JP2005057949A - Power supply unit, semiconductor manufacturing apparatus and machine tool - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a power supply unit capable of obtaining a stable output without being adversely affected by a drop of a voltage inputted from a power supply unit, in power supply in which the supply of driving power with a semiconductor manufacturing apparatus or the like illustrated as an example is required to be taken into account. <P>SOLUTION: This power supply unit includes a rectification circuit 3 for outputting a first DC voltage by rectifying alternating current to be inputted and a smoothing circuit 5. Further, the unit comprises a voltage detection circuit 1 for detecting the voltage of the power supply unit, and a voltage doubler rectifier circuit 4 for outputting a second DC voltage higher than the first DC voltage. Based on the information of the presence of a voltage drop detected by the voltage detection circuit 1, the alternating current to be inputted is inputted into the rectification circuit 3 or the voltage doubler rectifier circuit 4. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a power supply device, a semiconductor manufacturing device, and a machine tool, and particularly relates to a technique of taking out direct current from alternating current supplied from a power source and supplying power as a direct current output, or converting it to alternating current output and supplying power. .

  Power supply to semiconductor manufacturing equipment, machine tools, etc. is required to be stably supplied, and UPS (uninterruptible power supply) is used, but it was an expensive system. .

  And there is SEMI F47-0999 as a recommended standard for driving semiconductor manufacturing equipment, and the ratio of voltage drop due to instantaneous interruption of the supplied rated voltage and the time of voltage drop are specified, so various devices are proposed. However, there is no known power supply device that exhibits satisfactory performance at a low cost.

Further, although a circuit combining a rectifier circuit and a voltage doubler rectifier circuit has been proposed, no countermeasure is taken against a voltage drop (see Patent Document 1).
Japanese Patent Laid-Open No. 5-30729

  The present invention provides a stable output voltage without being adversely affected by a voltage drop or the like input from a power supply device in power supply that needs to be considered for the supply of drive power as exemplified in a semiconductor manufacturing apparatus or the like. An object of the present invention is to provide a power supply device.

  The present invention provides a power supply device that includes a rectifier circuit that rectifies input alternating current and outputs a first DC voltage, and a smoothing circuit, a voltage detection circuit that detects a voltage of the power supply device, and the first And a voltage doubler rectifier circuit that outputs a second DC voltage that is higher than the DC voltage of the voltage, and based on the information about the presence or absence of a voltage drop detected by the voltage detection circuit, the input AC is a rectifier circuit or voltage doubler rectifier A power supply device that is input to a circuit.

  In addition, the present invention is a power supply apparatus that includes a switch that selects the rectifier circuit or the voltage doubler rectifier circuit and that selects the voltage doubler rectifier circuit when the voltage drops.

  And this invention has a rectification | straightening part and the serial connection capacitor | condenser provided in the back | latter stage of this rectification | straightening part, The said switch connects the midpoint of a serial connection capacitor | condenser, and an input terminal, This switch The voltage supply rectifier circuit or the rectifier circuit is selected by turning on / off the power supply device.

  Furthermore, the present invention is a power supply device having a reactor between the switch and a midpoint of a capacitor connected in series.

  In addition, the present invention is a power supply apparatus including a drive circuit that drives the switch on when a voltage drop is detected by the voltage detection circuit.

  And this invention is an electric power supply apparatus which has a 2nd capacitor | condenser connected in parallel in the back | latter stage of the capacitor | condenser of the said series connection.

  Furthermore, the present invention is a power supply device in which the voltage detection circuit detects a DC voltage drop obtained by rectification.

  Moreover, this invention is an electric power supply apparatus which has a 2nd switch and an inrush current prevention element between the said rectifier and the capacitor | condenser connected in series.

  And this invention is an electric power supply apparatus provided with the reverse conversion circuit which converts the output of the said smoothing circuit into the alternating current of arbitrary voltages and arbitrary frequencies.

  Furthermore, this invention is a semiconductor manufacturing apparatus provided with said electric power supply apparatus.

  Moreover, this invention is a machine tool provided with said electric power supply apparatus.

  According to the present invention, even if a voltage drop of power input to the power supply device occurs, it is possible to reduce the effect on the output power output.

An embodiment of the best mode for carrying out the present invention will be described.
The power supply device of the embodiment shown in FIG. 1 includes a voltage detection circuit 1, a switch 2, a rectifier circuit 3, a voltage doubler rectifier circuit 4, and a smoothing circuit 5. The voltage detection circuit 1 detects the voltage of the power supply device. The switch 2 selects the voltage doubler rectifier circuit 4 when the voltage detection circuit 1 detects a voltage drop, and selects the rectifier circuit 3 when power is restored. The rectifier circuit 3 rectifies AC supplied from a power source (not shown) and outputs a first DC voltage. The voltage doubler rectifier circuit 4 rectifies the alternating current supplied from the power source and outputs a second direct current voltage higher than the first direct current voltage. The smoothing circuit 5 removes ripples (pulsations) from the waveform obtained by the rectifying circuit 3 or the voltage doubler rectifying circuit 4.

  The output characteristics of the power supply apparatus according to this embodiment will be described with reference to FIG. 2A to 2C show an example of the characteristics of the input voltage and the output voltage of the conventional example and this example. As shown in FIG. 2A, for example, when a voltage drop occurs from 100% to 50% as shown in FIG. 2A, in the conventional example, as shown in FIG. The voltage drops to 50%. On the other hand, in this embodiment, as shown in FIG. 2C, the voltage drops slightly when it receives a voltage drop. However, since the voltage doubler rectifier circuit is selected, it can be quickly recovered to 100%. it can.

  Since the power supply device of the present embodiment selects a rectifier circuit or a voltage doubler rectifier circuit based on the information about the presence or absence of a drop in the input voltage from the power supply, even if a voltage drop occurs in the alternating current supplied from the power supply, Since the output direct current is less likely to cause a voltage drop, adverse effects on the output side device can be reduced.

  The operation at the time of power recovery in the power supply apparatus of this embodiment will be described. As shown in FIG. 2A, when the input voltage recovers from 50% to 100%, the conventional example recovers to 100% according to the input voltage, but in this embodiment, the voltage slightly increases. Then, since the rectifier circuit is selected immediately, the voltage returns to 100%. When the voltage drop disappears due to power recovery, for the voltage doubler rectifier circuit, it is preferable to cut the voltage doubler rectifier circuit before it becomes about 90% of the rating of an element such as a smoothing circuit.

  In the present embodiment, for the sake of safety, after switching to the voltage doubler rectifier circuit, the connection from the voltage doubler rectifier circuit to the original circuit is restored after a predetermined time by controlling the timer circuit or the like. Thereby, the operation time of the voltage doubler rectifier circuit can be limited.

  Example 1 will be described. The power supply circuit of the first embodiment is an example in which the supplied alternating current is a single phase, and as shown in FIG. 3, a rectifier unit composed of a diode 61 and a first capacitor connected in series provided at a subsequent stage of the rectifier unit 62 a and b, a second capacitor 63 at the subsequent stage, a voltage detection circuit 11, a switch 21, a reactor 22, and a drive circuit 23, taking out direct current from the alternating current supplied from the power supply 7 and performing reverse conversion The electric power is supplied to the load motor 9 via the circuit 8. The inverse conversion circuit 8 converts the alternating current into an arbitrary voltage and an arbitrary frequency.

  In the first embodiment, in the rectifying unit, the first capacitors 62a and 62b and the second capacitor 63 are connected in parallel, and the midpoints of the first capacitors 62a and 62b connected in series are the reactor 22 and the switch. 21 is connected to the power input line. The voltage detection circuit 11 sends a voltage drop detection signal to the drive circuit 23 when detecting the output DC voltage drop. The switch 21 is normally off, but is turned on when the voltage detection circuit 11 detects a drop in the supply voltage. In the case of a configuration in which a change in voltage is detected at the detection position after smoothing in FIG. 3, for example, even if a three-phase AC is input to the power supply device, a DC voltage is detected. Therefore, in the case of a three-phase alternating current, it is not necessary to provide three detectors for detecting a voltage change for each of the three phases, which is effective in reducing the size and weight and reducing the number of parts.

  In general, when a detector is provided for each of the three phases, it is necessary to pay attention to providing three detectors while ensuring an insulation distance that can ensure mutual insulation. This means that when power is supplied by multiphase alternating current, it is necessary to secure an insulation distance between each phase in addition to the increase in size of the device that requires a detector by the number of phases. This causes an increase in size. Therefore, as shown in FIG. 3, the configuration in which the voltage change is detected after smoothing is more effective in reducing the size and weight of the device and reducing the number of components.

  However, the voltage change may be detected on the input side of the power supply apparatus. Also in the embodiment based on the present invention, a voltage change detector may be provided on the input side of the power supply apparatus. Moreover, the power supply apparatus of a present Example is applicable to a single phase alternating current and a three-phase alternating current, and a part of diode 61 is not used in a rectification part at the time of a single phase alternating current.

  In the power supply device of the first embodiment, when the switch 21 is off, the rectifier unit including the diode 61 and the first capacitors 62a and 62b and the second capacitor 63 connected in series constitute a rectifier circuit. When the switch 21 is turned on, a voltage doubler rectifier circuit is configured by the rectifier unit composed of the diode 61 and the first capacitors 62a and 62b. In this way, the rectifier circuit is selected in the normal time when there is no voltage drop, and when the voltage drop occurs, the voltage doubler rectifier circuit is selected. Therefore, the voltage drop hardly occurs and a stable output can be obtained.

  In the above, it is described that “the voltage doubler rectifier circuit is selected”, but this is normally the one that operated as the rectifier circuit, but operates as the voltage doubler rectifier circuit when the switch or the like is activated. Including those that become. The selection from the voltage doubler rectifier circuit to the rectifier circuit is the same. For example, as shown in FIG. 3, the processing circuit that was operating as a rectifier circuit is configured as a voltage doubler rectifier circuit as a result of switching on and adding circuit elements, or as a voltage doubler rectifier circuit. It means to become. With such a configuration, even if the operation of the rectifier circuit or the voltage doubler rectifier circuit is provided, it is possible to reduce the increase in the number of components. That is, the number of parts can be configured with a number of parts smaller than the total number of parts when both the rectifier circuit and the voltage doubler rectifier circuit are provided.

  Of course, each of the rectifier circuit and the voltage doubler rectifier circuit may be provided so as to operate by selecting or switching by a switch.

  An example of experimental data in Example 1 will be described. FIG. 4 shows the measured voltage VDC across the second capacitor when the first capacitor 1120 μF, the second capacitor 2240 μm, and the reactor 0.5 mH are used, respectively, and the input voltage is AC 100 V, the output torque is 9.55 N · m, and the load is equivalent to 1 kW. . The horizontal axis represents time t (one scale 100 ms), and the vertical axis represents voltage V (one scale 50 V). Thus, according to the power supply apparatus of Example 1, even if it receives a voltage drop, an output voltage can be stabilized immediately.

  A method for preventing the DC voltage from becoming an overvoltage at the time of power recovery in the power supply apparatus according to the embodiment of the present invention will be described. As shown in FIG. 5, a bypass switch 64 and an inrush current preventing element 65, which are second switches, are provided in the subsequent stage of the rectifying unit including the diode 61. When power is restored, the bypass switch 64 is temporarily turned off before returning from the voltage doubler rectifier circuit to the original rectifier circuit, and the voltage is applied to the inrush current prevention element 65 to charge the smoothing capacitors 62a and 62b. The bypass switch 64 is turned on at a timing to delay the time and return to the original rectifier circuit. In this way, it is possible to prevent the DC voltage from becoming an overvoltage during power recovery.

