CN113131780A - Transparent flexible self-driven sensing device and preparation method thereof - Google Patents

Transparent flexible self-driven sensing device and preparation method thereof Download PDF

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Publication number
CN113131780A
CN113131780A CN202110245399.XA CN202110245399A CN113131780A CN 113131780 A CN113131780 A CN 113131780A CN 202110245399 A CN202110245399 A CN 202110245399A CN 113131780 A CN113131780 A CN 113131780A
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China
Prior art keywords
polydimethylsiloxane
lower electrode
driven
sensing device
self
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CN202110245399.XA
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Chinese (zh)
Inventor
余华
曹蔚琦
金湛
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Chongqing Nuoying 2d Materials Research Institute Co ltd
Chongqing University
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Chongqing Nuoying 2d Materials Research Institute Co ltd
Chongqing University
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Priority to CN202110245399.XA priority Critical patent/CN113131780A/en
Publication of CN113131780A publication Critical patent/CN113131780A/en
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/04—Friction generators
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5873—Removal of material

Abstract

The invention discloses a transparent flexible self-driven sensing device and a preparation method thereof, wherein the device comprises: the upper electrode, the polydimethylsiloxane friction layer and the lower electrode are sequentially arranged from top to bottom; the upper electrode and the lower electrode have the same structure. The preparation method comprises the following steps: utilizing a physical vapor deposition method to perform vapor deposition on the surface of the polyethylene glycol terephthalate film to deposit a copper film, and then etching the copper film into a copper net with a line width of 3 microns to prepare a transparent film; preparing a polydimethylsiloxane friction layer; and synthesizing the upper electrode, the lower electrode and the polydimethylsiloxane friction layer into a self-driven flexible transparent sensing device. The self-driven flexible transparent sensing device is prepared by using the transparent electrode and the transparent friction material.

