GB2045553A - Power supply for glow discharge chamber - Google Patents

Power supply for glow discharge chamber Download PDF

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Publication number
GB2045553A
GB2045553A GB8007980A GB8007980A GB2045553A GB 2045553 A GB2045553 A GB 2045553A GB 8007980 A GB8007980 A GB 8007980A GB 8007980 A GB8007980 A GB 8007980A GB 2045553 A GB2045553 A GB 2045553A
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GB
United Kingdom
Prior art keywords
chamber
transformer
current rectifying
rectifying means
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB8007980A
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GB2045553B (en
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Vmei Lenin
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Vmei Lenin
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Publication of GB2045553A publication Critical patent/GB2045553A/en
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Publication of GB2045553B publication Critical patent/GB2045553B/en
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34—Methods of heating
    • C21D1/38—Heating by cathodic discharges
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
    • H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
    • H02M7/12—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/125—Avoiding or suppressing excessive transient voltages or currents

Abstract

A circuit arrangement for controlling the power supply to a discharge chamber (9) comprises a power transformer (1) connectable to a power supply (2), two sequentially connected rectifying means (4 and 6) connected across the chamber (9) a short-circuiting element (7) connected across one rectifying means (6) and control means (14). When the voltage across the chamber (9) surpasses a particular threshold voltage element (7) conducts. Control means (14, 15) switches off one rectifying means (6) when it senses this conduction. A second transformer (11) and a condenser (12) are connected across the chamber (9) and a thyristor 13 controlled by control means (14, 15) short circuits part of the second transformer (11) when an arc discharge in the chamber (9) occurs. The time necessary for cleaning work pieces is decreased, the power supplied differs little from the nominal power and the electric strength of the working chamber (9) is restored quickly. The productivity of the chamber (9) is increased. <IMAGE>

