JP2003329749A - Magnetic sensor and current sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a current sensor suitable for mass production which is immune to disturbance caused by an external magnetism, with reduced variation in shielding/sensitivity. <P>SOLUTION: A substrate mounted current sensor 100 comprises a current conductor 22C, a magnetism detecting part 20 which detects a magnetism generated by a current flowing the current conductor 22C, a magnetic body shield 50 provided on the opposite side of the magnetism detecting part 20 across the current conductor 22C, a magnetic body shield 51 provided on the opposite side of the magnetic body shield 50 across the current conductor 22C and the magnetism detecting part 20, and lead frames 22A and 22B for electrically connecting the current conductor on a printed board surface and the current conductor 22C molded with resin. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic sensor for detecting magnetism generated from an object to be measured, and more particularly to a magnetic sensor and a current sensor having improved resistance to external magnetism and suitable for mass production.

[0002]

2. Description of the Related Art Conventionally, as a technique for measuring a current on a printed circuit board, a magnetic detection element such as a Hall element or a magnetoresistive element is embedded in the vicinity of the current conductor on the printed circuit board and generated by a current flowing through the current conductor. Some have measured by detecting magnetism with a magnetic detection element.

[0003]

However, in the above-mentioned conventional technique, when a current conductor other than the current conductor to be measured exists in the vicinity, the magnetism generated by the current flowing through the external current conductor is detected. However, there is a problem in that the measured value becomes unstable due to the effect of the detection.

Further, since the magnetic detecting element is embedded in the vicinity of the current conductor, it is not suitable for mass production. Therefore, the present invention has been made by paying attention to such unsolved problems of the conventional technique, and provides a magnetic sensor and a current sensor that are improved in resistance to external magnetism and are optimal for mass production. Is intended.

[0005]

In order to achieve the above-mentioned object, a magnetic sensor according to claim 1 of the present invention is a sensor for detecting magnetism, which is generated from an object to be measured and the object to be measured. And a plurality of magnetic bodies surrounding the magnetic detection element.

With this structure, the magnetic field generated by the object to be measured is detected by the magnetic detection element. At this time, since a plurality of magnetic bodies are provided so as to surround the magnetic detection element, due to the effect of attracting and converging the magnetic flux of each magnetic body,
At least the external magnetism coming from the direction of the magnetic substance as viewed from the magnetic detection element is shielded. Further, the magnetic sensor according to claim 2 of the present invention is a sensor for detecting magnetism, comprising: a measured object; a magnetic detection element for detecting magnetism generated from the measured object; and the measured object. A first magnetic body provided on the opposite side of the magnetic detection element sandwiching the first magnetic body and a second magnetic body provided on the opposite side of the first magnetic body sandwiching the body to be measured and the magnetic detection element sandwiched therebetween. .

With this structure, the magnetic field generated by the object to be measured is detected by the magnetic detection element. At this time, since the first magnetic body is provided on the opposite side of the magnetic detection element with the object to be measured sandwiched therebetween, the first magnetic body prevents external magnetism coming from the direction of the first magnetic body when viewed from the magnetic detection element. At least while being shielded, the magnetic flux generated from the measured object easily converges in the direction of the magnetic detection element. Also,
Since the second magnetic body is provided on the opposite side of the first magnetic body with the object to be measured and the magnetic detection element sandwiched therebetween, the second magnetic body causes an external light coming from the direction of the second magnetic body when viewed from the magnetic detection element. The magnetism is at least shielded.

Further, a magnetic sensor according to a third aspect of the present invention is a sensor for detecting magnetism, the object to be measured, a magnetic detecting element for detecting magnetism generated from the object to be measured, and the object to be measured. A first magnetic shield means provided on the opposite side of the magnetic detection element with the measurement object interposed therebetween, and a second magnetic shield means provided on the opposite side of the first magnetic shield means with the measured object and the magnetic detection element interposed. Magnetic shielding means.

With such a structure, the magnetic field generated by the object to be measured is detected by the magnetic detection element. At this time, since the first magnetic shield means is provided on the opposite side of the magnetic detection element with the object to be measured interposed therebetween, the first magnetic shield means comes from the direction of the first magnetic shield means when viewed from the magnetic detection element. At least the external magnetism is shielded. Further, since the second magnetic shield means is provided on the opposite side of the first magnetic shield means with the object to be measured and the magnetic detection element sandwiched therebetween, the second magnetic shield means allows the second magnetic shield means to be seen from the magnetic detection element. The external magnetism coming from the direction of is at least shielded. For example, the first magnetic shield means has an effect of reducing the disturbance due to the disturbance magnetic field placed around the object to be measured and the magnetic detection means, and the second magnetic shield means puts it in the vicinity. The effect of reducing the disturbance caused by the disturbing magnetic field is further promoted.

Further, a magnetic sensor according to a fourth aspect of the present invention is a sensor for detecting magnetism, the object to be measured, a magnetic detection element for detecting magnetism generated from the object to be measured, and the object to be measured. Magnetic converging means provided on the opposite side of the magnetic detecting element with the measuring object interposed therebetween and provided on the opposite side of the magnetic converging means with the measured object and the magnetic detecting element interposed. The magnetic flux concentrating means is provided so that the magnetic flux generated from the object to be measured converges in the direction of the magnetic detecting element.

With such a structure, the magnetic field generated by the object to be measured is detected by the magnetic detection element. At this time, since the magnetic flux converging means is provided on the opposite side of the magnetic detection element across the measured body so that the magnetic flux generated from the measured body converges in the direction of the magnetic detection element, The magnetic flux generated from the measured object easily converges in the direction of the magnetic detection element. Further, since the magnetic shield means is provided on the opposite side of the magnetic flux concentrating means with the object to be measured and the magnetic detection element sandwiched therebetween, the magnetic shield means prevents external magnetism coming from the direction of the magnetic shield means when viewed from the magnetic detection element. At least shielded.

On the other hand, in order to achieve the above object, a current sensor according to a fifth aspect of the present invention is a sensor for detecting a current, which is generated by a conductor to be measured and a current flowing through the conductor to be measured. A magnetic detection element for detecting magnetism, a first magnetic body provided on the opposite side of the magnetic detection element with the conductor to be measured interposed, and a first magnetic body having the conductor and the magnetic detection element sandwiched with the measured conductor. And a second magnetic body provided on the opposite side of.

With such a structure, the magnetic field generated by the current flowing through the conductor to be measured is detected by the magnetic detection element. At this time, since the first magnetic body is provided on the opposite side of the magnetic detection element with the conductor to be measured interposed, the first magnetic body prevents external magnetism coming from the direction of the first magnetic body when viewed from the magnetic detection element. At least while being shielded, the magnetic flux generated by the current flowing through the conductor to be measured tends to converge in the direction of the magnetic detection element. Further, since the second magnetic body is provided on the opposite side of the first magnetic body with the conductor to be measured and the magnetic detection element sandwiched therebetween, the second magnetic body causes the second magnetic body to come from the direction of the second magnetic body when viewed from the magnetic detection element. At least the external magnetism that occurs is shielded.

Furthermore, a current sensor according to a sixth aspect of the present invention is a sensor for detecting a current, comprising a conductor to be measured, and a magnetic detection element for detecting magnetism generated by a current flowing through the conductor to be measured. A first magnetic shield means provided on the opposite side of the magnetic detection element with the conductor to be measured interposed, and a first magnetic shield means provided on the opposite side of the first magnetic shield means with the conductor to be measured and the magnetic detection element interposed. And a second magnetic shield means.

With such a structure, the magnetism generated by the current flowing through the conductor to be measured is detected by the magnetic detection element. At this time, since the first magnetic shield means is provided on the opposite side of the magnetic detection element with the conductor to be measured interposed, the first magnetic shield means comes from the direction of the first magnetic shield means when viewed from the magnetic detection element. At least the external magnetism is shielded. Further, since the second magnetic shield means is provided on the opposite side of the first magnetic shield means with the conductor to be measured and the magnetic detection element sandwiched therebetween, the second magnetic shield means allows the second magnetic shield means to be seen from the magnetic detection element. The external magnetism coming from the direction of is at least shielded. For example, the first magnetic shield means has an effect of reducing disturbance caused by external magnetism from external proximity current conductors or the like placed vertically and horizontally centering on the conductor to be measured and the magnetic detection means seen in cross section, and the second magnetic shield means. The combined use of the magnetic shielding means further promotes the effect of reducing disturbance caused by external magnetism from external close-current conductors or the like placed on the upper, lower, left and right sides.

Further, according to a seventh aspect of the present invention, in the current sensor according to the sixth aspect, the first magnetic shield means is a first magnetic body, and the second magnetic shield means is It is the second magnetic body. With such a configuration, since the first magnetic body is provided on the opposite side of the magnetic detection element with the conductor to be measured sandwiched, the first magnetic body causes the first magnetic body to move from the direction of the first magnetic body when viewed from the magnetic detection element. At least the incoming external magnetism is shielded, and the magnetic flux generated by the current flowing through the conductor to be measured tends to converge in the direction of the magnetic detection element. Further, since the second magnetic body is provided on the opposite side of the first magnetic body with the conductor to be measured and the magnetic detection element sandwiched therebetween, the second magnetic body causes the second magnetic body to come from the direction of the second magnetic body when viewed from the magnetic detection element. At least the external magnetism that occurs is shielded.

Further, a current sensor according to claim 8 of the present invention is a sensor for detecting a current, and a conductor to be measured, and a magnetic detection element for detecting magnetism generated by a current flowing through the conductor to be measured. Magnetic converging means provided on the opposite side of the magnetic detection element with the conductor to be measured interposed and concentrating magnetic flux in a predetermined direction, and the opposite side of the magnetic converging means with the conductor to be measured and the magnetic detection element interposed. The magnetic flux concentrating means is provided so that the magnetic flux generated by the current flowing through the conductor to be measured converges in the direction of the magnetic detecting element.

With such a structure, the magnetism detecting element detects the magnetism generated by the current flowing through the conductor to be measured. At this time, since the magnetic flux is generated by the current flowing through the conductor to be measured in the direction of the magnetic detecting element, the magnetic flux converging means is provided on the opposite side of the magnetic detecting element with the conductor to be measured interposed therebetween. By the means, the magnetic flux generated by the current flowing through the conductor to be measured is easily converged in the direction of the magnetic detection element. Further, since the magnetic shielding means is provided on the opposite side of the magnetic flux concentrating means with the conductor to be measured and the magnetic detecting element sandwiched therebetween, the magnetic shielding means prevents external magnetism coming from the direction of the magnetic shielding means when viewed from the magnetic detecting element. At least shielded.

Further, according to a ninth aspect of the present invention, in the current sensor according to the eighth aspect, the magnetic focusing means is a first magnetic body, and the magnetic shielding means is a second magnetic body. Is. With such a configuration, since the first magnetic body is provided on the opposite side of the magnetic detection element with the conductor to be measured sandwiched, the first magnetic body causes the first magnetic body to move from the direction of the first magnetic body when viewed from the magnetic detection element. At least the incoming external magnetism is shielded, and the magnetic flux generated by the current flowing through the conductor to be measured tends to converge in the direction of the magnetic detection element. The first conductor is sandwiched between the conductor to be measured and the magnetic detection element.
Since the second magnetic body is provided on the opposite side of the magnetic body, the second magnetic body at least shields external magnetism coming from the direction of the second magnetic body when viewed from the magnetic detection element.

Furthermore, a current sensor according to a tenth aspect of the present invention is the current sensor according to any one of the fifth, seventh and ninth aspects, wherein the first magnetic body is a magnetically sensitive surface of the magnetic detecting element. The second magnetic body is provided on one side with respect to the magnetically sensitive surface of the magnetic detection element. With such a configuration, since the first magnetic body is provided on one side of the magnetic sensing surface of the magnetic detection element, the direction of the first magnetic body when viewed from the magnetic detection element by the first magnetic body. At least the external magnetism coming from is shielded. Further, since the second magnetic body is provided on the other side with respect to the magnetically sensitive surface of the magnetic detection element, the second magnetic body prevents external magnetism coming from the direction of the second magnetic body when viewed from the magnetic detection element. At least shielded.

