GB0805837D0 - Chemical Vapour Deposition Process - Google Patents
Chemical Vapour Deposition ProcessInfo
- Publication number
- GB0805837D0 GB0805837D0 GBGB0805837.2A GB0805837A GB0805837D0 GB 0805837 D0 GB0805837 D0 GB 0805837D0 GB 0805837 A GB0805837 A GB 0805837A GB 0805837 D0 GB0805837 D0 GB 0805837D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- deposition process
- vapour deposition
- chemical vapour
- chemical
- vapour
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/164—Preparation involving continuous processes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
- D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
- D01F9/133—Apparatus therefor
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M11/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising
- D06M11/73—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with carbon or compounds thereof
- D06M11/74—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with carbon or compounds thereof with carbon or graphite; with carbides; with graphitic acids or their salts
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M2101/00—Chemical constitution of the fibres, threads, yarns, fabrics or fibrous goods made from such materials, to be treated
- D06M2101/40—Fibres of carbon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Nanotechnology (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Textile Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Thermal Sciences (AREA)
- Composite Materials (AREA)
- Carbon And Carbon Compounds (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0805837.2A GB0805837D0 (en) | 2008-03-31 | 2008-03-31 | Chemical Vapour Deposition Process |
GB0905047A GB2458776B (en) | 2008-03-31 | 2009-03-25 | Chemical vapour deposition process |
PCT/GB2009/000787 WO2009122139A1 (en) | 2008-03-31 | 2009-03-25 | Chemical vapour deposition process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0805837.2A GB0805837D0 (en) | 2008-03-31 | 2008-03-31 | Chemical Vapour Deposition Process |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0805837D0 true GB0805837D0 (en) | 2008-06-04 |
Family
ID=39522477
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB0805837.2A Ceased GB0805837D0 (en) | 2008-03-31 | 2008-03-31 | Chemical Vapour Deposition Process |
GB0905047A Expired - Fee Related GB2458776B (en) | 2008-03-31 | 2009-03-25 | Chemical vapour deposition process |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0905047A Expired - Fee Related GB2458776B (en) | 2008-03-31 | 2009-03-25 | Chemical vapour deposition process |
Country Status (2)
Country | Link |
---|---|
GB (2) | GB0805837D0 (en) |
WO (1) | WO2009122139A1 (en) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8951631B2 (en) | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused metal fiber materials and process therefor |
US9005755B2 (en) | 2007-01-03 | 2015-04-14 | Applied Nanostructured Solutions, Llc | CNS-infused carbon nanomaterials and process therefor |
US8951632B2 (en) | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused carbon fiber materials and process therefor |
CN102171795A (en) | 2008-10-03 | 2011-08-31 | 维易科加工设备股份有限公司 | Vapor phase epitaxy system |
JP5753102B2 (en) * | 2009-02-27 | 2015-07-22 | アプライド ナノストラクチャード ソリューションズ リミテッド ライアビリティー カンパニーApplied Nanostructuredsolutions, Llc | Low temperature CNT growth using gas preheating method |
US20100224129A1 (en) | 2009-03-03 | 2010-09-09 | Lockheed Martin Corporation | System and method for surface treatment and barrier coating of fibers for in situ cnt growth |
KR101696212B1 (en) * | 2009-04-10 | 2017-01-13 | 어플라이드 나노스트럭처드 솔루션스, 엘엘씨. | Apparatus and method for the production of carbon nanotubes on a continuously moving substrate |
EP2419553A4 (en) | 2009-04-17 | 2014-03-12 | Seerstone Llc | Method for producing solid carbon by reducing carbon oxides |
KR20120036890A (en) | 2009-08-03 | 2012-04-18 | 어플라이드 나노스트럭처드 솔루션스, 엘엘씨. | Incorporation of nanoparticles in composite fibers |
EP2558623A4 (en) * | 2010-01-15 | 2014-03-05 | Applied Nanostructured Sols | Apparatus and method for the production of carbon nanotubes on a continuously moving substrate |
US20110195207A1 (en) * | 2010-02-08 | 2011-08-11 | Sungkyunkwan University Foundation For Corporate Collaboration | Graphene roll-to-roll coating apparatus and graphene roll-to-roll coating method using the same |
CN102933739A (en) * | 2010-02-26 | 2013-02-13 | 可持续能源联盟有限责任公司 | Hot wire chemical vapor deposition (HWCVD) with carbide filaments |
US20120058352A1 (en) * | 2010-09-02 | 2012-03-08 | Applied Nanostructured Solutions, Llc | Metal substrates having carbon nanotubes grown thereon and methods for production thereof |
