CN117147040B - Flexible conformal bionic whisker sensor - Google Patents

Flexible conformal bionic whisker sensor Download PDF

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CN117147040B
CN117147040B CN202311433044.9A CN202311433044A CN117147040B CN 117147040 B CN117147040 B CN 117147040B CN 202311433044 A CN202311433044 A CN 202311433044A CN 117147040 B CN117147040 B CN 117147040B
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flexible film
cover
spherical
flexible
cylindrical base
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CN117147040A (en
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钱铄
何剑
刘芯宇
武慧
余俊斌
侯晓娟
丑修建
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North University of China
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North University of China
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/162Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

The invention relates to the technical field of measured value and signal transmission, in particular to a flexible conformal bionic tentacle sensor which solves the technical problems of low flexibility degree, low sensitivity and single perceived pressure direction of the traditional tentacle pressure sensor and comprises a cylindrical base, a cone table support piece, a movable top cover and a flexible film spherical cover, wherein an annular groove is formed in the side wall of the cylindrical base, the cone table support piece is connected to the top of the cylindrical base, a ball body is fixedly connected to the top of the cone table support piece, a spherical cavity assembled with the ball body is formed in the movable top cover, cilia are fixedly connected to the center of the top of the movable top cover, a through hole for penetrating the cilia is formed in the top of the flexible film spherical cover, the movable top cover, the ball body and the cone table support piece are covered in the flexible film spherical cover, and the bottom of the flexible film spherical cover is clamped in the annular groove in the side wall of the cylindrical base; the flexible film spherical cover is fixedly provided with a plurality of wavy piezoresistors.

Description

Flexible conformal bionic whisker sensor
Technical Field
The invention relates to the technical field of transmission of measured values and signals, in particular to a flexible conformal bionic whisker sensor.
Background
In the biological world, most animals perceive a weak change in the external environment by means of visual, auditory, tactile, etc. However, in rodents, their visual system in the night is not fully exerted, and thus, the external environment is perceived mainly by means of a haptic system. If the mouse senses the change of the slight pressure of the surrounding environment by using the beard, so as to judge whether the front is provided with an obstacle, the beard of the mouse plays a role of radar, and the mouse has remarkable advantages in the aspect of safe navigation. Based on this feature, a bionic whisker-like sensor has attracted a great deal of attention.
The bionic touch sensing technology can simulate various characteristics of animal tentacle sensing environment, and the animal tentacle sensing environment is arranged on a robot mouse, so that the environment sensing capability of the robot mouse can be further enhanced, and the agility and adaptability of autonomous movement of the robot mouse are improved. As an emerging research direction in the field of touch perception, the bionic touch perception technology has the characteristics of simple structure, reliable information, convenient data processing, strong adaptability and the like, and provides a new solution for detecting the bionic robot in severe environments and limited spaces. At present, a variety of whisker sensors have been manufactured by mimicking the principle of an animal whisker. A whisker sensor combining a hall sensor and a contact sensor was invented as in patent CN107655392 a; patent CN101718535a proposes a tentacle sensor based on a PSD sensor; patent CN112763751a proposes a passive whisker sensor; patent CN110726756a proposes a bionic whisker sensor based on a friction nano-generator.
The antenna sensor is summarized and analyzed to find that most of the existing antenna sensors are based on structures such as rigid substrates or strain gauges of silicon-based or hard aluminum alloy, and the like, so that the device is difficult to have the characteristics of flexibility, multidimensional monitoring, high sensitivity and the like. In addition, the existing whisker sensor sensitive material mostly adopts a metal conductor, and the length-diameter ratio and ductility limited processing technology can not truly simulate the animal whisker sensing function, so that the requirements on embedding and detecting in severe environments are met. Therefore, the mechanical sensor capable of simultaneously realizing flexibility, high sensitivity and multidimensional monitoring is important for the environment sensing capability of the propelling bionic robot mouse.
Disclosure of Invention
The invention provides a flexible conformal bionic whisker sensor, which aims to overcome the technical defects of low flexibility degree, low sensitivity and single sensing pressure direction of the conventional whisker pressure sensor.
The invention provides a flexible conformal bionic tentacle sensor, which comprises a cylindrical base, a truncated cone support piece, a movable top cover and a flexible film spherical cover, wherein an annular groove coaxial with the cylindrical base is formed in the periphery of the side wall of the cylindrical base, the truncated cone support piece is fixedly connected to the top of the cylindrical base, the top of the truncated cone support piece is fixedly connected with a sphere, the sphere is a sphere defect larger than the hemisphere, the sphere, the truncated cone support piece and the cylindrical base are coaxially arranged, a spherical cavity assembled with the sphere is formed in the movable top cover, the volume of the spherical cavity is larger than the hemisphere and smaller than the sphere, the sphere and the spherical cavity together form a rotating assembly, cilia are fixedly connected to the center of the top of the movable top cover, the cilia are positioned on the axis of the cylindrical base under the condition of no stress, the whole flexible film spherical cover is a sphere defect larger than the hemisphere, the top of the flexible film spherical cover is provided with a through hole for penetrating the cilia, the movable top cover, the sphere and the truncated cone support piece are covered in the annular groove of the side wall of the cylindrical base, the top surface of the movable top cover is a curved surface attached to the surface of the flexible film spherical cover, and the flexible film is adhered to the spherical cover; the flexible film spherical cover is fixedly provided with a plurality of piezoresistors which are attached to the outer surface of the flexible film spherical cover and uniformly distributed along the spherical surface, the first ends of the piezoresistors are positioned at the top of the flexible film spherical cover, which is close to the through hole, the second ends of the piezoresistors are positioned at the bottom of the flexible film spherical cover, and copper electrodes are arranged at the two ends of the piezoresistors.
The sphere, the cone frustum supporting piece and the cylindrical base are sequentially and fixedly connected, and the movable top cover, the sphere, the cone frustum supporting piece and the cylindrical base can be prepared from conventional resin during specific operation. The ball body and the movable top cover form a rotating structure similar to a universal connector, so that the movable top cover moves more flexibly when being subjected to external load; the cilia can drive the movable top cover fixed with the cilia to rotate around the ball body after deflecting, and lubrication treatment such as coating of a layer of lubricating oil can be carried out between the ball body and the inner cavity of the movable top cover, so that friction force is reduced. One side wall and the bottom wall of the movable top cover are provided with channels in the spherical cavity, which are convenient for installing the ball body to the spherical cavity, and the channels are communicated with the spherical cavity. The cylindrical base supports the truncated cone support piece, the ball body, the movable top cover and cilia, and plays a role in buckling the flexible film spherical cover. Meanwhile, as the flexible film spherical cover is covered on the cylindrical base, a cavity structure is formed in the flexible film spherical cover, and the cavity structure can enable the flexible film spherical cover to deform greatly under the action of external weak load, so that the micro-stress sensing capability of the sensor is improved greatly. The spherical body at the top of the flexible film spherical cover and the conical frustum support piece are spherical segments larger than a hemisphere, wherein the hemispherical segment is a sphere segment with a height larger than the radius of the sphere. The volume of the spherical cavity is larger than the hemisphere and smaller than the sphere, the sphere is covered by the spherical cavity, but the height of the spherical cavity is smaller than the height of the sphere, so that a rotation avoiding space is reserved between the movable top cover and the sphere when the movable top cover and the sphere relatively rotate. The specific principle is that when the cilia are subjected to external load, the cilia drive the movable top cover to move, and meanwhile, the movable top cover drives the flexible film spherical cover attached to the surface of the movable top cover to deform, so that the conductive areas, the lengths and the like of conductive materials in different directions on the film are changed, the resistance of the piezoresistor in the corresponding direction is changed, and finally, the monitoring of high sensitivity and multidimensional micro-stress is realized.
Preferably, the inner diameter of the through-hole is equal to the diameter of the cilia. This is provided in order that the flexible membrane spherical cap is sensitive to the micro-stresses to which the cilia are subjected, thus increasing the sensitivity of the sensor as a whole.