Further, according to an eleventh aspect of the present invention, in the current sensor according to the tenth aspect, the first magnetic body and the second magnetic body are plate-shaped soft magnetic bodies. With such a configuration, since the first magnetic body, which is a plate-shaped soft magnetic body, is provided on one side of the magnetic sensing surface of the magnetic detection element, the magnetic detection is performed by the first magnetic body. At least the external magnetism that comes from the direction of the first magnetic body as viewed from the element is shielded. Further, since the second magnetic body, which is a plate-shaped soft magnetic body, is provided on the other side of the magnetically sensitive surface of the magnetic detection element, the second magnetic body allows the second magnetic body to be seen from the magnetic detection element. At least the external magnetism coming from the body direction is shielded.

According to a twelfth aspect of the present invention, in the current sensor according to the eleventh aspect, the first magnetic body is parallel or substantially parallel to the magnetic detection element or the conductor to be measured. And the second magnetic body is provided in parallel or substantially parallel to the magnetic detection element or the conductor to be measured. With such a configuration, since the first magnetic body is provided in parallel or substantially parallel to the magnetic detection element or the conductor to be measured, the first magnetic body prevents the first magnetic body from seeing from the magnetic detection element. At least the external magnetism coming from the direction is shielded. Further, since the second magnetic body is provided in parallel or substantially parallel to the magnetic detection element or the conductor to be measured, the second magnetic body allows the external magnetic field coming from the direction of the second magnetic body when viewed from the magnetic detection element. Are at least shielded.

Further, a current sensor according to a thirteenth aspect of the present invention is the current sensor according to any one of the tenth to twelfth aspects, wherein the conductor to be measured is a first conductor to be measured and the first conductor to be measured. The second conductor to be measured has the same or substantially the same amount as the current flowing through the conductor to be measured and the current direction is opposite to that of the first conductor to be measured. With such a configuration, the same or almost the same amount of current as the current flowing through the first measured conductor flows through the second measured conductor, and the current direction is opposite to that of the first measured conductor. So
The magnetism generated by the current flowing through the first conductor under test and the second
The magnetism generated by the current flowing through the conductor to be measured interferes with each other so as to strengthen each other, and the magnetism detecting means detects the interfered magnetism.

Further, a current sensor according to a fourteenth aspect of the present invention is the current sensor according to any one of the tenth to thirteenth aspects, further comprising magnetic focusing means for focusing the magnetic flux in a predetermined direction. Is provided so that the magnetic flux generated by the current flowing through the conductor to be measured converges on the magnetically sensitive surface of the magnetic detection element. With such a configuration, the magnetic flux converging means converges the magnetic flux generated by the current flowing through the conductor to be measured on the magnetically sensitive surface of the magnetic detecting element, and the magnetic detecting means detects the converged magnetism.

Furthermore, a current sensor according to a fifteenth aspect of the present invention is the current sensor according to the fourteenth aspect, wherein the magnetic flux concentrator comprises a plurality of magnetic flux concentrator plates, and the surface of the magnetic flux concentrator plate is the magnetic field. The plurality of magnetic flux concentrator plates are spaced apart from each other such that the magnetic flux concentrator plates are located on both sides of the conductor to be measured so as to face the magnetically sensitive surface of the sensing device and when viewed from the surface direction of the magnetic sensing device. Provided.

With such a structure, since the magnetic flux concentrator plate is provided so that the surface of the magnetic flux concentrator plate faces the magnetically sensitive surface of the magnetic detection element, the magnetic flux generated by the current flowing through the conductor to be measured is eliminated. The magnetic flux concentrator makes it easier to receive. for that reason,
The magnetic flux generated by the current flowing through the conductor to be measured can be effectively converged on the magnetically sensitive surface of the magnetic detection element. Further, since the magnetic flux concentrators are provided at intervals so that the magnetic flux concentrators are located on both sides of the conductor to be measured when viewed from the surface direction of the magnetic detection element, the magnetic flux received by the magnetic flux concentrator is effectively magnetized. It can be converged on the magnetically sensitive surface of the detection element.

On the other hand, in order to achieve the above-mentioned object, a board-mounted current sensor according to a sixteenth aspect of the present invention is a sensor mounted on a board surface having a current conductor, wherein A magnetic detection element for detecting magnetism generated by a current flowing through the conductor to be measured, a first magnetic body provided on the opposite side of the magnetic detection element with the conductor to be measured interposed, the conductor to be measured and the magnetic detection. A second magnetic body, which is provided on the opposite side of the first magnetic body with the element interposed, and a lead frame for electrically connecting the conductor to be measured and the current conductor are integrally built in.

With this structure, when the current conductor on the board surface and the lead frame are connected and mounted on the board surface, the magnetism detecting element detects the magnetism generated by the current flowing through the conductor to be measured. It At this time, since the first magnetic body is provided on the opposite side of the magnetic detection element with the conductor to be measured interposed, the first magnetic body prevents external magnetism coming from the direction of the first magnetic body when viewed from the magnetic detection element. At least while being shielded, the magnetic flux generated by the current flowing through the conductor to be measured tends to converge in the direction of the magnetic detection element. Further, since the second magnetic body is provided on the opposite side of the first magnetic body with the conductor to be measured and the magnetic detection element sandwiched therebetween, the second magnetic body causes the second magnetic body to come from the direction of the second magnetic body when viewed from the magnetic detection element. At least the external magnetism that occurs is shielded.

According to a seventeenth aspect of the present invention, there is provided the board mounted current sensor according to the sixteenth aspect, wherein the conductor to be measured, the magnetic detection element, and the first magnetic body are Part or all, part or all of the second magnetic body, and part of the lead frame were molded with resin. With such a configuration, the conductor to be measured, the magnetic detection element, a part or all of the first magnetic body, and the second magnetic body
Since a part or all of the magnetic body and a part of the lead frame are molded with resin, the size can be reduced and the electrical insulation between the current conductor and the current sensor can be maintained. Further, the magnetic detection element can be manufactured by the same technique as that of a normal LSI process.

On the other hand, in order to achieve the above object, a current detecting device according to claim 18 of the present invention comprises a substrate having a conductor to be measured, and a substrate-mounted current sensor mounted on the surface of the substrate. In the device, the board-mounted current sensor is positioned on the opposite side of the measured conductor with the magnetic detection element that detects the magnetism generated by the current flowing through the measured conductor and the magnetic detection element sandwiched during mounting. And a first magnetic body provided so that the substrate is located on the opposite side of the board-mounted current sensor with the conductor to be measured interposed between the boards when the board-mounted current sensor is mounted. And a second magnetic body that has been formed.

With such a structure, when the board-mounted current sensor is mounted on the board surface, the magnetic sensor detects
The magnetism generated by the current flowing through the conductor to be measured on the surface of the substrate is detected. At this time, in the board-mounted current sensor, the first sensor is provided on the opposite side of the conductor to be measured with the magnetic detection element interposed therebetween.
Since the magnetic body is located, the first magnetic body shields at least the external magnetism coming from the direction of the first magnetic body when viewed from the magnetic detection element, and the magnetic flux generated by the current flowing through the conductor to be measured is detected by the magnetic detection element. It becomes easier to converge in the direction of. Further, in the substrate, since the second magnetic body is located on the opposite side of the substrate-mounted current sensor with the conductor to be measured interposed, the second magnetic body comes from the direction of the second magnetic body when viewed from the magnetic detection element. At least the external magnetism is shielded.

Furthermore, a current detecting device according to a nineteenth aspect of the present invention is the current detecting device according to the eighteenth aspect, wherein the board-mounted current sensor is a part of the magnetic detection element and the first magnetic body. Alternatively, the whole is molded with resin. With such a configuration, since a part or all of the magnetic detection element and the first magnetic body are molded with resin,
The size can be reduced, and the electrical insulation between the conductor to be measured on the surface of the board and the board-mounted current sensor can be maintained. Further, the magnetic detection element can be manufactured by the same technique as that of a normal LSI process.

According to a twentieth aspect of the present invention, in addition to the first measured conductor, the same amount or substantially the same amount of current as the current flowing through the first measured conductor flows and the current direction thereof. Is the opposite of the first conductor to be measured
Apparatus comprising a conductor to be measured and a board-mounted current sensor mounted between the first conductor to be measured and the second conductor to be measured and on the first conductor to be measured or the second conductor to be measured. And wherein the board-mounted current sensor is the first
A magnetic detection element for detecting magnetism generated by a current flowing through the conductor to be measured and the second conductor to be measured, wherein the first conductor to be measured is the first conductor to be measured when the board-mounted current sensor is mounted. And a second magnetic conductor provided so as to be located on the opposite side of the board-mounted current sensor with the second magnetic conductor being interposed between the second magnetic conductor and the second magnetic conductor. A second magnetic body is provided so as to be located on the opposite side of the board-mounted current sensor with the conductor interposed therebetween.

With this configuration, when the board-mounted current sensor is mounted on the first measured conductor or the second measured conductor, the current flowing through the first measured conductor flows through the second measured conductor. The same amount or almost the same amount of current flows, and the direction of the current is opposite to that of the first conductor to be measured. The generated magnetism and the generated magnetism interfere with each other, and the magnetism detecting means detects the interfering magnetism. At this time, in the first conductor to be measured, the first conductor to be measured is placed on the opposite side of the board-mounted current sensor with the first conductor to be measured interposed therebetween.
Since the magnetic body is located, the first magnetic body shields at least the external magnetism coming from the direction of the first magnetic body when viewed from the magnetic detection element. In the second conductor to be measured, since the second magnetic body is located on the opposite side of the board-mounted current sensor with the second conductor to be measured interposed therebetween,
At least the external magnetism coming from the direction of the second magnetic body as viewed from the magnetic detection element is shielded.

Further, a current detecting device according to claim 21 of the present invention is the current detecting device according to claim 20, wherein the board-mounted current sensor is a part of the magnetic detection element and the first magnetic body. Alternatively, the whole is molded with resin. With such a configuration, since a part or all of the magnetic detection element and the first magnetic body are molded with resin,
The size can be reduced, and the electrical insulation between the first and second conductors to be measured and the board-mounted current sensor can be maintained. Further, the magnetic detection element can be manufactured by the same technique as that of a normal LSI process.

On the other hand, in order to achieve the above object, a method for manufacturing a current sensor according to a twenty-second aspect of the present invention is a method for manufacturing the current sensor according to the seventeenth aspect, which is provided at the bottom of the molding machine. A second magnetic body setting step of setting the second magnetic body on the mounted pedestal, a sensor section manufacturing step of manufacturing a sensor section including the magnetic detection element, the conductor to be measured, and the first magnetic body, and the sensor. The sensor unit manufactured in the unit manufacturing step is provided with the magnetic detection element and the second sensor unit.
The method includes a sensor section arranging step in which the magnetic material is opposed to the inside of the molding machine, and a molding resin inflow step of pouring a molding resin into the molding machine in a state where the sensor section is arranged in the sensor section arranging step.

[0037]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to the drawings. 1 to 12 are
It is a figure which shows 1st Embodiment of the magnetic sensor and current sensor which concern on this invention. The structure of the board-mounted current sensor 100 will be described with reference to FIGS. 1 and 2. Figure 1
FIG. 3 is a sectional view of the board-mounted current sensor 100 in the thickness direction. FIG. 2 is a perspective view of the board-mounted current sensor 100.