Description

SPECIFICATION Circuit arrangement for a discharge chamber The present invention relates to a circuit arrangement for a discharge chamber, for example for the chemical-thermal treatment of metal work pieces under conditions of an electric glow discharge.
A known circuit arrangement for a discharge chamber uses a thyristor connected across the cathode and the anode of the chamber and a magnetic amplifier to control the voltage supplied to the chamber. A control circuit is connected to a voltage sensing means to sense the voltage across the chamber. The working regime is established by a command voltage from the control circuit to the magnetic amplifier. When the range of regulation, determined by the magnetic amplifier, proves inadequate, then the coefficient of transformation is changed by way of an interconnector.
When the voltage through the working chamber increases above a predetermined limit the thyristor is switched on short-circuiting the anode and the cathode of the working chamber. Simultaneously the command voltage to the magnetic amplifier is lowered, the thyristor is switched off following an increase of a command voltage. The electric glow discharge in the working chamber is restituted within four seconds.
A defect of this known arrangement is that the full power drawn from the electric supply line normally exceeds the nominal power of the arrangement (defined as the maximum power of the glow discharge). Another defect is the long time necessary for the process of cleaning the work pieces in the working chamber when used for the first time. The working strength of the working chamber is restored comparatively slowly and the excitement of a glow discharge following switching off is restituted with a considerable delay - up to four seconds. This delay makes the known arrangement unpracticle for repeated operations, especially when an arc discharge appears very frequently.
According to one aspect of the present invention there is provided a circuit arrangement for controlling the power supply to a discharge chamber, the arrangement comprising: a power transformer connectable to a power supply; rectifying means comprising two parts connectable in sequence across the electrodes of the chamber; a short-circuiting element connected across one part of the rectifying means and having a threshold voltage at which it conducts to short-circuit said one part; and control means operable in response to conduction of the short-circuiting element to switch off said one part.
According to another aspect of the present invention there is provided a circuit arrange ment for the chemical-thermal treatment of metal work pieces under conditions of an electric glow discharge, the arrangement com prising: a work chamber; means for evacuat ing the chamber; means for cooling the cham ber; an electric supply line connected via a circuit breaker and a power transformer to a thyristor, current rectifying means, filter means, and means for measuring the voltage in the working chamber; wherein the power transformer has two secondary windings, one of which windings is connected to said current rectifying means, the other of said secondary windings being connected via a reactive ele ment to a second current rectifying means, the positive terminal of the second current rectifying means being connected to the cath ode of a diode, and the negative terminal of the second current rectifying means being connected to the anode of said diode, the positive terminal of the second current rectify ing means being connected to the negative terminal of the first current rectifying means, and the negative terminal of the second cur rent rectifying means being connected via said filtering means to the cathode of the working chamber, the anode of the working chamber being connected to a reference voltage point and being connected via the voltage measur ing means to the positive terminal of the first current rectifying means; the arrangement fur ther comprising a second transformer having a primary winding one end of which is con nected to the cathode of the working chamber and the other end of which is connected via a condenser to the anode of the working cham ber, wherein the cathode of said thyristor is connected to a branch of the primary winding of the second transformer and the anode of the thyristor is connected to the anode of the working chamber, there further being control means connected to the secondary winding of the second transformer, to the anode and the cathode of the diode, to the control electrode and the cathode of the thyristor and to a second control means, the second control means being connected to the second current rectifying means and to a third control means, the third control means being connected to control the first current rectifying means, and being connected to the anode and the cath ode of the working chamber and to the volt age measuring means.
An arrangement according to the invention can be constructed for the chemical-thermal treatment of metal work pieces under the conditions of an electric glow discharge so that the full power, supplied by the electric supply line, differs only negligably from the nominal power of the arrangement (defined by the maximum power of the glow discharge) so that the time necessary for cleaning the work pieces in the working chamber initially is decreased; so that the electric strength of the working chamber is restored quickly; and also so that excitation of a glow discharge following switching off happens quickly, hence increasing the productivity of the arrangement.
It can be seen that the transition from the regime of cleaning the cathodic surface to the regime of chemical-thermal treatment does not require additional contact connections in the power circuit in an arrangement according to the present invention, and also that the time for cleaning the cathodic surface is shortened.
For a better understanding of the present invention and to show how the same may be carried into effect reference will now be made to the accompanying drawing which shows a circuit arrangement according to the present invention.
The Figure shows a power transformer 1, the primary coil of which is connected to an electric supply line 2 by way of an electric circuit breaker 3. One of the secondary coils of the transformer 1 is connected to a first current rectifying bridge 4. A second secondary coil of transformer 1 is connected to a second current rectifying bridge 6 via a reactive element 5. Parallel to the second current rectifying bridge 6 is connected a diode 7 in such a manner that its cathode is connected to the positive terminal of bridge 6, and its anode is connected to the negative terminal of the second rectifying bridge 6. The negative terminal of the first current rectifying bridge 4 is connected to the positive terminal of the second current rectifying bridge 6.The negative terminal of the second current rectifying bridge 6 is connected to the cathode of the working chamber 9 by way of a filter coil 8.
The anode of the working chamber 9 is earthed and by way of a current metering device 10 is connected to the positive terminal of the first current rectifying bridge 4.
Parallel to the anode and cathode of the working chamber 9 are connected in series the primary coil of a second, condensing, transformer 11 and a condense 1 2. A thyristor 1 3 has its cathode connected to a branch of the primary coil of the secondtransformer 11 the anode of the phyristor 1 3 is connected to the anode of the working chamber 9.
