CN202903205U - Bridge module used for magnetic sensor - Google Patents

Bridge module used for magnetic sensor Download PDF

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Publication number
CN202903205U
CN202903205U CN 201220434849 CN201220434849U CN202903205U CN 202903205 U CN202903205 U CN 202903205U CN 201220434849 CN201220434849 CN 201220434849 CN 201220434849 U CN201220434849 U CN 201220434849U CN 202903205 U CN202903205 U CN 202903205U
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bridge module
electric bridge
mtj element
brachium pontis
element group
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CN 201220434849
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王建国
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MultiDimension Technology Co Ltd
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Abstract

The utility model discloses a bridge module used for a magnetic sensor. The bridge module comprises four bridge arms and a plurality of pads. Each bridge arm comprises 2N MTJ component groups (N=1, 2, 3, 4, 5......). The bridge module has a multilayer film structure and comprises a first conducting layer which is arranged on a substrate and forms a plurality of lower conducting layers. The lower conducting layers are provided with an MTJ component layer forming the MTJ component groups and are also provided with a second conducting layer forming the plurality of pads. The MTJ component layer is provided with a second conducting layer forming a plurality of conducting layers. The MTJ component groups of the corresponding bridge arms of the bridge module are adjacent in position. Compared with the bridge module in the prior art, the bridge module provided by the present utility model can more easily enable the resistance values of the corresponding bridge arms to be equal, and is very suitable for application in the magnetic sensor.