The board-mounted current sensor 100 is a current sensor mounted on the surface of a printed board (not shown).
And, as shown in FIG. 2, it is molded with resin.
Inside the mold package 10, the current conductor 22C to be the conductor to be measured and the magnetism generated by the current flowing through the current conductor 22C to enter from the lead frame 22A and to exit from the lead frame 22B as indicated by an arrow are detected. The magnetic detection unit 20 and a magnetic shield 50 provided on the opposite side of the magnetic detection unit 20 with the current conductor 22C interposed therebetween.
And a magnetic shield 5 provided on the opposite side of the magnetic shield 50 with the current conductor 22C and the magnetic detection unit 20 interposed therebetween.
1 and are provided.

Further, the mold package 10 is provided with lead frames 22A and 22B for electrically connecting the current conductors on the surface of the printed circuit board and the current conductors 22C, and an input voltage is supplied to the magnetic detection unit 20 or a magnetic field. Lead frames 24A to 24 for extracting the output voltage of the detection unit 20
D and are provided. Lead frame 22A, 22B
And the end portions of 24A to 24D are bent so that they can be mounted on the printed circuit board surface. In addition, the lead frame 24
A to 24D are connected to the magnetic detection unit 20 by a wire 26.

The magnetic shield 50 is a thin plate-shaped soft magnetic body, is provided below the magnetically sensitive surface of the magnetic detection unit 20, and is provided in parallel or substantially parallel to the magnetic detection unit 20. Has been. Further, since the magnetic shield 50 also has the effect of converging the magnetic flux in a predetermined direction, in addition to the magnetic shield effect, it also has the role of converging the magnetic flux generated by the current flowing through the current conductor 22C in the direction of the magnetic detection unit 20. There is also.

The magnetic shield 51 is a thin plate-shaped soft magnetic material, is provided above the magnetically sensitive surface of the magnetic detection unit 20, and is provided in parallel or substantially parallel to the magnetic detection unit 20. ing. In this way, the mold package 1
In addition to the soft magnetic material on the lower side of 0, the mold package 10
By disposing the magnetic shield 51 of the soft magnetic material also on the upper side of, the external proximity current conductor, the external proximity magnetic body, etc. disposed on the upper side and the lower side of the board-mounted current sensor 100,
It is possible to reduce sensor output fluctuation due to a disturbance magnetic field from the outside (hereinafter, referred to as an external proximity current conductor or the like).

As can be seen from FIGS. 1 and 2, when the magnetic shield 50 is closer to the current conductor 22C, the magnetic shield effect can be improved, which is useful for improving the measurement sensitivity. On the other hand, if the magnetic shield 51 is too close to the magnetic detection unit 20, the magnetic shield effect can be improved but the measurement sensitivity may be deteriorated. Therefore, the height (the mutual distance) of the magnetic shield 51 with respect to the magnetic detection unit 20 is determined while balancing the measurement sensitivity and the magnetic shield effect.

Actually, not only the external proximity current conductors and the like arranged on the upper and lower sides of the board-mounted current sensor 100, but also the external proximity current conductors and the like arranged on the right and left sides of the board-mounted current sensor 100. However, the magnetic shield 50 or the magnetic shield 51 exerts a magnetic shield effect to reduce the sensor output fluctuation. The magnetic shields 50 and 51 are the mold package 10 respectively.
The magnetic shield effect is provided even if it is incorporated in the package or outside the mold package 10. For example, current conductor 2
Even if the 2C and the magnetic shield 50 are incorporated into the mold package 10 in advance, and the magnetic shield 51 is later attached to the upper surface of the mold package 10, the essence is the same. The essence is the same even if the current conductor 22C and the magnetic shields 50 and 51 are incorporated in the mold package 10 in advance.

A package in which the magnetic detection part 20 is enclosed, which is derived from the board-mounted current sensor 100 in which the lead frames 22A and 22B and the current conductor 22C are integrated, for example, a standard package such as DIL or SOIC is used. The present invention is also effective when mounted on a mounting board such as a PCB. In either case, the current conductor 22C is incorporated on the surface of the mounting board or on the mounting board, or on the surface of the mold package 10 or in the mold package 10. It may be sandwiched between the shields 50 and 51 at the top and bottom. At this time, the current conductor 22C is
Not packaged in 0 and mold package 1
If the current conductor 22C is not arranged on the mounting board at the mounting point of 0, it is possible to attach the current conductor bar that has been made into a component to the standard package and further attach the magnetic shield to the current conductor bar. Is. in this way,
The present invention is industrially excellent in productivity.

Normally, the current conductor 22C, the magnetic detector 20 and the magnetic shields 50 and 51 are arranged in parallel or substantially in parallel, but in reality, even if they are inclined to some extent, they are sufficient. Has a strong magnetic shield effect. For example, when the magnetic shields 50 and 51 are in the shape of an eight and the current conductor 22C and the magnetic detection unit 20 are between them,
Further, as viewed in the thickness direction of the board-mounted current sensor 100, the top and bottom of the mold package 10 are covered by the magnetic shield 5.
It has a magnetic shield effect even if 0 and 51 are not completely covered.

Further, normally, the current conductor 22C, the magnetic detector 20 and the magnetic shields 50, 51 are horizontal to each other, but the magnetic shields 50, 51 are arranged in the thickness direction of the board-mounted current sensor 100. Instead, for example, even if the current conductor 22C and the magnetic detection unit 20 are sandwiched by rotating 90 degrees, the magnetic shield effect is obtained. In addition, normally, the current conductor 22C, the magnetic detector 20 and the magnetic shields 50, 5
Although Nos. 1 are arranged so that their centers coincide with each other, in actuality, they have a sufficient magnetic shield effect even if they are offset to some extent.

The magnetic shields 50 and 51 have a predetermined shape (that is, a predetermined width, a predetermined height and a predetermined thickness) to cover the magnetic detecting portion 20 and the current conductor 22C, but the magnetic shields 50 and 51 may have a certain size or more. Good. Further, for example, even if the magnetic shield 51 covers the magnetic detection portion 20 to some extent or more, if the thickness is extremely small, the magnetic shield effect is relatively lowered, but another similar magnetic shield is used. A sufficient magnetic shield effect can be obtained by stacking them on one another. Similarly, for example, a plurality of magnetic shields 51 horizontally cover the upper side of the magnetic detection unit 20 to provide a magnetic shield effect. (When the influence of the external proximity current conductor is small, the magnetic shield 50,
Removing any one of 51 does not contradict the provision of magnetic and current sensors that are optimal for mass production. As can be seen from this, the magnetic shields 50 and 51 are
The numbers are not necessarily limited to one at the top and one at the bottom.

For the magnetic shield, the magnetic shields 50 and 51 may have a magnetic shield effect even if they are not thin plates.

[0049]

Next, a first embodiment will be described in detail with reference to FIG. FIG. 3 shows a mold package 1 including a magnetic shield 51 in addition to the magnetic shield 50.
6 is a graph showing the degree of disturbance received by the magnetic detection unit 20 by an external proximity current conductor arranged above 0. For comparison, a soft magnetic shield that also serves as a magnetic yoke is arranged below the current conductor. (The magnetic substance has an improved magnetic sensitivity and a magnetic shield effect.) The magnetic substance shield 50 is, for example, 10 mm in length × 7 mm in width × 0.35 in thickness.
It is a thin rectangular parallelepiped made of [mm] and has a current conductor 22C.
The distance between the lower surface and the magnetic shield 50 is, for example, 0.0
By making it close to 5 [mm] or less, the magnetic sensitivity was significantly improved. It is already incorporated in the mold package 10.

In this way, from the magnetic detector 20 about 1.2
The magnetic shield 51 is placed at a distance of [mm]. The magnetic shield 51 is a very thin rectangular parallelepiped, and has a length of about 19 [mm] × width of about 11 [mm] × thickness of 0.05 [mm] or less and substantially covers the entire upper surface of the mold package 10.
The magnetic shields 50 and 51 have high magnetic permeability, high saturation magnetic flux density, and low coercive force, but different materials. The magnetic shield effect is remarkably improved by sandwiching the current conductor 22C and the entire magnetic detection unit 20 between the upper and lower magnetic shields 50 and 51.

In FIG. 3, a current of the same value is passed through the current conductor 22C and the external proximity current conductor, and the output fluctuation rate when the current value of the external proximity current conductor is 0 is 0%, and the mold package 10 Output fluctuation rate [%] with respect to the distance when the external proximity current conductor is separated from the upper surface in the height direction
Is compared with the case without the magnetic shield 51 (broken line). For example, if the error due to the external magnetic field is specified to be 1%, the external proximity current conductor is molded package 10.
It is possible to approach from about 16 [mm] above the surface of the to about 6 [mm]. Moreover, the decrease in measurement sensitivity is as small as about 13%, which is easily within the correction range. The magnetic shield effect is further improved by simply stacking the same ultrathin magnetic shield on top of another.

Next, the second embodiment will be described in detail with reference to FIG. FIG. 4 is a graph showing the degree of disturbance that the magnetic detection unit 20 receives by the external proximity current conductor arranged above the mold package 10 when the magnetic shield 51 is provided in addition to the magnetic shield 50. The magnetic shield 50 has the same shape and size as those of the first embodiment. The magnetic shield 51 has a length of about 19 mm.
X width approximately 11 [mm] x thickness 1 [mm], magnetic shield 5
Same material and size as 0.

In FIG. 4, current of the same value is passed through the current conductor 22C and the external proximity current conductor, and the output fluctuation rate when the current value of the external proximity current conductor is 0 is 0%, and the mold package 10 Output fluctuation rate [%] with respect to the distance when the external proximity current conductor is separated from the upper surface in the height direction
Is compared with the case without the magnetic shield 51 (broken line). For example, if the error due to the external magnetic field is specified to be 1%, the external proximity current conductor is molded package 10.
It is possible to approach the surface of the magnetic shield 51 from approximately 16 mm above the surface of the magnetic shield 51. In addition, the decrease in measurement sensitivity is as small as about 20%, which is easily within the correction range.

Next, a third embodiment will be described in detail with reference to FIG. FIG. 5 is a graph showing the degree of disturbance received by the magnetic detection unit 20 by the external proximity current conductor arranged above the mold package 10 when the magnetic shield 51 is provided in addition to the magnetic shield 50. The magnetic shield 50 has the same shape and size as those of the first embodiment. The magnetic shield 51 is 10 mm long ×
Width 7 [mm] x thickness 0.35 [mm], magnetic shield 5
Same material and size as 0.

In FIG. 5, a current of the same value is passed through the current conductor 22C and the external proximity current conductor, and the output fluctuation rate when the current value of the external proximity current conductor is 0 is 0%, and the mold package 10 Output fluctuation rate [%] with respect to the distance when the external proximity current conductor is separated from the upper surface in the height direction
Is compared with the case without the magnetic shield 51 (broken line). For example, if the error due to the external magnetic field is specified to be 1%, the external proximity current conductor is molded package 10.
It is possible to approach the surface of the magnetic shield 51 from approximately 16 mm above the surface of the magnetic shield 51.

Next, a fourth embodiment will be described in detail with reference to FIG. FIG. 6 is a graph showing the degree of disturbance received by the magnetic detection unit 20 by the external proximity current conductor arranged below the mold package 10 when the magnetic shield 51 is provided in addition to the magnetic shield 50. The magnetic shield 50 has the same shape and size as those of the first embodiment. The magnetic shield 51 is 10 mm long ×
Width 7 [mm] x thickness 0.35 [mm], magnetic shield 5
Same material and size as 0.

