JP2002095232A - Armature structure of linear motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an armature structure of a linear motor which enables the improvement of a space factor of an armature coil, space savings, and the improvement of propulsive force characteristics. SOLUTION: This linear motor has an armature 1 which faces permanent magnets 8 with a magnetic gap in a longitudinal direction of a field yoke 9, and a moving unit 6 provided on the top surface of the armature. Further, the motor comprises an armature core 2 composed of laminated electromagnetic steel plates punched into comb-shapes, and armature coils 5 neatly wound and housed in coil housing parts 3B. The armature core 2 comprises teeth 3 which are formed respectively in a plurality of approximately I-shaped blocks, have engagement protrusions 3A, and are successively arranged and integrally coupled with a yoke 4 with dovetail-shaped engagement slots 4A. After bolt screws 7 are inserted through through-holes 6A of the moving unit 6A, the bolt screws 7 are screwed into tap holes 4B of the yoke 4 to fix the moving unit 6 to the yoke 4 integrally.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear motor used for feeding a table of a machine tool, a semiconductor manufacturing apparatus, and the like, and more particularly to an armature structure of a linear motor characterized by coupling an armature core and a moving body. It is.

[0002]

2. Description of the Related Art Conventionally, it is used for table feeding of a machine tool or a semiconductor manufacturing apparatus, etc., and an armature is used as a movable element, a field yoke is used as a stator, and an armature is arranged along a longitudinal direction of the field yoke. The moving coil linear motor to be run is configured as shown in FIG. FIG. 3 shows a side sectional view of a conventional linear motor. In the drawings, an example of a gap-facing type linear motor in which a field pole and an armature face each other with a magnetic gap will be described. In the drawing, reference numeral 8 denotes a permanent magnet constituting a field pole, and 9 denotes a flat field yoke to which a plurality of permanent magnets 8 are alternately arranged and fixed. Reference numeral 20 denotes an armature opposed to the row of the permanent magnets 8 via a magnetic gap.
Is an armature core formed by punching and stacking a flat electromagnetic steel sheet into a comb shape, 21A is a tooth forming a semi-closed slot 5B, 21B is a yoke, 21C is a winding accommodating portion, 21D
Is a pocket hole, 22 is an armature coil housed in a tooth, 24 is a coupling member, 24A is a tap hole having a female screw portion provided on the coupling member, 25 is provided on the upper surface of the armature 20 and mounts a mounted object. , A flat moving body for fixing a table (not shown), 25A is a through hole, and 26 is a bolt screw having a male screw portion. In such a linear motor, the configuration in which the armature core 21 is coupled to the movable body 25 is such that a predetermined arrangement of pocket holes 21D is formed in the region of the yoke 21B, and the tap holes 24 separately manufactured and formed.
A, and a bolt screw 26 is attached to the coupling member 24 through the through hole 25A of the moving body 25.
The armature 20 can be firmly connected to the moving body 25 by screwing into the tap hole 24A. When the armature coil 22 of the linear motor is energized, the armature coil 2
The mover moves in the axial direction due to the electromagnetic action between the magnet 2 and the permanent magnet 8 (for example, JP-A-9-70166).

[0003]

In the prior art, however, since the armature core 21 is integrally formed of the teeth 21A and the yoke 21B, the armature coils 22 are directly connected to the teeth 21A of the laminated armature core 21 of the linear motor. In the case of winding the wire, a means for dropping the material wound by the winding form in another process into the winding accommodating portion 21C is employed, so that the workability of the winding is poor and the space of the winding accommodating portion 21C is occupied. There was a problem that the rate could not be raised. As a result, when an exciting current is applied to the armature coil, the motor performance is deteriorated such that the motor copper loss (Joule loss) increases.
Further, since the armature coil 7 is formed by a winding die,
There has been a problem that the coil end length becomes longer, the dimension in the width direction of the motor (the dimension in the direction perpendicular to the paper surface) increases, and the motor becomes larger. Further, the coupling member 24 mounted in the pocket hole of the armature core exists over the entire stacking direction of the armature core 21 and has a structure in which a magnetic flux passing in the longitudinal direction of the yoke 21B is partially blocked. The yoke 21
This means that the magnetic resistance of B is equivalently increased, which causes a decrease in the thrust characteristics of the linear motor. The present invention has been made to solve the above problems. Improving workability when winding the armature coil around the winding accommodating part of the armature core, improving the space factor of the armature coil, saving space, and improving thrust characteristics. It is an object of the present invention to provide an armature structure of a linear motor capable of performing the following.

[0004]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problem, the present invention according to the first aspect of the present invention is directed to a field magnet in which a plurality of permanent magnets constituting a field pole are arranged side by side so as to alternately have different polarities. A yoke, an armature that is arranged along the longitudinal direction of the field yoke with the permanent magnet row interposed via a magnetic gap, and a moving body for mounting a mounted object provided on an upper surface of the armature The armature comprises: an armature core formed by punching and laminating an electromagnetic steel sheet in a comb shape, and an armature coil arranged and wound in a winding housing portion of the armature core. In a linear motor in which one of the field pole and the armature is a stator and the other is a mover, the field pole and the armature run relatively to each other. Formed for each substantially I-shaped block of And a yoke formed in a flat plate so that the teeth and the teeth can be sequentially arranged and connected in the thrust direction of the mover, and an engagement protrusion is provided on one of the teeth and the yoke. The teeth and the yoke are integrally connected by providing an engaging groove on the other side so as to engage with the engaging protrusion, and are fixed by a resin mold so as to cover the entire armature. According to a second aspect of the present invention, in the armature structure of the linear motor according to the first aspect, the yoke is provided with a tap hole for connecting with the moving body, and the moving body is provided with a tap hole of the yoke. Are provided, and the yoke and the movable body are integrally fixed by passing a bolt screw through the through hole.
According to a third aspect of the present invention, in the armature structure for a linear motor according to the first or second aspect, the engaging groove has a dovetail shape. According to a fourth aspect of the present invention, in the armature structure for a linear motor according to the first or second aspect,
The engagement groove has a U-shape.

[0005]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on an embodiment shown in the drawings. FIG. 1 is a side sectional view of a linear motor showing an embodiment of the present invention. FIG. 2 is a side sectional view of a linear motor showing another embodiment of the present invention. The same components as those of the prior art are denoted by the same reference numerals, and the description thereof will be omitted. Only different points will be described. In the figure, 1 is an armature, 2 is an armature core, 3 is a tooth, 3A
Is an engagement protrusion, 3B is a winding accommodating portion, 4 is a yoke, 4A is an engagement groove, 4B is a tap hole, 5 is an armature coil, 6 is a moving body, 7 is a bolt screw, and 10 is a resin mold. The differences between the present invention and the conventional one are as follows. That is,
An armature core 2 includes teeth 3 formed for each of a plurality of substantially I-shaped blocks, and a yoke 4 formed in a plate shape so that the teeth 3 can be sequentially arranged and connected in the thrust direction of the mover. It is more divided. One of the divided teeth 3 is provided with a dovetail-shaped engaging protrusion 3A, and the other yoke 4 is provided with a dovetail-shaped engaging groove 4A so as to engage with the engaging protrusion 3A. The teeth 3 and the yoke 4 are integrally connected, and are fixed by a resin mold 10 so as to cover the entire armature 1. The yoke 4 is provided with a tap hole 4B for coupling to the moving body 6, and the moving body 6 is provided with a through hole 6A formed to correspond to the position of the tapped hole 4B of the yoke 4, and a bolt screw 7B. After passing through the through hole 6A, the yoke 4 and the moving body 6 are integrally fixed by screwing into the tap hole 4B of the yoke 4.

Next, the process of assembling the armature of such a linear motor will be described. First, the armature coil 7 is wound around each of the plurality of block-shaped teeth 3 in an aligned winding manner, and the engagement protrusions 3A of each of the plurality of teeth 3 are sequentially engaged with the engagement grooves 4A of the yoke 4. Then, the teeth 3, the yoke 4, and the armature coil 5 are fixedly and integrally fixed by a resin mold 10 so as to cover the entirety. Next, after inserting the bolt screw 7 into the through hole 6A of the moving body 6, the tap hole 4 of the armature 1 integrated by the teeth 3 and the yoke 4 is formed.
The moving body 5 and the armature 1 are integrally fixed by screwing the bolt screw 7 into B.

Therefore, in the embodiment of the present invention, the armature core 2 is connected to the teeth 3 formed for each of a plurality of substantially I-shaped blocks by sequentially arranging the teeth 3 in the thrust direction of the mover. One of the divided teeth 3 is provided with an engagement protrusion 3A, and the other yoke 4 is provided with an engagement protrusion 3A.
The teeth 3 and the yoke 4 are integrally connected by providing a dovetail-shaped engagement groove 4A so as to engage with the armature 1 and fixed by a resin mold 10 so as to cover the entire armature 1. Since the armature coil 7 is wound around each of the block-shaped teeth 3, the space factor of the winding housing 3 </ b> B can be increased without impairing the workability of the winding. As a result, when an exciting current is applied to the armature coil 5, it is possible to eliminate the problem of deterioration of motor performance such as an increase in motor copper loss as in the related art. Further, it is possible to solve the problem that the coil end length of the armature coil 5 becomes longer, the dimension in the width direction of the motor becomes larger, and the motor becomes larger. The yoke 4 is provided with a tap hole 4B for coupling to the moving body 6, and the moving body 6 is provided with a through hole 6A formed to correspond to the position of the tapped hole 4B of the yoke 4, and a bolt screw 7B. After passing through the through hole 6A, the tap hole 4 of the yoke 4
B, the yoke 4 and the moving body 6 are integrally fixed, so that the bolt screws 7 mounted inside the armature core intermittently exist in the entire armature core 21 in the stacking direction. However, since the structure does not partially block the magnetic flux passing through the longitudinal direction of the yoke 4 unlike the prior art,
By increasing the magnetic resistance of the yoke 4 equivalently, the problem of lowering the thrust characteristics of the linear motor can be solved. Further, the linear motor according to the present embodiment is configured such that the divided teeth are sequentially engaged with the yoke for each block, so that the linear motor is suitable when a long stroke is required according to the use of the linear motor. . In this embodiment, a configuration in which a dovetail-shaped engaging protrusion is provided on one of the engaging portions of the teeth and the yoke, and a dovetail-shaped engaging groove is provided on the other to engage with the engaging protrusion. However, the shape of the engaging portion between the teeth and the yoke may be U-shaped as shown in FIG. 2 instead of the shape of the engaging portion. Further, in this embodiment, in order to connect the yoke 4 and the moving body 6, the bolt screw 7 is screwed into the tap hole 4B through the through hole 6A of the moving body 6 into the tap hole 4B provided in the yoke 4, and integrally fixed. Although not shown, instead of such a fixing method, a weight hole is provided on the back surface of the yoke 4 and a solid cylindrical member having a tapped hole is fitted into the weight hole. The yoke 4 and the movable body 6 may be integrally fixed by screwing the bolt screw 7 into the tap hole of the cylindrical member via the through hole 6A of the movable body 6.

[0008]

As described above, according to the present invention, the following effects can be obtained. (1) An armature core is composed of teeth formed for each of a plurality of substantially I-shaped blocks and a yoke formed in a flat plate shape so that the teeth can be sequentially arranged and connected in the thrust direction of the mover. One of the divided teeth is provided with an engagement projection, and the other yoke is provided with an engagement groove having a dovetail shape so as to engage with the engagement projection, and the teeth and the yoke are integrally connected. In addition, since the armature coil is wound around each of the divided block-shaped teeth, which is fixed with a resin mold so as to cover the entire armature, the workability of the winding is not impaired. In addition, it is possible to increase the space factor of the winding of the winding housing. As a result, when an exciting current is applied to the armature coil, it is possible to eliminate a problem of deteriorating motor performance such as an increase in motor copper loss as in the related art. Further, it is possible to solve the problem that the coil end length of the armature coil is increased, the size of the motor in the width direction is increased, and the motor is increased in size. (2) The yoke is provided with a tapped hole for connection with the moving body, and the moving body is provided with a through hole formed so as to correspond to the position of the tapped hole of the yoke. After that, since the yoke and the moving body were screwed into the tap hole of the yoke and fixed integrally, the bolt screws installed inside the armature core are intermittently present in the entire armature core laminating direction. There is no structure that partially blocks the magnetic flux passing through the longitudinal direction of the yoke unlike the prior art, eliminating the problem of equivalently increasing the magnetic resistance of the yoke and lowering the thrust characteristics of the linear motor. can do. (3) The linear motor according to the present embodiment has a configuration in which the divided teeth are sequentially engaged with the yoke for each block. Therefore, the linear motor is suitable when a long stroke is required according to the use of the linear motor. is there.

[Brief description of the drawings]

FIG. 1 is a side sectional view of a linear motor showing an embodiment of the present invention.

FIG. 2 is a side sectional view of a linear motor showing another embodiment of the present invention.

FIG. 3 is a side sectional view of a linear motor showing a conventional technique.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Armature 2 Armature core 3 Teeth 3A Engagement projection (dovetail shape) 3B Winding accommodation part 3C Engagement projection (U-shape) 4 Yoke 4A Engagement groove (dovetail shape) 4B Tapped hole 4C Engagement projection ( 5 U-shaped) 5 Armature coil 6 Moving body 7 Bolt screw 8 Permanent magnet 9 Field yoke 10 Resin mold

Claims (4)

[Claims] 1. A field yoke in which a plurality of permanent magnets constituting a field pole are arranged side by side so as to have alternately different polarities, and the permanent magnet array and a magnetic air gap along a longitudinal direction of the field yoke. Armature and a moving body for mounting a mounted object provided on the upper surface of the armature, wherein the armature is formed by punching out electromagnetic steel sheets in a comb shape and stacking them. An armature core, and an armature coil aligned and wound in a winding housing of the armature core. One of the field pole and the armature is a stator, and the other is a mover. In the linear motor, the armature core is configured to relatively move the field pole and the armature, and the armature core includes a tooth formed for each of the plurality of substantially I-shaped blocks and a thrust of the mover by the tooth. In a row in the direction A yoke formed in a flat plate shape so as to be capable of being provided, and one of the teeth and the yoke is provided with an engagement protrusion, and the other is provided with an engagement groove so as to engage with the engagement protrusion. An armature structure of a linear motor, wherein the teeth and the yoke are integrally connected to each other by a resin mold so as to cover the entire armature. 2. The yoke is provided with a tap hole for connecting to the moving body, and the moving body is provided with a through hole formed corresponding to the position of the tap hole of the yoke, and the through hole is provided. The yoke and the moving body are integrally fixed by passing a bolt screw through a hole.
The armature structure of the described linear motor. 3. The armature structure of a linear motor according to claim 1, wherein said engagement groove has a dovetail shape. 4. The armature structure for a linear motor according to claim 1, wherein said engagement groove is U-shaped.