Description

A kind of electric bridge module for Magnetic Sensor
Technical field
The utility model relates to a kind of electric bridge module, particularly a kind of electric bridge module for Magnetic Sensor.
Background technology
As shown in Figure 1, electric bridge comprises four brachium pontis i.e. the first brachium pontis ARM1, the second brachium pontis ARM2, the 3rd brachium pontis ARM3 and the 4th brachium pontis ARM4.In order to guarantee that this electric bridge can work, need the resistance value of the first brachium pontis ARM1 and the 3rd brachium pontis ARM3 to equate, and the resistance value of the second brachium pontis ARM2 and the 4th brachium pontis ARM4 equate.The first brachium pontis ARM1 and the 3rd brachium pontis ARM3 are defined as first group of corresponding brachium pontis of this electric bridge.In like manner, the second brachium pontis ARM2 and the 4th brachium pontis ARM4 are defined as second group of corresponding brachium pontis of this electric bridge.
The application of electric bridge module is very wide, all needs the electric bridge module in a lot of electron devices.Usually, need several even tens electric bridge modules in a Magnetic Sensor.In the prior art, the electric bridge module that is used for Magnetic Sensor is difficult to realize that the resistance value of corresponding brachium pontis equates, causes the performance of this electric bridge module to reduce, even causes this electric bridge module to work.In the practical application, each brachium pontis that is used for the electric bridge module of Magnetic Sensor comprises series connection and/or a plurality of magnetic tunnel-junctions (MTJ) element in parallel.For this electric bridge module, because the impact of structure, circuit layout and the manufacturing process of the MTJ element of composition electric bridge, be difficult to realize that the resistance value resistance value equal and the second brachium pontis ARM2 and the 4th brachium pontis ARM4 of the first brachium pontis ARM1 and the 3rd brachium pontis ARM3 equates, thereby the performance that often causes this electric bridge reduces even can't work, and then causes Magnetic Sensor to work.
Therefore, need a kind of electric bridge module for Magnetic Sensor, this electric bridge module can realize relatively easily that the resistance value of corresponding brachium pontis equates.
The utility model content
The purpose of this utility model provides a kind of electric bridge module for Magnetic Sensor.
The electric bridge module that is used for Magnetic Sensor that the utility model provides comprises four brachium pontis and a plurality of pad, each brachium pontis comprises the 2N (N=1 of series connection, 2,3,4,5 ...) individual MTJ element group, this electric bridge module has multi-layer film structure, comprise the first conductive layer of being located at a plurality of lower conductiving layers of on-chip formation, described lower conductiving layer is provided with the MTJ element layer that forms described MTJ element group, also be provided with the second conductive layer that forms described a plurality of pads on the described lower conductiving layer, described MTJ element layer is provided with the 3rd conductive layer that forms a plurality of upper conductive layers; The position of the MTJ element group of the corresponding brachium pontis of described electric bridge module is adjacent.
Preferably, the MTJ element group of two groups of corresponding brachium pontis is positioned at respectively the two ends of described electric bridge module; The MTJ element group of a brachium pontis that is positioned at one group of the same end of described electric bridge module corresponding brachium pontis is corresponding one by one respectively with the MTJ element group of another brachium pontis, and the position of the MTJ element group of correspondence is the most adjacent.
Preferably, when N 〉=2, the lower conductiving layer that MTJ element group is the lower conductiving layer of " U " font and is " one " font in each brachium pontis of described electric bridge module alternately is electrically connected.
Preferably, each MTJ element group of described electric bridge module comprises the MTJ element of two series connection.
Preferably, all MTJ elements of comprising of described electric bridge module are all identical.
Preferably, the structure of all MTJ elements of described electric bridge module is all identical with material.
Preferably, the shape of all MTJ elements of described electric bridge module is all identical with size.
Preferably, each MTJ element ovalize of described electric bridge module.
Preferably, the resistance value of four of described electric bridge module brachium pontis equates.
The utlity model has following beneficial effect:
Compare with the electric bridge module of prior art, the electric bridge module that the utility model provides can realize relatively easily that the resistance value of corresponding brachium pontis equates, is very suitable for using in Magnetic Sensor.
Description of drawings
Fig. 1 is the bridge structure schematic diagram;
The schematic diagram of the electric bridge module that is used for Magnetic Sensor that Fig. 2 provides for the utility model embodiment 1;
The local enlarged diagram of the 1A part of the electric bridge module that is used for Magnetic Sensor that Fig. 3 provides for the utility model embodiment 1;
The local enlarged diagram of the 1B part of the electric bridge module that is used for Magnetic Sensor that Fig. 4 provides for the utility model embodiment 1;
The schematic diagram of the film layer structure at the place, the one MTJ element group 131 positions of the electric bridge module that is used for Magnetic Sensor that Fig. 5 provides for the utility model embodiment 1;
The schematic diagram of the electric bridge module that is used for Magnetic Sensor that Fig. 6 provides for the utility model embodiment 2;
The schematic diagram of the electric bridge module that is used for Magnetic Sensor that Fig. 7 provides for the utility model embodiment 3.
Embodiment
Below in conjunction with drawings and Examples content of the present utility model is further described.
According to a preferred embodiment of the invention, the electric bridge module comprises four brachium pontis and a plurality of pad, each brachium pontis comprises the 2N(N=1 of series connection, 2,3,4,5 ...) individual MTJ element group, this electric bridge module has multi-layer film structure, the first conductive layer that comprises a plurality of lower conductiving layers of formation of being located on the substrate (not shown), described lower conductiving layer is provided with the MTJ element layer that forms described MTJ element group, also is provided with the second conductive layer that forms described a plurality of pads on the described lower conductiving layer, and described MTJ element layer is provided with the 3rd conductive layer that forms a plurality of upper conductive layers; The position of the MTJ element group of the corresponding brachium pontis of described electric bridge module is adjacent.MTJ element group in two groups of corresponding brachium pontis of described electric bridge module is positioned at respectively the two ends of described electric bridge module; The MTJ element group of a brachium pontis that is positioned at one group of the same end of described electric bridge module corresponding brachium pontis is corresponding one by one respectively with the MTJ element group of another brachium pontis, and the position of the MTJ element group of correspondence is the most adjacent.MTJ element group is the lower conductiving layer and alternately electrical connection of the lower conductiving layer that is " one " font of " U " font in each brachium pontis.