The features of the embodiments of the present invention are listed as follows.
1. In the case of the step-up control method using a direct current chopper or direct current / direct current converter, noise due to the switching element is generated. However, in the embodiment of the present invention, such noise is not generated. In addition, an increase in the number of components such as switching elements, an increase in the size of the device, and an increase in cost can be suppressed in the embodiment of the present invention.
2. In preparation for the voltage drop, a method is considered in which, for example, a double voltage output tap can be selected and switched as the output tap of the secondary voltage of the transformer. In the case of this method, when the voltage drop occurs, the influence of the voltage drop can be avoided by switching to the above high output tap, but there is a disadvantage that a loss due to the transformer occurs. In the embodiment of the present invention, such a loss of the transformer does not occur, and it is possible to avoid an increase in cost and an increase in the size of the apparatus due to the use of a special transformer.
3. Increasing the capacitance of the capacitor of the smoothing circuit can reduce the influence of the input voltage drop, but if the capacitor is discharged, the effect cannot be obtained. Therefore, the capacitance of the capacitor may be increased further, but the size and cost of the apparatus will be increased.
4). In the embodiment of the present invention, since it can be configured by adding at least a changeover switch and a drive circuit, an increase in cost and the number of parts can be suppressed.

  In the power supply apparatus in the above-described embodiment, even if a voltage drop due to a momentary interruption or the like occurs, the influence on the output of the power supply apparatus hardly occurs. Therefore, a useful effect can be obtained when used in an apparatus or the like that requires work and processing to be normally performed even by a momentary interruption or the like. Examples of the application include a semiconductor manufacturing apparatus and a machine tool.

  First, semiconductor manufacturing apparatuses are required to improve the yield of manufactured semiconductors. For this purpose, it is necessary that the work and processing in the manufacturing process of silicon ingots, wafers and the like, which are semiconductor materials, be performed normally or stably.

  Many of these work processes are performed continuously for a certain period of time, and if they are interrupted in the middle, the series of work up to that point is wasted, and in some cases, the work object itself must be discarded. Some things must be done.

  For example, in the production of a silicon ingot using a typical CZ method (Czochralski method = choklaskie method, pulling method), the state of the original melt (eg, temperature gradient, melt While controlling the convection, etc., the single crystal is rotated and the single crystal having a constant quality is pulled up.

  Therefore, in the worst case, the effects of instantaneous interruption etc. appear in the output power that is output, and the state of the melt in the process of growing this single crystal becomes abnormal or if there is an abnormality in pulling up the single crystal. In some cases, the quality of a single crystal in the process of production is deteriorated or must be discarded. This single crystal is generally expensive, and if a momentary interruption occurs during operation of multiple devices, it is possible that all of the single crystals of those multiple devices may be discarded. It can be enormous.

  In consideration of these points, it is indispensable to avoid influences such as momentary interruption on the supplied power in the semiconductor manufacturing apparatus including the above-described single crystal manufacturing apparatus. In this respect, the power supply apparatus according to the above-described embodiment should be used. Thus, a more stable semiconductor manufacturing apparatus can be provided.

  Based on these, an embodiment using the above-described power supply apparatus will be described below. The semiconductor manufacturing apparatus 100 of FIG. 6 includes a working unit 140 that performs operations performed in manufacturing on a semiconductor member (including a silicon ingot, a wafer, a semiconductor substrate, a semiconductor chip, and the like) that is a base of a wafer, The semiconductor member management / control unit 130 that manages and controls the state (temperature, concentration, position, etc.) of the semiconductor member 150, and the control unit 120 that controls at least the working unit 140 and the semiconductor member management / control unit 130. And a power supply device 110 that supplies power to them.