A control circuit 1 4 for the thyristor 1 3 is connected to the secondary coil of the condensing transformer 11. Control circuit 1 4 is also connected to the anode and the cathode of the diode 7, to the control electrode and cathode of the thyristor 1 3 and to a second control circuit 1 5.
The second control circuit 1 5 is connected to the second current rectifying bridge 6 and to a third control circuit 1 6 for the first current rectifying bridge 4.
The anode and the cathode of the working chamber 9 are connected to inputs of control circuit 1 6. A third input of control circuit 1 6 is connected to the voltage measuring device 1 0. An output terminal of control circuit 1 6 is connected to the first current rectifying bridge 4. A gas-vacuum device 1 7 and a cooling device 1 8 are connected to the working chamber 9.
The operation of the circuit arrangement shown in the Figure will now be described.
The working chamber 9 is filled with metal work pieces for treatment and is hermetically closed. Circuit breaker 3 is closed to connect voltage to the circuit arrangement. The second control circuit 1 5 is operable in two modes: automatic or manual. Following a command from the circuit 1 5 the gas-vacuum device 1 7 is actuated and after a given time creates the necessary pressure in the chamber 9 to start the process of treatment. A voltage is supplied, via transformer 1, to the first current rectifying bridge 4 and the second current rectifying bridge 6, which are connected in such a way that the voltages of the bridges are summed up.By command from the second control circuit 1 5 the second current rectifying bridge 6 is switched in, and supplies a constant current to the anodecathode of the working chamber 9. Subsequently the first current rectifying bridge 4 is gradually switched in to the point of exciting an electric glow discharge. This can be done by manual regulation or by a programme contained in control circuit 1 5. As the glow discharge current increases, the voltage in the terminals of the second current rectifying bridge 6 decreases. When the value of the discharge voltage surpasses the voltage needed to short-circuit the second current rectifying bridge 6, the diode 7 starts conducting. Control circuit 14 detects this conduction.
Control circuit 14 sends a signal to circuit 1 5 which switches off the second current rectifying bridge 6. Hence at this stage the glow discharge is excited only by voltage from the first current rectifying bridge 4.
The chemical-thermal treatment of the metal work pieces under the conditions of an electric glow discharge begins with a low pressure in the working chamber 9, a high voltage between the anode and the cathode and a small discharge voltage. Under these conditions the cathodic surface and the treated work pieces are cleaned. The cleaning is very oftern accompanied by transitions of the glow discharge into an arc discharge. These transitions are detected by the secondary coil of the second transformer 11. When the voltage of the discharge is smaller than the voltage at which the diode 7 begins to conduct, or the operator has given a relevant command by way of circuit 15, the signal from the secondary coil of the transformer 11 does not switch on the thyristor 1 3 when an arc discharge appears. In such a case there is an oscillating process between the condenser 1 2 and the primary coil of the transformer 11. This proc ess runs in four stages. During the first stage, which lasts for the time needed to magnetize the magnetic conduct of the transformer 11, the voltage of the condenser 1 2 falls slightly.
During the second stage the condenser and the primary coil of the transformer 11 form an oscillating circuit which develops an oscillation with a length of half a period, the length of which is considerably shorter than the time needed to magnetize the magnetic conduct of the transformer 11. During this period the condenser 1 2 is charged again. The voltage for this charge has a considerable amplitude and runs through the channel of the arc discharge. Because of this, the channel of the arc discharge momentarily sharply decreases in section and this results in a more intensive cleaning of the surface of the treated work pieces.
During the third stage which has a length equal to the time needed to remagnetize the magnetic conduct of the transformer 11 (but in an opposite sense) the voltage of the condenser 1 2 falls slightly.
During the fourth stage which is analogous to the second stage, an oscillating process with opposite phase begins. The voltage through the arc discharge is switched off and a negative voltage is applied to the working chamber 9. This increases linearly until a new excitation of the glow discharge begins.
When the voltage of the glow discharge is bigger than the voltage of a short circuit of the second current rectifying bridge 6 and an arc-discharge occurs, the signal from the secondary coil of the saturation transformer 11 swithes in the thyristor 1 3 via control circuit 14 so long as the relevant command from circuit 1 5 is also present.In this case, when a glow discharge changes into an arc discharge the difference between the voltage of the charged to the voltage of the glow discharge existing previously commutates the condenser 12, and the voltage of the arc discharge is applied to the primary coil of the saturation transformer 11 causing the secondary coil to emit a signal to switch on the thyristor 1 3 via control circuit 1 4. After the thyristor 1 3 is switched on the condenser 1 2 is effectively connected in parallel to a part of the second transformer 11.The part of this coil which is not short-circuited by the thyristor 1 3 causes a negative voltage to be applied to the anode-cathode of the working chamber 9 which speeds up disconnection of the arc discharge voltage and leads to a more intensive restitution of its electric strength.
After the magnetic conduct of the second transformer 11 is saturated condenser 1 2 is charged again via the primary coil of transformer 11 and the thyristor 1 3. Once it is charged the condenser 1 2 is disconnected together with the thyristor 1 3. A direct voltage is thus applied to the anode and cathode of the working chamber 9 for a period of time determined by the time needed to saturate the conduct of the saturation transformer 11, this time in a reverse direction. Once the magnetic conduct is again saturated the full, negative, voltage of the condenser 1 2 is applied across the anode and cathode of the working chamber 9. This voltage increases linerarly until a glow discharge is actuated in the working chamber 9.
Hence arc discharges which tend to appear between the anode and the cathode of the working chamber 9 are stopped and the electric strength across the working chamber 9 is restored very quickly by virtue of a voltage being applied to the working chamber 9 which changes its polarity four times.
Thus, the voltage through the narrow fastly constricting channel of the arc discharge is increased for a short time to speed up the cathodic cleaning of work pieces and the cathode surface. Stopping the arc discharge is achieved automatically or manually by way of commands from control circuit 1 5.
The transition from a regime of cleaning of the treated work pieces by short duration arc discharges with a predetermined voltage density, to a regime of stabilized glow discharge with large values of discharge voltage, is achieved without additional special commands and very smoothly. The power drawn from the electric power supply line is decreased by virtue of the disconnection of the second rectifying bridge 6.
Filtering coil 8 helps to smooth the discharge voltage and also helps the first current rectifying bridge 4 during the rapidly changing processes in the working chamber 9.