Description

Transparent flexible self-driven sensing device and preparation method thereof
Technical Field
The invention relates to the field of sensing devices, in particular to a transparent flexible self-driven sensing device and a preparation method thereof.
Background
With the rapid development of mobile communication and internet technologies, the intelligent terminal and the mobile device are widely applied, and how to self-supply energy through the device when consuming a large amount of electric energy every day is a problem to be solved urgently.
In 2012, the dynasty professor team in wangzhong forest designed and made a novel energy conversion device from mechanical energy to electric energy, namely a friction nano generator (TENG), based on the principle of friction electrification and electrostatic induction. By attaching two polymer material films with good insulation and large difference in electron gaining and losing capacities, such as polyethylene terephthalate (PET) and polyimide (Kapton), to each other, tape sealing is used to ensure good contact between the two polymer surfaces. Good conductor films are prepared on the top and the bottom of the conductive film to be used as electrodes through a film coating process, when the conductive film is bent to enable the two films to rub against each other, the polyimide (Kapton) is charged with negative charges, the polyethylene terephthalate (PET) is charged with positive charges when the conductive film is discharged, and the two polymers are insulators, so that the rubbing charges exist on the surfaces of the two polymers for a long time. When the two polymer films are separated under the action of external force, the metal electrode can generate electric charges with equal electric quantity and opposite electric properties due to the electrostatic induction effect. When the two polymers are repeatedly contacted and separated, the induced charges repeatedly flow between the two electrodes, thereby completing the conversion from mechanical energy to electric energy.
The structure can change the electric signal under the action of different forces (stretching, compression and bending), and can be used as a sensor under a specific environment.
In general, an electrode material of a sensing device of the tribo-nanogenerator principle is generally a metal film (e.g., gold foil, copper foil, thickness of several micrometers or millimeters) or a conductive film (thickness of several nanometers or micrometers) using chemical deposition or physical deposition, which has extremely low transmittance or is opaque.
Disclosure of Invention
In order to solve the problems, the invention provides a transparent flexible self-driven sensing device and a preparation method thereof, and the invention provides the following scheme:
a transparent flexible self-driven sensing device comprising: the upper electrode, the polydimethylsiloxane friction layer and the lower electrode are sequentially arranged from top to bottom; the upper electrode and the lower electrode have the same structure.
Optionally, polymethyl methacrylate particles are further arranged between the polydimethylsiloxane friction layer and the lower electrode.
Optionally, the upper electrode and the lower electrode are both made of polyethylene terephthalate by depositing a copper film and then etching.
Optionally, the copper film surface of the upper electrode is disposed in contact with the polydimethylsiloxane rubbing layer, and the polyethylene terephthalate surface of the lower electrode is disposed in contact with the polydimethylsiloxane rubbing layer.
Optionally, an electrode and a lead are disposed on the copper film.
The invention also provides a preparation method of the transparent flexible self-driven sensing device, which comprises the following steps:
evaporating and depositing a copper film on the surface of the polyethylene glycol terephthalate film by using a physical vapor deposition method, and then etching to prepare an upper electrode and a lower electrode;
preparing a polydimethylsiloxane friction layer;
and synthesizing the upper electrode, the lower electrode and the polydimethylsiloxane friction layer into a self-driven flexible transparent sensing device.
Optionally, the preparing the upper electrode and the lower electrode specifically includes:
evaporating and depositing a copper film on the surface of the polyethylene glycol terephthalate film by using a physical vapor deposition method;
etching the copper film into a grid shape by laser etching;
electrodes and leads were prepared on the copper film.
Optionally, the preparing the polydimethylsiloxane friction layer specifically comprises:
mixing polydimethylsiloxane and a curing agent in a ratio of 10:1, uniformly coating the mixed solution on the surface of a silicon wafer in a spinning way, putting the silicon wafer into a vacuum drying oven, vacuumizing for 30 minutes, curing at 60 ℃ for 4 hours, thermally nanoimprinting a microstructure on the surface of one side of the polydimethylsiloxane after curing for increasing the friction contact area, and stripping the cured material from the silicon wafer when in use to obtain the polydimethylsiloxane friction layer.
Optionally, the synthesized self-driven flexible transparent sensing device specifically includes:
cutting the polydimethylsiloxane friction layer into a shape with the same size as the upper electrode, and directly attaching the surface without the microstructure to the upper copper film surface; the polyethylene glycol terephthalate surface of the lower electrode is arranged on the upper surface and is jointed with the surface with the microstructure of the polydimethylsiloxane friction layer to generate self-driving electric energy, and the copper film surface of the lower electrode is arranged downwards.
Optionally, the method further comprises:
polymethyl methacrylate is used as a solute, N, N-dimethylformamide is used as a solvent, a 1g/mL solution is prepared, and a spray gun is used for spraying polyethylene terephthalate on a lower electrode to solidify and form randomly distributed polymethyl methacrylate particles.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
the invention provides a transparent flexible self-driven sensing device and a preparation method thereof, wherein the device comprises: the upper electrode, the polydimethylsiloxane friction layer and the lower electrode are sequentially arranged from top to bottom; the upper electrode and the lower electrode have the same structure. The preparation method comprises the following steps: utilizing a physical vapor deposition method to perform vapor deposition on the surface of the polyethylene glycol terephthalate film to deposit a copper film and then etch the copper film into a copper net with a line width of 3 microns to prepare a transparent upper electrode and a transparent lower electrode; preparing a polydimethylsiloxane friction layer; and synthesizing the upper electrode, the lower electrode and the polydimethylsiloxane friction layer into a self-driven flexible transparent sensing device. The self-driven flexible transparent sensing device is prepared by using the transparent electrode and the transparent friction material.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a schematic structural diagram of a transparent flexible self-driven sensor device according to an embodiment of the present invention;
FIG. 2 is a graph of the response signal of the self-driven transparent sensor of the present invention;
FIG. 3 is a graph showing the relationship between the wavelength and transmittance of light in the visible wavelength range.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
As shown in fig. 1, a transparent flexible self-driven sensor device includes: the device comprises an upper electrode, a Polydimethylsiloxane (PDMS) friction layer and a lower electrode which are sequentially arranged from top to bottom; the upper electrode and the lower electrode have the same structure. Polymethyl methacrylate (PMMA) particles are further arranged between the polydimethylsiloxane friction layer and the lower electrode. The upper electrode and the lower electrode are both made of a copper film deposited on polyethylene terephthalate (PET). The copper film surface of the upper electrode is arranged in contact with the polydimethylsiloxane friction layer, and the polyethylene glycol terephthalate surface of the lower electrode is arranged in contact with the polydimethylsiloxane friction layer. And the copper film is provided with an electrode and a lead wire, so that a sensing signal can be transmitted.
Polyethylene terephthalate (PET) and Polydimethylsiloxane (PDMS) films are excellent in light transmittance. The invention uses the transparent electrode and the transparent friction material to prepare the self-driven flexible transparent sensing device.
The invention also provides a method for preparing the transparent flexible self-driven sensing device, which comprises the following steps:
and evaporating and depositing a copper film on the surface of the polyethylene glycol terephthalate film by using a physical vapor deposition method, and then etching to prepare an upper electrode and a lower electrode. Specifically, the method comprises the following steps: evaporating and depositing a copper film on the surface of the polyethylene glycol terephthalate film by using a physical vapor deposition method; etching the copper film into a grid shape by laser etching; electrodes and leads were prepared on the copper film.
A polydimethylsiloxane rubbing layer was prepared. Specifically, the method comprises the following steps: mixing polydimethylsiloxane and a curing agent in a ratio of 10:1, uniformly coating the mixed solution on the surface of a silicon wafer in a spinning way, putting the silicon wafer into a vacuum drying oven, vacuumizing for 30 minutes, curing at 60 ℃ for 4 hours, thermally nanoimprinting a microstructure on the surface of one side of the polydimethylsiloxane after curing for increasing the friction contact area, and stripping the cured material from the silicon wafer when in use to obtain the polydimethylsiloxane friction layer.
And synthesizing the upper electrode, the lower electrode and the polydimethylsiloxane friction layer into a self-driven flexible transparent sensing device. Specifically, the method comprises the following steps: cutting the polydimethylsiloxane friction layer into a shape with the same size as the upper electrode, and directly attaching the surface without the microstructure to the upper copper film surface; the polyethylene glycol terephthalate surface of the lower electrode is arranged on the upper surface and is jointed with the surface with the microstructure of the polydimethylsiloxane friction layer to generate self-driving electric energy, and the copper film surface of the lower electrode is arranged downwards.
Further comprising:
polymethyl methacrylate is used as a solute, N, N-dimethylformamide is used as a solvent, a 1g/mL solution is prepared, and a spray gun is used for spraying polyethylene terephthalate on a lower electrode to solidify and form randomly distributed polymethyl methacrylate particles.
The method is described in detail below:
step 1: preparing a copper mesh structural material A with polyethylene terephthalate (PET) as a substrate. And (2) evaporating and depositing a copper film on the surface of a polyethylene terephthalate (PET) film by using a physical vapor deposition method, wherein the thickness is set to be 2 microns, the PET film is copper yellow, the copper film is etched into a grid shape by laser etching in order to increase the transparency, the line width of the grid is 3 microns, and the resistivity of the copper film surface of the prepared complete material A is 6.7 omega/sq.
Step 2: a large surface area Polydimethylsiloxane (PDMS) friction material B was prepared. Fully mixing Polydimethylsiloxane (PDMS) and a curing agent in a ratio of 10:1, uniformly spin-coating the mixed solution on the surface of a silicon wafer, spin-coating, putting the silicon wafer into a vacuum drying oven, vacuumizing for 30 minutes, curing at 60 ℃ for 4 hours, and thermally nano-imprinting a microstructure on the surface of the Polydimethylsiloxane (PDMS) after curing to increase the surface area of the polydimethylsiloxane, so that the friction area is increased, and the material B is peeled off from the silicon wafer when the polydimethylsiloxane-based material B is used.
And step 3: a self-driven flexible transparent sensing device is synthesized. The structure schematic diagram is shown in figure 1: cutting a material A into a shape with an X size, wherein polyethylene terephthalate (PET) is arranged on the material A, and a copper film surface is arranged downwards to be used as an upper electrode; cutting the material B into a shape with the same size as the material A, and directly attaching the surface without the microstructure to the upper copper film surface; and thirdly, cutting the material A into the shape with the size, wherein polyethylene terephthalate (PET) is arranged on the upper part and forms a friction pair with one surface of the material B with a microstructure to generate self-driving electric energy, and the copper film surface is arranged downwards to be used as a lower electrode. In order to separate the upper friction material and the lower friction material after pressure is relieved, polymethyl methacrylate (PMMA) is used as a solute, N, N-Dimethylformamide (DMF) is used as a solvent, a solution with the concentration of 1g/mL is prepared, a spray gun is used for spraying polyethylene terephthalate (PET), and the randomly distributed polymethyl methacrylate (PMMA) isolation beads are formed through solidification. The step can be implemented before cutting, and the production efficiency is improved. The package of this structure is not described here in a limiting sense.
Verifying the response mechanism of the transparent flexible self-driven sensing device: the output voltage characterizing the self-driven flexible transparent sensing device is shown in fig. 2. When pressure is loaded, the sensor outputs voltage until the pressure is unloaded, the voltage is steadily at 0V after dropping sharply, and other stress and vibration modes can generate voltage signal responses in different forms.
The self-driven sensing device with the friction nano generator is prepared by using the copper mesh transparent electrode and the transparent friction material. The transmittance of the transparent flexible self-driven sensing device in a visible light range is not lower than 90% as shown in figure 3.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.

Claims (10)

1. A transparent flexible self-driven sensor device, comprising: the upper electrode, the polydimethylsiloxane friction layer and the lower electrode are sequentially arranged from top to bottom; the upper electrode and the lower electrode have the same structure.
2. The transparent flexible self-driven sensor device according to claim 1, wherein polymethyl methacrylate particles are further disposed between the polydimethylsiloxane friction layer and the lower electrode.
3. The transparent flexible self-driven sensor device according to claim 1, wherein the upper electrode and the lower electrode are made of polyethylene terephthalate by depositing a copper film thereon and then etching.
4. The transparent flexible self-driven sensing device according to claim 3, wherein the copper film surface of the upper electrode is disposed in contact with the polydimethylsiloxane rubbing layer, and the polyethylene terephthalate surface of the lower electrode is disposed in contact with the polydimethylsiloxane rubbing layer.
5. The transparent flexible self-driven sensing device according to claim 3, wherein electrodes and leads are disposed on the copper film.
6. A preparation method of a transparent flexible self-driven sensing device is characterized by comprising the following steps:
evaporating and depositing a copper film on the surface of the polyethylene glycol terephthalate film by using a physical vapor deposition method, and then etching to prepare an upper electrode and a lower electrode;
preparing a polydimethylsiloxane friction layer;
and synthesizing the upper electrode, the lower electrode and the polydimethylsiloxane friction layer into a self-driven flexible transparent sensing device.
7. The method for preparing the transparent flexible self-driven sensing device according to claim 6, wherein the preparing the upper electrode and the lower electrode specifically comprises:
evaporating and depositing a copper film on the surface of the polyethylene glycol terephthalate film by using a physical vapor deposition method;
etching the copper film into a grid shape by laser etching;
electrodes and leads were prepared on the copper film.
8. The method for preparing the transparent flexible self-driven sensing device according to claim 6, wherein the preparing the polydimethylsiloxane friction layer specifically comprises:
mixing polydimethylsiloxane and a curing agent in a ratio of 10:1, uniformly coating the mixed solution on the surface of a silicon wafer in a spinning way, putting the silicon wafer into a vacuum drying oven, vacuumizing for 30 minutes, curing at 60 ℃ for 4 hours, thermally nanoimprinting a microstructure on the surface of one side of the polydimethylsiloxane after curing for increasing the friction contact area, and stripping the cured material from the silicon wafer when in use to obtain the polydimethylsiloxane friction layer.
9. The method for manufacturing a transparent flexible self-driven sensor device according to claim 8, wherein the synthetic self-driven flexible transparent sensor device specifically comprises:
cutting the polydimethylsiloxane friction layer into a shape with the same size as the upper electrode, and directly attaching the surface without the microstructure to the upper copper film surface; the polyethylene glycol terephthalate surface of the lower electrode is arranged on the upper surface and is jointed with the surface with the microstructure of the polydimethylsiloxane friction layer to generate self-driving electric energy, and the copper film surface of the lower electrode is arranged downwards.
10. The method of making a transparent flexible self-driven sensing device according to claim 9, further comprising:
polymethyl methacrylate is used as a solute, N, N-dimethylformamide is used as a solvent, a 1g/mL solution is prepared, and a spray gun is used for spraying polyethylene terephthalate on a lower electrode to solidify and form randomly distributed polymethyl methacrylate particles.
CN202110245399.XA 2021-03-05 2021-03-05 Transparent flexible self-driven sensing device and preparation method thereof Pending CN113131780A (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102710166A (en) * 2012-04-13 2012-10-03 纳米新能源（唐山）有限责任公司 Friction generator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102710166A (en) * 2012-04-13 2012-10-03 纳米新能源（唐山）有限责任公司 Friction generator

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