で形状が安定しており、かつ、外圧が加わると空隙の体積を減少させることによって体積を著しく減少させることのできる材料であり、力学量検知部材１０の基体１、並びに電極支持体４および５の材料として最適である。 The material of the substrate 1 and the electrode supports 4 and 5 is preferably an elastomer (elastic polymer substance). For example, acrylic rubber, acrylonitrile butadiene rubber, isoprene rubber, urethane rubber, ethylene propylene rubber, epichlorohydrin rubber, styrene butadiene rubber, silicone rubber, polyurethane rubber and the like. In particular, the material may be a porous elastomer, such as a biosponge, a porous polymer, a foamed rubber, a polyurethane sponge, or the like. An elastomer is preferable as an elastic body, for example, because it exhibits a very high tensile elongation exceeding 200% and has an excellent tensile strength and shrinkage. Porous elastomer is a material that has a stable shape with a large number of voids, and can reduce the volume significantly by reducing the void volume when external pressure is applied. It is optimal as a material for the substrate 1 and the electrode supports 4 and 5 of the quantity detection member 10.
この際、基体１、並びに電極支持体４および５の材料は、ばね定数が０．１Ｎ／ｍｍ以下の材料であるのがよい。これらの材料のばね定数が小さいほど、力学量検知部材１０を操作する際に加える力は小さくて済む。例えば、人間の指先などで操作する場合を考えると、指先の力が最大で１Ｎ程度であるとすると、押し込み部のばね定数が０．１Ｎ／ｍｍ以下であれば、指先のわずかな力で１ｍｍ以上の大きな変位が得られるので、望ましいと考えられる。 At this time, the material of the substrate 1 and the electrode supports 4 and 5 is preferably a material having a spring constant of 0.1 N / mm or less. The smaller the spring constant of these materials, the smaller the force applied when operating the mechanical quantity detection member 10. For example, considering the case of operating with a human fingertip or the like, if the fingertip force is about 1 N at the maximum, if the spring constant of the push-in portion is 0.1 N / mm or less, 1 mm with a slight fingertip force Since the above large displacement is obtained, it is considered desirable.
また、基体１、並びに電極支持体４および５に、カーボンナノチューブが０．０５以下の質量比で添加されているのがよい。概算すると、カーボンナノチューブの添加量が質量比で０．０５以下であれば、カーボンナノチューブ同士の接触によって伝導パスが生じることはない。この範囲でカーボンナノチューブを添加することによって、カーボンナノチューブの局所的な分極効果の積算によって、基体１、並びに電極支持体４および５における誘電率を実効的に高めることができる。 In addition, carbon nanotubes are preferably added to the substrate 1 and the electrode supports 4 and 5 at a mass ratio of 0.05 or less. As a rough estimate, if the added amount of carbon nanotubes is 0.05 or less in mass ratio, a conduction path will not occur due to contact between the carbon nanotubes. By adding carbon nanotubes within this range, the dielectric constant of the substrate 1 and the electrode supports 4 and 5 can be effectively increased by integrating the local polarization effects of the carbon nanotubes.
基体１の比誘電率は、とくに限定されるものではない。後に示す実施の形態４のように、変位電極４２とこれに対向する電極４３との間を占める基体４１が気体である場合には、基体４１の比誘電率はほぼ１である。ただし、力学量検知部材１０の検出感度を高くするには、変位電極２と電極３との間の静電容量が大きいことが望ましく、このためには基体１の比誘電率は高いほどよい。基体１の比誘電率が１．１以上であると、容易に検出可能な静電容量を確保できるので好ましい。例えば、変位電極２と電極３が直径１２ｍｍの円形で、電極間距離が１０ｍｍ、基体１の比誘電率が１．１であるとすると、静電容量は０．１１ｐＦとなる。これは、静電容量検出回路で容易に読み取ることのできる静電容量のしきい値にほぼ等しい。 The relative dielectric constant of the substrate 1 is not particularly limited. When the substrate 41 occupying the space between the displacement electrode 42 and the electrode 43 facing the displacement electrode 42 is a gas as in the fourth embodiment described later, the relative dielectric constant of the substrate 41 is approximately 1. However, in order to increase the detection sensitivity of the mechanical quantity detection member 10, it is desirable that the capacitance between the displacement electrode 2 and the electrode 3 is large. For this purpose, the higher the relative dielectric constant of the substrate 1 is better. It is preferable that the relative dielectric constant of the substrate 1 is 1.1 or more because a readily detectable capacitance can be secured. For example, if the displacement electrode 2 and the electrode 3 are circular having a diameter of 12 mm, the distance between the electrodes is 10 mm, and the relative permittivity of the substrate 1 is 1.1, the capacitance is 0.11 pF. This is almost equal to the threshold value of the capacitance that can be easily read by the capacitance detection circuit.