Claims (5)

1. A circuit arrangement for controlling the power supply for a discharge chamber, the arrangement comprising: a power transformer connectable to a power supply; rectifying means comprising two parts connectable in sequence across the electrodes of the chambers; a short-circuiting element connected across one part of the rectifying means and having a threshold voltage at which it conducts to short-circuit said one part; and control means operable in response to conduction of the short-circuiting element to switch off said one part.
2. A circuit arrangement as claimed in claim 1, comprising a second transformer having a primary winding connected in series with a capacitor and being connectable across the electrodes of the chamber, and a secondary windings coupled to the switching electrode of a semiconduct controllable switch element via the control means, the switching path of the switching element being connected across a part of the primary winding and the capacitor to short-circuit the capacitor and said part of the primary winding when the switching element is switched on, wherein the control means is operable to switch on the switching element when the secondary winding of the second transformer senses an arc discharge in the discharge chamber.
3. A circuit arrangement as claimed in claim 1 or claim 2 wherein a reactive element is connected between the secondary winding of the first transformer and said one part of the rectifying means.
4. An arrangement for the chemical-thermal treatment of metal work pieces under conditions of an electric glow discharge, the arrangement comprising: a work chamber; means for evacuating the chamber; means for cooling the chamber; and electric supply line connected via a circuit breaker and a power transformer to a thyristor, current rectifying means, filter means, and means for measuring the voltage in the working chamber, wherein the power transformer has two secondary windings, one of which windings is connected to said current rectifying means, the other of said secondary windings being connected via a reactive element to a second current rectifying means, the positive terminal of the second current rectifying means being connected to the cathode of a diode, and the negative terminal of the second current rectifying means being connected to the anode of said diode, the positive terminal of the second current rectifying means being connected to the negative terminal of the first current rectifying means, and the negative terminal of the second current rectifying means being connected via said filtering means to the cathode of the working chamber, the anode of the working chamber being connected to a reference voltage point and being connected via the voltage measuring means to the positive terminal of the first current rectifying means, the arrangement further comprising a second transformer having a primary winding one end of which is connected to the cathode of the working chamber and the other end of which is connected via a condenser to the anode of the working chamber, wherein the cathode of said thyristor is connected to a branch of the primary winding of the second transformer, and the anode of the thyristor is connected to the anode of the working chamber, there further being control means connected to the secondary winding of the second transformer, to the anode and the cathode of the diode, to the control electrode and the cathode of the thyristor and to a second control means, the second control means being connected to the second current rectifying means and to a third control means, the third control means being connected to control the first current rectifying means, and being connected to the anode and the cathode of the working chamber and to the voltage measuring means.
5. A circuit arrangement substantially as hereinbefore described with reference to the accompanying drawing.
GB8007980A 1979-03-11 1980-03-10 Power supply for glow discharge chamber Expired GB2045553B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG7943198A BG29362A1 (en) 1979-03-11 1979-03-11 Apparatus for chemical- thermal processing of matal articles in the condition of electrical smouldering charge