  The power supply device 110 based on the above-described embodiment supplies power whether it is alternating current or direct current. Therefore, even if a voltage drop input to the power supply device 110 occurs due to an instantaneous interruption or the like, the power supply device The action of 110 makes it difficult to affect the power supplied to the semiconductor manufacturing apparatus 100.

  Therefore, the management and control of the semiconductor member management / control unit 130 with respect to the semiconductor member 150 is less likely to be abnormal, and the operation of the work unit 140 to the semiconductor member 150 is less likely to be abnormal. Therefore, for example, it is possible to avoid a situation in which the member 150 such as the semiconductor that is being worked becomes defective due to a voltage drop such as a momentary interruption.

  Next, FIG. 7 shows a single crystal manufacturing apparatus as an embodiment in which the embodiment of the power supply apparatus is used in another semiconductor manufacturing apparatus. The single crystal manufacturing apparatus 200 of FIG. 7 is an embodiment as an apparatus for manufacturing a silicon ingot using a typical chockey key method. The crucible (made of quartz, for example) 270 containing the melt 250 is supported and controlled by the crucible movement control unit 280 so that it can be rotated and moved up and down. The state of the melt 250 (temperature, convection state, oxygen concentration, surface tension, etc.) is detected by the detection unit 240 and input to the control unit 220. Under the control of the control unit 220, the state control unit 260 State control or the like is performed so as to make the state of the melt 250 favorable for crystal growth. Examples of this state control include maintaining a temperature suitable for crystal growth and applying a magnetic field for suppressing convection.

  The crucible 270 is controlled to move down while being rotated by the crucible movement control unit 280, and the single crystal movement control unit 230 causes the seed crystal brought into contact with the melt 250 whose state is controlled by the state control unit 260. The single crystal 290 is grown by pulling up while rotating.

  The controller 220 controls at least the state controller 260, the crucible movement controller 280, and the single crystal movement controller 230.

  Electric power is supplied from the power supply apparatus 210 to the single crystal manufacturing apparatus 200. Since AC or DC power is supplied by the power supply device 210 based on the above-described embodiment, even if a voltage drop input to the power supply device 210 occurs due to an instantaneous interruption or the like, The power supplied to the single crystal manufacturing apparatus 200 is hardly affected.

  In the single crystal manufacturing apparatus 200, as described above, the state of the melt 250 is controlled to maintain a temperature suitable for crystal growth, or a magnetic field for suppressing convection is applied. The speed of descent while rotating 270 or the speed of ascending while rotating the seed crystal is controlled according to the growth speed of the single crystal 290.

  Therefore, a constant quality single crystal can be manufactured only when these controls are performed normally. However, if a voltage drop occurs due to a momentary interruption or the like and these controls become abnormal, the quality of the single crystal deteriorates, and there is a case where it must be discarded.

  However, in the single crystal manufacturing apparatus 200 of the present embodiment, even if a voltage drop occurs due to a momentary interruption or the like, the power supplied from the power supply apparatus 210 to the single crystal manufacturing apparatus 200 is not easily affected by the voltage drop. The internal control of the single crystal manufacturing apparatus 200 is normally maintained, and a single crystal having a constant quality is manufactured.

  Next, FIG. 8 shows a pattern drawing apparatus as an embodiment in which the embodiment of the power supply apparatus is used in another semiconductor manufacturing apparatus. The pattern drawing apparatus 300 in FIG. 9 is an embodiment of drawing an integrated circuit pattern or the like in a semiconductor manufacturing process on a semiconductor wafer by irradiation with an electron beam or the like.

  The semiconductor wafer 350 supported by the stage 370 is a beam emitted from the beam output control unit 330, and a pattern is drawn by the beam deflected by the deflection unit 380 by the deflection control of the beam deflection control unit 340. At that time, the stage 370 is moved and controlled by the stage movement control unit 360. The drawn pattern is drawn under the control of the beam output control unit 330, the beam deflection control unit 340, and the stage movement control unit 360 by the drawing control unit 320.