本実施の形態に基づく力学量検知装置は、力学量検知部材１０と、（図示省略した）配線を介して電極２および３に電気的に接続され、接触物体による押圧で生じる電極間の静電容量の変化を、電気信号として検出する検出回路部とを有する。この力学量検知装置は、他の電子機器とともに用いられ、接触物体による押圧の大きさに応じた電気信号を他の電子機器に出力する入力装置として構成されているのがよい。 The mechanical quantity detection device based on the present embodiment is electrically connected to the mechanical quantity detection member 10 and the electrodes 2 and 3 via a wiring (not shown), and electrostatic between the electrodes generated by pressing by a contact object. A detection circuit unit that detects a change in capacitance as an electrical signal. This mechanical quantity detection device is preferably used as an input device that is used together with another electronic device and outputs an electrical signal corresponding to the magnitude of pressing by the contact object to the other electronic device.
静電容量の変化を検出する検出回路部としては、市販の一般的な静電容量測定装置を用いることができる。図２は、静電容量検出装置の一例を示す説明図（ブロック図）である。この装置では、基準容量ＣMODに基づいて未知容量ＣXの大きさが決定される。すなわち、ＶDDが一定電圧に保たれた状態で、Oscillator回路と16bit-PRS(Pseudo Random Sequence)回路とによって、ＳＷ1とＳＷ2とが交互に切り換えて開閉される。ＳＷ1がオンの間に未知容量ＣXが電圧ＶDDに充電され、ＳＷ2がオンになると未知容量ＣXに充電された電荷の一部が基準容量ＣMODにゆずり渡され、未知容量ＣXと基準容量ＣMODとが同電圧になる。ＳＷ1およびＳＷ2の開閉の度ごとにこの動作が繰り返され、基準容量ＣMODの電圧が徐々に上昇する。基準容量ＣMODの電圧が基準電圧ＶREFを上回ると、それがComparatorによって検出され、このときまでに繰り返された開閉動作の回数がData Processing回路へ送られる。Data Processing回路では、この開閉動作の回数に基づいて未知容量ＣXの大きさが決定される。また、Comparatorの出力によって短期間ＳＷ3がオンになり、ＣMODに蓄積された電荷が放電され、ＣMODはリフレッシュされる。以上の動作を繰り返し、未知容量ＣXの大きさが断続的に測定される。 A commercially available general capacitance measuring device can be used as a detection circuit unit for detecting a change in capacitance. FIG. 2 is an explanatory diagram (block diagram) illustrating an example of a capacitance detection device. In this apparatus, the size of the unknown capacitance C X is determined based on the reference capacitance C MOD . That is, while V DD is maintained at a constant voltage, SW1 and SW2 are alternately switched and opened and closed by an Oscillator circuit and a 16 bit-PRS (Pseudo Random Sequence) circuit. SW1 is unknown capacitance C X is charged to a voltage V DD during the on, SW2 part of electric charge charged in the unknown capacitance C X when turned on is passed inheritance to reference capacitor C MOD, and the unknown capacitance C X The reference capacitor C MOD becomes the same voltage. This operation is repeated each time SW1 and SW2 are opened and closed, and the voltage of the reference capacitor CMOD gradually increases. When the voltage of the reference capacitor C MOD exceeds the reference voltage V REF , this is detected by the comparator, and the number of opening / closing operations repeated so far is sent to the data processing circuit. In the data processing circuit, the size of the unknown capacitor C X is determined based on the number of times of the opening / closing operation. Moreover, short-term SW3 by the output of the Comparator is turned on, charges accumulated in the C MOD is discharged, C MOD is refreshed. The above operation is repeated, and the magnitude of the unknown capacitance C X is intermittently measured.
