CN203457064U - Plasma high-frequency high-voltage power supply - Google Patents
Plasma high-frequency high-voltage power supply Download PDFInfo
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- CN203457064U CN203457064U CN201320558735.7U CN201320558735U CN203457064U CN 203457064 U CN203457064 U CN 203457064U CN 201320558735 U CN201320558735 U CN 201320558735U CN 203457064 U CN203457064 U CN 203457064U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
Abstract
The utility model discloses a plasma high-frequency high-voltage power supply with a low flashover number and high power efficiency. The power supply comprises an EMC management unit, a rectification filtering/slow start unit, a BUCK conversion unit, a full-bridge high-frequency conversion unit, a high-frequency high-voltage transformer and a high-voltage rectification filtering unit which are sequentially connected in series. The power supply further comprises an auxiliary power supply, a DSP control and parameter display unit, a current/voltage sensing unit and an IGBT drive unit. A 380V alternating-current power supply from a three-phase alternating-current power grid passes through the EMC management unit to have high-frequency interference signals from the power grid and high-order harmonic waves generated during the operation of the power supply to be filtered out, passes through the rectification filtering/slow start unit to form a pulse direct-current power supply, passes through the BUCK conversion unit to achieve synchronous freewheeling, passes through the full-bridge high-frequency conversion unit to be subjected to fixed-frequency resonant zero-voltage zero-current full-bridge conversion, passes through the high-frequency high-voltage transformer to be boosted, and finally passes through the high-voltage rectification filtering unit for filtering and thereafter generating a high-voltage output. The plasma high-frequency high-voltage power supply provided by the utility model is suitable for plasma generators.
Description
Technical field
The utility model belongs to power technique fields, particularly a kind of high efficiency plasma high-frequency and high-voltage power supply.
Background technology
Plasma high voltage source is the important component part of plasma generator, and the performance of plasma high voltage source affects the performance of plasma generator to a great extent.
Existing plasma high voltage source is for adopting thyristor controlled frequency high voltage power supply, and its output performance is bad, is mainly reflected in actual applications high voltage source flashover number high, and power-efficient is low.
Summary of the invention
The purpose of this utility model is to provide a kind of plasma high-frequency and high-voltage power supply, and its flashover number is low, and power-efficient is high.
The technical solution that realizes the utility model object is: a kind of plasma high-frequency and high-voltage power supply, it comprises EMC administrative unit, rectifying and wave-filtering/slow start unit, BUCK converter unit, full-bridge high-frequency converter unit, high frequency high voltage transformer and high-voltage rectifying filter unit, the input of described EMC administrative unit is as the three-phase alternating-current supply input of described plasma high-frequency and high-voltage power supply, the first output of EMC administrative unit is connected with the first input end of rectifying and wave-filtering/slow start unit, the first input end of BUCK converter unit is connected with the output of rectifying and wave-filtering/slow start unit, the output of BUCK converter unit is connected with the first input end of full-bridge high-frequency converter unit, the output of the input termination full-bridge high-frequency converter unit of high frequency high voltage transformer, the input of the output termination high-voltage rectifying filter unit of high frequency high voltage transformer, the first output of described high-voltage rectifying filter unit is as the high-voltage output end of described plasma high-frequency and high-voltage power supply,
Also comprise accessory power supply, DSP control and parameter display unit, current/voltage sensing unit and IGBT driver element, the second output of the input termination EMC administrative unit of described accessory power supply, the output termination DSP control of described accessory power supply and the first input end of parameter display unit, the output of the second input termination current/voltage sensing unit of described DSP control and parameter display unit, the input of described current/voltage sensing unit is connected with the second output of described high-voltage rectifying filter unit; Described DSP controls and the first output of parameter display unit is connected with the second input of rectifying and wave-filtering/slow start unit, described DSP controls and the second output of parameter display unit is connected with the input of IGBT driver element, the second input of the first output termination BUCK converter unit of described IGBT driver element, the second input of the second output termination full-bridge high-frequency converter unit of described IGBT driver element;
From the 380V AC power of three-phase alternating current electrical network through EMC administrative unit, the high order harmonic component that filtering produces during from the high-frequency interferencing signal of electrical network and this power work, through rectifying and wave-filtering/slow start unit, form Voltage pulsating direct-current supply again, through BUCK converter unit, realize synchronous freewheeling again, through full-bridge high-frequency converter unit, realize the conversion of the fixed full-bridge of resonant mode Zero-voltage zero-current frequently again, through high frequency high voltage transformer, boost again, finally by exporting after high-voltage rectifying filter unit rectifying and wave-filtering;
DSP controls and parameter display unit is powered by accessory power supply, according to the signal of current/voltage sensing unit, by IGBT driver element, BUCK converter unit and full-bridge high-frequency converter unit are carried out to sequencing control, DSP controls and parameter display unit also starts control to rectification filtering unit.
The utility model compared with prior art, its remarkable advantage:
1, power-efficient is high: owing to adopting fixed resonant mode Zero-voltage zero-current full-bridge converter and synchronous rectification frequently, reduced switching loss, flashover number is low, has effectively improved transducer effciency;
2, power supply reliability is good: introduce DSP as kernel control chip, simplify power management, improved high voltage source reliability.
Below in conjunction with the drawings and specific embodiments, the utility model is further described.
Accompanying drawing explanation
Fig. 1 is the structured flowchart of the utility model plasma high-frequency and high-voltage power supply.
Fig. 2 is the circuit diagram of EMC administrative unit in Fig. 1.
Fig. 3 is the circuit diagram of rectifying and wave-filtering in Fig. 1/slow start unit.
Fig. 4 is the circuit diagram of BUCK converter unit and full-bridge high-frequency converter unit in Fig. 1;
Fig. 5 is the circuit diagram of Fig. 1 medium-high frequency high-tension transformer, rectification filtering unit and voltage/current sensing unit.
In figure: 1EMC administrative unit, 2 rectifying and wave-filterings/slow start unit, 3BUCK converter unit, 4 full-bridge high-frequency converter units, 5 high frequency high voltage transformers, 6 high-voltage rectifying filter units, 7 current/voltage sensing units, 8DSP controls and parameter display unit, 9IGBT driver element, 10 accessory power supplys.
Embodiment
As shown in Figure 1, the utility model plasma high-frequency and high-voltage power supply, the EMC administrative unit 1, rectifying and wave-filtering/slow start unit 2, BUCK converter unit 3, full-bridge high-frequency converter unit 4, high frequency high voltage transformer 5 and the high-voltage rectifying filter unit 6 that comprise series connection successively, the input of described EMC administrative unit 1 is as the three-phase alternating-current supply input of described plasma high-frequency and high-voltage power supply, and the output of described high-voltage rectifying filter unit 6 is as the high-voltage output end of described plasma high-frequency and high-voltage power supply;
The first output of EMC administrative unit 1 is connected with the first input end of rectifying and wave-filtering/slow start unit 2, the first input end of BUCK converter unit 3 is connected with the output of rectifying and wave-filtering/slow start unit 2, the output of BUCK converter unit 3 is connected with the first input end of full-bridge high-frequency converter unit 4, the output of the input termination full-bridge high-frequency converter unit 4 of high frequency high voltage transformer 5, the input of the output termination high-voltage rectifying filter unit 6 of high frequency high voltage transformer 5;
The utility model plasma high-frequency and high-voltage power supply also comprises accessory power supply 10, DSP controls and parameter display unit 8, current/voltage sensing unit 7 and IGBT driver element 9, the second output of the input termination EMC administrative unit 1 of described accessory power supply 10, the output termination DSP control of described accessory power supply 10 and the first input end of parameter display unit 8, the output of the second input termination current/voltage sensing unit 7 of described DSP control and parameter display unit 8, the input of described current/voltage sensing unit 7 is connected with the second output of described high-voltage rectifying filter unit 6,
Described DSP controls and 8 first outputs of parameter display unit are connected with the second input of rectifying and wave-filtering/slow start unit 2, described DSP controls and the second output J4 of parameter display unit 8 is connected with the input J1 of IGBT driver element 9, the first output J2 of described IGBT driver element 9 connects the second input of BUCK converter unit 3, and the second output J3 of described IGBT driver element 9 connects the second input of full-bridge high-frequency converter unit 4;
