CN203249935U - Piezoresistive three-way acceleration sensor - Google Patents
Piezoresistive three-way acceleration sensor Download PDFInfo
- Publication number
- CN203249935U CN203249935U CN 201320018268 CN201320018268U CN203249935U CN 203249935 U CN203249935 U CN 203249935U CN 201320018268 CN201320018268 CN 201320018268 CN 201320018268 U CN201320018268 U CN 201320018268U CN 203249935 U CN203249935 U CN 203249935U
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- circuit board
- sensor
- plate
- pressure resistance
- acceleration transducer
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Abstract
The utility model belongs to the technical field of electrocommunication, and in particular provides an acceleration sensor, and especially relates to a piezoresistive three-way acceleration sensor. The piezoresistive three-way acceleration sensor comprises a baseplate with threaded holes. The baseplate is provided with a groove which is used to embed a magnetic steel plate so that an upper surface of the magnetic steel plate is aligned with an upper surface of the baseplate. The baseplate is connected with a scaleboard and a circuit board which are provided with through-holes by bolts on a same direction in sequence. The circuit board is provided with an upper mass block and a lower mass block, matching with an upper end and a lower end. The circuit board is also provided with a first sensor chip and a second sensor chip which are disposed vertically and are orthogonal. The circuit board is also provided with a third sensor chip on a horizontal direction. A cover plate which forms a cavity with the circuit board is disposed above the baseplate. The piezoresistive three-way acceleration sensor is advantaged in that the structure can ensure good verticality and parallelism of the sensor chips relative to the sensor structure on the basis that sensor frequency is detected from 0 Hz is satisfied.
Description
Technical field
The utility model belongs to the electronic communication field, refers to especially a kind of acceleration transducer, especially relates to a kind of pressure resistance type three-dimensional acceleration transducer.
Background technology
Piezoresistive transducer refers to utilize the piezoresistive effect of single crystal silicon material and the sensor that integrated circuit technique is made.Single crystal silicon material is after the effect that is subject to power, and resistivity changes, and just can obtain the electric signal output that the power that is proportional to changes by metering circuit.Piezoresistive transducer is used for pressure, pulling force, pressure differential and can changes measurement and the control of other physical quantitys (such as liquid level, acceleration, weight, strain, flow, vacuum tightness) of the variation of power into.At present, pressure resistance type three-dimensional acceleration transducer is also few in number, and adopt sheet metal structural to fix inner circuit board and sensor chip more, because the general precision of can manufacturing is substantially in 0.5 millimeter, and structure is thin, rigidity is relatively poor, thereby causes product not have higher detection frequency to reach preferably accuracy of detection.The precision of metalworking product is then higher, can guarantee in 0.1 millimeter, and adopt the whole metalworking of stainless steel material, then can under the prerequisite that guarantees precision, can improve again rigidity and the shielding of structure.Three axial static response acceleration sensors on the domestic market mainly are capacitive, the major defect that exists: background noise is generally larger, cause sensor resolution relatively poor, the background noise of three axial static response acceleration sensors on the market is basically in the rank of several mVrms, and the background noise of our three axial static response acceleration sensors is controlled at about 0.1mVrms, has differed tens times; The sensor that has may background noise with we almost, but the frequency response range of sensor is lower, generally all in 100Hz, and our sensor can reach 250Hz.Three axial static response acceleration sensors on the international market only have a few producer that production is arranged, but price is very high, and delivery cycle is very long.
Summary of the invention
The purpose of this utility model is the problems referred to above that exist for prior art, proposed a kind ofly to adopt the whole metalworking of stainless steel material can guarantee higher rigidity, thereby raising resonant frequency, make product have larger sensing range, also can guarantee good shielding simultaneously, thereby reduce the sensor background noise, make sensor that better resolution be arranged, three faces of sensor have mounting hole, and sensor built-in the pressure resistance type three-dimensional acceleration transducer of strong magnets.
For achieving the above object, the utility model has adopted following technical proposal: a kind of pressure resistance type three-dimensional acceleration transducer, comprise the base plate that is threaded the hole, and be provided with groove above the described base plate, be used for embedded magnetic steel plate, make magnetic steel plate upper surface and plate upper surface flat; Simultaneously base plate is connected with liner plate and circuit board with through hole by screw successively in same direction; Circuit board cooperates upper and lower side to be respectively equipped with improve quality piece and lower mass; Also be respectively equipped with vertical setting and orthogonal sensor chip one and sensor chip two on the circuit board; Horizontal direction also is provided with sensor chip three on the described circuit board, base plate top be provided with can with the cover plate of its formation cavity.