［実施の形態２］
実施の形態２では、主として、請求項２に記載した力学量検知部材の例について説明する。
[Embodiment 2]
In the second embodiment, an example of a mechanical quantity detection member described in claim 2 will be mainly described.
図３は、実施の形態２に基づく、平板形入力部材として構成された力学量検知部材２０の構造を示す断面図である。力学量検知部材２０は、基体１、変位電極２２Ａ〜２２Ｃ、変位電極２２Ａ〜２２Ｃにそれぞれ対向配置された電極２３Ａ〜２３Ｃ、並びに、変位電極２２および電極２３を形成するための電極支持体４および５で構成されている。 FIG. 3 is a cross-sectional view showing the structure of the mechanical quantity detection member 20 configured as a flat plate-type input member based on the second embodiment. The mechanical quantity detection member 20 includes a base 1, displacement electrodes 22 </ b> A to 22 </ b> C, electrodes 23 </ b> A to 23 </ b> C arranged to face the displacement electrodes 22 </ b> A to 22 </ b> C, an electrode support 4 for forming the displacement electrode 22 and the electrode 23, and 5 is comprised.
力学量検知部材２０が、実施の形態１の力学量検知部材１０と異なる点は、基体１上の、接触物体によって押圧する位置の違いに対応して、基体１の位置を区画するように分画された複数の変位電極２２Ａ〜２２Ｃが、対向配置された電極２３Ａ〜２３Ｃ、および（図示省略した）電極ごとに独立した配線とともに設けられており、押圧位置の違いが区画を単位として識別可能であることである。 The mechanical quantity detection member 20 is different from the mechanical quantity detection member 10 of the first embodiment in that the position of the base body 1 is divided in accordance with the difference in the position pressed by the contact object on the base body 1. A plurality of defined displacement electrodes 22A to 22C are provided together with electrodes 23A to 23C opposed to each other and independent wiring for each electrode (not shown), and the difference in pressing position can be identified in units of sections. It is to be.
変位電極２２Ａ〜２２Ｃおよび電極２３Ａ〜２３Ｃは、例えば、電極切り換え回路によって時分割的に繰り返し選択される。すなわち、変位電極２２Ａと電極２３Ａ、変位電極２２Ｂと電極２３Ｂ、および変位電極２２Ｃと電極２３Ｃの各組みは、１サイクルの間にある期間だけ、順次交代して、静電容量検出回路に接続され、このサイクルが短い周期で高速に繰り返される。 The displacement electrodes 22A to 22C and the electrodes 23A to 23C are repeatedly selected in a time division manner by, for example, an electrode switching circuit. That is, the displacement electrode 22A and the electrode 23A, the displacement electrode 22B and the electrode 23B, and the displacement electrode 22C and the electrode 23C are alternately connected to the capacitance detection circuit for a certain period during one cycle. This cycle is repeated at high speed with a short period.
例えば、図３（ｂ）に示すように、接触物体が、基体１の面の、変位電極２２Ｂが配置されている位置を押圧すると、変位電極２２Ｂが変形および変位して、変位電極２２Ｂと対向配置された電極２３Ｂとの間の静電容量が変化する。この静電容量の変化は、配線２４および２５を介して静電容量変化検出回路２６に伝えられ、電気信号に変換して感知される。 For example, as shown in FIG. 3B, when the contact object presses the position on the surface of the substrate 1 where the displacement electrode 22B is disposed, the displacement electrode 22B is deformed and displaced to face the displacement electrode 22B. The capacitance between the arranged electrode 23B changes. This change in capacitance is transmitted to the capacitance change detection circuit 26 via the wirings 24 and 25, and is converted into an electric signal and sensed.
力学量検知部材２０の変位電極２２Ａ〜２２Ｃを構成するカーボンナノチューブ層は、後に実施例２で説明するように、成膜後にエッチングで不要部を除去するか、成膜前に電極支持体４の面の一部にマスキングを施すことで、パターニングすることができる。あるいは、印刷法を用いてもよい。エッチングは、例えば、機械的な切削除去またはレーザーエッチングで施すことができる。 The carbon nanotube layers constituting the displacement electrodes 22A to 22C of the mechanical quantity detection member 20 may be removed by etching after film formation as described later in Example 2, or may be removed from the electrode support 4 before film formation. Patterning can be performed by masking a part of the surface. Alternatively, a printing method may be used. The etching can be performed by, for example, mechanical cutting or laser etching.