From the 380V AC power of three-phase alternating current electrical network through EMC administrative unit 1, the high order harmonic component that filtering produces during from the high-frequency interferencing signal of electrical network and this power work, through rectifying and wave-filtering/slow start unit 2, form Voltage pulsating direct-current supply again, through BUCK converter unit 3, realize synchronous freewheeling again, through full-bridge high-frequency converter unit 4, realize the conversion of the fixed full-bridge of resonant mode Zero-voltage zero-current frequently again, through high frequency high voltage transformer 5, boost again, finally by exporting after high-voltage rectifying filter unit 6 rectifying and wave-filterings;
DSP controls and parameter display unit 8 is powered by accessory power supply 10, according to the voltage and current feedback signal of current/voltage sensing unit 7, by 9 pairs of BUCK converter units 3 of IGBT driver element and full-bridge high-frequency converter unit 4, carry out sequencing control, DSP controls and parameter display unit 8 is also carried out the slow control that starts to rectification filtering unit 2.
Because the utility model adopts fixed resonant mode Zero-voltage zero-current full-bridge converter and synchronous rectification frequently, reduced switching loss, reduce flashover number, thereby effectively improved transducer effciency, power-efficient is improved.
As shown in Figure 2, described EMC administrative unit 1 comprises and the first inductance L 1 of power supply three-phase input series connection, the second inductance L 2 with power supply three-phase output series connection, the first capacitor C 1, the second capacitor C 2, the 3rd capacitor C 3 being connected between two with triple line, and is serially connected in the 4th capacitor C 4, the 5th capacitor C 5, the 6th capacitor C 6 between each phase line and earth polar;
By inductance L 1, L2, capacitor C 1 to capacitor C 6, form LCL filter, on the one hand the high-frequency interferencing signal from electrical network is carried out to filtering processing, to eliminate the harmful effect of grid disturbance to power supply, the high order harmonic component producing during simultaneously to this power work is carried out filtering processing, when eliminating power work to the issuable pollution of electrical network.
As shown in Figure 3, described rectifying and wave-filtering/slow start unit 2 comprises three phase rectifier module VC1, slow starting resistance R4, controllable silicon V1, inductance L 3, capacitor C 7, after described slow starting resistance R4 is in parallel with controllable silicon V1, the cathode output end of three phase rectifier module VC1 described in one termination, another termination inductance L 3 inputs, shunt capacitance C7 between the cathode output end of three phase rectifier module VC1 and the output of inductance L 3;
Described three phase rectifier module VC1 carries out rectification to AC power and forms Voltage pulsating direct-current supply, by utilizing controllable silicon V1 by resistance R 4 short circuits after time delay, inductance L 3, capacitor C 7 form Γ mode filter, utilize the energy storage of inductance L 3 and afterflow to complete three-phase Passive Power factor correction to improve power.
For improving the power factor (PF) of this power supply, the Γ mode filter that adopts L3, C7 to form, rather than conventional C mode filter, process by the filtering of simple Γ type, and electrical source power factor can be brought up to more than 95%.
The capacitor group that described capacitor C 7 forms by connection in series-parallel for the electrolytic capacitor of plural a plurality of 400V, 1000 μ F.
Because C7 capacity is larger, in circuit, adopt simple resistance current-limiting mode, the impact to electrical network while avoiding starting shooting.By utilizing controllable silicon V1 by current-limiting resistance short circuit after time delay.
As shown in Figure 4, described BUCK converter unit 3 consists of two high-power half-bridge IGBT module V2, V3 and afterflow inductance L 4, L5 with identical electric parameter, high-power half-bridge IGBT module V2, V3 adopt pulse time sharing mode, utilize the lower brachium pontis of high-power half-bridge IGBT module to realize synchronous freewheeling.