In FIG. 6, current of the same value is passed through the current conductor 22C and the external proximity current conductor, and the output fluctuation rate when the current value of the external proximity current conductor is 0 is 0%, and the mold package 10 Output fluctuation rate [%] with respect to the distance when the external proximity current conductor is separated from the upper surface in the height direction
Is compared with the case without the magnetic shield 51 (broken line). For example, if the error due to the external magnetic field is specified to be 1%, the external proximity current conductor is molded package 10.
It is possible to approach the lower surface of the mold package 10 from about 8 [mm] below the surface thereof. By arranging the magnetic shields not only on the lower side of the mold package 10 but also on the upper side thereof in this manner, not only the shield effect above the mold package 10 is improved, but also the external proximity current conductor is connected to the board-mounted current sensor. The output fluctuation rate when arranged on the lower side, the right side, and the left side of 100 is improved, and the shield effect can be improved over the entire surface. In the present embodiment, the output fluctuation rate over the entire surface can be suppressed to 0.5 [%] or less. Moreover, the decrease in measurement sensitivity is about 17%.
It is small in the front and back and easily within the correction range.

Next, a fifth embodiment will be described in detail with reference to FIG. FIG. 7 is a graph showing an example of change in measurement sensitivity when the height position of the magnetic shield 51 is moved up and down with respect to the upper surface of the mold package 10. The magnetic shields 50 and 51 are the same in shape, size and material as in the third embodiment. The height position of the magnetic shield 50 remains fixed.

In FIG. 7, it is only necessary to shift the magnetic shield 51 upward from the reference by, for example, 0.5 to 1.0 [mm].
While maintaining a practical magnetic shield effect, the decrease in measurement sensitivity can be suppressed from about 17 [%] to about 10 [%] to 6 [%]. Of course, depending on the product specifications and the sensor system configuration, the magnetic shield 51 may be included in the mold package 10.
It is also possible to use it by lowering it from the reference position on the upper surface. As described above, by adjusting the height of the magnetic shield 51 using a magnetic body having a predetermined shape and size, the sensitivity and the magnetic shield effect can be balanced.

FIG. 8 is an example of a sectional view of the board-mounted current sensor 100. In FIG. 8, the magnetic shield 5
The width of 1 is denoted by reference numeral 81, the thickness of the magnetic shield 51 is denoted by reference numeral 83, the distance between the external proximity current conductor 60 and the magnetic shield 51 is denoted by reference numeral 84, and the magnetic detection unit 20 having the magnetic flux concentrator plates 30A and 30B is provided. Is 85, and the magnetic flux concentrator 30
The distance between A and 30B and the magnetic shield 51 is indicated by reference numeral 87.

FIG. 9 is an example of a top view of the board-mounted current sensor 100. In FIG. 9, the magnetic shield 5
The width of 1 is 81, the length of the magnetic shield 51 is 82, the length of the magnetic detector 20 having the magnetic flux concentrator plates 30A and 30B is 86, and the magnetic detection having the magnetic flux concentrator plates 30A and 30B is performed. Parts are indicated by reference numeral 20. In FIG. 9, the magnetic shield 50 is omitted. In this embodiment, the width 85 of the magnetic detector in the area occupied by the magnetic flux concentrators 30A and 30B and the length 86 of the magnetic detector in the area occupied by the magnetic flux concentrators 30A and 30B are both about 1.8 [mm]. Yes, the distance 87 between the magnetic shield 51 and the magnetic detection unit 20
Is about 1.2 [mm], and the magnetic shield 51 has a length of 10 mm.
It is a magnetic material having a high magnetic permeability, a high saturation magnetic flux density, and a low coercive force of [mm] × width 7 [mm] × thickness 0.35 [mm].

As can be seen from the first to fifth embodiments, in obtaining sensitivity while enhancing the magnetic shield effect,
Width 81, length 82 and thickness 83 of the magnetic shield 51
There is a certain amount of margin in the selection, and there is a degree of freedom to combine this with the distance 87 between the magnetic shield 51 and the magnetic detection unit 20. In this embodiment, the length of the magnetic shield 51 is
It is possible to reduce the width and thickness more, especially
From the direction of the magnetic field generated from the current conductor 22C, the length 82 can be reduced to less than 10 [mm]. For example, a thin rectangular parallelepiped having a length of about 6 [mm] × a width of about 6 [mm] × a thickness of 0.35 [mm] can have the same characteristics. In an industrial sense, it is not always convenient to have two different types of soft magnetic materials for the upper and lower sides, and even from the standpoint of controlling the height direction of the mold package 10, depending on the attachment method, the size may be too small. In some cases, it may be more convenient that is not small. In this example,
It should be noted that it does not represent the only best case.

Further, the shapes of the magnetic shields 50 and 51,
The sizes do not necessarily have to be the same, and the shape of the magnetic shields 50 and 51 is not limited to one thin rectangular parallelepiped. The essence of the present invention is
At least two of the current conductor 22C and the magnetic detection unit 20 are provided.
By having a structure in which a thin soft magnetic material plate or soft magnetic material is sandwiched, the measurement sensitivity and the magnetic shield effect can be contained in predetermined magnetic characteristics.

In the first to fifth embodiments, the center of the magnetic detector 20 including the magnetic flux concentrator plates 30A and 30B and the magnetic shields 50 and 51 are viewed vertically from the upper surface of the mold package 10 as shown in FIG. The centers are aligned. However, for example, when the magnetic shields 50 and 51 have a certain size with respect to the length 86 and the width 85 of the magnetic detection portion, the direction perpendicular to the magnetic field 92 by the current conductor 22C, that is, the length of the current conductor 22C. Even if there is a slight deviation in the vertical direction, for example, in mm, the measurement sensitivity and the magnetic shield effect do not change significantly. Even when the current conductor 22C is displaced in the direction parallel to the magnetic field 92, that is, in the width direction of the current conductor 22C, the magnetic shields 50 and 51 have the length 86 and the width 8 of the magnetic detection portion.
If the size is larger than 5, the position control does not necessarily require an accuracy of 0.1 [mm], for example, and there is a margin in the displacement of the magnetic shield. As described above, when the magnetic shield 51 covers the magnetic detection portion 20 in a relatively large size when viewed from the upper surface of the mold package 10, there is a positional deviation of the magnetic shield 51 in the length and width directions when viewed from the upper surface. It is possible to have a predetermined measurement sensitivity and magnetic shield effect without requiring precision.

On the contrary, due to such a two-layer structure of magnetic material,
Not only is it a magnetic shield effect from the outside to the inside, but it can be said that it has become difficult to leak magnetism from the inside to the outside,
It can be seen that it also has a magnetic shield effect for the outside. Next, a sixth embodiment will be described. In the first to fifth embodiments, the sensor output shows a disturbance change not only for the external proximity current conductor but also for the proximity magnetic body. For example,
The same shape, size, and thickness as the magnetic shield 50 (vertical 10
When a magnetic shield of (× width 7 × thickness 0.35 [mm]) is arranged above the board-mounted current sensor 100, the sensor output fluctuation rate shows 1 [%] at a distance of about 10 [mm]. It is obvious that the magnetic shield effect is exerted against the disturbance caused by such a close magnetic body. Similarly, the same applies to the external parallel magnetic field. Therefore, the present invention exerts the magnetic shield effect not only on the external proximity current conductor but also on the magnetic disturbance generated from the external magnetic circuit such as the proximity magnetic body and the external parallel magnetic field.

Next, a seventh embodiment will be described with reference to FIGS.
Will be described in detail with reference to. In the first to sixth embodiments, the magnetic shield 50 is the current conductor 22C.
It is incorporated in the mold package 10 in the state of being most closely contacted with. The magnetic shield 51 is not built in the mold package 10 from the beginning. When the magnetic shield 51 is arranged on the upper surface of the mold package 10, it is fixed with an adhesive or a cover. When used in a state of being lifted from the upper surface of the mold package 10, a spacer made of a non-magnetic material whose thickness is accurately controlled is inserted and fixed with an adhesive or a cover.
When lowering than the upper surface of the mold package 10,
For example, by using an industrial jig, the dug surface is made into a current conductor 22.
C, the magnetic detection part 20 or the magnetic shield 50 is dug parallel or almost parallel. FIG. 10 is an example in which the upper surface of the mold package 10 is dug down. FIG. 11 is a diagram in which the magnetic shield 51 is inserted into the dug hole.
FIG. 12 shows an example in which a lid is placed where the magnetic shield 51 is inserted. Instead of the lid, a thin coating of resin or the like may be used instead of the lid. Alternatively, when the mold package 10 is formed, a concave surface is formed in the molding die from the beginning so that the soft magnetic body can be inserted into the island upper surface later.

As described above, in the present embodiment, the board-mounted current sensor 100 includes the current conductor 22C, the magnetism detecting portion 20 for detecting the magnetism generated by the current flowing through the current conductor 22C, and the current conductor 22C. The magnetic detection part 2
A magnetic material shield 50 provided on the opposite side of 0, a magnetic material shield 51 provided on the opposite side of the magnetic material shield 50 with the current conductor 22C and the magnetic detector 20 interposed therebetween, and a current conductor on the printed circuit board surface. The lead frames 22A and 22B for electrically connecting the current conductor 22C are molded with resin.

As a result, the external magnetism coming from the direction of the magnetic shield 50, the external magnet coming from the direction of the magnetic shield 51, and the external magnetism from the side are shielded as viewed from the magnetic detector 20, so that they are shielded as compared with the conventional case. Thus, resistance to external magnetism can be improved. In addition, the current conductor 2
The magnetic flux generated by the current flowing through the 2C is the magnetic detection unit 20.
Since it is easy to converge in the direction of, the measurement sensitivity can be improved.

Further, in the present embodiment, the magnetic shield 50 is provided below the magnetic sensitive surface of the magnetic detecting section 20, and the magnetic shield 51 is attached to the magnetic sensitive surface of the magnetic detecting section 20. Is provided on the upper side. This effectively shields external magnetism that comes from the direction of the magnetic shield 50, external magnet that comes from the direction of the magnetic shield 51, and external magnetism from the side when viewed from the magnetic detector 20, so The resistance can be further improved.

Further, in this embodiment, the magnetic shield 50 and the magnetic shield 51 are plate-shaped soft magnetic bodies. This simplifies the sensor assembly and effectively shields the external magnetism coming from the direction of the magnetic shield 50, the external magnetism coming from the direction of the magnetic shield 51, and the external magnetism from the side when viewed from the magnetic detection unit 20. Therefore, the resistance to external magnetism can be further improved.

Furthermore, in the present embodiment, the magnetic shield 50 is provided in parallel or substantially parallel to the magnetic detection unit 20, and the magnetic shield 51 is parallel or almost parallel to the magnetic detection unit 20. It is provided in parallel. This allows the magnetic shield 50 to be seen from the magnetic detection unit 20.
The external magnetism that comes from the direction, the external magnet that comes from the direction of the magnetic shield 51, and the lateral magnetism from the side are effectively shielded, so that the resistance to the external magnetism can be further improved.

Further, in this embodiment, the magnetic flux concentrator plate 3 is used.
The magnetic flux concentrator plates 30A and 30B are located on both sides of the current conductor 22C such that the magnetic flux concentrator plates 30A and 30B face the magnetic sensitive surface of the magnetic flux detector 20 and the magnetic flux concentrator plates 30A and 30B are located on both sides of the current conductor 22C when viewed from the surface direction of the magnetic flux detector 20. 30A and 30B are provided at intervals. As a result, the magnetic flux generated by the current flowing through the current conductor 22C can be converged on the magnetically sensitive surface of the magnetic detection unit 20, so that the measurement sensitivity can be further improved.

In the first embodiment, the current conductor 22C corresponds to the object to be measured according to claims 1 to 4 or the object to be measured according to claim 5, 6, 8, 12, 16 or 17. The magnetic detection unit 20 is defined by any one of claims 1 to 6,
The magnetic substance shield 50 corresponds to the magnetic detection element according to claim 8, 10, 12, 16 or 17, and the magnetic shield 50 is defined by claim 2.
To the first magnetic body according to claim 12, 16 or 17, the first magnetic shielding means according to claim 3, 6 or 7, or the magnetic concentrating means according to claim 4, 8 or 9. In addition, the magnetic shield 51 is defined by claim 2, 5, 7,
It corresponds to the second magnetic body described in 9 to 12, 16 or 17, the second magnetic shield means described in claim 3, 6 or 7, or the magnetic shield means described in claim 4, 8 or 9.