力学量検知部材２０を備えた力学量検知装置は、押圧する位置の違いによって、異なる指示を電子機器に出力するように構成される。例えば、変位電極２２Ａの押し込みにより意思決定、感情を表現し、変位電極２２Ｂを前後左右に押し込むことによりドラッグを指示し、変位電極２２Ｃの押し込みにより複数の項目から選択する等である。 The mechanical quantity detection device including the mechanical quantity detection member 20 is configured to output different instructions to the electronic device depending on the difference in the pressing position. For example, decision making and emotion are expressed by pressing the displacement electrode 22A, dragging is indicated by pressing the displacement electrode 22B forward, backward, left, and right, and selection from a plurality of items is performed by pressing the displacement electrode 22C.
［実施の形態３］
実施の形態３では、主として、請求項１２に記載した力学量検知部材の例について説明する。
[Embodiment 3]
In the third embodiment, an example of a mechanical quantity detection member described in claim 12 will be mainly described.
図４は、実施の形態３に基づく、円筒形入力部材として構成された力学量検知部材３０の構造を示す斜視図である。この力学量検知部材３０は、片手に握って操作するハンドヘルド型入力部材として用いることができる。 FIG. 4 is a perspective view showing the structure of the mechanical quantity detection member 30 configured as a cylindrical input member based on the third embodiment. The mechanical quantity detection member 30 can be used as a hand-held input member that is operated with a single hand.
力学量検知部材３０では、円筒形基体３１の円筒の外周表面部に（図示省略した）単数または複数の変位電極が配置されており、これらに対向して円筒形基体３１の内部に電極３３が配置されている。 In the mechanical quantity detection member 30, one or a plurality of displacement electrodes (not shown) are disposed on the outer peripheral surface portion of the cylinder of the cylindrical base 31, and the electrode 33 is disposed inside the cylindrical base 31 so as to face them. Has been placed.
力学量検知部材３０を備えた力学量検知装置は、握る位置の違いによって、異なる指示を電子機器に出力するように構成される。例えば、親指の押し込みにより意思決定、感情を表現し、人差し指を前後左右に押し込むことにより、ドラッグを指示し、中指の押し込みにより複数の項目から選択する等である。また、握りの強弱で、例えばスクロールの速度を変化させることができる。 The mechanical quantity detection device including the mechanical quantity detection member 30 is configured to output different instructions to the electronic device depending on the difference in the grip position. For example, decision making and emotion are expressed by pressing the thumb, dragging is indicated by pressing the index finger forward, backward, left and right, and selection from a plurality of items is performed by pressing the middle finger. Further, for example, the scrolling speed can be changed by the grip strength.
力学量検知部材３０は、円筒形基体３１の触感によって自然で心地よい感触が得られ、握りの強弱で、二者択一的操作を越えた、より多くの情報入力が可能であり、マウスと同等以上の機能と快適な操作感を得ることができる。しかも、片手に握って操作することができるので、マウスを走行させる操作面が必要なマウスと異なり、その操作が使用環境による制約を受けにくい。 The mechanical quantity detection member 30 has a natural and comfortable feeling due to the tactile sensation of the cylindrical base 31, and can input more information beyond the alternative operation with a grip strength, equivalent to a mouse. The above functions and a comfortable operation feeling can be obtained. In addition, since it can be operated by holding it with one hand, unlike a mouse that requires an operation surface for running the mouse, the operation is not easily restricted by the use environment.
［実施の形態４］
実施の形態４では、主として、請求項１３に記載した力学量検知部材の例について説明する。
[Embodiment 4]
In the fourth embodiment, an example of a mechanical quantity detection member described in claim 13 will be mainly described.
図５は、実施の形態４に基づく、球形入力部材として構成された力学量検知部材４０の構造を示す説明図である。力学量検知部材４０では、基体４１が、フレキシブル材料からなる密閉容器に気体、液体、又はゲル状固体が充填されてなる構造体である。そして、基体４１の表面に変位電極４２が配置され、基体４１の内部に表面に変位電極４２に対向して電極４３が配置されている。 FIG. 5 is an explanatory diagram showing the structure of a mechanical quantity detection member 40 configured as a spherical input member based on the fourth embodiment. In the mechanical quantity detection member 40, the base body 41 is a structure in which a sealed container made of a flexible material is filled with a gas, a liquid, or a gel-like solid. A displacement electrode 42 is disposed on the surface of the base body 41, and an electrode 43 is disposed on the surface of the base body 41 so as to face the displacement electrode 42.