In Fig. 4, described full-bridge (FULL-BRIDGE) high frequency conversion unit 4 is formed and is determined frequency resonant mode Zero-voltage zero-current full-bridge converter by two high-power half-bridge IGBT module V4, V5 with identical electric parameter and auxiliary resonance inductance L 6, auxiliary resonance capacitor C 13, C14.
The control of high-power half-bridge IGBT module V2, V3, V4, V5 is realized by dsp controller, from the IGBT module gate drive signal of DSP control unit, after IGBT driver element amplifies, drives respectively corresponding IGBT module.
High-power IGBT module V2, V3, V4, V5 are arranged on a water-cooling plate, and the hear rate producing during module work conducts to rapidly water-cooling plate, and by circulating water flow, heat is taken away.
As shown in Figure 5, described high frequency high voltage transformer 5, high-voltage rectifying filter unit 6 and current/voltage sensing unit 7 are integrated in a fuel tank, and high pressure is drawn by a pluggable high-tension cable.
5 levels of described high frequency high voltage transformer adopt many windings planarized structure.
High-frequency impulse from full-bridge high-frequency converter unit 4 boosts by high frequency high voltage transformer 5.Secondary each winding is connected to respectively corresponding rectifier diode by electric connecting mode shown in Fig. 5, and capacitor is selected a plurality of high frequency capacitance series connection, to meet 50kV operating voltage.Capacitance after series connection is generally between 1500PF-2000PF.Resistance R 1 is high-power current-limiting resistance, and this power supply R1 value is 1k Ω, by the maximum current limit of high tension loop, is 50A.In normal working conditions, when load current is 0.6A, the normality power consumption of R1 is 360W.But when the transient state of R1 is born power and should be able to be born load direct short-circuit, institute's maximum power and voltage when electric power output voltage all puts on this resistance.
The resitstance voltage divider of the 5000:1 that the output voltage of power supply forms through resistance R 2, R3, R4, R5 forms high-pressure sampling voltage on R5, feeds back to DSP and controls and parameter display unit 8.When-50kV voltage, sampling voltage is-10V.The sample resistance R6 that load current is 5 Ω by resistance samples, and when load current 1A, R6 both end voltage is about 5V.Current sampling signal feeds back to DSP control board.Because arcing may occur plasma generator, even occur that corona wire disconnection causes instantaneous short circuit, thereby resistance R 6 adopts many resistance in parallel, 18V piezo-resistance in parallel and shunt capacitance at resistance two ends, thereby prevent when flashover phenomenon and load short circuits appear in high voltage source the overvoltage that current sampling resistor two ends may occur.
Described current/voltage sensing unit 7 is the low side of the high voltage source output at the high-voltage rectifying filter unit 6 current transformer TA1 that connects, when there is sparking in high voltage source, to DSP control and parameter display unit 8, provide current pulse signal fast, in fast shut-off BUCK conversion and full-bridge high-frequency translation circuit, the grid of IGBT drives pwm signal.
DSP controls and parameter display unit 8, TMS320LF2407 in the TMS320F series DSP chip of employing TI company is as kernel control chip, according to high pressure feedback signal, direct current sampled signal, pass through software mode, regulate in real time the grid of IGBT module V2, V3 in BUCK converter unit to drive pwm signal, realize the voltage stabilizing of High voltage output and control.According to pulsed current signal, finely tune in real time the High voltage output amplitude of plasma high-frequency and high-voltage power supply, realize the flashover numerical control system of plasma generator.Certainly according to the development of chip technology, the also dsp chip of available other models such as TMS320F2812, TMS320F28335 etc.
Above are only a kind of preferred embodiment of the present utility model, be not intended to limit protection range of the present utility model.All within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection range of the present utility model.
Claims (10)
1. a plasma high-frequency and high-voltage power supply, is characterized in that:
Comprise EMC administrative unit (1), rectifying and wave-filtering/slow start unit (2), BUCK converter unit (3), full-bridge high-frequency converter unit (4), high frequency high voltage transformer (5) and high-voltage rectifying filter unit (6), the input of described EMC administrative unit (1) is as the three-phase alternating-current supply input of described plasma high-frequency and high-voltage power supply, the first output of EMC administrative unit (1) is connected with the first input end of rectifying and wave-filtering/slow start unit (2), the first input end of BUCK converter unit (3) is connected with the output of rectifying and wave-filtering/slow start unit (2), the output of BUCK converter unit (3) is connected with the first input end of full-bridge high-frequency converter unit (4), the output of the input termination full-bridge high-frequency converter unit (4) of high frequency high voltage transformer (5), the input of the output termination high-voltage rectifying filter unit (6) of high frequency high voltage transformer (5), the first output of described high-voltage rectifying filter unit (6) is as the high-voltage output end of described plasma high-frequency and high-voltage power supply,
Also comprise accessory power supply (10), DSP controls and parameter display unit (8), current/voltage sensing unit (7) and IGBT driver element (9), the second output of the input termination EMC administrative unit (1) of described accessory power supply (10), the output termination DSP control of described accessory power supply (10) and the first input end of parameter display unit (8), the output of the second input termination current/voltage sensing unit (7) of described DSP control and parameter display unit (8), the input of described current/voltage sensing unit (7) is connected with the second output of described high-voltage rectifying filter unit (6),
Described DSP controls and the first output of parameter display unit (8) is connected with the second input of rectifying and wave-filtering/slow start unit (2), described DSP controls and the second output of parameter display unit (8) is connected with the input of IGBT driver element (9), the second input of the first output termination BUCK converter unit (3) of described IGBT driver element (9), the second input of the second output termination full-bridge high-frequency converter unit (4) of described IGBT driver element (9);
From the 380V AC power of three-phase alternating current electrical network through EMC administrative unit (1), the high order harmonic component that filtering produces during from the high-frequency interferencing signal of electrical network and this power work, through rectifying and wave-filtering/slow start unit (2), form Voltage pulsating direct-current supply again, through BUCK converter unit (3), realize synchronous freewheeling again, through full-bridge high-frequency converter unit (4), realize the conversion of the fixed full-bridge of resonant mode Zero-voltage zero-current frequently again, through high frequency high voltage transformer (5), boost again, finally by exporting after high-voltage rectifying filter unit (6) rectifying and wave-filtering;
DSP controls and parameter display unit (8) is powered by accessory power supply (10), according to the signal of current/voltage sensing unit (7), by IGBT driver element (9), BUCK converter unit (3) and full-bridge high-frequency converter unit (4) are carried out to sequencing control, DSP controls and parameter display unit (8) also starts control to rectification filtering unit (2).
2. plasma high-frequency and high-voltage power supply according to claim 1, it is characterized in that: described EMC administrative unit (1) comprises and the first inductance L 1 of power supply three-phase input series connection, the second inductance L 2 with power supply three-phase output series connection, the first capacitor C 1, the second capacitor C 2, the 3rd capacitor C 3 being connected between two with triple line, and is serially connected in the 4th capacitor C 4, the 5th capacitor C 5, the 6th capacitor C 6 between each phase line and earth polar;
By inductance L 1, L2, capacitor C 1 to capacitor C 6, form LCL filter, on the one hand the high-frequency interferencing signal from electrical network is carried out to filtering processing, to eliminate the harmful effect of grid disturbance to power supply, the high order harmonic component producing during simultaneously to this power work is carried out filtering processing, when eliminating power work to the issuable pollution of electrical network.
3. plasma high-frequency and high-voltage power supply according to claim 1, it is characterized in that: described rectifying and wave-filtering/slow start unit (2) comprises three phase rectifier module VC1, slow starting resistance R4, controllable silicon V1, inductance L 3, capacitor C 7, after described slow starting resistance R4 is in parallel with controllable silicon V1, the cathode output end of three phase rectifier module VC1 described in one termination, another termination inductance L 3 inputs, shunt capacitance C7 between the cathode output end of three phase rectifier module VC1 and the output of inductance L 3;
Described three phase rectifier module VC1 carries out rectification to AC power and forms Voltage pulsating direct-current supply, by utilizing controllable silicon V1 by resistance R 4 short circuits after time delay, inductance L 3, capacitor C 7 form Γ mode filter, utilize the energy storage of inductance L 3 and afterflow to complete three-phase Passive Power factor correction to improve power.
4. plasma high-frequency and high-voltage power supply according to claim 3, is characterized in that: described capacitor C 7 is the capacitor group that the electrolytic capacitor of two above 400V, 1000 μ F forms by connection in series-parallel.
5. plasma high-frequency and high-voltage power supply according to claim 1, it is characterized in that: described BUCK converter unit (3) consists of two high-power half-bridge IGBT module V2, V3 and afterflow inductance L 4, L5 with identical electric parameter, high-power half-bridge IGBT module V2, V3 adopt time sharing mode, utilize the lower brachium pontis of module to realize synchronous freewheeling.
6. plasma high-frequency and high-voltage power supply according to claim 1, is characterized in that: described full-bridge high-frequency converter unit (4) is formed and determined frequency resonant mode Zero-voltage zero-current full-bridge converter by two high-power half-bridge IGBT module V4, V5 with identical electric parameter and auxiliary resonance inductance L 6, auxiliary resonance capacitor C 13, C14.
7. plasma high-frequency and high-voltage power supply according to claim 1, it is characterized in that: described high frequency high voltage transformer (5), high-voltage rectifying filter unit (6) and current/voltage sensing unit (7) are integrated in a fuel tank, and high pressure is drawn by a pluggable high-tension cable.
8. plasma high-frequency and high-voltage power supply according to claim 1, is characterized in that: the secondary many windings of employing of described high frequency high voltage transformer (5) planarized structure.
9. plasma high-frequency and high-voltage power supply according to claim 1, it is characterized in that: described current/voltage sensing unit (7) is the low side of the high voltage source output at high-voltage rectifying filter unit (6) the current transformer TA1 that connects, when there is sparking in high voltage source, to DSP control and parameter display unit (8), provide current pulse signal fast, in fast shut-off BUCK conversion and full-bridge high-frequency translation circuit, the grid of IGBT drives pwm signal.
10. plasma high-frequency and high-voltage power supply according to claim 1, is characterized in that: described DSP controls and the control chip of parameter display unit (8) is TMS320LF2407.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201320558735.7U CN203457064U (en) | 2013-09-09 | 2013-09-09 | Plasma high-frequency high-voltage power supply |
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| CN201320558735.7U CN203457064U (en) | 2013-09-09 | 2013-09-09 | Plasma high-frequency high-voltage power supply |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103475242A (en) * | 2013-09-09 | 2013-12-25 | 中国船舶重工集团公司第七二三研究所 | Plasma high frequency high voltage power supply |
| CN106877663A (en) * | 2015-12-11 | 2017-06-20 | 中国航空工业集团公司雷华电子技术研究所 | A kind of method for solving the interference of TWT transmitter pulse switch power supply |
| CN108448912A (en) * | 2018-01-30 | 2018-08-24 | 安徽省金屹电源科技有限公司 | A kind of air-cooled high-frequency and high-voltage power supply |
-
2013
- 2013-09-09 CN CN201320558735.7U patent/CN203457064U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103475242A (en) * | 2013-09-09 | 2013-12-25 | 中国船舶重工集团公司第七二三研究所 | Plasma high frequency high voltage power supply |
| CN106877663A (en) * | 2015-12-11 | 2017-06-20 | 中国航空工业集团公司雷华电子技术研究所 | A kind of method for solving the interference of TWT transmitter pulse switch power supply |
| CN108448912A (en) * | 2018-01-30 | 2018-08-24 | 安徽省金屹电源科技有限公司 | A kind of air-cooled high-frequency and high-voltage power supply |
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