  Power is supplied from the power supply device 310 to the pattern drawing device 300. Since AC or DC power is supplied to the pattern drawing apparatus 300 from the power supply apparatus 310 based on the above-described embodiment, even if a voltage drop input to the power supply apparatus 310 occurs due to a momentary interruption or the like, the pattern drawing apparatus 300 The power supplied to the drawing apparatus 300 is hardly affected.

  Therefore, even if a momentary interruption or the like occurs when a pattern is drawn on the semiconductor wafer by beam irradiation, the pattern supply continues because the power supply device 310 hardly affects the supplied power. Therefore, it is possible to avoid interruption of drawing or discarding of the semiconductor wafer being drawn.

  The beam is not limited to an electron beam by an electron gun, a laser beam, an X-ray, or the like as long as it can be used for pattern drawing.

  By using the power supply apparatus of the above-described embodiment in various semiconductor manufacturing apparatuses such as those shown in FIGS. 6 to 8, it is possible to provide a semiconductor manufacturing apparatus that operates normally even if an instantaneous interruption occurs.

  In the above description, the single crystal manufacturing apparatus 200 and the pattern drawing apparatus 300 have been described as examples as the semiconductor manufacturing apparatus. However, the present invention is not limited thereto. For example, the FZ method (Floating) can be used for manufacturing a single crystal and a silicon ingot. The present invention can also be applied to an apparatus using the Zone method = floating zone method). In addition, a slicing device that slices silicon ingots into individual wafers, a chamfering device called bering, a device that mechanically polishes (wraps) the wafer surface, and a mechanically polished wafer surface (Polishing) Also in an apparatus for mirror polishing (mirror polishing), the power supply apparatus based on the above-described embodiment may be used.

  An embodiment in which the embodiment of the power supply apparatus is used in a machine tool will be described. In the machine tool 400 according to the present embodiment, the final setting shape of the workpiece (workpiece) is input by the operation setting unit 420, and the motor driving units 411 to 415 of the power supply apparatus 410 are input from the control unit 430 based on the input data. To output speed and position commands. Each motor driving unit 411 to 415 feedback-controls the motors 451 to 455 according to the command, thereby cutting blade rotation axis (main shaft) 461, workpiece (workpiece) table X-axis movement 462, workpiece (workpiece) table. The workpiece is processed by combining the Y-axis movement 463, the workpiece (workpiece) table rotation axis 464, the cutting jig Z-axis movement 465, and the like. In addition, the current machining state is monitored by the monitor unit 440 by feeding back the rotation and position information of each axis to the control unit 430 in response to the current command, and until the final machining shape is obtained, The motor driving units 411 to 415 perform processing by a synchronous control operation.

  If an abnormal voltage drop occurs at the input to the power supply device due to a momentary interruption, expensive cutting blade breakage may occur, and the workpiece near the completion may be scratched and cannot be repaired. However, in the power supply apparatus 410 according to the present embodiment, it is difficult for a voltage drop to occur in the output, and thus it is possible to prevent the occurrence of these damages.