接触物体による押圧によって基体４１の形状が変化し、これによって変位電極４２が変位するので、このときの変位電極４２と電極４３との間の静電容量の変化を検出する。 Since the shape of the base body 41 is changed by the pressing by the contact object, and the displacement electrode 42 is displaced thereby, a change in the capacitance between the displacement electrode 42 and the electrode 43 at this time is detected.
本発明の実施例では、実施の形態１および２でそれぞれ説明した、力学量検知部材１０および２０を作製した例について説明する。 In the examples of the present invention, examples in which the mechanical quantity detection members 10 and 20 described in the first and second embodiments are manufactured will be described.
実施例１では、実施の形態１で説明した、平板形入力部材として構成された力学量検知部材１０を作製した例について説明する。 In Example 1, an example in which the mechanical quantity detection member 10 configured as a flat plate input member described in the first embodiment is manufactured will be described.
＜１．電極支持体４および５の作製＞
まず、エラストマー（商品名 sylgard184；DOW CORNING社製）のベース剤と硬化剤とを質量比１５：１の比率で混合し、混合物を直径３インチ、深さ１．２ｍｍの金型に入れ、８５℃に１００分間保持した。
<1. Production of electrode supports 4 and 5>
First, a base agent of an elastomer (trade name sylgard184; manufactured by DOW CORNING) and a curing agent are mixed at a mass ratio of 15: 1, and the mixture is put into a mold having a diameter of 3 inches and a depth of 1.2 mm. Hold at 100 ° C. for 100 minutes.
＜２．変位電極２および電極３の作製＞
次に、ドデシルベンゼンスルホン酸ナトリウム（ＳＤＢＳ；Ｃ12Ｈ25Ｃ6Ｈ4ＳＯ3Ｎa）の１質量％水溶液中に、カーボンナノチューブを０．４ｇ／ｌの濃度で添加し、超音波式ホモジナイザーを用いて出力５０Ｗで５分間ホモジナイズ処理を行い、分散液を作製した。電極支持体４および５上にこの分散液をそれぞれ０．５ｍｌずつ配し、これをギャップ長５００μｍのアプリケーター用バーを用いて電極支持体４および５の全面に広げ、薄い塗膜を形成した。この時、電極支持体４および５全体を３０〜７０℃の温度範囲に保持してもよい。以上の成膜工程を１０回繰り返すことにより、表面抵抗値が５００Ω／□のカーボンナノチューブ層を変位電極２および電極３として得た。変位電極２および電極３がそれぞれ形成された電極支持体４および５を流水にて１０分間洗浄した。
<2. Production of displacement electrode 2 and electrode 3>
Next, carbon nanotubes were added at a concentration of 0.4 g / l to a 1% by mass aqueous solution of sodium dodecylbenzenesulfonate (SDBS; C 12 H 25 C 6 H 4 SO 3 Na), and an ultrasonic homogenizer was added. And a homogenization treatment was performed at an output of 50 W for 5 minutes to prepare a dispersion. 0.5 ml of this dispersion was placed on each of the electrode supports 4 and 5 and spread over the entire surface of the electrode supports 4 and 5 using an applicator bar having a gap length of 500 μm to form a thin coating film. At this time, you may hold | maintain the electrode support bodies 4 and 5 whole in the temperature range of 30-70 degreeC. By repeating the above film forming process 10 times, carbon nanotube layers having a surface resistance value of 500Ω / □ were obtained as the displacement electrode 2 and the electrode 3. The electrode supports 4 and 5 on which the displacement electrode 2 and the electrode 3 were formed were washed with running water for 10 minutes.
＜３．基体１の作製＞
次に、エラストマー（商品名 sylgard184；DOW CORNING社製）のベース剤と硬化剤とを質量比１５：１の比率で混合し、混合物を直径３インチ、深さ２５ｍｍの金型に入れ、８５℃に１００分間保持し、基体１を作製した。
<3. Production of substrate 1>
Next, a base agent of an elastomer (trade name sylgard184; manufactured by DOW CORNING) and a curing agent are mixed at a mass ratio of 15: 1, and the mixture is put into a mold having a diameter of 3 inches and a depth of 25 mm, and 85 ° C. The substrate 1 was produced by holding for 100 minutes.
＜４．力学量検知部材１０の作製＞
次に、基体１を挟んで変位電極２および電極３が対向するように電極支持体４および５を配置し、基体１と変位電極２および電極３とを８０℃で熱圧着させ、サンドイッチ構造を形成した。続いて、銀を主材料とする導電ペーストを用いて、変位電極２および電極３に配線を形成し、力学量検知部材１０を作製した。
<4. Production of Mechanical Quantity Detection Member 10>
Next, the electrode supports 4 and 5 are arranged so that the displacement electrode 2 and the electrode 3 face each other with the substrate 1 interposed therebetween, and the substrate 1, the displacement electrode 2 and the electrode 3 are thermocompression bonded at 80 ° C. Formed. Subsequently, wiring was formed on the displacement electrode 2 and the electrode 3 using a conductive paste mainly composed of silver, and the mechanical quantity detection member 10 was produced.
＜５．押し込みセンシング＞
力学量検知部材１０の配線を静電容量検出回路に接続した。静電容量検出回路としては市販の各種回路を用いることができる。力学量検知部材１０の電極支持体４に指等を押し当て、その押圧を増しながら指等を基体１側へ押し込むことにより、変位電極２と電極３との間の静電容量の変化を測定した。
<5. Push-in sensing>
The wiring of the mechanical quantity detection member 10 was connected to the capacitance detection circuit. Various commercially available circuits can be used as the capacitance detection circuit. Measuring a change in capacitance between the displacement electrode 2 and the electrode 3 by pressing the finger or the like against the electrode support 4 of the mechanical quantity detection member 10 and pushing the finger or the like toward the base 1 while increasing the pressure. did.
図６（ａ）は、実施例１で得られた力学量検知部材１０における、電極間距離ｄと静電容量Ｃとの関係を示すグラフである。一般的なコンデンサと同様、静電容量Ｃは電極間距離ｄにほぼ反比例して変化するので、電極変位に対して連続的な入力が可能である。 FIG. 6A is a graph showing the relationship between the inter-electrode distance d and the capacitance C in the mechanical quantity detection member 10 obtained in Example 1. FIG. Similar to a general capacitor, the capacitance C changes in inverse proportion to the inter-electrode distance d, so that continuous input can be made with respect to electrode displacement.
図６（ｂ）は、繰り返し変位を与えた後の変位電極２の断面の、透過電子顕微鏡（ＴＥＭ）による観察像である。カーボンナノチューブが撓んだ状態ながらも、カーボンナノチューブ同士が膜としてのつながりを保持している。このように、カーボンナノチューブ層からなる変位電極２では、元の形状に戻れなくなるほどの変形を受けても、導電性が損なわれていないことがわかる。 FIG. 6B is an observation image by a transmission electron microscope (TEM) of the cross section of the displacement electrode 2 after repeated displacement. While the carbon nanotubes are bent, the carbon nanotubes maintain the connection as a film. Thus, it can be seen that the displacement electrode 2 composed of the carbon nanotube layer does not impair the conductivity even if it is deformed so that it cannot return to its original shape.
実施例２では、実施の形態２で図３を用いて説明した、平板形ハンドヘルド入力部材として構成された力学量検知部材２０を作製した例について説明する。 In Example 2, an example in which the mechanical quantity detection member 20 configured as a flat plate-type handheld input member described in Embodiment 2 with reference to FIG. 3 is manufactured will be described.
＜１．変位電極１２および電極１３の作製＞
ジメチルホルムアミドにカーボンナノチューブを０．５ｇ／ｌの濃度で添加し、超音波式ホモジナイザーにて出力５０Ｗで５分間ホモジナイズ処理を行って分散液を作製した。得られた分散液をポリエチレンテレフタラート製の網（孔径５０μｍ）を通して吸引ろ過を行い、５００Ω／□の表面抵抗値を持ったカーボンナノチューブ薄膜を形成した。基体１である、長さ５ｃｍ、幅３ｃｍ、厚さ３ｃｍのポリウレタン製スポンジの上面および下面にカーボンナノチューブ薄膜を転写成型して、変位電極２２およびこれに対向する電極２３を形成した。
<1. Production of Displacement Electrode 12 and Electrode 13>
Carbon nanotubes were added to dimethylformamide at a concentration of 0.5 g / l and homogenized with an ultrasonic homogenizer at an output of 50 W for 5 minutes to prepare a dispersion. The obtained dispersion was subjected to suction filtration through a polyethylene terephthalate network (pore diameter: 50 μm) to form a carbon nanotube thin film having a surface resistance value of 500Ω / □. A carbon nanotube thin film was transferred and formed on the upper surface and the lower surface of a polyurethane sponge having a length of 5 cm, a width of 3 cm, and a thickness of 3 cm, which was the substrate 1, to form a displacement electrode 22 and an electrode 23 opposite thereto.