Embodiment 1
When embodiment 1 had provided N=1, namely each brachium pontis comprised the electric bridge module that is used for Magnetic Sensor of 2 MTJ element groups, as shown in Figure 2.The partial enlarged drawing of the 1A part of described electric bridge module as shown in Figure 3.The partial enlarged drawing of the 1B part of described electric bridge module as shown in Figure 4.Such as Fig. 2, Fig. 3 and shown in Figure 4, in the present embodiment, described electric bridge module adopts multi-layer film structure, and described electric bridge module comprises four brachium pontis and for example four pads, and each brachium pontis comprises the individual MTJ element of for example 2 (N=1) group of series connection.In the present embodiment, described electric bridge module comprises the first conductive layer of formation the first lower conductiving layer 121, the second lower conductiving layer 122, the 3rd lower conductiving layer 123, the 4th lower conductiving layer 124, the 5th lower conductiving layer 125, the 6th lower conductiving layer 126, the 7th lower conductiving layer 127, the 8th lower conductiving layer 128 and the 9th lower conductiving layer 129 be located on the substrate (not shown).Also be provided with the MTJ element layer that forms a MTJ element group 131, the 2nd MTJ element group 132, the 3rd MTJ element group 133, the 4th MTJ element group 134, the 5th MTJ element group 135, the 6th MTJ element group 136, the 7th MTJ element group 137 and the 8th MTJ element group 138 on the described lower conductiving layer.Also be provided with the second conductive layer that forms the first pad 111, the second pad 112, the 3rd pad 113 and the 4th pad 114 on the described lower conductiving layer.Described MTJ element layer is provided with and forms on first on the conductive layer 141, second on the conductive layer 142, the 3rd on the conductive layer 143, the 4th on the conductive layer 144, the 5th on the conductive layer 145, the 6th on the conductive layer 146, the 7th the 3rd conductive layer of conductive layer 148 on the conductive layer 147 and the 8th.Each MTJ element group of described electric bridge module comprises the MTJ element of two series connection.In the present embodiment, all MTJ elements of comprising of described electric bridge module are for example all identical.The structure of all MTJ elements of described electric bridge module is all identical with material.The shape of all MTJ elements of described electric bridge module is all identical with size.In the present embodiment, each MTJ element of described electric bridge module is for example oval.
The layer structure of film layer structure described electric bridge module as example specifies of locating take a MTJ element group 131 positions.As shown in Figure 5, the 7th lower conductiving layer 127 and the 8th lower conductiving layer 128 are located on the substrate (not shown); Two MTJ elements in the one MTJ element group 131 are located at respectively on the 7th lower conductiving layer 127 and the 8th lower conductiving layer 128; Conductive layer 141 is located on the MTJ element group 131 on first, is used for making two MTJ elements of a MTJ element group 131 to be electrically connected.The film layer structure at the 2nd MTJ element group 132 of described electric bridge module, the 3rd MTJ element group 133, the 4th MTJ element group 134, the 5th MTJ element group 135, the 6th MTJ element group 136, the 7th MTJ element group 137 and place, the 8th MTJ element group 138 positions is identical with the film layer structure at place, a MTJ element group 131 positions.Direction of current in the one MTJ element group 131 is shown in the arrow among Fig. 5.
For the same thin rete, the character of the film of adjacent position is close, and the position the closer to, the character of film is more approaching.Therefore, be that two the most adjacent MTJ element groups of position of MTJ element layer are electrically connected to respectively in two brachium pontis with the same thin rete, be easy to realize that the resistance value of these two brachium pontis equates.The present embodiment utilizes above-mentioned principle, and the MTJ element group that described electric bridge situated is the most adjacent is electrically connected to respectively in one group of corresponding brachium pontis, equates to realize relatively easily this resistance value of organizing corresponding brachium pontis.As shown in Figures 2 and 3, the one MTJ element group 131, the 2nd MTJ element group 132, the 3rd MTJ element group 133 and the 4th MTJ element group 134 are positioned at an end of described electric bridge module, and the position of a MTJ element group 131 and the 2nd MTJ element group 132 is the most adjacent, and the position of the 3rd MTJ element group 133 and the 4th MTJ element group 134 is the most adjacent.Therefore, be easy to realize that a MTJ element group 131 equates with the resistance value of the 2nd MTJ element group 132, and the 3rd MTJ element group 133 equates with the resistance value of the 4th MTJ element group 134.As shown in Figures 2 and 3, a MTJ element in the one MTJ element group 131 be located at the 8th lower conductiving layer 128 away from the 4th pad 114 and an end adjacent with the 7th lower conductiving layer 127, another MTJ element in the one MTJ element group 131 is located at an end adjacent with the 8th lower conductiving layer 128 of the 7th lower conductiving layer 127, and conductive layer 141 is used for two MTJ elements of a MTJ element group 131 are electrically connected on first.The 7th lower conductiving layer 127 is inverted " U " font.The second lower conductiving layer 122 is " one " font.Similarly, a MTJ element in the 4th MTJ element group 134 be located at the 6th lower conductiving layer 126 away from the second pad 112 and an end adjacent with the 7th lower conductiving layer 127, another MTJ element in the 4th MTJ element group 134 is located at an end adjacent with the 6th lower conductiving layer 126 of the 7th lower conductiving layer 127, and conductive layer 144 is used for two MTJ elements of the 4th MTJ element group 134 are electrically connected on the 4th.Being located at a MTJ element group 131 between the 4th pad 114 and the second pad 112 and the 4th MTJ element group 134 connects and consists of a brachium pontis of described electric bridge module, this bridge arm equivalent is called as the 3rd brachium pontis ARM13 of described electric bridge module hereinafter in the 3rd brachium pontis ARM3 of for example electric bridge shown in Figure 1.Similarly, being located at the 2nd MTJ element group 132 between the first pad 111 and the 3rd pad 113 and the 3rd MTJ element group 133 connects and consists of a brachium pontis of described electric bridge module, this bridge arm equivalent is called as the first brachium pontis ARM11 of described electric bridge module in the first brachium pontis ARM1 of for example electric bridge shown in Figure 1.The first brachium pontis ARM11 and the 3rd brachium pontis ARM13 are defined as first group of corresponding brachium pontis of described electric bridge module.The MTJ element group of the 3rd brachium pontis ARM13 of first group of corresponding brachium pontis is corresponding one by one respectively with the MTJ element group of the first brachium pontis ARM11, and the position of corresponding MTJ element group is the most adjacent.Particularly, the MTJ element group 131 of the 3rd brachium pontis ARM13 is corresponding with the 2nd MTJ element group 132 of the first brachium pontis ARM11, and the position of a MTJ element group 131 and the 2nd MTJ element group 132 is the most adjacent; The 4th MTJ element group 134 of the 3rd brachium pontis ARM13 is corresponding with the 3rd MTJ element group 133 of the first brachium pontis ARM11, and the position of the 4th MTJ element group 134 and the 3rd MTJ element group 133 is the most adjacent.The 4th pad 114 among the 3rd brachium pontis ARM13 of described electric bridge module, the 8th lower conductiving layer 128, conductive layer 141 on first, the 7th lower conductiving layer 127, conductive layer 144 on the 4th, the resistance value sum of the 6th lower conductiving layer 126 and the second pad 112 is set to equal the first pad 111 among the first brachium pontis ARM11, the first lower conductiving layer 121, conductive layer 142 on second, the second lower conductiving layer 122, conductive layer 143 on the 3rd, the resistance value sum of the 3rd lower conductiving layer 123 and the 3rd pad 113.Therefore, be easy to realize that first group of corresponding brachium pontis of described electric bridge module is that the first brachium pontis ARM11 equates with the resistance value of the 3rd brachium pontis ARM13.
The structure of the 1B part of described electric bridge module is identical with its 1A part.Such as Fig. 2 and shown in Figure 4, the 5th MTJ element group 135, the 6th MTJ element group 136, the 7th MTJ element group 137 and the 8th MTJ element group 138 are positioned at the other end of described electric bridge module, and the position of the 5th MTJ element group 135 and the 6th MTJ element group 136 is the most adjacent, and the position of the 7th MTJ element group 137 and the 8th MTJ element group 138 is the most adjacent.Therefore, be easy to realize that the 5th MTJ element group 135 equates with the resistance value of the 6th MTJ element group 136, and the 7th MTJ element group 137 equates with the resistance value of the 8th MTJ element group 138.Being located at the 5th MTJ element group 135 between the 3rd pad 113 and the second pad 112 and the 8th MTJ element group 138 connects and consists of a brachium pontis of described electric bridge module, this bridge arm equivalent is called as the 4th brachium pontis ARM14 of described electric bridge module hereinafter in the 4th brachium pontis ARM4 of for example electric bridge shown in Figure 1.Similarly, being located at the 6th MTJ element group 136 between the first pad 111 and the 4th pad 114 and the 7th MTJ element group 137 connects and consists of a brachium pontis of described electric bridge module, this bridge arm equivalent is called as for example second brachium pontis ARM12 of described electric bridge module hereinafter in the second brachium pontis ARM2 of for example electric bridge shown in Figure 1.The second brachium pontis ARM12 and the 4th brachium pontis ARM14 are defined as second group of corresponding brachium pontis of described electric bridge module.The MTJ element group of the 4th brachium pontis ARM14 of second group of corresponding brachium pontis is corresponding one by one respectively with the MTJ element group of the second brachium pontis ARM12, and the position of corresponding MTJ element group is the most adjacent.Particularly, the 5th MTJ element group 135 of the 4th brachium pontis ARM14 is corresponding with the 6th MTJ element group 136 of the second brachium pontis ARM12, and the position of the 5th MTJ element group 135 and the 6th MTJ element group 136 is the most adjacent; The 7th MTJ element group 137 of the second brachium pontis ARM12 is corresponding with the 8th MTJ element group 138 of the 4th brachium pontis ARM14, and the position of the 7th MTJ element group 137 and the 8th MTJ element group 138 is the most adjacent.The 3rd pad 113 among the 4th brachium pontis ARM14 of described electric bridge module, the 4th lower conductiving layer 124, conductive layer 145 on the 5th, the 5th lower conductiving layer 125, conductive layer 148 on the 8th, the resistance value sum of the 6th lower conductiving layer 126 and the second pad 112 is set to equal the first pad 111 among the second brachium pontis ARM12, the first lower conductiving layer 121, conductive layer 146 on the 6th, the 9th lower conductiving layer 129, conductive layer 147 on the 7th, the resistance value sum of the 8th lower conductiving layer 128 and the 4th pad 114.With first group of corresponding brachium pontis in like manner, the second group of corresponding brachium pontis that is easy to realize described electric bridge module i.e. the second brachium pontis ARM12 equates with the resistance value of the 4th brachium pontis ARM14.
The first brachium pontis ARM11 of described electric bridge module, the second brachium pontis ARM12, the 3rd brachium pontis ARM13 and the 4th brachium pontis ARM14 consist of a complete electric bridge as shown in Figure 1.In the present embodiment, the resistance value of the first brachium pontis ARM11, the second brachium pontis ARM12, the 3rd brachium pontis ARM13 and the 4th brachium pontis ARM14 equates.
Embodiment 2
The structural similarity of the electric bridge module that is used for Magnetic Sensor that as shown in Figure 6, the present embodiment provides and the electric bridge module of embodiment 1.Different from the electric bridge module of embodiment 1 is that each brachium pontis of the electric bridge module of the present embodiment comprises for example MTJ element group of the individual series connection of four (N=2).In the present embodiment, the lower conductiving layer that four MTJ element groups are the lower conductiving layer of " U " font and are " one " font in each brachium pontis of described electric bridge module alternately is electrically connected.
Embodiment 3
The structural similarity of the electric bridge module that is used for Magnetic Sensor that as shown in Figure 7, the present embodiment provides and the electric bridge module of embodiment 1.Different from the electric bridge module of embodiment 1 is that each brachium pontis of the electric bridge module of the present embodiment comprises for example MTJ element group of 12 (N=6) series connection.In the present embodiment, the lower conductiving layer that 12 MTJ element groups are the lower conductiving layer of " U " font and are " one " font in each brachium pontis of described electric bridge module alternately is electrically connected.
Compare with the electric bridge module of prior art, the electric bridge module that the utility model provides can realize relatively easily that the resistance value of corresponding brachium pontis equates, is very suitable for using in Magnetic Sensor.
Should be appreciated that the above detailed description of the technical solution of the utility model being carried out by preferred embodiment is illustrative and not restrictive.Those of ordinary skill in the art can make amendment to the technical scheme that each embodiment puts down in writing on the basis of reading the utility model instructions, perhaps part technical characterictic wherein is equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution break away from the spirit and scope of each embodiment technical scheme of the utility model.

Claims (9)

1. the electric bridge module that is used for Magnetic Sensor, this electric bridge module comprises four brachium pontis and a plurality of pad, each brachium pontis comprises 2N MTJ element group of series connection, N=1,2,3,4,5 ..., it is characterized in that, this electric bridge module has multi-layer film structure, comprise the first conductive layer of being located at a plurality of lower conductiving layers of on-chip formation, described lower conductiving layer is provided with the MTJ element layer that forms described MTJ element group, also is provided with the second conductive layer that forms described a plurality of pads on the described lower conductiving layer, and described MTJ element layer is provided with the 3rd conductive layer that forms a plurality of upper conductive layers; The position of the MTJ element group of the corresponding brachium pontis of described electric bridge module is adjacent.
2. the electric bridge module for Magnetic Sensor according to claim 1 is characterized in that, the MTJ element group of two groups of corresponding brachium pontis is positioned at respectively the two ends of described electric bridge module; The MTJ element group of a brachium pontis that is positioned at one group of the same end of described electric bridge module corresponding brachium pontis is corresponding one by one respectively with the MTJ element group of another brachium pontis, and the position of the MTJ element group of correspondence is the most adjacent.
3. the electric bridge module for Magnetic Sensor according to claim 1 is characterized in that, when N 〉=2, the lower conductiving layer that MTJ element group is the lower conductiving layer of " U " font and is " one " font in each brachium pontis of described electric bridge module alternately is electrically connected.
4. the electric bridge module for Magnetic Sensor according to claim 1 is characterized in that, each MTJ element group of described electric bridge module comprises the MTJ element of two series connection.
5. the electric bridge module for Magnetic Sensor according to claim 1 is characterized in that, all MTJ elements that described electric bridge module comprises are all identical.
6. the electric bridge module for Magnetic Sensor according to claim 5 is characterized in that, the structure of all MTJ elements of described electric bridge module is all identical with material.
7. the electric bridge module for Magnetic Sensor according to claim 5 is characterized in that, the shape of all MTJ elements of described electric bridge module is all identical with size.
8. the electric bridge module for Magnetic Sensor according to claim 7 is characterized in that, each MTJ element ovalize of described electric bridge module.
9. the electric bridge module for Magnetic Sensor according to claim 1 is characterized in that, the resistance value of four brachium pontis of described electric bridge module equates.
CN 201220434849 2012-08-29 2012-08-29 Bridge module used for magnetic sensor Expired - Lifetime CN202903205U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104596551A (en) * 2013-10-30 2015-05-06 西门子公司 Collision Sensor Device for a Medical Apparatus, and Medical Apparatus
CN105466324A (en) * 2015-12-25 2016-04-06 无锡乐尔科技有限公司 Displacement sensor and displacement sensing measurement system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104596551A (en) * 2013-10-30 2015-05-06 西门子公司 Collision Sensor Device for a Medical Apparatus, and Medical Apparatus
US9737270B2 (en) 2013-10-30 2017-08-22 Siemens Aktiengesellschaft Collision sensor device for a medical apparatus, and medical apparatus
CN104596551B (en) * 2013-10-30 2017-09-29 西门子公司 Crash sensor device and medical equipment for medical equipment
CN105466324A (en) * 2015-12-25 2016-04-06 无锡乐尔科技有限公司 Displacement sensor and displacement sensing measurement system

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Owner name: WUXI LEER TECHNOLOGY CO., LTD.

Free format text: FORMER OWNER: WANG JIANGUO

Effective date: 20130620

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Address after: 204 room 214028, Science Park, 7 Changjiang Road, Wuxi New District, Jiangsu, China

Patentee after: WUXI LER TECHNOLOGY Co.,Ltd.

Address before: 204 room 214028, Science Park, 7 Changjiang Road, Wuxi New District, Jiangsu, China

Patentee before: Wang Jianguo

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Effective date of registration: 20210310

Address after: 215600 building e, No.7, Guangdong Road, Zhangjiagang Free Trade Zone, Zhangjiagang City, Suzhou City, Jiangsu Province

Patentee after: MultiDimension Technology Co.,Ltd.

Address before: Room 204, zone 1, Science Park, No.7 Changjiang Road, New District, Wuxi City, Jiangsu Province, 214028

Patentee before: Wuxi Ler Technology Co.,Ltd.

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Granted publication date: 20130424

CX01 Expiry of patent term
IP01 Partial invalidation of patent right

Commission number: 5W124348

Conclusion of examination: On the basis of claims 1-9 submitted by the patentee on August 30, 2021, the utility model shall remain valid

Decision date of declaring invalidation: 20220130

Decision number of declaring invalidation: 53889

Denomination of utility model: A Bridge Module for Magnetic Sensors

Granted publication date: 20130424

Patentee: MULTIDIMENSION TECHNOLOGY Co.,Ltd.

IP01 Partial invalidation of patent right