In the first embodiment, the current conductor 22C corresponds to the conductor to be measured according to claim 14 or 15, and the magnetic detecting section 20 corresponds to the magnetic detecting element according to claim 14 or 15. , The magnetic flux concentrator plates 30A, 30B are
This corresponds to the magnetic flux concentrating means according to claim 14 or 15. Next, a second embodiment of the present invention will be described with reference to the drawings. FIG. 13 is a diagram showing a second embodiment of the magnetic sensor and the current sensor according to the present invention.

A method of manufacturing the board-mounted current sensor 100 will be described with reference to FIG. FIG. 13 is a cross-sectional view of the molding machine in the thickness direction of the board-mounted current sensor 100.
For example, protrusions 91A and 91B as shown in FIG. 13 are provided on the bottom of the molding die, and the magnetic shield 51 is put in the bottom of the molding die to float from the bottom surface by the protrusions 91A and 91B. The protrusions 91A and 91B are not necessarily shown in FIG.
It is not limited to something like. For example, a rod-like shape in which 91A and 91B are tied together and extended horizontally and the lower side is opened may be used.

The current conductor 22C includes a magnetic flux concentrator plate 30A,
The magnetic detection unit 20 including 30B is die bonded, and the magnetic shield 50 is also fixed to the current conductor 22C. The lead frames 24A to 24D and the magnetic detection unit 2 are also fixed.
It is in a state of being wire-bonded to the pad above 0 (not shown in FIG. 13). Lead frame 22A, 22B
Since the current conductor 22C and the current conductor 22C are integrated, they are placed upside down together with the lead frame on the molding die, and the molding resin is poured into the molding die in this state. After the curing, the mold package 10 taken out from the molding die has a hole formed in the upper surface (in some cases, the lateral surface) when the magnetic shield 51 is supported in the molding die. If necessary, cover the holes with paint, resin, adhesive, cover, etc.

As described above, in this embodiment, the magnetic shield 51 is installed on the protrusions 91A and 91B provided on the bottom of the molding die, and the magnetic detector 20, the current conductor 22C and the magnetic shield 50 are provided. A sensor unit made of is manufactured, and the manufactured sensor unit is placed in a mold with the magnetic detection unit 20 and the magnetic shield 51 facing each other, and a mold resin is placed in the mold with the sensor unit placed. Pour.

This facilitates mass production of the board-mounted current sensor 100 including the current conductors in which the magnetic shields are vertically arranged in the mold package. In the second embodiment, the current conductor 22C corresponds to the conductor to be measured according to claim 22, the magnetic detection unit 20 corresponds to the magnetic detection element according to claim 22, and the magnetic shield 50 includes: A magnetic shield 51 corresponding to the first magnetic body according to claim 22.
Corresponds to the second magnetic body according to claim 22. Further, the molding die corresponds to the molding machine according to claim 22.

Next, a third embodiment of the present invention will be described with reference to the drawings. FIG. 14 is a diagram showing a third embodiment of the magnetic sensor and the current sensor according to the present invention. The structure of the board-mounted current sensor 100 will be described with reference to FIG. FIG. 14 shows a board-mounted current sensor 1
00 is a sectional view in the thickness direction of No. 00. The board-mounted current sensor 100 is a current sensor that is mounted on the surface of a printed board (not shown), and is molded with resin as shown in FIG. 14 to measure the current in the printed board.

Inside the mold package 10, there are provided a magnetic detecting portion 20 including the magnetic flux concentrating plates 30A and 30B, and a lead frame 25 for mounting the magnetic detecting portion, exchanging electrical signals, and mounting on a printed circuit board. It is provided. The ends of the lead frame 25 are bent so that they can be mounted on the surface of the printed board. In this embodiment, a standard mold package such as DIP, SO is used.
The magnetic detection unit 20 was sealed using the package. Due to the required magnetic shield effect, the mold package 10
A magnetic shield 51 is provided on the lower surface of the above, and a magnetic shield 50 is provided above the current conductor on the side opposite to the magnetic detection portion.

The magnetic flux concentrator plates 30A and 30B are arranged such that the surface of the magnetic flux concentrator plates 30A and 30B face the surface of the printed circuit board at the time of mounting, and the magnetic flux concentrator plates 30A and 30B have the current conductor 23 when viewed from the surface direction of the printed circuit board. It is provided with a predetermined space so that it is located on both sides. Magnetic flux concentrator plates 30A, 30
By spacing B, the magnetism generated by the current flowing through the current conductor 23 is converged by the magnetic flux concentrator plates 30A and 30B toward the magnetically sensitive surface of the magnetic detector 20.

On the printed circuit board, the current conductor 23 and the magnetic shield 50 provided so as to be located on the opposite side of the board-mounted current sensor 100 with the current conductor 23 interposed therebetween when the board-mounted current sensor 100 is mounted. Is provided.
As described above, in the present embodiment, the board-mounted current sensor 100 includes the magnetic detection unit 20 that detects the magnetism generated by the current flowing through the current conductor 23, and the current conductor 23 sandwiching the magnetic detection unit 20 during mounting. And a magnetic shield 51 provided so as to be positioned on the opposite side of the printed circuit board from the current conductor 2 when the board-mounted current sensor 100 is mounted.
The magnetic shield 51 is provided so as to be positioned on the opposite side of the substrate-mounted current sensor 100 with the magnetic field shield 51 interposed therebetween. The current conductor may be on the top, middle, bottom or outside of the printed circuit board.

As a result, the external magnet coming from the direction of the magnetic shield 50, the external magnet coming from the direction of the magnetic shield 51, and the external magnet coming from the side as viewed from the magnetic detector 20 are shielded. Thus, resistance to external magnetism can be improved. In addition, the current conductor 2
The magnetic flux generated by the current flowing through the magnetic shield 3
A value of 0 facilitates convergence in the direction of the magnetic detection unit 20, so that measurement sensitivity can be improved.

Further, in the present embodiment, in the board-mounted current sensor 100, the magnetic detecting portion 20 is molded with resin. This makes it possible to reduce the size and
Electrical insulation between the current conductor 23 and the board-mounted current sensor 100 can be maintained. Further, since the magnetic detection unit 20 can be manufactured by a technique similar to a normal LSI process, it is suitable for mass production.

Further, in this embodiment, the magnetic flux concentrator plate 3 is used.
The magnetic flux concentrator plates 30A and 30B are positioned on both sides of the current conductor 23 so that the magnetic flux concentrator plates 30A and 30B face the magnetic sensitive surface of the magnetic flux detector 20 and the magnetic flux concentrator plates 30A and 30B are located on both sides of the current conductor 23 when viewed from the surface direction of the magnetic flux detector 20. 30A and 30B are provided at intervals. As a result, the magnetic flux generated by the current flowing through the current conductor 23 can be converged on the magnetically sensitive surface of the magnetic detection unit 20, so that the measurement sensitivity can be further improved.

In the third embodiment, the current conductor 23 corresponds to the conductor to be measured according to claim 18, and the magnetic shield 50 corresponds to the first magnetic body according to claim 18 or 19. The magnetic shield 51 corresponds to the second magnetic body according to claim 18. Next, a fourth embodiment of the present invention will be described with reference to the drawings. FIG. 15 is a diagram showing a fourth embodiment of the magnetic sensor and the current sensor according to the present invention.

FIG. 1 shows the structure of the board-mounted current sensor 100.
This will be described with reference to FIG. FIG. 15 is a sectional view of the board-mounted current sensor 100 in the thickness direction. The board-mounted current sensor 100 is a current sensor mounted between the current conductors 23A and 23B, and is molded with resin as shown in FIG. Inside the mold package 10, the magnetic detection unit 20 for detecting the magnetism generated by the current flowing through the current conductors 23A, 23B and the current conductors 23A,
Magnetic flux concentrator plates 30A and 30B for concentrating the magnetic flux generated by the current flowing in 23B in a predetermined direction are provided.
In addition, the lead frame 2 is attached to the mold package 10.
5 are provided. The end portion of the lead frame 25 is bent so that it can be mounted on the current conductor 23A or the current conductor 23B.

In the present embodiment, the magnetic detection unit 20 is sealed using a standard mold package such as DIP, SO package. When the magnetic flux concentrator plates 30A and 30B are mounted, the surfaces of the magnetic flux concentrator plates 30A and 30B are current conductors 23A.
Of the current conductors 23A and 23B so as to face the surface of the current conductor 23A and when viewed from the surface direction of the current conductor 23A.
It is provided at a predetermined interval so as to be located on both sides of B.
By spacing the magnetic flux concentrator plates 30A and 30B,
The magnetism generated by the current flowing through the current conductors 23A and 23B is generated by the magnetic flux concentrator plates 30A and 30B.
It is converged toward the magnetic sensitive surface of 0.

A magnetic shield 50 is provided on the current conductor 23A so as to be located on the opposite side of the board-mounted current sensor 100 with the current conductor 23A interposed therebetween when the board-mounted current sensor 100 is mounted. In the current conductor 23B, the same or almost the same amount of current flows through the current conductor 23A, and its current direction is opposite to that of the current conductor 23A. A magnetic shield 51 is provided so as to be located on the opposite side of the substrate-mounted current sensor 100 with the magnetic shield 51 interposed therebetween.

In this way, the current conductors 23A, 23 are symmetrically arranged.
By arranging B, the magnetic field detected by the magnetic detection unit 20 is strengthened to improve the sensitivity, and the magnetic fields can cancel each other outside the sensor. Thus, in the present embodiment, the board-mounted current sensor 100 has the magnetic detection unit 20 that detects the magnetism generated by the current flowing through the current conductors 23A and 23B, and the board-mounted current sensor 23A is mounted on the board. When the die current sensor 100 is mounted, the magnetic shield 50 is provided so as to be located on the opposite side of the board-mounted current sensor 100 with the current conductor 23A interposed therebetween.
Has the same or almost the same amount as the current flowing through the current conductor 23A, and its current direction is the current conductor 23A.
On the contrary, the magnetic shield 51 is provided so as to be located on the opposite side of the board-mounted current sensor 100 with the current conductor 23B interposed therebetween when the board-mounted current sensor 100 is mounted.

As a result, the external magnet coming from the direction of the magnetic shield 50, the external magnet coming from the direction of the magnetic shield 51, and the external magnet coming from the side as viewed from the magnetic detector 20 are shielded. Thus, resistance to external magnetism can be improved. In addition, the current conductor 2
Magnetism generated by current flowing through 3A and current conductor 23B
Since the magnetic fields generated by the current flowing through the magnetic field interfere with each other so as to strengthen each other, the measurement sensitivity can be improved.

Further, in the present embodiment, in the board-mounted current sensor 100, the magnetic detection portion 20 is molded with resin. This makes it possible to reduce the size and
Electrical insulation between the current conductor 23 and the board-mounted current sensor 100 can be maintained. Further, since the magnetic detection unit 20 can be manufactured by a technique similar to a normal LSI process, it is suitable for mass production.

Further, in this embodiment, the magnetic flux concentrator plate 3 is used.
The magnetic flux concentrator plates 30A and 30B are located on both sides of the current conductor 22C such that the magnetic flux concentrator plates 30A and 30B face the magnetic sensitive surface of the magnetic flux detector 20 and the magnetic flux concentrator plates 30A and 30B are located on both sides of the current conductor 22C when viewed from the surface direction of the magnetic flux detector 20. 30A and 30B are provided at intervals. As a result, the magnetic flux generated by the current flowing through the current conductor 22C can be converged on the magnetically sensitive surface of the magnetic detection unit 20, so that the measurement sensitivity can be further improved.