Publications (2)

Publication Number Publication Date
GB2045553A true GB2045553A (en) 1980-10-29
GB2045553B GB2045553B (en) 1983-08-17

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GB8007980A Expired GB2045553B (en) 1979-03-11 1980-03-10 Power supply for glow discharge chamber

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JP (1) JPS55125275A (en)
AT (1) AT365659B (en)
BG (1) BG29362A1 (en)
CH (1) CH644398A5 (en)
CS (1) CS215904B1 (en)
DD (1) DD235802A3 (en)
DE (1) DE3007420C2 (en)
FR (1) FR2451629A1 (en)
GB (1) GB2045553B (en)
GR (1) GR68091B (en)
HU (1) HU190769B (en)
IT (1) IT1145262B (en)
NO (1) NO153320C (en)
PL (1) PL131348B1 (en)
SE (1) SE440169B (en)
SU (1) SU1198132A1 (en)
YU (1) YU41906B (en)

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0186865A2 (en) * 1984-12-29 1986-07-09 V M E I "Lenin" Device for interrupting arc discharges in a gas discharge vessel
US5281321A (en) * 1991-08-20 1994-01-25 Leybold Aktiengesellschaft Device for the suppression of arcs
DE4239218A1 (en) * 1992-11-21 1994-05-26 Leybold Ag Cathodic sputtering method - with intermittent reverse polarity of electrodes to suppress overloading of plasma with reactive products
DE4242633A1 (en) * 1992-12-17 1994-06-23 Fraunhofer Ges Forschung Process for carrying out stable low-pressure glow processes
US5427669A (en) * 1992-12-30 1995-06-27 Advanced Energy Industries, Inc. Thin film DC plasma processing system
US5576939A (en) * 1995-05-05 1996-11-19 Drummond; Geoffrey N. Enhanced thin film DC plasma power supply
US5584974A (en) * 1995-10-20 1996-12-17 Eni Arc control and switching element protection for pulsed dc cathode sputtering power supply
US5584972A (en) * 1995-02-01 1996-12-17 Sony Corporation Plasma noise and arcing suppressor apparatus and method for sputter deposition
US5645698A (en) * 1992-09-30 1997-07-08 Advanced Energy Industries, Inc. Topographically precise thin film coating system
US5682067A (en) * 1996-06-21 1997-10-28 Sierra Applied Sciences, Inc. Circuit for reversing polarity on electrodes
US5718813A (en) * 1992-12-30 1998-02-17 Advanced Energy Industries, Inc. Enhanced reactive DC sputtering system
US5882492A (en) * 1996-06-21 1999-03-16 Sierra Applied Sciences, Inc. A.C. plasma processing system
US5889391A (en) * 1997-11-07 1999-03-30 Sierra Applied Sciences, Inc. Power supply having combined regulator and pulsing circuits
US5910886A (en) * 1997-11-07 1999-06-08 Sierra Applied Sciences, Inc. Phase-shift power supply
US5948224A (en) * 1992-03-24 1999-09-07 Balzers Aktiengsellschaft Method of controlling a treatment process and vacuum treatment apparatus
US5990668A (en) * 1997-11-07 1999-11-23 Sierra Applied Sciences, Inc. A.C. power supply having combined regulator and pulsing circuits
US5993613A (en) * 1997-11-07 1999-11-30 Sierra Applied Sciences, Inc. Method and apparatus for periodic polarity reversal during an active state
US6011704A (en) * 1997-11-07 2000-01-04 Sierra Applied Sciences, Inc. Auto-ranging power supply
US6063245A (en) * 1996-12-12 2000-05-16 International Business Machines Corporation Magnetron sputtering method and apparatus utilizing a pulsed energy pattern
US6217717B1 (en) * 1992-12-30 2001-04-17 Advanced Energy Industries, Inc. Periodically clearing thin film plasma processing system
US6368477B1 (en) 1995-04-07 2002-04-09 Advanced Energy Industries, Inc. Adjustable energy quantum thin film plasma processing system

Families Citing this family (3)

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DE3514690A1 (en) * 1985-04-24 1986-10-30 Aeg-Elotherm Gmbh, 5630 Remscheid DC voltage source for installations for surface treatment of workpieces, especially for an ionitriding curing installation
DE4127505C2 (en) * 1991-08-20 2003-05-08 Unaxis Deutschland Holding Device for suppressing arcs in gas discharge devices
RU2048601C1 (en) * 1993-12-20 1995-11-20 Рыжов Николай Михайлович Method and apparatus to diagnose process of steels and alloys chemical thermal treatment in glow discharge

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DE1068972B (en) * 1959-11-12 Dortmund-Hörder Hüttenunion Aktiengesellschaft, Dortmund Device for operating high-current glow discharges in discharge vessels, in particular for treating bodies introduced into the discharge vessel
NL254958A (en) * 1959-08-17
CH561285A5 (en) * 1973-02-19 1975-04-30 Berghaus Bernhard Elektrophysi
FR2297927A1 (en) * 1975-01-17 1976-08-13 Anvar Thermochemical treatment of metal with ion bombardment - using a sealed discharge chamber, an electrode support and an arc detecting generator
FR2423914A1 (en) * 1978-04-20 1979-11-16 Aizenshtein Anatoly Pulsed power supply system - is for discharge equipment for treating workpieces and prevents glow discharge passing over into damaging arc discharge

Cited By (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0186865A2 (en) * 1984-12-29 1986-07-09 V M E I "Lenin" Device for interrupting arc discharges in a gas discharge vessel
EP0186865A3 (en) * 1984-12-29 1988-05-18 V M E I "Lenin" Device for interrupting arc discharges in a gas discharge vessel
US5281321A (en) * 1991-08-20 1994-01-25 Leybold Aktiengesellschaft Device for the suppression of arcs
US6878248B2 (en) 1992-03-24 2005-04-12 Hans Signer Method of manufacturing an object in a vacuum recipient
US5948224A (en) * 1992-03-24 1999-09-07 Balzers Aktiengsellschaft Method of controlling a treatment process and vacuum treatment apparatus
US6120656A (en) * 1992-09-30 2000-09-19 Advanced Energy Industries, Inc. Topographically precise thin film coating system
US5645698A (en) * 1992-09-30 1997-07-08 Advanced Energy Industries, Inc. Topographically precise thin film coating system
DE4239218A1 (en) * 1992-11-21 1994-05-26 Leybold Ag Cathodic sputtering method - with intermittent reverse polarity of electrodes to suppress overloading of plasma with reactive products
DE4239218C2 (en) * 1992-11-21 2000-08-10 Leybold Ag Arrangement for preventing flashovers in a plasma process room
DE4242633A1 (en) * 1992-12-17 1994-06-23 Fraunhofer Ges Forschung Process for carrying out stable low-pressure glow processes
US6217717B1 (en) * 1992-12-30 2001-04-17 Advanced Energy Industries, Inc. Periodically clearing thin film plasma processing system
US6521099B1 (en) 1992-12-30 2003-02-18 Advanced Energy Industries, Inc. Periodically clearing thin film plasma processing system
US5718813A (en) * 1992-12-30 1998-02-17 Advanced Energy Industries, Inc. Enhanced reactive DC sputtering system
US5427669A (en) * 1992-12-30 1995-06-27 Advanced Energy Industries, Inc. Thin film DC plasma processing system
EP0692138B1 (en) * 1993-04-02 2004-01-21 Advanced Energy Industries, Inc. Reactive dc sputtering system
US6001224A (en) * 1993-04-02 1999-12-14 Advanced Energy Industries, Inc. Enhanced reactive DC sputtering system
US5584972A (en) * 1995-02-01 1996-12-17 Sony Corporation Plasma noise and arcing suppressor apparatus and method for sputter deposition
US6368477B1 (en) 1995-04-07 2002-04-09 Advanced Energy Industries, Inc. Adjustable energy quantum thin film plasma processing system
US5576939A (en) * 1995-05-05 1996-11-19 Drummond; Geoffrey N. Enhanced thin film DC plasma power supply
US5584974A (en) * 1995-10-20 1996-12-17 Eni Arc control and switching element protection for pulsed dc cathode sputtering power supply
US5882492A (en) * 1996-06-21 1999-03-16 Sierra Applied Sciences, Inc. A.C. plasma processing system
US5815388A (en) * 1996-06-21 1998-09-29 Sierra Applied Sciences, Inc. Polarity reversing circuit having energy compensation
US5682067A (en) * 1996-06-21 1997-10-28 Sierra Applied Sciences, Inc. Circuit for reversing polarity on electrodes
US6063245A (en) * 1996-12-12 2000-05-16 International Business Machines Corporation Magnetron sputtering method and apparatus utilizing a pulsed energy pattern
US6011704A (en) * 1997-11-07 2000-01-04 Sierra Applied Sciences, Inc. Auto-ranging power supply
US5993613A (en) * 1997-11-07 1999-11-30 Sierra Applied Sciences, Inc. Method and apparatus for periodic polarity reversal during an active state
US5990668A (en) * 1997-11-07 1999-11-23 Sierra Applied Sciences, Inc. A.C. power supply having combined regulator and pulsing circuits
US5910886A (en) * 1997-11-07 1999-06-08 Sierra Applied Sciences, Inc. Phase-shift power supply
US5889391A (en) * 1997-11-07 1999-03-30 Sierra Applied Sciences, Inc. Power supply having combined regulator and pulsing circuits

Also Published As

Publication number Publication date
IT8047884A0 (en) 1980-02-13
PL222156A1 (en) 1980-11-03
DE3007420A1 (en) 1980-09-25
SU1198132A1 (en) 1985-12-15
DE3007420C2 (en) 1984-08-30
CH644398A5 (en) 1984-07-31
JPS55125275A (en) 1980-09-26
GR68091B (en) 1981-10-30
PL131348B1 (en) 1984-10-31
JPS6253593B2 (en) 1987-11-11
NO153320C (en) 1986-02-19
FR2451629B1 (en) 1984-12-07
ATA62880A (en) 1981-06-15
NO153320B (en) 1985-11-11
BG29362A1 (en) 1980-11-14
SE8000931L (en) 1980-09-12
HU190769B (en) 1986-11-28
FR2451629A1 (en) 1980-10-10
DD235802A3 (en) 1986-05-21
YU29880A (en) 1983-06-30
SE440169B (en) 1985-07-15
AT365659B (en) 1982-02-10
IT1145262B (en) 1986-11-05
NO800613L (en) 1980-09-12
GB2045553B (en) 1983-08-17
CS215904B1 (en) 1982-10-29
YU41906B (en) 1988-02-29

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