Explanatory drawing of the electric power supply apparatus of this invention. Explanatory drawing of the output voltage characteristic in this invention and a prior art example. 1 is an explanatory diagram of a power supply device according to Embodiment 1. FIG. Explanatory drawing of the output voltage characteristic of the electric power supply apparatus of Example 1. FIG. Explanatory drawing of the prevention means of the overvoltage at the time of a power recovery in the electric power supply apparatus of an Example. Explanatory drawing of the semiconductor manufacturing apparatus using the electric power supply apparatus of an Example. Explanatory drawing of the single-crystal manufacturing apparatus using the electric power supply apparatus of an Example. Explanatory drawing of the pattern drawing apparatus using the electric power supply apparatus of an Example. Explanatory drawing of the machine tool using the electric power supply apparatus of an Example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 11 Voltage detection circuit 2 Switch 21 Switch element 22 Reactor 23 Drive circuit 3 Rectifier circuit 4 Voltage doubler rectifier circuit 5 Smoothing circuit 61 Diode 62a, b 1st capacitor 63 2nd capacitor 64 Bypass switch 65 Inrush current prevention element 7 Power supply DESCRIPTION OF SYMBOLS 8 Reverse conversion circuit 9 Load 100 Semiconductor manufacturing apparatus 110 Electric power supply apparatus 120 Control part 130 Semiconductor member management / control part 140 Working part 150 Semiconductor member 200 Single crystal manufacturing apparatus 210 Electric power supply apparatus 220 Control part 230 Single crystal movement control part 240 detection unit 250 melt 260 state control unit 270 melt container 280 crucible movement control unit 290 single crystal 300 pattern drawing device 310 power supply device 320 drawing control unit 330 beam output control unit 340 beam deflection control unit 350 semiconductor wafer 360 Stage Movement Control Unit 370 Stage 380 Deflection Unit 400 Machine Tool 410 Power Supply Device 411 Motor 1 Drive Unit 412 Motor 2 Drive Unit 413 Motor 3 Drive Unit 414 Motor 4 Drive Unit 415 Motor 5 Drive Unit 420 Operation Setting Unit 430 Control Unit 440 Monitor unit 451 Motor 1
452 Motor 2
453 Motor 3
454 Motor 4
455 Motor 5
461 Cutting blade rotation axis (main axis)
462 Work (workpiece) table X-axis movement 463 Workpiece (workpiece) table Y-axis movement 464 Workpiece (workpiece) table rotation axis 465 Cutting jig Z-axis movement

Claims (11)

In a power supply device including a rectifier circuit that rectifies input AC and outputs a first DC voltage, and a smoothing circuit,
A voltage detection circuit that detects a voltage of the power supply device; and a voltage doubler rectification circuit that outputs a second DC voltage higher than the first DC voltage, the presence or absence of a voltage drop detected by the voltage detection circuit A power supply apparatus, wherein an alternating current input is input to a rectifier circuit or a voltage doubler rectifier circuit based on information. The power supply device according to claim 1, wherein
A power supply device comprising: a switch for selecting the rectifier circuit or the voltage doubler rectifier circuit, wherein the switch selects the voltage doubler rectifier circuit when the voltage drops. The power supply device according to claim 2,
The switch includes a rectifying unit and a series-connected capacitor connected in parallel to the rectifying unit, and the switch connects the midpoint of the series-connected capacitor and the input terminal, and the switch is turned on / off A power supply device, wherein a voltage rectifier circuit or a rectifier circuit is selected. The power supply device according to claim 3, wherein
A power supply device comprising a reactor between the switch and a midpoint of a capacitor connected in series. The power supply device according to claim 3 or 4,
A power supply apparatus comprising: a drive circuit that drives the switch on when detecting a voltage drop in the voltage detection circuit. In the electric power supply apparatus of any one of Claims 3-5,
A power supply apparatus comprising a second capacitor connected in parallel to the series-connected capacitors. In the electric power supply apparatus of any one of Claims 3-6,
The voltage detection circuit detects a DC voltage drop obtained by rectification. In the electric power supply apparatus of any one of Claims 3-7,
A power supply apparatus comprising: a second switch and an inrush current preventing element between the rectifying unit and a capacitor connected in series. In the electric power supply apparatus of any one of Claims 1-8,
A power supply apparatus comprising: an inverse conversion circuit that converts an output of the smoothing circuit into an alternating current having an arbitrary voltage and an arbitrary frequency.   A semiconductor manufacturing apparatus provided with the electric power supply apparatus of any one of Claims 1-9.   A machine tool comprising the power supply device according to any one of claims 1 to 9.

Images