In the fourth embodiment, the magnetic detecting section 20 corresponds to the magnetic detecting element according to claim 20 or 21, and the current conductor 23A corresponds to the first measured conductor according to claim 13 or 20. Correspondingly, the current conductor 23B corresponds to the second measured conductor according to claim 13 or 20, and the magnetic shield 50 corresponds to the first magnetic body according to claim 20 or 21. The magnetic shield 51 corresponds to the second magnetic body according to claim 20.

Next, a fifth embodiment of the present invention will be described with reference to the drawings. FIG. 16 is a diagram showing a fifth embodiment of the magnetic sensor and the current sensor according to the present invention. This embodiment is the same as the first embodiment, except that
A standard package, for example, a DIP or SO package, is provided with a hole by means of machining or the like, and the current conductor 23 is provided in the hole.
Is embedded.

The structure of the board-mounted current sensor 100 is shown in FIG.
This will be described with reference to FIG. FIG. 16 is a sectional view of the board-mounted current sensor 100 in the thickness direction. The board-mounted current sensor 100 is a current sensor mounted on the surface of a printed board (not shown), and is molded with resin as shown in FIG. A groove is machined in the package, or a groove is previously formed in a molding die. Insert the current conductor here. In some cases, the current conductor may be incorporated during molding. Thereby, the magnetic flux concentrator 3
Keep the distance between the magnetic detection unit 20 including 0A and 30B and the current conductor close, and corresponding to this (during molding)
This has an advantage of keeping the distance between the magnetic detection unit 20 and the magnetic shield 51 at a predetermined value. As a result, it is possible to provide a current sensor that is excellent in sensitivity / shielding ability and variation reduction.

Inside the mold package 10, the current conductor 23, the magnetic detector 20 for detecting the magnetism generated by the current flowing through the current conductor 23, and the magnetic flux generated by the current flowing through the current conductor 23 are converged in a predetermined direction. Magnetic flux concentrators 30A and 30B are provided. Further, the mold package 10 is provided with a lead frame 25. The ends of the lead frame 25 are bent so that they can be mounted on the surface of the printed board.

The magnetic flux concentrator plates 30A, 30B are arranged such that the surface of the magnetic flux concentrator plates 30A, 30B faces the surface of the printed circuit board at the time of mounting, and the magnetic flux concentrator plates 30A, 30B of the current conductor 23 are viewed from the surface direction of the printed circuit board. It is provided with a predetermined space so that it is located on both sides. Magnetic flux concentrator plates 30A, 30
By spacing B, the magnetism generated by the current flowing through the current conductor 23 is converged by the magnetic flux concentrator plates 30A and 30B toward the magnetically sensitive surface of the magnetic detector 20.

A magnetic shield 51 to a magnetic shield 50 are provided on the printed circuit board. In some cases, the essence does not change even if the standard package mold is already provided with a recess for embedding the current conductor. By embedding the current conductor 23, the lower surface of the lead frame 25 to which the magnetic detection unit 20 is die-bonded may move downward, and the lower surface of the lead frame 25 may be exposed below the mold package 10.

As described above, in the present embodiment, the board-mounted current sensor 100 has the current conductor 23 and the magnetic detector 20 for detecting the magnetism generated by the current flowing through the current conductor 23, and the The substrate is a magnetic shield 5
1 to the magnetic shield 50. As a result, the external magnetism that comes from the direction of the magnetic shield 50, the external magnet that comes from the direction of the magnetic shield 51, and the external magnet from the side are shielded as viewed from the magnetic detector 20,
The resistance to external magnetism can be improved as compared with the conventional case. Moreover, since the magnetic flux generated by the current flowing through the current conductor 23 is easily converged in the direction of the magnetic detection unit 20, the measurement sensitivity can be improved.

Further, in this embodiment, the magnetic flux concentrator plate 3 is used.
The magnetic flux concentrator plates 30A and 30B are positioned on both sides of the current conductor 23 so that the magnetic flux concentrator plates 30A and 30B face the magnetic sensitive surface of the magnetic flux detector 20 and the magnetic flux concentrator plates 30A and 30B are located on both sides of the current conductor 23 when viewed from the surface direction of the magnetic flux detector 20. 30A and 30B are provided at intervals. As a result, the magnetic flux generated by the current flowing through the current conductor 23 can be converged on the magnetically sensitive surface of the magnetic detection unit 20, so that the measurement sensitivity can be further improved.

Next, a sixth embodiment of the present invention will be described with reference to the drawings. FIG. 17 is a diagram showing a sixth embodiment of the magnetic sensor and the current sensor according to the present invention. This embodiment uses a standard package such as DI
Magnetic detection unit 20 in P, SO-8 plastic package
And the magnetic shield 50 is sealed. FIG. 17
Shows an example of mounting using an SO-8 plastic package. In FIG. 17, there is a current conductor 23 on the PCB, P
A standard plastic package is placed on the top of the CB,
A magnetic shield 50 is arranged on the lower surface of the PCB, and the magnetic shield covers the current conductor 23 and the magnetic detection unit 20 above and below. As the current sensor package, for example, FIGS. 14 and 16 are arranged.

The magnetic shield may or may not be standard. Also, the magnetic shield on the bottom of the PCB is P
The essence does not change not only when it is attached to the CB but also when it is already formed on the PCB. With respect to the shape, size, thickness, and orientation of the magnetic shield inside the mold package 10, the magnetic shield below the PCB is shown in FIG.
7 may be arranged, and depending on the combination, the sensitivity and the shield effect can be improved while suppressing the area of the magnetic shield. In the present embodiment, the current conductor 23 is arranged below the board-mounted current sensor 100,
Even if you change the top and bottom, the essence does not change.

Next, a seventh embodiment of the present invention will be described with reference to the drawings. FIG. 18 is a diagram showing a seventh embodiment of a magnetic sensor and a current sensor according to the present invention. 18A is a top view of the board-mounted current sensor 100, and FIG. 18B is a board-mounted current sensor 10.
It is a perspective view of 0. In FIG. 18A, the magnetic shield attached to the upper surface is omitted.

The board-mounted current sensor 100 is enclosed in an SO-8 plastic package which is one of standard packages. The mold package 10 may contain a soft magnetic material for magnetic shielding (even if the mold package 10 includes a magnetic material under the mold package 10 instead of including a magnetic material). Good). A current conductor component is attached to the mold package 10 so as to cross the upper surface of the mold package 10,
As shown in FIG. 18B, a soft magnetic thin plate is attached to the current conductor. The current conductors are electrically connected to the conductors on both outsides of the mold package 10 by means such as soldering.

As described above, by preparing a current conductor (with a magnetic material) as a component on the assumption that it is attached to the standard package, the magnetic shield effect can be easily and surely enhanced in mounting on a PCB or the like. When it is desired to enhance the magnetic shield effect, it is attached to the current conductor that crosses the upper portion of the mold package 10. Next, an eighth embodiment of the present invention will be described with reference to the drawings. FIG. 19 is a diagram showing an eighth embodiment of the magnetic sensor and the current sensor according to the present invention.

High current measurements on the PCB board can be measured using standard packages. FIG. 19A is a side view of the board-mounted current sensor 100, and FIG.
FIG. 3 is a top view of the board-mounted current sensor 100. Figure 1
In 9 (A), the magnetic shield attached to the upper surface is omitted. The shaded area is where the measurement current flows. A large current is passed by using a plurality of leads (pins) in the mold package 10. Alternatively, a component that covers the lead and can be energized may be prepared. A current shield is attached to the current conductor so that the current conductor crosses the upper portion of the mold package 10. Similar to the seventh embodiment, the magnetic shield may be provided inside the mold package 10, and may be arranged below the mold package 10 in some cases.

As described above, by preparing the current conductor (with magnetic material) as a component on the assumption that the magnetic conductor is attached to the standard package, the magnetic shield effect can be easily and surely enhanced in mounting on a PCB or the like. When it is desired to enhance the magnetic shield effect, it is attached to the current conductor that crosses the upper portion of the mold package 10. Next, a ninth embodiment of the present invention will be described with reference to the drawings. 20 and 21 are views showing a ninth embodiment of a magnetic sensor and a current sensor according to the present invention.

First, the structure of the board-mounted current sensor 100 will be described with reference to FIG. FIG. 20 is a sectional view of the board-mounted current sensor 100 in the thickness direction. Figure 20
In the inside of the mold package 10, a hole ASIC 32 with a magnetic flux concentrating plate is provided on the surface 90 side of the exterior surface of the mold package 10 that faces the printed circuit board 3 during mounting.

Further, the mold package 10 is provided with a lead frame 25 for die-bonding the hole ASIC 32 with a magnetic flux concentrator. The ends of the lead frame 25 are bent so that they can be mounted on the surface of the printed board 3. Further, the lead frame 25 provided in the mold package 10 has a hole A with a magnetic flux concentrator.
The SIC 32 is bonded with a bonding paste.

The hole ASIC 32 with a magnetic flux concentrator is provided with the magnetic detection unit 20 on the surface of the exterior surface of the signal processing circuit that faces the printed circuit board 3 at the time of mounting, and between the signal processing circuit and the facing surface 90. And two magnetic flux concentrator plates 30A and 30B. Here, the magnetic detection unit 2
As 0, a hall element or the like can be adopted, and if two hall elements are paired, two or more pairs may be provided. The magnetic flux concentrator plates 30A and 30B are mounted on both sides of the current conductor 23 such that the magnetic flux concentrator plates 30A and 30B face the printed circuit board 3 surface at the time of mounting and the magnetic flux concentrator plates 30A and 30B are viewed from the surface direction of the printed circuit board 3. It is provided at a predetermined interval so as to be located at. Magnetic flux concentrator plates 30A, 30
By setting the interval B, the magnetism generated by the current flowing through the current conductor 23 and passing through the facing surface is converged toward the magnetically sensitive surface of the magnetic detection unit 20 by the magnetic flux concentrator plates 30A and 30B on both sides.

Thus, the board-mounted current sensor 100
Is obtained by integrally processing the hole ASIC 32 with a magnetic flux concentrator and the lead frame 25 with a molding resin.
The structure is suitable for mass production with a general-purpose process that does not cost much. Although the lead frame 25 is used for mounting on the substrate in the present embodiment, even if the lead frame 25 is not used, the magnetic sensing surface of the magnetic detection unit 20 is close to the current conductor 23 via the insulating layer. Alternatively, a flip-chip bonding type may be used as long as it can be contacted.

On the other hand, when a current other than the current to be measured flows in the vicinity of the board-mounted current sensor 100, the influence of disturbance magnetism is generated. In order to reduce the influence of the disturbance magnetism, the magnetic yoke 16 mounted on the printed circuit board 3 is provided. FIG. 21 is a diagram showing the structure of the magnetic yoke 16. It is not always necessary to form the magnetic path or the magnetic shield on the entire surface of the U-shape, and for example, only the central portion of the U-shape may be made the magnetic body.

As shown in FIG. 21, the magnetic yokes 16 are arranged on both surfaces of the printed circuit board 3 with the mounting surface of the board mounting type current sensor 100 interposed therebetween. Not only the magnetic yoke 16 may be provided, but the relative positional relationship with the board-mounted current sensor 100 is always constant so that the shield effect and the sensitivity of the measured current are always constant. It is important to provide
As one method, the upper surface of the mold package 10
In order to ensure a predetermined distance from the lower surface, it is possible to form a slit in the printed circuit board 3 and pass the leg portion of the magnetic yoke 16 through the slit so as to directly contact the mold package 10. By this,
For example, since the upper and lower magnetic yokes 16 and the Hall ASIC 32 with a magnetic flux concentrator are always in the same positional relationship, the sensitivity of the current to be measured and the magnetic shield effect are less varied, and a structure suitable for mass production can be obtained. .

The magnetic yoke 16 may be plastic-molded as long as it has legs for penetrating the printed circuit board 3 and ensuring a certain distance. Further, the facing surface 90 of the mold package 10 is cut into a concave shape so as to be closer to the current conductor 23 on the printed circuit board 3,
With the structure that enhances the degree of adhesion with the current conductor 23, the sensitivity of the measured current can be further improved.

Further, the Hall ASIC 32 with the magnetic flux concentrator is provided.
If you use an ASIC that incorporates correction functions such as sensitivity correction and offset correction, it is possible to further improve the accuracy. Type current sensor 10
0 can be realized. In the following, the Hall AS with magnetic flux concentrator
The IC 32 will be simply referred to as the magnetic detection unit 20.

As described above, when the magnetic yokes 16 are attached to the upper and lower surfaces of the printed circuit board 3 with the sensor sandwiched between them, the current conductor 23 and the magnetic detection unit 20 are sandwiched, and therefore, in the third embodiment described above. The structure is the same as that of the board-mounted current sensor 100 (FIG. 14). In this way, in the present embodiment, the board-mounted current sensor 100 has the magnetic detection unit 20 that detects the magnetism generated by the current flowing through the current conductor 23, and the printed board 3 has the board-mounted current sensor. When the sensor 100 is mounted, the magnetic yokes 16 are provided so as to be located on the same side and the opposite side of the board-mounted current sensor 100 with the current conductor 23 interposed therebetween.

As a result, the external magnetism arriving from the direction of the upper magnetic yoke 16 as viewed from the magnetic detector 20, the external magnetism arriving from the direction of the upper magnetic yoke 16 and the external magnetism from the side are shielded. The resistance to external magnetism can be improved in comparison with. Further, since the magnetic flux generated by the current flowing through the current conductor 23 is converged on the magnetic detection unit 20 by the magnetic yoke 16 on the side opposite to the magnetic detection unit 20 with the current conductor interposed therebetween, the measurement sensitivity can be improved.

Further, in the present embodiment, the board-mounted current sensor 100 includes the magnetic detecting section 20 for detecting the magnetism generated by the current flowing through the current conductor 23, and the magnetic flux concentrating plate 30A for converging the magnetic flux in the predetermined direction. 30B is integrally built in, and the magnetic detection unit 20 is provided on the surface 90 side of the outer surface of the mold package 10 that faces the surface of the printed circuit board 3 during mounting, and the magnetic detection unit 20 generates the current through the current conductor 23 to face it. The magnetic flux concentrator plates 30A and 30B are provided so that the magnetic flux passing through the surface 90 converges on the magnetically sensitive surface of the magnetic detector 20.

As a result, it is possible to manufacture by a technique similar to a normal LSI process, and the current of the current conductor 23 can be measured in a non-contact manner. While maintaining the electrical insulation between the conductor 23 and the board-mounted current sensor 100, the current of the current conductor 23 can be measured with relatively high accuracy including the direction of the current. In addition, the current conductor 2 can be simply mounted on the board surface.
Since the current of 3 can be measured, the current can be measured relatively easily. In addition, the magnetic detection unit 20 is replaced with a normal LSI.
It is suitable for mass production because it can be manufactured with the same technology as the process and can be put into one package.

Furthermore, since the primary side conductors are not built in the same package, it is possible to make the printed board 3 compact, without providing a space between the conductor patterns of the printed board 3 and mounting them in series. Further, since the current can be indirectly measured from the upper part of the conductor pattern, even if the parts are removed after the design, the conductor pattern does not need to be modified and changed, and the mounting can be relatively easily canceled.

Further, in this embodiment, the magnetic flux concentrator 3
The magnetic flux concentrator plates 30A and 30B are positioned on both sides of the current conductor 23 so that the magnetic flux concentrator plates 30A and 30B face the magnetic sensitive surface of the magnetic flux detector 20 and the magnetic flux concentrator plates 30A and 30B are located on both sides of the current conductor 23 when viewed from the surface direction of the magnetic flux detector 20. 30A and 30B are provided at intervals. As a result, the magnetic flux generated by the current flowing through the current conductor 23 can be converged on the magnetically sensitive surface of the magnetic detection unit 20, so that the measurement sensitivity can be further improved.

Further, in the present embodiment, the magnetic yoke 16 is mounted which sandwiches the mounting surface of the board-mounted current sensor 100 among the surfaces of the printed board 3 at a predetermined position vertically. As a result, noise resistance is improved, and variations in measurement sensitivity can be reduced. In the ninth embodiment,
The current conductor 23 corresponds to the conductor under test according to claim 18, the magnetic shield 50 corresponds to the first magnetic body according to claim 18 or 19, and the magnetic yoke 16 corresponds to claim 18.
It corresponds to the second magnetic body described.

[0124]

As described above, according to the magnetic sensor of the first aspect of the present invention, at least the external magnetism coming from the direction of each magnetic body as seen from the magnetic detecting element is shielded, so that the conventional magnetic sensor can be used. In comparison, the effect that the resistance to external magnetism can be improved is obtained.

Further, according to the magnetic sensor of claim 2 of the present invention, at least the external magnet coming from the direction of the first magnetic body and the external magnet coming from the direction of the second magnetic body are at least seen from the magnetic detection element. Since it is shielded, the effect of improving the resistance to external magnetism can be obtained as compared with the conventional case. Further, since the magnetic flux generated from the object to be measured easily converges in the direction of the magnetic detection element, the effect that the measurement sensitivity can be improved is also obtained.

Further, according to the magnetic sensor of claim 3 of the present invention, the external magnetism coming from the direction of the first magnetic shield means and the external magnet coming from the direction of the second magnetic shield means when viewed from the magnetic detection element. Is shielded at least, so that it is possible to improve the resistance to external magnetism as compared with the conventional case. Further, according to the magnetic sensor of claim 4 of the present invention, at least the external magnetism coming from the direction of the magnetic shield means when viewed from the magnetic detection element is shielded, so that the resistance to the external magnetism is improved as compared with the conventional one. The effect that it can improve is acquired.
Further, since the magnetic flux generated from the object to be measured easily converges in the direction of the magnetic detection element, the effect that the measurement sensitivity can be improved is also obtained.

On the other hand, claim 5, 7 or 9 according to the present invention.
According to the described current sensor, the first
At least the external magnet coming from the direction of the magnetic body and the external magnet coming from the direction of the second magnetic body are shielded, so that it is possible to obtain an effect that the resistance to the external magnet can be improved as compared with the conventional case. Further, since the magnetic flux generated by the current flowing through the conductor to be measured easily converges in the direction of the magnetic detection element, the effect that the measurement sensitivity can be improved is also obtained.

Further, according to the current sensor of the sixth or seventh aspect of the present invention, the external magnet coming from the direction of the first magnetic shielding means and the direction of the second magnetic shielding means from the direction of the magnetic detecting element. Since at least the external magnetism is shielded, it is possible to obtain an effect that the resistance to the external magnetism can be improved as compared with the conventional case. Further, according to the current sensor of claim 8 or 9 of the present invention, since the external magnetism coming from the direction of the magnetic shield means when viewed from the magnetic detection element is shielded at least, the external magnetism with respect to the external magnetism is higher than that of the conventional one. The effect that resistance can be improved is acquired. Further, since the magnetic flux generated by the current flowing through the conductor to be measured easily converges in the direction of the magnetic detection element, the effect that the measurement sensitivity can be improved is also obtained.

Furthermore, claims 10 to 1 according to the present invention.
According to the current sensor of the fifth aspect, at least the external magnet coming from the direction of the first magnetic body and the external magnet coming from the direction of the second magnetic body as viewed from the magnetic detection element are shielded, so that the resistance to the external magnetism is further improved. The effect of being able to improve is also obtained. Further, according to the current sensor of the eleventh or twelfth aspect of the present invention, at least the external magnet arriving from the direction of the first magnetic body and the external magnet arriving from the direction of the second magnetic body are shielded when viewed from the magnetic detection element. As a result, the effect of further improving the resistance to external magnetism can be obtained.

According to the twelfth aspect of the current sensor of the present invention, at least the external magnet coming from the direction of the first magnetic body and the external magnet coming from the direction of the second magnetic body are at least seen from the magnetic detection element. Since it is shielded, the effect of further improving the resistance to external magnetism is also obtained. Further, according to the current sensor of the thirteenth aspect of the present invention, the magnetism generated by the current flowing through the first conductor to be measured and the magnetism generated by the current flowing through the second conductor to be measured interfere so as to mutually strengthen each other. Therefore, there is an effect that the measurement sensitivity can be further improved.

Furthermore, claim 14 or 1 according to the present invention
According to the current sensor of the fifth aspect, since the magnetic flux generated by the current flowing through the conductor to be measured can be converged on the magnetically sensitive surface of the magnetic detection element, the measurement sensitivity can be further improved. Further, according to the current sensor of the fifteenth aspect of the present invention, the magnetic flux generated by the current flowing through the conductor to be measured can be more effectively converged on the magnetically sensitive surface of the magnetic detection element, so that the measurement sensitivity is improved. The effect that it can be further improved is also obtained.

On the other hand, claim 16 or 17 according to the present invention.
According to the board-mounted current sensor described above, at least the external magnet coming from the direction of the first magnetic body and the external magnet coming from the direction of the second magnetic body as viewed from the magnetic detection element are shielded, so that it is more than conventional. As a result, it is possible to improve the resistance to external magnetism. Further, since the magnetic flux generated by the current flowing through the conductor to be measured easily converges in the direction of the magnetic detection element, the effect that the measurement sensitivity can be improved is also obtained.

Further, according to the board-mounted current sensor of the seventeenth aspect of the present invention, the conductor to be measured, the magnetic detection element, a part or all of the first magnetic body, and a part or all of the second magnetic body. Also, since a part of the lead frame is molded with resin, it is possible to achieve miniaturization and also to maintain the electrical insulation between the current conductor and the current sensor. In addition, the magnetic detection element is a standard LSI
Since it can be manufactured by the same technique as the process, it is also suitable for mass production.

On the other hand, claim 18 or 19 according to the present invention.
According to the current detecting device described above, at least the external magnet arriving from the direction of the first magnetic body and the external magnet arriving from the direction of the second magnetic body as viewed from the magnetic detection element are shielded. The effect that the resistance to external magnetism can be improved is obtained. Further, since the magnetic flux generated by the current flowing through the conductor to be measured easily converges in the direction of the magnetic detection element, the effect that the measurement sensitivity can be improved is also obtained.

Further, according to the nineteenth aspect of the present invention, since the magnetic detection element and the first magnetic body are partially or wholly molded with resin, the size can be reduced and The effect of being able to maintain the electrical insulation between the conductor to be measured and the board-mounted current sensor is also obtained. In addition, since the magnetic detection element can be manufactured by the same technique as that of a normal LSI process, there is an effect that it is suitable for mass production.

Further, claim 20 or 2 according to the present invention.
According to the current detection device of the first aspect, the external magnetism that comes from the direction of the first magnetic body and the external magnet that comes from the direction of the second magnetic body as seen from the magnetic detection element are at least shielded. The effect that the resistance to external magnetism can be improved is obtained. Further, since the magnetism generated by the current flowing through the first measured conductor and the magnetism generated by the current flowing through the second measured conductor interfere with each other to strengthen each other, it is possible to obtain the effect that the measurement sensitivity can be improved. To be

Further, according to the current detecting device of the twenty-first aspect of the present invention, since the magnetic detecting element and the first magnetic body are partly or wholly molded with resin, miniaturization can be achieved and The effect that the electrical insulation between the first measured conductor and the second measured conductor and the board-mounted current sensor can be maintained is also obtained. In addition, since the magnetic detection element can be manufactured by the same technique as that of a normal LSI process, there is an effect that it is suitable for mass production. On the other hand, according to the method of manufacturing a current sensor of claim 22 of the present invention, it is possible to obtain the effect that the mass production of the board-mounted current sensor becomes relatively easy.