＜２．電極のパターニング＞
ＹＶＯ4半導体レーザー光（波長 １０６４ｎｍ）を照射し、カーボンナノチューブ層を選択的にエッチング除去して、変位電極２２Ａ〜２２Ｅおよび電極２３Ａ〜２３Ｅのパターンを作製し、５つのドメインをもつ電極構造を形成した（図３では、変位電極２２Ｄ、２２Ｅおよび電極２３Ｄ、２３Ｅは図示省略されている。）。ＹＶＯ４半導体レーザー光源装置として、キーエンス社製レーザーマーカーＭＤ−Ｖ９９００（平均光出力 １３Ｗ）を用いた。この装置では、レーザー光を直径約１０μｍのスポットサイズに集光できる。
<2. Electrode patterning>
YVO 4 semiconductor laser light (wavelength 1064 nm) is irradiated, the carbon nanotube layer is selectively removed by etching, and patterns of the displacement electrodes 22A to 22E and electrodes 23A to 23E are produced to form an electrode structure having five domains. (In FIG. 3, the displacement electrodes 22D and 22E and the electrodes 23D and 23E are not shown). As a YVO4 semiconductor laser light source device, a laser marker MD-V9900 (average light output 13 W) manufactured by Keyence Corporation was used. In this apparatus, the laser beam can be condensed to a spot size having a diameter of about 10 μm.
＜３．押し込みセンシング＞
力学量検知部材２０の配線を各電極構造に対応した静電容量検出回路に接続した。上記の５つのドメインを各手指に対応させ、手を握ることで基体１であるスポンジに変位を加えた。力学量検知部材２０の変位電極２２Ａ〜２２Ｅに指等を押し当て、その押圧を増しながら指等を基体１側へ押し込むことにより、変位電極２２および電極２３との間の静電容量の変化を測定した。
<3. Push-in sensing>
The wiring of the mechanical quantity detection member 20 was connected to a capacitance detection circuit corresponding to each electrode structure. The above five domains were made to correspond to the fingers, and displacement was applied to the sponge as the base 1 by grasping the hand. By pressing a finger or the like against the displacement electrodes 22 </ b> A to 22 </ b> E of the mechanical quantity detection member 20 and pushing the finger or the like toward the base 1 while increasing the pressure, the change in the capacitance between the displacement electrode 22 and the electrode 23 is changed. It was measured.
以上、本発明を実施の形態および実施例に基づいて説明したが、本発明はこれらの例に何ら限定されるものではなく、発明の主旨を逸脱しない範囲で適宜変更可能であることは言うまでもない。 Although the present invention has been described based on the embodiments and examples, it is needless to say that the present invention is not limited to these examples and can be appropriately changed without departing from the gist of the invention. .
本発明によって、タッチパネルなどの静電容量式タッチ検出装置の形状自由度および生産性は飛躍的に向上し、利用できる製品領域も格段に広がると予想される。 According to the present invention, it is expected that the degree of freedom in shape and productivity of a capacitive touch detection device such as a touch panel will be greatly improved, and the usable product area will be greatly expanded.