In above-mentioned a kind of pressure resistance type three-dimensional acceleration transducer, described base plate and cover plate are respectively the metalworking of monoblock stainless steel material and make, and guarantee higher rigidity and the shielding properties of sensor construction.
In above-mentioned a kind of pressure resistance type three-dimensional acceleration transducer, the middle groove that can paste with the relevant information pad pasting that is provided with above the described cover plate.
In above-mentioned a kind of pressure resistance type three-dimensional acceleration transducer, described liner plate adopts the bakelite plate manufacturing.
In above-mentioned a kind of pressure resistance type three-dimensional acceleration transducer, also be provided with square hole on the described circuit board.
In above-mentioned a kind of pressure resistance type three-dimensional acceleration transducer, described piece and the lower mass of improving quality is separately positioned on the upper and lower of square hole, and all cooperates with square hole by boss.
Compared with prior art, the utility model has the advantage of: the pressure resistance type three-dimensional acceleration sensor structure of employing, satisfying on the basis that sensor frequency begins to detect from 0Hz, can guarantee that sensor chip is for good verticality and the depth of parallelism of sensor construction, thereby make this product have good detection sensitivity, particularly at the relative pressure resistance type three-dimensional acceleration transducer that is superior to other structure with the sensitivity on the Y-direction of directions X.The Interior permanent magnet structure can make things convenient for the fixing of sensor, and main body adopts stainless steel structure and adopts high-precision metalworking, has guaranteed rigidity and shielding that sensor is higher, thereby has made product have higher resonant frequency and good detection performance.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is explosive view of the present utility model.
Fig. 2 is constitutional diagram of the present utility model
Among the figure, 1. base plate, 2. magnetic steel plate, 3. liner plate 4. descends mass, 5. circuit board, 6. sensor chip three, and 7. sensor chip two, the piece of 8. improving quality, 9. sensor chip one, 10. cover plate.
Embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
As depicted in figs. 1 and 2, a kind of pressure resistance type three-dimensional acceleration transducer, comprise the base plate that is threaded the hole, be provided with groove above the described base plate, be used for embedded magnetic steel plate, make magnetic steel plate upper surface and plate upper surface flat, magnetic steel plate is powerful magnet steel, play and the effect (when if sample be non magnetic adsorbent can adopt steel clamps reach fixation) of object being measured surface with magnetic-adsorption, and can guarantee that enough absorption affinities are arranged in the scope of the required detection of sensor.Simultaneously base plate is connected with liner plate and circuit board with through hole by screw successively in same direction, described liner plate adopts the bakelite manufacturing, can guarantee and the close contact of circuit board, fill up the middle space of circuit board and base plate, play the effect that strengthens the rigidity of structure.The fixing threaded hole of circuit board and base plate reaches 6, both rigidity after both can having guaranteed to install, can guarantee again both flatness and the vertical and depth of parallelism of side, base plate and cover plate are respectively the metalworking of monoblock stainless steel material and make, mismachining tolerance is very little, both the rigidity that sensor construction is higher can be guaranteed, sensor construction preferably shielding properties and higher precision can be guaranteed again.Circuit board cooperates upper and lower side to be respectively equipped with improve quality piece and lower mass; Lower mass has the square boss structure with the one side that the piece of improving quality contacts with circuit board, the square hole of opening with circuit board top is corresponding, have good verticality and the depth of parallelism with respect to circuit board 5 after assurance installs and fixes, guarantee the measuring accuracy of sensor on directions X and Y-direction.Also be respectively equipped with vertical setting and orthogonal sensor chip one and sensor chip two on the circuit board; Horizontal direction also is provided with sensor chip three on the described circuit board, base plate top be provided with can with the cover plate of its formation cavity; Be provided with the groove that to paste with the relevant information pad pasting in the middle of above the cover plate.