[Brief description of drawings]

FIG. 1 is a sectional view of a board-mounted current sensor 100 in a thickness direction.

FIG. 2 is a perspective view of a board-mounted current sensor 100.

FIG. 3 shows a magnetic shield 5 in addition to the magnetic shield 50.
3 is a graph showing the degree of disturbance received by the magnetic detection unit 20 due to the external proximity current conductor arranged above the mold package 10 when No. 1 is provided.

FIG. 4 shows a magnetic shield 5 in addition to the magnetic shield 50.
3 is a graph showing the degree of disturbance received by the magnetic detection unit 20 due to the external proximity current conductor arranged above the mold package 10 when No. 1 is provided.

FIG. 5 shows a magnetic shield 5 in addition to the magnetic shield 50.
3 is a graph showing the degree of disturbance received by the magnetic detection unit 20 due to the external proximity current conductor arranged above the mold package 10 when No. 1 is provided.

FIG. 6 shows a magnetic shield 5 in addition to the magnetic shield 50.
3 is a graph showing the degree of disturbance received by the magnetic detection unit 20 due to the external proximity current conductor arranged below the mold package 10 when No. 1 is provided.

7 is a graph showing an example of change in measurement sensitivity when the height position of the magnetic shield 51 is moved up and down with respect to the upper surface of the mold package 10. FIG.

8 is an example of a cross-sectional view of the board-mounted current sensor 100. FIG.

9 is an example of a top view of the board-mounted current sensor 100. FIG.

FIG. 10 is an example in which the upper surface of the mold package 10 is dug down.

FIG. 11 is a view in which a magnetic shield 51 is inserted into a dug hole.

FIG. 12 shows an example in which a lid is placed where a magnetic shield 51 is inserted.

13 is a cross-sectional view of the molding machine in the thickness direction of the board-mounted current sensor 100. FIG.

FIG. 14 is a sectional view of the board-mounted current sensor 100 in the thickness direction.

FIG. 15 is a sectional view of the board-mounted current sensor 100 in the thickness direction.

16 is a sectional view of the board-mounted current sensor 100 in the thickness direction. FIG.

FIG. 17 shows a mounting example using an SO-8 plastic package.

FIG. 18 is a top view and a perspective view of the board-mounted current sensor 100.

FIG. 19 is a side view and a top view of the board-mounted current sensor 100.

20 is a sectional view of the board-mounted current sensor 100 in the thickness direction. FIG.

FIG. 21 is a diagram showing a structure of a magnetic yoke 16.

[Explanation of symbols]

3 Printed Circuit Board 100 Board Mounted Current Sensor 10 Mold Package 16 Magnetic Yoke 20 Magnetic Detecting Sections 22C, 23, 23A, 23B Current Conductors 22A, 22B Lead Frames 24A-24D, 25 Lead Frame 26 Wires 30A, 30B Magnetic Focusing Plate 32 Magnetic Hall ASIC with converging plate 50 to 52 Magnetic shield 60 External proximity current conductor 81 Width of magnetic shield 51 82 Length of magnetic shield 51 83 Thickness of magnetic shield 51 External proximity current conductor 60
Distance between the magnetic shield 51 and the magnetic shield 51 width 86 of the magnetic detection unit 20 length of the magnetic detection unit 87 magnetic flux concentrator plate 30A, 3
Distance between 0B and magnetic shield 51 90 One side of mold 90A, 90B, 90C Mold mold frames 91A, 91B Guide for installing magnetic shield in mold 92 Direction of magnetic field by measured current 101 Current conductor or current conductor Component 102 Current conductor component

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁷ Identification code FI Theme Coat (reference) H01L 43/04 G01R 15/02 B (72) Inventor Robert Rats CH-6300 Zug Brix-Trace 9 F term (Reference) 2G017 AA01 AC01 AC06 AC07 AD53 AD55 AD63 2G025 AA02 AA07 AB01 AB02

Claims (22)

[Claims] 1. A sensor for detecting magnetism, comprising: an object to be measured; a magnetic detection element for detecting magnetism generated from the object to be measured; and a plurality of magnetic bodies surrounding the magnetic detection element. A magnetic sensor comprising: 2. A sensor for detecting magnetism, comprising: an object to be measured, a magnetic detection element for detecting magnetism generated from the object to be measured, and an opposite side of the magnetic detection element sandwiching the object to be measured. A magnetic sensor comprising: a first magnetic body provided; and a second magnetic body provided on the opposite side of the first magnetic body with the object to be measured and the magnetic detection element sandwiched therebetween. 3. A sensor for detecting magnetism, comprising: an object to be measured, a magnetic detection element for detecting magnetism generated from the object to be measured, and an opposite side of the magnetic detection element sandwiching the object to be measured. A magnetic sensor comprising: a first magnetic shield means provided; and a second magnetic shield means provided on the opposite side of the first magnetic shield means with the object to be measured and the magnetic detection element sandwiched therebetween. . 4. A sensor for detecting magnetism, comprising: an object to be measured, a magnetic detection element for detecting magnetism generated from the object to be measured, and an opposite side of the magnetic detection element sandwiching the object to be measured. The magnetic flux concentrating means is provided for converging the magnetic flux in a predetermined direction, and magnetic shielding means provided on the opposite side of the magnetic flux concentrating means with the object to be measured and the magnetic detection element interposed therebetween. A magnetic sensor, wherein the magnetic flux generated from the object to be measured is provided so as to converge in the direction of the magnetic detection element. 5. A sensor for detecting an electric current, comprising: a conductor to be measured; a magnetic detection element for detecting magnetism generated by a current flowing through the conductor to be measured; and a magnetic detection element sandwiching the conductor to be measured. A current sensor comprising a first magnetic body provided on the opposite side and a second magnetic body provided on the opposite side of the first magnetic body with the conductor to be measured and the magnetic detection element sandwiched therebetween. . 6. A sensor for detecting a current, comprising: a conductor to be measured; a magnetic detection element for detecting magnetism generated by a current flowing through the conductor to be measured; and a magnetic detection element sandwiching the conductor to be measured. A first magnetic shield means provided on the opposite side, and a second magnetic shield means provided on the opposite side of the first magnetic shield means with the conductor to be measured and the magnetic detection element sandwiched therebetween. Current sensor to do. 7. The current sensor according to claim 6, wherein the first magnetic shield means is a first magnetic body, and the second magnetic shield means is a second magnetic body. 8. A sensor for detecting an electric current, comprising: a conductor to be measured; a magnetic detection element for detecting magnetism generated by a current flowing through the conductor to be measured; and a magnetic detection element sandwiching the conductor to be measured. A magnetic converging means provided on the opposite side for converging the magnetic flux in a predetermined direction; and a magnetic shielding means provided on the opposite side of the magnetic converging means with the conductor to be measured and the magnetic detection element interposed therebetween, The converging means is provided so that the magnetic flux generated by the current flowing through the conductor to be measured converges in the direction of the magnetic detection element. 9. The current sensor according to claim 8, wherein the magnetic flux concentrating means is a first magnetic body, and the magnetic shielding means is a second magnetic body. 10. The magnetic device according to claim 5, wherein the first magnetic body is provided on one side with respect to the magnetically sensitive surface of the magnetic detection element, and the second magnetic body is A current sensor, which is provided on the other side of a magnetically sensitive surface of a magnetic detection element. 11. The current sensor according to claim 10, wherein the first magnetic body and the second magnetic body are plate-shaped soft magnetic bodies. 12. The magnetic body according to claim 11, wherein the first magnetic body is provided in parallel or substantially parallel to the magnetic detection element or the conductor to be measured, and the second magnetic body is the magnetic detection element. Alternatively, the current sensor is provided in parallel or substantially parallel to the conductor to be measured. 13. The conductor to be measured according to any one of claims 10 to 12, wherein a current flowing through the first conductor to be measured is the same as or substantially the same as a current flowing through the first conductor to be measured. A current sensor comprising a second conductor to be measured whose current direction is opposite to that of the first conductor to be measured. 14. The magnetic focusing means according to claim 10, further comprising a magnetic focusing means for focusing the magnetic flux in a predetermined direction, wherein the magnetic focusing means generates a magnetic flux generated by a current flowing through the conductor to be measured. A current sensor, which is provided so as to converge on the magnetic sensitive surface. 15. The magnetic flux concentrator according to claim 14, wherein the magnetic flux concentrator is composed of a plurality of magnetic flux concentrators, and a surface of the magnetic flux concentrator is opposed to a magnetically sensitive surface of the magnetic sensor. So that the magnetic flux concentrator plates are located on both sides of the conductor to be measured when viewed from the surface direction,
A current sensor characterized in that the plurality of magnetic flux concentrator plates are provided at intervals. 16. A sensor mounted on the surface of a substrate having a current conductor, wherein the conductor to be measured, a magnetic detection element for detecting magnetism generated by a current flowing through the conductor to be measured, and the conductor to be measured are sandwiched. A first magnetic body provided on the opposite side of the magnetic detection element, a second magnetic body provided on the opposite side of the first magnetic body with the conductor to be measured and the magnetic detection element interposed therebetween, and A substrate-mounted current sensor, characterized in that a lead frame for electrically connecting the measurement conductor and the current conductor is integrally incorporated. 17. The resin according to claim 16, wherein the conductor to be measured, the magnetic detection element, a part or all of the first magnetic body, a part or all of the second magnetic body and a part of the lead frame are made of resin. A board-mounted current sensor characterized by being molded with. 18. A device comprising a substrate having a conductor to be measured and a substrate-mounted current sensor mounted on the surface of the substrate, wherein the substrate-mounted current sensor is generated by a current flowing through the conductor to be measured. And a first magnetic body provided so as to be located on the opposite side of the conductor to be measured with the magnetic detection element sandwiched between the magnetic detection element and the first magnetic body. A current detection device comprising a second magnetic body provided so as to be located on the opposite side of the substrate-mounted current sensor with the conductor to be measured being sandwiched between when the die current sensor is mounted. 19. The current detection device according to claim 18, wherein the board-mounted current sensor is obtained by molding a part or all of the magnetic detection element and the first magnetic body with resin. 20. A second conductor in which the same or substantially the same amount of current as the current flowing through the first conductor to be measured flows and the current direction is opposite to that of the first conductor to be measured.
An apparatus comprising: a conductor to be measured; and a board-mounted current sensor mounted between the first conductor to be measured and the second conductor to be measured and on the first conductor to be measured or the second conductor to be measured. Wherein the board-mounted current sensor has a magnetic detection element that detects magnetism generated by a current flowing through the first conductor to be measured and the second conductor to be measured, and the first conductor to be measured is A first magnetic body provided so as to be located on the opposite side of the board-mounted current sensor with the first conductor to be measured sandwiched between the board-mounted current sensor and the second conductor to be measured; A current detection device having a second magnetic body provided so as to be located on the opposite side of the board-mounted current sensor while sandwiching the second conductor to be measured when the board-mounted current sensor is mounted. . 21. The current detecting device according to claim 20, wherein the substrate mounting type current sensor is obtained by molding a part or all of the magnetic detection element and the first magnetic body with resin. 22. The method of manufacturing a current sensor according to claim 17, wherein the second magnetic body is installed on a pedestal provided at the bottom of the molding machine, and the magnetic detection element. A sensor section manufacturing step of manufacturing a sensor section composed of the conductor to be measured and the first magnetic body, and a sensor section manufactured in the sensor section manufacturing step with the magnetic detection element and the second magnetic body facing each other. A current sensor characterized by including a sensor section arranging step for arranging the molding resin in the molding machine, and a molding resin inflow step for pouring molding resin into the molding machine in a state where the sensor section is arranged in the sensor section arranging step. Manufacturing method.