１…基体、２…変位電極、３…対向配置された電極、４、５…電極支持体、
１０…力学量検知部材、２０…力学量検知部材、２２Ａ〜２２Ｃ…変位電極、
２３Ａ〜２３Ｃ…対向配置された電極、２４、２５…配線、２６…静電容量検出回路、
３０…力学量検知部材、３１…基体、３２…変位電極、３３…対向配置された電極、
３０…力学量検知部材、３１…基体、３３…対向配置された電極、
４０…力学量検知部材、４１…基体、４２…変位電極、４３…対向配置された電極、
１００…パネルセンサ、１１０…パネル、１２０…パネル支持部、
１３０…力検出手段（力センサ）、１３１…ダイアフラム部、１３１ａ…薄膜、
１３１ｂ…支持部、１３２…電極、１３３…基板、１３４…内部枠、１３５…梁部、
１３６…固定枠、１３７…電極、１３８…支持体
DESCRIPTION OF SYMBOLS 1 ... Base | substrate, 2 ... Displacement electrode, 3 ... Electrode arranged oppositely, 4, 5 ... Electrode support body,
DESCRIPTION OF SYMBOLS 10 ... Mechanical quantity detection member, 20 ... Mechanical quantity detection member, 22A-22C ... Displacement electrode,
23A to 23C ... Electrodes arranged opposite to each other, 24, 25 ... Wiring, 26 ... Capacitance detection circuit,
30 ... Mechanical quantity detection member, 31 ... Substrate, 32 ... Displacement electrode, 33 ... Electrode arranged oppositely,
30 ... Mechanical quantity detection member, 31 ... Substrate, 33 ... Electrodes arranged opposite to each other,
40 ... Mechanical quantity detection member, 41 ... Substrate, 42 ... Displacement electrode, 43 ... Electrodes arranged opposite to each other,
100 ... Panel sensor, 110 ... Panel, 120 ... Panel support,
130: Force detection means (force sensor), 131: Diaphragm part, 131a: Thin film,
131b ... support part, 132 ... electrode, 133 ... substrate, 134 ... inner frame, 135 ... beam part,
136 ... fixed frame, 137 ... electrode, 138 ... support
Claims (16)
前記基体の表面又は内部に複数個が固定され、そのうちの少なくとも１個は前記基体 の変形部（前記変形に際し変形及び変位する領域）に配置されている変位電極である電 極と、
前記電極に接続された配線と
を有し、
前記変形に際し、前記変位電極は、前記基体から分離することなく、かつ導電性を損 なうことなく、前記変形部の変形及び変位に追従して変形及び変位し、
前記変形部の変形及び変位が、前記電極間の静電容量の変化として検知される
、力学量検知部材。 A base body that recovers the original shape when part or all of the contact portion is deformed in response to the pressing by the contact object and the pressing force by the contact object disappears;
A plurality of electrodes are fixed to the surface or inside of the base, and at least one of them is an electrode that is a displacement electrode disposed in a deformed portion of the base (a region that is deformed and displaced during the deformation);
A wiring connected to the electrode,
In the deformation, the displacement electrode is deformed and displaced following the deformation and displacement of the deformed portion without being separated from the base body and without impairing conductivity.
A mechanical quantity detection member in which deformation and displacement of the deformation part are detected as a change in capacitance between the electrodes.
前記配線を介して前記電極に電気的に接続され、前記接触物体による押圧で生じる前 記電極間の静電容量の変化を、電気信号として検出する検出回路部と
を有する、力学量検知装置。 The mechanical quantity detection member according to any one of claims 1 to 14,
A mechanical quantity detection device comprising: a detection circuit unit that is electrically connected to the electrodes via the wiring and detects a change in capacitance between the electrodes caused by pressing by the contact object as an electric signal.
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| JP2009162599A JP2011017626A (en) | 2009-07-09 | 2009-07-09 | Mechanical quantity detection member and mechanical quantity detection apparatus |
| TW099117462A TW201108062A (en) | 2009-07-09 | 2010-05-31 | Dynamic quantity detecting member and dynamic quantity detecting apparatus |
| US12/825,940 US8680876B2 (en) | 2009-07-09 | 2010-06-29 | Dynamic quantity detecting member and dynamic quantity detecting apparatus |
| KR1020100063332A KR20110005211A (en) | 2009-07-09 | 2010-07-01 | Dynamic quantity detecting member and dynamic quantity detecting apparatus |
| CN201010223201XA CN101950224A (en) | 2009-07-09 | 2010-07-02 | Mechanical quantity detection means and mechanical quantity pick-up unit |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN101950224A (en) | 2011-01-19 |
| TW201108062A (en) | 2011-03-01 |
| KR20110005211A (en) | 2011-01-17 |
| US20110006787A1 (en) | 2011-01-13 |
| US8680876B2 (en) | 2014-03-25 |
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