The above only is preferred embodiment of the present utility model; not in order to limit the utility model; all within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (6)
1. a pressure resistance type three-dimensional acceleration transducer comprises the base plate that is threaded the hole, is provided with groove above the described base plate, is used for embedded magnetic steel plate, makes magnetic steel plate upper surface and plate upper surface flat; Simultaneously base plate is connected with liner plate and circuit board with through hole by screw successively in same direction; Circuit board cooperates upper and lower side to be respectively equipped with improve quality piece and lower mass; Also be respectively equipped with vertical setting and orthogonal sensor chip one and sensor chip two on the circuit board; Horizontal direction also is provided with sensor chip three on the described circuit board, base plate top be provided with can with the cover plate of its formation cavity.
2. a kind of pressure resistance type three-dimensional acceleration transducer described in according to claim 1 is characterized in that described base plate and cover plate are respectively the metalworking of monoblock stainless steel material and make, and guarantees higher rigidity and the shielding properties of sensor construction.
3. a kind of pressure resistance type three-dimensional acceleration transducer described in according to claim 1 and 2 is characterized in that, is provided with the groove that can paste with the relevant information pad pasting in the middle of above the described cover plate.
4. a kind of pressure resistance type three-dimensional acceleration transducer described in according to claim 1 is characterized in that, described liner plate adopts the bakelite plate manufacturing.
5. a kind of pressure resistance type three-dimensional acceleration transducer described in according to claim 1 is characterized in that, also is provided with square hole on the described circuit board.
6. a kind of pressure resistance type three-dimensional acceleration transducer described in according to claim 1 is characterized in that, described piece and the lower mass of improving quality is separately positioned on the upper and lower of square hole, and all cooperates with square hole by boss structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320018268 CN203249935U (en) | 2013-01-14 | 2013-01-14 | Piezoresistive three-way acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320018268 CN203249935U (en) | 2013-01-14 | 2013-01-14 | Piezoresistive three-way acceleration sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203249935U true CN203249935U (en) | 2013-10-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320018268 Expired - Fee Related CN203249935U (en) | 2013-01-14 | 2013-01-14 | Piezoresistive three-way acceleration sensor |
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| Country | Link |
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| CN (1) | CN203249935U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016161562A1 (en) * | 2015-04-07 | 2016-10-13 | SZ DJI Technology Co., Ltd. | System and method for providing a simple and reliable inertia measurement unit (imu) |
| CN107167623A (en) * | 2017-05-22 | 2017-09-15 | 杭州集普科技有限公司 | Three axis angular rate sensors of vehicle impact testing |
| US9772343B2 (en) | 2011-09-02 | 2017-09-26 | SZ DJI Technology Co., Ltd | Inertia measurement module for unmanned aircraft |
-
2013
- 2013-01-14 CN CN 201320018268 patent/CN203249935U/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9772343B2 (en) | 2011-09-02 | 2017-09-26 | SZ DJI Technology Co., Ltd | Inertia measurement module for unmanned aircraft |
| US9841432B2 (en) | 2011-09-02 | 2017-12-12 | SZ DJI Technology Co., Ltd | Inertia measurement module for unmanned aircraft |
| US10591504B2 (en) | 2011-09-02 | 2020-03-17 | SZ DJI Technology Co., Ltd. | Inertia measurement module for unmanned aircraft |
| US11293937B2 (en) | 2011-09-02 | 2022-04-05 | SZ DJI Technology Co., Ltd. | Inertia measurement module for unmanned aircraft |
| WO2016161562A1 (en) * | 2015-04-07 | 2016-10-13 | SZ DJI Technology Co., Ltd. | System and method for providing a simple and reliable inertia measurement unit (imu) |
| CN108139216A (en) * | 2015-04-07 | 2018-06-08 | 深圳市大疆创新科技有限公司 | For providing the system and method for simple and reliable Inertial Measurement Unit (IMU) |
| US10030974B2 (en) | 2015-04-07 | 2018-07-24 | SZ DJI Technology Co., Ltd. | System and method for providing a simple and reliable inertia measurement unit (IMU) |
| US10627233B2 (en) | 2015-04-07 | 2020-04-21 | SZ DJI Technology Co., Ltd. | System and method for providing a simple and reliable inertia measurement unit (IMU) |
| US11112244B2 (en) | 2015-04-07 | 2021-09-07 | SZ DJI Technology Co., Ltd. | System and method for providing a simple and reliable inertia measurement unit (IMU) |
| CN107167623A (en) * | 2017-05-22 | 2017-09-15 | 杭州集普科技有限公司 | Three axis angular rate sensors of vehicle impact testing |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131023 Termination date: 20190114 |
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| CF01 | Termination of patent right due to non-payment of annual fee |