CA2808242A1 (en) * | 2010-09-14 | 2012-03-22 | Applied Nanostructured Solutions, Llc | Glass substrates having carbon nanotubes grown thereon and methods for production thereof |
US8815341B2 (en) * | 2010-09-22 | 2014-08-26 | Applied Nanostructured Solutions, Llc | Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof |
KR101168259B1 (en) | 2012-03-05 | 2012-07-30 | 한국기계연구원 | Apparatus for composing graphene continuously using roll-to-roll process |
MX354526B (en) | 2012-04-16 | 2018-03-07 | Seerstone Llc | Methods and systems for capturing and sequestering carbon and for reducing the mass of carbon oxides in a waste gas stream. |
CN104302575B (en) | 2012-04-16 | 2017-03-22 | 赛尔斯通股份有限公司 | Method for producing solid carbon by reducing carbon dioxide |
MX354377B (en) | 2012-04-16 | 2018-02-28 | Seerstone Llc | Methods for treating an offgas containing carbon oxides. |
NO2749379T3 (en) | 2012-04-16 | 2018-07-28 | ||
MX2014012548A (en) | 2012-04-16 | 2015-04-10 | Seerstone Llc | Methods and structures for reducing carbon oxides with non-ferrous catalysts. |
US9896341B2 (en) | 2012-04-23 | 2018-02-20 | Seerstone Llc | Methods of forming carbon nanotubes having a bimodal size distribution |
US10815124B2 (en) | 2012-07-12 | 2020-10-27 | Seerstone Llc | Solid carbon products comprising carbon nanotubes and methods of forming same |
CN104619637B (en) | 2012-07-12 | 2017-10-03 | 赛尔斯通股份有限公司 | Solid carbon product comprising CNT with and forming method thereof |
US9598286B2 (en) | 2012-07-13 | 2017-03-21 | Seerstone Llc | Methods and systems for forming ammonia and solid carbon products |
US9779845B2 (en) | 2012-07-18 | 2017-10-03 | Seerstone Llc | Primary voltaic sources including nanofiber Schottky barrier arrays and methods of forming same |
CN103103493B (en) * | 2012-11-07 | 2015-05-06 | 山东鑫汇铜材有限公司 | Production device of graphene copper wire |
DE102012111484A1 (en) * | 2012-11-27 | 2014-05-28 | Aixtron Se | Apparatus and method for processing strip-shaped substrates |
CN104936893A (en) | 2012-11-29 | 2015-09-23 | 赛尔斯通股份有限公司 | Reactors and methods for producing solid carbon materials |
US9586823B2 (en) | 2013-03-15 | 2017-03-07 | Seerstone Llc | Systems for producing solid carbon by reducing carbon oxides |
EP3114077A4 (en) | 2013-03-15 | 2017-12-27 | Seerstone LLC | Methods of producing hydrogen and solid carbon |
EP3129135A4 (en) | 2013-03-15 | 2017-10-25 | Seerstone LLC | Reactors, systems, and methods for forming solid products |
US10115844B2 (en) | 2013-03-15 | 2018-10-30 | Seerstone Llc | Electrodes comprising nanostructured carbon |
WO2014151144A1 (en) | 2013-03-15 | 2014-09-25 | Seerstone Llc | Carbon oxide reduction with intermetallic and carbide catalysts |
CN104641028B (en) * | 2013-06-18 | 2016-08-31 | Lg化学株式会社 | The device preparing carbon nano-tube fibre and the method utilizing described device to prepare carbon nano-tube fibre |
DE102014104011A1 (en) | 2014-03-24 | 2015-09-24 | Aixtron Se | Device for separating nanotubes |
DE102014104009A1 (en) | 2014-03-24 | 2015-09-24 | Aixtron Se | On its two wegweisenden broadsides each substrate carrying substrate carrier |
GB201412656D0 (en) | 2014-07-16 | 2014-08-27 | Imp Innovations Ltd | Process |
WO2017055618A1 (en) * | 2015-10-02 | 2017-04-06 | O'flynn Donal Paul | Method of producing graphene structures |
US11752459B2 (en) | 2016-07-28 | 2023-09-12 | Seerstone Llc | Solid carbon products comprising compressed carbon nanotubes in a container and methods of forming same |
TWI682047B (en) * | 2018-10-02 | 2020-01-11 | 大永真空科技股份有限公司 | Cavity suitable for yarn coating |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1093164B (en) * | 1953-10-02 | 1960-11-17 | Roederstein Kondensatoren | Device for gas plating with metal carbonyl compounds |
JPH0835069A (en) * | 1994-07-22 | 1996-02-06 | Kao Corp | Film forming device |
US20060118242A1 (en) * | 2001-02-12 | 2006-06-08 | Anthony Herbert | Atmospheric pressure plasma system |
GB2385864A (en) * | 2002-02-28 | 2003-09-03 | Qinetiq Ltd | Production of nanocarbons |
US20060083927A1 (en) * | 2004-10-15 | 2006-04-20 | Zyvex Corporation | Thermal interface incorporating nanotubes |
JP4993642B2 (en) * | 2005-03-10 | 2012-08-08 | マテリアルズ アンド エレクトロケミカル リサーチ (エムイーアール) コーポレイション | Thin film manufacturing method and apparatus |
-
2008
- 2008-03-31 GB GBGB0805837.2A patent/GB0805837D0/en not_active Ceased
-
2009
- 2009-03-25 GB GB0905047A patent/GB2458776B/en not_active Expired - Fee Related
- 2009-03-25 WO PCT/GB2009/000787 patent/WO2009122139A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
GB2458776A (en) | 2009-10-07 |
WO2009122139A1 (en) | 2009-10-08 |
GB0905047D0 (en) | 2009-05-06 |
GB2458776B (en) | 2010-06-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |