IT988681B - CONTROL SYSTEM FOR ELECTRON EMITTERING DEVICES - Google Patents
CONTROL SYSTEM FOR ELECTRON EMITTERING DEVICESInfo
- Publication number
- IT988681B IT988681B IT2457673A IT2457673A IT988681B IT 988681 B IT988681 B IT 988681B IT 2457673 A IT2457673 A IT 2457673A IT 2457673 A IT2457673 A IT 2457673A IT 988681 B IT988681 B IT 988681B
- Authority
- IT
- Italy
- Prior art keywords
- emittering
- electron
- devices
- control system
- control
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
- G05F1/10—Regulating voltage or current
- G05F1/46—Regulating voltage or current wherein the variable actually regulated by the final control device is dc
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/243—Beam current control or regulation circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US26828472A | 1972-07-03 | 1972-07-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
IT988681B true IT988681B (en) | 1975-04-30 |
Family
ID=23022270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT2457673A IT988681B (en) | 1972-07-03 | 1973-05-25 | CONTROL SYSTEM FOR ELECTRON EMITTERING DEVICES |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS4959526A (en) |
CA (1) | CA982234A (en) |
DE (1) | DE2332604A1 (en) |
FR (1) | FR2191258B1 (en) |
IT (1) | IT988681B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3175821D1 (en) * | 1981-10-21 | 1987-02-12 | Hell Rudolf Dr Ing Gmbh | Highly stabilized beam generator for charged particles |
US7538477B2 (en) * | 2006-11-27 | 2009-05-26 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Multi-layer transducers with annular contacts |
US10129656B2 (en) | 2009-01-30 | 2018-11-13 | Avago Technologies International Sales Pte. Limited | Active temperature control of piezoelectric membrane-based micro-electromechanical devices |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE221138C (en) * | 1971-04-30 |
-
1973
- 1973-05-25 IT IT2457673A patent/IT988681B/en active
- 1973-06-13 FR FR7322359A patent/FR2191258B1/fr not_active Expired
- 1973-06-14 JP JP6647973A patent/JPS4959526A/ja active Pending
- 1973-06-19 CA CA174,374A patent/CA982234A/en not_active Expired
- 1973-06-27 DE DE19732332604 patent/DE2332604A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
DE2332604A1 (en) | 1974-01-24 |
CA982234A (en) | 1976-01-20 |
FR2191258B1 (en) | 1976-05-28 |
JPS4959526A (en) | 1974-06-10 |
FR2191258A1 (en) | 1974-02-01 |
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