Preferably, the material of the flexible film spherical cover is silicon rubber; the process of integrating piezoresistor on the spherical cover of the flexible film is that adding surfactant into the single-wall carbon nanotube to prepare uniform and stable carbon nanotube dispersion; and respectively electroplating a layer of copper at the corresponding position on the flexible film spherical cover to serve as an electrode of the piezoresistor, and then uniformly and directly writing a layer of carbon nano tube dispersion liquid on the flexible film spherical cover according to a set path by utilizing an ink-jet direct writing process to form the multichannel piezoresistor. In the present invention, carbon nanotubes are selected as the conductive material. The carbon nanotube solvent is prepared by a dispersion method combining physical ultrasound with non-covalent bond surface modification. The detailed process is to add a surfactant (TNWDIS) to single-walled carbon nanotubes (SWCNTs), and then to prepare a uniform and stable carbon nanotube dispersion by steps such as sonication and centrifugation. The uniform configuration of the carbon nanotube dispersion ensures excellent electrical and mechanical properties of the flexible thin film spherical cap, and the performance of the sensor is more stable. The material for preparing the flexible film spherical cover is silicon rubber, and is mainly prepared by a mixing and high-temperature vulcanization process. And electroplating a layer of copper on a specific position on the surface of the prepared flexible film spherical cover to serve as an electrode of the piezoresistive material. And uniformly and directly writing a layer of carbon nano tube conductive material on the rubber film according to a set path by using an ink-jet direct writing process to form the multichannel piezoresistor.
Preferably, the piezoresistor formed by the inkjet direct writing process is in a wave shape as a whole. More preferably, the number of piezoresistors is six or eight. In order to ensure the reliability of the sensor, six or eight wavy paths are designed to be used as the routing paths of the conductive materials, so that the structural area ratio of the sensitive layer is increased, and the multidimensional stress monitoring of the sensor can be realized. The whole piezoresistor can be set into other shapes according to actual needs.
Preferably, the cilia have a diameter of 1mm and a height of 3cm, and the cilia are made of polylactic acid. Cilia act as sensor tentacles, the preparation of which mainly utilizes a fused deposition rapid prototyping 3D printing process. The cilia preparation material is polylactic acid (PLA), the diameter of cilia is 1mm, and the height is 3cm, so that the arrangement structure is reasonable, and the sensitivity is higher. After cilia preparation is completed, ultraviolet curing glue is coated on the central round hole position of the top cover structure, and ultraviolet lamps are used for irradiating for 5min, so that tentacles are completely cured at the axis of the whole sensor.
Compared with the prior art, the technical scheme provided by the invention has the following advantages: the invention provides a flexible conformal bionic tentacle sensor, which greatly improves weak strain sensing capability and multi-direction monitoring capability of force electric coupling under flexible conformal conditions; the flexible film spherical cover of the bionic whisker sensor is used as a sensitive layer substrate, has good tensile property and larger deformation range, and the conductive material is directly written on the surface of the flexible film spherical cover by ink jet in different directions, so that the performance of the piezoresistor is stable, and the sensor is promoted to have ultrahigh sensitivity by combining a cavity structure formed in the flexible film spherical cover, so that the mechanical perception in a multidimensional direction can be realized, and the effective transmission of interface stress can be realized; in addition, through the MEMS process and the fused deposition rapid forming 3D printing process, the sensor can be prepared in batches on the conformal bionic whisker sensing array, and is hopeful to realize functions of obstacle avoidance, target object identification and the like of a microminiature bionic robot mouse by combining a rear-end information processing integrated circuit and an identification algorithm.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the description of the embodiments or the prior art will be briefly described below, and it will be obvious to those skilled in the art that other drawings can be obtained from these drawings without inventive effort.
FIG. 1 is a schematic diagram of an overall structure of a flexible conformal bionic whisker sensor according to an embodiment of the invention after a flexible thin film spherical cap is removed;
FIG. 2 is a front view of a flexible conformal bionic whisker sensor according to an embodiment of the invention with a flexible thin film spherical cap removed;
FIG. 3 is a schematic diagram of a flexible thin film spherical cap with piezoresistors according to an embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view of a flexible conformal bionic whisker sensor according to an embodiment of the invention;
FIG. 5 is a front view of the cylindrical base, truncated cone support and sphere of an embodiment of the present invention after attachment;
FIG. 6 is a diagram showing the whole structure of the cylindrical base, the truncated cone support and the sphere after being connected according to an embodiment of the present invention;
fig. 7 is a schematic diagram of a flexible thin film spherical cover of a flexible conformal bionic whisker sensor according to an embodiment of the invention when the flexible thin film spherical cover is transparent.
In the figure: 1. a cylindrical base; 2. a truncated cone support; 3. a movable top cover; 4. a sphere; 5. cilia; 6. a flexible thin film spherical cap; 7. a cavity; 8. a piezoresistor; 9. copper electrode.
Detailed Description
In order that the above objects, features and advantages of the invention will be more clearly understood, a further description of the invention will be made. It should be noted that, without conflict, the embodiments of the present invention and features in the embodiments may be combined with each other.
In the description, it should be noted that the terms "first," "second," and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. It should be noted that, unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms described above will be understood by those of ordinary skill in the art as the case may be.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced otherwise than as described herein; it will be apparent that the embodiments in the specification are only some, but not all, embodiments of the invention.
Specific embodiments of the present invention will be described in detail below with reference to fig. 1 to 7.
In one embodiment, as shown in the figure, a flexible conformal bionic whisker sensor comprises a cylindrical base 1, a cone frustum supporting piece 2, a movable top cover 3 and a flexible film spherical cover 6, wherein an annular groove coaxial with the cylindrical base 1 is formed in the periphery of the side wall of the cylindrical base 1, the cone frustum supporting piece 2 is fixedly connected to the top of the cylindrical base 1, a ball 4 is fixedly connected to the top of the cone frustum supporting piece 2, the ball 4 is a spherical gap larger than the hemisphere, the ball 4, the cone frustum supporting piece 2 and the cylindrical base 1 are coaxially arranged, a spherical cavity assembled with the ball 4 is formed in the movable top cover 3, the volume of the spherical cavity is larger than that of the hemisphere and smaller than that of the ball 4, the ball 4 and the spherical cavity together form a rotating assembly, cilia 5 are fixedly connected to the center of the top of the movable top cover 3, under the condition of no stress, the flexible film spherical cover 6 is integrally larger than that of the hemisphere, a through hole for penetrating the cilia 5 is formed in the top of the flexible film spherical cover 6, the flexible film spherical cover 6 is adhered to the spherical top cover 3 and the annular groove of the flexible top cover 6 in the spherical base 1, and the flexible film spherical cover 6 is adhered to the spherical top surface of the flexible top cover 3; the flexible film spherical cover 6 is fixedly provided with a plurality of piezoresistors 8 which are attached to the outer surface of the flexible film spherical cover and uniformly distributed along the spherical surface, the first ends of the piezoresistors 8 are all positioned at the top of the flexible film spherical cover 6 close to the through hole, the second ends of the piezoresistors 8 are all positioned at the bottom of the flexible film spherical cover 6, and copper electrodes 9 are all arranged at the two ends of the piezoresistors 8.
Wherein, spheroid 4, circular truncated cone support piece 2 and cylindrical base 1 are fixed connection in proper order, and during the concrete operation, movable top cap 3, spheroid 4, circular truncated cone support piece 2 and cylindrical base 1 all can adopt conventional resin to prepare. The ball 4 and the movable top cover 3 form a rotating structure similar to a universal connector, so that the movable top cover 3 moves more flexibly when being subjected to external load; the cilia 5 can drive the movable top cover 3 fixed with the cilia to rotate around the ball 4 after deflecting, and lubrication treatment such as coating a layer of lubricating oil can be carried out between the ball 4 and the inner cavity of the movable top cover 3, so that friction force is reduced. One of the side walls and the bottom wall of the movable top cover 3 is provided with a channel in the spherical cavity, which is convenient for installing the ball 4 to, and the channel is communicated with the spherical cavity. The cylindrical base 1 supports the truncated cone support 2, the sphere 4, the movable top cover 3 and the cilia 5 and also plays a role of a ring-buckling flexible film spherical cover 6. Meanwhile, as the flexible film spherical cover 6 is covered on the cylindrical base 1, a cavity 7 structure is formed in the flexible film spherical cover 6, and the cavity 7 structure can enable the flexible film spherical cover 6 to deform greatly under the action of external weak load, so that the micro-stress sensing capability of the sensor is greatly improved. Wherein the spherical cover 6 of the flexible film and the sphere 4 at the top of the truncated cone support 2 are spherical defects larger than a hemisphere, wherein the larger hemisphere refers to the defect that the height of the sphere is larger than the radius of the sphere 4. The volume of the spherical cavity is larger than the hemisphere and smaller than the sphere 4, the sphere 4 is covered by the spherical cavity, but the height of the spherical cavity is smaller than the height of the sphere 4, so that a rotation avoiding space is reserved between the movable top cover 3 and the sphere 4 when the movable top cover and the sphere 4 relatively rotate. A tiny gap is reserved between the electrode at the first end of the piezoresistor 8 and the through hole, the electrodes at the first end of the adjacent piezoresistor 8 are spaced, and the electrodes at the second end of the piezoresistor 8 are uniformly distributed along the circumferential direction of the bottom of the flexible film spherical cover 6.
The specific principle is that when the cilia 5 are subjected to external load, the cilia 5 drive the movable top cover 3 to move, and meanwhile, the movable top cover 3 drives the flexible film spherical cover 6 attached to the surface of the movable top cover to deform, so that the conductive areas, the lengths and the like of conductive materials in different directions on the film are changed, the resistance value of the piezoresistor 8 in the corresponding direction is changed, and finally, the monitoring of high sensitivity and multidimensional micro-stress is realized.
As a specific implementation of the embodiment of the invention, the inner diameter of the through-hole is equal to the diameter of the cilia 5. This is provided in order that the flexible membrane balloon cover 6 is sensitive to micro-stresses to which the cilia 5 are subjected, thus increasing the sensitivity of the sensor as a whole.
As a specific implementation manner in the embodiment of the invention, the material of the flexible film spherical cover 6 is silicon rubber; the process for integrating the piezoresistor 8 on the flexible film spherical cover 6 is that a surfactant is added into the single-wall carbon nano tube to prepare uniform and stable carbon nano tube dispersion liquid; and respectively electroplating a layer of copper at the corresponding position on the flexible film spherical cover 6 to serve as an electrode of the piezoresistor 8, and then uniformly and directly writing a layer of carbon nano tube dispersion liquid on the flexible film spherical cover 6 according to a set path by utilizing an ink-jet direct writing process to form the multichannel piezoresistor 8. In the present invention, carbon nanotubes are selected as the conductive material. The carbon nanotube solvent is prepared by a dispersion method combining physical ultrasound with non-covalent bond surface modification. The detailed process is to add a surfactant (TNWDIS) to single-walled carbon nanotubes (SWCNTs), and then to prepare a uniform and stable carbon nanotube dispersion by steps such as sonication and centrifugation. The uniform arrangement of the carbon nanotube dispersion ensures excellent electrical and mechanical properties of the flexible thin film spherical cap 6, making the sensor more stable in performance. The flexible film spherical cover 6 is made of silicon rubber and is mainly prepared by a mixing and high-temperature vulcanization process. A layer of copper is electroplated on a specific position on the surface of the prepared flexible film spherical cover 6 to serve as an electrode of the piezoresistive material. And uniformly and directly writing a layer of carbon nano tube conductive material on the rubber film according to a set path by using an ink-jet direct writing process to form the multichannel piezoresistor 8.
As a specific implementation manner in the embodiment of the present invention, the piezoresistor 8 formed by using the inkjet direct writing process is in a wave shape as a whole. More preferably, the number of piezoresistors 8 is six or eight. In order to ensure the reliability of the sensor, six or eight wavy paths are designed to be used as the routing paths of the conductive materials, so that the structural area ratio of the sensitive layer is increased, and the multidimensional stress monitoring of the sensor can be realized.
As a specific embodiment of the present embodiment, the cilia 5 have a diameter of 1mm and a height of 3cm, and the cilia 5 are made of polylactic acid. Cilia 5 act as sensor tentacles, the preparation of which mainly utilizes a fused deposition rapid prototyping 3D printing process. The cilia 5 are made of polylactic acid (PLA), the diameter of the cilia 5 is 1mm, and the height is 3cm, so that the structure is reasonable, and the sensitivity is high. After the cilia 5 are prepared, ultraviolet curing glue is coated on the central round hole of the top cover structure, and ultraviolet lamps are used for irradiating for 5min, so that tentacles are completely cured at the axis of the whole sensor.
The foregoing is only a specific embodiment of the invention to enable those skilled in the art to understand or practice the invention. Although described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the embodiments, and they should be construed as covering the scope of the appended claims.

Claims (6)

1. The utility model provides a flexible conformal bionic tentacle sensor, a serial communication port, including cylindrical base (1), circular truncated cone support (2), movable top cap (3) and flexible film spherical cap (6), open along its circumference on the lateral wall of cylindrical base (1) has the coaxial ring channel with cylindrical base (1), circular truncated cone support (2) fixedly connected to the top of cylindrical base (1), and circular truncated cone support (2) top fixedly connected with spheroid (4), spheroid (4) are the sphere that is greater than the hemisphere, spheroid (4), circular truncated cone support (2) and cylindrical base (1) coaxial setting, open in movable top cap (3) have with spheroid (4) assembled spherical chamber, the volume in spherical chamber is greater than the hemisphere and is less than spheroid (4), spheroid (4) and spherical chamber constitute rotation subassembly jointly, the top center fixedly connected with cilia (5) of movable top cap (3), under the circumstances of not bearing force, cilia (5) are located the axis of cylindrical base (1), flexible film spherical cap (6) are the sphere that is greater than the hemisphere, flexible film spherical cap (6) is greater than the sphere, flexible film (6) is used for wearing spherical cap (6), flexible film (3) is arranged at the top cap (6), flexible film is worn out The cone frustum supporting piece (2) is covered in the circular groove, the bottom of the circular cone frustum supporting piece is clamped in the circular groove on the side wall of the cylindrical base (1), the top surface of the movable top cover (3) is a curved surface attached to the surface of the flexible film spherical cover (6), and the top surface of the movable top cover (3) is adhered to the flexible film spherical cover (6); a plurality of piezoresistors (8) which are attached to the outer surface of the flexible film spherical cover (6) and are uniformly distributed along the spherical surface are fixedly arranged on the flexible film spherical cover (6), the first ends of the piezoresistors (8) are located at the top of the flexible film spherical cover (6) close to the through hole, the second ends of the piezoresistors (8) are located at the bottom of the flexible film spherical cover (6), and copper electrodes (9) are arranged at the two ends of the piezoresistors (8).
2. A flexible conformal bionic whisker sensor according to claim 1, wherein the inner diameter of the through hole is equal to the diameter of the cilia (5).
3. A flexible conformal bionic whisker sensor according to claim 2, wherein the material of the flexible thin film spherical cap (6) is silicone rubber; the process for integrating the piezoresistor (8) on the flexible film spherical cover (6) is that a surfactant is added into the single-wall carbon nano tube to prepare uniform and stable carbon nano tube dispersion liquid; and respectively electroplating a layer of copper at the corresponding position on the flexible film spherical cover (6) to serve as an electrode of the piezoresistor (8), and then uniformly and directly writing a layer of carbon nano tube dispersion liquid on the flexible film spherical cover (6) according to a set path by utilizing an ink-jet direct writing process to form the multichannel piezoresistor (8).
4. A flexible conformal bionic whisker sensor according to claim 3, wherein the piezo-resistor (8) formed by the inkjet direct writing process is wholly wave shaped.
5. A flexible conformal bionic whisker sensor according to claim 4, wherein the number of piezoresistors (8) is six.
6. A flexible conformal bionic whisker sensor according to claim 5, wherein the cilia (5) are 1mm in diameter and 3cm in height, and the cilia (5) are made of polylactic acid.
CN202311433044.9A 2023-11-01 2023-11-01 Flexible conformal bionic whisker sensor Active CN117147040B (en)

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